Electrostatic lens for controlling an electron beam

By designing an electrostatic lens system and utilizing multiple electrodes and lens elements with independent voltage control, simplified control and efficient incident electron beams are achieved. This solves the problems of complexity and directional control uncertainty in existing lens systems, and improves the performance of the electron spectrometer.

CN114303229BActive Publication Date: 2026-07-21SHENGDA OMIKE CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHENGDA OMIKE CO LTD
Filing Date
2020-08-27
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In the prior art, the lens system of an electron spectrometer needs to deflect the electron beam multiple times to control its angular distribution, resulting in a complex structure and the need to change the direction of the electron beam at multiple locations, which increases the complexity and uncertainty of the system.

Method used

An electrostatic lens system is employed, comprising a deflector device and a deflector package containing multiple electrodes. By independently controlling the voltage of the electrodes and lens elements, the electron beam is deflected and focused twice, ensuring that the electron beam enters the measurement area at a controllable angle in a direction perpendicular to the optical axis.

Benefits of technology

The simplified lens system structure reduces the number of optical elements, improves the accuracy and consistency of electron beam direction control, and ensures effective incident of the electron beam in the measurement area, making it suitable for use in electronic spectrometers.

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Abstract

An apparatus (100) comprising an electrostatic lens (7) is described, the electrostatic lens comprising: an optical axis (6); a first electrostatic lens element (1); a second electrostatic lens element (2); and a deflector apparatus comprising a deflector package (5) having a plurality of electrodes (15) arranged circumferentially around the optical axis (6) between a first end (26) of the first electrostatic lens element (1) and a second end (29) of the second electrostatic lens element (2) and arranged to deflect an electron beam in at least a first coordinate direction (x, y) perpendicular to the optical axis (6). The deflector package (5) is arranged such that, during operation of the electrostatic lens (7), an electron travelling from the first electrostatic lens element (1) to the second electrostatic lens element (2) first passes through an electric field between the first electrostatic lens element (1) and the deflector package (5) and subsequently passes through an electric field between the deflector package (5) and the second electrostatic lens element (2).
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