Non-magnetic material particle-dispersed type strong magnetic material sputtering target

Abstract

The application relates to the technical field of non-magnetic material particles, in particular to a non-magnetic material particle dispersion type strong magnetic material sputtering target which comprises a mixing barrel, rotating shafts one and two are connected to the left and right sides of the mixing barrel respectively, shaft seats are arranged on the outer sides of the rotating shafts, a support one is fixed to the lower end of the shaft seat, a bottom plate is fixed to the lower end of the support one; after mixing, when discharging is needed, the mixing barrel stops rotating, the left and right push plates rotate towards each other along the mixing plate, the material is pushed to the middle, and in the rotating process of the rotating shaft, the screw conveyor also rotates to discharge the material, the left and right push plates continuously push the material to completely push the material into the discharging opening for discharging, and after discharging is completed, feeding can be continuously carried out. The application has the beneficial effects of avoiding the operation of opening the equipment for feeding and discharging, integrating feeding, mixing and discharging, and improving the overall efficiency.

Description

Technical Field

[0001] This invention relates to the field of nonmagnetic material particle technology, and in particular to a nonmagnetic material particle dispersion type strong magnetic material sputtering target. Background Technology

[0002] In the field of magnetic recording, exemplified by hard disk drives (HDDs), materials based on strongly magnetic metals such as Co, Fe, or Ni are used as the magnetic thin film for recording. For example, the recording layer of HDDs employing in-plane magnetic recording typically uses strongly magnetic alloys based on Co-Cr or Co-Cr-Pt, with Co as the main component. Furthermore, in HDDs employing the recently practical perpendicular magnetic recording method, composite materials containing strongly magnetic alloys based on Co-Cr-Pt and non-magnetic inorganic materials are commonly used. Moreover, from a productivity standpoint, the magnetic thin films of magnetic recording media such as HDDs are typically fabricated using sputtering targets made from the aforementioned materials. Methods for fabricating such strongly magnetic sputtering targets generally include smelting and powder metallurgy. However, existing powder metallurgy equipment is inconvenient for quickly and easily weighing and sieving raw powders, and the loading of the mixed powders is also inconvenient, wasting manpower and time, resulting in low efficiency. Summary of the Invention

[0003] The purpose of this invention is to provide a non-magnetic material particle dispersion type strong magnetic material sputtering target to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A non-magnetic material particle dispersion type strong magnetic material sputtering target includes a mixing tank. The left and right sides of the mixing tank are respectively connected to a rotating shaft one and a rotating shaft two. A shaft seat is provided on the outer side of the rotating shaft. A bracket one is fixed to the lower end of the shaft seat, and a base plate is fixed to the lower end of the bracket one.

[0006] The mixing tank is fitted with a feeding assembly on the outside, and a pushing assembly and a discharge control assembly are provided inside the mixing tank. A gear is provided on the outside of the mixing tank.

[0007] A motor is fixed to the left side of the upper surface of the base plate. A gear is fixed to the left end of the motor and the gear meshes with the gear. A slide rail is fixed to the middle of the upper surface of the base plate. Baffles are fixed to the left and right ends of the slide rail. A motor is fixed to the middle of the left side surface of the left baffle. A threaded rod is fixed to the right end of the motor.

[0008] The threaded rod passes through the left baffle and extends to the middle of the left surface of the right baffle. A slider is slidably provided in the slide rail. A carbon mold is placed at the middle of the upper surface of the slider. A bracket two is fixed to the upper surface of the first bracket near the front and rear edges. A top plate is fixed to the middle of the upper end of the second bracket. A shaft frame is fixed to the middle of the upper surface of the top plate near the left and right sides. A motor three is fixed to the upper middle of the left surface of the left shaft frame.

[0009] The right end of the motor is fixed with a drive shaft. The drive shaft passes through the left shaft frame and extends to the left side surface of the right shaft frame. A weighing plate is fixed to the front surface of the drive shaft. A storage tray is fixed to the middle of the upper surface of the weighing plate. A vertical plate is fixed to the rear side of the middle of the upper surface of the top plate. A fixing frame is fixed to the front surface of the vertical plate. A screen is fixed to the front end of the fixing frame.

[0010] The sieve is located directly above the storage tray. Support rods are fixed to the middle of the upper surface of the top plate near the left and right sides. A V-shaped groove is fixed to the upper end of the support rod, and a guide tube is fixed to the lower end of the V-shaped groove. The guide tube passes through the top plate and extends to the lower surface of the top plate.

[0011] Furthermore, there are two of each of the rotating shafts and bearing seats. The rotating shafts are symmetrically distributed at the middle positions of the left and right end surfaces of the mixing tank. The rotating shafts and bearing seats form a rotating structure, and the mixing tank forms a rotatable and adjustable structure through the rotating shafts and bearing seats.

[0012] Furthermore, the mixing drum is configured to rotate synchronously through the meshing of gear one and gear two, and the threaded rod is configured to rotate through motor two.

[0013] Furthermore, there are two sliders and two carbon molds. The sliders are symmetrically distributed in the slide rail, and the sliders are connected to the slide rail by threaded rods to form a rotatable and adjustable structure.

[0014] Furthermore, there are two shaft brackets, which are symmetrically arranged side by side on the upper surface of the top plate, in the middle and rear left and right positions. The transmission shaft is connected to the shaft brackets by a motor to form a rotating structure.

[0015] Furthermore, there are three weighing plates and three storage trays, which are symmetrically distributed and are rotatably adjustable via a drive shaft.

[0016] Furthermore, three fixing frames are provided, which are symmetrically arranged in a parallel structure on the upper middle part of the front surface of the upright plate. The number of screens corresponds to the number of storage trays, and the mesh size of the screens is different.

[0017] Furthermore, the mixing tank includes a left tank, a right tank, and mixing plates. The mixing plates are evenly spaced on the radial inner walls of the left and right tanks, and a fixed gear is fitted on the closed edge of the left tank. The center of the left tank inside the gear is connected to a rotating shaft.

[0018] The right bucket is a component with openings at both ends, one end of which is sealed by a cover plate, and the second rotating shaft passes through the bearing of the right bucket.

[0019] The feeding assembly includes a protective ring, a feed inlet, a discharge outlet, a support frame, and an inner ring. The inner ring is fixed on the inner circumferential surface of the protective ring, and an annular groove is formed between the protective ring and the inner ring. The open ends of the left and right buckets are inserted into the protective ring to form a sealed bucket body and abut against the inner ring. The inner circumferential surfaces of the left and right buckets are flush with the inner circumferential surface of the inner ring, and at least one set of mixing plates are fixed radially on the inner circumferential surfaces of the left and right buckets.

[0020] The inlet and outlet are respectively located at the upper and lower ends of the protective ring, and the inlet and outlet extend through the inner ring and communicate with the barrel body;

[0021] The two ends of the support frame are connected to the left bucket and the right bucket, respectively.

[0022] Furthermore, the pushing assembly includes a rotating shaft, a left push plate, a right push plate, a left spring, a right spring, a limiting ring, and a first bevel gear. One end of the rotating shaft is connected to a second rotating shaft, and the other end of the rotating shaft is connected to the port bearing of the left bucket. The first bevel gear is fixed on the inner side of the rotating shaft.

[0023] The rotating shaft has symmetrical threads on both sides. The two sides of the rotating shaft near the port are smooth parts, and the two sides are respectively engaged with the left push plate and the right push plate through symmetrical threads. The left push plate and the right push plate are tightly connected to the inner walls of the left barrel and the right barrel respectively. The left push plate and the right push plate are also stuck on the mixing plate and move.

[0024] The two ends of the rotating shaft are respectively fitted with a left spring and a right spring. One end of each of the left spring and the right spring is connected to a limiting ring. The left spring and the right spring abut against the left barrel and the right barrel respectively, and the limiting ring is penetrated by the rotating shaft.

[0025] The left and right springs cover the smooth portion and the threads.

[0026] Furthermore, the discharge control assembly includes a second bevel gear, a transmission rod, a screw conveyor, and a support shaft seat. The second bevel gear meshes with the first bevel gear, the support shaft seat is installed inside the discharge port, the two ends of the transmission rod are connected to the second bevel gear and the support shaft seat, and the screw conveyor is fixed on the transmission rod, wherein the screw conveyor is connected to the discharge port.

[0027] This invention has at least the following beneficial effects:

[0028] 1. The present invention provides a non-magnetic material particle dispersion type strong magnetic material sputtering target. When the left and right barrels rotate around the protective ring, the barrel body is in a sealed state, and the protective ring does not need to rotate. During feeding, the mixing barrel does not rotate, the motor drives the rotating shaft to rotate in one direction, and the left and right push plates move in opposite directions along the mixing plate until the left and right push plates move to the smooth part, the left and right push plates reach the maximum distance, there is enough space for mixing, and the equipment used for unloading does not affect the mixing efficiency.

[0029] 2. In the non-magnetic material particle dispersion type strong magnetic material sputtering target of the present invention, after mixing, when it is necessary to discharge the material, the mixing tank stops rotating, the left push plate and the right push plate rotate in opposite directions along the mixing plate, pushing the material towards the center, and during the rotation of the rotating shaft, the screw conveyor also rotates to discharge the material. When the rotating shaft stops rotating, it serves to close the discharge port. By continuously pushing with the left and right push plates, the material is completely pushed into the discharge port and discharged. After the discharge is completed, the material can be added again, and the above steps are repeated to complete the feeding, mixing and discharging in one unit, avoiding the operation of opening the equipment to add material and improving the overall efficiency. Attached Figure Description

[0030] Figure 1 This is a structural diagram of the left front side of the present invention;

[0031] Figure 2 This is a structural diagram of the left rear side of the present invention;

[0032] Figure 3 This is the front view of the present invention;

[0033] Figure 4 This is a side view of the present invention;

[0034] Figure 5 This is an enlarged view of the upper part of the base plate in this invention;

[0035] Figure 6 This is an enlarged view of the upper part of the top plate in this invention;

[0036] Figure 7 This is a perspective view of the mixing tank of the present invention;

[0037] Figure 8 This is an exploded view of the mixing tank of the present invention;

[0038] Figure 9 This is a diagram showing the non-push state of the pusher assembly of the present invention;

[0039] Figure 10 This is a diagram showing the material pushing component of the present invention in a semi-pushing state.

[0040] Figure 11 This is a diagram showing the fully ejected state of the ejector assembly of the present invention;

[0041] Figure 12 For the present invention Figure 11 The state diagram at point A.

[0042] In the diagram: 1. Mixing tank; 101. Left tank; 102. Right tank; 103. Mixing plate; 2. Rotating shaft; 3. Shaft seat; 4. Support 1; 5. Base plate; 6. Feeding assembly; 601. Protective ring; 602. Feed inlet; 603. Discharge outlet; 604. Support frame; 605. Inner ring; 7. Pushing assembly; 701. Rotating shaft; 702. Left push plate; 703. Right push plate; 704. Left spring; 705. Right spring; 706. Limiting ring; 707. First bevel gear; 8. Discharge control assembly; 801. Second bevel gear 802. Transmission rod; 803. Screw conveyor; 804. Support shaft seat; 9. Gear 1; 10. Gear 2; 11. Slide rail; 12. Baffle; 13. Motor 2; 14. Threaded rod; 15. Sliding block; 16. Carbon mold; 17. Bracket 2; 18. Top plate; 19. Shaft frame; 20. Motor 3; 21. Transmission shaft; 22. Weighing plate; 23. Storage tray; 24. Vertical plate; 25. Fixing frame; 26. Screen; 27. Support rod; 28. V-groove; 29. ​​Guide tube; 30. Motor 1; 31. Rotating shaft 2. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0044] Reference Figure 1-12 A non-magnetic material particle dispersion type strong magnetic material sputtering target includes a mixing tank 1. The left and right sides of the mixing tank 1 are respectively connected to a rotating shaft 2 and a rotating shaft 31. A bearing 3 is provided on the outer side of the rotating shaft 2. A bracket 4 is fixed at the lower end of the bearing 3, and a base plate 5 is fixed at the lower end of the bracket 4.

[0045] The mixing tank 1 is fitted with a feeding assembly 6 on the outside, and the mixing tank 1 is equipped with a pushing assembly 7 and a discharge control assembly 8 inside. The mixing tank 1 is equipped with a gear 9 on the outside.

[0046] A motor 30 is fixed on the left side of the upper surface of the base plate 5. A gear 10 is fixed on the left end of the motor 30, and the gear 10 meshes with the gear 9. A slide rail 11 is fixed in the middle of the upper surface of the base plate 5. A baffle 12 is fixed at both ends of the slide rail 11. A motor 13 is fixed in the middle of the left side surface of the left baffle 12, and a threaded rod 14 is fixed at the right end of the motor 13.

[0047] The threaded rod 14 passes through the left baffle 12 and extends to the middle of the left surface of the right baffle 12. The slide rail 11 is equipped with a slider 15. A carbon mold 16 is placed in the middle of the upper surface of the slider 15. A bracket 17 is fixed to the upper surface of the bracket 1 4 near the front and rear edges. A top plate 18 is fixed to the middle of the upper end of the bracket 17. A shaft bracket 19 is fixed to the middle of the upper surface of the top plate 18 near the left and right sides. A motor 20 is fixed to the upper middle of the left surface of the left shaft bracket 19.

[0048] A drive shaft 21 is fixed to the right end of the motor 3 20. The drive shaft 21 passes through the left shaft bracket 19 and extends to the left side surface of the right shaft bracket 19. A weighing plate 22 is fixed to the front surface of the drive shaft 21, and a storage tray 23 is fixed to the middle of the upper surface of the weighing plate 22. A vertical plate 24 is fixed to the rear side of the middle of the upper surface of the top plate 18. A fixing frame 25 is fixed to the front surface of the vertical plate 24, and a screen 26 is fixed to the front end of the fixing frame 25.

[0049] The sieve 26 is located directly above the storage tray 23. Support rods 27 are fixed to the middle of the upper surface of the top plate 18 near the left and right sides. V-grooves 28 are fixed to the upper end of the support rods 27, and conduits 29 are fixed to the lower end of the V-grooves 28. The conduits 29 pass through the top plate 18 and extend to the lower surface of the top plate 18.

[0050] This solution includes the following work process:

[0051] Place the entire device on a flat surface, connect the power supply, and place the raw material powder on the sieve 26. The sieve 26 with different mesh sizes separates the raw material powder into three parts, which fall into the receiving tray 22 on the weighing plate 23. The raw material powder is weighed in the form of 77.28Co-14.72Cr-8SiO2 (mol)%. After weighing, the motor 20 rotates the drive shaft 21 to put the raw material powder in the receiving tray 23 into the V-shaped groove 28. The raw material powder enters the mixing tank 1 through the guide tube 29. Tighten the pusher assembly 7 on the feed assembly 6, and run the motor 30 to make the gear 10 drive the gear 9. Rotate the mixing tank 1 to mix the raw materials for 20 hours. After mixing, turn the discharge control component 8 vertically downward and open the discharge control component to fill the mixed powder into the carbon mold 16. Run motor 2 13 to move the filled carbon mold 16 to the left and move another carbon mold 16 directly below the discharge control component 8 to continue filling. After filling, sinter the material at 1050°C for two hours by hot pressing (HP), and then press it by hot isostatic pressing (HIP) to produce a sintered body. Then, machine it to obtain a disc-shaped target with a diameter of 180 mm and a thickness of 7 mm.

[0052] Based on the above work process, it can be concluded that:

[0053] By using sieves 26 with different mesh sizes to screen the raw material powder, the powder falls into the collection tray 23 after screening, making the selection and storage of materials convenient. The motor 20 drives the transmission shaft 21 to put the raw material powder in the collection tray 23 into the V-shaped groove 28, and then into the mixing tank 1 through the V-shaped groove 28, making the addition of raw material powder convenient, reducing labor costs, saving time, and improving work efficiency. A slide rail 11 is provided below the mixing tank 1, and there are two carbon molds 16 for collecting the mixed powder. The carbon molds 16 can move left and right with the rotation of the threaded rod 14, so that the carbon molds 16 can be quickly replaced when collecting the mixed raw material powder, which greatly improves work efficiency and makes the collection of mixed raw material powder convenient.

[0054] There are two rotating shafts 2 and two shaft seats 3. The rotating shafts 2 are symmetrically distributed at the middle positions of the left and right ends of the mixing barrel 1. The rotating shafts 2 and the shaft seats 3 form a rotating structure. The mixing barrel 1 can be rotatably adjusted by the rotating shafts 2 and 3, so that the mixing barrel 1 can rotate with the rotating shafts to mix the powder in the mixing barrel 1.

[0055] The mixing barrel 1 forms a synchronous rotation adjustment structure through the meshing of gear 9 and gear 10, and the threaded rod 14 forms a rotatable adjustment structure through motor 13.

[0056] Two sliders 15 and two carbon molds 16 are provided. The sliders 15 are symmetrically distributed in the slide rail 11. The sliders 15 and the slide rail 11 form a rotatable and adjustable structure through the threaded rod 14, which facilitates the rapid collection of the mixed raw materials.

[0057] There are two shaft brackets 19, which are symmetrically arranged in parallel on the upper surface of the top plate 18, in the middle and rear left and right positions. The drive shaft 21 forms a rotating structure with the shaft brackets 19 through the motor 20, so that the weighing plate 22 and the storage tray 23 on the drive shaft 21 can be rotated and adjusted.

[0058] There are three weighing plates 22 and three collection trays 23. The weighing plates 22 and the collection trays 23 are symmetrically distributed. The weighing plates 22 and the collection trays 23 are rotatable and adjustable through the drive shaft 21, so that the screened powder can be weighed and collected separately.

[0059] There are three fixed frames 25, which are symmetrically arranged in a parallel structure on the upper middle part of the front surface of the upright plate 24. The number of screens 26 corresponds to the number of storage trays 23, and the mesh size of the screens 26 is different, so that the raw material powder can be screened in different sizes.

[0060] The mixing tank 1 includes a left tank 101, a right tank 102 and a mixing plate 103. The mixing plate 103 is evenly spaced on the radial inner wall of the left tank 101 and the right tank 102. A fixed gear 9 is fitted on the closed edge of the left tank 101. The center of the left tank 101 inside the gear 9 is connected to the rotating shaft 2. By setting two half tanks, the material can flow into the left tank 101 and the right tank 102.

[0061] The right bucket 102 is a component with openings at both ends. One end of the opening is sealed by a cover plate. The second rotating shaft 31 passes through the bearing of the right bucket 102 and rotates around the right bucket 102 and the bearing on the cover plate.

[0062] The feeding assembly 6 includes a protective ring 601, a feed inlet 602, a discharge outlet 603, a support frame 604, and an inner ring 605. The inner ring 605 is fixed to the inner circumferential surface of the protective ring 601, and an annular groove is formed between the protective ring 601 and the inner ring 605. The open ends of the left bucket 101 and the right bucket 102 are inserted into the protective ring 601 to form a sealed bucket body, and abut against the inner ring 605. The protective ring 601 connects the left bucket 101 and the right bucket 102, and the left bucket 101 and... When the right bucket 102 rotates around the protective ring 601, the bucket body is in a sealed state, and the protective ring 601 does not need to rotate. The inner circumferential surfaces of the left bucket 101 and the right bucket 102 are flush with the inner circumferential surface of the inner ring 605. At least one set of mixing plates 103 are fixed radially on the inner circumferential surfaces of the left bucket 101 and the right bucket 102. During the rotation of the left bucket 101 and the right bucket 102, the mixing plates 103 also rotate to lift the material and accelerate the mixing.

[0063] The feed inlet 602 and the discharge outlet 603 are respectively located at the upper and lower ends of the protective ring 601, and the feed inlet 602 and the discharge outlet 603 pass through the inner ring 605 and communicate with the barrel body. Since the protective ring 601 can remain stationary, the material enters the rotating barrel body from the feed inlet 602 and is discharged from the discharge outlet 603 without stopping the machine to discharge or add material, thus improving the overall efficiency.

[0064] The two ends of the support frame 604 are connected to the left bucket 101 and the right bucket 102 respectively. The support frame 604 fixes the left bucket 101 and the right bucket 102 into a whole. When the left bucket 101 rotates, the right bucket 102 will also rotate.

[0065] The feeding assembly 7 includes a rotating shaft 701, a left push plate 702, a right push plate 703, a left spring 704, a right spring 705, a limiting ring 706, and a first bevel gear 707. One end of the rotating shaft 701 is connected to a second rotating shaft 31, which is connected to an external motor. The motor drives the rotating shaft 701 to rotate. The other end of the rotating shaft 701 is connected to the port bearing of the left barrel 101. The first bevel gear 707 is fixed on the inner side of the protective ring 601. The rotation of the rotating shaft 701 drives the first bevel gear 707 to rotate as well.

[0066] The rotating shaft 701 has symmetrical threads on both sides. The two sides of the rotating shaft 701 near the port are smooth parts, and the two sides are engaged with the left push plate 702 and the right push plate 703 respectively through symmetrical threads. The rotating shaft 701 drives the left push plate 702 and the right push plate 703 to move in opposite directions or in opposite directions through symmetrical threads. The left push plate 702 and the right push plate 703 are tightly connected to the inner walls of the left barrel 101 and the right barrel 102 respectively. The left push plate 702 and the right push plate 703 are also locked on the mixing plate 103 and move.

[0067] A left spring 704 and a right spring 705 are respectively fitted at both ends of the rotating shaft 701. One end of each of the left spring 704 and the right spring 705 is connected to the limiting ring 706. The left spring 704 and the right spring 705 abut against the left barrel 101 and the right barrel 102 respectively, and the limiting ring 706 is penetrated by the rotating shaft 701.

[0068] The left spring 704 and the right spring 705 cover the smooth part and the thread.

[0069] During feeding, the mixing tank 1 does not rotate. The motor drives the rotating shaft 701 to rotate in one direction. The left push plate 702 and the right push plate 703 move in opposite directions along the mixing plate 103. The left push plate 702 and the right push plate 703 slowly come into contact with the limiting ring 706 of the left spring 704 and the right spring 705. As they continue to move, the left spring 704 and the right spring 705 are compressed until the left push plate 702 and the right push plate 703 move to the smooth part and reach their maximum distance.

[0070] The mixing tank 1 rotates at this time, and the direction of rotation is the same as the thread direction of the rotating shaft 701. The mixing plate 103 also rotates and drives the left push plate 702 and the right push plate 703 to rotate around the smooth part of the rotating shaft 701, pouring the material in from the feed port 602. The mixing plate 103 drives the material to be lifted and fallen to mix.

[0071] The discharge control assembly 8 includes a second bevel gear 801, a transmission rod 802, a screw conveyor 803, and a support shaft seat 804. The second bevel gear 801 meshes with the first bevel gear 707. The support shaft seat 804 is installed inside the discharge port 603. The two ends of the transmission rod 802 are connected to the second bevel gear 801 and the support shaft seat 804. The screw conveyor 803 is fixed on the transmission rod 802 and is connected to the discharge port 603.

[0072] After mixing, when discharge is required, the mixing drum 1 stops rotating, and the motor drives the rotating shaft 701 to rotate in the opposite direction, opposite to the screw thread. Under the rebound force of the left spring 704 and the right spring 705, the left push plate 702 and the right push plate 703 rotate towards each other along the mixing plate 103, pushing the material towards the center. During the rotation of the rotating shaft 701, the screw conveyor 803 also rotates, discharging the material. When the rotating shaft 701 does not rotate, it serves to close the discharge port 603. Through the continuous pushing of the left push plate 702 and the right push plate 703, the material is completely pushed into the discharge port 603 and discharged. After the discharge is completed, the material can be added again, and the above steps are repeated to complete the feeding, mixing and discharging in one unit, avoiding the operation of opening the equipment to add material and improving the overall efficiency.

[0073] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target, comprising a mixing tank (1), characterized in that, The mixing tank (1) is connected to a rotating shaft (2) and a rotating shaft two on its left and right sides respectively. A shaft seat (3) is provided on the outside of the rotating shaft (2). A bracket (4) is fixed at the lower end of the shaft seat (3), and a base plate (5) is fixed at the lower end of the bracket (4). The mixing tank (1) is fitted with a feeding assembly (6) on the outside, and a pushing assembly (7) and a discharge control assembly (8) are provided inside the mixing tank (1). A gear (9) is provided on the outside of the mixing tank (1). A motor (30) is fixed on the left side of the upper surface of the base plate (5). A gear (10) is fixed on the left end of the motor (30), and the gear (10) meshes with the gear (9). A slide rail (11) is fixed in the middle of the upper surface of the base plate (5). A baffle (12) is fixed at both ends of the slide rail (11). A motor (13) is fixed in the middle of the left side surface of the left baffle (12), and a threaded rod (14) is fixed at the right end of the motor (13). The threaded rod (14) passes through the left side baffle (12) and extends to the middle position of the left side surface of the right side baffle (12). The slide rail (11) is equipped with a slider (15). A carbon mold (16) is placed in the middle position of the upper surface of the slider (15). A bracket (17) is fixed on the upper surface of the first bracket (4) near the front and rear sides. A top plate (18) is fixed at the middle position of the upper end of the second bracket (17). A shaft frame (19) is fixed in the middle position of the upper surface of the top plate (18) near the left and right sides. A motor (20) is fixed in the middle position of the left side surface of the left shaft frame (19). The right end of the motor (20) is fixed with a drive shaft (21). The drive shaft (21) passes through the left shaft frame (19) and extends to the left side surface of the right shaft frame (19). A weighing plate (22) is fixed on the front surface of the drive shaft (21). A storage tray (23) is fixed in the middle of the upper surface of the weighing plate (22). A vertical plate (24) is fixed in the middle of the upper surface of the top plate (18) near the rear. A fixing frame (25) is fixed on the front surface of the vertical plate (24). A screen (26) is fixed at the front end of the fixing frame (25). The screen (26) is located directly above the storage tray (23). A support rod (27) is fixed in the middle of the upper surface of the top plate (18) near the left and right sides. A V-shaped groove (28) is fixed at the upper end of the support rod (27), and a guide tube (29) is fixed at the lower end of the V-shaped groove (28). The guide tube (29) passes through the top plate (18) and extends to the lower surface of the top plate (18).

2. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, There are two bearing seats (3). The rotating shaft (2) and the second rotating shaft are symmetrically distributed at the middle position of the left and right ends of the mixing tank (1). The rotating shaft (2) and the second rotating shaft respectively form a rotating structure with the bearing seat (3) on the corresponding side. The mixing tank (1) forms a rotatable adjustment structure through the rotating shaft (2), the second rotating shaft and the bearing seat (3).

3. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, The mixing barrel (1) is configured to rotate synchronously by the meshing of gear one (9) and gear two (10), and the threaded rod (14) is configured to rotate by motor two (13).

4. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, Two sliders (15) and two carbon molds (16) are provided. The sliders (15) are symmetrically distributed in the slide rail (11). The sliders (15) and the slide rail (11) form a rotatable and adjustable structure through the threaded rod (14).

5. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, There are two shaft brackets (19), which are arranged in a symmetrical parallel structure on the upper surface of the top plate (18) in the middle and rear left and right positions. The transmission shaft (21) forms a rotating structure with the shaft brackets (19) through the motor (20).

6. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, There are three weighing plates (22) and three storage trays (23). The weighing plates (22) and the storage trays (23) are symmetrically distributed, and the weighing plates (22) and the storage trays (23) are rotatable and adjustable through the transmission shaft (21).

7. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, There are three fixing frames (25), which are arranged in a symmetrical parallel structure on the upper middle part of the front surface of the upright plate (24). The number of screens (26) corresponds to the number of storage trays (23), and the mesh size of the screens (26) is different.

8. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, The mixing tank (1) includes a left tank (101), a right tank (102) and a mixing plate (103). The mixing plate (103) is equally spaced on the radial inner wall of the left tank (101) and the right tank (102). A fixed gear (9) is fitted on the closed edge of the left tank (101). The center of the left tank (101) inside the gear (9) is connected to the rotating shaft (2). The right bucket (102) is a component with openings at both ends, wherein one end is sealed by a cover plate, and the rotating shaft 2 passes through the bearing of the right bucket (102); The feeding assembly (6) includes a protective ring (601), a feed port (602), a discharge port (603), a support frame (604), and an inner ring (605). The inner ring (605) is fixed on the inner circumferential surface of the protective ring (601). An annular groove is formed between the protective ring (601) and the inner ring (605). The open ends of the left bucket (101) and the right bucket (102) are inserted into the protective ring (601) to form a sealed bucket body and abut against the inner ring (605). The inner circumferential surfaces of the left bucket (101) and the right bucket (102) are flush with the inner circumferential surface of the inner ring (605). The inner circumferential surfaces of the left bucket (101) and the right bucket (102) are radially fixed with not less than one set of mixing plates (103). The feed inlet (602) and the discharge outlet (603) are respectively located at the upper and lower ends of the protective ring (601), and the feed inlet (602) and the discharge outlet (603) pass through the inner ring (605) and communicate with the barrel body; The two ends of the support frame (604) are connected to the left bucket (101) and the right bucket (102) respectively.

9. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, The feeding assembly (7) includes a rotating shaft (701), a left push plate (702), a right push plate (703), a left spring (704), a right spring (705), a limiting ring (706), and a first bevel gear (707). One end of the rotating shaft (701) is connected to the second rotating shaft, and the other end of the rotating shaft (701) is connected to the port bearing of the left barrel (101). The first bevel gear (707) is fixed on the inner side of the rotating shaft (701) and the protective ring (601). The rotating shaft (701) has symmetrical threads on both sides. The two sides of the rotating shaft (701) near the port are smooth parts, and the two sides are respectively engaged with the left push plate (702) and the right push plate (703) through symmetrical threads. The left push plate (702) and the right push plate (703) are tightly connected to the inner walls of the left barrel (101) and the right barrel (102) respectively. The left push plate (702) and the right push plate (703) are also locked on the mixing plate (103) and move. The two ends of the rotating shaft (701) are respectively fitted with a left spring (704) and a right spring (705). One end of each of the left spring (704) and the right spring (705) is connected to a limiting ring (706). The left spring (704) and the right spring (705) abut against the left barrel (101) and the right barrel (102) respectively, and the limiting ring (706) is penetrated by the rotating shaft (701). The left spring (704) and right spring (705) cover the smooth part and the thread.

10. The apparatus for fabricating a non-magnetic material particle dispersion type strong magnetic material sputtering target according to claim 1, characterized in that, The discharge control assembly (8) includes a second bevel gear (801), a transmission rod (802), a screw conveyor (803), and a support shaft seat (804). The second bevel gear (801) meshes with the first bevel gear (707). The support shaft seat (804) is installed inside the discharge port (603). Both ends of the transmission rod (802) are connected to the second bevel gear (801) and the support shaft seat (804). The screw conveyor (803) is fixed on the transmission rod (802). The screw conveyor (803) is connected to the discharge port (603).

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