Mask frame assembly and method of manufacturing organic light emitting display apparatus by using the same

Abstract

A mask frame assembly and a method of manufacturing an organic light emitting display apparatus by using the same are provided, the mask frame assembly including: (i) a frame including an opening portion; (ii) an open mask coupled to the frame to cover the opening portion, and including a main portion, a first rib, a second rib, and a first bridge portion, the main portion including a plurality of openings located in the opening portion, the first rib connected to the main portion and extending in a first direction away from a center of the main portion, the second rib connected to the main portion and extending in a second direction crossing the first direction and away from the center of the main portion, the first bridge portion connecting a first edge of the first rib in a direction toward the second rib to a second edge of the second rib in a direction toward the first rib; and (iii) a mask bar overlapping the open mask, having both ends coupled to the frame, and including a plurality of holes.

Description

[0001] This application claims priority to Korean Patent Application No. 10-2020-0126369, filed on September 28, 2020, with the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0002] This disclosure relates to a mask frame, and more particularly, to a mask frame assembly and a method of manufacturing an organic light-emitting display device using the mask frame assembly. Background Technology

[0003] In the manufacturing of various display devices, including organic light-emitting diode (OLED) display devices, a process is performed to form a second layer with a predetermined pattern on top of a first layer using a mask. This process is commonly referred to as deposition.

[0004] When using a mask to deposit a second layer, the mask should be supported to prevent it from sagging and thus distorting the geometry of the second layer as it is deposited. Therefore, tension is applied to the mask to hold it in place against the frame. However, there is a problem that the shape of the deposition area of ​​the mask may deform during this process. Summary of the Invention

[0005] According to one or more embodiments of the present disclosure, a mask frame assembly includes: (i) a frame including an opening portion; (ii) an open mask coupled to the frame and covering the opening portion, and including a main portion, a first rib, a second rib, and a first bridge portion, the main portion including a plurality of openings located within the opening portion, the first rib being connected to the main portion and extending in a first direction away from the center of the main portion, the second rib being connected to the main portion and extending in a second direction intersecting the first direction and away from the center of the main portion, the first bridge portion connecting a first edge of the first rib in a direction toward the second rib to a second edge of the second rib in a direction toward the first rib; and (iii) mask rods overlapping the open mask, each of the mask rods having an opposite end coupled to the frame and including a plurality of holes.

[0006] The main part, the first rib, the second rib, and the first bridge part can all be integrally formed as one piece.

[0007] The edge of the first bridge portion in the direction opposite to that toward the main portion may have a concave shape in the direction toward the main portion.

[0008] The edge of the first bridge portion in the direction opposite to that toward the main portion may have a curved shape.

[0009] The edge of the opening closest to the first bridge portion among the plurality of openings may include a portion having a shape symmetrical with respect to the shape of the edge of the first bridge portion in the direction opposite to that toward the main portion.

[0010] The edge of the first bridge portion in the direction opposite to that toward the main portion may have a circular shape with a radius R1.

[0011] The portion of the edge of the opening closest to the first bridge portion of the plurality of openings, adjacent to the first rib and the second rib, may have at least one segment of a circle with a radius R2.

[0012] The radius R1 can be about 25% or more of the radius R2.

[0013] The open mask may further include a third rib and a second bridge portion, the third rib being connected to the main portion, spaced apart from the first rib, and extending in the first direction, and the second bridge portion connecting the edge of the portion of the main portion between the third rib and the first rib to the third edge of the third rib in the direction toward the first rib.

[0014] The main part, the first rib, the second rib, the third rib, the first bridge part, and the second bridge part can all be integrally formed as one piece.

[0015] The edge of the second bridge portion in the direction toward the first rib may have a concave shape in the direction toward the intersection of an imaginary straight line and an edge line, the imaginary straight line extending in the extension direction of the third rib, and the edge line being the edge of the portion of the main portion between the third rib and the first rib.

[0016] The edge of the second bridge portion in the direction toward the first rib may have a curved shape.

[0017] The edge of the opening closest to the intersection in the direction opposite to the direction toward the second bridge portion relative to the intersection may include a portion whose shape is symmetrical with respect to the shape of the edge of the second bridge portion in the direction toward the first rib.

[0018] The edge of the second bridge portion in the direction toward the first rib may have a circular shape with a radius R1.

[0019] The portion of the third rib adjacent to the edge of the opening closest to the intersection point in a direction opposite to the direction toward the second bridge portion relative to the intersection point may have at least one segment of a circle with a radius R2.

[0020] The radius R1 can be about 25% or more of the radius R2.

[0021] The edge of the first bridge portion in the direction opposite to that toward the main portion may have a linear shape.

[0022] The portion of the edge of the opening closest to the first bridge portion, adjacent to the first rib and the second rib, may have at least one segment of a circle with a radius R2, and the length of the edge of the first bridge portion in the direction opposite to the direction toward the main portion may be about 35% or greater of the radius R2, and may be about 100% or less of the radius R2.

[0023] The open mask may further include a cleaning fluid discharge port located at the first bridge portion.

[0024] According to one or more embodiments, a method of manufacturing an organic light-emitting display device includes: forming a pixel electrode on a substrate; forming an intermediate layer on the pixel electrode using any of the above-described mask frame components; and forming a counter electrode on the intermediate layer.

[0025] According to one or more embodiments of this disclosure, a mask frame assembly includes: a frame including an opening portion; and an open mask coupled to the frame. The open mask includes a first rib, a second rib, and a bridge portion, the first rib extending in a first direction, the second rib extending in a second direction different from the first direction, and the bridge portion connecting the first rib and the second rib, the bridge portion having a curved shape. The open mask further includes a plurality of openings.

[0026] Each of the plurality of openings may correspond to a display device to be manufactured. Each of the plurality of openings may have a circular shape. Attached Figure Description

[0027] The above and other aspects, features and elements of particular embodiments will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0028] Figure 1 This is a schematic diagram of a deposition apparatus for performing deposition using a mask frame assembly according to an embodiment of the present disclosure;

[0029] Figure 2This is an exploded perspective view schematically illustrating a mask frame assembly according to an embodiment of the present disclosure;

[0030] Figure 3 This is a schematic illustration of what may be included in Figure 2 A plan view of the open mask in the mask frame assembly;

[0031] Figure 4 It is shown schematically. Figure 3 A plan view of region B;

[0032] Figure 5 This is a schematic plan view of the open mask according to the comparative example;

[0033] Figure 6 This is a plan view schematically illustrating a portion of an open mask of a mask frame assembly according to an embodiment of the present disclosure;

[0034] Figure 7 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure;

[0035] Figure 8 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure;

[0036] Figure 9 It is shown schematically. Figure 8 A plan view of region C;

[0037] Figure 10 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure;

[0038] Figure 11 It is shown schematically. Figure 10 A plan view of region D;

[0039] Figure 12 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure;

[0040] Figure 13 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure; and

[0041] Figure 14 This is a schematic cross-sectional view of a portion of an organic light-emitting display device manufactured according to an embodiment of the present disclosure. Detailed Implementation

[0042] Referring now to the embodiments, examples of which are illustrated in the accompanying drawings, wherein the same reference numerals throughout the specification and drawings may refer to the same elements. In this respect, the embodiments may take different forms and are not necessarily to be construed as limited to the description set forth herein. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. In this disclosure, the expression “at least one of a, b, and c” throughout means only a, only b, only c, both a and b, both a and c, both b and c, all a, b, and c, or variations thereof.

[0043] This disclosure may include various embodiments and variations, and specific embodiments thereof are illustrated in the accompanying drawings and will be described in detail herein. The effects and features of this disclosure, and methods of implementation thereof, will become apparent from the embodiments described in detail below with reference to the accompanying drawings. However, this disclosure is not necessarily limited to the embodiments described below and may be implemented in various modes.

[0044] In the following description, embodiments will be described in detail with reference to the accompanying drawings, and in the following description, the same reference numerals may denote the same elements, and to the extent that the description of a particular element is omitted from the specification, it may be assumed that these elements are at least similar to the corresponding elements described elsewhere in the specification.

[0045] It should be understood that when an element such as a layer, region, or plate is referred to as being “on” another element, it may be “directly” on that element, or “indirectly” on that element if there are one or more intervening elements therebetween. Furthermore, for ease of description, the dimensions of elements in the accompanying drawings may be exaggerated.

[0046] Furthermore, in this paper, the X-axis, Y-axis, and Z-axis are not limited to the three axes of a Cartesian coordinate system and can be interpreted in a broader sense. For example, the X-axis, Y-axis, and Z-axis can be perpendicular to each other, or they can represent different directions that are not perpendicular to each other.

[0047] Figure 1 This is a schematic diagram of a deposition apparatus 100 for performing deposition using a mask frame assembly according to an embodiment of the present disclosure.

[0048] like Figure 1 As shown, the deposition apparatus 100 may include a processing chamber 110, a deposition source 120 located on one side of the processing chamber 110, a mask frame assembly 200 disposed between the deposition source 120 and the substrate S, and a holder 130 configured to support the substrate S. Furthermore, the deposition apparatus 100 may further include various other components as needed. For example, the deposition apparatus 100 may further include a contact unit 300 configured to press the substrate S together with the mask frame assembly 200. The contact unit 300 may include, for example, a permanent magnet or an electromagnet.

[0049] Processing chamber 110 provides space in which deposition processes for depositing thin films with predetermined patterns on substrate S can be performed. Deposition source 120, capable of storing and discharging material to be deposited on substrate S, may be located on one side of processing chamber 110. Holder 130 supports substrate S and mask frame assembly 200 such that the positions of substrate S and mask frame assembly 200 do not change during deposition. Holder 130 may include a first support 132 for supporting substrate S and a second support 134 for supporting mask frame assembly 200. In this case, mask frame assembly 200 may be disposed between substrate S and deposition source 120, such as... Figure 1 As shown.

[0050] The mask frame assembly 200 allows a deposition target material emitted from the deposition source 120 to be deposited on the substrate S in the form of a thin film with a predetermined pattern. For this purpose, the mask frame assembly 200 may include a plurality of mask rods 220, an open mask 210, and a frame 230, in which openings are formed in the frame 230 with shapes corresponding to the shape of the thin film to be formed on the substrate S.

[0051] Figure 2 This is a schematic exploded perspective view of the mask frame assembly 200 according to an embodiment. Figure 2 As shown, the mask frame assembly 200 according to this embodiment may include a frame 230, an open mask 210, and a mask rod 220.

[0052] Frame 230 may include an opening 235. Frame 230 may define the overall appearance of mask frame assembly 200 and may also support open mask 210 and mask rod 220. Frame 230 may include various materials and may include, for example, nickel-iron alloys such as 64FeNi (e.g., Invar alloy) to minimize deformation in the high-temperature environment in which deposition is performed and to minimize damage caused by cleaning fluids, etc., even during post-use cleaning processes.

[0053] The open mask 210 can be attached to the frame 230 to cover the opening 235 of the frame 230, and as... Figure 2 As shown, the open mask 210 may include a plurality of openings 215 located within the opening portion 235 of the frame 230. For example, each of the openings 215 may correspond to a display device to be manufactured and may have a circular shape. Figure 2 A mask frame assembly 200 is shown that can be used to manufacture multiple display devices simultaneously, the display devices including a display area having a generally circular shape (e.g., a shape with circular segments, as shown). However, this disclosure is not necessarily limited to this, and the shape of the opening 215 of the open mask 210 can be modified in various ways. For example, the open mask 210 may be formed of Invar alloy.

[0054] When the open mask 210 sags under its own weight, the shape of the layer deposited on the substrate S may differ from its desired shape. Therefore, to prevent this, the open mask 210 can be attached to the frame 230 while applying a force pointing outward from the center of the opening portion 235 of the frame 230. The frame 230 may have sufficient thickness and rigidity to prevent deformation caused by the tension applied to the open mask 210 or to minimize the degree of deformation. The open mask 210 can be attached to the frame 230 by, for example, adhesive bonding, brazing, welding, etc.

[0055] like Figure 2 As shown, each of the mask rods 220 may have a shape extending, for example, in one direction (which may be referred to as the Y-axis direction). Each of the mask rods 220 may overlap with the open mask 210, and its two (opposite) ends in the extending direction (Y-axis direction) may be connected to the frame 230. Figure 2 As shown, the mask rod 220 may include a plurality of holes 225, and each of the holes 225 may have a slit shape extending in one direction (which may be referred to as the Y-axis direction). However, this disclosure is not necessarily limited thereto, and the shape of the holes 225 of the mask rod 220 may be modified in various ways. The holes 225 formed in each of the mask rods 220 may correspond to the shape of the layer to be formed on the substrate S.

[0056] When the mask rod 220 sags due to its own weight, the shape of the layer deposited on the substrate S may differ from its intended shape. Therefore, to prevent this, the mask rod 220 can be attached to the frame 230 while its ends are pulled in opposite directions (in the +Y and -Y directions). The frame 230 may have sufficient thickness and rigidity to prevent deformation caused by the tension applied to the mask rod 220 or to minimize the degree of deformation. The mask rod 220 can be attached to the frame 230 by, for example, adhesive bonding, brazing, welding, etc.

[0057] The mask rod 220 may be formed from a thin metal sheet. For example, the mask rod 220 may include a thin nickel plate, etc.

[0058] also, Figure 2 A masking mask 227 is shown located outside the mask rod 220 (in both the +X and -X directions) and attached to the frame 230. Unlike the mask rod 220, the masking mask 227 may not include any holes. The masking mask 227 prevents material from being unnecessarily deposited at the edges of the substrate S.

[0059] Figure 3 This is a schematic illustration of what may be included in Figure 2 A plan view of the open mask 210 in the mask frame assembly 200, and Figure 4It is shown schematically. Figure 3 A plan view of area B. For convenience, Figure 3 The open mask 210 is shown to include four openings 215.

[0060] As described above, the open mask 210 can be coupled to the frame 230 to cover the opening portion 235 of the frame 230. The open mask 210 may include a main portion MP, a first rib SP1, a second rib SP2, and a first bridge portion BR1. Figure 3 and Figure 4 As shown, the main part MP, the first rib SP1, the second rib SP2 and the first bridge part BR1 can be integrally formed into a single body.

[0061] The main portion MP may be a portion that forms the general shape of the open mask 210, and may include a plurality of openings 215 located within the opening portion 235 of the frame 230. For example, the main portion MP may occupy the majority of the open mask 210 that does not contact the frame 230.

[0062] A first rib SP1 may be connected to a main portion MP. The first rib SP1 may have a shape extending primarily in a first direction (-X direction) away from the center of the main portion MP. A second rib SP2 may also be connected to the main portion MP, and the second rib SP2 may extend primarily in a second direction (+Y direction) intersecting the first direction (-X direction) where the first rib SP1 extends and away from the center of the main portion MP. A first bridge portion BR1 may connect the first rib SP1 to the second rib SP2. For example, the first bridge portion BR1 may connect a first edge EG1 of the first rib SP1 in the direction toward the second rib SP2 to a second edge EG2 of the second rib SP2 in the direction toward the first rib SP1.

[0063] As described above, the open mask 210 can be attached to the frame 230 while applying a force pointing outward from the center of the opening portion 235 of the frame 230 to the open mask 210. For example, the open mask 210 can be attached to the frame 230 while applying tension to the first rib SP1 in the direction in which the first rib SP1 extends (-X direction) and applying tension to the second rib SP2 in the direction in which the second rib SP2 extends (+Y direction).

[0064] When the open mask 210 does not include the first bridge portion BR1, the open mask 210 may have Figure 5 The shape shown Figure 5This is a schematic plan view of a mask frame assembly according to a comparative example. In the case of the open mask 210 according to the comparative example, when tension is applied to the first rib SP1 in the direction in which the first rib SP1 extends (-X direction) and tension is applied to the second rib SP2 in the direction in which the second rib SP2 extends (+Y direction), the shape of the portion A adjacent to the openings of the first rib SP1 and the second rib SP2 may be deformed. Furthermore, non-uniform shapes (such as wavy shapes) may deform in the region A' between the first rib SP1 and / or the second rib SP2 and the portion A. This may ultimately reduce the quality of the deposited layer, thereby reducing the quality of the manufactured display device or causing defects in the display device.

[0065] However, according to embodiments of this disclosure, the open mask 210 included in the mask frame assembly 200 may include the above references. Figure 3 and Figure 4 The first bridge portion BR1 is described. When tension is applied to the first rib SP1 in the direction in which the first rib SP1 mainly extends (-X direction) and tension is applied to the second rib SP2 in the direction in which the second rib SP2 mainly extends (+Y direction), the first bridge portion BR1 can effectively prevent or minimize stress concentration on portion A adjacent to the opening 215a closest to the first rib SP1 and the second rib SP2. Therefore, shape deformation of the opening 215a in portion A can be prevented or minimized.

[0066] like Figure 3 and Figure 4 As shown, the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP may have a shape that is concave in the direction towards the main portion MP. In this case, as... Figure 3 and Figure 4 As shown, the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP can have a curved shape. Therefore, when tension is applied to the first rib SP1 in the direction in which the first rib SP1 extends (-X direction) and to the second rib SP2 in the direction in which the second rib SP2 extends (+Y direction), the tension can be effectively distributed within the first bridge portion BR1. This effectively prevents or minimizes stress concentration on the portion A adjacent to the first rib SP1 and the second rib SP2, at the opening 215a closest to the first rib SP1 and the second rib SP2.

[0067] For example, the edge of the opening 215a closest to the first bridge portion BR1 among the plurality of openings 215 of the open mask 210 may include a portion A whose shape substantially corresponds to the shape of the edge BRG1 of the first bridge portion BR1 in the direction opposite to that toward the main portion MP. Conversely, it can be understood that the shape of the edge BRG1 of the first bridge portion BR1 in the direction opposite to that toward the main portion MP corresponds to the shape of the portion A closest to the opening 215a of the first bridge portion BR1.

[0068] Therefore, the portion of the open mask 210 surrounded by the first rib SP1, the second rib SP2, and the opening 215 closest to the first bridge portion BR1 among the plurality of openings 215 of the open mask 210 may have the same characteristics as the portion of the open mask 210 surrounded by the openings 215 (e.g., Figure 3 The shape is substantially similar to that of the central portion of the open mask 210. Therefore, the application of stresses of different magnitudes to the portion A adjacent to the first rib SP1 and the second rib SP2 of the opening 215a closest to the first rib SP1 and the second rib SP2 can be minimized. When a stress of significantly different magnitudes than that of the other portions is applied to the portion A adjacent to the first rib SP1 and the second rib SP2 of the opening 215a closest to the first rib SP1 and the second rib SP2, undesirable local deformation may occur in that portion.

[0069] like Figure 4 As shown, the portion A adjacent to the opening 215a of the first rib SP1 and the second rib SP2, and closest to them, may have at least one segment of a circle with radius R2. As used herein, the phrase "a segment of a circle with radius X" refers to a circular segment of a circle with radius X having a flat side, as if a portion of the circle were removed by a chord (the line between two points on the circle). In this case, the edge BRG1 of the first bridge portion BR1 in the direction opposite to that toward the main portion MP may also have a segment of a circle. Figure 4 The first bridge section BR1 is shown to have a circular shape with a radius R1 at its edge BRG1 in the direction opposite to that towards the main section MP. In this case, the radius R1 can be about 25% or more of the radius R2.

[0070] If R1 is less than approximately 25% of R2, then when tension is applied to the first rib SP1 in the direction in which the first rib SP1 extends (-X direction) and to the second rib SP2 in the direction in which the second rib SP2 extends (+Y direction), the tension may not be effectively distributed in the first bridge portion BR1. This may cause shape deformation in the portion A adjacent to the opening 215a closest to the first and second ribs SP1 and SP2. Furthermore, non-uniform shape (such as wavy) deformation may occur in the region A' between the first rib SP1 and / or the second rib SP2 and portion A. This may ultimately reduce the quality of the deposited layer, thereby reducing the quality of the manufactured display device or causing defects in the display device. Therefore, for example, radius R1 can be approximately 25% or greater than radius R2.

[0071] For reference, the radius of curvature R1 of the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP can theoretically be infinitely large. An infinitely large R1 could mean that the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP has a linear shape, and this situation will be described below.

[0072] Figure 6 This is a plan view schematically illustrating a portion of an open mask of a mask frame assembly according to an embodiment of the present disclosure. As seen in this figure, the edge of the opening 215a closest to the first bridge portion BR1 among the plurality of openings 215 of the open mask 210 may include a portion A having a shape symmetrical to the shape of the edge BRG1 of the first bridge portion BR1 in a direction opposite to that toward the main portion MP. Conversely, it can be understood that the shape of the edge BRG1 of the first bridge portion BR1 in a direction opposite to that toward the main portion MP is symmetrical to the shape of the portion A closest to the opening 215a of the first bridge portion BR1.

[0073] Therefore, as Figure 6 As shown, when the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP has a circular shape with a radius R1, and the portion A closest to the opening 215a of the first rib SP1 and the second rib SP2 has at least a circular shape with a radius R2, R1 can be equal to R2. Here, portion A is the portion adjacent to the first rib SP1 and the second rib SP2.

[0074] Therefore, the portion of the open mask 210 surrounded by the first rib SP1, the second rib SP2, and the opening 215 closest to the first bridge portion BR1 among the plurality of openings 215 of the open mask 210 may have the same characteristics as the portion of the open mask 210 surrounded by the openings 215 (e.g., Figure 3The shape of the open mask 210 is the same as that of the central portion. Therefore, the application of stress of different magnitude to the portion A adjacent to the first rib SP1 and the second rib SP2 of the opening 215a closest to the first rib SP1 and the second rib SP2 can be minimized. When a stress of different magnitude than that of the other portions is applied to the portion A closest to the opening 215a of the first rib SP1 and the second rib SP2, undesirable local deformation may occur in that portion.

[0075] Although the first rib SP1, the second rib SP2, and the first bridge portion BR1 have been described above, this disclosure is not necessarily limited thereto. Figure 3 As shown, the open mask 210 may include a third rib SP3 and a second bridge portion BR2. (As...) Figure 3 As shown, the main part MP, the first rib SP1, the second rib SP2, the third rib SP3, the first bridge part BR1, and the second bridge part BR2 can be integrally formed into a main body.

[0076] The third rib SP3 may be connected to the main portion MP and may be spaced apart from the first rib SP1. Similar to the first rib SP1, the third rib SP3 may have a shape extending in a first direction (-X direction) away from the center of the main portion MP. Furthermore, the second bridge portion BR2 may connect the edge MEG of the portion of the main portion MP between the third rib SP3 and the first rib SP1 to the third edge EG3 of the third rib SP3 in the direction toward the first rib SP1.

[0077] As described above, the open mask 210 can be attached to the frame 230 while a force is applied to the open mask 210 pointing outward from the center of the opening portion 235 of the frame 230. Therefore, similar to the first rib SP1, the open mask 210 can be attached to the frame 230 while tension is applied to the third rib SP3 in the direction (-X direction) where the third rib SP3 extends.

[0078] When the open mask 210 does not include the second bridge portion BR2, the open mask 210 may have a similar shape to... Figure 5 The shape shown. Figure 5 This is a schematic plan view of the mask frame assembly according to a comparative example. In the case of the open mask 210 according to the comparative example, when tension is applied to the third rib SP3 in the direction in which the third rib SP3 extends (-X direction), the shape of the portion adjacent to the third rib SP3, closest to the opening, may deform. Furthermore, non-uniform shape (such as wavy) deformation may occur in the region between the third rib SP3 and this portion. This may ultimately reduce the quality of the deposited layer, thereby reducing the quality of the manufactured display device or causing defects in the display device.

[0079] However, the open mask 210 included in the mask frame assembly 200 according to this embodiment may include the above reference. Figure 3 The second bridge portion BR2 is described. When tension is applied to the third rib SP3 in the direction (-X direction) along which the third rib SP3 extends, the second bridge portion BR2 effectively prevents or minimizes stress concentration on the portion adjacent to the third rib SP3 near the opening. Therefore, shape deformation of the opening in this portion can be prevented or minimized.

[0080] like Figure 3 As shown, the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 may have a concave shape in the direction toward the intersection P between the imaginary straight line IL and the edge line. Here, the edge line is the edge MEG of the main portion MP between the third rib SP3 and the first rib SP1. The imaginary straight line IL extends in the extension direction (-X direction) of the third rib SP3. For example, the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 may have a curved shape. Therefore, when tension is applied to the third rib SP3 in the direction in which the third rib SP3 extends (-X direction), the tension can be effectively distributed in the second bridge portion BR2. This can effectively prevent or minimize stress concentration on the portion adjacent to the third rib SP3 at the opening 215b closest to the intersection P in the direction opposite to the direction toward the second bridge portion BR2 relative to the intersection P.

[0081] For example, the edge of the opening 215b closest to the intersection point P in the direction opposite to the direction relative to the intersection point P toward the second bridge portion BR2 of the open mask 210 may include a portion A” whose shape substantially corresponds to the shape of the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1. Conversely, it can be understood that the shape of the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 corresponds to the shape of the portion A” of the edge of the opening 215b closest to the intersection point P in the direction opposite to the direction relative to the intersection point P toward the second bridge portion BR2.

[0082] Therefore, the portion of the open mask 210 surrounded by the third rib SP3 and the opening closest to the intersection point P among the plurality of openings 215 of the open mask 210 can have the same characteristics as the portion of the open mask 210 surrounded by the openings 215 (e.g., Figure 3 The shape is basically similar to that of the central part of the open mask 210. Therefore, the application of stress of different magnitude to the part A” closest to the edge of the opening 215b in the direction opposite to the direction relative to the intersection point P toward the second bridge part BR2 can be minimized.

[0083] As shown above (refer to the reference) Figure 4The portion A” of the third rib SP3, located near the edge of the opening 215b closest to the intersection point P in the direction opposite to the direction toward the second bridge portion BR2 relative to the intersection point P, may also have at least one segment of a circular shape with a radius R2. In this case, the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 may also have a segment of a circular shape. For example, the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 may have a segment of a circular shape with a radius R1. In this case, the radius R1 may be about 25% or more of the radius R2. In this respect, the above description can also be applied to the edge BRG2 of the second bridge portion BR2.

[0084] In addition, as referred to above Figure 6 As described, the edge of the opening 215b closest to the intersection point P in the direction opposite to the direction relative to the intersection point P toward the second bridge portion BR2 of the open mask 210 may include a portion having a shape symmetrical to the shape of the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1. Conversely, it can be understood that the shape of the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 is symmetrical to the shape of the portion A” of the opening 215b closest to the intersection point P in the direction opposite to the direction relative to the intersection point P toward the second bridge portion BR2.

[0085] In this case, when the edge BRG2 of the second bridge portion BR2 in the direction toward the first rib SP1 has a circular shape with a radius R1, and the portion A” of the opening 215b closest to the intersection point P in the direction opposite to the direction toward the second bridge portion BR2 relative to the intersection point P has at least a circular shape with a radius R2, R1 can be equal to R2. In this respect, the above description can also be applied to the edge BRG2 of the second bridge portion BR2. Here, portion A” is the portion adjacent to the third rib SP3.

[0086] Figure 7 This is a schematic plan view of the open mask 210 of the mask frame assembly 200 according to an embodiment of the present disclosure. Figure 7 The open mask 210 shown may differ from the open mask 210 of the mask frame assembly 200 according to the above embodiment in that it further includes auxiliary ribs ASP. For example, the auxiliary ribs ASP may be disposed between the first rib SP1 and the third rib SP3, and similarly the first rib SP1 and the third rib SP3 may have a shape extending in a first direction (-X direction) away from the center of the main portion MP.

[0087] However, the bridge portion as described above may not be located between the edge of the auxiliary rib ASP in the direction towards the first rib SP1 or the edge of the auxiliary rib ASP in the direction towards the third rib SP3 and the edge MEG of the main portion MP in the portion between the first rib SP1 and the third rib SP3. For example, the edges of the auxiliary rib ASP in the direction towards the first rib SP1 and the edges of the auxiliary rib ASP in the direction towards the third rib SP3 may intersect vertically with the edge MEG of the main portion MP in the portion between the first rib SP1 and the third rib SP3. This is because the open mask 210 can be connected to the frame 230 while tension is also applied to the auxiliary rib ASP, but the deformation of the opening 215 caused by the auxiliary rib ASP will not occur significantly.

[0088] For reference, since the mask rod 220 has a shape extending in one direction (Y-axis direction), the auxiliary rib ASP can be connected to the edge (e.g., edge MEG) of the main part MP that is parallel to that direction (Y-axis direction). For example, the auxiliary rib ASP may not be in the edge of the main part MP in a direction intersecting that direction (X-axis direction). This is to ensure that the mask rod 220 can be directly fixed to the space of the frame 230.

[0089] Figure 8 This is a schematic plan view of the open mask 210 of the mask frame assembly 200 according to an embodiment of the present disclosure, and Figure 9 It is shown schematically. Figure 8 A plan view of region C. (See attached image.) Figure 8 and Figure 9 As shown, the open mask 210 may further include a cleaning fluid discharge port TH1 formed in the first bridge portion BR1.

[0090] The mask frame assembly 200 may not be disposable (e.g., it may be reusable). However, during a deposition process using the mask frame assembly 200, deposition material may be deposited on it. Therefore, if necessary, the mask frame assembly 200 may be cleaned by immersing it in a cleaning solution before reuse. In this case, when the mask frame assembly 200 is used during deposition with the cleaning solution in the space between the open mask 210 and the mask rod 220, the cleaning solution may leak during deposition, leading to defects in the manufactured product.

[0091] In the case of the mask frame assembly 200 according to this embodiment, the open mask 210 may include a cleaning fluid discharge port TH1 formed in the first bridge portion BR1. Therefore, during the cleaning process, the cleaning fluid that has penetrated into the space between the open mask 210 and the mask rod 220 can be easily discharged to the outside through the cleaning fluid discharge port TH1.

[0092] Furthermore, the cleaning fluid discharge port TH1 can be located not only in the first bridge section BR1, but also in the first rib SP1, such as... Figure 8 As shown. However, even in this case, the cleaning fluid discharge port TH1 may not be located on the central axis of the first rib SP1. This is to prevent defects such as at least a portion of the first rib SP1 breaking off during the process of attaching the open mask 210 to the frame 230 while the first rib SP1 is under tension.

[0093] like Figure 8 As shown, the cleaning fluid discharge port TH1 can also be formed in the second bridge section BR2. For example... Figure 9 As shown, the cleaning fluid discharge port TH2 can also be formed between the first bridge portion BR1 and the portion A adjacent to the first rib SP1 and the second rib SP2, near the opening 215a closest to the first rib SP1 and the second rib SP2. In this case, the number of cleaning fluid discharge ports TH2 can be less than the number of cleaning fluid discharge ports TH1, but the area of ​​each of the cleaning fluid discharge ports TH2 can be larger than the area of ​​each of the cleaning fluid discharge ports TH1. Figure 8 As shown, cleaning fluid discharge ports TH3 can also be formed between the openings 215 of the open mask 210. The area of ​​each of the cleaning fluid discharge ports TH3 can be larger than the area of ​​each of the cleaning fluid discharge ports TH1. For example, the area of ​​each of the cleaning fluid discharge ports TH3 can be equal to the area of ​​each of the cleaning fluid discharge ports TH2.

[0094] Figure 10 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure, and Figure 11 It is shown schematically. Figure 10 A plan view of region D. For example... Figure 10 and Figure 11 As shown, the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP can have a linear shape. In this case, the portion A adjacent to the opening 215a closest to the first rib SP1 and the second rib SP2 can have at least one segment of a circle with a radius R2. Furthermore, the length of the edge BRG1 of the first bridge portion BR1 in the direction opposite to that towards the main portion MP can be approximately 35% to approximately 100% of R2.

[0095] When the length of the edge BRG1 of the first bridge portion BR1 is less than approximately 35% of R2, the area of ​​the first bridge portion BR1 may be insufficient. Therefore, when tension is applied to the first rib SP1 in the direction in which the first rib SP1 extends (-X direction) and to the second rib SP2 in the direction in which the second rib SP2 extends (+y direction), the tension may not be effectively distributed within the first bridge portion BR1. This can lead to shape deformation of the portion A adjacent to the openings 215a closest to the first and second ribs SP1 and SP2. Furthermore, non-uniform shape (such as wavy) deformation may occur in the region A' between the first rib SP1 and / or the second rib SP2 and portion A. This may ultimately reduce the quality of the deposited layer, thereby reducing the quality of the manufactured display device or causing defects in the display device. Therefore, for example, the length of the edge BRG1 of the first bridge portion BR1 can be approximately 35% or more of R2.

[0096] When the length of the edge BRG1 of the first bridge section BR1 is greater than approximately 100% of R2, this may result in insufficient space for attaching the mask rod 220 to the frame 230. (Refer to the above...) Figure 7 As described, the mask rod 220 may have a shape extending in one direction (Y-axis direction), and both ends of the mask rod 220 (in the +Y and -Y directions) may be directly fixed to the frame 230. When the length of the edge BRG1 of the first bridge portion BR1 is greater than approximately 100% of R2, it may not be possible to ensure that both ends of the mask rod 220 (in the +Y and -Y directions) can be directly fixed to the frame 230. Therefore, for example, the length of the edge BRG1 of the first bridge portion BR1 may be approximately 100% or less of R2.

[0097] In addition, such as Figure 10 and Figure 11 As shown, the open mask 210 may further include a cleaning fluid discharge port TH1 formed in the first bridge portion BR1.

[0098] The mask frame assembly 200 can be reusable. However, during a deposition process using the mask frame assembly 200, deposition material may be deposited on it. Therefore, if necessary, the mask frame assembly 200 can be cleaned by immersing it in a cleaning solution before reuse. In this case, when the mask frame assembly 200 is used during deposition with the cleaning solution in the space between the open mask 210 and the mask rod 220, the cleaning solution may leak during deposition, leading to defects in the manufactured product.

[0099] In the case of the mask frame assembly 200 according to this embodiment, the open mask 210 may include a cleaning fluid discharge port TH1 formed in the first bridge portion BR1. Therefore, during the cleaning process, the cleaning fluid that has penetrated into the space between the open mask 210 and the mask rod 220 can be easily discharged through the cleaning fluid discharge port TH1.

[0100] In addition, such as Figure 11 As shown, the cleaning fluid discharge port TH2 can also be formed between the first bridge portion BR1 and the portion A adjacent to the first rib SP1 and the second rib SP2, near the opening 215a closest to the first rib SP1 and the second rib SP2. In this case, the number of cleaning fluid discharge ports TH2 can be less than the number of cleaning fluid discharge ports TH1, but the area of ​​each of the cleaning fluid discharge ports TH2 can be larger than the area of ​​each of the cleaning fluid discharge ports TH1. Figure 10 As shown, cleaning fluid discharge ports TH3 can also be formed between the openings 215 of the open mask 210. The area of ​​each of the cleaning fluid discharge ports TH3 can be larger than the area of ​​each of the cleaning fluid discharge ports TH1. For example, the area of ​​each of the cleaning fluid discharge ports TH3 can be equal to the area of ​​each of the cleaning fluid discharge ports TH2.

[0101] In the case of the mask frame assembly described above, the opening 215 of the open mask 210 may have a shape other than square or rectangular in the plan view. For example, when the edge of the opening 215 has a circular shape or an elliptical shape, the above significant effects can be obtained by making the open mask 210 have the same structure as described above.

[0102] Figure 12 This is a schematic plan view of the open mask 210 of the mask frame assembly 200 according to an embodiment of the present disclosure. The description of the above embodiments can be applied even if each of the openings 215 in the open mask 210 has a generally square shape with rounded edges in the plan view. For example, the first bridge portion BR1 described above may be disposed between the first rib SP1 and the second rib SP2. Figure 13 This is a schematic plan view of an open mask of a mask frame assembly according to an embodiment of the present disclosure. The description of the above embodiments can also be applied to cases where each opening 215 of the open mask 210 has a polygonal shape other than a rectangular shape in the plan view. For example, the first bridge portion BR1 described above may be disposed between the first rib SP1 and the second rib SP2. For reference, Figure 13 The diagram shows that each of the openings 215 of an open mask 210 has a polygonal shape with six sides (e.g., an irregular hexagon). For reference, all of the multiple openings 215 of an open mask 210 may not necessarily have the same shape. For example, according to various variations, Figure 3The opening 215 shown and Figure 12 The opening 215 shown can be incorporated into an open mask 210.

[0103] Although the mask frame component 200 has been described above, this disclosure is not necessarily limited thereto. For example, reference above... Figure 1 The deposition equipment described above is also within the scope of this disclosure. Additionally, the method for manufacturing a display device using the mask frame assembly 200 described above is also within the scope of this disclosure.

[0104] For example, an organic light-emitting display device can be manufactured by forming a pixel electrode on a substrate, forming an intermediate layer on the pixel electrode using any of the mask frame components 200 described above, and then forming a counter electrode on the intermediate layer.

[0105] Figure 14 This is a schematic cross-sectional view of a portion of an organic light-emitting display device thus manufactured. (e.g.) Figure 14 As shown, each pixel of the organic light-emitting display device 403 may include at least one thin-film transistor (TFT). The thin-film transistor (TFT) is not necessarily limited to... Figure 14 The structure shown is such that the number and structure of TFTs can be modified in various ways.

[0106] like Figure 14 As shown, the buffer layer 421 may be formed of silicon oxide, silicon nitride and / or silicon oxynitride on a substrate 402 formed of glass or polymer resin (such as glass or acrylic, polyimide, polycarbonate or polyester), and a thin film transistor (TFT) may be formed on the buffer layer 421.

[0107] The thin-film transistor (TFT) may include a semiconductor layer 422 formed on a buffer layer 421 and a gate electrode 424 formed on the semiconductor layer 422. The gate electrode 424 may be connected to a gate line for applying a thin-film transistor on / off signal. Furthermore, the region in which the gate electrode 424 is formed may correspond to a channel region of the semiconductor layer 422. A gate insulating layer 423 comprising silicon oxide, silicon nitride, and / or silicon oxynitride may be disposed between the semiconductor layer 422 and the gate electrode 424.

[0108] An interlayer insulating layer 425 may be formed on the gate electrode 424, and a source electrode 426 and a drain electrode 427 may be formed on the interlayer insulating layer 425. The source electrode 426 and the drain electrode 427 are connected to the source region and the drain region of the semiconductor layer 422 through contact holes formed in the interlayer insulating layer 425 and the gate insulating layer 423.

[0109] A passivation layer and / or planarization layer 428 may be formed on the source electrode 426 and the drain electrode 427, and a pixel defining layer 429 comprising acrylic or polyimide may be formed on the passivation layer and / or planarization layer 428.

[0110] The organic light-emitting device can be connected to the drain electrode 427. The pixel electrode 431 of the organic light-emitting device can be formed on the passivation layer and / or planarization layer 428, the insulating pixel defining layer 429 can be formed on the pixel electrode 431, and the intermediate layer 433, which includes at least the emitting layer, can be formed in a specific opening provided in the pixel defining layer 429. Figure 14 The intermediate layer 433 is shown patterned to correspond only to each pixel; however, this is shown for the convenience of describing the construction of each pixel, and according to examples of various modifications, the intermediate layer 433 may be integrally formed into a single entity in adjacent pixels. Furthermore, when the intermediate layer 433 is made of multiple layers, only some of its layers may be integrally formed into a single entity in adjacent sub-pixels.

[0111] The pixel electrode 431 can be a transparent electrode or a reflective electrode. When the pixel electrode 431 is a transparent electrode, it may include a layer formed of ITO, IZO, ZnO, or In2O3. When the pixel electrode 431 is a reflective electrode, it may include a reflective layer formed of Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, or any compound thereof, and a layer formed of ITO, IZO, ZnO, or In2O3.

[0112] The intermediate layer 433, including at least the emitter layer, may have a structure in which a hole injection layer (HIL), a hole transport layer (HTL), an organic emitter layer (EML), an electron transport layer (ETL), and / or an electron injection layer (EIL) are stacked in a single or complex structure. These layers may be formed by vacuum deposition using the mask frame assembly 200 as described above.

[0113] The counter electrode 434 can also be a transparent electrode or a reflective electrode. When the counter electrode 434 is a transparent electrode, it may comprise a layer formed of a metal having a low work function (e.g., Li, Ca, LiF / Ca, LiF / Al, Al, Mg, or any compound thereof), or a layer formed of ITO, IZO, ZnO, or In2O3. As used herein, the phrase "low work function metal" may be understood to mean any metal having a work function equal to or less than any of the aforementioned low work function metals. When the counter electrode 434 is a reflective electrode, it may comprise a layer formed of Li, Ca, LiF / Ca, LiF / Al, Al, Mg, or any compound thereof.

[0114] When manufacturing such an organic light-emitting display device, defects can be prevented during the manufacturing process by using the above-mentioned mask frame assembly in the process of forming the intermediate layer 433, etc.

[0115] As described above, according to the embodiments, a mask frame assembly in which deformation of the deposition region is minimized and a method for manufacturing an organic light-emitting display device using the mask frame assembly can be implemented. However, the scope of this disclosure is not necessarily limited to these effects.

[0116] It should be understood that the embodiments described herein are to be considered in a descriptive sense. The description of features or aspects within each embodiment should generally be considered applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made therein without departing from the spirit and scope of this disclosure.

Claims

1. A mask frame component, comprising: The frame, including the opening portion; An open mask is attached to the frame and covers the opening portion. The open mask includes a main portion, a first rib, a second rib, and a first bridge portion. The main portion includes a plurality of openings located within the opening portion. The first rib is connected to the main portion and extends in a first direction away from the center of the main portion. The second rib is connected to the main portion and extends in a second direction intersecting the first direction and away from the center of the main portion. The first bridge portion connects a first edge of the first rib in a direction toward the second rib to a second edge of the second rib in a direction toward the first rib. as well as Multiple mask rods overlap the open mask, each of the multiple mask rods having opposite ends connected to the frame. Each of the plurality of mask rods includes a plurality of holes, and The open mask further includes a cleaning fluid discharge port located at the first bridge portion.

2. The mask frame assembly of claim 1, wherein the main portion, the first rib, the second rib, and the first bridge portion are all integrally formed as one unit.

3. The mask frame assembly of claim 1, wherein the edge of the first bridge portion in the direction opposite to the direction toward the main portion has a shape that is recessed in the direction toward the main portion.

4. The mask frame assembly of claim 3, wherein the edge of the first bridge portion has a curved shape in the direction opposite to the direction toward the main portion.

5. The mask frame assembly of claim 3, wherein the edge of the opening closest to the first bridge portion of the plurality of openings includes a portion having a shape symmetrical with respect to the shape of the edge of the first bridge portion in the direction opposite to that toward the main portion.

6. The mask frame assembly of claim 5, wherein the edge of the first bridge portion in the direction opposite to the direction toward the main portion has a circular shape with a first radius (R1).

7. The mask frame assembly of claim 3, wherein the edge of the first bridge portion in the direction opposite to the direction toward the main portion has a circular shape with a first radius (R1).

8. The mask frame assembly of claim 7, wherein the portion of the edge of the opening closest to the first bridge portion of the plurality of openings adjacent to the first rib and the second rib has at least one segment of a circle having a second radius (R2).

9. The mask frame assembly of claim 8, wherein the first radius (R1) is 25% or greater than the second radius (R2).

10. The mask frame assembly of claim 1, wherein the open mask further includes a third rib and a second bridge portion, the third rib being connected to the main portion, spaced apart from the first rib, and extending in the first direction, the second bridge portion connecting an edge of the main portion between the third rib and the first rib to a third edge of the third rib in the direction toward the first rib.

11. The mask frame assembly of claim 10, wherein the main portion, the first rib, the second rib, the third rib, the first bridge portion, and the second bridge portion are all integrally formed as one piece.

12. The mask frame assembly of claim 10, wherein the edge of the second bridge portion in the direction toward the first rib has a concave shape in the direction toward the intersection of an imaginary straight line and an edge line, the imaginary straight line extending in the extension direction of the third rib, the edge line being the edge of the portion of the main portion between the third rib and the first rib.

13. The mask frame assembly of claim 12, wherein the edge of the second bridge portion in the direction toward the first rib has a curved shape.

14. The mask frame assembly of claim 12, wherein the edge of the opening closest to the intersection in a direction opposite to the direction toward the second bridge portion relative to the intersection includes a portion having a shape symmetrical with respect to the shape of the edge of the second bridge portion in the direction toward the first rib.

15. The mask frame assembly of claim 14, wherein the edge of the second bridge portion in the direction toward the first rib has a circular shape with a first radius (R1).

16. The mask frame assembly of claim 12, wherein the edge of the second bridge portion in the direction toward the first rib has a circular shape with a first radius (R1).

17. The mask frame assembly of claim 16, wherein the portion of the edge of the opening closest to the intersection in a direction opposite to the direction toward the second bridge portion relative to the intersection, adjacent to the third rib, has at least one segment of a circle with a second radius (R2).

18. The mask frame assembly of claim 17, wherein the first radius (R1) is 25% or greater than the second radius (R2).

19. The mask frame assembly of claim 1, wherein the first bridge portion has a linear shape at its edge in a direction opposite to that toward the main portion.

20. The mask frame assembly of claim 19, wherein the portion of the edge of the opening closest to the first bridge portion of the plurality of openings adjacent to the first rib and the second rib has at least one segment of a circle having a second radius (R2), and The length of the edge of the first bridge portion in the direction opposite to that of the main portion is 35% or greater of the second radius (R2) and 100% or less of the second radius (R2).

21. A method for manufacturing an organic light-emitting display device, the method comprising: Pixel electrodes are formed on the substrate; An intermediate layer is formed on the pixel electrode using a mask frame assembly; as well as A counter electrode is formed on the intermediate layer. The mask frame component includes: The frame, including the opening portion; An open mask, coupled to the frame and covering the opening portion, the open mask including a main portion, a first rib, a second rib, and a first bridge portion, the main portion including a plurality of openings located within the opening portion, the first rib being connected to the main portion and extending in a first direction away from the center of the main portion, the second rib being connected to the main portion and extending in a second direction intersecting the first direction and away from the center of the main portion, the first bridge portion connecting a first edge of the first rib in a direction toward the second rib to a second edge of the second rib in a direction toward the first rib; and Multiple mask rods overlap the open mask, each of the multiple mask rods having opposite ends connected to the frame. Each of the plurality of mask rods includes a plurality of holes, and The open mask further includes a cleaning fluid discharge port located at the first bridge portion.

22. A mask frame component, comprising: The frame, including the opening portion; and An open mask, connected to the frame, includes a first rib, a second rib, and a bridge portion. The first rib extends in a first direction, the second rib extends in a second direction different from the first direction, and the bridge portion connects the first rib and the second rib. The bridge portion has a curved shape. The open mask further includes a plurality of openings, and The open mask further includes a cleaning fluid discharge port located at the bridge portion.

23. The mask frame assembly of claim 22, wherein each of the plurality of openings corresponds to a display device to be manufactured.

24. The mask frame assembly of claim 22, wherein each of the plurality of openings has a circular shape.

Images