Processing system and conveying method

Abstract

The present application provides a processing system and a conveying method, and relates to a technology capable of efficiently replacing a consumable component in a processing chamber. The processing system comprises: a chamber capable of mounting a consumable component; a storage module for storing the consumable component; a position detection sensor for detecting the position of the consumable component; a vacuum conveying module capable of being connected with the chamber and the storage module, and having a conveying robot for conveying the consumable component between the chamber and the storage module; and a control unit configured to perform: step (a), controlling the conveying robot to convey the consumable component mounted on the chamber to the storage module; step (b), detecting the position of the consumable component conveyed to the storage module by using the position detection sensor; and step (c), controlling the conveying robot to convey a new consumable component different from the consumable component from the storage module to the chamber on the basis of the position of the consumable component detected in step (b) and with position correction.

Description

Technical Field

[0001] This invention relates to processing systems and conveying methods. Background Technology

[0002] A technique for replacing a focusing ring configured to surround a substrate within a processing chamber where plasma processing is performed is known (see, for example, Patent Documents 1-3).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2012-216614

[0006] Patent Document 2: Japanese Patent Application Publication No. 2018-010992

[0007] Patent Document 3: Japanese Patent Application Publication No. 2011-054933 Summary of the Invention

[0008] The technical problem that the invention aims to solve

[0009] This invention provides a technology that enables efficient replacement of consumable components in the treatment room.

[0010] Technical means to solve the problem

[0011] One embodiment of the processing system of the present invention includes: a chamber capable of housing consumable components; a storage module for housing the consumable components; a position detection sensor for detecting the position of the consumable components; a vacuum transport module capable of being connected to the chamber and the storage module, having a transport manipulator for transporting the consumable components between the chamber and the storage module; and a control unit configured to perform the following steps: step (a), controlling the transport manipulator to transport the consumable components installed in the chamber to the storage module; step (b), using the position detection sensor to detect the position of the consumable components transported to the storage module; and step (c), controlling the transport manipulator to transport a new consumable component, different from the consumable components, from the storage module to the chamber based on the position of the consumable components detected in step (b), after position correction.

[0012] Invention Effects

[0013] Using this invention, consumable components in the treatment room can be replaced efficiently. Attached Figure Description

[0014] Figure 1 This is a diagram illustrating one example of a processing system for an implementation method.

[0015] Figure 2 This is a schematic cross-sectional view representing one example of a processing module.

[0016] Figure 3 This is a front cross-sectional view showing one example of a storage module.

[0017] Figure 4 This is a side cross-sectional view showing one example of a storage module.

[0018] Figure 5 It is a diagram used to illustrate the reference position of each processing module.

[0019] Figure 6 This is a diagram illustrating one example of a method for conveying the edge ring in an embodiment.

[0020] Figure 7 This is a diagram illustrating one example of a method for storing the edge ring in an implementation.

[0021] Figure 8 This is a schematic diagram showing an example of the storage module setup.

[0022] Figure 9 This diagram shows a position detection sensor installed on the fork of a conveyor robot. Detailed Implementation

[0023] The following description, with reference to the accompanying drawings, illustrates non-limiting embodiments of the present invention. Throughout the drawings, identical or corresponding parts or consumable parts are labeled with the same or corresponding reference numerals, and repeated descriptions are omitted.

[0024] [Processing System]

[0025] Reference Figure 1 An example of a processing system for an implementation method will be described. For example... Figure 1 As shown, the processing system PS is a system capable of performing various processes on a substrate, such as plasma processing. The substrate can be, for example, a semiconductor wafer.

[0026] The processing system PS includes vacuum conveying modules TM1 and TM2, processing modules PM1 to PM12, loading interlocking modules LL1 and LL2, atmospheric conveying module LM, and storage module SM.

[0027] Vacuum transport modules TM1 and TM2 are approximately quadrilateral in shape when viewed from above. Processing modules PM1 to PM6 are connected to two opposite sides of vacuum transport module TM1. On one of the other two opposite sides of vacuum transport module TM1, loading interlock modules LL1 and LL2 are connected, and on the other side, a path (not shown) for connection to vacuum transport module TM2 is connected. The sides of vacuum transport module TM1 connected to loading interlock modules LL1 and LL2 are angled accordingly for each of the two loading interlock modules LL1 and LL2. Processing modules PM7 to PM12 are connected to two opposite sides of vacuum transport module TM2. On one of the other two opposite sides of vacuum transport module TM2, a path (not shown) for connection to vacuum transport module TM1 is connected, and on the other side, a storage module SM is connected. Vacuum transport modules TM1 and TM2 each have a vacuum chamber, inside which transport robots TR1 and TR2 are respectively configured.

[0028] The transport robots TR1 and TR2 are configured to rotate, extend, and lift. They transport substrates between the loading interlock modules LL1 and LL2 and the processing modules PM1 to PM12 by placing substrates on forks positioned at their front ends. They also transport consumable components between the processing modules PM1 to PM12 and the storage module SM by placing consumable components on the forks. These consumable components are replaceable parts installed within the processing modules PM1 to PM12 and are consumed during various processes, such as plasma processing, performed within the processing modules PM1 to PM12. Examples of consumable components include, for example, the edge ring 113, the cover ring 114, and the top plate 121 of the upper electrode 12, described later.

[0029] Processing modules PM1 to PM12 each have a processing chamber and a stage disposed within it. After placing the substrate on the stage, processing modules PM1 to PM12 depressurize the internal pressure and introduce processing gas, and apply RF power to generate plasma, using the plasma to perform plasma treatment on the substrate. Vacuum transport modules TM1 and TM2 are separated from processing modules PM1 to PM12 by an openable and closable gate valve G1. An edge ring 113, a cover ring 114, etc., are disposed on the stage. An upper electrode 12 for applying RF power is disposed on the upper part opposite to the stage.

[0030] Loading interlock modules LL1 and LL2 are configured between the vacuum transport module TM1 and the atmospheric transport module LM. Loading interlock modules LL1 and LL2 have internal pressure-variable chambers that can switch between vacuum and atmospheric pressure. Loading interlock modules LL1 and LL2 also have loading stages configured within them. When transferring a substrate from the atmospheric transport module LM to the vacuum transport module TM1, loading interlock modules LL1 and LL2 maintain an internal atmospheric pressure, receive the substrate from the atmospheric transport module LM, then depressurize the internal pressure before transferring the substrate into the vacuum transport module TM1. When transferring a substrate from the vacuum transport module TM1 to the atmospheric transport module LM, loading interlock modules LL1 and LL2 maintain an internal vacuum, receive the substrate from the vacuum transport module TM1, then pressurize the internal pressure to atmospheric pressure before transferring the substrate into the atmospheric transport module LM. Loading interlock modules LL1 and LL2 are separated from the vacuum transport module TM1 by an openable / closable gate valve G2. The interlocking modules LL1 and LL2 are separated from the atmospheric transport module LM by an openable and closable gate valve G3.

[0031] The atmospheric transport module LM is configured opposite to the vacuum transport module TM1. The atmospheric transport module LM can be, for example, an EFEM (Equipment Front End Module). The atmospheric transport module LM is cuboid in shape and includes an FFU (Fan Filter Unit), which is an atmospheric transport chamber maintained at atmospheric pressure. On one side of the atmospheric transport module LM along its length, it is connected to two loading interlock modules LL1 and LL2. On the other side of the atmospheric transport module LM along its length, loading ports LP1 to LP5 are connected. Loading ports LP1 to LP5 hold containers (not shown) that can hold multiple (e.g., 25) substrates. These containers can be, for example, FOUP (Front-Opening Unified Pod). A transport robot (not shown) is configured within the atmospheric transport module LM to transport substrates between the FOUP and the variable-pressure chambers of the loading interlock modules LL1 and LL2.

[0032] The storage module SM is detachably connected to the vacuum transport module TM2. The storage module SM has a storage chamber for storing consumable parts. For example, the storage module SM is connected to the vacuum transport module TM2 when replacing consumable parts in processing modules PM1-PM12, and is detached from the vacuum transport module TM2 after replacement. This allows for efficient utilization of the area surrounding the processing system PS. However, the storage module SM can also remain connected to the vacuum transport module TM2 at all times. The storage module SM has a position detection sensor that detects the position of the consumable parts stored in the storage chamber. The consumable parts are transported between processing modules PM1-PM12 and the storage module SM by transport robots TR1 and TR2. The vacuum transport module TM2 and the storage module SM are separated by an openable / closable gate valve G4.

[0033] The processing system PS is equipped with a control unit (CU). The control unit CU controls various parts of the processing system, such as the conveying robots TR1 and TR2 installed in the vacuum conveying modules TM1 and TM2, the conveying robot installed in the atmospheric conveying module LM, and the gate valves G1 to G4. Additionally, the control unit CU acquires the detection values ​​from the position detection sensors installed in the storage module SM, and calculates the reference positions of each processing module PM1 to PM12 based on the acquired detection values. The reference positions will be described later. The control unit CU can be, for example, a computer. The control unit CU includes a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), and auxiliary storage devices. The CPU operates based on the program stored in the ROM or auxiliary storage devices, controlling various parts of the processing system PS.

[0034] In addition, Figure 1 In the example shown, the case where the storage module SM is connected to the opposite side of the vacuum delivery module TM1 via the vacuum delivery module TM2 is illustrated, but the present invention is not limited thereto. For example, the storage module SM may also be connected in place of at least one of the processing modules PM1 to PM12.

[0035] [Plasma Processing Device]

[0036] Reference Figure 2 , for as Figure 1 An example of a plasma processing device used in the processing modules PM1 to PM12 of the processing system PS will be described.

[0037] The plasma processing device 1 includes a chamber 10, a gas supply unit 20, an RF power supply unit 30, an exhaust unit 40, a lifting mechanism 50, and a control unit 100.

[0038] The chamber 10 includes a support portion 11 and an upper electrode 12. The support portion 11 is disposed in the lower region of the processing space 10s within the chamber 10. The upper electrode 12 is disposed above the support portion 11 and functions as part of the top plate of the chamber 10.

[0039] The support portion 11 supports the substrate W in the processing space 10s. The support portion 11 includes a lower electrode 111, an electrostatic chuck 112, an edge ring 113, a cover ring 114, an insulator 115, and a base 116. The electrostatic chuck 112 is disposed on the lower electrode 111. The electrostatic chuck 112 supports the substrate W on its upper surface. The edge ring 113 is disposed around the substrate W on the upper surface of the peripheral portion of the lower electrode 111 to improve the uniformity of plasma processing. The cover ring 114 is disposed on the outer periphery of the edge ring 113 to protect the upper surface of the insulator 115 from the influence of plasma. The edge ring 113 and the cover ring 114 are each annular in shape. The insulator 115 is configured to surround the lower electrode 111 on the base 116. The base 116 is fixed to the bottom of the chamber 10 and supports the lower electrode 111 and the insulator 115.

[0040] The upper electrode 12, together with the insulating component 13, forms the chamber 10. The upper electrode 12 supplies one or more processing gases from the gas supply unit 20 to the processing space 10s. The upper electrode 12 includes a top plate 121 and a support body 122. The lower surface of the top plate 121 defines the processing space 10s. A plurality of gas exhaust holes 121a are formed in the top plate 121. Each of the plurality of gas exhaust holes 121a penetrates the top plate 121 in the thickness direction (vertical direction). The support body 122 supports the top plate 121 in a detachable manner. A gas diffusion chamber 122a is provided inside the support body 122. A plurality of gas holes 122b extend downward from the gas diffusion chamber 122a. The plurality of gas holes 122b communicate with the plurality of gas exhaust holes 121a respectively. A gas inlet 122c is formed in the support body 122. The upper electrode 12 supplies one or more processing gases from the gas inlet 122c through the gas diffusion chamber 122a, multiple gas holes 122b and multiple gas outlet holes 121a to the processing space 10s.

[0041] The gas supply unit 20 includes one or more gas sources 21 and one or more flow controllers 22. The gas supply unit 20 supplies one or more types of process gases from each gas source 21 to the gas inlet 122c via each flow controller 22. The flow controllers 22 may include, for example, mass flow controllers or pressure-controlled flow controllers. Furthermore, the gas supply unit 20 may also include one or more flow modulation devices that modulate or pulse the flow rate of one or more process gases.

[0042] The RF power supply unit 30 includes two RF power supplies (first RF power supply 31a and second RF power supply 31b) and two matching units (first matching unit 32a and second matching unit 32b). The first RF power supply 31a supplies first RF power to the lower electrode 111 via the first matching unit 32a. The frequency of the first RF power can be, for example, 3Hz to 3000GHz. The second RF power supply 31b supplies second RF power to the lower electrode 111 via the second matching unit 32b. The frequency of the second RF power can be, for example, 400kHz to 13.56MHz. Alternatively, a DC power supply can be used instead of the second RF power supply 31b.

[0043] The exhaust section 40 is connected to the exhaust port 10e located at the bottom of the chamber 10. The exhaust section 40 includes a pressure valve, a vacuum pump, etc.

[0044] An inlet / outlet 10p is formed on the side wall of chamber 10. The substrate W is transported between the processing space 10s and the outside of chamber 10 via the inlet / outlet 10p. The inlet / outlet 10p is opened and closed by gate valve G1.

[0045] The lifting mechanism 50 includes a first lifting mechanism 51 and a second lifting mechanism 52.

[0046] The first lifting mechanism 51 includes a plurality of support pins 511 and a motor 512. The plurality of support pins 511 are inserted into through holes H1 formed in the lower electrode 111 and the electrostatic chuck 112, and can protrude or be submerged relative to the upper surface of the electrostatic chuck 112. The plurality of support pins 511 support the substrate W by protruding relative to the upper surface of the electrostatic chuck 112, with their upper ends abutting against the bottom surface of the substrate W. The motor 512 raises and lowers the plurality of support pins 511. The motor 512 can be a DC motor, a stepper motor, a linear motor, or a piezoelectric actuator, a pneumatic drive mechanism, etc. This first lifting mechanism 51 raises and lowers the plurality of support pins 511, for example, when transferring the substrate W between the conveying robots TR1 and TR2 and the support portion 11.

[0047] The second lifting mechanism 52 includes a plurality of support pins 521 and a motor 522. The plurality of support pins 521 are inserted into through holes H2 formed in the insulator 115, and can protrude or be submerged relative to the upper surface of the insulator 115. The plurality of support pins 521 support the edge ring 113 by protruding relative to the upper surface of the insulator 115, with their upper ends abutting against the bottom surface of the edge ring 113. The motor 522 raises and lowers the plurality of support pins 521. The motor 522 can be a DC motor, a stepper motor, a linear motor, or a piezoelectric actuator, a pneumatic drive mechanism, etc. This second lifting mechanism 52 raises and lowers the plurality of support pins 521, for example, when the edge ring 113 is transferred between the conveying robots TR1 and TR2 and the support portion 11.

[0048] In addition, a lifting mechanism for raising and lowering the cover ring 114 can be provided in the support portion 11, although the figure is omitted here. The lifting mechanism includes a plurality of support pins disposed at positions that can abut against the bottom surface of the cover ring 114, and an electric motor for raising and lowering the plurality of support pins.

[0049] The control unit 100 controls various parts of the plasma processing apparatus 1. The control unit 100 includes, for example, a computer 101. The computer 101 includes, for example, a CPU 101a, a storage unit 101b, and a communication interface 101c. The CPU 101a may be configured to execute various control actions based on a program stored in the storage unit 101b. The storage unit 101b includes at least one memory type selected from the group consisting of auxiliary storage devices such as RAM, ROM, HDD (Hard Disk Drive), and SSD (Solid State Drive). The communication interface 101c may also communicate with the plasma processing apparatus 1 via a communication line such as a LAN (Local Area Network).

[0050] [Storage Module]

[0051] Reference Figures 3-5 ,right Figure 1 The following is an example of the storage module SM in the processing system PS.

[0052] The storage module SM has a chamber 70 on a support 60, and a mechanical chamber 90 at the top of the chamber 70. The chamber 70 can be depressurized internally via an exhaust section 72 connected to an exhaust port 71 located at the bottom. Additionally, N2 gas can be supplied to the chamber 70 as a purge gas. This allows for pressure regulation within the chamber 70. The mechanical chamber 90 is, for example, at atmospheric pressure.

[0053] A storage section 75 is provided inside the chamber 70, which includes a platform 73 and a box 74 disposed below the platform 73. The storage section 75 can be raised and lowered by a ball screw 76. A linear array sensor 91 for detecting the position, orientation, etc. of consumable parts and a motor 77 for driving the ball screw 76 are provided inside the mechanical chamber 90. A window 93 made of quartz or the like is provided between the chamber 70 and the mechanical chamber 90 so that the linear array sensor 91 can receive light from the light-emitting unit 92 described later.

[0054] The mounting stage 73 holds consumable components. The mounting stage 73 has a light-emitting portion 92 opposite to the linear array sensor 91. The mounting stage 73 is rotatable in the θ direction, rotating the held consumable component, such as the edge ring 113, to a predetermined direction. That is, the mounting stage 73 aligns (positions the edge ring 113). During position alignment, the orientation flat (OF) of the edge ring 113 is aligned with a predetermined direction. Alternatively, the mounting stage 73 can be configured to move in the horizontal direction (XY direction), allowing the held consumable component to move horizontally. Thus, during position alignment, the center position of the edge ring 113 can be aligned.

[0055] The linear array sensor 91 detects the amount of light emitted from the light-emitting unit 92 and outputs the detected amount of light to the control unit CU. Since the detected amount of light varies depending on the presence or absence of the orientation plane of the edge ring 113 (i.e., whether the orientation plane is illuminated), the control unit CU detects the orientation plane of the edge ring 113 based on this. Based on the detected orientation plane, the control unit CU detects the direction of the edge ring 113. The linear array sensor 91 is, for example, a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor) linear array sensor.

[0056] In addition, the control unit CU calculates information about the horizontal position of the edge ring 113 (hereinafter referred to as "position information") based on the light intensity detected by the linear array sensor 91. The position information includes the reference positions of each processing module PM1 to PM7. For example, the reference positions are as follows: Figure 5 As shown, the center positions of the edge rings 113, which were originally installed in each of the processing modules PM1 to PM12, can be P1(x1,y1) to P12(x12,y12) with the center position O(0,0) of the platform 73 as the reference. Figure 5 The diagram shows the center position O(0,0) of the mounting stage 73 and the center positions P1(x1,y1) to P4(x4,y4) when the edge ring 113, originally installed in processing modules PM1 to PM4, is placed onto the mounting stage 73. Furthermore, the control unit CU generates association information by associating this position information with information used to identify the processing modules PM1 to PM12, on which the edge ring 113 was originally installed (hereinafter referred to as "identification information"). This association information is stored, for example, in the auxiliary storage device of the control unit CU.

[0057] Box 74 is located at the lower part of the mounting platform 73. A case 78 is housed inside box 74. Case 78 can be removed from box 74. Case 78 stores multiple edge rings 113 at intervals in the vertical direction. The front and back sides of the storage module SM of case 78 are open. Furthermore, Figure 3 The diagram shows the case where the inside of box 74 contains two boxes 78, but for example, it is also possible to contain one box 78 inside box 74.

[0058] In addition to the platform 73 and the box 74, the storage section 75 also has a guide 79 supported on its side by a ball screw 76. The ball screw 76 connects the upper and lower surfaces of the chamber 70 and passes through the upper surface of the chamber 70 to connect with the motor 77 inside the machine room 90. The passage through the upper surface of the chamber 70 is sealed in a way that allows the ball screw 76 to rotate. The ball screw 76 rotates under the action of the motor 77, thereby enabling the storage section 75 to move in the vertical direction (Z-axis direction).

[0059] The storage module SM is detachably connected to the vacuum transport module TM2 via a gate valve G4. The forks of the transport robot TR2 of the vacuum transport module TM2 can be inserted into the chamber 70 via the gate valve G4. The forks can, for example, move the edge ring 113 into the cartridge 78, move the edge ring 113 placed in the cartridge 78 out, place the edge ring 113 onto the mounting platform 73, and retrieve the edge ring 113 placed on the mounting platform 73. The door 80 opens and closes, for example, when the cartridge 78 is removed from the chamber 70 and when the cartridge 78 is placed into the chamber 70.

[0060] The function of the light-emitting unit 94 and the chip count sensor 95 is to detect the number of chips in the edge ring 113 placed inside the case 78 when the storage unit 75 moves the case 78 from the bottom side of the chamber 70 to an upper position, such as the position opposite the gate valve G4. The light-emitting unit 94 is, for example, an LED (Light Emitting Diode) or a semiconductor laser. The chip count sensor 95 detects the amount of light irradiated from the light-emitting unit 94 and outputs the detected amount of light to the control unit CU. Based on the detected amount of light, the control unit CU measures the number of times the light irradiated from the light-emitting unit 94 is blocked by the edge ring 113, thereby detecting the number of chips in the edge ring 113. The chip count sensor 95 is, for example, a photodiode or a phototransistor. Alternatively, the chip count sensor 95 may also be, for example, a linear array sensor such as a CCD or CMOS.

[0061] Furthermore, in the above example, the control unit CU calculated the position information of the edge ring 113 based on the amount of light detected by the linear array sensor 91 within the storage module SM, but the present invention is not limited to this. For example, a position detection sensor including an inner peripheral sensor and an outer peripheral sensor can also be used, wherein the inner peripheral sensor is used to detect the position of the inner periphery of the edge ring 113, and the outer peripheral sensor is used to detect the position of the outer periphery of the edge ring 113. In this case, the control unit CU calculates the position information of the edge ring 113 based on the inner peripheral position of the edge ring 113 detected by the inner peripheral sensor and the outer peripheral position of the edge ring 113 detected by the outer peripheral sensor. Alternatively, for example, other optical sensors or cameras can be used instead of the linear array sensor 91. Other optical sensors or cameras can be installed in the storage module SM in the same way as the linear array sensor 91, and can also be configured to sense or capture images of the transport path of the edge ring 113 (from the storage module SM to each processing module PM1 to PM12). When using a camera, the control unit CU calculates the position information of the edge ring 113 based on the images captured by the camera, for example, by using image processing technology.

[0062] [Edge ring transport method]

[0063] Reference Figure 6 An example of a method for conveying the edge ring 113 according to an embodiment will be described below. Hereinafter, a replacement will be installed... Figure 1 The example described uses the edge ring 113 within the processing module PM7 of the processing system PS. Furthermore, the edge rings 113 installed in processing modules PM1-PM6 and PM8-PM12 can also be replaced using the same method.

[0064] The edge ring transport method of the embodiment is performed, for example, after the processing system PS is started and before the processing of the processing system PS (processing modules PM1 to PM12) begins. Alternatively, the edge ring transport method of the embodiment is performed, for example, after the storage module SM is connected to the vacuum transport module TM2 and before the processing of the processing system PS (processing modules PM1 to PM12) begins. However, the edge ring transport method of the embodiment may also be performed at different times than described above.

[0065] First, the control unit CU controls the conveying robot TR2 to transport the edge ring 113 in the processing module PM7 to the storage module SM, and place it on the placement stage 73 in the storage module SM (step S1).

[0066] Next, the control unit CU calculates the position information of the edge ring 113 based on the detection values ​​of the linear array sensor 91 within the storage module SM (step S2). The position information includes the reference position of the processing module PM7. For example, the reference position could be the center position P7(x7,y7) of the edge ring 113 originally mounted in the processing module PM7, with the center position O(0,0) of the stage 73 as a reference. Furthermore, the control unit CU generates association information obtained by associating this position information with the identification information of the processing module PM7 on which the edge ring 113 was originally mounted. This association information is stored, for example, in the auxiliary storage device of the control unit CU.

[0067] Next, the control unit CU controls the transport robot TR2 to transport the edge ring 113 placed on the placement stage 73 back into the processing module PM7 and place it on the lower electrode 111 (step S3).

[0068] Next, with the edge ring 113 installed in the processing module PM7, the control unit CU performs various processes, such as plasma processing, in the processing module PM7 (step S4). During the execution of various processes in the processing module PM7, the edge ring 113 in the processing module PM7 is gradually cut and consumed.

[0069] Next, the control unit CU determines the consumption level, that is, whether the edge ring 113 in the processing module PM7 needs to be replaced (step S5). For example, the control unit CU determines whether the edge ring 113 needs to be replaced based on the cumulative RF time, cumulative RF power, and the cumulative value of specific steps in the process plan. The cumulative RF time refers to the cumulative value of the time the RF power is supplied in the processing module PM7 during the specified plasma processing. The cumulative RF power refers to the cumulative value of the RF power supplied in the processing module PM7 during the specified plasma processing. The cumulative value of specific steps in the process plan refers to the cumulative value of the time the RF power is supplied and the cumulative value of the RF power during the steps in the processing module PM7 where the edge ring 113 is cut. The cumulative RF time, cumulative RF power, and cumulative value of specific steps in the process plan are calculated, for example, from the time point of device introduction, the time point of maintenance, or the time point when the edge ring 113 was replaced.

[0070] When determining whether edge ring 113 needs to be replaced based on the accumulated RF time, the control unit CU determines that edge ring 113 needs to be replaced when the accumulated RF time reaches a threshold. Conversely, the control unit CU determines that edge ring 113 does not need to be replaced when the accumulated RF time has not reached the threshold. The threshold is a value determined based on the material and other characteristics of edge ring 113 through preliminary experiments.

[0071] When determining whether edge ring 113 needs replacement based on accumulated RF power, the control unit CU determines that edge ring 113 needs replacement when the accumulated RF power reaches a threshold. Conversely, the control unit CU determines that edge ring 113 does not need replacement when the accumulated RF power has not reached the threshold. The threshold value is determined based on the material and other characteristics of edge ring 113 through preliminary experiments.

[0072] When determining whether edge ring 113 needs replacement based on the cumulative value of specific steps in the process plan, the control unit CU determines that edge ring 113 needs replacement when the cumulative RF time or cumulative RF power in a specific step reaches a threshold. Conversely, if the cumulative RF time or cumulative RF power in a specific step does not reach the threshold, the control unit CU determines that edge ring 113 does not need replacement. When determining whether edge ring 113 needs replacement based on the cumulative value of specific steps in the process plan, the replacement timing of edge ring 113 can be calculated based on steps where RF power is applied and edge ring 113 is cut. Therefore, the replacement timing of edge ring 113 can be calculated with particularly high accuracy. The threshold value is determined through preliminary experiments or other means based on the type of material of edge ring 113.

[0073] In step S5, if it is determined that the edge ring 113 within the processing module PM7 needs to be replaced, the control unit CU causes the processing to proceed to step S6. On the other hand, if it is determined in step S5 that the edge ring 113 within the processing module PM7 does not need to be replaced, the control unit CU returns to step S4.

[0074] Next, the control unit CU determines whether replacement is possible, that is, it determines whether the state of the processing system PS is such that the edge ring 113 can be replaced (step S6). For example, if the processing module PM7, where the edge ring 113 needs to be replaced, is not processing the substrate, the control unit CU determines that the edge ring 113 can be replaced. Conversely, if the processing module PM7 is processing the substrate, the control unit CU determines that the edge ring 113 cannot be replaced. Alternatively, the control unit CU may, for example, determine that the edge ring 113 can be replaced only after all substrates in the same batch as the substrate being processed in the processing module PM7 have finished processing. In this case, the control unit CU determines that the edge ring 113 cannot be replaced during the period before the processing of substrates in the same batch as the substrate being processed in the processing module PM7 has finished.

[0075] If, in step S6, it is determined that the processing system PS is in a state where the edge ring 113 can be replaced, the control unit CU causes the processing to proceed to step S7. On the other hand, if, in step S6, it is determined that the processing system PS is in a state where the edge ring 113 cannot be replaced, the control unit CU performs step S6 again.

[0076] Next, the control unit CU controls the conveying robot TR2 to transport the used edge ring 113 from the processing module PM7 to the storage module SM, and store it in the box 78 (step S7). Details of the method for storing the used edge ring 113 in the box 78 will be described later.

[0077] Next, the control unit CU controls the transport robot TR2 to transport the unused edge ring 113 stored in the cartridge 78 to the processing module PM7 and place it on the lower electrode 111 within the processing module PM7 (step S8). At this time, the control unit CU controls the transport robot TR2 to perform position correction based on the association information generated in step S2, and place the edge ring 113 on the lower electrode 111 within the processing module PM7. For example, if the destination of the edge ring 113 is the processing module PM7, the position is corrected based on the position information corresponding to the identification information representing the processing module PM7, referring to the association information generated in step S2, and the edge ring 113 is placed on the lower electrode 111. After that, the processing ends. Furthermore, step S8 describes the case of transporting the unused edge ring 113 stored in the cartridge 78 to the processing module PM7, but it is not limited to this. For example, the unused edge ring 113 stored in the case 78 can be temporarily placed on the mounting stage 73. After the center position is inferred by the linear array sensor 91, the position is corrected based on the position information corresponding to the identification information, and the edge ring 113 is placed on the lower electrode 111. As a result, the conveying accuracy of the edge ring 113 is further improved.

[0078] As explained above, in this embodiment, the control unit CU transports the edge ring 113 within the processing module PM7 to the storage module SM, where a linear array sensor 91 within the storage module SM measures the reference position of the processing module PM7. Furthermore, the control unit CU controls the transport robot TR2 to perform position correction based on the measured reference position of the processing module PM7, transporting the unused edge ring 113 to the processing module PM7 and placing it on the lower electrode 111. This allows the edge ring 113 to be placed with high precision on the lower electrode 111 within the processing module PM7. Therefore, it eliminates the need for teaching the transport robot TR2 for each processing module, reducing the teaching time.

[0079] In addition, the control unit CU can also perform the position correction as shown below when the unused edge ring 113 is transported to the processing module PM7 and placed on the lower electrode 111.

[0080] First, the control unit CU controls the transport robot TR2 to transport the used edge ring 113 from the processing module PM7 to the storage module SM, where it is placed on the mounting stage 73 within the storage module SM. Next, the control unit CU calculates the position information of the used edge ring 113 based on the detection values ​​from the linear array sensor 91. The position information includes a deviation 'a' represented by a vector. Deviation 'a' could be, for example, the assembly error within the processing module PM7.

[0081] Next, the control unit CU controls the conveying robot TR2 to store the used edge ring 113, which is placed on the loading platform 73, in the box 78.

[0082] Then, the control unit CU controls the transport robot TR2 to place the unused edge ring 113 stored in the box 78 onto the placement stage 73. Next, the control unit CU calculates the position information of the unused edge ring 113 based on the detection values ​​of the linear array sensor 91. The position information includes a deviation b represented by a vector.

[0083] Subsequently, the control unit CU controls the transport robot TR2 to receive the unused edge ring 113 placed on the placement stage 73, and transports the unused edge ring 113 to the processing module PM7, where it is placed on the lower electrode 111 within the processing module PM7.

[0084] At this time, the control unit CU controls the transport robot TR2 to place the unused edge ring 113 onto the lower electrode 111 in a manner that absorbs the position deviation calculated based on the position information of the used edge ring 113 and the position information of the unused edge ring 113. The position deviation can be, for example, the difference (ba) between deviation a and deviation b. Thus, the unused edge ring 113 can be placed at the desired position on the lower electrode 111 within the processing module PM7.

[0085] Additionally, the control unit CU can control the transport robot TR2 to receive the unused edge ring 113 placed on the placement stage 73 by absorbing the position deviation calculated based on the position information of the used edge ring 113 and the position information of the unused edge ring 113. This allows the unused edge ring 113 to be placed at the desired position on the lower electrode 111 within the processing module PM7.

[0086] Alternatively, the control unit CU can move the mounting stage 73 by absorbing the position deviation calculated based on the position information of the used edge ring 113 and the position information of the unused edge ring 113. In the moved state, it controls the transport robot TR2 to receive the unused edge ring 113 placed on the mounting stage 73. As a result, the unused edge ring 113 can be placed at the desired position on the lower electrode 111 within the processing module PM7.

[0087] [Storage methods for edge rings]

[0088] Reference Figure 4 and Figure 7 An example of a method for storing the edge ring 113 according to the embodiment will be described. The method for storing the edge ring 113 according to the embodiment can be used, for example, when the edge ring 113 is moved into and out of the case 78 relative to the storage module SM in steps S7 and S8 of the conveying method of the edge ring 113 described above.

[0089] The following describes the process of storing the used edge ring 113b, which was originally used in the processing module PM7, into the box 78, and transporting the unused edge ring 113a stored in the box 78 to the processing module PM7 for replacement.

[0090] In its initial state, the gate valve G4 and door 80 of the storage module SM are closed, and the pressure inside chamber 70 is regulated by inactive gases such as N2. Additionally, a case 78 is placed inside the storage section 75. Figure 7 As shown in (a), the box 78 has six shelves 78a to 78f arranged in multiple layers. Unused edge rings 113a are stored on the five upper shelves 78a to 78e respectively. The bottom shelf 78f is empty.

[0091] First, the control unit CU raises the storage section 75 to a first position. The first position is, for example, a position in which the lowest shelf 78f of the case 78 inside the storage section 75 is opposite to the gate valve G4.

[0092] When the storage section 75 moves to the first position, the control section CU uses the exhaust section 72 to depressurize the pressure inside the chamber 70, making the pressure inside the chamber 70 lower than the pressure inside the vacuum delivery module TM2. For example, the control section CU adjusts the pressure inside the chamber 70 to less than 50 mTorr (6.7 Pa) and adjusts the pressure inside the vacuum delivery module TM2 to 50 mTorr (6.7 Pa) to 100 mTorr (13.3 Pa).

[0093] Next, the control unit CU opens the gate valve G4. At this time, since the pressure inside the chamber 70 is less than the pressure inside the vacuum delivery module TM2, an airflow is formed from the vacuum delivery module TM2 to the exhaust port 71 located at the bottom of the chamber 70.

[0094] Next, the control unit (CU) controls the conveying robot TR2, such as... Figure 7 As shown in (b), the used edge ring 113b, originally used in the processing module PM7, is stored on the lowest shelf 78f of the case 78. At this time, the used edge ring 113b may have contaminants such as particles attached to it, but here it is placed on the lowest shelf 78f. Therefore, it is possible to prevent contaminants attached to the used edge ring 113b from adhering to the unused edge ring 113a stored on the shelves 78a-78e, which are located above shelf 78f. Furthermore, an airflow from the vacuum delivery module TM2 is formed within the chamber 70, heading towards the exhaust port 71 located at the bottom of the chamber 70. Thus, contaminants attached to the used edge ring 113b can be discharged from the exhaust port 71 under the influence of the airflow heading towards the exhaust port 71. As a result, it is possible to prevent contaminants adhering to the used edge ring 113b from adhering to the unused edge ring 113a stored on the shelves 78a-78e, which are located above the shelf 78f. Thus, even if unused edge rings 113a and used edge rings 113b are mixed in the case 78, it is possible to prevent the unused edge ring 113a from becoming contaminated.

[0095] Next, the control unit CU lowers the storage section 75 to a second position. The second position is, for example, a position in which the second shelf 78e from the bottom in the box 78 inside the storage section 75 is opposite to the gate valve G4.

[0096] When the storage section 75 moves to the second position, the control unit CU controls the conveying robot TR2, such as... Figure 7 As shown in (c), an unused edge ring 113a is retrieved from shelf 78e and conveyed to processing module PM7. Then, control device CU closes gate valve G4.

[0097] In the above manner, the used edge ring 113b originally used in processing module PM7 is replaced with an unused edge ring 113a. Furthermore, when replacing the used edge rings 113b originally used in other processing modules PM1-PM6 and PM8-PM12 with unused edge rings 113a, the replacement can be performed sequentially from the bottom side of the housing 78, using the same method as described above. This helps to suppress contamination of the unused edge rings 113a.

[0098] [Example of storage module setup]

[0099] Reference Figure 1 , Figure 3 , Figure 4 and Figure 8 The following describes an example of setting up the storage module SM.

[0100] The storage module SM is connected to one side of the vacuum delivery module TM2, opposite to the side connected to the vacuum delivery module TM1. As described above, the storage module SM includes a support 60, a chamber 70, and a mechanical chamber 90.

[0101] The bracket 60 supports the chamber 70. For example, the bracket 60 is configured to support two chambers 70 side by side in the short side direction of the vacuum delivery module TM2. Figure 8 The example illustrates a case where a chamber 70 is provided on the support 60. A passage 60a is formed below the chamber 70 on the support 60. This allows operators to access the area below the vacuum transport modules TM1, TM2, and processing modules PM1-PM12 via the passage 60a below the chamber 70. Therefore, the maintainability of the vacuum transport modules TM1, TM2, and processing modules PM1-PM12 is improved.

[0102] The chamber 70 is mounted on the support 60. A door 80 is provided on the side of the chamber 70 opposite to the side connected to the vacuum delivery module TM2. The door 80 is opened and closed, for example, when the cartridge 78 is removed from the chamber 70 and when the cartridge 78 is placed into the chamber 70.

[0103] The mechanical chamber 90 is located in the upper part of the chamber 70. Figure 8 In this example, the mechanical chamber 90 is located in a portion of the upper part of the chamber 70, and the remaining area of ​​the upper part of the chamber 70 forms a passageway 90a. This allows operators to access the upper parts of the vacuum transport modules TM1, TM2, and processing modules PM1 to PM12 via the passageway 90a above the chamber 70. Therefore, the maintainability of the vacuum transport modules TM1, TM2, and processing modules PM1 to PM12 is improved.

[0104] It should be considered that the embodiments disclosed in this application are illustrative rather than limiting in all respects. Furthermore, the above embodiments can be omitted, substituted, or modified in various ways without departing from their technical concept.

[0105] The above embodiment describes the case where an edge ring is transported between the storage module and the processing module, but the present invention is not limited thereto. For example, this embodiment can also be applied to cases where other consumable components installed in the processing module, such as a cover ring, a top plate of the upper electrode, or an electrostatic chuck, are transported instead of an edge ring. Furthermore, the edge ring can also be a clamp for position adjustment.

[0106] In the above embodiments, a linear array sensor 91, as an example of a position detection sensor, was described in the storage module SM, but the present invention is not limited thereto. The position detection sensor may also be set in a different location than the storage module SM, for example, on the fork FK1 at the front end of the conveying robot TR1, on the fork at the front end of the conveying robot TR2, at gate valves G1 to G4, or in vacuum conveying modules TM1 and TM2.

[0107] Figure 9 This diagram shows the position detection sensor installed on the fork FK1 of the conveyor robot TR1. Figure 9 (a) is a top view of the fork FK1 with the edge ring 113 intact. Figure 9 (b) is a cross-sectional view of line 9B-9B in (a). Figure 9 As shown in (a), the fork FK1 has a generally U-shaped shape when viewed from above. The fork FK1 includes three suction pads PD and a capacitance sensor CS. The suction pads PD have, for example, a frustum shape, arranged along the inner periphery of the edge ring 113. The suction pads PD hold the edge ring 113 by abutting the lower surface of the edge ring 113 with their upper surface abutting against it. The capacitance sensor CS is, for example, embedded at the root end of the fork FK1. The edge ring 113 is provided with a conductor CD, positioned such that when the edge ring 113 is positioned at a predetermined position (e.g., the center position) of the fork FK1, the center of the conductor CD coincides with the center of the capacitance sensor CS when viewed from above. The conductor CD is, for example, made of aluminum. When the edge ring 113 is held in the fork FK1, the capacitance sensor CS detects the capacitance corresponding to the positional relationship of the conductor CD in the edge ring 113 and outputs the detected value (detection result) to the control unit CU. The control unit (CU) calculates the position information of the edge ring 113 based on the detection value of the electrostatic capacitance sensor (CS). The electrostatic capacitance sensor (CS) and the conductor (CD) are examples of position detection sensors.

[0108] Explanation of reference numerals in the attached figures

[0109] 10 chambers

[0110] 91 linear array sensor

[0111] CU Control Unit

[0112] PM1~PM12 processing modules

[0113] SM storage module

[0114] TM1 and TM2 vacuum transport modules

[0115] TR1 and TR2 conveyor robots

Claims

1. A processing system, characterized in that, include: An internal chamber capable of housing consumable components; A storage module for storing the consumable parts; A position detection sensor is installed in the storage module to detect the position of the consumable component; A vacuum delivery module capable of connecting to the chamber and the storage module, comprising a delivery manipulator for transporting the consumable parts between the chamber and the storage module; and Control Department The control unit is configured to perform the following steps: Step (a): Control the conveying robot to convey the consumable component installed in the chamber to the storage module; Step (b): Detect the position of the consumable component after it has been delivered to the storage module using the position detection sensor; and Step (c): Based on the position of the consumable component detected in step (b), calculate the position information of the consumable component, including the reference position of the chamber where the consumable component was located before being transported to the storage module, and control the conveying robot to transport a new consumable component different from the consumable component to the chamber from the storage module after position correction, based on the calculated position information.

2. The processing system as described in claim 1, characterized in that: The control unit is configured to perform step (a) after the consumable component is installed into the chamber and before processing takes place inside the chamber.

3. The processing system as described in claim 1 or 2, characterized in that: The storage module is detachable from the vacuum delivery module.

4. The processing system as described in claim 3, characterized in that: The control unit is configured to perform step (a) after the storage module is connected to the vacuum delivery module and before processing takes place inside the chamber.

5. The processing system as described in claim 1 or 2, characterized in that: The storage module has an exhaust port for depressurizing the interior. The control unit is configured to further perform step (d), wherein, while the pressure inside the storage module is reduced via the exhaust port so that the pressure inside the storage module is less than the pressure inside the vacuum delivery module, the storage module is connected to the vacuum delivery module.

6. The processing system as described in claim 1 or 2, characterized in that: The position detection sensor detects the horizontal position of the consumable component.

7. The processing system as described in claim 1 or 2, characterized in that: The storage module can store multiple consumable components at intervals in the vertical direction. The control unit is configured to further perform step (e), wherein, prior to step (c), the consumable component originally used inside the chamber is stored in a position lower than the new consumable component stored inside the storage module.

8. The processing system as described in claim 1 or 2, characterized in that: The consumable component has a circular shape. The position detection sensor includes: an inner peripheral sensor for detecting the position of the inner periphery of the consumable component; and an outer peripheral sensor for detecting the position of the outer periphery of the consumable component.

9. The processing system as described in claim 1 or 2, characterized in that: The consumable component includes an edge ring, which is placed on the upper surface of a mounting stage for mounting a substrate disposed inside the chamber, in a manner that surrounds the substrate.

10. The processing system as described in claim 1 or 2, characterized in that: The new consumable component is an unused consumable component.

11. A method for conveying consumable components in a processing system. The processing system includes: The interior includes a chamber capable of housing consumable components; and a storage module for storing the consumable components. A position detection sensor, disposed in the storage module, detects the position of the consumable component; and a vacuum transport module connectable to the chamber and the storage module, having a transport manipulator for transporting the consumable component between the chamber and the storage module. The conveying method is characterized by comprising: Step (a): The consumable component installed in the chamber is transported to the storage module using the conveying robot. Step (b) involves using the position detection sensor to detect the position of the consumable component after it has been delivered to the storage module; and Step (c): Based on the position of the consumable component detected in step (b), calculate the position information of the consumable component, including the reference position of the chamber where the consumable component was located before being transported to the storage module, and control the conveying robot to transport a new consumable component different from the consumable component to the chamber from the storage module after position correction, based on the calculated position information.

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