auxiliary device

Abstract

The present application provides an auxiliary device capable of automatically replacing a cutting tool and capable of being installed in a cutting device delivered to a user in the future. The auxiliary device connected to the cutting device includes: a cutting tool storage unit that stores a plurality of cutting tools; a carrying-in and carrying-out unit that carries in and carries out the cutting tools from the cutting tool storage unit; a Y-axis direction positioning unit that positions the carrying-in and carrying-out unit relative to the cutting tool storage unit at an acting position and a retreat position in the Y-axis direction; a Z-axis moving mechanism that moves the carrying-in and carrying-out unit in the Z-axis direction; and an X-axis moving mechanism that moves the carrying-in and carrying-out unit in the X-axis direction to act on the cutting tool of a spindle of a cutting unit installed in the cutting device.

Description

Technical Field

[0001] This invention relates to an auxiliary device connected to a cutting device. Background Technology

[0002] A wafer with multiple devices such as ICs and LSIs formed on its front side is divided into individual device chips by a cutting device, which are then used in electrical devices such as mobile phones and personal computers.

[0003] The cutting device includes: a chuck stage with a holding surface for holding the wafer; a cutting unit with a cutting tool mounted on it by a fixing nut for cutting the wafer held by the chuck stage; an X-axis feed member for feeding the chuck stage along the X-axis direction; a Y-axis feed member for feeding the cutting unit along the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed member for feeding the cutting unit along the Z-axis direction perpendicular to both the X-axis and Y-axis directions. The holding surface is defined by the X-axis and Y-axis directions, enabling high-precision dicing of the wafer into individual device chips.

[0004] In addition, the applicant has proposed an automatic tool changing device capable of automatically changing the cutting tool installed in the cutting unit (see, for example, Patent Document 1).

[0005] Patent Document 1: Japanese Patent Application Publication No. 2007-98536

[0006] However, there is a problem that it is difficult to install the automatic changing device on the cutting device that has already been delivered to the user in the future. Summary of the Invention

[0007] Therefore, the object of the present invention is to provide an auxiliary device that can automatically change cutting tools and can be installed on a cutting device that has already been delivered to the user.

[0008] According to the present invention, an auxiliary device is provided, which is connected to a cutting device, the cutting device comprising: a chuck table having a holding surface for holding a workpiece; a cutting unit having a cutting tool mounted on the workpiece held by the chuck table by means of a fixing nut; an X-axis feed member for feeding the chuck table along the X-axis direction; a Y-axis feed member for feeding the cutting unit along the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed member for feeding the cutting unit along the Z-axis direction perpendicular to both the X-axis and Y-axis directions. The holding surface is defined by the X-axis direction and the Y-axis direction. The auxiliary device includes: a cutting tool storage unit that stores a plurality of cutting tools; a transfer unit that transfers cutting tools out of and into the cutting tool storage unit; a Y-axis positioning unit that positions the transfer unit relative to the cutting tool storage unit in an active position and a retracted position in the Y-axis direction; a Z-axis moving mechanism that moves the transfer unit along the Z-axis direction; and an X-axis moving mechanism that moves the transfer unit along the X-axis direction to act on the cutting tools mounted on the spindle of the cutting unit.

[0009] Preferably, the cutting tool storage unit includes: a drive gear having a first rotating shaft extending along the Y-axis; a driven gear separated from the drive gear along the Z-axis and having a second rotating shaft extending along the Y-axis; an infinite track wound around the drive gear and the driven gear; and a support shaft extending along the Y-axis and disposed at predetermined intervals within the infinite track, the support shaft being inserted into the central opening of the cutting tool to support the cutting tool. Preferably, the auxiliary device is capable of adjusting the interval between the drive gear and the driven gear in the Z-axis direction, and is also capable of adjusting the length of the infinite track.

[0010] Preferably, the loading / unloading unit includes: a Z-axis extending along the Z-axis direction; a tool holding portion radially connected to the Z-axis for attracting and holding the cutting tool; and a fixing nut holding portion for engaging or unscrewing the fixing nut with an external thread formed at the front end of the spindle, wherein the loading / unloading unit has two tool holding portions for each fixing nut holding portion.

[0011] Preferably, the loading and unloading unit is disposed in a frame, which is supported by a guide rail extending along the Y-axis direction disposed in the lifting worktable and is slidable. The frame is positioned relative to the cutting tool storage unit in the Y-axis direction at the active position and the retraction position.

[0012] Preferably, the loading / unloading unit is disposed on a first movable body, which is disposed inside the frame. The first movable body is supported and can slide by being suspended on a first guide rail extending in the X-axis direction at the lower part of the second movable body. The second movable body is supported and can slide by being suspended on a second guide rail extending in the X-axis direction at the top of the frame. The loading / unloading unit is configured to move freely in and out in the X-axis direction via the first movable body and the second movable body.

[0013] Preferably, the bottom of the frame is provided with a dressing plate storage part for storing a dressing plate used to dress cutting tools, and the first moving body is provided with a holding member for holding the dressing plate stored in the dressing plate storage part.

[0014] Preferably, an end face correction fixture storage part is provided at the bottom of the frame, which stores an end face correction fixture for trimming the outer peripheral end face of the mounting flange. The mounting flange is formed at the front end of the spindle of the cutting unit to support the back of the cutting tool. The end face correction fixture is held by the holding member disposed on the first moving body.

[0015] The auxiliary device of the present invention can be installed on the cutting device that has already been delivered to the user. Attached Figure Description

[0016] Figure 1 This is a perspective view of the auxiliary device according to an embodiment of the present invention.

[0017] Figure 2 yes Figure 1 The exploded perspective view of the cutting tool storage unit shown.

[0018] Figure 3 yes Figure 2 The three-dimensional view of the support shaft is shown.

[0019] Figure 4 yes Figure 2 The cross-sectional view of the support shaft shown.

[0020] Figure 5 yes Figure 1 The diagram shows a three-dimensional view of the moving-out and moving-in unit.

[0021] Figure 6 yes Figure 1 The exploded perspective view of the frame, lifting worktable, and base frame shown.

[0022] Figure 7 yes Figure 1 An exploded 3D view of the frame shown.

[0023] Figure 8It is an exploded perspective view of the frame equipped with retaining components.

[0024] Figure 9 yes Figure 8 A perspective view of the trimming plate and end-face correction fixture shown.

[0025] Figure 10 It is for supply Figure 1 A perspective view of the cutting device connected to the auxiliary device shown.

[0026] Figure 11 yes Figure 10 A three-dimensional view of the chuck worktable shown.

[0027] Figure 12 yes Figure 10 A three-dimensional view of the cutting unit shown.

[0028] Figure 13 yes Figure 12 The diagram shows a perspective view of the cutting unit with the tool cover open.

[0029] Figure 14 yes Figure 10 The exploded perspective view of the cutting unit shown.

[0030] Figure 15 It is shown Figure 1 The auxiliary device shown is Figure 10 A three-dimensional view showing the connected state of the cutting device.

[0031] Figure 16 It is shown Figure 1 A perspective view of the auxiliary device showing the relative positions of the cutting tool storage unit and the loading / unloading unit.

[0032] Figure 17 It shows the frame from Figure 16 The diagram shows a perspective view of the state in which the cutting tool storage unit is being moved.

[0033] Figure 18 It shows the frame from Figure 17 The diagram shows a three-dimensional view of the state where the worktable is in a backward position and the lifting platform is in an upward position.

[0034] Figure 19 It shows the first moving body from Figure 18 The diagram shows a perspective view of the state in which the object is moving towards the cutting device.

[0035] Figure 20 It shows the second moving body from Figure 19 The diagram shows a perspective view of the state in which the object is moving towards the cutting device.

[0036] Figure 21 It shows through Figure 8A three-dimensional view showing the state of the trimming plate being moved into the moving-out and moving-in unit.

[0037] Figure 22 It shows through Figure 8 A perspective view of the state of the moving-in and moving-out unit's moving-in end face correction fixture.

[0038] Label Explanation

[0039] 2: Auxiliary device; 4: Cutting tool storage unit; 6: Transfer unit; 8: Y-axis positioning unit; 10: Z-axis moving mechanism; 12: X-axis moving mechanism; 14: Rotary shaft; 16: Drive gear; 18: Rotary shaft; 20: Driven gear; 22: Infinite track; 24: Support shaft; 36: Cutting tool; 38a: Central opening; 46: Z-axis rotation; 48: Tool holding part; 50: Fixed nut holding part; 74: Frame; 76: Lifting worktable; 80: Bottom (frame); 84: Top (frame); 92: Guide rail (lifting worktable); 112: First moving body; 114: Second moving body; 116: First guide rail; 118: Second guide rail; 142: Dressing plate; 144: Dressing plate storage part; 146: Holding member; 156: End face correction fixture; 158: End face correction fixture storage part. Detailed Implementation

[0040] Hereinafter, the auxiliary device according to the embodiments of the present invention will be described with reference to the accompanying drawings.

[0041] Reference Figure 1 To explain, the auxiliary device, generally indicated by reference numeral 2, includes at least: a cutting tool storage unit 4 that stores multiple cutting tools; a transfer / in unit 6 that transfers cutting tools from and into the cutting tool storage unit 4; a Y-axis positioning unit 8 that positions the transfer / in unit 6 relative to the cutting tool storage unit 4 in an active and retractable position in the Y-axis direction; a Z-axis moving mechanism 10 that moves the transfer / in unit 6 along the Z-axis; and an X-axis moving mechanism 12 that moves the transfer / in unit 6 along the X-axis to act on the cutting tools mounted on the spindle of the cutting unit of the cutting device. Furthermore, the X-axis direction is... Figure 1 The direction indicated by the middle arrow X is the Y-axis direction. Figure 1 The direction indicated by the middle arrow Y is perpendicular to the X-axis, and the Z-axis is... Figure 1 The direction indicated by the middle arrow Z is the vertical direction, perpendicular to both the X-axis and Y-axis. Furthermore, the plane defined by the X-axis and Y-axis is essentially horizontal.

[0042] like Figure 2As shown, the cutting tool storage unit 4 includes: a drive gear 16 having a rotating shaft 14 extending along the Y-axis; a driven gear 20 separated from the drive gear 16 along the Z-axis and having a rotating shaft 18 extending along the Y-axis; an infinite track 22 wound around the drive gear 16 and the driven gear 20; and a support shaft 24 extending along the Y-axis and disposed at predetermined intervals on the infinite track 22, the support shaft 24 being inserted into the central opening of the cutting tool to support the cutting tool.

[0043] Reference Figure 1 and Figure 2 As explained, the cutting tool storage unit 4 of this embodiment includes: a substrate 26 (refer to...) Figure 1 The support wall 28 extends upward from the upper surface of the substrate 26; and the motor 30 is fixed to one side of the support wall 28. Figure 2 As shown, the motor 30 is connected to the rotating shaft 14 of the drive gear 16, and the motor 30 causes the drive gear 16 to rotate about the Y-axis.

[0044] like Figure 2 As shown, the driven gear 20 is positioned above the drive gear 16. The rotation shaft 18 of the driven gear 20 is supported by the support wall 28, allowing it to rotate freely about the Y-axis and move freely up and down along the Z-axis. A lifting member (not shown) is provided on the support wall 28 to move the driven gear 20 up and down along the Z-axis. The lifting member may have a structure consisting of a ball screw connected to the rotation shaft 18 of the driven gear 20 and extending along the Z-axis, and an electric motor for rotating the ball screw.

[0045] The infinite track 22 is composed of multiple interconnected connecting rod segments (notation omitted), wound around the drive gear 16 and the driven gear 20. The infinite track 22 rotates as the drive gear 16 rotates via the electric motor 30.

[0046] In the cutting tool storage unit 4 of this embodiment, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction using a lifting member. Furthermore, in the cutting tool storage unit 4, the length of the infinite track 22 can be adjusted by appropriately increasing or decreasing the number of connecting rods in the infinite track 22.

[0047] like Figure 2 As shown, multiple support shafts 24 are arranged on the infinite track 22 at predetermined intervals. Additionally, like by means of... Figure 2 Refer to together Figure 3 As understood, the support shaft 24 has a cylindrical base 32 connected to the infinite track 22 and a cylindrical shaft portion 34 extending from the end face of the base 32 along the Y-axis direction. The diameter of the shaft portion 34 is smaller than the diameter of the base 32.

[0048] Figure 3 A cutting tool 36 supported by a support shaft 24 is also shown. The cutting tool 36 has an annular base 38 and an annular cutting edge 40 fixed to the outer periphery of the base 38. The base 38 can be formed of a suitable metal material such as aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting edge 40 is formed of abrasive grains such as diamond and a bonding material such as metal or resin to a specified thickness (e.g., about 10 μm to 30 μm), and protrudes radially outward from the outer periphery of the base 38.

[0049] In the support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the cutting tool 36, and the shaft portion 34 supports multiple (e.g., five) cutting tools 36. In this embodiment, as shown by reference... Figure 2 As understood, the cutting tool 36 is supported on half of the multiple support shafts 24. Additionally, as... Figure 3 As shown, a plurality of ball plungers 42 are installed circumferentially at intervals on the front end side of the shaft portion 34 to prevent the cutting tool 36 supported by the shaft portion 34 from flying out.

[0050] like Figure 4 As shown, flow paths 32a are formed inside each base 32 of the support shaft 24, and multiple flow paths 22a connected to one end of each flow path 32a are formed on the infinite track 22. Figure 2 As shown, the other end of each flow path 32a opens at the end face of the base 32, which is radially outward from the shaft portion 34. Additionally, as... Figure 2 As shown, an air nozzle 44 protruding along the Y-axis direction below the drive gear 16 is provided on the support wall 28, and the air nozzle 44 is connected to a high-pressure air supply component (not shown). In this embodiment, on the track of the support shaft 24 that rotates with the infinite track 22, the lowermost support shaft 24 is opposite to the front end of the air nozzle 44.

[0051] Furthermore, when the cutting tool 36 located at the front end of the shaft 34 is removed, high-pressure air is supplied from the air nozzle 44 through the flow path 22a of the infinite track 22 to the flow path 32a of the base 32 of the support shaft 24 located at the lowest end, which can push the cutting tool 36 remaining in the shaft 34 toward the front end of the shaft 34. However, due to the action of the ball plunger 42, the cutting tool 36 will not fall off the shaft 34.

[0052] Reference Figure 5The loading / unloading unit 6 will be described. The loading / unloading unit 6 includes at least: a Z-rotation axis 46 extending along the Z-axis direction; a tool holding part 48 radially connected to the Z-rotation axis 46 for attracting and holding the cutting tool 36; and a fixing nut holding part 50 for engaging or unscrewing the fixing nut with an external thread formed at the front end of the spindle of the cutting device.

[0053] like Figure 5 As shown, the loading / unloading unit 6 of this embodiment also includes a housing 52, which has a hexagonal top plate 54 and six rectangular plate-shaped side walls 56 hanging from the periphery of the top plate 54. The aforementioned Z-rotation shaft 46 protrudes from the upper surface of the top plate 54. An electric motor (not shown) connected to the Z-rotation shaft 46 is housed inside the housing 52.

[0054] In this embodiment, tool holding portions 48 are installed on four of the six side walls 56 of the housing 52, and fixing nut holding portions 50 are installed on two side walls 56, with the two fixing nut holding portions 50 disposed on a pair of opposing side walls 56. Thus, the loading / unloading unit 6 has two tool holding portions 48 for each fixing nut holding portion 50.

[0055] The tool holder 48 is cylindrical, and a circular central opening 60 is provided on the end face 58 of the tool holder 48, which can receive the shaft portion 34 of the support shaft 24 and the front end of the spindle of the cutting device. A plurality of suction holes 62 are arranged at equal intervals around the central opening 60 in the circumferential direction. Each suction hole 62 is connected to a suction member (not shown).

[0056] With the tool holding part 48 positioned so that its end face 58 contacts the base 38 of the cutting tool 36 stored in the cutting tool storage unit 4, the suction member generates an attraction force in each suction hole 62, thereby attracting and holding the cutting tool 36.

[0057] Reference Figure 5 Continuing the description, the fixing nut retainer 50 includes: a cylindrical housing 64, which is fixed to the side wall 56 of the housing 52; an annular rotating body 66, which is rotatably housed inside the housing 64; and an electric motor (not shown) that causes the rotating body 66 to rotate.

[0058] A central opening 68 is formed on the rotating body 66 at the front end of the spindle, capable of receiving the cutting device. On the end face 66a of the rotating body 66, a plurality of suction holes 70 and a plurality of pins 72 are alternately arranged at circumferential intervals. Each suction hole 70 is connected to a suction member (not shown). The pins 72 are positioned at a position protruding from the end face 66a of the rotating body 66 by a spring (not shown) built into the rotating body 66. Figure 5 (as shown in the diagram), and when pressed toward the interior of the rotating body 66, the spring contracts and is housed inside the rotating body 66. Furthermore, the pin 72 is positioned corresponding to the pin hole formed in the fixing nut.

[0059] In the fixed nut holding part 50, the fixed nut is attracted and held by the attraction force generated in each attraction hole 70 by the attraction member, and the pin 72 is inserted into the pin hole formed in the fixed nut. The rotating body 66 is rotated by the motor, so that the fixed nut for fixing the cutting tool 36 to the spindle of the cutting device can be screwed into or unscrewed from the external thread formed at the front end of the spindle.

[0060] Furthermore, when the fixing nut is unscrewed (removed) from the spindle, even if the position of the pin 72 of the fixing nut retaining part 50 is offset from the position of the pin hole of the fixing nut, after the end face 66a of the rotating body 66 is positioned on the end face of the fixing nut mounted on the spindle and the pin 72 is housed inside the rotating body 66, when the motor is rotated by the rotating body 66, the pin 72 is also pushed out by the spring when the position of the pin 72 matches the position of the pin hole, so that the pin 72 is inserted into the pin hole.

[0061] In this embodiment, such as Figure 1 As shown, the loading / unloading unit 6, configured as described above, is disposed inside the frame 74. The frame 74 is supported by the lifting worktable 76, which is movable along the Y-axis, and the lifting worktable 76 is supported by the base frame 78, which is movable along the Z-axis.

[0062] and Figure 1 Refer to together Figure 6 To illustrate, the frame 74 includes: a rectangular plate-shaped bottom 80; four pillars 82 extending upwards from the four corners of the upper surface of the bottom 80; and a plate-shaped top 84 (see reference). Figure 1 It is fixed to the upper end of each support column 82. A pair of guided members 86 with grooves 86a extending along the Y-axis are provided at intervals along the X-axis on the lower surface of the bottom 80.

[0063] The lifting worktable 76 includes a rectangular plate-shaped top plate 88 and four cylindrical legs 90 extending downward from the four corners of the lower surface of the top plate 88. A pair of guide rails 92 extending at intervals along the Y-axis in the X-axis direction are provided on the upper surface of the top plate 88. The pair of guide rails 92 are slidably fitted into the grooves 86a of a pair of guided components 86 in the frame 74.

[0064] Additionally, a Y-axis positioning unit 8 is provided on the upper surface of the top plate 88 of the lifting worktable 76. The Y-axis positioning unit 8 has a ball screw 94 extending along the Y-axis between a pair of guide rails 92 and a motor 96 that rotates the ball screw 94. The nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom 80 of the frame 74.

[0065] In the Y-axis positioning unit 8, the rotational motion of the motor 96 is converted into linear motion by the ball screw 94 and transmitted to the frame 74, causing the frame 74 to move along a pair of guide rails 92 in the Y-axis direction. Thus, the frame 74, equipped with the loading / unloading unit 6, is supported by the guide rails 92 extending along the Y-axis of the lifting worktable 76, allowing it to slide, and is positioned relative to the cutting tool storage unit 4 in the active and retracted positions in the Y-axis direction by the Y-axis positioning unit 8.

[0066] The aforementioned operating position is when the tool holding part 48 of the loading / unloading unit 6 is close to the cutting tool storage unit 4, and is a position in which the cutting tool 36 supported by the cutting tool storage unit 4 can be attracted and held by the tool holding part 48. Conversely, the aforementioned retraction position is when the tool holding part 48 of the loading / unloading unit 6 is further away from the cutting tool storage unit 4 than the aforementioned operating position.

[0067] like Figure 6 As shown, the base frame 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper part of the frame 98. Four circular holes 102 are formed at the four corners of the base plate 100 for the legs 90 of the lifting worktable 76 to slide freely into. In addition, an internal thread 104 is formed in the center of the base plate 100.

[0068] Reference Figure 6 Continuing the description, the lifting worktable 76 and the base frame 78 are connected to the Z-axis moving mechanism 10. The Z-axis moving mechanism 10 includes: a ball screw 106 extending along the Z-axis direction; a motor 108 that rotates the ball screw 106; and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 engages with the internal thread 104 of the base plate 100. The connecting plate 110 is fixed to the lower surface of the top plate 88 of the lifting worktable 76 by suitable connecting members such as bolts (not shown).

[0069] In the Z-axis moving mechanism 10, the rotational motion of the motor 108 is converted into linear motion by the ball screw 106, so that the lifting worktable 76 is raised and lowered relative to the base frame 78, thereby causing the frame 74 equipped with the loading and unloading unit 6 to move along the Z-axis direction.

[0070] Reference Figure 7As explained, the loading and unloading unit 6 is mounted on a first movable body 112 disposed inside the frame 74. The first movable body 112 is supported and can slide by being suspended on a first guide rail 116 extending in the X-axis direction disposed at the lower part of the second movable body 114. The second movable body 114 is supported and can slide by being suspended on a second guide rail 118 extending in the X-axis direction disposed at the top 84 of the frame 74.

[0071] The first moving body 112 has a rectangular plate-shaped main body 120. A circular hole 122 is formed in the center of the main body 120. The Z-rotation shaft 46 of the transfer-in / extraction unit 6 is inserted into the circular hole 122 and is fixed to the main body 120 in a non-rotatable manner. When the motor of the transfer-in / extraction unit 6 connected to the Z-rotation shaft 46 is driven, the housing 52 of the transfer-in / extraction unit 6 rotates relative to the first moving body 112, and the tool holder 48 and the fixing nut holder 50 are positioned in any orientation.

[0072] On the upper surface of the main body 120 of the first moving body 112, a pair of guided members 124 having grooves 124a extending in the X-axis direction are provided at intervals along the Y-axis direction, and a block 126 having a through hole 126a extending in the X-axis direction is fixed thereon.

[0073] The second movable body 114 has a rectangular plate-shaped main body 128, and a pair of first guide rails 116 are provided at intervals along the Y-axis on the lower surface of the main body 128. The first guide rails 116 are slidably fitted into the grooves 124a of a pair of guided components 124 of the first movable body 112, and the first movable body 112 is supported in a state of being suspended on the first guide rails 116 disposed on the second movable body 114 so as to be able to slide.

[0074] A first X-axis moving mechanism is provided below the main body 128 of the second moving body 114, which moves the first moving body 112 relative to the second moving body 114 along the X-axis direction. In this embodiment, the first X-axis moving mechanism is composed of a cylinder 130. The cylinder barrel 130a of the cylinder 130 is fixed to the lower surface of the main body 128 and extends along the X-axis between a pair of first guide rails 116. The front end of the piston rod 130b of the cylinder 130 is engaged and connected to the through hole 126a of the block 126 of the first moving body 112.

[0075] The cylinder 130, which serves as the first X-axis moving mechanism, moves the piston rod 130b forward and backward, thereby causing the first moving body 112 to move relative to the second moving body 114 along the first guide rail 116 in the X-axis direction.

[0076] On the upper surface of the main body 128 of the second moving body 114, a pair of guided members 132 with grooves 132a extending in the X-axis direction are provided at intervals along the Y-axis direction, and a block 134 with an internal thread 134a extending in the X-axis direction is fixed thereon.

[0077] A pair of second guide rails 118 are provided at intervals along the Y-axis on the lower surface of the top 84 of the frame 74. The second guide rails 118 are slidably fitted into the grooves 132a of a pair of guided components 132 of the second movable body 114, and the second movable body 114 is supported in a state of being suspended on the second guide rails 118 provided on the top 84 of the frame 74 so as to be able to slide.

[0078] A second X-axis moving mechanism 136 is provided below the top 84 of the frame 74, which moves the second movable body 114 relative to the top 84 along the X-axis direction. In this embodiment, the second X-axis moving mechanism 136 includes a ball screw 138 extending along the X-axis direction between a pair of second guide rails 118 and a motor 140 that rotates the ball screw 138. The ball screw 138 engages with the internal thread 134a of the block 134 of the second movable body 114, and the motor 140 is fixed to the lower surface of the top 84.

[0079] The second X-axis moving mechanism 136 converts the rotational motion of the motor 140 into linear motion through the ball screw 138 and transmits it to the second moving body 114, so that the second moving body 114 moves relative to the top 84 along the second guide rail 118 in the X-axis direction.

[0080] The X-axis moving mechanism 12 of this embodiment includes a cylinder 130 as a first X-axis moving mechanism and a second X-axis moving mechanism 136 having a ball screw 138 and a motor 140. In this embodiment, by moving the first moving body 112 using the cylinder 130 as the first X-axis moving mechanism, the loading / unloading unit 6 can be rapidly advanced along the X-axis direction, and by moving the second moving body 114 using the second X-axis moving mechanism 136, the X-axis position of the loading / unloading unit 6 can be easily fine-tuned. Thus, the loading / unloading unit 6 is configured to move freely in and out along the X-axis direction via the first moving body 112 and the second moving body 114.

[0081] Furthermore, the auxiliary device 2 is not limited to the above-described manner, and can also be [equivalent to / possessing] the following: Figure 8 and Figure 9 The structure shown is as described. In Figure 8 and Figure 9 In the manner shown, a dressing plate storage part 144 for storing the dressing plate 142 used for dressing the cutting tool 36 is provided at the bottom 80 of the frame 74 (see reference). Figure 9The first movable body 112 is provided with a retaining member 146 for holding the trimming plate 142 stored in the trimming plate storage part 144 (see reference). Figure 8 ).

[0082] Dressing plate 142 can use bonding materials such as resin binders to form green carbide and alumina-based abrasive grains into a rectangular plate shape. One side of dressing plate 142 is, for example, approximately 5 cm. Figure 9 As shown, the trimming plate storage part 144 of this embodiment is composed of three rectangular recesses on each of the two ends of the upper surface of the rectangular tray 148 in the Y-axis direction. The tray 148 is disposed on the upper surface of the bottom 80 of the frame 74.

[0083] like Figure 8 As shown, in this embodiment, a pair of retaining members 146 are provided at both ends of the first movable body 112 in the Y-axis direction. The retaining members 146 include: a fixing plate 150 fixed to the Y-axis end of the main body 120 of the first movable body 112; a lifting plate 152 supported on the lower surface of the fixing plate 150 in the Z-axis direction; a lifting member (not shown) that raises and lowers the lifting plate 152; and a plurality of suction pads 154 disposed on the lower surface of the lifting plate 152. The lifting member can be, for example, a suitable actuator such as a cylinder. Each suction pad 154 is connected to the suction member.

[0084] In the holding member 146, the lifting member lowers the lifting plate 152, so that each suction pad 154 comes into contact with the trimming plate 142 stored in the trimming plate storage part 144, and the suction member generates an attraction force on each suction pad 154, and the trimming plate 142 is attracted and held by each suction pad 154.

[0085] Additionally, a face correction fixture storage section 158 is provided at the bottom 80 of the frame 74 (see reference). Figure 9 The end-face correction fixture housing 158 houses an end-face correction fixture 156 for correcting the outer peripheral end face of a mounting flange. This mounting flange is formed at the front end of the spindle of the cutting unit and supports the back of the cutting tool 36. The end-face correction fixture 156 has a rectangular base plate 160 and a grinding wheel 162 fixed to the upper surface of the base plate 160. Figure 9 As shown, the end face correction fixture storage part 158 ​​of this embodiment is composed of a pair of rectangular recesses provided on both ends of the upper surface of the tray 148 in the Y-axis direction.

[0086] The end face correction fixture 156 stored in the end face correction fixture storage section 158 is attracted and held by the attraction pad 154 of the holding member 146 of the first moving body 112.

[0087] Next, refer to Figures 10 to 15The cutting device 170 connected to the aforementioned auxiliary device 2 will be described.

[0088] like Figure 10 As shown, the cutting device 170 includes: a chuck table 172 having a holding surface for holding a workpiece; a cutting unit 174 having a cutting tool mounted on the workpiece held by the chuck table 172 by means of a fixing nut; an X-axis feed member 176 for feeding the chuck table 172 along the X-axis direction; a Y-axis feed member 178 for feeding the cutting unit 174 along the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed member 180 for feeding the cutting unit 174 along the Z-axis direction perpendicular to both the X-axis and Y-axis directions.

[0089] Reference Figure 10 and Figure 11 As explained, the cutting device 170 includes: an X-axis movable plate 184, which is movably mounted on the base 182 along the X-axis direction (see reference). Figure 10 The upper surface of the support column 186; a support column 186 fixed to the upper surface of the X-axis movable plate 184; and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a of the cover plate 188. The chuck table 172 rotates about the Z-axis by a motor (not shown) built into the support column 186.

[0090] like Figure 11 As shown, a porous, circular suction chuck 190 connected to a suction member (not shown) is disposed at the upper end of the chuck table 172. In the chuck table 172, the suction member generates an attractive force on the upper surface of the suction chuck 190, thereby attracting and holding the workpiece placed on the upper surface of the suction chuck 190. Thus, in the chuck table 172, the upper surface of the suction chuck 190 becomes a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis and Y-axis directions. Furthermore, a plurality of clamps 192 are arranged at circumferential intervals along the periphery of the chuck table 172.

[0091] Reference Figure 11Continuing the description, a pair of rectangular sub-worktables 194 are arranged at intervals along the Y-axis on the upper surface of the cover plate 188. Multiple suction holes 196, connected to a suction member (not shown), are formed on the upper surface of each sub-worktable 194. In the sub-worktables 194, by utilizing the suction member to generate a suction force in each suction hole 196, the trimming plate 142 or end-face correction fixture 156, which is attracted, held, and moved into place by the suction pad 154 of the holding member 146 disposed on the first moving body 112, is attracted and held.

[0092] like Figure 11 As shown, the X-axis feed member 176 has a ball screw 198 connected to the X-axis movable plate 184 and extending along the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis feed member 176 converts the rotational motion of the motor 200 into linear motion through the ball screw 198 and transmits it to the X-axis movable plate 184, causing the X-axis movable plate 184 to move along the guide rail 182a of the base 182, and feeding the chuck table 172 along the X-axis direction.

[0093] like Figure 10 As shown, the cutting device 170 includes a portal frame 202 arranged across a chuck table 172. The frame 202 has: a pair of supports 204 that extend upwardly from the upper surface of the base 182 at intervals along the Y-axis; and a beam 206 that is supported between the upper ends of the pair of supports 204 and extends along the Y-axis. The cutting unit 174 is located on one side of the beam 206 (in... Figure 10 A pair of cutting units 174 are provided at intervals along the Y-axis (the side facing the back). In the cutting device 170 of this embodiment, a pair of cutting units 174 are provided with cutting tools 36 facing each other, so that the workpiece held in the chuck table 172 can be cut simultaneously using a pair of cutting tools 36. Alternatively, there may be only one cutting unit 174.

[0094] like Figure 12 As shown, each cutting unit 174 has: a rectangular Y-axis movable member 208, which is movably supported on one side of the beam 206 along the Y-axis direction; an L-shaped Z-axis movable member 210, which is movably supported on the Y-axis movable member 208 along the Z-axis direction; and a spindle housing 212, which is fixed to the lower end of the Z-axis movable member 210.

[0095] On one side of the Y-axis movable part 208 (in) Figure 12 The side of the beam 206 (near the front side) has a pair of guide grooves 208a that are spaced apart in the Z-axis direction and extend along the Y-axis direction. The guide grooves 208a are slidably connected to a pair of guide rails (not shown) extending along the Y-axis direction on one side of the beam 206 in a vertical direction.

[0096] The Y-axis feed member 178 has a ball screw 214 extending along the Y-axis direction on one side of the beam 206 and a motor 216 that rotates the ball screw 214. The ball screw 214 is connected to the Y-axis movable member 208. The Y-axis feed member 178 converts the rotational motion of the motor 216 into linear motion through the ball screw 214 and transmits it to the Y-axis movable member 208, causing the Y-axis movable member 208 to perform indexing feed along the guide rail attached to one side of the beam 206 in the Y-axis direction.

[0097] On the other side of the Y-axis movable part 208 (in) Figure 12 The side of the back side (in the middle) has a pair of guide rails (not shown) that are spaced apart in the Y-axis direction and extend along the Z-axis direction. The Z-axis movable member 210 has a pair of guide grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 208.

[0098] The Z-axis feed member 180 includes: a ball screw (not shown) connected to the Z-axis movable member 210 and extending along the Z-axis direction; and a motor 218 that rotates the ball screw. The Z-axis feed member 180 converts the rotational motion of the motor 218 into linear motion via the ball screw and transmits it to the Z-axis movable member 210, causing the Z-axis movable member 210 to be fed in the Z-axis direction along the guide rail of the Y-axis movable member 208.

[0099] Reference Figure 13 As explained, a cylindrical spindle 220 is rotatably supported in the spindle housing 212 about the Y-axis, and an electric motor (not shown) that rotates the spindle 220 is housed therein. A cutting tool 36 for cutting the workpiece is detachably fixed to the front end of the spindle 220 by a fixing nut 222.

[0100] A tool cover 224 covering the cutting tool 36 is mounted on the front end of the spindle housing 212. The tool cover 224 has a first cover component 224a fixed to the front end of the spindle housing 212 and a second cover component 224b movably mounted on the front end of the first cover component 224a. The second cover component 224b moves along the X-axis direction via a suitable actuator (not shown) such as a cylinder, and is positioned when changing the cutting tool 36. Figure 13 The open position shown is positioned during machining. Figure 12 The closed position shown.

[0101] like Figure 14As shown, an annular mounting flange 226 protruding radially outward is provided on the outer peripheral surface of the front end side of the spindle 220. An annular recess 226a is formed on the radially inner portion of the front end face of the mounting flange 226, and an annular bearing portion 226b protruding axially on the outer peripheral portion of the front end face of the mounting flange 226. In addition, an external thread 228 is formed on the outer peripheral surface of the spindle 220 further from the front end side than the mounting flange 226.

[0102] Furthermore, the central opening 38a of the cutting tool 36 engages with the front end of the spindle 220, and the external thread 228 of the spindle 220 is screwed (tightened) with the fixing nut 222. Thus, the cutting tool 36 is clamped by the bearing portion 226b of the mounting flange 226 and the fixing nut 222 and is detachably fixed to the front end of the spindle 220. In addition, a plurality of pin holes 222a are formed at equal intervals along the circumference on the side of the nut 222 for the pins 72 of the fixing nut holding portion 50 of the loading and unloading unit 6 to be inserted.

[0103] like Figure 10 As shown, on the other side of beam 206 of frame 202 (in Figure 10 A pair of imaging members 230 are mounted on the side of the beam 206 (near the front side) along the Y-axis direction to image the workpiece held by the chuck table 172, and a pair of moving members 232 are mounted to move the imaging members 230 along the Y-axis direction. Each moving member 232 has a ball screw 234 extending along the Y-axis direction on the side of the beam 206 and a motor 236 that rotates the ball screw 234. The ball screw 234 is connected to the imaging members 230. Furthermore, the moving members 232 convert the rotational motion of the motor 236 into linear motion and transmit it to the imaging members 230, causing the imaging members 230 to move along a guide rail 206a attached to the side of the beam 206 in the Y-axis direction. Alternatively, there may be only one imaging member 230.

[0104] When using the cutting device 170 to perform cutting operations on a workpiece such as a wafer, firstly, the workpiece is held in place on the chuck stage 172. Next, the X-axis feed member 176 moves the chuck stage 172 below the imaging member 230, and the moving member 232 adjusts the Y-axis position of the imaging member 230. Then, the imaging member 230 takes an image of the workpiece from above to inspect the cutting area.

[0105] Next, based on the cutting area of ​​the workpiece detected by the imaging member 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of ​​the workpiece relative to the cutting tool 36 of the cutting unit 174. Then, the chuck table 172 is moved along the X-axis direction using the X-axis feed member 176, and the spindle housing 212 is moved along the Y-axis direction using the Y-axis feed member 178, positioning the pair of cutting tools 36 above the cutting area of ​​the workpiece.

[0106] Next, the spindle housing 212 is lowered using the Z-axis feed member 180, causing the cutting edge 40 of the high-speed rotating cutting tool 36 to cut into the cutting area of ​​the workpiece. While providing cutting fluid to the portion where the cutting edge 40 of the cutting tool 36 cuts in, the chuck table 172 is fed along the X-axis, thereby performing the prescribed cutting machining on the cutting area of ​​the workpiece. The spindle housing 212 is indexed and fed along the Y-axis using the Y-axis feed member 178, and the above cutting machining is repeated appropriately to perform cutting machining on the entire cutting area of ​​the workpiece. After the cutting operation is completed, the machined workpiece is transferred to the next operation.

[0107] When repeated cutting operations are performed, the cutting tool 36 wears down. When the wear of the cutting tool 36 reaches a specified level, cutting accuracy cannot be maintained, so the cutting tool 36 mounted on the spindle 220 needs to be replaced with a new cutting tool 36. Furthermore, even if the wear of the cutting tool 36 mounted on the spindle 220 has not reached the specified level, when cutting a workpiece with a different raw material than the workpiece previously machined, it is sometimes necessary to replace it with a cutting tool 36 corresponding to the raw material of the workpiece.

[0108] In this embodiment, such as Figure 15 As shown, the auxiliary device 2, which can automatically change the cutting tool 36 of the cutting device 170, is connected to the cutting device 170. Hereinafter, the method of changing the cutting tool 36 using the auxiliary device 2 will be described.

[0109] like Figure 15 As shown, the auxiliary device 2 is located inside the cutting device 170 in the X-axis direction and can be installed on the cutting device 170 that has already been delivered to the user. When using the auxiliary device 2 to replace the cutting tool 36 installed on the cutting device 170, firstly, the infinite track 22 of the cutting tool storage unit 4 is rotated to position the support shaft 24, which supports the new cutting tool 36 to be moved into the cutting device 170, in a predetermined position (e.g., the lowermost position in the track of the support shaft 24).

[0110] Next, as Figure 16As shown, the housing 52 is rotated by a motor connected to the Z-axis 46 of the loading / unloading unit 6, thereby causing the side wall 56 of the housing 52, where the tool holder 48 is mounted, to align with the cutting tool storage unit 4 along the X-axis. Furthermore, the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 are activated to adjust the X-axis and Z-axis positions of the tool holder 48, so that the shaft portion 34 of the support shaft 24 at the specified position can be inserted into the central opening 60 of the tool holder 48 (see reference). Figure 5 ).

[0111] Next, as Figure 17 As shown, the Y-axis positioning unit 8 moves the frame 74 along the Y-axis, positioning the loading / unloading unit 6 in a position where the cutting tool 36 supported by the support shaft 24 can be held by the tool holding part 48. Here, the shaft portion 34 of the support shaft 24, positioned as described above, is inserted into the central opening 60 of the tool holding part 48, and the end face 58 of the tool holding part 48 contacts the end face of the cutting tool 36 located at the front end of the shaft portion 34. Then, a suction force is generated in each suction hole 62 of the tool holding part 48, and the cutting tool 36 located at the front end of the shaft portion 34 is held by the tool holding part 48.

[0112] Next, the Y-axis positioning unit 8 is activated, causing the loading / unloading unit 6 to separate from the cutting tool storage unit 4 along the Y-axis and be positioned in a retracted position. Next, the housing 52 of the loading / unloading unit 6 is rotated 180°, so that the tool holding portion 48 opposite to the tool holding portion 48 holding the cutting tool 36 faces the cutting tool storage unit 4. Next, the Y-axis positioning unit 8 is activated, positioning the loading / unloading unit 6 in a position where the cutting tool 36 on the support shaft 24 can be held by the opposite tool holding portion 48. Next, a suction force is generated in each suction hole 62 of the opposite tool holding portion 48, using the tool holding portion 48 to attract and hold the cutting tool 36 located at the front end of the shaft portion 34. Thus, a new cutting tool 36 is attracted and held using a pair of opposing tool holding portions 48 out of the four tool holding portions 48.

[0113] Next, as Figure 18As shown, the frame 74 is moved along the Y-axis by the Y-axis positioning unit 8, and the lifting worktable 76 is moved along the Z-axis by the Z-axis moving mechanism 10. This causes the loading / unloading unit 6 to separate from the cutting tool storage unit 4 and be positioned in a retracted position, and adjusts the Y-axis and Z-axis positions of the loading / unloading unit 6 relative to the cutting device 170. The adjusted Y-axis position of the loading / unloading unit 6 is between the pair of cutting units 174 of the cutting device 170, and the adjusted Z-axis position of the loading / unloading unit 6 is above the holding surface of the chuck worktable 172.

[0114] Next, as Figure 19 As shown, the first moving body 112 is moved along the X-axis direction by the cylinder 130, which serves as the first X-axis moving mechanism, causing the loading / unloading unit 6 to advance towards the pair of cutting units 174 of the cutting device 170. Then, as... Figure 20 As shown, the second moving body 114 is moved along the X-axis direction by the second X-axis moving mechanism 136, adjusting the X-axis position of the loading / unloading unit 6 relative to the pair of cutting units 174. Specifically, the X-axis position of the center of the new pair of cutting tools 36 held by the pair of tool holding parts 48 of the loading / unloading unit 6 is aligned with the X-axis position of the center of the pair of cutting tools 36 mounted on the pair of cutting units 174. In addition, the Z-axis moving mechanism 10 of the auxiliary device 2 or the Z-axis feed member 180 of the cutting device 170 is activated to align the Z-axis position of the center of the cutting tool 36 in the tool holding part 48 with the Z-axis position of the center of the cutting tool 36 in the cutting unit 174.

[0115] Next, the housing 52 of the transfer unit 6 is rotated 60° so that the pair of retaining nuts 50 are aligned with the cutting tools 36 of the pair of cutting units 174. Alternatively, the housing 52 can be rotated 60° before the first and second moving bodies 112 and 114 are advanced.

[0116] Next, the second cover component 224b of the tool cover 224 of each pair of cutting units 174 is positioned in the open position (see reference). Figure 13 Next, the cutting unit 174 is moved along the Y-axis direction by the Y-axis feed member 178 of the cutting device 170, so that the fixing nut 222 that fixes the cutting tool 36 to the spindle 220 comes into contact with the end face 66a of the rotating body 66 of the fixing nut holding part 50. As a result, the pin 72 of the fixing nut holding part 50 is pressed by the fixing nut 222 and stored inside the rotating body 66, and the front end of the spindle 220 is stored in the central opening 68 of the rotating body 66.

[0117] Next, when the rotating body 66 is rotated by the motor of the fixing nut holding part 50, each pin 72 aligns with the pin hole 222a of the fixing nut 222, and the rotational motion of the rotating body 66 is transmitted to the fixing nut 222 via each pin 72, causing the fixing nut 222 to loosen. This allows the fixing nut 222 to be unscrewed (removed) from the external thread 228 of the spindle 220 of the cutting unit 174. Furthermore, an attractive force is generated in each suction hole 70 of the fixing nut holding part 50, and the fixing nut holding part 50 is used to attract and hold the removed fixing nut 222.

[0118] Next, the cutting unit 174 is separated from the loading / unloading unit 6 by the Y-axis feed member 178, and the housing 52 of the loading / unloading unit 6 is rotated 60° so that the empty tool holding part 48, which does not hold the cutting tool 36, is opposite to the cutting tool 36 of the cutting unit 174.

[0119] Next, the cutting unit 174 is brought close to the loading / unloading unit 6 using the Y-axis feed member 178, and the spindle 220 of the cutting unit 174 is inserted into the central opening 60 of the tool holder 48, so that the end face 58 of the empty tool holder 48 contacts the end face of the cutting tool 36 of the cutting unit 174. Then, an attractive force is generated in each suction hole 62 of the tool holder 48, and the cutting tool 36 of the cutting unit 174 is attracted and held by the tool holder 48.

[0120] Next, the cutting unit 174 is separated from the loading / unloading unit 6 by the Y-axis feed member 178, and the housing 52 of the loading / unloading unit 6 is rotated 60° so that the tool holding part 48 holding the new cutting tool 36 is opposite to the spindle 220 of the cutting unit 174.

[0121] Next, using the Y-axis feed member 178, the cutting unit 174 is brought close to the loading / unloading unit 6, and the spindle 220 is inserted into the central opening 38a of the new cutting tool 36, so that the end face of the cutting tool 36 contacts the receiving portion 226b of the mounting flange 226 of the spindle 220. Then, the attractive force of the tool holding portion 48 is released, and the new cutting tool 36 is transferred from the tool holding portion 48 to the spindle 220.

[0122] Next, the cutting unit 174 is separated from the transfer unit 6 by the Y-axis feed member 178, and the housing 52 of the transfer unit 6 is rotated 60° so that the fixing nut holding part 50 that holds the removed fixing nut 222 is opposite to the spindle 220 of the cutting unit 174.

[0123] Next, the cutting unit 174 is brought close to the loading / unloading unit 6 via the Y-axis feed member 178, causing the fixing nut 222, held by the fixing nut holder 50, to engage with the front end of the spindle 220. Then, the motor of the fixing nut holder 50 is activated, causing the fixing nut 222 to rotate in the opposite direction to when it was removed, thus screwing (tightening) the fixing nut 222 onto the external thread 228 of the spindle 220. This allows the new cutting tool 36, to be mounted on the cutting unit 174, to be clamped and fixed to the spindle 220 using the bearing portion 226b of the mounting flange 226 of the spindle 220. After releasing the attraction of the fixing nut holder 50, the second cover member 224b of the tool cover 224 of the cutting unit 174 is positioned in a closed position. Furthermore, the removal and installation of the fixing nut 222 and the cutting tool 36 described above can be performed simultaneously on a pair of cutting units 174 or separately.

[0124] Next, the first and second moving bodies 112 and 114 are retracted, and the housing 52 of the transfer unit 6 is rotated 60° so that one of the removed cutting tools 36 is aligned with the cutting tool storage unit 4. Additionally, the infinite track 22 of the cutting tool storage unit 4 is rotated to position the empty support shaft 24, which does not support the cutting tool 36, at a predetermined position (e.g., the lowest point of the track on the support shaft 24).

[0125] Next, the X-axis moving mechanism 12 and the Z-axis moving mechanism 10 are activated to adjust the X-axis and Z-axis positions of the tool holding part 48 so that the shaft part 34 of the support shaft 24 at the specified position can be inserted into the central opening 38a of the cutting tool 36 held by the tool holding part 48.

[0126] Next, the frame 74 is moved along the Y-axis direction by the Y-axis positioning unit 8, and the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the cutting tools 36 held by the tool holding portion 48, and the end face of one of the cutting tools 36 contacts the end face of the base portion 32 of the support shaft 24. Then, the attraction force of the tool holding portion 48 is released, and one of the removed cutting tools 36 is handed over to the support shaft 24.

[0127] Furthermore, the Y-axis positioning unit 8 separates the loading / unloading unit 6 from the cutting tool storage unit 4, and rotates the housing 52 of the loading / unloading unit 6 180°, so that the tool holding part 48, which holds the other pair of unloaded cutting tools 36, faces the cutting tool storage unit 4. Next, the Y-axis positioning unit 8 moves the frame 74 along the Y-axis, inserting the shaft portion 34 of the support shaft 24 at the predetermined position into the central opening 38a of the other cutting tool 36 held by the opposite tool holding part 48, and bringing the end face of the other cutting tool 36 into contact with the end face of the cutting tool 36 supported by the support shaft 24. Then, the attraction of the tool holding part 48 is released, and the other of the unloaded pair of cutting tools 36 is handed over to the support shaft 24.

[0128] As described above, in the auxiliary device 2 of this embodiment, it is possible to install it on the cutting device 170 that has been delivered to the user in the future, and to replace the cutting tool 36 of the cutting unit 174 installed on the cutting device 170.

[0129] Next, for the auxiliary device 2 with Figure 8 and Figure 9 In the case of the structure shown, the method of moving the trimming plate 142 or the end face correction fixture 156 into the cutting device 170 will be described.

[0130] When the trimming plate 142 is moved into the cutting device 170 using the auxiliary device 2, firstly, the lifting member of the holding member 146 lowers a pair of lifting plates 152, causing each suction pad 154 to contact two trimming plates 142 stored in the trimming plate storage section 144. Next, the suction member generates an attractive force on each suction pad 154, using the suction pads 154 to hold and attract the trimming plate 142. Then, the lifting plates 152 holding the trimming plate 142 are raised.

[0131] Next, after adjusting the Y-axis and Z-axis positions of the loading / unloading unit 6 relative to the cutting device 170 via the Y-axis positioning unit 8 and the Z-axis moving mechanism 10, as follows... Figure 21 As shown, the X-axis moving mechanism 12 (which serves as the first X-axis moving mechanism, cylinder 130, and the second X-axis moving mechanism 136) moves the loading and unloading unit 6 toward the cutting device 170, positioning the trimming plate 142, which is attracted and held by the lifting plate 152, above the auxiliary worktable 194.

[0132] Next, the lifting plate 152 is lowered so that the lower surface of the trimming plate 142 contacts the upper surface of the auxiliary worktable 194. Then, a suction force is generated in each suction hole 196 of the auxiliary worktable 194, using the auxiliary worktable 194 to hold the trimming plate 142 in place, and the suction force of the holding member 146 is released. Thus, the auxiliary device 2 can be later installed on the cutting device 170 already delivered to the user, allowing the trimming plate 142 to be moved into the cutting device 170.

[0133] Then, the spindle housing 212 is moved along the Y-axis using the Y-axis feed member 178. After the cutting tool 36 mounted on the cutting unit 174 is positioned above the dressing plate 142, the spindle housing 212 is lowered using the Z-axis feed member 180, and the cutting edge 40 of the high-speed rotating cutting tool 36 cuts the dressing plate 142. This allows for the trimming (sharpening) of the cutting edge 40 of the cutting tool 36.

[0134] Furthermore, when using the auxiliary device 2 to move the end-face correction fixture 156 into the cutting device 170, firstly, the lifting member of the holding member 146 lowers a pair of lifting plates 152, causing each suction pad 154 to contact the upper surface of the base plate 160 of the pair of end-face correction fixtures 156 stored in the end-face correction fixture storage section 158. Next, the suction member generates an attractive force on each suction pad 154, and the end-face correction fixture 156 is held in place by the suction pads 154. Then, the lifting plates 152 holding the end-face correction fixture 156 are raised.

[0135] Next, after adjusting the Y-axis and Z-axis positions of the loading / unloading unit 6 relative to the cutting device 170 via the Y-axis positioning unit 8 and the Z-axis moving mechanism 10, as follows... Figure 22 As shown, the X-axis moving mechanism 12 moves the loading and unloading unit 6 toward the cutting device 170, positioning the end face correction fixture 156, which is attracted and held by the lifting plate 152, above the auxiliary worktable 194.

[0136] Next, the lifting plate 152 is lowered, bringing the lower surface of the substrate 160 of the end-face correction fixture 156 into contact with the upper surface of the sub-worktable 194. Then, a suction force is generated in each suction hole 196 of the sub-worktable 194, using the sub-worktable 194 to hold the end-face correction fixture 156 in place, and the suction force of the holding member 146 is released. Thus, in the auxiliary device 2, it can be later installed on the cutting device 170 already delivered to the user, allowing the end-face correction fixture 156 to be moved into the cutting device 170.

[0137] Then, after removing the fixing nut 222 and cutting tool 36 from the spindle 220 of the cutting unit 174 using the tool holding part 48 and the fixing nut holding part 50 of the loading / unloading unit 6, the Z-axis feed member 180 is activated, causing the bearing part 226b of the mounting flange 226 of the spindle 220 to face the grinding wheel 162 of the end face finishing fixture 156. Next, the spindle housing 212 is moved along the Y-axis direction using the Y-axis feed member 178, causing the bearing part 226b of the rotating spindle 220 to contact the grinding wheel 162 of the end face finishing fixture 156. As a result, the bearing part 226b (outer peripheral end face) of the mounting flange 226 can be ground and flattened using the grinding wheel 162.

[0138] Furthermore, in this embodiment, an example was described where the transfer-in / delivery unit 6 of the auxiliary device 2 has four tool holding portions 48 and two fixing nut holding portions 50, corresponding to a pair of cutting units 174 provided in the cutting device 170. However, if a single cutting unit 174 is provided in the cutting device 170, the transfer-in / delivery unit 6 only needs to have two tool holding portions 48 and one fixing nut holding portion 50. Additionally, if a single cutting unit 174 is provided in the cutting device 170, the holding member 146 that holds the trimming plate 142 and the end face correction fixture 156 can also be a single unit.

Claims

1. An auxiliary device connected to a cutting device, The cutting device has the following features: A chuck table has a holding surface for holding the workpiece. The cutting unit is equipped with a cutting tool that cuts the workpiece held by the chuck table by means of a fixing nut; The X-axis feed component feeds the chuck table along the X-axis direction for machining. The Y-axis feed member indexes and feeds the cutting unit along the Y-axis direction, which is perpendicular to the X-axis direction; and The Z-axis feed component feeds the cutting unit along the Z-axis direction, which is perpendicular to the X-axis and Y-axis directions. The retaining surface is defined by the X-axis direction and the Y-axis direction. in, The auxiliary device has at least the following features: A cutting tool storage unit that stores multiple cutting tools; The inbound and outbound unit is used to move cutting tools out of and into the cutting tool storage unit. The Y-axis positioning unit positions the loading / unloading unit relative to the cutting tool storage unit in the Y-axis direction at both the active and retraction positions. Z-axis moving mechanism, which causes the loading / unloading unit to move along the Z-axis direction; as well as The X-axis moving mechanism moves the loading / unloading unit along the X-axis direction to align the X-axis position of the cutting tool mounted on the spindle of the cutting unit with the X-axis position of the cutting tool removed from the cutting tool storage unit by the loading / unloading unit. This positions the cutting tool removed from the cutting tool storage unit by the loading / unloading unit in a position where it can be replaced with the cutting tool mounted on the spindle of the cutting unit. The move-out and move-in unit includes at least: The Z-axis of rotation extends along the Z-axis direction; A tool holder that attracts and holds the cutting tool; and A retaining part for fixing the nut, which engages with or unscrews the external thread formed at the front end of the spindle. The loading / unloading unit has two tool holders for each fixed nut holder. The tool holder and the fixing nut holder are radially connected to the Z-axis in such a way that two tool holders are provided every other fixing nut holder in the circumferential direction.

2. The auxiliary device according to claim 1, wherein, This cutting tool storage unit includes: A drive gear having a first rotating shaft extending along the Y-axis direction; The driven gear is separated from the driving gear along the Z-axis direction and has a second rotational shaft extending along the Y-axis direction; An infinite track, which is wound around the driving gear and the driven gear; as well as A support shaft, extending along the Y-axis, is arranged at predetermined intervals on the infinite track. The support shaft is inserted into the central opening of the cutting tool to support the cutting tool.

3. The auxiliary device according to claim 2, wherein, The auxiliary device can adjust the distance between the drive gear and the driven gear in the Z-axis direction, and can also adjust the length of the infinite track.

4. The auxiliary device according to claim 1, wherein, The loading and unloading unit is mounted on a frame, which is supported by a guide rail extending along the Y-axis of the lifting worktable and is slidable. The frame is positioned relative to the cutting tool storage unit in the Y-axis direction at the active position and the retraction position.

5. The auxiliary device according to claim 4, wherein, The loading / unloading unit is disposed on a first movable body, which is disposed inside the frame. The first movable body is supported and can slide by being suspended on a first guide rail extending along the X-axis direction at the lower part of the second movable body. The second movable body is supported and can slide by being suspended on a second guide rail extending along the X-axis direction at the top of the frame. The loading / unloading unit is configured to move freely in and out along the X-axis direction via the first movable body and the second movable body.

6. The auxiliary device according to claim 5, wherein, The bottom of the frame is provided with a dressing plate storage part for storing a dressing plate used to dress cutting tools, and the first moving body is provided with a holding member for holding the dressing plate stored in the dressing plate storage part.

7. The auxiliary device according to claim 6, wherein, The bottom of the frame is provided with an end face correction fixture storage part, which stores an end face correction fixture for trimming the outer peripheral end face of the mounting flange. The mounting flange is formed at the front end of the spindle of the cutting unit to support the back of the cutting tool. The end face correction fixture is held by the holding member provided on the first moving body.

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