Image sensor including a dichroic lens array and electronic device including the image sensor

Abstract

An image sensor includes a sensor substrate including a first pixel and a second pixel, and a dichroic lens array configured to converge light of a first wavelength included in incident light onto the first pixel by changing a phase of the light of the first wavelength, wherein the sensor substrate further includes an effective pixel area configured to output a pixel signal for image generation, a first dummy pixel area arranged outside the effective pixel area and configured to output a pixel signal for assisting the image generation, and a second dummy pixel area arranged outside the first dummy pixel area and configured not to output a pixel signal.

Description

[0001] Cross-reference to related applications

[0002] This application is based on and claims priority to Korean Patent Application No. 10-2020-0143872 filed with the Korean Intellectual Property Office on October 30, 2020, and Korean Patent Application No. 10-2021-0083126 filed with the Korean Intellectual Property Office on June 25, 2021, the entire disclosure of which is incorporated herein by reference. Technical Field

[0003] The exemplary embodiments of this disclosure relate to an image sensor including a dichroic lens array and an electronic device including the image sensor, and more specifically, to an image sensor including a dichroic lens array capable of focusing incident light according to the wavelength of the incident light, and an electronic device including the image sensor. Background Technology

[0004] Image sensors typically use color filters to sense the color of incident light. However, because color filters absorb light of colors other than their corresponding colors, they can have low light utilization efficiency. For example, when using an RGB color filter, only 1 / 3 of the incident light is transmitted, while the remaining 2 / 3 is absorbed. Therefore, the light utilization efficiency is only about 33%. Consequently, in color display devices or color image sensors, most of the light loss occurs in the color filter. Summary of the Invention

[0005] An image sensor with improved light utilization efficiency is provided by using a dichroic lens array capable of focusing incident light separately according to the wavelength of the incident light, and an electronic device including the image sensor is also provided.

[0006] Additional aspects will be set forth in part in the following description, and will become apparent in part from the description or may be learned by practicing the embodiments presented in this disclosure.

[0007] According to an embodiment, an image sensor includes: a sensor substrate including a first pixel and a second pixel for sensing light; and a dichroic lens array for converging light of a first wavelength included in incident light onto the first pixel by changing the phase of the first wavelength light, wherein the sensor substrate includes: an effective pixel region for outputting a pixel signal for image generation; a first dummy pixel region disposed outside the effective pixel region and outputting a pixel signal for assisting in image generation; and a second dummy pixel region disposed outside the first dummy pixel region and not outputting a pixel signal, wherein the dichroic lens array includes a plurality of regions corresponding to the first pixel and the second pixel of the effective pixel region, the first dummy pixel region, and the second dummy pixel region, respectively, and the dichroic lens array causes at least a portion of the first wavelength light incident on a region disposed above the second dummy pixel region in the dichroic lens array to converge onto the first pixel formed in the first dummy pixel region.

[0008] According to another embodiment, an image sensor includes: a sensor substrate including a first pixel and a second pixel for sensing light; and a dichroic lens array for converging light of a first wavelength included in incident light onto the first pixel by changing the phase of the first wavelength light, wherein the sensor substrate includes: an effective pixel region for outputting a pixel signal for image generation; a dummy pixel region disposed outside the effective pixel region and outputting a pixel signal for assisting in image generation; and an optical black region disposed outside the dummy pixel region and outputting a dark level signal, and the dichroic lens array includes a plurality of regions corresponding to the first pixel and the second pixel in the effective pixel region, the dummy pixel region, and the optical black region, respectively, and the dichroic lens array converges at least a portion of the first wavelength light incident on the region disposed above the optical black region in the dichroic lens array onto the first pixel in the dummy pixel region.

[0009] According to an embodiment, an electronic device includes: an image sensor for converting an optical image into an electrical signal; and a processor configured to control the operation of the image sensor and store and output signals generated by the image sensor, wherein the image sensor includes: a sensor substrate including a first pixel and a second pixel for sensing light; and a dichroic lens array for converging light of a first wavelength included in incident light onto the first pixel by changing the phase of the light. The sensor substrate includes: an effective pixel region for outputting a pixel signal for image generation; a first dummy pixel region disposed outside the effective pixel region and outputting a pixel signal for assisting in image generation; and a second dummy pixel region disposed outside the first dummy pixel region and not outputting a pixel signal. The dichroic lens array includes a plurality of regions corresponding to the first pixel and the second pixel of the effective pixel region, the first dummy pixel region, and the second dummy pixel region, respectively. The dichroic lens array causes at least a portion of the first wavelength light incident on a region disposed above the second dummy pixel region in the dichroic lens array to converge onto the first pixel formed in the first dummy pixel region.

[0010] According to another embodiment, an electronic device includes: an image sensor for converting an optical image into an electrical signal; and a processor configured to control the operation of the image sensor and store and output signals generated by the image sensor, wherein the image sensor includes: a sensor substrate including a first pixel and a second pixel for sensing light; and a dichroic lens array for converging light of a first wavelength included in incident light onto the first pixel by changing the phase of the light. The sensor substrate includes: an effective pixel region for outputting a pixel signal for image generation; a dummy pixel region disposed outside the effective pixel region and outputting a pixel signal for assisting in image generation; and an optical black region disposed outside the dummy pixel region and outputting a dark level signal. The dichroic lens array includes a plurality of regions corresponding to the first pixel and the second pixel in the effective pixel region, the dummy pixel region, and the optical black region, respectively. The dichroic lens array causes at least a portion of the first wavelength light incident on a region disposed above the optical black region in the dichroic lens array to converge onto the first pixel in the dummy pixel region. Attached Figure Description

[0011] The above and other aspects, features, and advantages of certain embodiments of this disclosure will become clearer from the following description taken in conjunction with the accompanying drawings, in which:

[0012] Figure 1 This is a block diagram of an image sensor according to an embodiment;

[0013] Figure 2 It is based on the functional representation of the pixels included in the pixel array. Figure 1 A diagram of a pixel array;

[0014] Figure 3A and Figure 3B From Figure 2 Cross-sectional views of region A in the effective pixel area from different directions;

[0015] Figure 4 It is shown Figure 2 A planar diagram of the pixel arrangement in a pixel array;

[0016] Figure 5A This is a plan view showing an example of arranging nanopillars in a dichroic lens array, and Figure 5B It is shown Figure 5A A magnified plan view of a portion of the image;

[0017] Figure 6A It shows along Figure 5A A diagram showing the phase distribution of the first and second wavelengths of light passing through the dichroic lens array along line II′. Figure 6B It is a diagram showing the phase of the first wavelength of light passing through the dichroic lens array at the center of the first to fourth regions, and Figure 6C It is a diagram showing the phase of the second wavelength of light passing through the dichroic lens array at the center of the first to fourth regions;

[0018] Figure 6D An example is shown of the direction of travel of light of a first wavelength incident on and around a first region of a dichroic lens array, the first region corresponding to a first pixel, and... Figure 6E An example of a microlens array that is equivalent to a dichroic lens array relative to the first wavelength is shown;

[0019] Figure 6F An example is shown illustrating the direction of travel of light of a second wavelength incident on a second region and its surrounding area in a dichroic lens array, the second region corresponding to a second pixel, and... Figure 6G An example of a microlens array that is equivalent to a dichroic lens array relative to the second wavelength of light is shown;

[0020] Figure 7A It shows along Figure 5A A diagram showing the phase distribution of light of the first and third wavelengths passing through the dichroic lens array via line II-II′. Figure 7B It is a diagram showing the phase of the third wavelength light passing through the dichroic lens array at the center of the first to fourth regions, and Figure 7C It is a diagram showing the phase of the first wavelength of light passing through the dichroic lens array at the center of the first to fourth regions;

[0021] Figure 7D An example is shown of the direction of travel of light of the third wavelength incident on the third region and its surrounding area in a dichroic lens array. The third region corresponds to the third pixel. Figure 7E An example of a microlens array that is equivalent to a dichroic lens array relative to a third wavelength of light is shown;

[0022] Figure 7F An example is shown illustrating the direction of travel of light of the first wavelength incident on and around the fourth region, and Figure 7G An example of a microlens array that is equivalent to a dichroic lens array relative to the first wavelength of light is shown;

[0023] Figure 8 Showing the process Figure 3A and Figure 3B The spectrum of light incident on the sensor substrate by the dichroic lens array;

[0024] Figure 9A This is a plan view illustrating an example shape of a unit pattern in a dichroic lens array of an image sensor of the Bayer pattern type, according to another embodiment. Figure 9B This is a plan view showing an example of the shape of a unit pattern in a dichroic lens array according to another embodiment;

[0025] Figure 10A yes Figure 2 A cross-sectional view of region B in the diagram, and Figure 10B yes Figure 10A A plan view of the sensor substrate;

[0026] Figure 11 It is a diagram used to illustrate the distance that light incident on a pixel diverges due to the dichroic lens array;

[0027] Figure 12A It is based on Figure 2 A cross-sectional view of region B of an embodiment where one pixel in the pixel array comprises four sub-pixels, and Figure 12B yes Figure 12A The diagram shows a plan view of the sensor substrate.

[0028] Figure 13A This is a diagram illustrating the structure of a pixel array according to another embodiment, and Figure 13B yes Figure 13A A cross-sectional view of region B′ in the diagram;

[0029] Figure 14 It is a block diagram of an electronic device including an image sensor according to one or more embodiments;

[0030] Figure 15 yes Figure 14A block diagram of the camera module; and

[0031] Figures 16 to 25 The figures illustrate various examples of electronic devices including image sensors according to one or more embodiments. Detailed Implementation

[0032] Reference will now be made in detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein similar elements are indicated by similar reference numerals throughout the drawings. In this respect, present embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, these embodiments are described below only with reference to these drawings to explain these aspects. The term “and / or” as used herein includes any one and all combinations of one or more of the relevant listed items. Expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list.

[0033] In the following, an image sensor including a dichroic lens array and an electronic device including the image sensor will be described in detail with reference to the accompanying drawings. Embodiments of this disclosure are capable of various modifications and can be embodied in many different forms. In the drawings, similar reference numerals denote similar components, and the dimensions of components in the drawings may be enlarged for ease of illustration.

[0034] When a layer, film, region, or plate is referred to as being "above" another element, it can be placed directly above / below / to the left / right of other layers or substrates, or an intermediate layer may also be present.

[0035] It should be understood that although terms such as "first" and "second" may be used herein to describe individual components, these components should not be limited by these terms. These terms are used only to distinguish components from one another. These terms do not limit the materials or structures of the components to being different from one another.

[0036] Singular expressions encompass plural expressions unless there is a clear distinction in the context. It will also be understood that when a part is referenced as "including" another component, that part may not exclude the other component, but may also include it, unless the context otherwise indicates.

[0037] Furthermore, terms such as “unit” and “module” used herein refer to units that perform functions or operations and can be implemented by hardware, software, or a combination of hardware and software.

[0038] The use of the term "above" and similar indicative terms can correspond to both the singular and plural forms.

[0039] Furthermore, the steps of all the methods described herein may be performed in any suitable order, unless otherwise indicated herein or the context expressly instructs otherwise. Additionally, the use of all exemplary terms (e.g., etc.) is solely for the purpose of describing the technical ideas in detail, and the scope of the claims is not limited by these terms unless the context is limited by the claims.

[0040] Figure 1 This is a block diagram of an image sensor 1000 according to an embodiment. (Reference) Figure 1 The image sensor 1000 may include a pixel array 1100, a timing controller 1010, a line decoder 1020, and an output circuit 1030. The image sensor 1000 may include a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor that converts optical images into electrical signals.

[0041] Pixel array 1100 includes pixels arranged in two dimensions in multiple rows and columns. Row decoder 1020 selects one of the rows in pixel array 1100 in response to a row address signal output from timing controller 1010. Output circuit 1030 outputs photosensitive signals from the multiple pixels arranged in the selected row, column by column. For this purpose, output circuit 1030 may include column decoder and analog-to-digital converter (ADC). For example, output circuit 1030 may include: column decoder; and multiple ADCs respectively configured for columns in pixel array 1100 or one ADC configured at the output of column decoder. Timing controller 1010, row decoder 1020 and output circuit 1030 may be implemented as a single chip or in separate chips. Processor for processing image signals output from output circuit 1030 may be implemented as a single chip together with timing controller 1010, row decoder 1020 and output circuit 1030.

[0042] Figure 2 It is shown based on the functions performed by the pixels included in the pixel array. Figure 1 A diagram of a pixel array.

[0043] refer to Figure 2 The pixel array 1100 may include: an effective pixel region 1110 that outputs pixel signals for generating an image; a first dummy pixel region 1120 that is disposed outside the effective pixel region 1110 and outputs pixel signals for assisting image generation; a second dummy pixel region 1130 that is disposed outside the first dummy pixel region 1120 and does not output pixel signals; and an optical black region 1140 that is disposed outside the second dummy pixel region 1130 and includes a light-shielding metal layer for outputting background signals.

[0044] The effective pixel region 1110 is a region provided with pixels that output signals directly used to generate an image, provided by the image sensor 1000. Some or all of the pixels included in the effective pixel region 1110 can sense light of a specific wavelength, i.e., light of a specific color, incident on the image sensor, and can output the intensity of the color component included in the incident light. The effective pixel region 1110 may include three or more types of pixels, for example, it may include a green pixel for sensing the intensity of the green light component in the incident light, a red pixel for sensing the intensity of the red light component in the incident light, and a blue pixel for sensing the intensity of the blue light component in the incident light. Specifically, the green pixel may primarily receive light of the green wavelength band (500nm to 565nm) included in the incident light, and can output the intensity of the green light component as a pixel signal (e.g., voltage) by performing photoelectric conversion on the light. Each pixel may include one or more sub-pixels as units for independently performing photoelectric conversion; for example, a green pixel may include two or four sub-pixels.

[0045] Image sensor 1000 can generate images by using signals output from each pixel set in effective pixel region 1110, and can generate high-resolution images as the number of pixels in effective pixel region 1110 increases. In other words, each pixel in effective pixel region 1110 can correspond to the smallest unit of image representation; therefore, as the number of pixels in effective pixel region 1110 increases, a finely represented image can be generated. Similar to the signals output from pixels included in effective pixel region 1110, pixel signals that contribute to the improvement in the resolution of the generated image can be understood as being directly used in image generation.

[0046] The first dummy pixel region 1120 is a region in which pixels for outputting signals indirectly used in image generation are arranged. The first dummy pixel region 1120 may surround the effective pixel region 1110 outside the effective pixel region 1110. The structure of each pixel in the first dummy pixel region 1120 is the same as that of the pixels included in the effective pixel region 1110, but the pixel signal output from the first dummy pixel region 1120 differs from the pixel signal output from the effective pixel region 1110 in that the pixel signal from the first dummy pixel region 1120 does not contribute to the improvement of image resolution.

[0047] The signal output from the pixels in the first dummy pixel region 1120 can be used to improve image quality. For example, when some pixels in the effective pixel region 1110 malfunction, a signal corresponding to the signal from the malfunctioning pixel is generated by interpolating the signals of the surrounding pixels around the malfunctioning pixel. When the malfunctioning pixel is located at the outermost part of the effective pixel region 1110 (e.g., relative to the boundary of the first dummy pixel region 1120), a signal corresponding to the pixel signal of the malfunctioning pixel can be generated by using the signals of pixels adjacent to the malfunctioning pixels in the first dummy pixel region 1120. The pixel signal of the first dummy pixel region 1120 does not contribute to the improvement of image resolution, but it does contribute to the improvement of the generated image quality; therefore, this pixel signal can be considered to be indirectly used in image generation.

[0048] The pixel signal of the first dummy pixel region 1120 can be used in focusing operations, optical image stabilization (OIS), and correction of the pixel signal from the effective pixel region 1110.

[0049] The second dummy pixel region 1130 is a region in which pixels that do not output signals are arranged, and can be configured to surround the first dummy pixel region 1120 from the outside of the first dummy pixel region 1120. The pixels in the second dummy pixel region 1130 do not output pixel signals, and are therefore different from the pixels in the first dummy pixel region 1120. The second dummy pixel region 1130 provides a space through which a portion of light traveling towards the second dummy pixel region 1130 can travel to the first dummy pixel region 1120, thus allowing the pixels in the first dummy pixel region 1120 to sense light under the same conditions as the pixels in the effective pixel region 1110. References will follow. Figure 17 Describe the structure of the second dummy pixel region 1130.

[0050] The optical black area 1140 is an area in which pixels that output pixel signals (i.e., black-level or dark-level signals) are arranged when there is no incident light. The optical black area 1140 may be configured to surround the second dummy pixel area 1130 outside of it. The optical black area 1140 differs from the effective pixel area 1110 and the first dummy pixel area 1120 and second dummy pixel area 1130 in that it includes a light-shielding layer for shielding light incident on the pixel. The pixel in the optical black area 1140 may output a black-level or dark-level signal, for example, noise generated due to the material or structure of the photodiode included in the pixel, or noise generated from other elements besides the photodiode in the pixel. The black-level or dark-level signal can be used as a reference signal for correcting noise from the pixel signals of the effective pixel area 1110 and the first dummy pixel area 1120. Figure 17 The structure of optical black area 1140 is described below.

[0051] Figure 3A and Figure 3B Viewed from different cross sections Figure 2 A cross-sectional view of region A in the effective pixel region 1110. Figure 4 It is shown Figure 2 A planar view of the pixel array within the pixel array. Figure 5A This is a plan view showing an example of arranging nanopillars in a dichroic lens array, and Figure 5B It is shown Figure 5A A magnified plan view of a portion of the image.

[0052] refer to Figure 3A and Figure 3B The pixel array 1100 of the image sensor 1000 may include: a sensor substrate 110 including a plurality of pixels for sensing light; a transparent spacer layer 120 on the sensor substrate 110; and a dichroic lens array 130 on the spacer layer 120.

[0053] The sensor substrate 110 may include first to fourth pixels 111, 112, 113, and 114 that convert light into electrical signals. The first pixels 111 to the fourth pixels 114 may be arranged such that the first pixel 111 and the second pixel 112 are... Figure 3A As shown, the pixels are arranged alternately in the first direction (X direction), and the third pixel 113 and the fourth pixel 114 can be arranged as follows: Figure 3B The diagram shows the arrangement of elements alternating between different cross sections. Figure 4 The image sensor 1000's pixel array 1100 is shown with a Bayer pattern. This arrangement is provided to sense incident light separately using unit patterns such as a Bayer pattern. For example, first pixel 111 and fourth pixel 114 can sense light of a first wavelength, second pixel 112 can sense light of a second wavelength, and third pixel 113 can sense light of a third wavelength. Hereinafter, the first wavelength of light is represented as green light, the second wavelength as blue light, and the third wavelength as red light. Furthermore, first pixel 111 and fourth pixel 114 can be green pixels, second pixel 112 can be a blue pixel, and third pixel 113 can be a red pixel.

[0054] The pixel array 1100 can be configured with various arrangement patterns instead of a Bayer pattern. For example, a CYGM arrangement can be used, in which magenta pixels (M), cyan pixels, yellow pixels, and green pixels are configured as a unit pixel. Alternatively, an RGBW arrangement can be used, in which green pixels, red pixels, blue pixels, and white pixels are configured as a unit pattern. Furthermore, the unit pixel can have a 3×2 array. The following description assumes that the pixel array 1100 of the image sensor 1000 has a Bayer pattern.

[0055] A spacer layer 120 is disposed between the sensor substrate 110 and the dichroic lens array 130 to maintain a constant distance between them. The spacer layer 120 may comprise a material transparent to visible light, such as a dielectric material having a lower refractive index and lower absorption coefficient than nanopillar NPs in the visible light band, such as SiO2, alkyl siloxane spin-coated glass (SOG), etc. The thickness h of the spacer layer 120 can be h t -p≤h≤h t The selection is within the range of +p. Here, when the refractive index of the spacer layer 120 with respect to wavelength λ0 is n and the pixel pitch is p, the theoretical thickness ht of the spacer layer 120 can be expressed as the following formula 1.

[0056] Formula 1

[0057]

[0058] The theoretical thickness h of spacer layer 120 t This can refer to the focal length at which the dichroic lens array 130 focuses light with a wavelength of λ0 onto the surface of pixels 111, 112, 113, and 114. λ0 can represent the wavelength used as a reference for determining the thickness h of the spacer layer 120, and the thickness of the spacer layer 120 can be designed based on the center wavelength of green light (i.e., 540 nm).

[0059] refer to Figure 5A The dichroic lens array 130 can be divided into... Figure 4The first to fourth pixels 111, 112, 113, and 114 correspond to the first to fourth regions 131, 132, 133, and 134, respectively. The first to fourth regions 131, 132, 133, and 134 can each face the first to fourth pixels 111, 112, 113, and 114. For example, in the dichroic lens array 130, the first region 131 can correspond to the first pixel 111, the second region 132 can correspond to the second pixel 112, the third region 133 can correspond to the third pixel 113, and the fourth region 134 can correspond to the fourth pixel 114. The first to fourth regions 131, 132, 133, and 134 can be arranged two-dimensionally along a first direction (X direction) and a second direction (Y direction) to alternately repeat a first row in which the first region 131 and the second region 132 are arranged alternately, and a second row in which the third region 133 and the fourth region 134 are arranged alternately. The dichroic lens array 130 includes a plurality of unit patterns arranged in two dimensions like the pixel array of the sensor substrate 110, and each of the unit patterns includes first to fourth regions 131, 132, 133 and 134 arranged in a 2x2 array.

[0060] Figure 3A and Figure 3B An example is shown where the first to fourth regions 131, 132, 133 and 134 have the same size as the first to fourth pixels 111, 112, 113 and 114 and face each other in the vertical direction. However, the dichroic lens array 130 can be divided into multiple regions defined in different ways, such as a region for converging light of the first wavelength, a region for converging light of the second wavelength, and so on.

[0061] The dichroic lens array 130 may include nanopillars NP, the size, shape, spacing, and / or arrangement of which are defined to separate and converge light of a first wavelength to a first pixel 111 and a fourth pixel 114, to converge light of a second wavelength to a second pixel 112, and to converge light of a third wavelength to a third pixel 113. Furthermore, the thickness of the dichroic lens array 130 in the third direction (Z direction) may be similar to the height of the nanopillars NP, and may be approximately 500 nm to approximately 1500 nm.

[0062] refer to Figure 5A The first to fourth regions 131, 132, 133, and 134 may include nanopillars NPs, each having a cylindrical cross-section. Nanopillars NPs with different cross-sectional areas are disposed at the center of each region, and nanopillars NPs may also be disposed at the center of the boundary between pixels and at the intersection between pixel boundaries. The cross-sectional area of ​​the nanopillars NPs disposed at the boundary between pixels may be smaller than the cross-sectional area of ​​the nanopillars NPs disposed at the center of the pixels.

[0063] Figure 5B Show Figure 5A The arrangement of nanopillars NPs is included in a portion of the region (i.e., regions 131, 132, 133, and 134 in the unit pattern). Figure 5B In this context, nanopillars NP are designated p1 through p9 based on their specific positions within the unit pattern. (Reference) Figure 5B In the nanopillar NP, the nanopillar p1 at the center of the first region 131 and the nanopillar p4 at the center of the fourth region 134 have a larger cross-sectional area than the nanopillar p2 at the center of the second region 132 and the nanopillar p3 at the center of the third region 133, and the nanopillar p2 at the center of the second region 132 has a larger cross-sectional area than the nanopillar p3 at the center of the third region 133. However, one or more embodiments are not limited to the above examples, and nanopillar NPs with various shapes, sizes, and arrangements can be applied if desired.

[0064] The nanopillars NPs included in the first region 131 and the fourth region 134 corresponding to the green pixels can have different distribution rules in the first direction (X direction) and the second direction (Y direction). For example, the nanopillars NPs disposed in the first region 131 and the fourth region 134 can have different dimensional arrangements in the first direction (X direction) and the second direction (Y direction). Figure 5B As shown, in the nanopillars NP, the cross-sectional area of ​​nanopillar p5, located at the boundary between the first region 131 and the second region 132 adjacent to the first region 131 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar p6, located at the boundary between the first region 131 and the third region 133 adjacent to the first region 131 in the second direction (Y direction). Similarly, the cross-sectional area of ​​nanopillar p7, located at the boundary between the fourth region 134 and the third region 133 adjacent to the fourth region 134 in the first direction (X direction), is different from the cross-sectional area of ​​nanopillar p8, located at the boundary between the fourth region 134 and the second region 132 adjacent to the fourth region 134 in the second direction (Y direction).

[0065] Simultaneously, the nanopillars NP, set in the second region 132 corresponding to the blue pixel and the third region 133 corresponding to the red pixel R, can have a symmetrical distribution rule in the first and second directions (X and Y directions). Figure 5BAs shown, in the nanopillars NP, the cross-sectional area of ​​nanopillar p5 at the boundary between neighboring pixels adjacent to the second region 132 in the first direction (X direction) and the cross-sectional area of ​​nanopillar p8 at the boundary between neighboring pixels adjacent to the second region 132 in the second direction (Y direction) are the same as each other. In the third region 133, the cross-sectional area of ​​nanopillar p7 at the boundary between neighboring pixels in the first direction (X direction) and the cross-sectional area of ​​nanopillar p6 at the boundary between neighboring pixels in the second direction (Y direction) are the same as each other.

[0066] Furthermore, at the four corners of each of the first to fourth regions 131, 132, 133 and 134, i.e. the points where the four regions intersect each other, the nanopillars p9 have the same cross-sectional area.

[0067] The above distribution is due to the pixel arrangement in the Bayer pattern. The neighboring pixels of blue and red pixels in the first direction (X-direction) and the second direction (Y-direction) are green pixels. However, the green pixel corresponding to the first region 131 has a blue pixel as its neighbor in the first direction (X-direction), and a red pixel as its neighbor in the second direction (Y-direction). Similarly, the green pixel corresponding to the fourth region 134 has a red pixel as its neighbor in the first direction (X-direction), and a blue pixel as its neighbor in the second direction (Y-direction). Furthermore, the same pixels (e.g., green pixels) are adjacent to the four corners of the green pixels corresponding to the first region 131 and the fourth region 134; the same pixels (e.g., red pixels) are adjacent to the four corners of the blue pixels corresponding to the second region 132; and the same pixels (e.g., blue pixels) are adjacent to the four corners of the red pixels corresponding to the third region 133. Therefore, in the second region 132 and the third region 133 corresponding to the blue and red pixels, the nanopillars NP can be arranged in a four-fold symmetric configuration, and in the first region 131 and the fourth region 134 corresponding to the green pixel, the nanopillars NP can be arranged in a two-fold symmetric configuration. Specifically, the first region 131 and the fourth region 134 are rotated 90° relative to each other.

[0068] exist Figure 5A and Figure 5B In this design, multiple nanopillars NP have symmetrical circular cross-sectional shapes. However, some nanopillars with asymmetrical cross-sectional shapes may be included. For example, the first region 131 and the fourth region 134 corresponding to the green pixel use nanopillars with asymmetrical cross-sectional shapes that have different widths in the first direction (X direction) and the second direction (Y direction), while the second region 132 and the third region 133 corresponding to the blue pixel and the red pixel can use nanopillars with symmetrical cross-sectional shapes that have the same width in the first direction (X direction) and the second direction (Y direction).

[0069] The arrangement rule of the dichroic lens array 130 is an example of achieving the following phase distribution: light with a first wavelength branches and converges on the first pixel 111 and the fourth pixel 114, light with a second wavelength branches and converges on the second pixel 112, and light with a third wavelength branches and converges on the third pixel 113, and this arrangement rule is not limited to the pattern shown.

[0070] Figure 6A It shows along Figure 5A A diagram showing the phase distribution of the first and second wavelengths of light passing through the dichroic lens array 130 along line II′. Figure 6B It is a diagram showing the phase of light of the first wavelength passing through the dichroic lens array 130 at the center of the first to fourth regions 131, 132, 133 and 134, and Figure 6C It is a diagram showing the phase of the second wavelength of light passing through the dichroic lens array 130 at the center of the first to fourth regions 131, 132, 133 and 134.

[0071] refer to Figure 6A and Figure 6BThe light of the first wavelength passing through the dichroic lens array 130 can have a first phase distribution PP1, which is maximum at the center of the first region 131 and decreases away from the center of the first region 131. Specifically, immediately after passing through the dichroic lens array 130, i.e., at the lower surface of the dichroic lens array 130 or the upper surface of the spacer layer 120, the phase of the light of the first wavelength is maximum at the center of the first region 131 and decreases in a concentric circle form away from the center of the first region 131. Therefore, the phase is minimum at the center of the second region 132 and the third region 133 in the X and Y directions, and at the contact point of the first region 131 and the fourth region 134 in the diagonal direction. When the phase of light of the first wavelength emitted from the center of the first region 131 is set to 2π as a reference, light with a phase of 0.9π to 1.1π can be emitted from the centers of the second region 132 and the third region 133, light with a phase of 2π can be emitted from the center of the fourth region 134, and light with a phase of 1.1π to 1.5π can be emitted from the contact point between the first region 131 and the fourth region 134. Furthermore, the first phase distribution PP1 may not represent the maximum phase delay of light passing through the center of the first region 131. When the phase of light passing through the first region 131 is set to 2π, the phase value of light passing through another location (when the phase delay of light passing through another point is greater and has a phase value of 2π or greater) can be represented by the value remaining after subtracting 2nπ, i.e., the coiled phase distribution. For example, when the phase of light passing through the first region 131 is 2π and the phase of light passing through the center of the second region 132 is 3π, the phase in the second region 132 can be the π remaining after subtracting 2π (n=1) from 3π.

[0072] refer to Figure 6A and Figure 6B The second wavelength of light passing through the dichroic lens array 130 can have a second phase distribution PP2, which is maximum at the center of the second region 132 and decreases away from the center of the second region 132. Specifically, immediately after passing through the dichroic lens array 130, the phase of the second wavelength of light is maximum at the center of the second region 132 and decreases in concentric circles away from the center of the second region 132. The phase is minimum at the centers of the first region 131 and the fourth region 134 in the X and Y directions, and minimum at the center of the third region 133 in the diagonal direction. When the phase of the second wavelength of light at the center of the second region 132 is 2π, the phase of the second wavelength of light at the centers of the first region 131 and the fourth region 134 is 0.9π to 1.1π, and the phase at the center of the third region 133 can be less than π (e.g., 0.2π to 0.9π).

[0073] Figure 6DAn example is shown of the direction of travel of light of a first wavelength incident on a first region 131 and its surrounding region of a dichroic lens array 130, where the first region 131 corresponds to the first pixel 111, and... Figure 6E An example of a microlens array that is equivalent to a dichroic lens array 130 relative to a first wavelength of light is shown.

[0074] The first wavelength of light incident on the periphery of the first region 131 is as follows Figure 6D As shown, light from the dichroic lens array 130 converges onto the first pixel 111, and light of a first wavelength is incident on the first pixel 111 from the first region to the third regions 131, 132, and 133. (Reference) Figure 6A and Figure 6B The phase distribution of the first wavelength light described is similar to the phase distribution of light passing through a virtual first microlens ML1, which is generated by connecting the centers of two second regions 132 and two third regions 133 adjacent to the first region 131. Therefore, as... Figure 6E As shown, relative to the first wavelength of light incident on the periphery of the first region 131, the dichroic lens array 130 can be equivalent to an array of multiple first microlenses ML1 arranged based on the first region 131. Each of the equivalent first microlenses ML1 has an area larger than the area of ​​the corresponding first pixel 111, and the first wavelength of light incident on the second region 132 and the third region 133, as well as the first wavelength of light incident on the first region 131, can also converge onto the first pixel 111. The area of ​​the first microlens ML1 can be 1.2 to 2 times larger than the area of ​​the corresponding first pixel 111.

[0075] Figure 6F An example is shown of the direction of travel of light of the second wavelength incident on the second region 132 and its surrounding region of the dichroic lens array 130, wherein the second region 132 corresponds to the second pixel 112, and Figure 6G An example of a microlens array that is equivalent to a dichroic lens array 130 relative to light of the second wavelength is shown.

[0076] The second wavelength of light, as Figure 6F As shown, light from the dichroic lens array 130 converges onto the second pixel 112, and light of a second wavelength from the first to the fourth regions 131, 132, 133, and 134 is incident on the second pixel 112. (Reference) Figure 6A and Figure 6C The phase distribution of the second wavelength light described is similar to the phase distribution of light passing through the virtual second microlens ML2, which is generated by connecting the centers of four third regions adjacent to the second region 132 at the top point. Therefore, as Figure 6GAs shown, relative to the second wavelength of light, the dichroic lens array 130 can be equivalent to an array of multiple second microlenses ML2 arranged around the second region 132. Because each second microlens ML2 is larger than the corresponding second pixel 112, second wavelength light incident in the directions toward the first pixel 111, the third pixel 113, and the fourth pixel 114, as well as second wavelength light incident in the direction toward the second pixel 112, can also converge to the second pixel 112. The area of ​​the second microlens ML2 can be 1.5 to 4 times larger than the area of ​​the corresponding second pixel 112.

[0077] Figure 7A Show along Figure 5A The phase distribution of the first and third wavelengths of light passing through the dichroic lens array 130 in line II-II′. Figure 7B The phase of the third wavelength of light passing through the dichroic lens array 130 at the center of the first to fourth regions 131, 132, 133 and 134 is shown, and Figure 7C The phase of the first wavelength of light passing through the dichroic lens array 130 is shown at the center of the first to fourth regions 131, 132, 133 and 134.

[0078] refer to Figure 7A and Figure 7B The third wavelength of light passing through the dichroic lens array 130 can have a phase distribution similar to that of the second wavelength of light based on the second region 132, and can have a third phase distribution PP3, which is maximum at the center of the third region and decreases away from the center of the third region 133. Specifically, immediately after passing through the dichroic lens array 130, the phase of the third wavelength of light is maximum at the center of the third region 133 and decreases in concentric circles away from the center of the third region 133. The phase is minimum at the centers of the first region 131 and the fourth region 134 in the X and Y directions, and minimum at the center of the second region 132 in the diagonal direction. When the phase of the third wavelength of light at the center of the third region 133 is 2π, the phase of the third wavelength of light at the centers of the first region 131 and the fourth region 134 is 0.9π to 1.1π, and the phase at the center of the second region 132 can be less than π (e.g., 0.2π to 0.9π).

[0079] Figure 7D An example is shown of the direction of travel of light of a third wavelength incident on the third region 133 and its surrounding region of the dichroic lens array 130, wherein the third region 133 corresponds to the third pixel 113, and Figure 7E An example of a microlens array that is equivalent to a dichroic lens array 130 relative to a third wavelength of light is shown.

[0080] The third wavelength of light is emitted by the dichroic lens array 130, as shown below. Figure 7D The light converges onto the third pixel 113, and light of the third wavelength from the first to the fourth regions 131, 132, 133, and 134 is incident on the third pixel 113. (See reference) Figure 7A and Figure 7B The phase distribution of the described third wavelength light is similar to the phase distribution of light passing through a virtual third microlens ML3, which is generated by connecting the centers of four second regions 132 adjacent to the third region 133 at the vertex. Therefore, as... Figure 7E As shown, relative to the third wavelength of light, the dichroic lens array 130 can be equivalent to an array of multiple third microlenses ML3 arranged around the third region 133. Because each third microlens ML3 is larger than the corresponding third pixel 113, third wavelength light incident in the directions toward the first pixel 111, the second pixel 112, and the fourth pixel 114, as well as third wavelength light incident in the direction toward the third pixel 113, can also converge to the third pixel 113. The area of ​​the third microlens ML3 can be 1.5 to 4 times larger than the area of ​​the corresponding third pixel 113.

[0081] refer to Figure 7A and Figure 7C The first wavelength light incident on the periphery of the fourth region 134 can have a phase distribution similar to that of the first wavelength light based on the first region 131, and can have a fourth phase distribution PP4, which is maximum at the center of the fourth region 134 and decreases away from the center of the fourth region 134. Immediately after passing through the dichroic lens array 130, based on the fourth region 134, the phase of the first wavelength light is maximum at the center of the fourth region 134 and decreases concentrically away from the center of the fourth region 134. The phase is minimum in the X and Y directions at the centers of the second region 132 and the third region 133, and minimum diagonally at the contact point between the first region 131 and the fourth region 134. When the phase of the first wavelength light at the center of the fourth region 134 is 2π, the phase can be 0.9π to 1.1π at the centers of the second region 132 and the third region 133, 2π at the center of the first region 131, and 1.1π to 1.5π at the contact point between the first region 131 and the fourth region 134.

[0082] Figure 7F An example is shown of the direction of travel of light of the first wavelength incident on and around the fourth region 134, and Figure 7GAn example of a microlens array equivalent to the dichroic lens array 130 with respect to the first wavelength of light is shown. The first wavelength of light is converged to two pixels (e.g., 111 and 114), and the phase distribution and direction of travel of the first wavelength of light incident on the fourth region 134 are similar to the phase distribution and direction of travel of the first wavelength of light incident on the first region 131. Therefore, redundant descriptions are omitted.

[0083] refer to Figure 7F The first wavelength of light incident on the periphery of the fourth region 134 is converged onto the fourth pixel 114 by the dichroic lens array 130. The first wavelength of light from the second to the fourth regions 132, 133, and 134 is incident on the fourth pixel 114. For example... Figure 7G As shown, relative to the first wavelength of light incident on the periphery of the fourth region 134, the dichroic lens array 130 can be equivalent to an array of multiple fourth microlenses ML4 arranged based on the fourth pixel 114.

[0084] Figure 8 Showing the process Figure 3A and Figure 3B The spectrum of light incident on the sensor substrate by the dichroic lens array 130.

[0085] exist Figure 8 In the diagram, the vertical axis represents quantum efficiency (QE) and the horizontal axis represents the wavelength of light. QE indicates the degree to which photons incident on the pixel array 1100 are converted into electrons by the photoelectric conversion element. For example, when incident photons are converted into electrons with an efficiency of 80%, the QE is 0.8, and when incident photons are converted into electrons with an efficiency of 100%, the QE is 1.0. In typical pixel arrays, the QE does not exceed 1.0, but... Figure 3A and Figure 3B The pixel array includes a dichroic lens array 130, and the QE can be 1.0 or greater. For example, when the QE of the second pixel 112 relative to a wavelength of 475 nm is 2.0, this means that when the number of photons with a wavelength of 475 nm traveling toward the second pixel 112 is 100, electrons corresponding to 200 photons are generated in the second pixel 112. Figure 3A and Figure 3BIn the pixel array, photons of 475nm wavelength light traveling towards the first pixel 111 and the third pixel 113, as well as photons of 475nm wavelength light traveling towards the second pixel 112, are incident on the second pixel 112. Therefore, the QE can be 1.0 or greater. In other words, the amount of 475nm wavelength light photons incident on the second pixel 112 after passing through the dichroic lens array 130 can be greater than the amount of 475nm wavelength light photons traveling towards the second pixel 112 before passing through the dichroic lens array 130. Therefore, the QE of the second pixel 112 for 475nm wavelength light can be greater than 1.0.

[0086] Figure 8 The first spectrum S1 is the spectrum of light incident on the pixel array 1100 and branched by the dichroic lens array 130, and subsequently sensed by the first pixel 111 and the fourth pixel 114, which are green pixels, with the QE being the largest in the 490nm to 580nm band corresponding to green light. The second spectrum S2 shows the spectrum of light sensed by the second pixel 112 (e.g., a blue pixel), with the QE being the largest in the 420nm to 475nm band corresponding to blue light. The third spectrum S3 shows the spectrum of light sensed by the second pixel 113 (e.g., a red pixel), with the QE being the largest in the 590nm to 680nm band corresponding to red light.

[0087] Figure 5A The dichroic lens array 130 shown is an example, and various types of dichroic lens arrays 130 can be designed according to color characteristics, pixel pitch, incident angle of incident light into the image sensor, etc. Furthermore, the dichroic lens array 130 is described as comprising a plurality of cylindrical nanopillars NP spaced apart from each other, but one or more embodiments are not limited thereto. For example, Figure 9A This is a planar view showing the shape of a unit pattern in a dichroic lens array that can be applied to a Bayer pattern type image sensor, and Figure 9B It is a planar diagram showing the shape of the unit pattern in another dichroic lens array.

[0088] exist Figure 9A In the dichroic lens array 130′, each of the first to fourth regions 131′, 132′, 133′, and 134′ is optimized in a digitized binary form as a 16x16 rectangular array, and the unit pattern has the shape of a 32x32 rectangular array. Unlike the example above, Figure 9B Each of the first to fourth regions 131″, 132″, 133″ and 134″ in the dichroic lens array 130″ shown has a non-digital continuous curve shape.

[0089] The dichroic lens arrays 130, 130′, or 130″ that meet the above phase distribution and performance can be automatically designed through various types of computer simulations. For example, the structures of the first to fourth regions 131, 132, 133 and 134, 131′, 132′, 133′ and 134′, or 131″, 132″, 133″ and 134″ can be optimized through natural heuristic algorithms such as genetic algorithms, particle swarm optimization algorithms, ant colony optimization algorithms, or reverse design based on adjoint optimization algorithms.

[0090] Based on the design of the dichroic lens arrays 130, 130′, or 130″, the first to fourth structures of the first to fourth regions 131, 132, 133 and 134, 131′, 132′, 133′ and 134′, or 131″, 132″, 133″ and 134″ can be optimized while evaluating the performance of the candidate dichroic lens array based on evaluation factors (e.g., dichroic spectrum, optical efficiency, signal-to-noise ratio, etc.). For example, the target value of each evaluation factor can be predetermined and the difference from the target values ​​of multiple evaluation factors can be minimized. The structure of regions 131, 132, 133 and 134, 131′, 132′, 133′ and 134′, or 131″, 132″, 133″ and 134″ can be optimized by reducing the size of the regions. Alternatively, when indicating performance for each evaluation factor, the structure of regions 131, 132, 133 and 134, 131′, 132′, 133′ and 134′, or 131″, 132″, 133″ and 134″ can be optimized to maximize the value indicating performance.

[0091] Figure 10A yes Figure 2 A cross-sectional view of region B in the diagram, and Figure 10B yes Figure 10A A plan view of the sensor substrate.

[0092] Figure 2 Region B and Figure 2 The difference between region A and region B is that region B includes the effective pixel region 1110, the first dummy pixel region 1120, the second dummy pixel region 1130 and the optical black area 1140 in the pixel array 1100, while region A only includes the effective pixel region 1110.

[0093] As described above, the first dummy pixel region 1120 is the region in which pixels are formed for outputting signals indirectly used in image generation, and is configured to surround the effective pixel region 1110 outside of the effective pixel region 1110. The first dummy pixel region 1120 has the same characteristics as referenced above. Figure 3A and Figure 3BThe structure and function of the effective pixel region 1110 are described similarly, and redundant descriptions are omitted.

[0094] The second dummy pixel region 1130 is a region for providing a path for light incident on the pixel formed in the first dummy pixel region 1120, and can be configured to surround the first dummy pixel region 1120 outside the first dummy pixel region 1120. In terms of including the sensor substrate 110, the spacer layer 120, and the dichroic lens array 130, the second dummy pixel region 1130 has a structure similar to that of the effective pixel region 1110 and the first dummy pixel region 1120, but differs from the effective pixel region 1110 and the first dummy pixel region 1120 in that the pixels included in the second dummy pixel region 1130 do not output pixel signals. Specifically, the second dummy pixel region 1130 is configured to extend the dichroic lens array 130 outside the first dummy pixel region 1120, so that a portion of the light passing through the dichroic lens array 130 in the second dummy pixel region 1130 can be incident on the pixel disposed in the first dummy pixel region 1120.

[0095] For example, incident at Figure 10A A portion of the blue light incident on the first region 131 of the dichroic lens array 130 in the second dummy pixel region 1130 is focused onto the second pixel 112 of the first dummy pixel region 1120. Therefore, the second pixel 112 in the first dummy pixel region 1120 can receive light under the same conditions as the second pixel 112 in the effective pixel region 1110. When there is no dichroic lens array 130 in the second dummy pixel region 1130, the blue light incident on the first region 131 of the second dummy pixel region 1130 is not focused onto the second pixel 112 of the first dummy pixel region 1120. Therefore, the second pixel 112 in the first dummy pixel region 1120 cannot receive light under the same conditions as the second pixel 112 in the effective pixel region 1110. As described above, in order to use the pixel signal of the first dummy pixel region 1120 to correct the pixel signal of the effective pixel region 1110 or to focus the image sensor, the first dummy pixel region 1120 must be able to receive incident light under the same conditions as the effective pixel region 1110, and in order to meet this condition, the second dummy pixel region 1130 may be necessary.

[0096] The second dummy pixel region 1130 can prevent the first dummy pixel region 1120 from being contaminated by the process of forming the optical black area 1140, and provide an optical path for light incident on the first dummy pixel region 1120.

[0097] The optical black area 1140 is a region in which pixels that output pixel signals (i.e., black level or dark level signals) are arranged when there is no incident light, and can be configured to surround the second dummy pixel area 1130 outside the second dummy pixel area 1130. The optical black area 1140 may include a sensor substrate 110, a spacer layer 120, and a light-shielding layer 121.

[0098] A light-shielding layer 121 is formed on pixels 111 and 112 included in the optical black area 1140, and can block light incident on pixels 111 and 112. The light-shielding layer 121 may include a metal such as copper or tungsten.

[0099] A dichroic lens array 130 can be formed in the optical black area 1140, but since the optical black area 1140 is separated from the effective pixel area 1110 and the first dummy pixel area 1120 by the second dummy pixel area 1130, the dichroic lens array 130 may not be formed in the optical black area 1140.

[0100] Figure 11 This is a diagram used to illustrate the distance by which light incident on a pixel is dispersed due to the dichroic lens array 130.

[0101] Figure 11 This illustrates the degree to which green light with a wavelength of 530 nm is sensed on the sensor substrate 110, wherein the 530 nm wavelength green light is incident on a third region 133 of a dichroic lens array 130 formed in a second dummy pixel region 1130. Specifically, the incident position of the green light is referenced to the third region 133 (not shown), which is along the Z direction in... Figure 11 Above the underlined reference third pixel 113 in the third pixel 113, and when the intensity of green light incident on the reference third region 133 is 1, the intensity of the light incident on the pixel is expressed numerically. For example, green light with an intensity of 1 is branched as it passes through the reference third region 133 of the dichroic lens array 130, and is then sensed as 0.060 by the first pixel 111 adjacent to the reference third pixel 113, and as 0.059 and 0.056 by the fourth pixel 114 adjacent to the reference third pixel 113.

[0102] refer to Figure 11 The light intensity sensed by pixels spaced three or more intervals from the reference third pixel 113 is 0.002 or less, which is negligible. For example, the light intensity sensed by the fourth pixel 114, located three intervals away from the reference third pixel 113 along the X direction, and the light intensity sensed by the first pixel 111, located three intervals away from the reference third pixel 113 along the Y direction, is 0.002. That is, light incident on the dichroic lens array 130 can affect pixels within two intervals of the pixels vertically below the area where the light is incident.

[0103] Return to reference Figure 10A Light incident on the second region 132 included in the second dummy pixel region 1130 can affect the second pixel 112 included in the first dummy pixel region 1120, therefore Figure 10B The second dummy pixel region 1130 may be located in a direction away from the first dummy pixel region 1120 (e.g., Figure 10B Two or more pixels in the X direction, and may include columns or rows of two to ten pixels or columns or rows of two to four pixels.

[0104] Figure 12A It is based on Figure 2 A cross-sectional view of region B of an embodiment where one pixel in the pixel array comprises four sub-pixels, and Figure 12B yes Figure 12A The diagram shows a plan view of the sensor substrate.

[0105] refer to Figure 12B , Figure 12B Each pixel in the sensor substrate 110a may include four sub-pixels. For example, the first pixel 111 may include 1-a sub-pixels to 1-d sub-pixels 111a, 111b, 111c, and 111d; the second pixel 112 may include 2-a sub-pixels to 2-d sub-pixels 112a, 112b, 112c, and 112d; the third pixel 113 may include 3-a sub-pixels to 3-d sub-pixels 113a, 113b, 113c, and 113d; and the fourth pixel 114 may include 4-a sub-pixels to 4-d sub-pixels 114a, 114b, 114c, and 114d. That is, each pixel has a four-unit structure. The four sub-pixels included in a pixel may output pixel signals separately, or a single pixel signal may be output by combining the signals sensed by the four sub-pixels.

[0106] Figure 12A The dichroic lens array 130 has the same characteristics as... Figure 3A The structure and function of the dichroic lens array 130 in the image are similar, therefore its description is omitted. Incident light is... Figure 12A The light on the second region 132 of the dichroic lens array 130 included in the second dummy pixel region 1130 can affect the 2-a sub-pixels 112a and 2-b sub-pixels 112b included in the first dummy pixel region 1120, therefore Figure 12A The second dummy pixel region 1130 may be located in a direction away from the first dummy pixel region 1120 (e.g., Figure 12B Four or more sub-pixels in the X direction, and may include four to twenty sub-pixels.

[0107] Figure 13AThis is a diagram illustrating the structure of a pixel array according to another embodiment, and Figure 13B yes Figure 13A A cross-sectional view of region B′ in the diagram.

[0108] Figure 13A pixel array 1100′ and Figure 2 The difference of the pixel array 1100 is that the pixel array 1100' does not include the second dummy pixel region 1130, and a dichroic lens array 130' is formed in the optical black region 1140'.

[0109] refer to Figure 13B The pixel array 1100' may include a dichroic lens array 130' formed in the optical black area 1140', so that pixels 111 and 112 in the first dummy pixel region 1120 can receive light under the same conditions as the effective pixel region 1110. A portion of the incident light traveling toward the optical black area 1140' is branched by the dichroic lens array 130' formed in the optical black area 1140', and can then travel to the pixels in the first dummy pixel region 1120. Figure 13B The optical black area 1140' may be located in a direction away from the first dummy pixel area 1120 (e.g. Figure 13B Two or more pixels in the X direction, for example, the optical black area 1140' may include a column or row of two to ten pixels or a column or row of two to four pixels set in a direction away from the first dummy pixel area 1120.

[0110] According to the image sensor 1000 including the pixel array 1100 described above, since light loss to the pixels (e.g., organic color filters) occurs very little, sufficient light can be provided to the pixels even when the pixels become smaller. Therefore, it is possible to manufacture ultra-high resolution, ultra-small size, and high sensitivity image sensors with hundreds of millions or more pixels. Such ultra-high resolution, ultra-small size, and high sensitivity image sensors can be used in a variety of high-performance optical devices or high-performance electronic devices. Electronic devices may include, for example, smartphones, personal digital assistants (PDAs), laptops, personal computers (PCs), various portable devices, electronic devices, surveillance cameras, medical cameras, automobiles, Internet of Things (IoT) devices, other mobile or non-mobile computing devices, and are not limited thereto.

[0111] In addition to the image sensor 1000, the electronic device may also include a processor, such as an application processor (AP), for controlling the image sensor. This processor can control multiple hardware or software components and can perform various data processing and operations by driving an operating system or application via the processor. The processor may also include a graphics processing unit (GPU) and / or an image signal processor. When an image signal processor is included in the processor, it can be used to store and / or output images (or videos) acquired by the image sensor.

[0112] Figure 14 This is a block diagram illustrating an example of an electronic device 1401 including an image sensor 1000. (Reference) Figure 14 In network environment 1400, electronic device 1401 can communicate with another electronic device 1402 via a first network 1498 (short-range wireless communication network, etc.), or can communicate with another electronic device 1404 and / or server 1408 via a second network 1499 (long-range wireless communication network, etc.). Electronic device 1401 can communicate with electronic device 1404 via server 1408. Electronic device 1401 may include processor 1420, memory 1430, input device 1450, sound output device 1455, display device 1460, audio module 1470, sensor module 1476, interface 1477, haptic module 1479, camera module 1480, power management module 1488, battery 1489, communication module 1490, user identification module 1496, and / or antenna module 1497. In electronic device 1401, some components (such as display device 1460) may be omitted, or other components may be added. Some of the components can be configured as an integrated circuit. For example, sensor module 1476 (fingerprint sensor, iris sensor, illuminance sensor, etc.) can be embedded in and implemented in display device 1460 (display, etc.).

[0113] Processor 1420 can control one or more components (hardware, software components, etc.) of electronic device 1401 connected to processor 1420 by executing software (program 1440, etc.), and can perform various data processing or operations. As part of data processing or operations, processor 1420 can load commands and / or data received from other components (sensor module 1476, communication module 1490, etc.) into volatile memory 1432, can process the commands and / or data stored in volatile memory 1432, and can store the result data in non-volatile memory 1434. Processor 1420 may include a main processor 1421 (central processing unit, application processor, etc.) and an auxiliary processor 1423 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of or together with the main processor 1421. Auxiliary processor 1423 can use less power than main processor 1421 and can perform specified functions.

[0114] The auxiliary processor 1423, acting on behalf of the main processor 1421 when the main processor 1421 is inactive (dormant state) or working with the main processor 1421 when the main processor 1421 is active (application execution state), can control the functions and / or states of some components of the electronic device 1401 (display device 1460, sensor module 1476, communication module 1490, etc.). The auxiliary processor 1423 (image signal processor, communication processor, etc.) can be implemented as part of other functionally related components (camera module 1480, communication module 1490, etc.).

[0115] The memory 1430 can store various data required by the components of the electronic device 1401 (processor 1420, sensor module 1476, etc.). The data may include, for example, input and / or output data and related commands concerning software (program 1440, etc.). The memory 1430 may include volatile memory 1432 and / or non-volatile memory 1434. The non-volatile memory 1434 may include internal memory 1436 fixedly mounted in the electronic device 1401 and removable external memory 1438.

[0116] Program 1440 may be stored as software in memory 1430 and may include operating system 1442, middleware 1444 and / or application 1446.

[0117] Input device 1450 can receive commands and / or data to be used in components (processor 1420, etc.) of electronic device 1401 from outside (user, etc.). Input device 1450 may include a microphone, mouse, keyboard, and / or digital pen (stylus).

[0118] The sound output device 1455 can output sound signals to the outside of the electronic device 1401. The sound output device 1455 may include a speaker and / or a receiver. The speaker can be used for general purposes such as multimedia playback or recording, and the receiver can be used to receive calls. The receiver can be coupled as part of the speaker or can be implemented as a stand-alone device.

[0119] Display device 1460 can provide visual information to the outside of electronic device 1401. Display device 1460 may include a display, holographic device or projector, and control circuitry for controlling the corresponding device. Display device 1460 may include touch circuitry configured to sense touch and / or sensor circuitry configured to measure the intensity of the force generated by touch (pressure sensor, etc.).

[0120] The audio module 1470 can convert sound into electrical signals and vice versa. The audio module 1470 can obtain sound through the input device 1450, or can output sound through the sound output device 1455 and / or speakers and / or headphones of other electronic devices (electronic devices 1402, etc.) directly or wirelessly connected to the electronic device 1401.

[0121] Sensor module 1476 can sense the operating state (power, temperature, etc.) of electronic device 1401 or the external environmental state (user state, etc.), and can generate electrical signals and / or data values ​​corresponding to the sensed state. Sensor module 1476 may include gesture sensors, gyroscope sensors, pressure sensors, magnetic sensors, accelerometers, grip sensors, proximity sensors, color sensors, infrared (IR) sensors, vivo sensors, temperature sensors, humidity sensors, and / or illuminance sensors.

[0122] Interface 1477 may support one or more specified protocols that can be used for electronic device 1401 to connect directly or wirelessly to other electronic devices (electronic device 1402, etc.). Interface 1477 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, an SD card interface, and / or an audio interface.

[0123] Connection terminal 1478 may include a connector that allows electronic device 1401 to be physically connected to other electronic devices (electronic device 1402, etc.). Connection terminal 1478 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0124] The haptic module 1479 can convert electrical signals into mechanical stimuli (vibration, motion, etc.) or electrical stimuli that a user can sense through touch or motion. The haptic module 1479 may include a motor, a piezoelectric device, and / or an electrical stimulation device.

[0125] Camera module 1480 can capture still images and video. Camera module 1480 may include: a lens assembly comprising one or more lenses; Figure 1 The image sensor 1000, image signal processor, and / or flash are included. The lens assembly included in the camera module 1480 can capture light emitted from the object to be captured.

[0126] The power management module 1488 can manage the power supplied to the electronic device 1401. The power management module 1488 can be implemented as part of a power management integrated circuit (PMIC).

[0127] Battery 1489 can supply power to the components of electronic device 1401. Battery 1489 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0128] Communication module 1490 can support the establishment of direct (wired) communication channels and / or wireless communication channels between electronic device 1401 and other electronic devices (electronic device 1402, electronic device 1404, or server 1408, etc.), and perform communication through the established communication channels. Communication module 1490 can operate independently of processor 1420 (application processor, etc.) and can include one or more communication processors that support direct and / or wireless communication. Communication module 1490 may include wireless communication module 1492 (cellular communication module, short-range wireless communication module, Global Navigation Satellite System (GNSS) communication module, etc.) and / or wired communication module 1494 (local area network (LAN) communication module, power line communication module, etc.). Within the communication module, a corresponding communication module can communicate with other electronic devices via a first network 1498 (a short-range communication network such as Bluetooth, WiFi Direct, or Infrared Data Association (IrDA)) or a second network 1499 (a long-range communication network such as a cellular network, the Internet, or computer network (LAN, WAN, etc.). The different types of communication modules described above can be integrated into a single component (a single chip, etc.) or implemented as multiple separate components (multiple chips). The wireless communication module 1492 can identify and authenticate the electronic device 1401 in a communication network (e.g., a first network 1498 and / or a second network 1499) by using user information (International Mobile Subscriber Identity (IMSI) etc.) stored in the user identification module 1496.

[0129] Antenna module 1497 can transmit signals and / or power to or receive signals and / or power from external sources (other electronic devices, etc.). The antenna may include a radiator as a conductive pattern formed on a substrate (PCB, etc.). Antenna module 1497 may include one or more antennas. When antenna module 1497 includes multiple antennas, communication module 1490 can select an antenna suitable for a communication type used in a communication network such as first network 1498 and / or second network 1499 from among the multiple antennas. Signals and / or power can be transmitted between communication module 1490 and other electronic devices via the selected antenna. Other components besides antennas (RFIC, etc.) may be included as part of antenna module 1497.

[0130] Some of the components can be connected to each other via communication methods between peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industrial processor interface (MIPI), etc.) and can exchange signals (commands, data, etc.).

[0131] Commands or data can be sent or received between electronic device 1401 and external electronic device 1404 via server 1408 connected to the second network 1499. Other electronic devices 1402 and 1404 can be devices of the same or different kind as electronic device 1401. All or some operations performed in electronic device 1401 can be performed in one or more of the other electronic devices 1402, 1404, and 1408. For example, when electronic device 1401 must perform a specific function or service, electronic device 1201 can request one or more other electronic devices to perform some or all of the function or service, instead of performing the function or service itself. The one or more electronic devices receiving the request perform additional functions or services related to the request and can transmit the execution result back to electronic device 1401. For this purpose, technologies such as cloud computing, distributed computing, or client-server computing can be used.

[0132] Figure 15 It is shown Figure 14 Block diagram of camera module 1480. (Reference) Figure 15 The camera module 1480 may include a lens assembly 1510, a flash 1520, and an image sensor 1000. Figure 1The camera module 1480 may include an image sensor 1000, an image stabilizer 1540, a memory 1550 (buffer memory, etc.), and / or an image signal processor 1560. The lens assembly 1510 can capture light emitted from the object to be captured. The camera module 1480 may include multiple lens assemblies 1510, and in this case, the camera module 1480 may include a dual-camera module, a 360-degree camera, or a spherical camera. Some of the multiple lens assemblies 1510 may have the same lens properties (angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens properties. The lens assembly 1510 may include a wide-angle lens or a telephoto lens.

[0133] The flash unit 1520 can emit light to amplify light emitted or reflected from an object. The flash unit 1520 may include one or more light-emitting diodes (RGB LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or a xenon lamp. The image sensor 1000 may be a reference. Figure 1 The image sensor described above converts light emitted or reflected from an object and transmitted through the lens assembly 1510 into electrical signals to obtain an image corresponding to the object. The image sensor 1000 may include one or more selected sensors among image sensors with different properties (e.g., RGB sensor, black-and-white (BW) sensor, IR sensor, or UV sensor). Each sensor included in the image sensor 1000 may be implemented as a charge-coupled device (CCD) sensor and / or a complementary metal-oxide-semiconductor (CMOS) sensor.

[0134] Image stabilizer 1540 responds to movement of camera module 1480 or electronics 1501 including camera module 1480 by moving one or more lenses or image sensors 1000 included in lens assembly 1510 in a specific direction, or by controlling the operating characteristics of image sensor 1000 (adjusting readout timing, etc.) to compensate for the negative effects of movement. Image stabilizer 1540 can sense movement of camera module 1480 or electronics 1401 using a gyroscope sensor (not shown) or accelerometer sensor (not shown) disposed in or outside camera module 1480. Image stabilizer 1540 can be implemented as an optical type.

[0135] The memory 1550 can store some or all of the image data acquired by the image sensor 1000 for subsequent image processing operations. For example, when multiple images are acquired at high speed, the acquired raw data (Bayer pattern data, high-resolution data, etc.) is stored in the memory 1550, and only the low-resolution image is displayed. Then, the raw data of the selected image (user selection, etc.) can be transferred to the image signal processor 1560. The memory 1550 can be integrated with the memory 1430 of the electronic device 1401, or it can include an additional memory that operates independently.

[0136] Image signal processor 1560 can perform image processing on images acquired by image sensor 1000 or image data stored in memory 1550. Image processing may include depth map generation, 3D modeling, panorama generation, feature extraction, image combination, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). Image signal processor 1560 can perform control (exposure time control or readout timing control, etc.) of elements included in camera module 1580 (image sensor 1000, etc.). Images processed by image signal processor 1560 may be stored again in memory 1550 for further processing, or may be provided to external components of camera module 1480 (e.g., memory 1430, display device 1460, electronic device 1402, electronic device 1404, server 1408, etc.). Image signal processor 1560 may be integrated with processor 1420, or may be configured as an additional processor operating independently of processor 1420. When the image signal processor 1560 is configured as an additional processor separate from the processor 1420, the image processed by the image signal processor 1560 can undergo additional image processing by the processor 1420 and then be displayed on the display device 1460.

[0137] Electronic device 1401 may include a plurality of camera modules 1480 with different attributes or functions. In this case, one of the plurality of camera modules 1480 may include a wide-angle camera, and another camera module 1480 may be a telephoto camera. Similarly, one of the plurality of camera modules 1480 may include a front-facing camera, and another camera module 1480 may include a rear-facing camera.

[0138] The image sensor 1000 according to the embodiment can be applied to Figure 16 The mobile phone or smartphone shown is 1600. Figure 17 The tablet computer or smart tablet computer 1700 shown Figure 18 The digital camera or video recorder shown is 1800. Figure 19 The laptop computer shown is 1900 or Figure 20The television or smart TV 2000 shown is an example. For instance, a smartphone 1600 or a smart tablet 1700 may include multiple high-resolution cameras, each including a high-resolution image sensor. By using high-resolution cameras, depth information of objects in an image can be extracted, image defocus can be adjusted, or objects in an image can be automatically identified.

[0139] Furthermore, the image sensor 1000 can be applied to Figure 21 The smart refrigerator 2100 shown Figure 22 The surveillance camera 2200 shown Figure 23 The robot 2300 shown Figure 24 Examples include medical cameras such as 2400. For instance, a smart refrigerator 2100 can automatically identify food items in the refrigerator using an image sensor and can notify the user via a smartphone about the presence of specific types of food, the types of food placed or removed, etc. Furthermore, a surveillance camera 2200 can provide ultra-high-resolution images using high sensitivity, allowing users to identify objects or people even in dark environments. A robot 2300 can be placed in disaster or industrial locations where people cannot directly access them to provide users with high-resolution images. A medical camera 2400 can provide high-resolution images for diagnosis or surgery and can dynamically adjust its field of view.

[0140] Furthermore, the image sensor 1000 can be applied to Figure 25 The vehicle 2500 is shown. The vehicle 2500 may include multiple vehicle cameras 2510, 2520, 2530, and 2540 at various locations. Each of the vehicle cameras 2510, 2520, 2530, and 2540 may include an image sensor according to one or more embodiments. The vehicle 2500 can provide the driver with various information about the interior of the vehicle 2500 or the surrounding area of ​​the vehicle 2500 by using the multiple vehicle cameras 2510, 2520, 2530, and 2540, and can provide the driver with information necessary for autonomous driving by automatically recognizing objects or people in the images.

[0141] It should be understood that the embodiments described herein should be considered in a descriptive sense and not for limiting purposes only. The description of features or aspects in each embodiment should generally be considered as other similar features or aspects that may be used in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the appended claims.

Claims

1. An image sensor, comprising: A sensor substrate, including a first pixel and a second pixel for sensing light; as well as A dichroic lens array is used to converge light of a first wavelength included in the incident light onto a first pixel by changing the phase of that light. The sensor substrate further includes: The effective pixel region is used to output pixel signals for image generation; A first dummy pixel region is set outside the effective pixel region and outputs pixel signals to assist in image generation; and The second dummy pixel region is located outside the first dummy pixel region and does not output pixel signals. The dichroic lens array includes multiple regions, corresponding to the first pixel and the second pixel of the effective pixel region, the first dummy pixel region, and the second dummy pixel region, respectively. The dichroic lens array is configured to converge at least a portion of the first wavelength of light incident on the region above the second dummy pixel region in the dichroic lens array onto the first pixel formed in the first dummy pixel region.

2. The image sensor according to claim 1, in, The second dummy pixel region includes pixels arranged in two or more columns and / or rows in a direction away from the effective pixel region.

3. The image sensor according to claim 1, in, The plurality of regions in the dichroic lens array include nanopillars above the effective pixel region, the first dummy pixel region, and the second dummy pixel region.

4. The image sensor according to claim 1, in, The dichroic lens array changes the phase of the second wavelength light included in the incident light to be different from the phase of the first wavelength light, and causes the second wavelength light to converge onto the second pixel.

5. The image sensor according to claim 1, in, The pixel signal output from the first dummy pixel region is a signal used to correct the pixel signal output from the effective pixel region.

6. The image sensor according to claim 1, in, The first dummy pixel region is located outside the effective pixel region to surround the effective pixel region.

7. The image sensor according to claim 1, in, The second dummy pixel region is disposed outside the first dummy pixel region to surround the first dummy pixel region.

8. The image sensor according to claim 1, in, The sensor substrate further includes an optical black area, which is disposed outside the second dummy pixel area and includes a light-shielding metal layer, and the optical black area is configured to output a dark level signal.

9. The image sensor according to claim 8, in, The dichroic lens array includes nanopillars disposed above the optical black area.

10. The image sensor according to claim 8, in, The optical black area is positioned outside the second dummy pixel area to surround the second dummy pixel area.

11. The image sensor according to claim 8, in, The pixels included in the optical black area are based on the noise output pixel signals of photodiodes.

12. The image sensor according to claim 1, in, The area of ​​the dichroic lens array forms multiple microlenses for focusing light of the first wavelength onto the first pixel, and the area of ​​the microlenses is larger than the area of ​​the first pixel.

13. The image sensor according to claim 12, in, The area of ​​the microlens is 1.5 to 4 times larger than the area of ​​the first pixel.

14. An image sensor, comprising: A sensor substrate, including a first pixel and a second pixel for sensing light; as well as A dichroic lens array is used to converge light of a first wavelength included in the incident light onto a first pixel by changing the phase of that light. The sensor substrate further includes: The effective pixel region is used to output pixel signals for image generation; A dummy pixel region is set outside the effective pixel region, and a pixel signal is output to assist in image generation; and An optical black area is positioned outside the dummy pixel area and outputs a dark level signal. The dichroic lens array includes multiple regions corresponding to the first pixel and the second pixel in the effective pixel region, the dummy pixel region, and the optical black region, respectively. The dichroic lens array is configured to converge at least a portion of the first wavelength of light incident on the region of the dichroic lens array located above the optical black region onto the first pixel in the dummy pixel region.

15. The image sensor according to claim 14, in, The optical black area includes pixels arranged in two or more columns and / or rows in a direction away from the effective pixel area.

16. The image sensor according to claim 14, in, The plurality of regions in the dichroic lens array include nanopillars above the effective pixel region, the dummy pixel region, and the optical black region.

17. The image sensor according to claim 14, in, The dichroic lens array changes the phase of the second wavelength light included in the incident light to be different from the phase of the first wavelength light, and causes the second wavelength light to converge onto the second pixel.

18. The image sensor according to claim 14, in, The sensor substrate includes a light-shielding metal layer formed on the pixels included in the optical black area.

19. The image sensor according to claim 14, in, The pixel signal output from the dummy pixel region is a signal used to correct the pixel signal output from the valid pixel region.

20. The image sensor according to claim 14, in, The dummy pixel region is set outside the effective pixel region to surround the effective pixel region.

21. The image sensor according to claim 14, in, The optical black area is positioned outside the dummy pixel area to surround it.

22. The image sensor according to claim 14, in, The pixels included in the optical black area are based on the noise output pixel signals of photodiodes.

23. The image sensor according to claim 14, in, The area of ​​the dichroic lens array forms multiple microlenses for focusing light of the first wavelength onto the first pixel, and the area of ​​the microlenses is larger than the area of ​​the first pixel.

24. The image sensor according to claim 23, in, The area of ​​the microlens is 1.5 to 4 times larger than the area of ​​the first pixel.

25. An electronic device comprising: Image sensors are used to convert optical images into electrical signals; as well as The processor is configured to control the operation of the image sensor and to store and output signals generated by the image sensor. The image sensor includes: A sensor substrate, including a first pixel and a second pixel for sensing light; and A dichroic lens array is used to converge the light of a first wavelength included in the incident light onto a first pixel by changing the phase of the first wavelength light. The sensor substrate includes: The effective pixel region is used to output pixel signals for image generation; A first dummy pixel region is set outside the effective pixel region and outputs pixel signals to assist in image generation; and The second dummy pixel region is located outside the first dummy pixel region and does not output pixel signals. The dichroic lens array includes multiple regions, corresponding to the first pixel and the second pixel of the effective pixel region, the first dummy pixel region, and the second dummy pixel region, respectively. The dichroic lens array causes at least a portion of the first wavelength of light incident on the region above the second dummy pixel region in the dichroic lens array to converge onto the first pixel formed in the first dummy pixel region.

26. The electronic device according to claim 25, in, The second dummy pixel region includes pixels arranged in two or more columns and / or rows in a direction away from the effective pixel region.

27. The electronic device according to claim 26, in, The plurality of regions in the dichroic lens array include nanopillars above the effective pixel region, the first dummy pixel region, and the second dummy pixel region.

28. An electronic device comprising: Image sensors are used to convert optical images into electrical signals; as well as The processor is configured to control the operation of the image sensor and to store and output signals generated by the image sensor. The image sensor includes: A sensor substrate, including a first pixel and a second pixel for sensing light; and A dichroic lens array is used to converge light of a first wavelength included in the incident light onto a first pixel by changing the phase of that light. The sensor substrate includes: The effective pixel region is used to output pixel signals for image generation; A dummy pixel region is set outside the effective pixel region, and a pixel signal is output to assist in image generation; and An optical black area is positioned outside the dummy pixel area and outputs a dark level signal. The dichroic lens array includes multiple regions corresponding to the first pixel and the second pixel in the effective pixel region, the dummy pixel region, and the optical black region, respectively. The dichroic lens array causes at least a portion of the first wavelength of light incident on the region of the dichroic lens array located above the optical black region to converge onto the first pixel in the dummy pixel region.

29. The electronic device according to claim 28, in, The optical black area includes pixels arranged in two or more columns and / or rows in a direction away from the effective pixel area.

30. The electronic device according to claim 29, in, The plurality of regions in the dichroic lens array include nanopillars above the effective pixel region, the dummy pixel region, and the optical black region.

Images