受光元件、测距模块和电子设备
By using a reflective film and inter-pixel light-shielding units in the ToF ranging system, the problem of near-infrared light leakage to adjacent pixels is solved, improving quantum efficiency and ranging accuracy.
CN114365287BActive Publication Date: 2026-07-17SONY SEMICON SOLUTIONS CORP
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SONY SEMICON SOLUTIONS CORP
- Filing Date
- 2020-10-16
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In indirect time-of-flight (ToF) ranging systems, when using near-infrared light sources, incident light is prone to leaking into adjacent pixels, leading to low quantum efficiency.
Method used
The structure employs an on-chip lens, wiring layer, and semiconductor layer. The wiring layer includes a reflective film formed of a material different from the metal wiring of the transmission transistor gate to reflect infrared light that has not undergone photoelectric conversion within the semiconductor substrate and to prevent light leakage through inter-pixel light-shielding units.
Benefits of technology
This improves quantum efficiency, reduces incident light leakage into adjacent pixels, and enhances the accuracy and precision of the ranging system.
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Figure CN114365287B_ABST
Abstract
本技术涉及一种能够减少入射光泄漏到相邻像素中的受光元件、测距模块和电子设备。所述受光元件包括：片上透镜；配线层；和半导体层，所述半导体层配置在所述片上透镜和所述配线层之间并包括光电二极管，其中所述配线层包括反射膜，所述反射膜被配置为当在平面图中观察时其至少一部分与所述光电二极管重叠，和读出由所述光电二极管产生的电荷的传输晶体管，其中所述反射膜由与电气连接到所述传输晶体管的栅极的金属配线不同的材料形成。本技术可以适用于例如测量到被摄体的距离的测距模块等。
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