Vacuum shielding device, evaporation source system, evaporation coating system and method

Abstract

The present disclosure provides a vacuum shielding device, comprising: a sealed cavity configured to be in sealed communication with a vacuum cavity; a shielding assembly at least partially disposed within the sealed cavity; and a driving device coupled to the shielding assembly and configured to drive the shielding assembly to move to switch between a shielding position and a release position.

Description

Technical Field

[0001] This disclosure relates to vacuum coating technology, and in particular to a vacuum shielding device, an evaporation source system, an evaporation coating system and method. Background Technology

[0002] Molecular beam epitaxy (MBE) is a commonly used vacuum deposition method. It involves heating an evaporation source to form a molecular beam that deposits a film on a substrate. Once deposition is complete, the molecular beam is blocked by a furnace source baffle. MBE requires a vacuum environment. To avoid frequent vacuum breaks that could extend production or experimental time and reduce equipment lifespan, the molecular beam blocking must be performed under vacuum conditions. However, existing furnace source baffles are insufficient, exhibiting short lifespans, poor performance, and frequent replacements. Summary of the Invention

[0003] This disclosure provides a vacuum shielding device, comprising: a sealed cavity for sealing communication with a vacuum cavity; a shielding component at least partially disposed within the sealed cavity; and a driving device coupled to the shielding component for driving the shielding component to move to switch between a shielding position and a release position.

[0004] This disclosure provides a vacuum evaporation source system, including: an evaporation source cavity; and a vacuum shielding device according to any embodiment of this disclosure, wherein the sealing cavity of the vacuum shielding device is sealed to the evaporation source cavity, and the shielding component shields the evaporation stream of the evaporation source at the shielding position.

[0005] This disclosure provides a vacuum evaporation coating system, including: an evaporation chamber; and a vacuum evaporation source system according to any embodiment of this disclosure, wherein the evaporation source chamber of the vacuum evaporation source system is sealed to the evaporation chamber.

[0006] This disclosure provides a vacuum evaporation coating method, comprising: heating an evaporation material to form an evaporation beam; and driving a shielding assembly to a shielding position to shield the evaporation beam. Attached Figure Description

[0007] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0008] Figure 1 This diagram shows a side view of a vacuum shielding device according to some embodiments of the present disclosure; Figure 2 An exploded view of the structure of a vacuum shielding device according to some embodiments of the present disclosure is shown; Figure 3An exploded side view of the structure of a vacuum shielding device according to some embodiments of the present disclosure is shown; Figure 4 A schematic cross-sectional view of a shielding member located at a shielding position according to some embodiments of the present disclosure is shown; Figure 5 A schematic diagram of the structure of a vacuum evaporation source system according to some embodiments of the present disclosure is shown; and Figure 6 A schematic diagram of a vacuum evaporation coating system according to some embodiments of the present disclosure is shown; and Figure 7 A flowchart illustrating a vacuum evaporation coating method according to some embodiments of the present disclosure is shown.

[0009] In the above figures, the reference numerals represent: 1 Vacuum Evaporation Coating System 101 Evaporation Chamber 1000 Vacuum Evaporation Source System 100 Vacuum shielding device 10 Sealed Cavities 11 Seals 20 shading components 21 shielding parts 22 connecting rods 23 Connectors 30 drive unit 31 Drive Magnetic Assembly 311 core rod 312 transmission magnet 32 drive magnetic components 321 First Frame 322 Second Frame 323 drive magnet 33 Pneumatic Device 331 cylinder 332 stent 333 slider 334 connector 200 Evaporation Source Chamber 210 main cavity 220 auxiliary cavity 300 Evaporation Source 400 water cooling components 410 water-cooled jacket 420 water inlet pipe 430 water outlet pipe 500 Evaporation Source Cooling Components 510 Evaporation Source Inlet Pipe 520 Evaporation Source Water Outlet Pipe. Detailed Implementation

[0010] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.

[0011] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," and "bottom," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two elements. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0012] Typically, the furnace source baffle is directly installed inside the evaporation chamber, parallel to the chamber during the coating process, allowing the evaporation beam (e.g., molecular beam) to pass through for coating. When coating needs to be stopped, the furnace source baffle is rotated to block the evaporation beam. However, this method of directly installing the furnace source baffle within the evaporation chamber means the baffle is constantly exposed to the evaporation beam, leading to the deposition of a large amount of evaporation material. This significantly reduces the baffle's lifespan, shortens maintenance cycles, and increases equipment costs. Furthermore, the inconvenient location of the baffle within the evaporation chamber makes maintenance and replacement difficult, increasing the risk of experimental failures or production accidents.

[0013] In some embodiments of this disclosure, a vacuum shielding device is provided, comprising: a sealed cavity for sealing communication with a vacuum cavity; a shielding component at least partially disposed within the sealed cavity; and a driving device coupled to the shielding component for driving the shielding component to move to switch between a shielding position and a release position. In some embodiments of this disclosure, a vacuum evaporation source system and a vacuum evaporation coating system comprising the vacuum shielding device according to any one of the embodiments of this disclosure are also provided.

[0014] In some embodiments of this disclosure, a vacuum evaporation coating method is also provided, comprising: heating an evaporation material to form an evaporation beam; and driving a shielding assembly to a shielding position to shield the evaporation beam.

[0015] Some embodiments of this disclosure can prevent the evaporation material from depositing on the vacuum shielding device, extend the equipment maintenance cycle and service life, reduce equipment costs, and make the inspection and replacement steps simple and convenient, thus greatly avoiding experimental and production accidents.

[0016] Figure 1 A side view schematic diagram of the structure of a vacuum shielding device 100 according to some embodiments of the present disclosure is shown.

[0017] like Figure 1 As shown, the vacuum shielding device 100 may include a sealed cavity 10, a shielding assembly 20, and a driving device 30. The sealed cavity 10 can be used with a vacuum chamber (e.g., an evaporation source chamber 200) (as shown in the image). Figure 4 (As shown) Sealed connection. The shielding assembly 20 is at least partially disposed within the sealed cavity 10. The drive device 30 is coupled to the shielding assembly 20 and is capable of driving the shielding assembly 20 to switch between a shielded position and a released position.

[0018] In some embodiments of this disclosure, the shielding position is capable of blocking the evaporation source 300 (e.g., Figure 5 The position of the evaporation beam (as shown) Figure 4 As shown), the release position is a location that allows the evaporation beam to pass through (e.g. Figure 5 (As shown).

[0019] Those skilled in the art will understand that, although Figure 4 The shielding component 20 shown is fully inserted into the evaporation source cavity 200, but this is merely exemplary. The shielding position in the embodiments of this disclosure should be interpreted broadly. It can be a position that is completely in contact with the inner wall of the evaporation source cavity 200 (e.g., the inner wall of the main cavity 210 of the evaporation source cavity 200), or a position that does not contact the inner wall of the evaporation source cavity 200 (e.g., the inner wall of the main cavity 210 of the evaporation source cavity 200) but can block the evaporation beam. Similarly, those skilled in the art will understand that although... Figure 5 The shielding component shown is retracted outside the evaporation source cavity 200 (e.g., outside the main cavity 210 of the evaporation source cavity 200), but this is only exemplary. The release position in the embodiments of this disclosure should be interpreted broadly. It can be completely retracted outside the evaporation source cavity 200 (e.g., outside the main cavity 210 of the evaporation source cavity 200), or it can be partially retracted to allow the evaporation beam to pass through.

[0020] Figure 2 An exploded view of the structure of a vacuum shielding device 100 according to some embodiments of the present disclosure is shown. Figure 3 An exploded side view of the structure of a vacuum shielding device 100 according to some embodiments of the present disclosure is shown.

[0021] like Figure 1 , Figure 2 and Figure 3As shown, in some embodiments of this disclosure, the driving device 30 may include a transmission magnetic assembly 31 and a driving magnetic assembly 32. The transmission magnetic assembly 31 is disposed on the shielding assembly 20. The driving magnetic assembly 32 is disposed outside the sealed cavity 10 and is magnetically coupled to the transmission magnetic assembly 31, and can be used to drive the transmission magnetic reluctance element 31 to move, thereby driving the shielding assembly 20 to move.

[0022] The drive magnetic assembly 32 is sleeved outside the sealed cavity 10 and magnetically coupled to the transmission magnetic assembly 31. The drive magnetic assembly 32 may include a drive magnet 323, which is sleeved outside the sealed cavity 10 and magnetically coupled to the transmission magnetic assembly 31. The drive magnet 323 may include one or more magnets, such as multiple magnetic strips or blocks arranged in a specific pattern.

[0023] The drive magnetic assembly 32 may further include a first frame 321 and a second frame 322 disposed on the outside of the drive magnet 323. The first frame 321 and the second frame 322 can be detachably connected together by bolts to form a hollow cylinder with open ends. The inner arc surface of the cylinder can contact and connect with the drive magnet 323 to protect the drive magnet 323, drive the drive magnet 323 to move, and facilitate the installation of the drive magnet 323.

[0024] Those skilled in the art will understand that the coupling in the embodiments of this disclosure should be interpreted broadly and may include direct contact coupling, indirect contact coupling and non-contact coupling.

[0025] Those skilled in the art will understand that although the driving magnetic assembly 32 includes a first frame 321, a second frame 322, and a driving magnet 323 that are detachably connected together, the driving magnetic assembly 32 can also be integrally formed, or the first frame 321 and the second frame 322 can be omitted. Furthermore, although the first frame 321 and the second frame 322 form a cylinder, the first frame 321 and the second frame 322 can also form a square prism, a prismatic prism, or other shapes that match the outer diameter of the driving magnet 323.

[0026] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the drive device 30 may further include a pneumatic device 33. The pneumatic device 33 is connected to the drive magnetic assembly 32 and can be used to drive the drive magnetic assembly 32 to perform linear motion.

[0027] The pneumatic device 33 may include a rod-type cylinder or a rodless cylinder. In the accompanying drawings, a rodless cylinder is used as an example, but this does not constitute a limitation of the present disclosure. In some embodiments, the rodless cylinder can effectively shorten the drive stroke and save equipment space. The pneumatic device 33 can respond quickly in a short time, driving the shielding assembly 20 to the shielding position to block the evaporation beam, thereby enabling faster and more precise control of the coating effect and obtaining a better coated product.

[0028] Those skilled in the art will understand that although a particular type of rodless cylinder is used in the following description of embodiments of the present disclosure, this is merely exemplary, and the pneumatic device 33 may also include other types of cylinders, such as pen cylinders.

[0029] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the pneumatic device 33 may include a cylinder 331, a sliding magnetic assembly (not shown), and a slider 333. The sliding magnetic assembly is slidably disposed within the cylinder 331 and is capable of linear movement along the cylinder 331 under pneumatic pressure. In some embodiments, the pneumatic device 33 may further include a guide rod disposed within the cylinder 331, and the sliding magnetic assembly may be sleeved on the guide rod to move linearly under the guidance of the guide rod. Those skilled in the art will understand that in some embodiments, the guide rod may be omitted. The sliding magnetic assembly may include a magnet, such as a disk, magnetic ring, or magnetic block.

[0030] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the slider 333 may be disposed outside the cylinder 331 and slidably connected to the cylinder 331. The slider 333 may include a slider magnetic assembly (not shown in the figure), which is magnetically coupled to the sliding magnetic assembly disposed inside the cylinder 331 and connected to the drive magnetic assembly 32 (e.g., connected to the second frame 322 via a connector 334), and can be used to drive the drive magnetic assembly 32 to move linearly under the drive of the slider magnetic assembly.

[0031] The cylinder 331 has vents at both ends. When gas enters through the vent at one end (e.g., the left end), it pushes the sliding magnetic assembly to move to the other end (e.g., the right end), causing the slider 333 to move to the other end. This causes the slider 333 to drive the drive magnetic assembly 32 to move to the right, which in turn drives the transmission magnetic assembly 31 located in the sealed cavity 10 to move to the right, thereby switching the blocking assembly 20 (e.g., the blocking member 21) from the blocking position to the releasing position. Similarly, when gas enters through the vent at the right end, it pushes the sliding magnetic assembly to move to the left, causing the slider 333 to move to the left. This causes the slider 333 to drive the drive magnetic assembly 32 to move to the left, which in turn drives the transmission magnetic assembly 31 located in the sealed cavity 10 to move to the left, thereby switching the blocking assembly 20 (e.g., the blocking member 21) from the releasing position to the blocking position.

[0032] Those skilled in the art will understand that the drive device 30 can also employ other driving methods. For example, in some embodiments, the drive device 30 may include a rod-type pneumatic device. The rod-type pneumatic device may include a cylinder, an inner rod, and a slider. The inner rod may be disposed within the cylinder and move linearly along the cylinder under the drive of air pressure. The slider may be connected to the inner rod (e.g., the end of the inner rod located outside the cylinder) and connected to the drive magnetic assembly. The slider may be used to drive the drive magnetic assembly 32 to move linearly under the drive of the inner rod. Thus, the drive magnetic assembly 32 may drive the transmission magnetic assembly 31 disposed within the sealed cavity 10 to move, thereby switching the blocking assembly 20 (e.g., the blocking member 21) between a released position and a blocked position.

[0033] In some embodiments, the drive device 30 may include an electric actuator. The electric actuator may be connected to the drive magnetic assembly 32 to drive the drive magnetic assembly 32 to perform linear motion. The electric actuator may include various suitable implementations. For example, the electric actuator may include a motor, a slide bar, and a slider. The slide bar may be connected to the output end of the motor and rotate under the drive of the electrodes. The slider may be slidably connected to the slide bar and connected to the drive magnetic assembly 32 to drive the drive magnetic assembly 32 to perform linear motion under the drive of the slide bar. For example, the slide bar may include threads, and the slider may also include internal threads and be sleeved on the slide bar, threadedly connected to the slide bar. The slide bar may be driven to rotate by the electrodes, causing the slider to slide along the slide bar via the threads, thereby driving the drive magnetic assembly 32 to perform linear motion. In this way, the drive magnetic assembly 32 can drive the transmission magnetic assembly 31 disposed within the sealed cavity 10 to move, thereby switching the blocking assembly 20 (e.g., blocking member 21) between a released position and a blocked position.

[0034] In some embodiments, the vacuum shielding device 100 may further include a support 332 for supporting the drive device 30. For example, as Figure 1 , Figure 2 and Figure 3As shown, the drive device 30 can be fixedly mounted on the bracket 332, which can be connected to the seal 11 to mount the drive device 30 onto the vacuum chamber (e.g., the evaporation source chamber 200) via the seal 11.

[0035] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the shielding assembly 20 may include a shielding member 21 and a connecting rod 22. The shielding member 21 may be disposed inside or outside the sealing cavity 10. The connecting rod 22 may be disposed at least partially inside the sealing cavity 10, with one end connected to the shielding member 21 and the other end connected to the transmission magnetic assembly 31.

[0036] The shielding member 21 can be a plate-like structure with downward-extending arc surfaces on both sides. The shape of the shielding member 21 matches the cross-section of the evaporation source cavity 200, effectively shielding the evaporation beam. The shielding member 21 is detachably connected to the connecting rod 22 via the connecting member 23. Both the connecting rod 22 and the connecting member 23 are provided with screw holes. The connecting rod 22 and the connecting member 23 can be installed by fitting different screw holes, thereby adjusting the distance between the shielding member 21 and the sealing cavity 10 to adapt to different vacuum cavities.

[0037] Figure 4 A cross-sectional view of the shielding member 21 in the shielding position according to some embodiments of the present disclosure is shown.

[0038] like Figures 1-4 As shown, in some embodiments of this disclosure, the transmission magnetic assembly 31 may include a core rod 311 and one or more transmission magnets 312. The core rod 311 is connected to the other end of the connecting rod 22 (e.g., Figure 1-4 (As shown on the right end). One or more drive magnets 312 can be disposed on the outer peripheral surface of the core rod 311 and magnetically coupled with the drive magnet 323 sleeved outside the sealed cavity 10. The drive magnets 312 can be configured to cooperate with the drive magnets 323 to form good magnetic coupling. The drive magnets 312 may include multiple magnetic strips, magnetic blocks, etc. arranged or distributed.

[0039] The core rod 311 and the transmission magnet 312 are disposed within the sealed cavity 10 and can slide within the sealed cavity 10. The transmission magnet 312 is magnetically coupled to the drive magnet 323 and can move linearly under the drive of the drive magnet 323, thereby driving the core rod 311, the connecting rod 22, and the blocking member 21 at the end of the connecting rod 22 to the blocking position or back to the release position.

[0040] like Figures 1-4 As shown, in some embodiments of this disclosure, the sealed cavity 10 may include a sealing element 11 for a sealed connection with the vacuum cavity. The drive device 30 may be fixedly connected to the sealing element 11 via a bracket 332.

[0041] The seal 11 can be a sealing flange, which is sealed to the window of the vacuum chamber, maintaining a vacuum environment even when the sealed chamber 10 is in communication with the vacuum chamber. The drive unit 30 is fixedly mounted on the seal 11, making the overall equipment installation more compact and saving space.

[0042] Figure 5 A schematic diagram of the structure of a vacuum evaporation source system 1000 according to some embodiments of the present disclosure is shown.

[0043] like Figure 4 and Figure 5 As shown, the vacuum evaporation source system 1000 may include an evaporation source chamber 200 and a vacuum shielding device 100. The vacuum shielding device 100 is sealed to the evaporation source chamber 200, and the shielding assembly 20 shields the evaporation of the evaporation source 300 at the shielding position. The evaporation source 300 may include an evaporation material and a crucible for holding the evaporation material.

[0044] like Figure 5 As shown, in some embodiments of this disclosure, the vacuum evaporation source system 1000 may further include a water-cooling assembly 400. The water-cooling assembly 400 may include a water-cooling sleeve 410, a water inlet pipe 420, and a water outlet pipe 430. The water-cooling sleeve 410 may be fitted over the evaporation source cavity 200, forming a circulating chamber for containing cooling water, used to cool the evaporation source cavity 200. The water inlet pipe 420 is connected to the water-cooling sleeve 410 and is used to supply cooling water into the water-cooling sleeve 410. The water outlet pipe 430 is connected to the water-cooling sleeve 410 and is used to discharge the cooling water from the water-cooling sleeve 410.

[0045] like Figure 5 As shown, in some embodiments of this disclosure, the vacuum evaporation source system 1000 further includes an evaporation source cooling assembly 500. The evaporation source cooling assembly 500 may include a circulation chamber (not shown), an evaporation source water inlet pipe 510, and an evaporation source water outlet pipe 520. The circulation chamber may be disposed on the evaporation source 300 (e.g., outside the crucible) and is capable of cooling the evaporation source 300. The evaporation source water inlet pipe 510 may communicate with the circulation chamber and is capable of supplying cooling water into the circulation chamber, while the evaporation source water outlet pipe 520 may communicate with the circulation chamber and is capable of discharging the cooling water from the circulation chamber.

[0046] In some embodiments, in the vacuum evaporation source system 1000, the shielding assembly 20, in the release position, is located outside the evaporation stream of the evaporation source 300. For example, as... Figure 5 As shown, the shielding member 21 of the shielding assembly 20 is in the release position, outside the evaporation stream of the evaporation source 300. In some embodiments, such as Figure 4 and Figure 5As shown, the evaporation source chamber 200 may include a main chamber 210 and an auxiliary chamber 220 communicating with the main chamber. For example, the longitudinal axis of the auxiliary chamber 220 may be perpendicular to the longitudinal axis of the main chamber 210, forming a structure similar to a tee. The sealing chamber 10 of the vacuum shielding device 100 is sealed to the auxiliary chamber 210, for example, by means of a sealing member 11. The shielding assembly 20 (e.g., shielding member 21) is at least partially located in the main chamber 210 at the shielding position, such as... Figure 4 As shown, in the release position, it exits the main cavity 210 and is at least partially located in the auxiliary cavity 220, as... Figure 5 As shown.

[0047] Figure 6 A schematic diagram of the structure of a vacuum evaporation coating system 1 according to some embodiments of the present disclosure is shown.

[0048] like Figure 6 As shown, in some embodiments of this disclosure, the vacuum evaporation coating system 1 may include an evaporation chamber 101 and a vacuum evaporation source system 1000, with the evaporation source chamber 200 sealed to the evaporation chamber 101. The vacuum evaporation source system 1000 may be any of the vacuum evaporation source systems 1000 according to any of the embodiments of this disclosure, and may include a vacuum shielding device 100 according to any of the embodiments of this disclosure.

[0049] Figure 7 A flowchart of a vacuum evaporation coating method 700 according to some embodiments of the present disclosure is shown. Those skilled in the art will understand that the vacuum evaporation coating method 700 can be performed by a vacuum processing system (e.g., vacuum evaporation source system 1000) or a vacuum evaporation coating system according to any of the embodiments of the present disclosure.

[0050] In step 702, the vacuum evaporation coating method 700 may include heating the evaporation material to form an evaporation stream. For example, the evaporation material within the evaporation source 300 may be heated to form an evaporation stream.

[0051] In step 704, the vacuum evaporation coating method 700 may include driving a shielding assembly to a shielding position to shield the evaporation beam. For example, the shielding assembly 20 (e.g., shielding member 21) is driven to the shielding position (e.g., as shown by the driving device 30) via the driving device 30. Figure 4 (As shown), to block the evaporation beam.

[0052] In some embodiments of this disclosure, the vacuum evaporation deposition method 700 may optionally include step 706. In step 706, the shielding assembly is driven from a shielding position to a release position. For example, the shielding assembly 20 (e.g., shielding member 21) is driven from the shielding position (e.g., as shown in the image) by the driving device 30. Figure 4 (as shown) Reaching the release position (e.g., as shown) Figure 5 (As shown).

[0053] In some embodiments of this disclosure, the vacuum evaporation deposition method 700 may optionally include cooling the evaporation source chamber. For example, as Figure 5 As shown, cooling water is sent into the water-cooled jacket 410 through the inlet pipe 420 to cool the evaporation source chamber 200, and then the cooled water is discharged through the outlet pipe 430.

[0054] Those skilled in the art will understand that the steps or parts thereof in the vacuum evaporation coating method 700 can be performed cyclically to allow for multiple coating operations. Furthermore, the above description of the steps in the vacuum evaporation coating method 700 does not necessarily represent the order of execution. For example, step 706 may be performed before step 702 to allow the evaporation beam to pass smoothly, thereby enabling coating.

[0055] The vacuum shielding device according to some embodiments of this disclosure can bring beneficial technical effects. For example, the vacuum shielding device according to some embodiments of this disclosure can solve the problems in conventional technology such as the deposition of evaporation materials on the furnace source baffle, which seriously reduces the service life of the furnace source baffle, shortens the maintenance cycle, and increases equipment costs. It can achieve the technical effects of avoiding the deposition of evaporation materials on the vacuum shielding device, extending the equipment maintenance cycle and service life, and reducing equipment costs.

[0056] The vacuum evaporation source system, vacuum evaporation coating system, and method according to some embodiments of this disclosure can bring beneficial technical effects. For example, the vacuum evaporation source system, vacuum evaporation coating system, and method according to some embodiments of this disclosure can solve the problems of low service life, short maintenance cycle, high equipment cost, inconvenient inspection and replacement, and easy to cause experimental failure or production accidents in conventional technology. It can extend the overall equipment maintenance cycle and service life, reduce equipment use costs, and the inspection and replacement steps are simple and convenient, which greatly avoids experimental and production accidents.

[0057] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A vacuum evaporation coating system, characterized in that, include: Evaporation chamber; The vacuum evaporation source system includes: The evaporation source chamber includes a main chamber and an auxiliary chamber communicating with the main chamber, wherein the main chamber is sealed to the evaporation chamber; Vacuum shielding device, including: A sealing cavity, used for sealing communication with the auxiliary cavity; A shielding assembly is at least partially disposed within the sealed cavity. The shielding assembly is at least partially located in the main cavity at the shielding position to shield the evaporation stream of the evaporation source. The shielding assembly is at least partially located in the auxiliary cavity at the release position to be located outside the evaporation stream of the evaporation source. A driving device, coupled to the blocking assembly, is used to drive the blocking assembly to move and switch between a blocking position and a released position, the driving device comprising: A transmission magnetic assembly is disposed on the shielding assembly; and A drive magnetic component is disposed outside the sealed cavity and magnetically coupled to the transmission magnetic component, used to drive the transmission magnetic component to move, thereby driving the shielding component to move.

2. The vacuum evaporation coating system according to claim 1, characterized in that, The drive device further includes: A pneumatic device, connected to the drive magnetic assembly, is used to drive the drive magnetic assembly to perform linear motion; or An electric device, connected to the drive magnetic assembly, is used to drive the drive magnetic assembly to perform linear motion.

3. The vacuum evaporation coating system according to claim 2, characterized in that, The pneumatic device includes: cylinder; An inner rod is disposed within the cylinder; and The slider, connected to the inner rod and the driving magnetic assembly, is used to drive the driving magnetic assembly to perform linear motion under the drive of the inner rod.

4. The vacuum evaporation coating system according to claim 2, characterized in that, The pneumatic device includes: cylinder; A sliding magnetic assembly is slidably disposed within the cylinder; and A slider is disposed outside the cylinder and slidably connected to the cylinder. The slider includes a slider magnetic assembly, which is magnetically coupled to the slider magnetic assembly and connected to the drive magnetic assembly, and is used to drive the drive magnetic assembly to move linearly under the drive of the slider magnetic assembly.

5. The vacuum evaporation coating system according to claim 2, characterized in that, The electric device includes: Electric motor; The slide bar is connected to the output end of the motor; and The slider is slidably connected to the slide rod and connected to the drive magnetic assembly, and is used to drive the drive magnetic assembly to make linear motion under the drive of the slide rod.

6. The vacuum evaporation coating system according to claim 1, characterized in that, The occlusion component includes: shielding components; A connecting rod is at least partially disposed within the sealed cavity, with one end connected to the shielding member and the other end connected to the transmission magnetic assembly.

7. The vacuum evaporation coating system according to claim 6, characterized in that, The transmission magnetic assembly includes: Core rod, the core rod being connected to the other end of the connecting rod; and One or more transmission magnets are disposed on the outer peripheral surface of the core rod.

8. The vacuum evaporation coating system according to claim 1, characterized in that, The sealing cavity includes a sealing element for sealing connection with the auxiliary cavity, and the driving device is fixedly connected to the sealing element.

9. The vacuum evaporation coating system according to claim 1, characterized in that, The vacuum evaporation source system also includes: Water-cooling components, including: A water-cooled jacket is fitted over the outside of the evaporation source cavity; An inlet pipe, connected to the water-cooled jacket, is used to supply cooling water into the water-cooled jacket; and The outlet pipe is connected to the water-cooled jacket and is used to discharge the cooling water inside the water-cooled jacket.

10. The vacuum evaporation coating system according to claim 1, characterized in that, The vacuum evaporation source system also includes: Evaporation source cooling assembly, including: The circulation chamber is located on the evaporation source; An evaporator inlet pipe, connected to the circulation chamber, is used to supply cooling water into the circulation chamber; and An evaporator outlet pipe is connected to the circulation chamber and is used to discharge the cooling water in the circulation chamber.

11. A vacuum evaporation coating method, characterized in that, include: The evaporation material is heated to form an evaporation stream; Drive the shielding component of the vacuum shielding device of the vacuum evaporation coating system according to any one of claims 1-10 to the shielding position to shield the evaporation beam.

12. The vacuum evaporation coating method according to claim 11, characterized in that, Also includes: The drive occlusion component moves from the occlusion position to the release position.

13. The vacuum evaporation coating method according to claim 12, characterized in that, Also includes: Cool the evaporation source chamber.

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