Laser crystallization apparatus

Abstract

A laser crystallization apparatus according to an embodiment includes a light source unit that irradiates a laser beam, and an optical unit into which the laser beam is incident, wherein the optical unit includes a first portion and a second portion that are bonded to each other on a bonding surface, and a first width of the first portion and a second width of the second portion are identical to each other on the bonding surface based on a direction parallel to an incident direction of the laser beam.

Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2021-0000899, filed on January 5, 2021, which is incorporated herein by reference for all purposes, as fully set forth herein. Technical Field

[0003] The embodiments of the invention generally relate to a laser crystallization apparatus. Background Technology

[0004] Liquid crystal displays (LCDs) and organic light-emitting diode (OLEDs), as types of flat panel displays, can be manufactured to be thin and light, thus they are commonly used as display devices for mobile electronic devices, and their applications are expanding to large-scale display devices. In particular, research on such display devices is actively underway due to the growing demand for display devices requiring high-speed operation characteristics.

[0005] To meet the high-speed operation requirements of display devices, the channel region of thin-film transistors (TFTs) is formed by using polycrystalline silicon instead of amorphous silicon.

[0006] As a method for forming polycrystalline silicon, an annealing method using lasers has been disclosed.

[0007] Meanwhile, as the glass substrates used to form display devices become larger, it is important to irradiate the wide area with a laser beam.

[0008] The information disclosed in this background section is only for understanding the background of the inventive concept, and therefore may contain information that does not constitute prior art. Summary of the Invention

[0009] The embodiments aim to provide a laser crystallization device capable of irradiating a large area (or wide area) with a laser beam without increasing manufacturing costs.

[0010] Additional features of the inventive concept will be set forth in the description which follows, and in part will be obvious from the description or may be learned by practice of the inventive concept.

[0011] A laser crystallization apparatus according to an embodiment includes: a light source unit for irradiating a laser beam; and an optical unit to which the laser beam is incident in an incident direction. The optical unit includes a first portion and a second portion joined together on a bonding surface, and based on a direction parallel to the incident direction of the laser beam, a first width of the first portion and a second width of the second portion are identical on the bonding surface.

[0012] The first length of the first portion and the second length of the second portion may be different from each other, depending on the direction perpendicular to the incident direction of the laser beam.

[0013] The first part and the second part can be joined by optical contact or welding.

[0014] The bonding surface can be parallel to the incident direction of the laser beam.

[0015] The bonding surface can be tilted to form a predetermined angle with the incident direction of the laser beam.

[0016] Based on a direction perpendicular to the incident direction of the laser beam, the width of the bonding surface can be from about 0.3% to about 0.6% of the length of the optical unit.

[0017] Based on the direction perpendicular to the incident direction of the laser beam, the length of the optical unit can be from about 2000 mm to about 2500 mm.

[0018] According to another embodiment, a laser crystallization apparatus includes: a light source unit for irradiating a laser beam; and an optical unit into which the laser beam is incident in an incident direction, and the optical unit includes a plurality of sub-optical units, wherein each of the plurality of sub-optical units includes a first portion and a second portion joined together on a bonding surface, and the plurality of sub-optical units are arranged sequentially based on a direction parallel to the incident direction of the laser beam.

[0019] The plurality of sub-optical units may include a first sub-optical unit and a second sub-optical unit, and the length of the first portion of the first sub-optical unit may be different from the length of the first portion of the second sub-optical unit, based on a direction perpendicular to the incident direction of the laser beam.

[0020] The bonding surfaces of the first sub-optical unit and the second sub-optical unit may be configured to be offset from each other in a direction perpendicular to the incident direction of the laser beam.

[0021] Based on the direction parallel to the incident direction of the laser beam, the first width of the first portion and the second width of the second portion can be the same on the bonding surface.

[0022] The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit may be parallel to the incident direction of the laser beam.

[0023] The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit can be tilted to form a predetermined angle with the incident direction of the laser beam.

[0024] Based on the direction perpendicular to the incident direction of the laser beam, the width of the bonding surface of the first sub-optical unit may be from about 0.3% to about 0.6% of the length of the first sub-optical unit.

[0025] The length of the first sub-optical unit can be approximately 2000 mm to approximately 2500 mm.

[0026] The plurality of sub-optical units can be configured to combine along the incident direction of the laser beam.

[0027] The plurality of sub-optical units can be configured to be separated from each other along the incident direction of the laser beam.

[0028] The laser crystallization apparatus according to an embodiment includes: a light source unit for irradiating a laser beam; and an optical unit to which the laser beam is incident in an incident direction, the optical unit including a first portion and a second portion joined together on a bonding surface, and the bonding surface being inclined to form a predetermined angle with the incident direction of the laser beam.

[0029] According to the laser crystallization apparatus of the embodiment, the laser beam can irradiate a large area (or wide area) without increasing manufacturing costs.

[0030] The effects of the embodiments are not limited to those described above, and it is obvious that various extensions can be made without departing from the spirit and scope of the embodiments.

[0031] It will be understood that the foregoing general description and the following detailed description are exemplary and explanatory, and are intended to provide further explanation of the claimed invention. Attached Figure Description

[0032] The accompanying drawings illustrate exemplary embodiments of the invention and, together with the description, serve to explain the inventive concept. The drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0033] Figure 1 This is a schematic perspective view showing a laser crystallization apparatus according to an embodiment.

[0034] Figure 2 It is shown Figure 1 A view of a portion of a laser crystallization device.

[0035] Figure 3 This is a layout diagram showing a laser crystallization apparatus according to an embodiment.

[0036] Figure 4 It is a conceptual representation Figure 3 A perspective view of the optical unit of a laser crystallization device.

[0037] Figure 5 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0038] Figure 6 yes Figure 5 An exploded perspective view of the optical unit.

[0039] Figure 7 It is a conceptual graph illustrating the intensity variation of a laser beam passing through the optical unit of a laser crystallization apparatus according to an embodiment.

[0040] Figure 8 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0041] Figure 9 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0042] Figure 10 yes Figure 9 An exploded perspective view of the optical unit.

[0043] Figure 11 It is a conceptual graph illustrating the intensity variation of a laser beam passing through an optical unit of a laser crystallization apparatus according to another embodiment.

[0044] Figure 12 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment. Detailed Implementation

[0045] In the following description, numerous specific details are set forth for illustrative purposes to provide a thorough understanding of various exemplary embodiments or implementations of the invention. As used herein, "embodiment" and "implementation" are interchangeable terms as non-limiting examples of apparatus or methods employing one or more inventive concepts disclosed herein. However, it will be apparent that various exemplary embodiments may be practiced without these specific details or with one or more equivalent arrangements. In other instances, well-known structures and apparatuses are shown in block diagram form to avoid unnecessarily obscuring the various exemplary embodiments. Furthermore, the various exemplary embodiments may be different, but are not necessarily mutually exclusive. For example, a particular shape, configuration, and characteristic of an exemplary embodiment may be used or implemented in another exemplary embodiment without departing from the inventive concept.

[0046] Unless otherwise stated, the exemplary embodiments shown are to be understood as exemplary features providing different details of some ways in which the inventive concept can be implemented in practice. Therefore, unless otherwise stated, features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter, individually or collectively referred to as “elements”) of various embodiments may be additionally combined, separated, interchanged and / or rearranged without departing from the inventive concept.

[0047] Crosshairs and / or shading are typically used in accompanying drawings to clarify the boundaries between adjacent elements. Thus, unless otherwise specified, the presence or absence of crosshairs or shading does not express or indicate any preference or requirement for particular materials, material properties, dimensions, proportions, commonalities between illustrated elements, and / or any other characteristics, properties, or characteristics of the elements. Furthermore, in the accompanying drawings, the dimensions and relative dimensions of elements may be exaggerated for clarity and / or descriptive purposes. When exemplary embodiments can be implemented differently, a specific process sequence may be performed in a manner different from that described. For example, two consecutively described processes may be performed substantially simultaneously or in the reverse order of their description. Additionally, the same reference numerals denote the same elements.

[0048] When an element or layer is referred to as being "on," "connected to," or "bonded to" another element or layer, it can be directly on, directly connected to, or directly bonded to the other element or layer, or an intermediary element or layer may be present. However, when an element or layer is referred to as being "directly on," "directly connected to," or "directly bonded to" another element or layer, an intermediary element or layer is not present. Therefore, the term "connection" can refer to a physical connection, electrical connection, and / or fluid connection with or without an intermediary element. Furthermore, the first direction dx, the second direction dy, and the third direction dz are not limited to the three axes of a Cartesian coordinate system (such as the x-axis, y-axis, and z-axis) and can be interpreted in a broader sense. For example, the first direction dx, the second direction dy, and the third direction dz can be perpendicular to each other, or can represent different directions that are not perpendicular to each other. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0049] Although the terms “first,” “second,” etc., may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, without departing from the teachings of this disclosure, the first element discussed below may be referred to as the second element.

[0050] For descriptive purposes, spatial relative terms such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side” (e.g., as in a “sidewall”) may be used herein to describe the relationship of one element to another as shown in the accompanying drawings. Spatial relative terms are intended to include, in addition to the orientation depicted in the drawings, different orientations of the device during use, operation, and / or manufacture. For example, if the device in the drawings is flipped, an element described as “below” or “under” other elements or features would then be positioned “above” said other elements or features. Thus, the exemplary term “below” can include both orientations of above and below. Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or in other orientations), and the spatial relative terms used herein shall be interpreted accordingly.

[0051] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “the” are also intended to include the plural forms. Furthermore, when the terms “comprising,” “including,” “containing,” and / or “having” are used in this specification, they indicate the presence of the stated features, integrals, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than terms of degree, and thus are used to interpret the inherent biases of measurements, calculated values, and / or provided values ​​that would be recognized by one of ordinary skill in the art.

[0052] Various exemplary embodiments are described herein with reference to cross-sectional views and / or exploded views, which are schematic diagrams of idealized exemplary embodiments and / or intermediate structures. Thus, variations in the shapes illustrated will be expected, for example, due to manufacturing techniques and / or tolerances. Therefore, the exemplary embodiments disclosed herein should not be construed as limited to the shapes of the specifically shown areas, but rather include deviations in shape caused, for example, by manufacturing processes. In this way, the areas shown in the figures can be schematic in nature, and the shapes of these areas may not reflect the actual shapes of the areas of the device, and are not necessarily intended to be limiting.

[0053] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure is a part. Terms (such as those defined in a general dictionary) shall be interpreted as having a meaning consistent with their meaning in the context of the relevant field and shall not be interpreted in an ideal or overly formal sense unless expressly defined herein.

[0054] Figure 1 This is a schematic perspective view showing a laser crystallization apparatus according to an embodiment, and Figure 2 It is shown Figure 1 A view of a portion of a laser crystallization device.

[0055] First, refer to Figure 1 The laser crystallization device according to this embodiment includes a light source unit LS, a first optical unit OP1, a second optical unit M, a third optical unit OP2, a fourth optical unit W1, a fifth optical unit W2, and a conveyor stage 18.

[0056] According to the third direction dz, a substrate 14 including an amorphous silicon (a-Si) thin film 16 is disposed on a transfer stage 18, and a linear laser beam 20 generated from the laser crystallization apparatus according to this embodiment irradiates the amorphous silicon thin film 16 from top to bottom in a direction parallel to the third direction dz to perform scanning along the scanning direction.

[0057] At this time, the position of the laser beam 20 is fixed, and the conveyor stage 18 can move in the conveying direction a2. That is, by moving the conveyor stage 18, the laser beam 20 scans the amorphous silicon thin film 16 to be irradiated in a scanning direction opposite to the conveying direction a2, and the amorphous silicon in the scanning area 16a can be converted into polycrystalline silicon (Poly-Si) after melting through a solidification process.

[0058] The laser beam 20 can have a linear shape extending in the first direction dx, and when a laser beam of uniform intensity is irradiated in the first direction dx and the second direction dy, the crystallization operation of changing to polycrystalline silicon can be completed uniformly.

[0059] The first optical unit OP1 can be a long-axis lens, the second optical unit M can be a reflector, the third optical unit OP2 can be a short-axis lens, and the fourth optical unit W1 and the fifth optical unit W2 can be windows. The short-axis lens can be a condenser lens or an imaging lens, but the embodiment is not limited to this. The first optical unit OP1, the second optical unit M, the third optical unit OP2, the fourth optical unit W1, and the fifth optical unit W2 are not limited to this and can be different optical devices.

[0060] The laser beam B supplied from the light source unit LS passes through the first optical unit OP1 and converges along its long axis. After its path changes in the second optical unit M, it passes through the third optical unit OP2 and diverges along its short axis, passing through the fourth optical unit W1 and the fifth optical unit W2, thus being supplied as a linear laser beam 20. Figure 2 As shown, laser beam B may include multiple collinear beams.

[0061] According to the laser crystallization apparatus of the illustrated embodiment, the laser crystallization apparatus is described as including a first optical unit OP1, a second optical unit M, a third optical unit OP2, a fourth optical unit W1, and a fifth optical unit W2; however, the embodiment is not limited thereto. It may further include multiple different optical systems, and some of the first optical unit OP1, the second optical unit M, the third optical unit OP2, the fourth optical unit W1, and the fifth optical unit W2 may be omitted.

[0062] Next, refer to Figure 3 and Figure 4 The optical unit of the laser crystallization apparatus according to the embodiments is described in more detail. Figure 3 This is a layout diagram showing a laser crystallization apparatus according to an embodiment, and Figure 4 It is a conceptual representation Figure 3 A perspective view of the optical unit of a laser crystallization device.

[0063] refer to Figure 3 According to an embodiment, the laser crystallization apparatus includes a first optical unit OP1, a second optical unit M, a third optical unit OP2, a fourth optical unit W1, and a fifth optical unit W2 through which a laser beam B supplied from a light source unit LS passes.

[0064] The first optical unit OP1 includes a first part OP1a and a second part OP1b. The first part OP1a and the second part OP1b of the first optical unit OP1 are joined together. The first part OP1a and the second part OP1b of the first optical unit OP1 can be joined together by optical contact or welding.

[0065] The first length La of the first portion OP1a of the first optical unit OP1 and the second length Lb of the second portion OP1b of the first optical unit OP1 may be different from each other, but the embodiments are not limited thereto. The first length La of the first portion OP1a of the first optical unit OP1 and the second length Lb of the second portion OP1b of the first optical unit OP1 may be the same as each other. Here, the first length La and the second length Lb are lengths measured based on a direction perpendicular to the direction in which the laser beam B is incident on the first optical unit OP1. In the following, the term "incident direction of laser beam B" may be used to refer to the direction in which the laser beam B is incident on the corresponding optical unit (e.g., the first optical unit OP1, the second optical unit M, the third optical unit OP2, the fourth optical unit W1, or the fifth optical unit W2; or, sub-optical units O1, O2, O3, O4, or O5, etc.).

[0066] The sum of the first length La of the first part OP1a of the first optical unit OP1 and the second length Lb of the second part OP1b of the first optical unit OP1, La+Lb, can be approximately 2000mm to 2500mm.

[0067] The junction of the first portion OP1a and the second portion OP1b of the first optical unit OP1 can be parallel to the incident direction of the laser beam B. Furthermore, at this junction, the width of the first portion OP1a measured in the direction parallel to the incident direction of the laser beam B and the width of the second portion OP1b measured in the same direction can be the same. Additionally, the widths of the first portion OP1a and the second portion OP1b can vary as the surface of the first optical unit OP1 curves downwards from its center to its outer edge.

[0068] Similarly, the second optical unit M includes a first portion Ma and a second portion Mb combined with each other, and the first length La of the first portion Ma and the second length Lb of the second portion Mb of the second optical unit M may be different, but the embodiments are not limited thereto. The first length La of the first portion Ma and the second length Lb of the second portion Mb of the second optical unit M may be the same as each other. The sum La+Lb of the first length La of the first portion Ma and the second length Lb of the second portion Mb of the second optical unit M may be approximately 2000 mm to 2500 mm. Here, the first length La and the second length Lb are lengths measured based on a direction perpendicular to the direction in which the laser beam B is incident on the second optical unit M.

[0069] Furthermore, the junction of the first portion Ma and the second portion Mb of the second optical unit M can be parallel to the incident direction of the laser beam B. At the junction of the first portion Ma and the second portion Mb of the second optical unit M, the width of the first portion Ma in the direction parallel to the incident direction of the laser beam B and the width of the second portion Mb in the direction parallel to the incident direction of the laser beam B can be the same.

[0070] Similarly, the third optical unit OP2 includes a first portion OP2a and a second portion OP2b combined with each other, and the first length La of the first portion OP2a and the second length Lb of the second portion OP2b of the third optical unit OP2 may be different, but the embodiments are not limited thereto. The first length La of the first portion OP2a and the second length Lb of the second portion OP2b of the third optical unit OP2 may be the same as each other. The sum La+Lb of the first length La of the first portion OP2a and the second length Lb of the second portion OP2b of the third optical unit OP2 may be approximately 2000 mm to 2500 mm. Here, the first length La and the second length Lb are lengths measured based on a direction perpendicular to the direction in which the laser beam B is incident on the third optical unit OP2.

[0071] Furthermore, the junction of the first part OP2a and the second part OP2b of the third optical unit OP2 can be parallel to the incident direction of the laser beam B, and at the junction of the first part OP2a and the second part OP2b of the third optical unit OP2, the width of the first part OP2a in the direction parallel to the incident direction of the laser beam B and the width of the second part OP2b in the direction parallel to the incident direction of the laser beam B can be the same as each other.

[0072] Additionally, the fourth optical unit W1 includes a first portion W1a and a second portion W1b joined together. The first length La of the first portion W1a and the second length Lb of the second portion W1b may be different, but the embodiment is not limited to this. The first length La of the first portion W1a and the second length Lb of the second portion W1b may be the same. The sum La+Lb of the first length La of the first portion W1a and the second length Lb of the second portion W1b may be approximately 2000 mm to 2500 mm. Here, the first length La and the second length Lb are lengths measured based on a direction perpendicular to the direction in which the laser beam B is incident on the fourth optical unit W1.

[0073] Furthermore, the junction of the first part W1a and the second part W1b of the fourth optical unit W1 can be parallel to the incident direction of the laser beam B, and at the junction of the first part W1a and the second part W1b of the fourth optical unit W1, the width of the first part W1a in the direction parallel to the incident direction of the laser beam B and the width of the second part W1b in the direction parallel to the incident direction of the laser beam B can be the same as each other.

[0074] Similarly, the fifth optical unit W2 includes a first portion W2a and a second portion W2b joined together, and the first length La of the first portion W2a and the second length Lb of the second portion W2b of the fifth optical unit W2 may be different, but the embodiments are not limited thereto. The first length La of the first portion W2a and the second length Lb of the second portion W2b of the fifth optical unit W2 may be the same as each other. The sum La+Lb of the first length La of the first portion W2a and the second length Lb of the second portion W2b of the fifth optical unit W2 may be approximately 2000 mm to 2500 mm. Here, the first length La and the second length Lb are lengths measured based on a direction perpendicular to the direction in which the laser beam B is incident on the fifth optical unit W2.

[0075] Furthermore, the junction of the first part W2a and the second part W2b of the fifth optical unit W2 can be parallel to the incident direction of the laser beam B, and at the junction of the first part W2a and the second part W2b of the fifth optical unit W2, the width of the first part W2a in the direction parallel to the incident direction of the laser beam B and the width of the second part W2b in the direction parallel to the incident direction of the laser beam B can be the same as each other.

[0076] The first length La of the first part OP1a of the first optical unit OP1 may be different from the first length La of the first part Ma of the second optical unit M, or the first length La of the first part OP1a of the first optical unit OP1 may be the same as the first length La of the first part Ma of the second optical unit M. Furthermore, the second length Lb of the second part OP1b of the first optical unit OP1 may be different from the second length Lb of the second part Mb of the second optical unit M, or the second length Lb of the second part OP1b of the first optical unit OP1 may be the same as the second length Lb of the second part Mb of the second optical unit M.

[0077] The first length La of the first part Ma of the second optical unit M may be different from the first length La of the first part OP2a of the third optical unit OP2, or the first length La of the first part Ma of the second optical unit M may be the same as the first length La of the first part OP2a of the third optical unit OP2. Furthermore, the second length Lb of the second part Mb of the second optical unit M may be different from the second length Lb of the second part OP2b of the third optical unit OP2, or the second length Lb of the second part Mb of the second optical unit M may be the same as the second length Lb of the second part OP2b of the third optical unit OP2.

[0078] The first length La of the first part OP2a of the third optical unit OP2 may be different from the first length La of the first part W1a of the fourth optical unit W1, or the first length La of the first part OP2a of the third optical unit OP2 may be the same as the first length La of the first part W1a of the fourth optical unit W1. Furthermore, the second length Lb of the second part OP2b of the third optical unit OP2 may be different from the second length Lb of the second part W1b of the fourth optical unit W1, or the second length Lb of the second part OP2b of the third optical unit OP2 may be the same as the second length Lb of the second part W1b of the fourth optical unit W1.

[0079] The first length La of the first part W1a of the fourth optical unit W1 may be different from the first length La of the first part W2a of the fifth optical unit W2, or the first length La of the first part W1a of the fourth optical unit W1 may be the same as the first length La of the first part W2a of the fifth optical unit W2.

[0080] In addition, the second length Lb of the second part W1b of the fourth optical unit W1 may be different from the second length Lb of the second part W2b of the fifth optical unit W2, or the second length Lb of the second part W1b of the fourth optical unit W1 may be the same as the second length Lb of the second part W2b of the fifth optical unit W2.

[0081] The first length La of the first portion W2a of the fifth optical unit W2 may be different from the first length La of the first portion OP1a of the first optical unit OP1, or the first length La of the first portion W2a of the fifth optical unit W2 may be the same as the first length La of the first portion OP1a of the first optical unit OP1. Furthermore, the second length Lb of the second portion W2b of the fifth optical unit W2 may be different from the second length Lb of the second portion OP1b of the first optical unit OP1, or the second length Lb of the second portion W2b of the fifth optical unit W2 may be the same as the second length Lb of the second portion OP1b of the first optical unit OP1.

[0082] according to Figure 3 The embodiments described describe each of the optical units OP1, M, OP2, W1 and W2 of the laser crystallization apparatus as including a first part and a second part combined with each other; however, it is not limited thereto, and at least one of the optical units OP1, M, OP2, W1 and W2 of the laser crystallization apparatus may include a first part and a second part combined with each other.

[0083] Now, for reference Figure 4 A more detailed description based on Figure 3 The structure of the optical units OP1, M, OP2, W1 and W2 of the laser crystallization device in the embodiment.

[0084] according to Figure 3 At least one of the optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus in the embodiment can be connected with Figure 4 The optical unit OP shown has the same structure.

[0085] refer to Figure 4 According to an embodiment, the optical unit OP of the laser crystallization apparatus includes a first portion Pa and a second portion Pb bonded together with each other. The first portion Pa and the second portion Pb of the optical unit OP may comprise glass.

[0086] The first part Pa and the second part Pb of the optical unit OP can be joined together at the boundary between the first part Pa and the second part Pb by a joining element such as optical contact or welding. The joining surface Sab of the first part Pa and the second part Pb of the optical unit OP can be parallel to the incident direction of the laser beam B.

[0087] The bonding surface Sab at the boundary between the first portion Pa and the second portion Pb comprises a material layer assembly including a portion of the first portion Pa adjacent to the boundary, a bonding element, and a portion of the second portion Pb adjacent to the boundary. The bonding surface Sab may have a thickness as described herein.

[0088] In the bonding surface Sab of the first part Pa and the second part Pb of the optical unit OP, the first width Wa of the first part Pa measured in a direction parallel to the incident direction of the laser beam B and the second width Wb of the second part Pb measured in a direction parallel to the incident direction of the laser beam B can be the same.

[0089] As the glass substrates used to form display devices become larger, laser crystallization equipment can irradiate a wide area with a laser beam, and for this purpose, the size of the optical units in the laser crystallization equipment can be increased. Manufacturing costs increase when forming large optical units from a single piece of glass.

[0090] The laser crystallization apparatus according to an embodiment includes an optical unit comprising a first portion and a second portion joined together, and the joining portion of the first portion and the second portion can be joined together by optical contact joining or welding. Therefore, by using a joining surface comprising multiple portions instead of a large integral portion, it is easier to diversify the shape and size of the optical unit and form a laser crystallization apparatus including optical units with large sizes, without increasing the manufacturing cost of the laser crystallization apparatus.

[0091] Next, refer to Figure 5 A laser crystallization apparatus according to another embodiment is described. Figure 5 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0092] As mentioned above Figure 3 As described, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have Figure 5 The structure of the optical unit OP shown is illustrated.

[0093] refer to Figure 5 According to this embodiment, the optical unit OP of the laser crystallization device may include multiple sub-optical units O1, O2, O3, O4 and O5.

[0094] The first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP can be connected to each other.

[0095] The first sub-optical unit O1 of the optical unit OP may include a first part O1a and a second part O1b combined with each other; the second sub-optical unit O2 of the optical unit OP may include a third part O2a and a fourth part O2b combined with each other; the third sub-optical unit O3 of the optical unit OP may include a fifth part O3a and a sixth part O3b combined with each other; the fourth sub-optical unit O4 of the optical unit OP may include a seventh part O4a and an eighth part O4b combined with each other; and the fifth sub-optical unit O5 of the optical unit OP may include a ninth part O5a and a tenth part O5b combined with each other.

[0096] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP are bonded to each other on the first bonding surface Sab1. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP are bonded to each other on the second bonding surface Sab2. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP are bonded to each other on the third bonding surface Sab3. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP are bonded to each other on the fourth bonding surface Sab4. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP are bonded to each other on the fifth bonding surface Sab5.

[0097] The first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can be parallel to the incident direction of the laser beam B incident on the optical unit OP. Furthermore, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight lines with each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0098] Now, for reference Figure 6 as well as Figure 5 A more detailed description Figure 5 Sub-optical units of the optical unit. Figure 6 yes Figure 5An exploded perspective view of the optical unit.

[0099] refer to Figure 6 and Figure 5 According to this embodiment, the optical unit OP of the laser crystallization device includes multiple sub-optical units O1, O2, O3, O4 and O5.

[0100] The first sub-optical unit O1 of the optical unit OP includes a first part O1a and a second part O1b bonded to each other on the first bonding surface Sab1, and the first length L01 of the first part O1a and the second length L11 of the first part O1b of the first sub-optical unit O1 of the optical unit OP may be different from each other or may be the same.

[0101] The first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP can be a surface parallel to the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the first part O1a of the first sub-optical unit O1 and the second width Wb of the second part O1b of the first sub-optical unit O1 can be the same as each other on the first bonding surface Sab1.

[0102] The second sub-optical unit O2 of the optical unit OP includes a third part O2a and a fourth part O2b bonded to each other on the second bonding surface Sab2, and the third length L02 of the third part O2a and the fourth length L12 of the fourth part O2b of the second sub-optical unit O2 of the optical unit OP may be different from or the same as each other.

[0103] The second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP can be parallel to a surface that is almost parallel to the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the third part O2a of the second sub-optical unit O2 and the second width Wb of the fourth part O2b of the second sub-optical unit O2 can be the same as each other on the second bonding surface Sab2.

[0104] The third sub-optical unit O3 of the optical unit OP may include a fifth part O3a and a sixth part O3b bonded to each other on the third bonding surface Sab3, and the fifth length L03 of the fifth part O3a and the sixth length L13 of the sixth part O3b of the third sub-optical unit O3 of the optical unit OP may be different from or the same as each other.

[0105] The third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP can be a surface that is almost parallel to the incident direction of the laser beam B, and based on the direction that is parallel to the incident direction of the laser beam B, the first width Wa of the fifth part O3a of the third sub-optical unit O3 and the second width Wb of the sixth part O3b of the third sub-optical unit O3 can be the same as each other on the third bonding surface Sab3.

[0106] The fourth sub-optical unit O4 of the optical unit OP includes a seventh part O4a and an eighth part O4b bonded to each other on the fourth bonding surface Sab4, and the seventh length L04 of the seventh part O4a and the eighth length L14 of the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP may be different from or the same as each other.

[0107] The fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP can be a surface that is almost parallel to the incident direction of the laser beam B, and based on the direction that is parallel to the incident direction of the laser beam B, the first width Wa of the seventh part O4a of the fourth sub-optical unit O4 and the second width Wb of the eighth part O4b of the fourth sub-optical unit O4 can be the same as each other on the fourth bonding surface Sab4.

[0108] The fifth sub-optical unit O5 of the optical unit OP may include a ninth part O5a and a tenth part O5b bonded to each other on the fifth bonding surface Sab5, and the ninth length L05 of the ninth part O5a and the tenth length L15 of the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP may be different from or the same as each other.

[0109] The fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can be a surface that is almost parallel to the incident direction of the laser beam B, and based on the direction that is parallel to the incident direction of the laser beam B, the first width Wa of the ninth part O5a of the fifth sub-optical unit O5 and the second width Wb of the tenth part O5b of the fifth sub-optical unit O5 can be the same as each other on the fifth bonding surface Sab5.

[0110] The first length L01 of the first part O1a of the first sub-optical unit O1 of the optical unit OP, the third length L02 of the third part O2a of the second sub-optical unit O2 of the optical unit OP, the fifth length L03 of the fifth part O3a of the third sub-optical unit O3 of the optical unit OP, the seventh length L04 of the seventh part O4a of the fourth sub-optical unit O4 of the optical unit OP, and the ninth length L05 of the ninth part O5a of the fifth sub-optical unit O5 of the optical unit OP can be different from each other. Here, the first length L01, the third length L02, the fifth length L03, the seventh length L04, and the ninth length L05 can be lengths measured in a direction perpendicular to the incident direction of the laser beam B.

[0111] Similarly, the second length L11 of the second part O1b of the first sub-optical unit O1 of the optical unit OP, the fourth length L12 of the fourth part O2b of the second sub-optical unit O2 of the optical unit OP, the sixth length L13 of the sixth part O3b of the third sub-optical unit O3 of the optical unit OP, the eighth length L14 of the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP, and the tenth length L15 of the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP can be different from each other. Here, the second length L11, the fourth length L12, the sixth length L13, the eighth length L14, and the tenth length L15 can be lengths measured in a direction perpendicular to the incident direction of the laser beam B.

[0112] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP can be joined together by optical contact or welding. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP can be joined together by optical contact or welding. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP can be joined together by optical contact or welding. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP can be joined together by optical contact or welding. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP can be joined together by optical contact or welding.

[0113] Furthermore, the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP can be arranged sequentially along the incident direction of the laser beam B, and the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP can be combined with each other by optical contact or welding.

[0114] Based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight on each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0115] According to the above Figure 5 and Figure 6 The embodiment shown describes an optical unit OP of a laser crystallization apparatus according to this embodiment, comprising five sub-optical units (i.e., a first sub-optical unit O1, a second sub-optical unit O2, a third sub-optical unit O3, a fourth sub-optical unit O4, and a fifth sub-optical unit O5), but is not limited thereto, and the number of multiple sub-optical units can be varied.

[0116] refer to Figure 7 as well as Figure 5 and Figure 6 The intensity variation of a laser beam passing through the optical unit of a laser crystallization apparatus according to an embodiment is described. Figure 7 It is a conceptual graph illustrating the intensity variation of a laser beam passing through the optical unit of a laser crystallization apparatus according to an embodiment.

[0117] refer to Figure 7 as well as Figure 5 and Figure 6 When the laser beam B passes through the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP, the intensity BL of the laser beam B can be reduced at the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP.

[0118] For reference here Figure 5 and Figure 6As described, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP of the laser crystallization apparatus according to the embodiment, since the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not arranged to be straight on each other, but are arranged to be offset from each other in a direction perpendicular to the incident direction of the laser beam B, the first bonding surface Sab1, the second bonding surface Sab2, the third bonding surface Sab3, the fourth bonding surface Sab4, and the fifth bonding surface Sab5, in which the intensity BL of the laser beam B changes, do not overlap with each other.

[0119] Therefore, the intensity BL of the laser beam B passing through the optical unit OP will not be concentrated at a specific location. Thus, by uniformly separating the bonding surfaces with respect to the width of the laser beam B, a uniform laser beam B can be supplied to the substrate 14 (see [reference]) according to the position of the bonding surfaces. Figure 1 ).

[0120] Next, refer to Figure 8 A laser crystallization apparatus according to another embodiment is described. Figure 8 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0121] As mentioned above Figure 3 As described, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have Figure 8 The structure of the optical unit OP shown is illustrated.

[0122] refer to Figure 8 According to this embodiment, the optical unit OP of the laser crystallization device may include a plurality of sub-optical units O1, O2, O3, O4 and O5 that are separate from each other.

[0123] The first sub-optical unit O1 of the optical unit OP may include a first part O1a and a second part O1b combined with each other; the second sub-optical unit O2 of the optical unit OP may include a third part O2a and a fourth part O2b combined with each other; the third sub-optical unit O3 of the optical unit OP may include a fifth part O3a and a sixth part O3b combined with each other; the fourth sub-optical unit O4 of the optical unit OP may include a seventh part O4a and an eighth part O4b combined with each other; and the fifth sub-optical unit O5 of the optical unit OP may include a ninth part O5a and a tenth part O5b combined with each other.

[0124] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP are bonded to each other on the first bonding surface Sab1. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP are bonded to each other on the second bonding surface Sab2. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP are bonded to each other on the third bonding surface Sab3. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP are bonded to each other on the fourth bonding surface Sab4. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP are bonded to each other on the fifth bonding surface Sab5.

[0125] The first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can be parallel to the incident direction of the laser beam B incident on the optical unit OP. Furthermore, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight lines with each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0126] according to Figure 8The embodiment shown describes an optical unit OP of a laser crystallization apparatus according to the embodiment, comprising five sub-optical units (i.e., a first sub-optical unit O1, a second sub-optical unit O2, a third sub-optical unit O3, a fourth sub-optical unit O4, and a fifth sub-optical unit O5), but is not limited thereto, and the number of multiple sub-optical units can be varied.

[0127] Based on the above references Figures 1 to 7 Many characteristics of the optical unit of the laser crystallization apparatus described in the embodiments can be applied to the optical unit of the laser crystallization apparatus according to this embodiment.

[0128] Next, refer to Figure 9 A laser crystallization apparatus according to another embodiment is described. Figure 9 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0129] As mentioned above Figure 3 The laser crystallization apparatus described herein, according to an embodiment, includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have Figure 9 The structure of the optical unit OP shown is illustrated.

[0130] refer to Figure 9 According to this embodiment, the optical unit OP of the laser crystallization device may include multiple sub-optical units O1, O2, O3, O4 and O5.

[0131] The first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 can be arranged sequentially according to the direction parallel to the incident direction of the laser beam B incident on the optical unit OP.

[0132] The first sub-optical unit O1 of the optical unit OP may include a first part O1a and a second part O1b combined with each other; the second sub-optical unit O2 of the optical unit OP may include a third part O2a and a fourth part O2b combined with each other; the third sub-optical unit O3 of the optical unit OP may include a fifth part O3a and a sixth part O3b combined with each other; the fourth sub-optical unit O4 of the optical unit OP may include a seventh part O4a and an eighth part O4b combined with each other; and the fifth sub-optical unit O5 of the optical unit OP may include a ninth part O5a and a tenth part O5b combined with each other.

[0133] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP are bonded to each other on the first bonding surface Sab1. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP are bonded to each other on the second bonding surface Sab2. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP are bonded to each other on the third bonding surface Sab3. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP are bonded to each other on the fourth bonding surface Sab4. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP are bonded to each other on the fifth bonding surface Sab5.

[0134] The bonding surfaces Sab1, Sab2, Sab3, Sab4 and Sab5 at the boundaries between the corresponding portions include a material layer assembly extending in a direction perpendicular to the laser beam B, the material layer assembly including a portion of the first portion adjacent to the boundary, a bonding element and a portion of the second portion adjacent to the boundary.

[0135] The first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP can form a first angle θ1 with the incident direction of the laser beam B; the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP can form a second angle θ2 with the incident direction of the laser beam B; the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP can form a third angle θ3 with the incident direction of the laser beam B; the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP can form a fourth angle θ4 with the incident direction of the laser beam B; and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can form a fifth angle θ5 with the incident direction of the laser beam B.

[0136] The first angle θ1, the second angle θ2, the third angle θ3, the fourth angle θ4, and the fifth angle θ5 can be less than approximately 45 degrees and can be equal to or different from each other.

[0137] Furthermore, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight on each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0138] Next, refer to Figure 10 as well as Figure 9 Detailed description Figure 9 Sub-optical units of the optical unit. Figure 10 yes Figure 9 An exploded perspective view of the optical unit.

[0139] refer to Figure 10 and Figure 9 According to this embodiment, the optical unit OP of the laser crystallization device includes multiple sub-optical units O1, O2, O3, O4 and O5.

[0140] The first sub-optical unit O1 of the optical unit OP includes a first part O1a and a second part O1b bonded to each other on the first bonding surface Sab1. The first length L01 of the first surface of the first part O1a and the second length L11 of the first surface of the second part O1b can be different from the first length L01-L of the second surface of the first part O1a facing the first surface and the second length L11+L of the second surface of the second part O1b of the first sub-optical unit O1, respectively.

[0141] Specifically, the first length L01-L of the second surface of the first portion O1a of the first sub-optical unit O1 can be shorter than the length difference (L) of the first length L01 of the first surface of the first portion O1a of the first sub-optical unit O1. The second length L11+L of the second surface of the second portion O1b of the first sub-optical unit O1 can be longer than the length difference (L) of the second length L11 of the first surface of the second portion O1b of the first sub-optical unit O1. That is, based on the direction perpendicular to the incident direction of the laser beam B, the width of the first bonding surface Sab1 of the first sub-optical unit O1 can be the same as the length difference (L).

[0142] The length difference (L) and the width of the first bonding surface Sab1 can be about 0.3% to about 0.6% of the overall length of the first sub-optical unit O1. For example, the overall length of the first sub-optical unit O1 is about 2200 mm, and the length difference (L) and the width of the first bonding surface Sab1 can be about 10 mm.

[0143] The width of the first bonding surface Sab1 refers to the width of the material layer assembly at the boundary between the first portion O1a and the second portion O1b, including the portion of the first portion O1a adjacent to the boundary, the portion of the second portion O1b adjacent to the boundary, and the bonding element. This material layer assembly represents other bonding surfaces discussed herein.

[0144] As described herein, the aforementioned length is measured in a direction perpendicular to the incident direction of the laser beam B.

[0145] Furthermore, the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP can form a first angle θ1 with the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the first part O1a of the first sub-optical unit O1 and the second width Wb of the second part O1b of the first sub-optical unit O1 can be the same as each other on the first bonding surface Sab1.

[0146] Similarly, the second sub-optical unit O2 of the optical unit OP includes a third part O2a and a fourth part O2b bonded to each other on the second bonding surface Sab2. The third length L02 of the first surface of the third part O2a and the fourth length L12 of the first surface of the fourth part O2b of the second sub-optical unit O2 can have a length difference (L) with the third length L02-L of the second surface of the third part O2a and the fourth length L12+L of the second surface of the fourth part O2b of the second sub-optical unit O2, respectively. That is, based on the direction perpendicular to the incident direction of the laser beam B, the width of the second bonding surface Sab2 on the second sub-optical unit O2 can be the same as the length difference (L).

[0147] The length difference (L) and the width of the second bonding surface Sab2 can be approximately 0.3% to approximately 0.6% of the overall length of the second sub-optical unit O2. For example, when the overall length of the second sub-optical unit O2 is approximately 2200 mm, the length difference (L) and the width of the second bonding surface Sab2 can be approximately 10 mm.

[0148] The length mentioned above is the length measured in a direction perpendicular to the incident direction of the laser beam B.

[0149] Furthermore, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP can form a second angle θ2 with the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the third part O2a of the second sub-optical unit O2 and the second width Wb of the fourth part O2b of the second sub-optical unit O2 can be the same as each other on the second bonding surface Sab2.

[0150] The third sub-optical unit O3 of the optical unit OP includes a fifth part O3a and a sixth part O3b bonded together on the third bonding surface Sab3. The fifth length L03 of the first surface of the fifth part O3a and the sixth length L13 of the first surface of the sixth part O3b of the third sub-optical unit O3 can have a length difference (L) with the fifth length L03-L of the second surface of the fifth part O3a and the sixth length L13+L of the second surface of the sixth part O3b of the third sub-optical unit O3, respectively. That is, based on a direction perpendicular to the incident direction of the laser beam B, the width of the third bonding surface Sab3 on the third sub-optical unit O3 can be the same as the length difference (L).

[0151] The length difference (L) and the width of the third bonding surface Sab3 can be approximately 0.3% to approximately 0.6% of the overall length of the third sub-optical unit O3. For example, when the overall length of the third sub-optical unit O3 is approximately 2200 mm, the length difference (L) and the width of the third bonding surface Sab3 can be approximately 10 mm.

[0152] All of the above lengths are measured in a direction perpendicular to the direction in which the laser beam B is incident.

[0153] Furthermore, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP can form a third angle θ3 with the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the fifth part O3a of the third sub-optical unit O3 and the second width Wb of the sixth part O3b of the third sub-optical unit O3 can be the same as each other on the third bonding surface Sab3.

[0154] The fourth sub-optical unit O4 of the optical unit OP includes a seventh portion O4a and an eighth portion O4b bonded together on the fourth bonding surface Sab4. The seventh length L04 of the first surface of the seventh portion O4a and the eighth length L14 of the first surface of the eighth portion O4b can have a length difference (L) with the seventh length L04-L of the second surface of the seventh portion O4a and the eighth length L14+L of the second surface of the eighth portion O4b, respectively. That is, based on a direction perpendicular to the incident direction of the laser beam B, the width of the fourth bonding surface Sab4 can be the same as the length difference (L) on the fourth sub-optical unit O4.

[0155] The length difference (L) and the width of the fourth bonding surface Sab4 can be approximately 0.3% to approximately 0.6% of the overall length of the fourth sub-optical unit O4. For example, when the overall length of the fourth sub-optical unit O4 is approximately 2200 mm, the length difference (L) and the width of the fourth bonding surface Sab4 can be approximately 10 mm.

[0156] All of the above lengths are measured in a direction perpendicular to the direction in which the laser beam B is incident.

[0157] Furthermore, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP can form a fourth angle θ4 with the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the seventh part O4a of the fourth sub-optical unit O4 and the second width Wb of the eighth part O4b of the fourth sub-optical unit O4 can be the same as each other on the fourth bonding surface Sab4.

[0158] Similarly, the fifth sub-optical unit O5 of optical unit OP includes a ninth portion O5a and a tenth portion O5b bonded to each other on the fifth bonding surface Sab5. The ninth length L05 of the first surface of the ninth portion O5a and the tenth length L15 of the first surface of the tenth portion O5b of the fifth sub-optical unit O5 can have a length difference (L) with the ninth length L05-L of the second surface of the ninth portion O5a and the tenth length L15+L of the second surface of the tenth portion O5b of the fifth sub-optical unit O5, respectively. That is, based on a direction perpendicular to the incident direction of the laser beam B, the width of the fifth bonding surface Sab5 can be equal to the length difference (L) on the fifth sub-optical unit O5.

[0159] The length difference (L) and the width of the fifth bonding surface Sab5 can be approximately 0.3% to approximately 0.6% of the overall length of the fifth sub-optical unit O5. For example, when the overall length of the fifth sub-optical unit O5 is approximately 2200 mm, the length difference (L) and the width of the fifth bonding surface Sab5 can be approximately 10 mm.

[0160] All of the above lengths are measured in a direction perpendicular to the direction in which the laser beam B is incident.

[0161] The fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can form a fifth angle θ5 with the incident direction of the laser beam B, and based on the direction parallel to the incident direction of the laser beam B, the first width Wa of the ninth part O5a of the fifth sub-optical unit O5 and the second width Wb of the tenth part O5b of the fifth sub-optical unit O5 can be the same as each other on the fifth bonding surface Sab5.

[0162] The first length L01 of the first part O1a of the first sub-optical unit O1 of the optical unit OP, the third length L02 of the third part O2a of the second sub-optical unit O2 of the optical unit OP, the fifth length L03 of the fifth part O3a of the third sub-optical unit O3 of the optical unit OP, the seventh length L04 of the seventh part O4a of the fourth sub-optical unit O4 of the optical unit OP, and the ninth length L05 of the ninth part O5a of the fifth sub-optical unit O5 of the optical unit OP can be different from each other. Here, the first length L01, the third length L02, the fifth length L03, the seventh length L04, and the ninth length L05 can be lengths measured in a direction perpendicular to the incident direction of the laser beam B.

[0163] Similarly, the second length L11 of the second part O1b of the first sub-optical unit O1 of the optical unit OP, the fourth length L12 of the fourth part O2b of the second sub-optical unit O2 of the optical unit OP, the sixth length L13 of the sixth part O3b of the third sub-optical unit O3 of the optical unit OP, the eighth length L14 of the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP, and the tenth length L15 of the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP can be different from each other. Here, the second length L11, the fourth length L12, the sixth length L13, the eighth length L14, and the tenth length L15 can be lengths measured in a direction perpendicular to the incident direction of the laser beam B.

[0164] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP can be joined together by optical contact or welding. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP can be joined together by optical contact or welding. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP can be joined together by optical contact or welding. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP can be joined together by optical contact or welding. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP can be joined together by optical contact or welding.

[0165] Furthermore, the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP can be arranged sequentially along a direction parallel to the incident direction of the laser beam B, and the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP can be combined with each other by optical contact or welding.

[0166] Based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight on each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0167] according to Figure 9 and Figure 10 The embodiment shown describes an optical unit OP of a laser crystallization apparatus according to the embodiment, comprising five sub-optical units (i.e., a first sub-optical unit O1, a second sub-optical unit O2, a third sub-optical unit O3, a fourth sub-optical unit O4, and a fifth sub-optical unit O5), but is not limited thereto, and the number of multiple sub-optical units can be varied.

[0168] Now, for reference Figure 11 as well as Figure 9 and Figure 10 The description describes the variation in intensity of a laser beam passing through the optical unit of a laser crystallization apparatus according to an embodiment. Figure 11 It is a conceptual graph illustrating the intensity variation of a laser beam passing through an optical unit of a laser crystallization apparatus according to another embodiment.

[0169] refer to Figure 11 as well as Figure 9 and Figure 10 When the laser beam B passes through the first sub-optical unit O1, the second sub-optical unit O2, the third sub-optical unit O3, the fourth sub-optical unit O4, and the fifth sub-optical unit O5 of the optical unit OP, the intensity BL of the laser beam B can be reduced at the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP.

[0170] For reference Figure 9 and Figure 10As described, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP of the laser crystallization apparatus according to the embodiment, since the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set in a straight line, but are set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B, the first bonding surface Sab1, the second bonding surface Sab2, the third bonding surface Sab3, the fourth bonding surface Sab4, and the fifth bonding surface Sab5, in which the intensity BL of the laser beam B changes, do not overlap with each other.

[0171] Therefore, the intensity BL of the laser beam B passing through the optical unit OP is not concentrated at a specific location, and thus a uniform laser beam B can be supplied to the substrate 14 substantially uniformly according to the position of the bonding surface (see...). Figure 1 ).

[0172] Next, refer to Figure 12 A laser crystallization apparatus according to another embodiment is described. Figure 12 This is a view showing an example of the optical unit of a laser crystallization apparatus according to another embodiment.

[0173] As mentioned above Figure 3 As described, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have Figure 12 The structure of the optical unit OP shown is illustrated.

[0174] refer to Figure 12 According to this embodiment, the optical unit OP of the laser crystallization device may include a plurality of sub-optical units O1, O2, O3, O4 and O5 that are separate from each other.

[0175] The first sub-optical unit O1 of the optical unit OP may include a first part O1a and a second part O1b combined with each other; the second sub-optical unit O2 of the optical unit OP may include a third part O2a and a fourth part O2b combined with each other; the third sub-optical unit O3 of the optical unit OP may include a fifth part O3a and a sixth part O3b combined with each other; the fourth sub-optical unit O4 of the optical unit OP may include a seventh part O4a and an eighth part O4b combined with each other; and the fifth sub-optical unit O5 of the optical unit OP may include a ninth part O5a and a tenth part O5b combined with each other.

[0176] The first part O1a and the second part O1b of the first sub-optical unit O1 of the optical unit OP are bonded to each other on the first bonding surface Sab1. The third part O2a and the fourth part O2b of the second sub-optical unit O2 of the optical unit OP are bonded to each other on the second bonding surface Sab2. The fifth part O3a and the sixth part O3b of the third sub-optical unit O3 of the optical unit OP are bonded to each other on the third bonding surface Sab3. The seventh part O4a and the eighth part O4b of the fourth sub-optical unit O4 of the optical unit OP are bonded to each other on the fourth bonding surface Sab4. And the ninth part O5a and the tenth part O5b of the fifth sub-optical unit O5 of the optical unit OP are bonded to each other on the fifth bonding surface Sab5.

[0177] The first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP can form a first angle θ1, a second angle θ2, a third angle θ3, a fourth angle θ4, and a fifth angle θ5 with the incident direction of the laser beam B incident on the optical unit OP, respectively. Furthermore, the first angle θ1, the second angle θ2, the third angle θ3, the fourth angle θ4, and the fifth angle θ5 can be the same as or different from each other.

[0178] Furthermore, based on the direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1, the second bonding surface Sab2 of the second sub-optical unit O2, the third bonding surface Sab3 of the third sub-optical unit O3, the fourth bonding surface Sab4 of the fourth sub-optical unit O4, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP are not set to be straight on each other, but can be set to be offset from each other in a direction perpendicular to the incident direction of the laser beam B.

[0179] according to Figure 12 The embodiment shown describes an optical unit of a laser crystallization apparatus according to the embodiment comprising five sub-optical units (i.e., a first sub-optical unit O1, a second sub-optical unit O2, a third sub-optical unit O3, a fourth sub-optical unit O4, and a fifth sub-optical unit O5), but is not limited thereto, and the number of multiple sub-optical units may vary.

[0180] Many characteristics of the optical units of the laser crystallization apparatus according to the embodiments described herein are applicable to all optical units of the laser crystallization apparatus according to this embodiment.

[0181] As described herein, the laser crystallization apparatus according to an embodiment includes a plurality of optical units, and at least one of the plurality of optical units includes a first portion and a second portion joined together. The at least one of the plurality of optical units may include a plurality of sub-optical units, each sub-optical unit including a first portion and a second portion joined together, and the plurality of sub-optical units may be joined together or separated from each other. Furthermore, the joining surfaces of the plurality of sub-optical units may be configured to be offset or offset from each other, rather than arranged in a straight line along a direction parallel to the incident direction of the laser beam. Therefore, a laser crystallization apparatus including optical units of large size can be formed without increasing the manufacturing cost of the laser crystallization apparatus, and the reduction in laser beam uniformity can be reduced.

[0182] Although certain embodiments and implementations have been described herein, other embodiments and modifications will be apparent from this description. Therefore, the inventive concept is not limited to such embodiments, but rather to the broader scope of the claims and various obvious modifications and equivalent arrangements that will be apparent to those skilled in the art.

Claims

1. A laser crystallization apparatus, wherein, The laser crystallization equipment includes: The light source unit illuminates the laser beam; and An optical unit, wherein the laser beam is incident on the optical unit in the incident direction. The optical unit includes multiple sub-optical units. Each of the plurality of sub-optical units comprises a first part and a second part that are joined together on a bonding surface. The plurality of sub-optical units are arranged sequentially and combined with each other based on a direction parallel to the incident direction of the laser beam. Wherein, based on a direction parallel to the incident direction of the laser beam, the first width of the first portion and the second width of the second portion are the same on the bonding surface.

2. The laser crystallization apparatus as described in claim 1, wherein, The first length of the first portion and the second length of the second portion are different from each other, based on a direction perpendicular to the incident direction of the laser beam.

3. The laser crystallization apparatus as described in claim 1, wherein, The first part and the second part are joined together by optical contact or welding.

4. The laser crystallization apparatus as described in claim 1, wherein, The bonding surface is parallel to the incident direction of the laser beam.

5. The laser crystallization apparatus as described in claim 1, wherein, The bonding surface is tilted to form a predetermined angle with the incident direction of the laser beam.

6. The laser crystallization apparatus as described in claim 5, wherein, Based on a direction perpendicular to the incident direction of the laser beam, the width of the bonding surface is 0.3% to 0.6% of the length of the optical unit.

7. The laser crystallization apparatus as described in claim 1, wherein, The multiple sub-optical units are joined together by optical contact or welding.

8. The laser crystallization apparatus as described in claim 1, wherein, The plurality of sub-optical units include a first sub-optical unit and a second sub-optical unit, and Based on a direction perpendicular to the incident direction of the laser beam, the length of the first portion of the first sub-optical unit is different from the length of the first portion of the second sub-optical unit.

9. The laser crystallization apparatus as described in claim 8, wherein, The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit are configured to be offset from each other in a direction perpendicular to the incident direction of the laser beam.

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