Double gate valve

Abstract

The present invention provides a gate valve that opens and closes two openings of a valve housing with two valve plates. The gate valve has two valve plates (4, 4) that open and close two openings (3, 3) of a valve housing (2), a support rod (5) that supports the two valve plates (4, 4), a valve stem (6) that is connected to the support rod (5), and an operation unit (7) that operates the two valve plates (4, 4) via the valve stem (6). The support rod (5) and the valve plate (4) extend straight and slender in a lateral direction orthogonal to a central axis (L) of the valve stem (6). The valve stem (6) is connected to a central portion of the support rod (5) in a longitudinal direction. One of the two valve plates (4, 4) is installed at one end of the support rod (5) in the longitudinal direction via an elastic member (12) so as to be able to tilt freely. The other of the two valve plates (4, 4) is installed at the other end of the support rod (5) in the longitudinal direction via an elastic member (12) to be able to tilt freely.

Description

Technical Field

[0001] This invention relates to a double gate valve that uses two valve plates to open and close two openings of a valve box. Background Technology

[0002] In a semiconductor processing device, a gate valve is used to open and close a gate formed in a vacuum chamber. This gate valve, for example, as disclosed in Patent Document 1, has a valve plate mounted at the end of a valve stem operated by an operating unit, the valve plate housed within a valve housing, and the valve housing installed in the vacuum chamber. The valve plate is used to open and close an opening formed in the side wall of the valve housing that communicates with the gate.

[0003] Furthermore, in the aforementioned semiconductor processing apparatus, there are also cases where the vacuum chamber has two gates. In such cases, two gate valves are typically used. However, using two gate valves not only incurs costs, but also, depending on the distance between the two gates, it is sometimes difficult to install two gate valves side by side.

[0004] Therefore, it is considered to configure a valve with two valve plates installed on the valve stem of a gate valve, and to use these two valve plates to simultaneously open and close the two gates of the vacuum chamber, which are the two openings formed in the valve box.

[0005] However, in this configuration, if the distance between the two gates is large, the distance between the two openings in the valve box will also increase. Therefore, it is difficult to open and close the two openings equally using the two valve plates.

[0006] Prior art literature

[0007] Patent documents

[0008] Patent Document 1: Japanese Patent Application Publication No. 2010-121682 Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] The technical challenge of this invention is to provide a gate valve that can simultaneously and equally open and close two openings of a valve box using two valve plates.

[0011] Solution for solving the problem

[0012] To address the aforementioned issues, the present invention provides a double gate valve, characterized in that the double gate valve comprises: two valve plates for opening and closing two openings of a valve box; a support rod for supporting the two valve plates; a valve stem connected to the support rod; and an operating part for opening and closing the two valve plates via the valve stem. The support rod and valve plates extend straight and elongated in a transverse direction orthogonal to the central axis of the valve stem. The valve stem is connected to the central portion of the support rod along its long side. One of the two valve plates is mounted at one end and the other end of the support rod along its long side via elastic members, allowing it to tilt freely.

[0013] In this invention, the elastic member may also have a first sidewall and a second sidewall that are parallel to each other, and a bent portion that connects one end of the first sidewall and the second sidewall in the lateral width direction to each other, such that the convex surface of the bent portion is arranged in a posture facing outward in the long side direction of the support rod, the first sidewall is connected to the central part of the back of the valve plate, and the second sidewall is connected to the front end of the support rod.

[0014] In this case, preferably, the first sidewall of the elastic member is connected to the back of the valve plate by a plurality of first external threaded parts that pass through the external threaded insertion hole of the first sidewall from the second sidewall and are threaded to the first threaded hole of the valve plate. On the second sidewall, at a position opposite to the first external threaded parts, a plurality of second cuts are formed for the tool to engage when the tool is screwed into the first external threaded parts.

[0015] Furthermore, preferably, the second sidewall of the elastic member is connected to the front of the support rod by a plurality of second external threaded parts that pass through the external threaded insertion hole of the second sidewall from the first sidewall and are threaded to the second threaded hole of the support rod. On the first sidewall, at a position opposite to the second external threaded parts, a plurality of first cuts are formed for the tool to engage when the tool is screwed into the second external threaded parts.

[0016] Alternatively, the second sidewall of the elastic member may be connected to the front of the support rod via a plurality of second externally threaded parts that pass through the externally threaded insertion hole of the support rod from the back side and are threaded to the second threaded hole of the second sidewall.

[0017] Furthermore, in this invention, preferably, at least one first positioning pin is provided on either the first sidewall of the elastic member or the valve plate, and at least one first positioning groove is provided on the other side. The elastic member and the valve plate are positioned relative to each other by the first positioning pin engaging with the first positioning groove. At least one second positioning pin is provided on either the second sidewall of the elastic member or the support rod, and at least one second positioning groove is provided on the other side. The elastic member and the support rod are positioned relative to each other by the second positioning pin engaging with the second positioning groove.

[0018] In this case, the first positioning pin may be located on the back of the valve plate near the upper end, and the first positioning groove may be formed by a longitudinal groove cut into the lower part of the first side wall to a certain depth. Alternatively, the first positioning pin may be located on the lower part of the first side wall, and the first positioning groove may be formed by a longitudinal groove cut into the upper part of the valve plate to a certain depth.

[0019] Alternatively, the second positioning pin may be located at the midpoint of the height direction of the second sidewall or at the midpoint of the vertical direction in front of the support rod, and the second positioning groove may be formed by a transverse groove that cuts into the side end of the support rod or the side end of the second sidewall to a certain depth at the midpoint of the vertical direction in front of the support rod or at the midpoint of the height direction of the second sidewall.

[0020] Furthermore, in this invention, it is preferred that the valve stem is connected to the front of the support rod.

[0021] Furthermore, preferably, the height of the elastic member is less than or equal to the vertical width of the valve plate, and the vertical width of the support rod is less than or equal to the vertical width of the valve plate.

[0022] The effects of the invention

[0023] According to the present invention, a support rod is installed at the end of the valve stem, and one of the two valve plates is mounted on one end and the other end of the support rod via an elastic member. Therefore, even if the support rod is slightly bent due to the operating force generated by the valve stem, and the pressing force generated by the support rod acts obliquely on the elastic member, it is possible to prevent the pressing force from acting obliquely on the valve plate due to elastic deformation of the elastic member, so that the valve plate is pressed evenly on the valve seat. Attached Figure Description

[0024] Figure 1 This is a perspective view of the gate valve of the first embodiment, viewed from a slightly upward and sideways angle.

[0025] Figure 2Viewed from the rear side and above. Figure 1 A 3D view of a gate valve.

[0026] Figure 3 It is cut at the position of a valve plate. Figure 1 The main part of the gate valve is shown in a longitudinal sectional view.

[0027] Figure 4 It was omitted. Figure 1 A three-dimensional view of the valve box and operating section of the gate valve.

[0028] Figure 5 Viewed from the back side Figure 4 A 3D view of a gate valve.

[0029] Figure 6 yes Figure 4 A top view of a gate valve.

[0030] Figure 7 Cut by line VII-VII Figure 6 The resulting enlarged end face view.

[0031] Figure 8 It is a three-dimensional diagram showing the connection between the valve stem and the support rod, broken down into its components.

[0032] Figure 9 Viewed from the back side Figure 8 A three-dimensional image.

[0033] Figure 10 It is a three-dimensional diagram showing the connection between the valve plate and the support rod.

[0034] Figure 11 Viewed from the back side Figure 10 A three-dimensional image.

[0035] Figure 12 This is a perspective view of the valve box and operating part of the gate valve in the second embodiment, omitting the latter.

[0036] Figure 13 It is Figure 12 A magnified 3D view of the main part of a disassembled gate valve.

[0037] Figure 14 Viewed from the back side Figure 13 A three-dimensional image.

[0038] Explanation of reference numerals in the attached figures

[0039] 1. Gate valve (101); 2. Valve box; 3. Opening; 4. Valve plate; 4b. Back side; 5. Support rod; 5a. Front side; 5b. Back side; 6. Valve stem; 7. Operating part; 12. Elastic member (112); 12a. First sidewall (12a, 112a); 12b. Second sidewall (112b); 12c. Bending part (112c); 12d. Convex surface (112d); 21. First external threaded part (121); 22. Second external threaded part (122); 23a. Through hole of external threaded part (23a, 123a); 23b. Through hole of external threaded part (23b, 123b); 24. First notch; 25. Second notch; 26. First locating pin (126); 27. First locating groove (127); 28. Second locating pin (128); 29. ​​Second locating groove (129); 34. First threaded hole (134); 38. Second threaded hole (138); L. Central shaft; H1. Height; H2. Upper and lower widths (H2, H3). Detailed Implementation

[0040] exist Figures 1-11 The diagram shows a gate valve 1 according to a first embodiment. This gate valve 1 is used by being installed in a vacuum chamber (not shown) having two gate openings, as shown... Figures 1-3 As shown, the device includes: a valve housing 2 with two openings 3, 3 that are individually connected to the two gates of the aforementioned vacuum chamber; two valve plates 4, 4 housed inside the valve housing 2, which can individually open and close the two openings 3, 3; a support rod 5 supporting the two valve plates 4, 4; a valve stem 6 connected to the support rod 5; and an operating unit 7 for opening and closing the two valve plates 4, 4 via the valve stem 6. Furthermore, by operating the valve stem 6 using the operating unit 7, as... Figure 3 As shown, the valve plate 4 is raised and lowered between the closed position of the solid line that closes the opening 3 and the avoidance position of the dotted line that opens the opening 3.

[0041] In addition, the aforementioned operating section 7 is equipped with a drive mechanism such as a cylinder, but the structure and function of the operating section 7 are well known, so the description is omitted here.

[0042] The valve box 2 is a horizontally elongated rectangular box. The front wall 2a of the valve box 2 has two horizontally elongated rectangular openings 3, 3 and a planar valve seat 8 around each opening 3. In the closed position of the valve plate 4, the valve seal 9 installed on each valve plate 4 is pressed against the valve seat 8, thereby the two openings 3, 3 are simultaneously closed by the two valve plates 4, 4.

[0043] The two openings 3, 3 are arranged side by side with a gap in the long side direction (lateral direction) of the opening 3, 3, and the two valve seats 8, 8 around the two openings 3, 3 are located on the same plane.

[0044] A window 10 with the same size as the two openings 3, 3 is formed on the rear wall 2b of the valve box 2. Semiconductor wafers are moved into or out of the vacuum chamber through the window 10 and through the openings 3.

[0045] As from Figures 4-6 It is known that the valve plate 4 is a horizontally elongated rectangular plate with a front side 4a facing the opening 3 and a back side 4b opposite to the front side 4a. The valve seal 9 is installed on the front side 4a, and a plurality of recesses 11 for weight reduction are provided on the back side 4b.

[0046] Furthermore, the aforementioned support rod 5 is also composed of a horizontally elongated rectangular plate-shaped component, having a front side 5a on which the valve plate 4 is mounted and a back side 5b on the opposite side. The upper end of the valve rod 6 is connected to the center of the support rod 5 along its long side. One and the other of the two valve plates 4 are respectively mounted on one end and the other end of the support rod 5 along its long side via elastic members 12, allowing them to tilt freely along the long side of the valve plate 4.

[0047] To connect the valve stem 6 to the support rod 5, as described above... Figures 7-9 It can be seen that at the center of the front 5a of the support rod 5, a rectangular frame plate 15 with a groove 16 is fixed by a plurality of (eight in the figure) frame plate fixing external threaded parts 17. Between the groove 16 of the frame plate 15 and the front 5a of the support rod 5, a connecting hole 18 with a rectangular cross section extending along the short side direction (longitudinal direction) of the support rod 5 is formed.

[0048] In addition, in this invention, the external threaded parts used for the connection between the support rod 5 and the valve rod 6, and the connection between the support rod 5 and the valve plate 4, are all bolts with hexagonal holes, and the tool used for screwing them in is a hexagonal wrench.

[0049] On the other hand, at the end (upper end) of the valve stem 6, a prism-shaped connecting portion 6a with a generally rectangular cross-sectional shape is formed by cutting off a portion of the front and back sides of the cylindrical valve stem 6 in a planar shape. This connecting portion 6a is inserted into the connecting hole 18 from the lower side of the support rod 5. Moreover, by passing through a plurality of (two shown in the figure) rod connecting external threaded parts 19 from the back side 5b of the support rod 5 through a plurality of operating holes 5c formed in the support rod 5 and a plurality of external threaded part insertion holes 6b formed in the connecting portion 6a, the support rod 5 is threadedly connected to a plurality of threaded holes 15a formed in the frame plate 15, thereby the support rod 5 is aligned with the central axis L of the valve stem 6 (refer to...). Figure 5The valve stem 6 is connected to the end of the valve stem 6 in a straight, orthogonal transverse direction. At this time, the head 19a of the external threaded part 19 of the valve stem 6 is engaged with the valve stem 6 in the countersunk portion 6c formed in the connecting portion 6a.

[0050] In this way, by connecting the valve stem 6 to the front 5a side of the support rod 5 that is connected to the valve plate 4, it is possible to prevent the frame plate 15, the connecting part 6a of the valve stem 6, etc. from protruding to the back 5b side of the support rod 5. As a result, the front and rear width of the gate valve 1, including the valve box 2, can be reduced to achieve miniaturization.

[0051] Next, the connection between the support rod 5 and each valve plate 4 will be explained.

[0052] like Figure 10 as well as Figure 11 As shown, regarding the connection between the valve plate 4 and the support rod 5 on one side, the elastic member 12 is composed of a leaf spring formed by bending a metal plate of uniform thickness into a U-shape, and has a first sidewall 12a and a second sidewall 12b that are parallel to each other, and a lateral width W1 of the first sidewall 12a and the second sidewall 12b (refer to...) Figure 6 The elastic member 12 has an arc-shaped bend 12c that is connected to each other at one end in the direction of the support rod 5. Furthermore, the convex surface 12d of the bend 12c is positioned with the long side outward (away from the valve stem 6) of the support rod 5. The first sidewall 12a is connected to the center of the back surface 4b of the valve plate 4 by two first external threaded members 21, 21, and the second sidewall 12b is connected to the end of the front surface 5a of the support rod 5 by two second external threaded members 22, 22.

[0053] To explain in more detail, on the first sidewall 12a of the elastic member 12, near the center of the first sidewall 12a in the lateral width W1 direction, close to the bent portion 12c, two external threaded insertion holes 23a are formed vertically for the insertion of the first external threaded member 21. Furthermore, near the free end of the first sidewall 12a, near the center, two first cut portions 24 are formed in opposite vertical positions. The external threaded insertion holes 23a are circular holes, and the first cut portions 24 are longitudinal grooves cut into the first sidewall 12a from the upper or lower end to a certain depth, respectively.

[0054] When the second sidewall 12b is connected to the support rod 5 using the second external threaded part 22, the first cut-out portion 24 is used to insert the second external threaded part 22 into the external threaded part insertion hole 23b of the second sidewall 12b, and at the same time, it is used to allow the hexagonal wrench used to screw in the inserted second external threaded part 22 to pass through.

[0055] On the other hand, on the second sidewall 12b of the elastic member 12, two external threaded insertion holes 23b are formed vertically, facing the two first cutouts 24, 24 of the first sidewall 12a, for the insertion of the second external threaded member 22. Furthermore, two second cutouts 25, 25 are formed facing the two external threaded insertion holes 23a, 23a of the first sidewall 12a. The external threaded insertion holes 23b are circular holes, and the second cutouts 25 are longitudinal grooves cut into the second sidewall 12b from its upper or lower end to a certain depth, respectively.

[0056] When the first sidewall 12a is connected to the valve plate 4 using the first external threaded part 21, the second cutout 25 is used to insert the first external threaded part 21 into the external threaded part insertion hole 23a of the first sidewall 12a, and at the same time, it is used for the hexagonal wrench used to screw in the inserted first external threaded part 21 to pass through.

[0057] In addition, at the middle position of the two external threaded insertion holes 23b, 23b of the second sidewall 12b, a second positioning groove 29 is formed in such a way that it extends laterally from the side end of the second sidewall 12b for engaging with the second positioning pin 28 of the support rod 5.

[0058] In contrast, on the back surface 4b of the valve plate 4, a recessed step portion 33 is formed on the outer half of the long side of the back surface 4b. Near the inner end of the recessed step portion 33, two first threaded holes 34 and 34 are formed, corresponding to the two external threaded insertion holes 23a and 23a of the first sidewall 12a. A cylindrical first positioning pin 26 is installed at the position corresponding to the upper first cut portion 24 of the two first cut portions 24 and 24 of the first sidewall 12a.

[0059] Furthermore, a recessed step portion 37 is formed at the end of the front 5a of the support rod 5 for the second sidewall 12b of the elastic member 12 to abut against. Two second threaded holes 38 and 38 for threaded connection of the two second external threaded members 22 and 22 are formed on the recessed step portion 37. A second positioning pin 28 is installed at the middle position of the two second threaded holes 38 and 38. Moreover, at one end (upper end) and the other end (lower end) of the support rod 5 in the short side direction, two third cut portions 39 and 39 are formed in a manner corresponding to the two second cut portions 25 and 25 formed on the second sidewall 12b, respectively. These cut portions are formed by grooves with arc-shaped cross sections.

[0060] Then, firstly, with the second sidewall 12b of the elastic member 12 abutting against the front 5a of the support rod 5, a hexagonal wrench is used to thread the second external thread 22, which is inserted through the external thread through hole 23b of the second sidewall 12, into the second thread hole 38 of the support rod 5, thereby connecting the elastic member 12 to the support rod 5. At this time, the screwing operation of the second external thread 22 using the hexagonal wrench passes through the first cutout 24 formed in the first sidewall 12a. Furthermore, while the second positioning pin 28 installed on the support rod 5 engages with the second positioning groove 29 of the second sidewall 12b, the side end of the second sidewall 12b abuts against the stepped wall 37a of the recessed stepped portion 37, thereby positioning the elastic member 12 and the support rod 5.

[0061] Next, the valve plate 4 is connected to the elastic member 12 by abutting the first sidewall 12a of the elastic member 12 against the back surface 4b of the valve plate 4, and by using a hexagonal wrench, the first external thread 21, which is pre-inserted into the external thread through hole 23a of the first sidewall 12, is threaded into the first thread hole 34 of the valve plate 4. At this time, the screwing operation of the first external thread 21, performed by the hexagonal wrench, passes through the third cut 39 formed in the support rod 5 and the second cut 25 formed in the second sidewall 12b. In addition, while the first positioning pin 26 installed on the valve plate 4 is engaged with the first cut 24 at the upper end of the first sidewall 12a, the side end of the first sidewall 12a abuts against the stepped wall 33a of the recessed stepped portion 33, thereby positioning the elastic member 12 and the valve plate 4. Therefore, the first cutout 24 also serves as the first positioning groove 27 for the first positioning pin 26 to be fitted.

[0062] As described above, valve plates 4 are installed at both ends of the support rod 5. At this time, the convex surfaces 12d of the bent portions 12c of the two elastic members 12, 12 face opposite directions.

[0063] Furthermore, the two elastic members 12, 12 are formed in a shape that is symmetrical with respect to the plane including the central axis L, and in the example shown in the figure, they are identical in shape.

[0064] In addition, the lateral width W1 of the first sidewall 12a and the second sidewall 12b is the same diameter, but the lateral width of the first sidewall 12a can be greater than the lateral width of the second sidewall 12b, or vice versa.

[0065] In addition, such as Figure 3As shown, preferably, the height H1 of the elastic member 12 is equal to or slightly smaller than the vertical width H2 of the valve plate 4, and the vertical width H3 of the support rod 5 is equal to or slightly smaller than the vertical width H2 of the valve plate 4.

[0066] The gate valve 1 with the above structure opens and closes the two openings 3 and 3 of the vacuum chamber by installing the valve box 2 in the vacuum chamber and using the two valve plates 4 and 4 to open and close the two openings 3 and 3 of the valve box 2. Furthermore, when the valve plates 4 and 4 close the openings 3 and 3 of the valve box 2, as... Figure 3 As shown, via the above-mentioned operating unit 7 (refer to...) Figure 1 and Figure 2 The valve stem 6 and valve plates 4 and 4 are raised from the dotted line position to the solid line position, and the valve seals 9 and 9 of the two valve plates 4 and 4 are pressed simultaneously onto the valve seats 8 and 8 of the two openings 3 and 3 via the support rod 5.

[0067] At this time, the operating force of the valve stem 6 acts on the central part of the support rod 5. Even if the support rod 5 is bent into a convex state towards the front 5a side, the pressing force generated by the support rod 5 acts obliquely on the second side wall 12b of the elastic member 12. The bent part 12c of the elastic member 12 also undergoes elastic deformation to absorb the force, preventing it from acting obliquely on the first side wall 12a side. Therefore, the valve plate 4 is pressed evenly on the valve seat 8. As a result, the two valve plates 4 always seal the two openings 3 and 3 equally.

[0068] Furthermore, since there is no friction between the support rod 5 and the elastic member 12, and between the elastic member 12 and the valve plate 4, no dust will be generated.

[0069] When removing the valve plate 4 from the valve box 2 for maintenance or inspection of the gate valves 1 and 1B, insert a hexagonal wrench into the valve box 2 through the window 10 on the back side of the valve box 2. After removing the first sidewall 12a of the elastic member 12 and the two first external threaded parts 21, 21 of the valve plate 4 from the back 5b side of the support rod 5, lift the valve plate 4 upwards so that the first positioning pin 26 disengages from the first positioning groove 27 (first cut 24) upwards, thereby completely separating the valve plate 4 from the elastic member 12. In this way, the valve plate 4 can be removed from the window 10 to the outside of the valve box 2. If there is a window on the upper surface of the valve box 2, it can also be removed from the upper surface.

[0070] In the illustrated example, one of each of the first positioning pin 26 and the second positioning pin 28 is provided, but multiple versions of each can also be provided. In this case, multiple versions of the first positioning groove 27 and the second positioning groove 29 are also provided.

[0071] Alternatively, the first positioning pin 26 can be disposed on the elastic member 12, and the first positioning groove 27 can be disposed on the valve plate 4. Similarly, the second positioning pin 28 can be disposed on the elastic member 12, and the second positioning groove 29 can be disposed on the support rod 5.

[0072] exist Figures 12-14 In this diagram, the gate valve 101 of the second embodiment is shown with the valve box omitted. The gate valve 101 differs from the gate valve 1 of the first embodiment in that the structure of the elastic member 112 and the structure associated with the connection between the support rod 5 and the valve plate 4 based on the elastic member 112 are the same as those of the gate valve 1 of the first embodiment. Therefore, the following description focuses on the differences in their structures. For other structural features, the main identical structural parts are labeled with the same reference numerals as those in the gate valve 1 of the first embodiment, and their descriptions are omitted.

[0073] The thickness of the elastic member 112 is greater than that of the elastic member 12 in the first embodiment. The convex surface 112d of the bent portion 112c is formed as a plane that is perpendicularly connected to the outer surfaces of the first sidewall 112a and the second sidewall 112b. However, the concave surface 112e on the inner side of the bent portion 112c is arc-shaped.

[0074] Furthermore, on the aforementioned first sidewall 112a, at a position closer to the aforementioned bend portion 112c than the center in the lateral width direction of the first sidewall 112a, two external thread insertion holes 123a for the first external thread 121 to be inserted are formed vertically, and a first positioning pin 126 is provided at the lower end of the first sidewall 112a, which is closer to the free end side than the aforementioned center.

[0075] On the other hand, on the second sidewall 112b of the elastic member 112, two upper and lower second cutouts 125, 125 formed by longitudinal grooves are formed at a position facing the two external threaded insertion holes 123a, 123a of the first sidewall 112a. Two upper and lower second threaded holes 138, 138 are formed at a position closer to the free end side than the center in the transverse width direction of the second sidewall 112b. Furthermore, a second locating pin 128 is provided at the middle position of the two second threaded holes 138, 138.

[0076] In contrast, on the back surface 4b of the valve plate 4, near the inner end of the recessed step portion 33 formed on the outer half of the long side of the back surface 4b, two first threaded holes 134, 134 are formed, corresponding to the two external threaded insertion holes 123a, 123a of the first sidewall 112a. Furthermore, near the lower end of the valve plate 4, a first positioning groove 127 is formed that engages with the first positioning pin 126 of the first sidewall 112a. This first positioning groove 127 cuts into the valve plate 4 upwards from the lower end to a certain depth, but does not penetrate the valve plate 4 in the front-to-back direction (thickness direction).

[0077] Furthermore, a recessed step portion 37 is formed at the end of the front 5a of the aforementioned support rod 5, which abuts against the second sidewall 112b of the aforementioned elastic member 112. Two external threaded insertion holes 123b and 123b are formed in the recessed step portion 37 in a manner corresponding to the two second threaded holes 138 and 138 provided on the second sidewall 112b of the aforementioned elastic member 112. A second positioning groove 129 is formed at the middle position of the two external threaded insertion holes 123b and 123b, which engages with the aforementioned second positioning pin 128.

[0078] The lateral width of the recessed step portion 37 is smaller than the lateral width of the second sidewall 112b. It is the size that only abuts against half of the free end side of the second sidewall 112b and does not reach the second cut portion 125.

[0079] In addition, the second positioning groove 129 is formed by a transverse groove that cuts into the front 5a of the support rod 5 at a certain depth from the side end of the support rod 5, and does not extend to the back 5b side of the support rod 5.

[0080] Furthermore, by abutting the first sidewall 112a of the elastic member 112 against the back surface 4b of the valve plate 4, and using a hexagonal wrench to thread the first external thread 121, which is pre-inserted into the external thread through hole 123a of the first sidewall 112a, to the first threaded hole 134 of the valve plate 4, the valve plate 4 is connected to the elastic member 112. The screwing operation of the first external thread 121 performed by the hexagonal wrench passes through the second cutout 125 formed in the second sidewall 112b. In addition, the first positioning pin 126 provided at the lower end of the first sidewall 112a engages with the first positioning groove 127 formed at the lower end of the valve plate 4, and the side end of the first sidewall 112a abuts against the stepped wall 33a of the recessed stepped portion 33, thereby positioning the elastic member 112 and the valve plate 4.

[0081] In addition, in the example shown, a longitudinal groove 127a, which is the same as the first positioning groove 127, is formed downward at the upper end of the back surface 4b of the valve plate 4, but the longitudinal groove 127a does not have a special function.

[0082] Next, with the second sidewall 112b of the elastic member 112 abutting against the front of the recessed step portion 37 of the support rod 5, the second external threaded member 122 is screwed into the second threaded hole 138 of the second sidewall 112b through the external threaded insertion hole 123b of the support rod 5 from the back side 5b side, thereby connecting the elastic member 112 to the support rod 5. At this time, the second positioning pin 128 of the second sidewall 112b is engaged with the second positioning groove 129 of the support rod 5, and the side end of the second sidewall 112b abuts against the step wall 37a of the recessed step portion 37, thereby positioning the elastic member 112 and the support rod 5.

[0083] The order in which the support rod 5 and the valve plate 4 are connected via the elastic member 112 can also be the reverse of the above description. Alternatively, the valve plate 4 can be installed on the elastic member 112 after the elastic member 112 is installed on the support rod 5.

[0084] Since the function of the gate valve 101 in the second embodiment is the same as that of the gate valve 1 in the first embodiment, its description is omitted to avoid repetition.

[0085] Furthermore, when removing the valve plate 4 for maintenance or inspection of the gate valve 101, if the first sidewall 112a connecting the elastic member 112 and the two first external threaded parts 121, 121 of the valve plate 4 are removed from the back 5b side of the support rod 5 using a hex wrench, and the valve plate 4 is lifted upward, the first positioning groove 127 of the valve plate 4 will disengage from the first positioning pin 126 of the elastic member 112. Therefore, the valve plate 4 can be removed separately.

[0086] On the other hand, when the valve plate 4 is connected to the elastic member 112 and then removed together with the elastic member 112, if the valve plate 4 and the elastic member 112 are moved laterally together after the second external threaded part 122 is removed with a hex wrench, the second positioning pin 128 of the elastic member 112 is pulled out from the second positioning groove 129 of the support rod 5. Therefore, the valve plate 4 and the elastic member 112 can be removed when they are integrated.

Claims

1. A double gate valve, characterized in that, The double gate valve includes: two valve plates for opening and closing two openings formed in the front wall of the valve box; a support rod for supporting the two valve plates; a valve stem connected to the support rod; and an operating part for opening and closing the two valve plates via the valve stem. The support rod and valve plate extend straight and slenderly in a transverse direction orthogonal to the central axis of the valve rod. The valve rod is connected to the center of the long side of the support rod. One of the two valve plates is mounted on one end and the other end of the long side of the front side of the support rod via an elastic member, allowing it to tilt freely.

2. The double gate valve according to claim 1, characterized in that, The elastic member has a first sidewall and a second sidewall that are parallel to each other, and a bent portion that connects one end of the first sidewall and the second sidewall in the lateral width direction to each other. The elastic member is arranged such that the convex surface of the bent portion faces outward in the long side direction of the support rod. The first sidewall is connected to the central part of the back of the valve plate, and the second sidewall is connected to the front end of the support rod.

3. The double gate valve according to claim 2, characterized in that, The first sidewall of the elastic member is connected to the back of the valve plate via a plurality of first externally threaded parts that pass through the externally threaded insertion hole of the first sidewall from the second sidewall side and are threadedly connected to the first threaded hole of the valve plate. On the second sidewall, at a position opposite to the first external threaded component, a plurality of second cuts are formed for the tool to engage when the tool is screwed into the first external threaded component.

4. The double gate valve according to claim 3, characterized in that, The second sidewall of the elastic member is connected to the front of the support rod via a plurality of second externally threaded parts that pass through the externally threaded insertion hole of the second sidewall from the first sidewall side and are threadedly connected to the second threaded hole of the support rod. On the first sidewall, at a position opposite to the second external threaded component, a plurality of first cuts are formed for the tool to engage when the tool is screwed into the second external threaded component.

5. The double gate valve according to claim 3, characterized in that, The second sidewall of the elastic member is connected to the front of the support rod via a plurality of second external threaded parts that pass through the external threaded insertion hole of the support rod from the back side and are threaded to the second threaded hole of the second sidewall.

6. The double gate valve according to any one of claims 2 to 5, characterized in that, At least one first positioning pin is provided on either the first sidewall of the elastic member or the valve plate, and at least one first positioning groove is provided on the other side. The elastic member and the valve plate are positioned relative to each other by the engagement of the first positioning pin with the first positioning groove. At least one second positioning pin is provided on the second sidewall of the elastic member and on the support rod, and at least one second positioning groove is provided on the other side. The elastic member and the support rod are positioned relative to each other by the second positioning pin engaging with the second positioning groove.

7. The double gate valve according to claim 6, characterized in that, The first locating pin is located on the back of the valve plate near the upper end. The first positioning groove is formed by a longitudinal groove that is cut to a certain depth from the upper end of the first sidewall downwards.

8. The double gate valve according to claim 6, characterized in that, The first locating pin is located near the lower end of the first sidewall. The first positioning groove is formed by a longitudinal groove that is cut to a certain depth from the lower end of the valve plate upwards.

9. The double gate valve according to claim 6, characterized in that, The second locating pin is located at the midpoint of the height direction of the second side wall or at the midpoint of the vertical direction in front of the support rod. The second positioning groove is formed by a transverse groove that is cut into a certain depth from the side end of the support rod or the side end of the second side wall at the middle position in the vertical direction in front of the support rod or at the middle position in the height direction of the second side wall.

10. The double gate valve according to any one of claims 1 to 5, characterized in that, The valve stem is connected to the front of the support rod.

11. The double gate valve according to any one of claims 1 to 5, characterized in that, The height of the elastic member is less than or equal to the vertical width of the valve plate, and the vertical width of the support rod is less than or equal to the vertical width of the valve plate.

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