Multifunctional sensor and method of making the same

Abstract

The application relates to a multifunctional sensor and a preparation method thereof. The multifunctional sensor comprises a first conductive film, a second conductive film, a first electrode, a second electrode and a third electrode. The second conductive film is arranged in a laminated mode with the first conductive film. The first electrode is electrically connected with the first conductive film. The second electrode is electrically connected with the second conductive film. The third electrode is electrically connected with the first conductive film. The first electrode, the second electrode and the third electrode are not in contact with each other. In the multifunctional sensor, a three-electrode strategy is adopted to arrange the positions of the electrodes. The first electrode is a common electrode and is always in an on state. Other electrodes are non-common electrodes and are respectively electrically connected with different conductive films. Different sensors are enabled by turning on different non-common electrodes. Two sensors work separately, and different sensing signals do not affect each other. Meanwhile, the preparation method and the structure of the sensor are simple.

Description

Technical Field

[0001] This application relates to the field of flexible wearable electronic devices, and in particular to a multifunctional sensor and its fabrication method. Background Technology

[0002] Flexible wearable electronic devices are attracting increasing attention due to their wide range of applications in health monitoring, human-computer interaction, and sports management. Sensors play a crucial and indispensable role in these fields. In particular, multifunctional sensors capable of simultaneously detecting multiple environmental signals are a hot topic among researchers. For example, temperature-pressure electronic skin consists of an array of temperature and pressure sensors. Furthermore, sensors with humidity and pressure sensing functions have been achieved by designing wrinkled and porous sponge structures. Although some individual sensors respond to multiple signals (such as pressure, temperature, and humidity).

[0003] Traditional technologies have drawbacks such as the interaction between different sensing signals and the complexity of fabrication and structure. Summary of the Invention

[0004] Therefore, it is necessary to provide a multifunctional sensor and its fabrication method to address the problems of mutual influence between different sensing signals and the complexity of its preparation and structure.

[0005] A multifunctional sensor includes a first conductive film, a second conductive film, a first electrode, a second electrode, and a third electrode. The second conductive film is stacked on top of the first conductive film. The first electrode is electrically connected to the first conductive film, the second electrode is electrically connected to the second conductive film, and the third electrode is electrically connected to the first conductive film. The first electrode, the second electrode, and the third electrode do not contact each other.

[0006] In one embodiment, the surface of the first conductive film near the second conductive film has a plurality of first protrusions. The surface of the second conductive film near the first conductive film has a plurality of second protrusions.

[0007] In one embodiment, the second protrusion structure has tiny protrusions on the surface near the first conductive film.

[0008] In one embodiment, the first conductive film comprises a conductive nanomaterial-silk composite film material, and the second conductive film comprises a network structure leaf vein layer.

[0009] In one embodiment, an encapsulation film is further included, which encapsulates the first conductive film and the second conductive film.

[0010] In one embodiment, the encapsulation film comprises a flexible polymer material.

[0011] In one embodiment, the first electrode and the third electrode are bonded to the first conductive film with silver paste, and the second electrode is bonded to the second conductive film with silver paste.

[0012] A method for fabricating a multifunctional sensor, comprising:

[0013] The first conductive film and the second conductive film were prepared respectively.

[0014] A first electrode and a third electrode are disposed on the first conductive film, such that the first electrode and the third electrode are electrically connected to the first conductive film. A second electrode is disposed on the second conductive film, such that the second electrode is electrically connected to the second conductive film.

[0015] The second conductive film covers the first conductive film, and the first electrode, the second electrode, and the third electrode do not contact each other.

[0016] In one embodiment, the preparation of the first conductive film and the second conductive film further includes: mixing conductive nanomaterials with silk to prepare the first conductive film; and preparing the second conductive film using leaf veins.

[0017] In one embodiment, the step of covering the first conductive film with the second conductive film and ensuring that the first electrode, the second electrode, and the third electrode do not contact each other further includes: wrapping the first conductive film and the second conductive film with an encapsulation film.

[0018] This application describes a multifunctional sensor that employs a three-electrode strategy to position the electrodes. The first electrode is a common electrode and is always in an ON state. When the first electrode is the common electrode, the second and third electrodes are non-common electrodes and are electrically connected to different conductive films. During operation, only one of the second or third electrodes is ON. By switching the second and third electrodes, different functional sensors can operate. Different sensors operate independently, and different sensing signals do not interfere with each other. Furthermore, the sensor has a simple structure and is easy to manufacture. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1A schematic diagram of a first conductive film provided in an embodiment of this application;

[0021] Figure 2 A schematic diagram of a multifunctional sensor provided in an embodiment of this application;

[0022] Figure 3 A cross-sectional view of a multifunctional sensor provided in an embodiment of this application;

[0023] Figure 4 A schematic diagram of a multifunctional sensor provided in another embodiment of this application;

[0024] Figure 5 This is a flowchart illustrating a method for fabricating a multifunctional sensor according to an embodiment of this application.

[0025] Explanation of icon numbers

[0026] Multifunctional sensor 10, first conductive film 110, second conductive film 120, encapsulation film 130, silver paste 140, first electrode 111, third electrode 112, first protrusion structure 113, second electrode 121, second protrusion structure 122, micro protrusion 123. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided through embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0028] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0030] In traditional technologies, there are two ways to connect the electrodes of multifunctional sensors: (1) using two electrodes. This method cannot completely overcome crosstalk between different environmental signals, and the measured electrical signal is mixed with background signals, requiring post-processing, which makes the testing process and data processing quite complicated. (2) using four electrodes. Sensors prepared by this method are mostly isolated stacks of single-function sensors into a sensing array, with complex structure and preparation methods. During device operation, there is no connection between the functional layers responsible for different sensing, and each performs its own function, which cannot achieve true high integration and unification. In order to overcome the above shortcomings of multifunctional sensors, this application adopts a three-electrode strategy to set the electrodes.

[0031] Please see Figure 1 and Figure 2 This application provides a multifunctional sensor 10. The multifunctional sensor 10 includes: a first conductive film 110, a second conductive film 120, a first electrode 111, a second electrode 121, and a third electrode 112. The second conductive film 120 is stacked on top of the first conductive film 110. The first electrode 111 is electrically connected to the first conductive film 110. The second electrode 121 is electrically connected to the second conductive film 120. The third electrode 112 is electrically connected to the first conductive film 110. The first electrode 111, the second electrode 121, and the third electrode 112 do not contact each other.

[0032] In the multifunctional sensor 10, the first electrode 111 and the third electrode 112 are both electrically connected to the first conductive film 110. The second electrode 121 is electrically connected to the second conductive film 120. The second conductive film 120 is stacked on top of the first conductive film 110, and the second conductive film 120 and the first conductive film 110 are in contact. The first electrode 111 is a common electrode, and the common electrode is always in the ON state. The first electrode 111 is set as the common electrode. When the first electrode 111 and the third electrode 112 are simultaneously ON, the first conductive film 110, the first electrode 111, and the third electrode 112 form a sensor. At this time, the change in sensing information will affect the resistance of the first conductive film 110, and the change in resistance can be measured to obtain the change in sensing information. When the first electrode 111 and the second electrode 121 are simultaneously ON, the second electrode 121, the second conductive film 120, the first electrode 111, and the first conductive film 110 form a sensor. The change in the sensing information affects the interlayer resistance between the first conductive film 110 and the second conductive film 120, and the change in the sensing information can be obtained by measuring the change in resistance.

[0033] In the multifunctional sensor 10, a three-electrode strategy is employed to configure the first electrode 111, the second electrode 121, and the third electrode 112. The first electrode 111 is a common electrode, and the other electrodes are non-common electrodes. The common electrode is always in the ON state, and different sensors operate by switching the ON non-common electrodes. The sensors in the multifunctional sensor 10 operate independently, and different sensing signals do not interfere with each other. Furthermore, the multifunctional sensor 10 has a simple structure.

[0034] In one embodiment, the first electrode 111 is a common electrode, and the second electrode 121 and the third electrode 112 are non-common electrodes.

[0035] In one specific embodiment, the multifunctional sensor 10 is a pressure-temperature integrated sensor. In this case, the first electrode 111, the first conductive film 110, and the third electrode 112 function as a temperature sensor. When monitoring ambient temperature is required, a voltage can be applied to the first electrode 111 and the third electrode 112. Temperature changes affect carrier hopping and tunneling on the first conductive film 110, thereby affecting the resistance of the first conductive film 110. The measured resistance signal can then be converted into a temperature signal. The second electrode 121, the second conductive film 120, the first conductive film 110, and the first electrode 111 function as a pressure sensor. When monitoring pressure is required, a voltage is applied to the second electrode 121 and the first electrode 111. Pressure acts on the first conductive film 110 or the second conductive film 120, causing a change in the distance and contact point between them. The conductive path between the first conductive film 110 and the second conductive film 120 increases, and the resistance of the pressure sensor decreases. Measuring the resistance signal at this time yields the pressure signal.

[0036] Please see Figure 3 In one embodiment, the surface of the first conductive film 110 near the second conductive film 120 is provided with a plurality of first protrusions 113. The surface of the second conductive film 120 near the first conductive film 110 is provided with a plurality of second protrusions 122.

[0037] Both the first conductive film 110 and the second conductive film 120 have raised structures on their surfaces. The first raised structure 113 is located on the surface of the first conductive film 110 near the second conductive film 120. The second raised structure 122 is located on the surface of the second conductive film 120 near the first conductive film 110. The first conductive film 110 and the second conductive film 120 are in contact, and the first raised structure 113 and the second raised structure 122 increase the contact area and contact points between the two conductive films. This results in a smaller initial interlayer resistance between the first conductive film 110 and the second conductive film 120, allowing even small changes in resistance caused by the sensing information to be clearly measured, thus improving the sensor's sensitivity.

[0038] In one embodiment, the second protrusion structure 122 has minute protrusions 123 on the surface near the first conductive film 110.

[0039] The second protrusion structure 122 has the micro-protrusions 123 disposed near the surface of the first conductive film 110. The micro-protrusions 123 increase the surface roughness of the second conductive film 120, improving the sensor's sensitivity. When monitoring pressure, if the pressure acting on the first conductive film 110 or the second conductive film 120 increases, multiple micro-protrusions 123 will come into contact with the first conductive film 110. This increases the number of contact points between the first conductive film 110 and the second conductive film 120. Even when the pressure changes only slightly, there are enough contact points between the first conductive film 110 and the second conductive film 120 to change, thus enabling the measurement of minute pressure changes.

[0040] In one embodiment, the first conductive film 110 comprises a conductive nanomaterial-silk composite film material, and the second conductive film 120 comprises a network structure leaf vein layer.

[0041] The conductive nanomaterial-silk composite film is prepared by mixing conductive nanomaterials and silk. Because it contains silk, the conductive nanomaterial-silk composite film has the first raised structure 113 on its surface. The network structure leaf vein layer is prepared from leaves. The network structure leaf vein layer has a fractal structure and naturally raised textures. The surface of the network structure leaf vein layer has the second raised structure 122 and micro-protrusions 123, resulting in a relatively large surface roughness, which is beneficial for improving conductivity. If both the first conductive film 110 and the second conductive film 120 contain the conductive nanomaterial-silk composite film, the surface roughness of the first conductive film 110 and the second conductive film 120 is insufficient, resulting in poor sensor sensitivity. The network structure leaf vein layer is prepared by immersing treated leaf veins in a conductive solution; its conductivity is lower than that of the conductive nanomaterial-silk composite film and it is easily affected. If both the first conductive film 110 and the second conductive film 120 contain the network structure leaf vein layer, the initial resistance of the sensor is large, resulting in poor sensitivity. Therefore, the first conductive film 110 and the second conductive film 120 are designed as conductive nanomaterial-silk composite film material and network structure leaf vein layer, respectively.

[0042] In one embodiment, the first conductive film 110 includes the network structure leaf vein layer, and the second conductive film 120 includes the conductive nanomaterial-silk composite film material.

[0043] In one embodiment, the conductive nanomaterial may be MXene.

[0044] In one embodiment, the conductive nanomaterial can be replaced with a conductive and easily moldable material, such as a conductive polymer. The conductive polymer includes one or more of carbon nanotubes, graphene, reduced graphene oxide, fullerene, polyaniline, polypyrrole, polythiophene, polyacetylene, and polydiyne.

[0045] Please see Figure 4 In one embodiment, the multifunctional sensor 10 further includes an encapsulation film 130. The encapsulation film 130 encapsulates the first conductive film 110 and the second conductive film 120.

[0046] The encapsulation film 130 encapsulates the first conductive film 110 and the second conductive film 120. The encapsulation film 130 protects the multifunctional sensor 10 from the influence of other environmental information during operation, except for the environmental information to be detected.

[0047] In one embodiment, the encapsulation film 130 comprises a flexible polymer material.

[0048] The flexible polymer material is used as the encapsulation film 130 to encapsulate the first conductive film 110 and the second conductive film 120. The resulting multifunctional sensor 10 is flexible overall. In practical applications, the multifunctional sensor 10 is compatible with other wearable devices.

[0049] In one embodiment, the flexible polymer material may be one or a combination of two or more of polyethylene terephthalate, biaxially oriented polypropylene, polypropylene, polyethylene, silicone rubber, fluorosilicone rubber, polymethyl methacrylate, polyurethane, epoxy resin, ethyl polyacrylate, butyl polyacrylate, polystyrene, polybutadiene, or polyacrylonitrile.

[0050] In one embodiment, the first electrode 111 and the third electrode 112 are bonded to the first conductive film 110 by silver paste 140. The second electrode 121 is bonded to the second conductive film 120 by silver paste 140.

[0051] The first electrode 111 and the third electrode 112 are bonded to the first conductive film 110 via the silver paste 140. The second electrode 121 is bonded to the second conductive film 120 via the silver paste 140. The silver paste 140 is conductive. The silver paste 140 bonds the first electrode 111, the second electrode 121, and the third electrode 112, and simultaneously electrically connects the first electrode 111, the second electrode 121, and the third electrode 112 to the conductive film.

[0052] Please see Figure 5 This application provides a method for fabricating a multifunctional sensor, comprising:

[0053] S10, prepare the first conductive film 110 and the second conductive film 120 respectively.

[0054] S20, a first electrode 111 and a third electrode 112 are disposed on the first conductive film 110, so that the first electrode 111 and the third electrode 112 are electrically connected to the first conductive film 110. A second electrode 121 is disposed on the second conductive film 120, so that the second electrode 121 is electrically connected to the second conductive film 120.

[0055] S30, the second conductive film 120 covers the first conductive film 110, and the first electrode 111, the second electrode 121 and the third electrode 112 do not contact each other.

[0056] In step S30, the second conductive film 120 is used to cover the first conductive film 110, forming the multifunctional sensor 10. At this time, the first electrode 111, the second electrode 121, and the third electrode 112 are not in contact with each other. If any two of the first electrode 111, the second electrode 121, and the third electrode 112 come into contact, the two contacting electrodes will be short-circuited, and the sensor will not function properly.

[0057] In one embodiment, the first electrode 111, the second electrode 121, and the third electrode 112 may be copper foil.

[0058] In one embodiment, step S10 further includes: mixing conductive nanomaterials with silk to form the first conductive film 110; and preparing the second conductive film 120 using leaves.

[0059] In one embodiment, the preparation of the first conductive film 110 includes: mixing the conductive nanomaterial solution and the silk at a mass ratio of 2:3, and then subjecting the mixture of the conductive nanomaterial solution and the silk to ultrasonic treatment, magnetic stirring and filtration to obtain the first conductive film 110.

[0060] In one embodiment, the preparation of the conductive nanomaterial includes: preparing an etching solution; adding the raw material powder of the conductive nanomaterial to the etching solution to prepare an etched mixed solution; adjusting the pH of the mixed solution to neutral; filtering the mixed solution and drying the precipitate obtained from the filtration to obtain the conductive nanomaterial; and placing the conductive nanomaterial in deionized water to obtain a conductive nanomaterial solution.

[0061] In one embodiment, preparing the silk involves: boiling silkworm cocoons in a weakly alkaline solution or deionized water; and washing the cocoons with deionized water to obtain the silk.

[0062] In one embodiment, preparing the second conductive film 120 includes: treating leaves in a boiling alkaline solution and washing away surface impurities with deionized water; removing the leaf mesophyll from the leaf surface and drying to obtain leaf veins; placing the conductive nanomaterial in deionized water to obtain a conductive nanomaterial solution; and repeatedly immersing the leaf veins in the conductive nanomaterial solution to obtain the second conductive film 120.

[0063] In one embodiment, S40 further includes: wrapping the first conductive film 110 and the second conductive film 120 with an encapsulation film 130.

[0064] In one embodiment, the first conductive film 110 is bonded to the encapsulation film 130 by double-sided adhesive, and the second conductive film 120 is bonded to the encapsulation film 130 by double-sided adhesive.

[0065] In one specific embodiment, a dual-function integrated sensor was prepared by constructing an MXene-silk composite membrane and a fractal network structure leaf vein layer.

[0066] 1. Preparation of MXene-silk composite membrane:

[0067] First, HF (hydrogen fluoride) was obtained by magnetically stirring 25 ml of 12 mol / L HCl (hydrogen chloride) solution, 2.3 g of LiF (lithium fluoride) solution, and 5 ml of deionized water for 5 minutes. Then, 1 g of commercial MAX phase powder was slowly added to the above solution at three time intervals, and the solution was stirred at 80°C for 72 hours to etch Al (aluminum) elements. Subsequently, the etched solution was centrifuged and washed several times until the pH of the etched solution reached 7, and a precipitate was obtained. The precipitate was placed in a vacuum oven and dried at 60°C for 24 hours to obtain MXene. 2 g of silkworm cocoons were boiled in 200 ml of 0.05 mol / L Na₂CO₃ solution at 100°C for 3 hours, and then washed with deionized water to obtain silk. The silk was ultrasonically treated at 90% power for 20 minutes. Finally, MXene and silk were mixed at a mass ratio of 2:3, magnetically stirred for 10 minutes, and then filtered to obtain the MXene-silk composite membrane.

[0068] 2. Preparation of leaf vein layer with fractal network structure:

[0069] First, fresh Bodhi leaves are immersed in a 10% NaOH solution at 100°C and boiled for 10 minutes. Then, the leaves are washed with deionized water to remove impurities. Next, the leaf pulp is brushed off with a brush. The leaves are then dried in an oven at 50°C for 30 minutes to obtain the vein layer. The vein layer is cut to an appropriate size. The veins are then immersed several times in a previously prepared MXene solution to obtain a fractal network structure vein layer with good electrical conductivity.

[0070] 3. Three-electrode strategy for connecting electrodes:

[0071] First, cut copper foil into strips of appropriate length and width, preparing three strips for later use. Tear the MXene-silk composite membrane off the filter membrane and cut it into rectangles of 5cm x 2cm. Then, use silver paste to attach two copper foil electrodes to both ends of the MXene-silk composite membrane. Finally, cut the impregnated fractal network vein layer into rectangles of approximately 6cm x 2cm. Simultaneously, use silver paste to attach the remaining copper foil electrode to one end of the fractal network vein layer, ensuring that the three electrodes do not touch when the MXene-silk composite membrane and the fractal network vein layer are stacked. The distance between the two closest electrodes should be no less than 0.5cm.

[0072] 4. Polyethylene terephthalate (PET) film encapsulation:

[0073] First, a 7cm x 3cm rectangle is cut from a polyethylene terephthalate (PET) film and attached to one side of the PET film using double-sided tape. Then, the MXene-silk composite film with the attached electrodes is fixed to the PET film using double-sided tape. Since the MXene-silk composite film is smaller than the PET film, it is positioned with a 0.5cm gap at the left end, a 1.5cm gap at the right end, and a 0.5cm gap at the top and bottom. Finally, the fractal network vein layer is fixed using a similar method. The fractal network vein layer is positioned on the PET film with a 0.5cm gap at the left end, a 0.5cm gap at the right end, and a 0.5cm gap at the top and bottom. The excess polyethylene terephthalate film is pressed tightly with double-sided tape to isolate it from air and moisture, ensuring that the device is not affected by the external environment during operation.

[0074] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A multifunctional sensor, characterized in that, The multifunctional sensor is a pressure-temperature integrated sensor; it includes: First conductive film (110); The second conductive film (120) is stacked with the first conductive film (110); The first electrode (111) is electrically connected to the first conductive film (110); The second electrode (121) is electrically connected to the second conductive film (120); and The third electrode (112) is electrically connected to the first conductive film (110); The first electrode (111), the second electrode (121), and the third electrode (112) do not contact each other; The first electrode (111) is a common electrode and is always in the on state. By switching the second electrode (121) or the third electrode (112) to be on, the operation of the sensors with different monitoring functions in the multifunctional sensor can be switched. The first conductive film (110) includes a conductive nanomaterial-silk composite film material as a temperature sensing functional layer; The second conductive film (120) includes a network structure leaf vein layer as a pressure sensing functional layer; The first conductive film (110) has a plurality of first protrusion structures (113) on its surface near the second conductive film (120). The second conductive film (120) has a plurality of second protrusion structures (122) on its surface near the first conductive film (110); The second protrusion structure (122) has tiny protrusions (123) on its surface near the first conductive film (110).

2. The multifunctional sensor as described in claim 1, characterized in that, Also includes: An encapsulation film (130) encapsulates the first conductive film (110) and the second conductive film (120).

3. The multifunctional sensor as described in claim 2, characterized in that, The encapsulation film (130) comprises a flexible polymer material.

4. The multifunctional sensor as described in claim 1, characterized in that, The first electrode (111) and the third electrode (112) are bonded to the first conductive film (110) with silver paste (140), and the second electrode (121) is bonded to the second conductive film (120) with silver paste (140).

5. A method for fabricating a multifunctional sensor, used to manufacture the multifunctional sensor as described in any one of claims 1-4, characterized in that, include: A first conductive film (110) and a second conductive film (120) are prepared respectively. A first electrode (111) and a third electrode (112) are disposed on the first conductive film (110) so that the first electrode (111) and the third electrode (112) are electrically connected to the first conductive film (110); a second electrode (121) is disposed on the second conductive film (120) so that the second electrode (121) is electrically connected to the second conductive film (120). The second conductive film (120) covers the first conductive film (110), and the first electrode (111), the second electrode (121) and the third electrode (112) do not contact each other.

6. The method for fabricating a multifunctional sensor as described in claim 5, characterized in that, The process of preparing the first conductive film (110) and the second conductive film (120) respectively further includes: The first conductive film (110) is prepared by mixing conductive nanomaterials with silk. The second conductive film (120) is prepared using leaf veins.

7. The method for fabricating a multifunctional sensor as described in claim 5, characterized in that, The method of covering the first conductive film (110) with the second conductive film (120) and ensuring that the first electrode (111), the second electrode (121) and the third electrode (112) do not contact each other further includes: wrapping the first conductive film (110) and the second conductive film (120) with an encapsulation film (130).

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