A pipe connection assembly, pipe assembly and method of connection, semiconductor device

Abstract

The application discloses a pipeline connecting assembly, a pipeline assembly and a connecting method and a semiconductor device, and belongs to the technical field of semiconductor manufacturing, and aims to solve the problems of complex connection structure between pipelines, time and labor consuming or long overall length of multiple pipelines in the prior art. The pipeline connecting assembly comprises a centering piece matched with one end of a pipeline and a connecting piece arranged between the centering piece and the pipeline; the connecting piece comprises a connecting groove and a connecting protrusion arranged at the inner end of the connecting groove, and the connecting groove is arranged to be inclined relative to the axis of the centering piece; the centering piece is provided with a through hole, and the two ends of the through hole are provided with sealing rings, and the outer diameter of the sealing ring is equal to the inner diameter of the corresponding pipeline. The pipeline connecting assembly, the pipeline assembly and the connecting method and the semiconductor device can be used for the preparation of semiconductor devices.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, and particularly relates to a pipeline connection assembly, a pipeline assembly and connection method, and semiconductor equipment. Background Technology

[0002] In semiconductor devices that use pipelines (e.g., vacuum pipelines), due to the long length of the required pipeline, it is usually not possible to use a single, integrated pipeline. Instead, multiple shorter pipelines of different diameters are connected together.

[0003] A reducing clamping assembly is needed to connect two pipes of different diameters. See [link / reference]. Figure 1 Specifically, the reducing clamping assembly includes a reducing pipe 10 and connectors at both ends of the reducing pipe 10. One end of the reducing pipe 10 has the same diameter as one of the pipelines, and the other end has the same diameter as another pipeline. The connectors include a centering pin 11, an O-ring 12, and a clamp 13, which are sequentially fitted together. The clamp 13 secures the reducing pipe 10 to the pipeline, while the centering pin 11 and O-ring 12 seal the reducing pipe 10 to the pipeline. Because the reducing clamping assembly has a complex structure, damage to any component or inaccurate connection between any two components can cause leakage in the entire pipeline. Furthermore, the reducing pipe 10 increases the overall length of multiple pipelines.

[0004] In addition, when using the above-mentioned reducing clamping assembly for pipeline connection, it is necessary to hold the pipeline and the reducing pipe 10 separately and then tighten the clamping parts, which requires at least two people and is time-consuming and laborious. Summary of the Invention

[0005] Based on the above analysis, the present invention aims to provide a pipeline connection assembly, a pipeline assembly and connection method, and a semiconductor device to solve the problems of complex connection structures between pipelines, time-consuming and labor-intensive processes, or long overall lengths of multiple pipelines in the prior art.

[0006] The objective of this invention is mainly achieved through the following technical solutions:

[0007] This invention provides a pipeline connection assembly, including a centering member fitted to one end of a pipeline and a connector disposed between the centering member and the pipeline; the connector includes a connecting groove and a connecting protrusion located at the inner end of the connecting groove, the connecting groove being inclined relative to the axis of the centering member, and the pipeline and the centering member being axially limited by the interaction between the connecting protrusion and the sidewall of the connecting groove; the centering member has a through hole, and sealing rings are provided at both ends of the through hole, the outer diameter of the sealing rings being equal to the inner diameter of the corresponding pipeline.

[0008] Furthermore, the sealing ring is made of one of the following: acrylic rubber, silicone rubber, nitrile rubber, chloroprene rubber, ethylene propylene rubber, fluorocarbon rubber, or perfluororubber.

[0009] Furthermore, the cross-sectional shape of the connecting groove along the circumference of the centering member is streamlined.

[0010] Furthermore, the cross-section of the connecting protrusion along the circumferential direction of the centering member is conformal to the cross-section of the connecting groove along the circumferential direction of the centering member.

[0011] Furthermore, the cross-sectional shape of the connecting protrusion along the circumference of the centering member is a segmental shape; the cross-sectional shape of the connecting groove along the circumference of the centering member is a segmental shape, and the inner end of the connecting groove is an arc surface.

[0012] Furthermore, the centering component includes a centering body and rotating rings located at both ends of the centering body and rotatably connected to the centering body. The rotating rings are fitted onto one end of the pipeline, a connecting member is provided between the rotating rings and the pipeline, and a through hole and a sealing ring are provided on the centering body.

[0013] Furthermore, the centering body and the rotating ring are made of metal.

[0014] Furthermore, there are multiple connectors, which are evenly arranged around the centering member.

[0015] Furthermore, there are four connectors. The swivel is divided into a first swivel connected to the first pipeline and a second swivel connected to the second pipeline. The four connectors are divided into two first connectors located between the first pipeline and the first swivel and two second connectors located between the second pipeline and the second swivel. The two first connectors are arranged symmetrically with respect to the axis of the centering member, and the two second connectors are arranged symmetrically with respect to the axis of the centering member.

[0016] Furthermore, in one of the first connectors, a connecting groove is provided on the first pipeline and a connecting protrusion is provided on the first rotating ring; in the other first connector, a connecting protrusion is provided on the first pipeline and a connecting groove is provided on the first rotating ring.

[0017] Furthermore, in one of the second connectors, a connecting groove is provided on the second pipeline and a connecting protrusion is provided on the second rotating ring; in the other second connector, a connecting protrusion is provided on the second pipeline and a connecting groove is provided on the second rotating ring.

[0018] Furthermore, the aforementioned pipeline connection assembly also includes a limiting member, which includes a limiting protrusion on the outer wall of the sealing ring and a limiting groove on the inner wall of the pipeline.

[0019] Furthermore, the cross-sectional shape of the aforementioned limiting protrusion along the radial direction of the sealing ring is a right trapezoid, with the inclined waist of the right trapezoid facing the pipeline. Along the insertion direction of the sealing ring, the inclined waist of the limiting protrusion contacts the pipeline first.

[0020] Furthermore, the limiting protrusion includes a rigid protrusion disposed on the side wall of the sealing ring and an elastic protrusion surrounding the rigid protrusion. The cross-sectional shape of the contact surface between the rigid protrusion and the elastic protrusion along the axial direction of the sealing ring is an arc shape, and the cross-sectional shape of the contact surface between the elastic protrusion and the limiting groove along the axial direction of the sealing ring is a right trapezoid.

[0021] Furthermore, the connecting protrusion is provided with a prompt indicating that the connecting protrusion and the inner end of the connecting groove are in tight fit, and a display hole is provided at the inner end of the connecting groove to display the prompt.

[0022] Furthermore, the colors of the connecting protrusion and the inner end of the connecting groove are different, or the colors of the connecting protrusion and the inner end of the connecting groove are respectively provided with different colored coating layers.

[0023] Furthermore, the connecting protrusion is yellow, and the inner end of the connecting groove is blue. When the connecting protrusion is fully inserted into the inner end of the connecting groove, the yellow connecting protrusion and the blue inner end of the connecting groove completely overlap and turn green. When the connecting protrusion is not fully inserted into the inner end of the connecting groove, part of the yellow connecting protrusion and part of the blue inner end of the connecting groove will be exposed.

[0024] Furthermore, the aforementioned pipeline connection assembly also includes a contact sensor located at the inner end of the connection groove, a controller connected to the contact sensor, and an alarm light connected to the controller. The connection protrusion fits tightly with the inner end of the connection groove, and the connection protrusion contacts the contact sensor. The controller receives the contact signal sent by the contact sensor and controls the alarm light to change its display state.

[0025] Furthermore, the alarm light changes its display status, including changing from off to on or from red to green.

[0026] The present invention also provides a pipeline assembly, including multiple pipelines and a pipeline connection assembly disposed between two adjacent pipelines, wherein the pipeline connection assembly is the aforementioned pipeline connection assembly.

[0027] Furthermore, the diameters of the multiple pipelines may be the same or different.

[0028] Furthermore, to facilitate the connection between the centering component and the pipeline, a flange is provided at one end of the pipeline, the centering component is sleeved on the outer edge of the flange, and the connecting component is located between the centering component and the flange.

[0029] The present invention also provides a method for connecting pipeline assemblies, for connecting the above-mentioned pipeline assemblies, the method comprising the following steps:

[0030] Insert the two pipelines in the pipeline assembly into the two ends of the centering member, or insert the two ends of the centering member into the two pipelines to be connected. Rotate the centering member so that the connecting protrusion of the connector is inserted into the connecting groove, thereby achieving axial positioning of the pipelines and the centering member. The sealing rings at both ends are inserted into the two pipelines respectively to achieve a sealed connection of the two pipelines.

[0031] The present invention also provides a semiconductor device including the above-described pipeline assembly.

[0032] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0033] a) The pipeline connection assembly provided by the present invention is a "one-click" connection assembly with locking function. A connecting member for axial limiting is set between the centering member and the pipeline. Only one operator is needed to insert the connecting protrusion into the connecting groove. It can connect two pipelines with different diameters. The structure is simple, the operation is convenient, and it saves time and effort.

[0034] b) The pipeline connection assembly provided by the present invention achieves a sealed connection between the two pipelines to be connected through a sealing ring. The possible leakage points are only two: between the first pipeline and the sealing ring and between the second pipeline and the sealing ring. This greatly reduces the number of leakage points and thus reduces the possibility of overall pipeline leakage.

[0035] c) The pipeline connection assembly provided by the present invention uses one sealing ring, a through hole and another sealing ring connected in sequence as the connecting pipeline, replacing the complex and long variable diameter pipe and variable diameter clamping assembly. By adjusting the outer diameter of the sealing ring, it can accommodate two pipelines with different diameters, which can greatly shorten the overall length of the pipeline.

[0036] d) The pipeline connection assembly provided by the present invention adopts a streamlined connection groove with a continuous arc-shaped wall. During the process of inserting the connection protrusion into the connection groove, it can move smoothly in the streamlined connection groove, thereby facilitating the connection between the connection protrusion and the connection groove.

[0037] e) The pipeline connection assembly provided by the present invention has a cross-section that is conformal between the connecting protrusion and the connecting groove, which can reduce the gap between the two and enable them to fit tightly together, thereby reducing the shaking between the pipeline and the centering member.

[0038] f) The pipeline connection assembly provided by the present invention enables the connection between the pipeline and the centering member by rotating the rotating ring so that the connecting protrusion is inserted into the connecting groove.

[0039] g) The pipeline connection assembly provided by the present invention can limit the sealing ring along the axial direction of the sealing ring through mutually cooperating limiting protrusions and limiting grooves, thereby reducing the occurrence of the sealing ring coming out of the pipeline.

[0040] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0041] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0042] Figure 1 This is a schematic diagram of the connection between pipelines in the prior art;

[0043] Figure 2 This is a schematic diagram of the pipeline connection assembly provided in Embodiment 1 of the present invention;

[0044] Figure 3 This is a schematic diagram of the fit between the connecting protrusion and the connecting groove in the pipeline connection assembly provided in Embodiment 1 of the present invention;

[0045] Figure 4 This is a schematic diagram of the limiting component in the pipeline connection assembly provided in Embodiment 1 of the present invention;

[0046] Figure 5 This is a schematic diagram of the pipeline assembly provided in Embodiment 4 of the present invention;

[0047] Figure 6 This is a split schematic diagram of the pipeline assembly provided in Embodiment 4 of the present invention.

[0048] Figure label:

[0049] 1-Connecting groove; 2-Connecting protrusion; 3-Through hole; 4-Sealing ring; 5-Centering body; 6-Rotating ring; 7-Limiting protrusion; 71-Rigid protrusion; 72-Elastic protrusion; 8-Pipeline; 9-Flange; 10-Reducing pipe; 11-Centering; 12-O-ring; 13-Clamp. Detailed Implementation

[0050] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of the present invention and, together with the embodiments of the present invention, serve to illustrate the principles of the present invention.

[0051] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the term "connected" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art,

[0052] Throughout the text, the terms “top,” “bottom,” “above,” “below,” and “on top” refer to the relative positions of components of the device, such as the relative positions of the top and bottom substrates within the device. It is understood that the device is multifunctional and independent of its spatial orientation.

[0053] The working surface of this invention can typically be a plane or a curved surface, and can be inclined or horizontal. For ease of explanation, the embodiments of this invention are placed on a horizontal surface and used on a horizontal surface, thereby defining "height" and "vertical".

[0054] Example 1

[0055] This embodiment provides a pipeline connection assembly, see [link]. Figures 2 to 4 The system includes a centering component that fits onto one end of the pipeline and a connector located between the centering component and the pipeline. The connector includes a connecting groove 1 and a connecting protrusion 2 located at the inner end of the connecting groove 1. The connecting groove 1 is inclined relative to the axis of the centering component. The pipeline and the centering component are axially limited by the interaction between the connecting protrusion 2 and the side wall of the connecting groove 1. The centering component has a through hole 3, and sealing rings 4 are provided at both ends of the through hole 3. The outer diameter of the sealing ring 4 is equal to the inner diameter of the corresponding pipeline.

[0056] It should be noted that axial direction refers to the axial direction of the pipeline or the axial direction of the centering component. When the pipeline and the centering component are coaxially arranged, the axial direction of the pipeline coincides with the axial direction of the centering component.

[0057] It should also be noted that, along the insertion direction of the connecting protrusion 2, the end of the connecting groove 1 that contacts the connecting protrusion 2 first is the outer end, and the end of the connecting groove 1 that contacts the connecting protrusion 2 later is the inner end.

[0058] For ease of explanation, one of the pipelines connected to the above-mentioned pipeline connection assembly is referred to as the first pipeline, and the other pipeline connected to the above-mentioned pipeline connection assembly is referred to as the second pipeline. The first pipeline and the second pipeline may have the same or different diameters.

[0059] In practice, the first and second pipelines to be connected are inserted into the two ends of the centering member, or the two ends of the centering member are inserted into the first and second pipelines to be connected, respectively. The centering member is rotated so that the connecting protrusion 2 of the connector is inserted into the connecting groove 1. Through the interaction between the connecting protrusion 2 and the groove wall of the connecting groove 1, the axial positioning of the pipeline and the centering member is achieved. At the same time, the sealing ring 4 is inserted into the first pipeline and the other sealing ring 4 is inserted into the second pipeline. The fluid (gas or liquid) flows through the first pipeline, the through hole 3 of the centering member and the second pipeline in sequence. The sealing connection of the first pipeline and the second pipeline is achieved through the sealing ring 4.

[0060] Compared with the prior art, the pipeline connection assembly provided in this embodiment is a "one-click" connection assembly with locking function. A connecting piece for axial limiting is set between the centering member and the pipeline. Only one operator is needed to insert the connecting protrusion 2 into the connecting groove 1, which can realize the connection of two pipelines with different diameters. The structure is simple, the operation is convenient, and it saves time and effort.

[0061] Meanwhile, in existing pipeline connections, there are four potential leakage points: two between the two pipelines and the sealing ring 4, and two between the two sealing rings 4 and the reducer. However, the pipeline connection assembly provided in this embodiment, because the two pipelines are sealed together by two sealing rings 4, has only two potential leakage points: between the first pipeline and the sealing ring 4, and between the second pipeline and the sealing ring 4. This significantly reduces the number of leakage points and consequently reduces the likelihood of overall pipeline leakage.

[0062] In addition, the above-mentioned pipeline connection assembly uses one sealing ring 4, through hole 3 and another sealing ring 4 connected in sequence as the connecting pipeline, replacing the complex and long variable diameter pipe and variable diameter clamping assembly. By adjusting the outer diameter of the sealing ring 4, it can accommodate two pipelines with different diameters, which can greatly shorten the overall length of the pipeline.

[0063] Specifically, the sealing ring 4 is made of one of the following materials: acrylic rubber, silicone rubber, nitrile rubber, neoprene rubber, ethylene propylene rubber, fluorocarbon rubber, or perfluororubber.

[0064] To ensure that the connecting protrusion 2 can be smoothly inserted into the connecting groove 1, the shapes of the connecting groove 1 and the connecting protrusion 2 are as follows: specifically, the cross-sectional shape of the connecting groove 1 along the circumference of the centering member is streamlined. This is because, with a streamlined connecting groove 1, the groove wall of the connecting groove 1 is a continuous arc shape. During the insertion of the connecting protrusion 2 into the connecting groove 1, it can move smoothly in the streamlined connecting groove 1, thereby facilitating the mutual connection between the connecting protrusion 2 and the connecting groove 1.

[0065] To reduce the swaying between the pipeline and the centering component, the cross-section of the connecting protrusion 2 along the circumference of the centering component is conformal to the cross-section of the connecting groove 1 along the circumference of the centering component. This conformal cross-section of the connecting protrusion 2 and the connecting groove 1 reduces the gap between them, allowing for a tight fit and thus reducing the swaying between the pipeline and the centering component.

[0066] For example, the cross-sectional shape of the connecting protrusion 2 along the circumference of the centering member is a segmental shape; correspondingly, the cross-sectional shape of the connecting groove 1 along the circumference of the centering member is a segmental shape, and the inner end of the connecting groove 1 is an arc surface.

[0067] Specifically, the centering component includes a centering body 5 and rotating rings 6 located at both ends of the centering body 5 and rotatably connected to it. The rotating rings 6 are fitted onto one end of the pipeline. A connecting member is positioned between the rotating rings 6 and the pipeline. A through hole 3 and a sealing ring 4 are located on the centering body 5. Thus, by rotating the rotating rings 6, the connecting protrusion 2 is inserted into the connecting groove 1, thereby achieving the connection between the pipeline and the centering component.

[0068] Specifically, the centering body 5 and the rotating ring 6 are made of metal (e.g., high-strength metal).

[0069] To further improve the connection stability of the above-mentioned pipeline connection assembly, multiple connectors are used, and these connectors are evenly arranged along the axial direction of the centering member. For example, four connectors are used. The rotating ring 6 is divided into a first rotating ring connected to the first pipeline and a second rotating ring connected to the second pipeline. The four connectors are divided into two first connectors located between the first pipeline and the first rotating ring, and two second connectors located between the second pipeline and the second rotating ring. The two first connectors are symmetrically arranged with respect to the axis of the centering member, and the two second connectors are symmetrically arranged with respect to the axis of the centering member. Specifically, for the first connector, in one first connector, a connecting groove 1 is located on the first pipeline, and a connecting protrusion 2 is located on the first rotating ring; in the other first connector, a connecting protrusion 2 is located on the first pipeline, and a connecting groove 1 is located on the first rotating ring. Similarly, for the second connectors, specifically, in one second connector, a connecting groove 1 is located on the second pipeline, and a connecting protrusion 2 is located on the second rotating ring; in the other second connector, a connecting protrusion 2 is located on the second pipeline, and a connecting groove 1 is located on the second rotating ring. By adopting the above-described arrangement of the connectors, multi-directional axial positioning between the pipeline and the swivel 6 can be achieved, thereby further improving the connection stability of the above-described pipeline connection assembly.

[0070] To reduce the likelihood of the sealing ring 4 coming off the pipeline, the pipeline connection assembly further includes a limiting member, which comprises a limiting protrusion 7 on the outer wall of the sealing ring 4 and a limiting groove (not shown in the figure) on the inner wall of the pipeline. Thus, along the axial direction of the sealing ring 4, the mutually cooperating limiting protrusion 7 and limiting groove can limit the sealing ring 4, reducing the likelihood of it coming off the pipeline.

[0071] For example, the cross-sectional shape of the limiting protrusion 7 along the radial direction of the sealing ring 4 is a right trapezoid, with the inclined waist of the right trapezoid facing the pipeline. That is, along the insertion direction of the sealing ring 4, the inclined waist of the limiting protrusion 7 contacts the pipeline first. In this way, during the insertion of the sealing ring 4 into the pipeline, the inclined waist of the limiting protrusion 7 can guide the insertion of the sealing ring 4. When the sealing ring 4 reaches the designated position, the limiting protrusion 7 and the limiting groove cooperate with each other, and the right waist can lock the sealing ring 4, thereby basically preventing the sealing ring 4 from coming out of the pipeline.

[0072] Specifically, the structure of the limiting protrusion 7 includes a rigid protrusion 71 located on the side wall of the sealing ring 4 and an elastic protrusion 72 surrounding the rigid protrusion 71. The contact surface between the rigid protrusion 71 and the elastic protrusion 72 has an arc-shaped cross-section along the axial direction of the sealing ring 4, while the contact surface between the elastic protrusion 72 and the limiting groove has a right-angled trapezoidal cross-section along the axial direction of the sealing ring 4. The rigid protrusion 71 ensures that the limiting protrusion 7 has sufficient mechanical strength, effectively preventing the sealing ring 4 from dislodging from the pipeline. Furthermore, the arc-shaped rigid protrusion 71 facilitates the insertion and removal of the sealing ring 4. As for the elastic protrusion 72, during the insertion of the sealing ring 4 into the pipeline, the inclined waist of the elastic protrusion 72 guides the insertion of the sealing ring 4. When the sealing ring 4 reaches the designated position, the elastic protrusion 72 and the limiting groove cooperate, and the right-angled waist locks the sealing ring 4, thereby effectively preventing the sealing ring 4 from dislodging from the pipeline.

[0073] It should be noted that when the sealing ring 4 is pulled out, since the elastic protrusion 72 can deform appropriately according to the magnitude of the force applied, in actual applications, the limiting protrusion 7 will basically not hinder the pulling out of the sealing ring 4, and the user only needs to apply a little force.

[0074] To enable operators to determine whether the connecting protrusion 2 and the connecting groove 1 are tightly fitted, the connecting protrusion 2 is provided with a prompt indicating that the connecting protrusion 2 and the inner end of the connecting groove 1 are tightly fitted. A display hole is provided at the inner end of the connecting groove 1 to display the prompt. When the connecting protrusion 2 and the inner end of the connecting groove 1 are tightly fitted, the operator can see the prompt on the connecting protrusion 2 through the display hole. For example, the prompt is a combination of one or more of the following: color, graphics, text, or characters. For instance, the prompt is red, or it may be text and a pattern representing a lock.

[0075] Example 2

[0076] This embodiment provides a pipeline connection assembly, the structure of which is basically the same as that of the pipeline connection assembly provided in Embodiment 1. The difference lies in that, in order to enable the operator to determine whether the connecting protrusion 2 and the connecting groove 1 are tightly fitted, the inner ends of the connecting protrusion 2 and the connecting groove 1 are different colors, or the inner ends of the connecting protrusion 2 and the connecting groove 1 are respectively provided with different colored coating layers. For example, the color of the connecting protrusion 2 is yellow, and the color of the inner end of the connecting groove 1 is blue. When the connecting protrusion 2 is fully inserted into the inner end of the connecting groove 1, the yellow connecting protrusion 2 and the blue inner end of the connecting groove 1 completely overlap, turning green. When the connecting protrusion 2 is not fully inserted into the inner end of the connecting groove 1, part of the yellow connecting protrusion 2 and part of the blue inner end of the connecting groove 1 will be exposed, thereby enabling the operator to determine whether the connecting protrusion 2 and the connecting groove 1 are tightly fitted based on the color. Similarly, the colors of the connecting protrusion 2 and the inner end of the connecting groove 1 can also be selected as other combinations of different colors, which are not listed here.

[0077] Example 3

[0078] This embodiment provides a pipeline connection assembly, the structure of which is basically the same as that of the pipeline connection assembly provided in Embodiment 1. The difference is that it also includes a contact sensor located at the inner end of the connection groove 1, a controller connected to the contact sensor, and an alarm light connected to the controller. The connection protrusion 2 is tightly fitted with the inner end of the connection groove 1, and the connection protrusion 2 is in contact with the contact sensor. The controller receives the contact signal sent by the contact sensor and controls the alarm light to change its display state. For example, the alarm light changes from the off state to the on state or the alarm light changes from red to green. In this way, the operator can determine whether the connection protrusion 2 and the connection groove 1 are tightly fitted based on the display state of the alarm light.

[0079] Example 4

[0080] This embodiment provides a pipeline assembly, see [link / reference] Figures 5 to 6 It includes multiple pipelines 8 and pipeline connection components disposed between two adjacent pipelines 8. The pipeline connection components are the pipeline connection components provided in Embodiment 1, Embodiment 2 or Embodiment 3. The multiple pipelines 8 have the same or different diameters. That is to say, the above-mentioned pipeline components can be fixed-diameter pipeline components or variable-diameter pipeline components.

[0081] Compared with the prior art, the beneficial effects of the pipeline assembly provided in this embodiment are basically the same as those of the pipeline connection assembly provided in Embodiment 1, Embodiment 2 or Embodiment 3, and will not be described in detail here.

[0082] To facilitate the connection between the centering component and the pipeline 8, a flange 9 is provided at one end of the pipeline 8, the centering component is sleeved on the outer edge of the flange 9, and the connecting component is provided between the centering component and the flange 9.

[0083] Example 5

[0084] This embodiment provides a method for connecting pipeline assemblies. The method for connecting pipeline assemblies in Embodiment 4 includes the following steps:

[0085] Insert the two pipelines in the pipeline assembly into the two ends of the centering member, or insert the two ends of the centering member into the two pipelines to be connected. Rotate the centering member so that the connecting protrusion of the connector is inserted into the connecting groove, thereby achieving axial positioning of the pipelines and the centering member. Insert the sealing rings at both ends into the two pipelines respectively.

[0086] Example 6

[0087] This embodiment provides a semiconductor device, including the pipeline assembly provided in Embodiment 4.

[0088] Compared with the prior art, the beneficial effects of the semiconductor device provided in this embodiment are basically the same as those of the pipeline assembly provided in Embodiment 4, and will not be described in detail here.

[0089] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A pipeline connection assembly, characterized in that, It includes a centering component that fits onto one end of a pipeline and a connector disposed between the centering component and the pipeline; the connector includes a connecting groove and a connecting protrusion located at the inner end of the connecting groove, the connecting groove being inclined relative to the axis of the centering component; the centering component has a through hole, and sealing rings are provided at both ends of the through hole, the outer diameter of the sealing rings being equal to the inner diameter of the corresponding pipeline. The pipeline connection assembly also includes a limiting component, which includes a limiting protrusion on the outer wall of the sealing ring and a limiting groove on the inner wall of the pipeline. The limiting protrusion has a right trapezoidal cross-sectional shape along the radial direction of the sealing ring, with the inclined waist of the right trapezoid facing the pipeline. During the process of inserting the sealing ring into the pipeline, the inclined waist of the limiting protrusion guides the insertion of the sealing ring. When the sealing ring reaches the designated position, the limiting protrusion and the limiting groove cooperate with each other, and the right waist locks the sealing ring. The limiting protrusion includes a rigid protrusion disposed on the side wall of the sealing ring and an elastic protrusion surrounding the rigid protrusion. The contact surface between the rigid protrusion and the elastic protrusion has an arc-shaped cross-section along the axial direction of the sealing ring, and the contact surface between the elastic protrusion and the limiting groove has a right trapezoidal cross-section along the axial direction of the sealing ring. The connecting protrusion is yellow, and the inner end of the connecting groove is blue. When the connecting protrusion is fully inserted into the inner end of the connecting groove, the yellow connecting protrusion and the blue inner end of the connecting groove completely overlap and turn green. When the connecting protrusion is not fully inserted into the inner end of the connecting groove, part of the yellow connecting protrusion and part of the blue inner end of the connecting groove are exposed.

2. The pipeline connection assembly according to claim 1, characterized in that, The cross-sectional shape of the connecting groove along the circumference of the centering member is streamlined; The cross-section of the connecting protrusion along the circumference of the centering member is conformal to the cross-section of the connecting groove along the circumference of the centering member.

3. The pipeline connection assembly according to claim 2, characterized in that, The cross-sectional shape of the connecting protrusion along the circumference of the centering member is a chamfer; The cross-sectional shape of the connecting groove along the circumference of the centering member is a circular segment, and the inner end of the connecting groove is an arc surface.

4. The pipeline connection assembly according to claim 1, characterized in that, The centering component includes a centering body and rotating rings located at both ends of the centering body and rotatably connected to the centering body. The rotating rings are fitted onto one end of the pipeline. The connecting component is located between the rotating rings and the pipeline. The through hole and the sealing ring are located on the centering body.

5. The pipeline connection assembly according to any one of claims 1 to 4, characterized in that, The connecting protrusion is provided with a prompt message indicating that the connecting protrusion and the inner end of the connecting groove are tightly fitted, and the inner end of the connecting groove has a display hole for displaying the prompt message. Alternatively, the pipeline connection assembly may further include a contact sensor located at the inner end of the connection groove, a controller connected to the contact sensor, and an alarm light connected to the controller. The connection protrusion is tightly fitted with the inner end of the connection groove, the connection protrusion is in contact with the contact sensor, and the controller receives the contact signal sent by the contact sensor and controls the alarm light to change its display state.

6. A pipeline assembly, characterized in that, It includes multiple pipelines and a pipeline connection assembly disposed between two adjacent pipelines, wherein the pipeline connection assembly is the pipeline connection assembly according to any one of claims 1 to 5.

7. The pipeline assembly according to claim 6, characterized in that, Multiple pipelines may have the same or different diameters.

8. A method for connecting pipeline components, characterized in that, For connecting the pipeline assembly as described in claim 6 or 7, the connection method includes the following steps: Insert the two pipelines in the pipeline assembly into the two ends of the centering member, or insert the two ends of the centering member into the two pipelines to be connected. Rotate the centering member so that the connecting protrusion of the connector is inserted into the connecting groove, thereby achieving axial positioning of the pipelines and the centering member. The sealing rings at both ends are inserted into the two pipelines respectively to achieve a sealed connection of the two pipelines.

9. A semiconductor device, characterized in that, Includes the pipeline assembly as described in claim 6 or 7.

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