processing device

Abstract

The present application provides a processing device that can improve the operability when a part of a displayed image is selected and registered. The processing device has a holding table having a holding surface that holds a workpiece having a plurality of devices formed on a front surface by a plurality of division lines, a processing unit that processes the workpiece held by the holding table, a photographing unit that photographs the workpiece held by the holding table, a moving unit that relatively moves the holding table with respect to the processing unit and the photographing unit in a direction horizontal to the holding surface, a touch panel that displays the photographed image, and a control unit. The control unit detects a line of the image within an allowable region according to a contact line traced on the image displayed on the touch panel, and registers the detected line.

Description

Technical Field

[0001] This invention relates to a processing apparatus. Background Technology

[0002] In precision machining equipment, particularly semiconductor manufacturing equipment, control at the μm level is required. Therefore, operators must carefully operate an operation panel mounted on or connected to the machining equipment to input various values ​​and control its operation. For example, Patent Document 1 discloses a machining equipment with an operation panel equipped with numeric input keys including numbers 0 to 9, and a bit setting key for setting the number of digits of the values ​​input via these numeric input keys.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2001-84015

[0004] In conventional processing equipment, for example, when displaying a captured image, it is desirable to improve the operability of the operator when registering the pre-defined dividing lines, processing grooves, patterns, etc., in the image. Summary of the Invention

[0005] Therefore, the object of the present invention is to provide a processing apparatus that improves operability when selecting a portion of a displayed image for registration.

[0006] According to one aspect of the present invention, a processing apparatus is provided, comprising: a holding table having a holding surface for holding a workpiece having a plurality of devices formed on its front surface by a plurality of predetermined dividing lines; a processing unit for processing the workpiece held by the holding table; an imaging unit for imaging the workpiece held by the holding table; a moving unit for moving the holding table relative to the processing unit and the imaging unit in a direction horizontal to the holding surface; a touch panel for displaying the captured image; and a control unit for detecting lines in an image located within an allowable area based on contact lines traced on the image displayed on the touch panel, and registering the detected lines.

[0007] Preferably, the line is the outline of the pattern constituting the device in the image displayed on the touch panel, and the control unit registers the pattern corresponding to the detected line as a key pattern, which becomes a mark for detecting the predetermined dividing line.

[0008] Preferably, the line in the image displayed on the touch panel is the predetermined dividing line or the processing groove formed by the processing unit, and the control unit registers the line as the shooting path for the shooting unit that shoots the workpiece to move relative to the holding table.

[0009] The processing apparatus of this invention has the following effect: it can improve the operability when selecting a portion of the displayed image for registration. Attached Figure Description

[0010] Figure 1 This is a perspective view showing an example of the structure of the processing apparatus according to the embodiment.

[0011] Figure 2 This is a diagram illustrating an example of how a processing apparatus registers lines in an image to demonstrate an implementation method.

[0012] Figure 3 It is used to explain the Figure 2 The image shown is an example of line detection.

[0013] Figure 4 This is a flowchart illustrating an example of the processing sequence related to registration of the processing apparatus of an embodiment.

[0014] Figure 5 This is another example of how a processing apparatus for illustrating an embodiment registers lines in an image.

[0015] Figure 6 It is used to explain the detection Figure 5 The image shown is an example of line detection.

[0016] Figure 7 This is a flowchart illustrating another example of the processing sequence related to registration of the processing apparatus of the embodiment.

[0017] Label Explanation

[0018] 1: Processing device; 10: Holding table; 11: Holding surface; 20: Processing unit; 30: Imaging unit; 40: Touch panel; 50: Moving unit; 60: Control unit; 61: Detection unit; 62: Registration unit; 63: Storage unit; 400: Image; 430: Line; 500: Contact line; 600: Allowable area. Detailed Implementation

[0019] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the constituent elements described below include contents that are readily conceived by those skilled in the art and substantially the same. Additionally, the structures described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0020] [Implementation Method]

[0021] The processing apparatus 1 according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view showing a structural example of the processing apparatus 1 according to the embodiment. The processing apparatus 1 of the embodiment is a device that cuts a workpiece 200 to form a cutting groove on the workpiece 200 as a machining mark. Furthermore, the processing apparatus 1 is also a device that, at any time during or after processing the workpiece 200, photographs, displays, and stores the cutting grooves, patterns, etc., along a pre-set inspection path in the cutting grooves formed by the cutting process. In this embodiment, the cutting groove is an example of a machining groove. However, in this invention, the processing apparatus 1 is not limited to this; it may also be a laser processing apparatus that irradiates the workpiece 200 with a laser beam to perform laser processing on the workpiece 200, and photographs, displays, and stores the laser-processed grooves formed by the laser processing as machining marks along the inspection path.

[0022] In the implementation method, such as Figure 1 As shown, the workpiece 200 cut by the processing apparatus 1 is, for example, a wafer such as a disc-shaped semiconductor wafer or optical device wafer using silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like as the base material. Devices 203 are formed on the flat front side 201 of the workpiece 200 within areas divided by multiple predetermined dividing lines 202 arranged in a grid pattern. An adhesive tape 205 is attached to the back side 204 of the back side of the workpiece 200, and an annular frame 206 is mounted on the outer edge of the adhesive tape 205. However, in this invention, the workpiece 200 is not limited to this; it can also be a rectangular packaging substrate, ceramic plate, or glass plate having multiple devices sealed in resin.

[0023] like Figure 1 As shown, the processing apparatus 1 includes a holding table 10, a processing unit 20 for performing cutting operations, a camera unit 30, a touch panel 40, a moving unit 50, and a control unit 60. Figure 1 In one example shown, the machining device 1 is a so-called face-to-face dual-axis cutting device with two machining units 20 (i.e., a dual-spindle cutter).

[0024] The holding table 10 holds the workpiece 200, which has multiple predetermined dividing lines 202, using a holding surface 11. The holding table 10 may include, for example, a chuck table. The holding table 10 is disc-shaped and includes: a disc-shaped suction part having a flat holding surface 11 formed on its upper surface to hold the workpiece 200, and made of porous ceramic or the like with numerous pores; and a frame having a recess in the center of its upper surface to embed and fix the suction part. The holding table 10 is configured to move freely via the X-axis moving unit 51 of the moving unit 50 and rotate freely via a rotary drive source (not shown). The suction part of the holding table 10 is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and the workpiece 200 is held by suction using the entire holding surface 11. Additionally, as... Figure 1 As shown, a plurality of clamping parts 12 for clamping the annular frame 206 are provided around the worktable 10.

[0025] The machining unit 20 processes the workpiece 200 held by the holding table 10 along the predetermined dividing line 202 to form a cutting groove. The machining unit 20 includes a cutting tool 21, a spindle, and a spindle housing 22. The cutting tool 21 is subjected to a rotational motion about the Y-axis to cut the workpiece 200 held by the holding table 10. The spindle is arranged along the Y-axis direction, and the cutting tool 21 is supported by its front end in a manner that allows it to rotate about the Y-axis. The spindle housing 22 houses the spindle and allows it to rotate about the Y-axis. In the machining unit 20, the spindle housing 22 is configured to be movable in the Y-axis direction relative to the workpiece 200 held by the holding table 10 via the Y-axis moving unit 52 of the moving unit 50, and is configured to be movable in the Z-axis direction via the Z-axis moving unit 53 of the moving unit 50.

[0026] The imaging unit 30 captures images of the workpiece 200 held by the holding table 10. In this embodiment, the imaging unit 30 is fixed to the processing unit 20 in a manner that allows it to move integrally with the processing unit 20. The imaging unit 30 has an imaging element that captures images of the predetermined dividing lines 202 of the workpiece 200 held by the holding table 10 before cutting and the cutting grooves that form the machining marks on the workpiece 200 after cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary Metal-Oxide-Semiconductor) imaging element.

[0027] The imaging unit 30 captures images of the workpiece 200 held by the holding table 10 before cutting, obtaining images used for alignment of the workpiece 200 and the cutting tool 21, and outputs the obtained images to the control unit 60. Additionally, the imaging unit 30 captures images of the workpiece 200 held by the holding table 10 after cutting, and outputs the obtained images to the control unit 60.

[0028] The touch panel 40 is mounted on the main body of the processing device 1 with its display surface facing outwards. Additionally, in Figure 1 In the example shown, the upper part of the main body of the processing apparatus 1 is omitted. The touch panel 40 is disposed in a location within the main body of the processing apparatus 1 that is easily visible and operable. The touch panel 40 may be, for example, a display device such as a liquid crystal display or an organic EL display, or a touchscreen that specifies the contact position or coordinates of an object on the display surface of the display device. The touch panel 40 is electrically connected to the control unit 60. Under the control of the control unit 60, the touch panel 40 displays an image of the front of the workpiece 200 captured by the imaging unit 30, or various information required for processing, and receives input operations required for processing from the operator.

[0029] The touch panel 40 can cooperate with the notification unit 41 electrically connected to the control unit 60 to provide notifications. The notification unit 41 is composed of light-emitting diodes (LEDs) and the like, which provide notifications based on the status of various actions related to observation assistance processing (including cutting and slit inspection).

[0030] The moving unit 50 includes an X-axis moving unit 51, a Y-axis moving unit 52, and a Z-axis moving unit 53. The X-axis moving unit 51 performs machining feed relative to the holding table 10 along the X-axis direction, which is one of the horizontal directions, relative to the machining unit 20. The Y-axis moving unit 52 performs indexing feed relative to the holding table 10 along the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction. The Z-axis moving unit 53 performs infeed feed relative to the holding table 10 along the Z-axis direction, which is perpendicular to both the X-axis and Y-axis directions and parallel to the vertical direction.

[0031] The control unit 60 controls each component of the machining device 1 to enable the machining device 1 to perform various actions related to observation and auxiliary processing (including cutting and kerf inspection of the workpiece 200).

[0032] The control unit 60 includes: an arithmetic processing unit such as a CPU (Central Processing Unit); a storage device such as ROM (Read Only Memory) or RAM (Random Access Memory); and an input / output interface device. The control unit 60 is a computer, and it can use the aforementioned devices to execute control programs for controlling the aforementioned components according to a series of processing steps performed by the processing apparatus 1.

[0033] The control unit 60 controls the overall operation of the processing apparatus 1 according to the processing conditions set by the operator using the touch panel 40. The control unit 60 is capable of displaying images of the workpiece 200 captured by the imaging unit 30 on the touch panel 40 and accepting registration operations from the operator for these images. The control unit 60 is also capable of controlling various units within the processing apparatus 1 based on the registered information.

[0034] The control unit 60 includes a detection unit 61, a registration unit 62, and a storage unit 63. The control unit 60 executes a program to perform the functions of the detection unit 61, the registration unit 62, etc. The storage unit 63 is a storage medium built into the control unit 60, but it can also be implemented using an external storage device.

[0035] The detection unit 61 detects lines of the image located within an allowed area based on contact lines traced on an image displayed on the touch panel 40. Contact lines are the trajectories, movement paths, etc., traced by a contact object on the display surface of the touch panel 40. Regarding images obtained by photographing the workpiece 200, there may be differences in contrast, color, etc., in areas such as the dividing predetermined line 202, the device 203, and key patterns. Contact objects may include, for example, the operator's finger or a stylus. The detection unit 61 detects, for example, lines at the boundaries of areas in the image where contrast, color, etc., differ. The lines detected by the detection unit 61 may include, for example, straight lines, curves, broken lines, patterns, etc., in the image. The detection unit 61 detects lines of the image located within an allowed area from the image, pixel by pixel, of the multiple pixels on the contact line.

[0036] The registration unit 62 registers the detected lines. Registering lines includes, for example, registering information showing the shape, position, and pattern of the lines. The registration unit 62 registers registration information for displaying the lines detected by the detection unit 61 on the image. This registration information includes, for example, information showing the position of the lines in the image, information associating the image with the lines, and information for displaying the lines overlapping on the image. The registration unit 62 registers the registration information in the storage unit 63 and external storage devices, etc.

[0037] For example, suppose the line detected by the detection unit 61 is the outline of the pattern constituting the device 203. In this case, the registration unit 62 registers the pattern corresponding to the detected line as a key pattern, which becomes a marker for detecting the predetermined dividing line 202. The pattern corresponding to the detected line refers to a pattern having an outline adjacent to the detected line.

[0038] For example, in the image displayed on the touch panel 40, the line detected by the detection unit 61 is either a predetermined dividing line 202 or a processing groove formed by the processing unit 20. In this case, the registration unit 62 registers the line as a shooting path that causes the shooting unit 30, which takes a picture of the workpiece 200, to move relative to the holding table.

[0039] The control unit 60 is capable of controlling the operation of the processing apparatus 1 based on the information of the lines registered by the registration unit 62. For example, the control unit 60 controls each unit of the processing apparatus 1 according to the registered lines. For example, if the registered line is a key pattern, the control unit 60 performs a process of detecting the predetermined dividing line 202 by using the key pattern as a marker. That is, the control unit 60 automatically detects the position of the predetermined dividing line 202 based on the distance from the registered key pattern to the predetermined dividing line 202. For example, if the registered line is the outline of the predetermined dividing line 202, the control unit 60 performs a process of processing the workpiece 200 along the predetermined dividing line 202. For example, if the registered line is the outline of a machining groove, the control unit 60 performs a process of taking pictures using the imaging unit 30 along the imaging path shown by the line.

[0040] The storage unit 63 is capable of recording various information such as images captured by the imaging unit 30 and registration information. The storage unit 63 stores images in association with registration information. The storage unit 63 is capable of recording images of the workpiece 200 captured by the imaging unit 30 at various locations along the inspection route.

[0041] In addition, such as Figure 1 As shown, the processing apparatus 1 further includes: a box 70 for storing the workpiece 200 before and after cutting; a temporary storage unit 71 for temporarily storing the workpiece 200 before and after being stored in the box 70; a cleaning unit 90 for cleaning the workpiece 200 after cutting; and a conveying unit 80 for conveying the workpiece 200 between the holding table 10, the box 70, the temporary storage unit 71 and the cleaning unit 90.

[0042] After registering processing conditions, including the number of predetermined dividing lines 202 of the workpiece 200 and the spacing between them, in the control unit 60, the processing device 1 takes a workpiece 200 from the box 70 via the transfer unit 80, positions it in a predetermined position using the temporary placement unit 71, and places it on the holding surface 11 of the holding table 10. The processing device 1 uses the holding surface 11 of the holding table 10 to attract and hold the workpiece 200. After alignment, while supplying cutting water to the workpiece 200 from the processing unit 20, the holding table 10 and the processing unit 20 are moved relative to each other along the predetermined dividing lines 202 via a rotation drive source and a moving unit 50. The cutting tool 21 of the processing unit 20 cuts the predetermined dividing lines 202 of the workpiece 200 to form cutting grooves. When the processing device 1 cuts all the predetermined dividing lines 202 of the workpiece 200, the workpiece 200 is cleaned using the cleaning unit 90 and then stored in the box 70.

[0043] The above describes a structural example of the processing apparatus 1 according to this embodiment. Furthermore, using... Figure 1 The structure described above is only one example, and the structure of the processing apparatus 1 in this embodiment is not limited to this example. The functional structure of the processing apparatus 1 in this embodiment can be flexibly modified according to specifications and applications.

[0044] (Example of registration of processing equipment)

[0045] Next, an example of line registration in an image processed by the processing apparatus 1 of the embodiment will be described. Figure 2 This is a diagram illustrating an example of how the processing apparatus 1 of the embodiment registers lines in an image. Figure 3 It is used to explain the Figure 2 The image shown is an example of line detection in image 400.

[0046] exist Figure 2 In scenario 1001, the processing apparatus 1 displays an image 400 obtained by photographing the workpiece 200 on the touch panel 40. The image 400 includes a first image 410 obtained by photographing the workpiece 200 using the device 203, and a second image 420 obtained by photographing multiple key patterns of the device 203. Compared to the four second images 420, the first image 410 has a darker contrast. The processing apparatus 1 calculates the contrast for each pixel of the image 400, groups blocks with the same contrast, and identifies the grouped blocks as the second image 420 as graphics. The processing apparatus 1 uses known edge detection techniques to detect the edges of the graphics shown in the second image 420 as contours, and stores the detection results in association with the image 400 in the storage unit 63. That is, the processing apparatus 1 detects the contours of the four graphics in the image 400.

[0047] In scenario 1002, the operator traces the outline of a second image 420 displayed on the touch panel 40 freehand. Therefore, as shown by the contact line 500, the operator does not accurately trace the outline of the second image 420. The processing device 1 detects the contact line 500, which shows the movement trajectory of the contacted object, using the touch panel 40. The processing device 1 detects the trajectory of the contacted object from the start to the end of its movement relative to the touch panel 40 as the contact line 500. The contact line 500 has information such as the position and orientation of multiple contact points. The processing device 1 controls the touch panel 40 to display the contact line 500 overlaid on the image 400.

[0048] like Figure 3 As shown, the processing device 1 detects the lines of the image 400 located within the allowable region 600 based on the contact line 500. The allowable region 600 is, for example, a region centered at any position on the contact line 500, and multiple allowable regions 600 are set at different positions on the contact line 500. For example, the processing device 1 detects the outline of the second image 420 falling within the allowable region 600 at each of multiple positions (pixels) on the contact line 500 from the start position 510 to the end position 520. The allowable region 600 can be arbitrarily set according to the scale, size, etc. of the image 400. The allowable region 600 can be set to 30 pixels or less, for example, based on the number of pixels. The allowable region 600 can be predefined by a program or stored in the storage unit 63. In this embodiment, the case where the allowable region 600 is circular is described, but it can also be other shapes such as square or cross.

[0049] exist Figure 3 In one example, at position 531 of the contact line 500, the processing device 1 determines that the outline of the second image 420 is inside the allowable region 600. For example, at position 532 of the contact line 500, the processing device 1 determines that the outline of the second image 420 is not inside the allowable region 600. When the processing device 1 finishes determining multiple positions on the contact line 500 from the start position 510 to the end position 520, it calculates the proportion in which the outline of the second image 420 is determined to be inside the allowable region 600. The proportion is the result obtained by dividing the number of times the outline of the second image 420 is determined to be inside the allowable region 600 by the total number of determinations. If the calculated proportion is greater than a threshold, the processing device 1 detects the outline 421 of the second image 420 as a line and registers the detected line. Otherwise, if the calculated proportion is not greater than the threshold, the processing device 1 does not detect the outline 421 of the second image 420 as a line.

[0050] return Figure 2In scenario 1003, when the processing device 1 detects the outline 421 of the second image 420 as a line 430 of the image 400, it controls the touch panel 40 such that the line 430 is overlaid on the outline 421 of the second image 420. The operator can confirm that the outline 421 of the pattern shown in the second image 420 has been selected by referring to the line 430 displayed on the touch panel 40.

[0051] In scenario 1004, when the detected line 430 is the outline 421 of a pattern, the processing device 1 registers the second image 420 surrounded by the line 430 as a key pattern. However, for example, when using the processing device 1 to register a key pattern for detecting the position of a predetermined dividing line 202, there is a requirement that not only the pattern should be registered, but also that the surrounding area with different contrast should be included. Therefore, in this embodiment, the processing device 1 registers the registration information related to the second image 420, which shows the pattern surrounded by the detected line 430, and the region 440 that expands upwards, downwards, leftwards, and rightwards from the second image 420 by a predetermined length, as a key pattern that becomes a marker. In this embodiment, the region 440 is a quadrilateral, but it could also be a similar shape that expands upwards, downwards, leftwards, and rightwards from the outer perimeter of the second image 420. By using a similar shape, it is less likely to include other patterns that are not needed to identify the key pattern, thus improving detection accuracy.

[0052] (An example of registration control for processing equipment)

[0053] Next, an example of the processing sequence performed by the processing apparatus 1 of the embodiment will be described. Figure 4 This is a flowchart illustrating an example of the processing sequence related to registration in the processing apparatus 1 of the embodiment. Figure 4 The processing sequence shown is achieved by executing a program through the control unit 60 of the processing device 1. Figure 4 The processing sequence shown is appropriately executed by the control unit 60 of the processing device 1.

[0054] exist Figure 4 In the registration-related processing sequence shown, the control unit 60 of the processing apparatus 1 displays image 400 on the touch panel 40 (step 2101). For example, the control unit 60 controls the touch panel 40 to display an image 400 obtained by the image capturing unit 30 capturing the workpiece 200 held on the holding table 10. Thus, the processing apparatus 1 is in a state where the image 400 of the workpiece 200 is displayed on the touch panel 40. When the processing in step 2101 ends, the control unit 60 causes the processing to proceed to step 2102.

[0055] The control unit 60 determines whether the contact line 500 has been detected (step 2102). For example, if the control unit 60 detects the contact line 500 using the touch panel 40 based on the trajectory and movement path of the contacting object, it determines that the contact line 500 has been detected. If the control unit 60 determines that the contact line 500 has not been detected (no in step 2102), it proceeds to step 2107, which will be described later. Alternatively, if the control unit 60 determines that the contact line 500 has been detected (yes in step 2102), it proceeds to step 2103.

[0056] The control unit 60 detects the contours of the graphics in the image 400 (step 2103). For example, the control unit 60 detects the boundaries of contrast, color, etc., in the image 400 as contours. The control unit 60 may, for example, use the entire image 400 as the contour detection object, or it may only use the vicinity of the contact line 500 as the contour detection object. When the processing in step 2103 ends, the control unit 60 causes the processing to proceed to step 2104.

[0057] The control unit 60 detects lines 430 located inside the allowable region 600 based on the contact line 500 (step 2104). For example, the control unit 60 detects lines 430 of the image 400 falling inside the allowable region 600 at each of several different positions (pixels) on the contact line 500 from the start position 510 to the end position 520. The control unit 60 stores the detection result, indicating whether the boundary line in the image 400 adjacent to the contact line 500 has been detected as line 430, in the storage unit 63. When the processing in step 2104 ends, the control unit 60 causes the processing to proceed to step 2105.

[0058] The control unit 60 determines whether line 430 has been detected (step 2105). For example, if the detection result in step 2104 indicates that line 430 has been detected, the control unit 60 determines that line 430 has been detected. If the control unit 60 determines that line 430 has not been detected (no in step 2105), the process proceeds to step 2107, which will be described later. Alternatively, if the control unit 60 determines that line 430 has been detected (yes in step 2105), the process proceeds to step 2106.

[0059] The control unit 60 performs a process of registering the detected line 430 (step 2106). For example, the control unit 60 performs a process of registering the registration information showing the pattern indicated by the detected line 430 as a key pattern that becomes a marker for the detection of the predetermined dividing line 202. For example, if the detected line 430 is a straight line, the control unit 60 performs a process of registering the registration information showing the line 430 as a line 430 along the predetermined dividing line 202 or through a processing groove formed by the processing unit 20. When the process in step 2106 ends, the control unit 60 causes the process to proceed to step 2107.

[0060] The control unit 60 determines whether the process has ended (step 2107). For example, if the registered end conditions are met, the control unit 60 determines that the process has ended. End conditions may include, for example, receiving an end instruction from the operator. If the control unit 60 determines that the process has not ended (no in step 2107), the process returns to the previously described step 2102 and continues processing. Alternatively, if the control unit 60 determines that the process has ended (yes in step 2107), the process proceeds to step 2108.

[0061] The control unit 60 ends the display of image 400 (step 2108). For example, the control unit 60 controls the touch panel 40 in a manner that ends the display of image 400 displayed on the touch panel 40, thereby ending the display of image 400. When the processing in step 2108 ends, the control unit 60 causes... Figure 4 The processing sequence shown has ended.

[0062] exist Figure 4 The processing sequence shown illustrates the case where the control unit 60 detects the outline of the graphic in the image 400 in step 2103, but is not limited to this. For example, the control unit 60 may also perform the detection of the outline of the graphic in the image 400 as a process before or after displaying the image 400 on the touch panel 40 in step 2101. For example, the processing apparatus 1 may detect the outline of the graphic in the image 400 in advance when capturing the image 400.

[0063] As explained above, the processing device 1 can detect and register lines 430 of the image 400 located within the permitted area 600 based on the contact lines 500 traced on the image 400 displayed on the touch panel 40. Thus, the processing device 1 can register any line 430 of the image 400 simply by having the operator operate the touch panel 40 in a manner that traces near a desired boundary line, outline, pattern, etc., of the image 400 displayed on the touch panel 40. As a result, the processing device 1 improves operability when selecting a portion of the displayed image 400 for registration.

[0064] Furthermore, in the processing apparatus 1, when the line 430 in the image 400 displayed on the touch panel 40 is the outline of the pattern constituting the device 203, the detected pattern can be registered as a key pattern that serves as a marker for the detection of the predetermined dividing line 202. Thus, in the processing apparatus 1, any line 430 of the image 400 can be registered as a key pattern simply by having the operator operate the touch panel 40 in a manner that traces the outline of the device 203 shown in the image 400. As a result, even if the shape of the displayed image 400 is complex or the tracing position is offset, the processing apparatus 1 can correct it to the outline of the pattern constituting the device 203 and select it, thereby improving operability when registering key patterns.

[0065] Furthermore, conventionally, the size of a quadrilateral frame is enlarged, reduced, and moved in a manner that includes a pattern as a marker, and the image within the quadrilateral frame is set as a key pattern. In contrast, the processing apparatus 1 of this embodiment can set the key pattern simply by tracing the vicinity of the outline of the pattern constituting the device 203 freehand, thus reducing the number of operations and achieving efficiency.

[0066] (Other registered examples of processing equipment)

[0067] Next, other registration examples of lines 430 in the image processed by the processing apparatus 1 of the embodiment will be described. Figure 5 This is a diagram illustrating another example of how the processing apparatus 1 registers the lines 430 of an image in order to explain the implementation method. Figure 6 It is used to explain the Figure 5 The image shown is an example of a detection performed on line 430 of image 400-1.

[0068] Sometimes, after the operator has processed one of the multiple predetermined dividing lines 202 on the workpiece 200, they take a picture of that line to confirm the state of the cutting groove. In such cases, the processing device 1 can provide the function of manually recording the predetermined dividing lines 202 of the workpiece and the photographing route.

[0069] exist Figure 5 In the case shown 1101, the processing device 1 displays an image 400-1 obtained by photographing the workpiece 200 on the touch panel 40. Image 400-1 is an image obtained by photographing a portion of the workpiece 200 in such a way that it includes the area where the processing device 1 processes the workpiece 200 along a line. Image 400-1 may include, for example, an image showing a predetermined dividing line 202, a device 203, etc.

[0070] After processing by the processing device 1, in order to confirm the state of the cutting groove, the operator traces it freehand on the display surface of the touch panel 40 of the processing device 1 on the predetermined dividing line 202 that is to be registered as the processing object and the shooting route.

[0071] In scenario 1101, the processing device 1 detects the contact line 500 from the start position 510 to the end position 520 using a touch panel 40. For example... Figure 6 As shown, the processing apparatus 1 detects the boundary line of the contour located inside the allowable area 600 based on the outline of the pattern in image 400-1 and the contact line 500. For example, the processing apparatus 1 detects the line of the contour of the segmentation predetermined line 202 and the device 203. The proportion of the line of the segmentation predetermined line 202 falling inside the allowable area 600 is higher, so the line of the segmentation predetermined line 202 is detected as line 430. The processing apparatus 1 stores the registration information of line 430, which shows the contour of the segmentation predetermined line 202, in the storage unit 63, thereby registering line 430. In this embodiment, the processing apparatus 1 registers the detected line 430 as the segmentation predetermined line 202 of the processing object and the shooting route.

[0072] return Figure 5 In one example shown in case 1102, the processing device 1 controls the touch panel 40 to display the detected line 430, thereby displaying the line 430 as a straight line along the outline of the selected dividing predetermined line 202. Thus, the processing device 1 enables the operator to confirm that the displayed line 430 has been registered.

[0073] After registering line 430, the processing apparatus 1 can determine a predetermined dividing line 202 based on line 430 according to the operator's instructions, and process the workpiece 200 held by the holding table 10 along the predetermined dividing line 202, thereby forming a cutting groove along a line. Alternatively, after registering line 430, the processing apparatus 1 can move the imaging unit 30 along line 430 while photographing the state of the cutting groove. Thus, in the processing apparatus 1, when it is desired to photograph multiple areas, an image of a cutting groove obtained by photographing a line can be provided to the operator without the operator performing multiple operations to move the photographing area. For example, the processing apparatus 1 can display the image of a cutting groove obtained by photographing a line on the touch panel 40.

[0074] (Another example of registration control for processing equipment)

[0075] Next, another example of the processing sequence performed by the processing apparatus 1 of the embodiment will be described. Figure 7 This is a flowchart illustrating another example of the processing sequence related to registration in the processing apparatus 1 of the embodiment. Figure 7The processing sequence shown is achieved by executing a program through the control unit 60 of the processing device 1. Figure 7 The processing sequence shown is appropriately executed by the control unit 60 of the processing device 1.

[0076] exist Figure 7 In the processing sequence shown, steps 2101 to 2108 are processed in accordance with... Figure 4 The processes in steps 2101 to 2108 shown are the same, so detailed explanations are omitted.

[0077] like Figure 7 As shown, when the processing in step 2106 ends, the control unit 60 of the processing apparatus 1 performs processing based on the registered line 430 (step 2111). For example, by performing the processing, the control unit 60 determines a predetermined dividing line 202 based on the line 430, and controls the processing unit 20 to process the workpiece 200 held by the holding table 10 along the predetermined dividing line 202. When the processing in step 2111 ends, the control unit 60 causes the processing to proceed to step 2112.

[0078] The control unit 60 performs a shooting process based on the registered line 430 (step 2112). For example, by performing the shooting process, the control unit 60 controls the shooting unit 30 and the moving unit 50 in a manner that the shooting unit 30 is moved along the line 430 while shooting the processing state. When the processing in step 2112 ends, the control unit 60 causes the processing to proceed to step 2113.

[0079] The control unit 60 displays the captured image on the touch panel 40 (step 2113). For example, the control unit 60 controls the touch panel 40 in a manner that displays the image captured by the imaging unit 30. As a result, the processing apparatus 1 is in a state where the image obtained by capturing the processed groove is displayed on the touch panel 40. When the processing in step 2113 ends, the control unit 60 causes the processing to proceed to step 2107, which has already been described.

[0080] The control unit 60 determines whether the process has ended (step 2107). If the control unit 60 determines that the process has not ended (no in step 2107), the process returns to the previously described step 2102 and continues processing. Alternatively, if the control unit 60 determines that the process has ended (yes in step 2107), the process proceeds to step 2108.

[0081] The control unit 60 ends the display of image 400 (step 2108). For example, the control unit 60 controls the touch panel 40 in a manner that ends the display of the image displayed on the touch panel 40, thereby ending the display of the image. When the processing in step 2108 ends, the control unit 60 causes... Figure 7The processing sequence shown has ended.

[0082] As explained above, in the processing apparatus 1, when the line 430 in the image 400 displayed on the touch panel 40 is a predefined dividing line 202 or a processing groove formed by the processing unit 20, the line 430 can be registered as a shooting path that moves the shooting unit 30, which is used to photograph the workpiece 200, relative to the holding table 10. Therefore, in the processing apparatus 1, by having the operator operate the touch panel 40 in a manner that traces the outline of the predefined dividing line 202 or the processing groove shown in the image 400, even if the line traced by the operator deviates, it can be corrected to follow the line 430 of the predefined dividing line 202 or the processing groove. Thus, any line 430 of the image 400 can be easily registered as a shooting path. As a result, in the processing apparatus 1, when multiple areas need to be photographed, the operator does not need to repeatedly select and register the predefined dividing line 202 or the processing groove of the displayed image 400 to change the shooting area, thus improving operability.

[0083] In the above embodiment, the case where the processing device 1 detects and registers a line 430 located inside the allowable area 600 based on the contact line 500 has been described, but it is not limited to this. For example, the processing device 1 may be configured to register multiple lines 430 based on the contact line 500 when multiple boundary lines or the like exist inside the allowable area 600.

[0084] [Other Implementation Methods]

[0085] Furthermore, the processing apparatus 1 of the present invention is not limited to the above-described embodiments, and can be modified and implemented in various ways without departing from the spirit of the present invention. For example, the processing apparatus 1 can be a grinding apparatus other than a cutting apparatus or a laser processing apparatus.

[0086] Furthermore, the constituent elements of the processing apparatus 1 described in the above embodiments are functional concepts and do not necessarily need to be physically configured as shown in the illustrations. That is, the specific manner in which the processing apparatus 1 is distributed or integrated is not limited to the manner shown in the illustrations, and all or part of it can be distributed or integrated in any unit, functionally or physically, according to various loads or usage conditions. For example, the processing apparatus 1 can functionally integrate and combine the detection unit 61 and the registration unit 62.

Claims

1. A processing apparatus, wherein, The processing device has the following features: A holding table having a holding surface for holding a workpiece having multiple devices formed on its front surface by multiple predetermined dividing lines; A processing unit that processes the workpiece held by the holding table; The imaging unit takes pictures of the workpiece held by the holding table; A moving unit that moves the holding table relative to the processing unit and the shooting unit in a direction horizontal to the holding surface; Touch panel that displays the captured image; as well as Control unit The control unit detects lines in the image located within an allowed area based on contact lines traced on the image displayed on the touch panel. The allowed area refers to the region within a certain distance centered on any point on the traced contact line. The control unit calculates the proportion of the image contour that is determined to be within the allowed area. If the calculated proportion is greater than a threshold, the contour is detected as a line in the image, and the detected line is registered. The line, as displayed in the image on the touch panel, forms the outline of the pattern constituting the device. The control unit registers the pattern corresponding to the detected line as a key pattern, which becomes a marker for detecting the predetermined dividing line. Alternatively, the line in the image displayed on the touch panel may be a predetermined dividing line or a processing groove formed by the processing unit, and the control unit may perform processing along the predetermined dividing line on the workpiece.

2. The processing apparatus according to claim 1, wherein, The control unit registers the line as a shooting route that causes the shooting unit that is shooting the workpiece to move relative to the holding table.

Images