Laser processing apparatus and laser processing method

Abstract

The present application provides a laser processing device and a laser processing method. The laser processing device forms a modified region inside an object by irradiating laser light to the object. The laser processing device includes a support section, a laser light source, a spatial light modulator that modulates laser light in correspondence with a modulation pattern displayed on a display section, a condensing section that condenses the laser light modulated by the spatial light modulator to the object, an imaging section that receives the laser light modulated by the spatial light modulator via a lens, and a monitoring mode execution section that executes a monitoring mode in which the display section of the spatial light modulator displays a monitoring pattern that causes an imaging result of the imaging section to regularly change in correspondence with a collimation state of the laser light modulated by the spatial light modulator, and outputs information about the laser light modulated by the spatial light modulator, which is related to the imaging result of the imaging section.

Description

Technical Field

[0001] This invention relates to laser processing apparatus and laser processing method. Background Technology

[0002] Laser processing apparatuses are known to form modified regions inside an object by irradiating it with a laser (see, for example, Japanese Patent Application Publication No. 2011-051011). Such laser processing apparatuses include a support for supporting the object, a laser source for emitting laser light, a spatial light modulator for modulating the laser light emitted from the laser source, and a focusing section for focusing the laser light modulated by the spatial light modulator onto the object supported by the support. Summary of the Invention

[0003] In laser processing apparatuses like those described above, optimizing the collimation state of the laser modulated by the spatial light modulator is crucial, for example, in order to form a modified region with high precision inside the object. In this regard, in such laser processing apparatuses, it is difficult to determine whether the collimation state is optimal, for example, without attempting to move optical components such as lenses positioned along the laser's optical path.

[0004] Therefore, the object of the present invention is to provide a laser processing apparatus and a laser processing method that can easily determine whether the collimation state of the laser is optimal.

[0005] One aspect of the present invention is a laser processing apparatus that forms a modified region inside an object by irradiating it with a laser. The apparatus includes: a support for the object; a laser source emitting laser light; a display unit receiving laser light emitted from the laser source; a spatial light modulator that modulates the laser light according to a modulation pattern displayed on the display unit; a focusing unit that focuses the laser light modulated by the spatial light modulator onto the object supported by the support; a camera unit receiving the laser light modulated by the spatial light modulator via a lens; and a monitoring mode execution unit that executes a monitoring mode for monitoring the collimation state of the laser light modulated by the spatial light modulator. In the monitoring mode, the display unit of the spatial light modulator displays a modulation pattern, i.e., a monitoring pattern, that changes regularly with respect to the collimation state and the imaging result of the camera unit, and outputs information related to the imaging result of the laser light modulated by the spatial light modulator.

[0006] In this laser processing apparatus, when monitoring mode is executed, a monitoring pattern is displayed on the display unit of the spatial light modulator to modulate the laser. The laser is received by the camera unit via a lens, and information about the imaging results of the camera unit is output. The imaging results of the camera unit change regularly according to the monitoring pattern and the collimation state of the laser (hereinafter also simply referred to as "collimation state"). Therefore, the collimation state can be determined based on the output information about the imaging results without moving the lenses or the like positioned on the laser's optical path. In other words, it is easy to determine whether the laser's collimation state is optimal.

[0007] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may also be a modulation pattern representing the change in the ellipticity of the laser beam shape captured by the camera unit corresponding to the collimation state. In this case, the collimation state can be determined based on the ellipticity of the laser beam shape captured by the camera unit.

[0008] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may be a modulation pattern in which the shape of the laser beam captured by the camera becomes elliptical when the collimation state shifts from a parallel state to the diverging or converging side, and in the case where the collimation state is parallel, the shape of the laser beam captured by the camera becomes a circle or a shape closer to a circle than an ellipse. In this case, the state of collimation can be determined based on whether the shape of the laser beam captured by the camera is elliptical, circular, or closer to a circle than an ellipse.

[0009] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may also be a modulation pattern, i.e., an astigmatic pattern, that imparts astigmatism to the laser. Specifically, it is possible to achieve the following: when the collimation state shifts from a parallel state towards the diverging or converging side, the shape of the laser beam captured by the imaging unit becomes elliptical; and when the collimation state is parallel, the shape of the laser beam captured by the imaging unit becomes circular or a shape closer to a circle than an elliptical shape.

[0010] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may also be a modulation pattern, i.e., a cylindrical lens pattern, generated in a manner that achieves the function of a cylindrical lens. Specifically, this enables the following: when the collimation state shifts from a parallel state towards the diverging or converging side, the shape of the laser beam captured by the imaging unit becomes elliptical; and when the collimation state is parallel, the shape of the laser beam captured by the imaging unit becomes circular or a shape closer to a circle than an elliptical shape.

[0011] In one aspect of the laser processing apparatus of the present invention, in monitoring mode, information related to the ellipticity of the laser beam shape captured by the camera unit can also be output as output related to the imaging results of the camera unit. In this case, the collimation state can be determined from the output information about the ellipticity.

[0012] In one aspect of the laser processing apparatus of the present invention, the information related to ellipticity may also include the width of the beam shape in a first direction orthogonal to the optical axis of the laser and the width of the beam shape in a second direction orthogonal to both the optical axis of the laser and the first direction. In this case, the collimation state can be determined from the widths of the beam shapes in the first and second directions.

[0013] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may be a modulation pattern that varies in that the ellipticity deviates further from 1 as the collimation state shifts from a parallel state towards the divergence or convergence side. In monitoring mode, it is determined whether the ellipticity of the laser beam shape captured by the camera is within a specified range. If it is determined that the ellipticity is outside the specified range, a notification to draw attention is output as information related to the imaging result of the camera. Thus, for example, in the event of a device malfunction such as a shift of the collimation state towards the divergence or convergence side by a certain amount or more, the user can be alerted.

[0014] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may also be a modulation pattern that varies the number of peaks of a line profile in a predetermined direction with respect to the intensity of the laser captured by the imaging unit, corresponding to the collimation state. In this case, the state of the collimation can be determined based on the number of peaks of the line profile in a predetermined direction with respect to the intensity of the laser captured by the imaging unit (hereinafter also referred to as "line profile peak number").

[0015] In one aspect of the laser processing apparatus of the present invention, the monitoring pattern may also be a modulation pattern, i.e., a defocusing pattern, of at least two laser branches whose focal points are separated from each other in a predetermined direction and along the optical axis of the laser. This allows for a specific realization of a corresponding change in the number of peaks in the line profile and the collimation state.

[0016] In one aspect of the laser processing apparatus of the present invention, the monitoring mode execution unit may also have an input receiving unit that receives input from the user, and the monitoring mode is started when the user inputs an input to start the monitoring mode via the input receiving unit. Thus, the monitoring mode can be executed at the time desired by the user.

[0017] In one aspect of the laser processing apparatus of the present invention, the monitoring mode execution unit may include an information display unit that displays information related to the imaging results of the camera unit. In monitoring mode, as output of information related to the imaging results of the camera unit, the information display unit displays an image related to the beam shape of the laser beam captured by the camera unit. Thus, the collimation state can be determined from the image of the beam shape displayed on the information display unit.

[0018] One aspect of the laser processing apparatus of the present invention may also include a collimation state adjustment unit disposed between a laser source and a spatial light modulator in the laser's optical path, for adjusting the collimation state. In monitoring mode, a guide is provided for adjusting the collimation state adjustment unit to achieve a parallel collimation state based on the imaging results of the imaging unit. This allows for easy adjustment of the collimation state to a parallel state.

[0019] In one aspect of the laser processing apparatus of the present invention, the camera unit may also receive a portion of the laser beam branching off between the spatial light modulator and the focusing unit in the laser's optical path via a lens. In this case, a portion of the laser beam branching off between the spatial light modulator and the focusing unit can be utilized in monitoring mode.

[0020] In one aspect of the laser processing apparatus of the present invention, the camera unit may also receive the laser light reflected by the object via a focusing unit and a lens. In this case, the laser light reflected by the object can be utilized in monitoring mode.

[0021] The laser processing apparatus of one side of the present invention is a laser processing apparatus that forms a modified region inside an object by irradiating it with a laser. It includes: a support portion supporting the object; a laser source emitting laser light; a display portion having the laser emitted from the laser source incident on it; a spatial light modulator that modulates the laser light in accordance with a monitoring pattern displayed on the display portion; a focusing portion that focuses the laser light modulated by the spatial light modulator onto the object supported by the support portion; an imaging portion that receives the laser light modulated by the spatial light modulator via a lens; and an information display portion that displays information related to the imaging results of the imaging portion. The monitoring pattern is a modulation pattern in which the shape of the laser beam captured by the imaging portion becomes elliptical when the collimation state of the laser shifts from a parallel state to a diverging or converging state, and becomes a circular shape or a shape closer to a circle than an elliptical shape when the collimation state is parallel. The information display portion displays information related to the ellipticity of the laser beam shape captured by the imaging portion.

[0022] In this laser processing apparatus, when monitoring mode is executed, a monitoring pattern is displayed on the display unit of the spatial light modulator to modulate the laser. The laser beam is received by the camera unit via a lens, and information related to the ellipticity of the laser beam shape captured by the camera unit is displayed on the information display unit. The ellipticity of the laser beam shape captured by the camera unit changes regularly according to the monitoring pattern and the collimation state. Therefore, the collimation state can be determined based on the displayed information about the ellipticity without moving the lenses or other components positioned in the laser's optical path. In other words, it is easy to determine whether the laser's collimation state is optimal.

[0023] One aspect of the laser processing method of the present invention is a laser processing method that forms a modified region inside an object by irradiating the object with a laser. The method includes a monitoring step of monitoring the collimation state of a laser modulated by a spatial light modulator. The monitoring step includes: a first step of displaying a modulation pattern, i.e., a monitoring pattern, on a display unit of the spatial light modulator, such that the imaging result of an imaging unit receiving the laser modulated by the spatial light modulator via a lens changes regularly according to the collimation state; a second step of emitting laser light from a laser source, directing the emitted laser light onto the display unit of the spatial light modulator, modulating the laser light in accordance with the monitoring pattern displayed on the display unit, and receiving the modulated laser light via a lens through an imaging unit; and a third step of outputting information related to the imaging result of the imaging unit regarding the modulated laser light.

[0024] In this laser processing method, during the monitoring step, a monitoring pattern is displayed on the display unit of the spatial light modulator to modulate the laser. The laser is received by the camera unit via a lens, and information about the imaging result of the camera unit is output. The imaging result of the camera unit changes regularly according to the monitoring pattern and the collimation state. Therefore, the collimation state can be determined based on the output information about the imaging result without moving the lenses or the like positioned on the laser's optical path. That is, it is easy to determine whether the laser's collimation state is optimal. Attached Figure Description

[0025] Figure 1 This is a structural diagram illustrating the laser processing apparatus of the embodiment.

[0026] Figure 2 It means Figure 1 A structural diagram of a beam expander.

[0027] Figure 3 This is a diagram illustrating an example of a mosaic pattern.

[0028] Figure 4 It means Figure 1 An example image showing the display screen of a GUI.

[0029] Figure 5This is a flowchart illustrating the laser processing method of the implementation method.

[0030] Figure 6 This is a diagram illustrating the relationship between collimation state and image result information.

[0031] Figure 7 This is a structural diagram of a modified laser processing apparatus.

[0032] Figure 8 This is a flowchart illustrating a modified example of a laser processing method.

[0033] Figure 9 This is a diagram illustrating the relationship between collimation state and image result information.

[0034] Figure 10 This is a schematic diagram illustrating the focusing point of a branched laser beam passing through a defocused pattern. Detailed Implementation

[0035] The embodiments will now be described in detail with reference to the accompanying drawings. In the drawings, the same or equivalent parts are labeled with the same symbols, and repeated descriptions are omitted.

[0036] like Figure 1 As shown, the laser processing apparatus 1 includes a support unit 2, a laser source 3, a beam expander 4, a spatial light modulator 5, a focusing unit 6, a contour acquisition camera 7, a spot observation camera 8, an observation camera 9, and a control unit 10. The laser processing apparatus 1 is a device that forms a modified region 12 on an object 11 by irradiating it with a laser beam L. In the following description, the three mutually orthogonal directions are referred to as the X direction, Y direction, and Z direction. In this embodiment, the X direction is the first horizontal direction, the Y direction is the second horizontal direction perpendicular to the first horizontal direction, and the Z direction is the vertical direction.

[0037] Object 11 is a wafer formed in the shape of a disc. Object 11 is constructed by stacking a layer of functional elements on a semiconductor substrate. The semiconductor substrate is, for example, a silicon substrate. The functional element layer includes multiple functional elements arranged in a matrix on the semiconductor substrate. Each functional element is, for example, a light-receiving element such as a photodiode, a light-emitting element such as a laser diode, a circuit element such as a memory. Lines 15 are provided on object 11. Lines 15 are lines formed in a predetermined modified region 12. For example, lines 15 may also include grid lines that extend in a grid pattern between the multiple functional elements when viewed from the thickness direction of object 11. Each line 15 is an imaginary line set on object 11 by the laser processing apparatus 1. Alternatively, each line 15 may also be a line actually drawn on object 11.

[0038] The support 2 supports the object 11, for example, by adsorbing and attaching a thin film (not shown) to the object 11, such that the surface 11a, which serves as the laser incident surface of the object 11, is orthogonal to the Z direction. The support 2 is movable in both the X and Y directions. The support 2 is rotatable about a rotation axis along the Z direction. The laser source 3 emits laser L, for example, by pulse oscillation. Laser L is transmissive relative to the object 11. Laser L emitted from the laser source 3 is incident on the beam expander 4.

[0039] Beam expander 4 adjusts the diameter of laser L and collimates (parallelizes) laser L. For example... Figure 2 As shown, the beam expander 4 has a plurality of lenses 41 to 43 arranged along the optical axis of the laser L. The beam expander 4 is configured such that at least any one of the plurality of lenses 41 to 43 can move along the optical axis of the laser L. In the illustrated example, lens 41 can move along the optical axis of the laser L. The beam expander 4 adjusts the collimation state of the laser L by moving lens 41 along the optical axis. The beam expander 4 constitutes a collimation state adjustment unit. The laser L after passing through the beam expander 4 is incident on the spatial light modulator 5 via mirrors M1 and M2. The collimation state of the laser L includes a divergent state, a convergent state, and a parallel state where the laser L is neither divergent nor convergent. The laser L in the parallel collimation state is also called collimated light.

[0040] return Figure 1 A spatial light modulator 5 is disposed within the laser processing head H. The spatial light modulator 5 modulates the laser L emitted from the laser source 3. The spatial light modulator 5 is a reflective liquid crystal on silicon (LCOS) spatial light modulator (SLM). The spatial light modulator 5 has a display section 51 that serves as the liquid crystal layer on which the laser L is incident, and modulates the laser L in accordance with the modulation pattern displayed on the display section 51. The spatial light modulator 5 reflects and modulates the laser L.

[0041] The spatial light modulator 5 can change the phase of the laser L for each pixel of the display unit 51. That is, it can apply phase modulation to the laser L corresponding to the modulation pattern displayed on the display unit 51. In other words, the display unit 51 of the spatial light modulator 5 displays a modulation pattern as a holographic pattern to which modulation is applied. The wavefront of the laser L that is incident on the modulation pattern and passes through it is adjusted, and the phase of the component in the direction orthogonal to the direction of travel of each ray constituting the laser L is shifted. Therefore, by appropriately setting the modulation pattern displayed on the spatial light modulator 5, the laser L can be modulated (e.g., the intensity, amplitude, phase, polarization, etc. of the laser L can be modulated).

[0042] The spatial light modulator 5 controls the display of the display unit 51 via the control unit 10. As described later, the spatial light modulator 5 displays a monitoring pattern as a modulation pattern on the display unit 51 in monitoring mode (monitoring step), and causes the imaging result of the point observation camera 8 to change regularly in accordance with the collimation state of the laser L.

[0043] The focusing unit 6 focuses the laser L modulated by the spatial light modulator 5 onto the object 11 supported by the support unit 2. In this embodiment, the laser L reflected by the spatial light modulator 5 is reflected downwards along the Z direction by the dichroic mirror M3 and incident on the focusing unit 6. The focusing unit 6 focuses the incident laser L onto the object 11. The focusing unit 6 is constructed by mounting a lens unit containing multiple objective lenses on the bottom wall of the laser processing head H.

[0044] The contour acquisition camera 7 receives the laser L after it passes through the dichroic mirror M3 and is reflected by the dichroic mirror M4. In other words, the contour acquisition camera 7 receives a portion of the laser light branching off from the spatial light modulator 5 and the focusing section 6 in the optical path of the laser L. In the contour acquisition camera 7, the image of the laser L on the entrance pupil plane of the focusing section 6 is transferred (imaged) at its imaging plane. The image of the laser L on the entrance pupil plane of the focusing section 6 is the image of the laser L modulated by the spatial light modulator 5. Therefore, by monitoring the imaging results of the contour acquisition camera 7, the operating state of the spatial light modulator 5 can be grasped.

[0045] A contour acquisition camera 7 is disposed inside the laser processing head H. The contour acquisition camera 7 is connected to the control unit 10. The contour acquisition camera 7 outputs the captured image to the control unit 10. There are no particular limitations on the contour acquisition camera 7, and for example, a CMOS (Complementary Metal Oxide Semiconductor) image sensor can be used.

[0046] The spot observation camera 8 receives the laser L after it passes through the dichroic mirror M4 and is reflected by the mirror M5 via the lens 81. In other words, the spot observation camera 8 focuses and receives a portion of the laser L branching from the spatial light modulator 5 and the focusing part 6 in the optical path of the laser L through the lens 81. That is, the spot observation camera 8 can capture an image of the focused laser L modulated by the spatial light modulator 5. The focused image is the image (spot image) of the laser L focused by the lens 81. The spot observation camera 8 can capture an image of the focused spot of the laser L modulated by the spatial light modulator 5.

[0047] Lens 81 focuses the incident laser L onto the imaging surface of the spot observation camera 8. The distance between lens 81 and the imaging surface of the spot observation camera 8 along the optical axis of laser L is pre-adjusted to the focal distance f of lens 81. The spot observation camera 8 is fixed, for example, based on the design value (f value) of lens 81, at the position where the focal point of laser L is most contracted when it is incident on lens 81 as collimated light.

[0048] A spot observation camera 8 is disposed inside the laser processing head H. The spot observation camera 8 is connected to the control unit 10. The spot observation camera 8 outputs the captured image to the control unit 10. There are no particular limitations on the spot observation camera 8; for example, a CMOS image sensor can be used.

[0049] The observation camera 9 captures an image of the object 11 formed by visible light V emitted from the visible light source 91. Specifically, the visible light V emitted from the visible light source 91 is reflected by the dichroic mirror M6, passes through the dichroic mirror M3, and then illuminates the object 11 via the focusing unit 6. This visible light V is reflected at the surface 11a, which serves as the laser incident surface of the object 11, passes through the focusing unit 6 and the dichroic mirrors M3 and M6, and is received by the observation camera 9 via the lens 92. Markings (not shown) are provided along the optical path of the visible light V to assign scale lines to the visible light V.

[0050] An observation camera 9 is disposed within the laser processing head H. The observation camera 9 is connected to the control unit 10. The observation camera 9 outputs the captured visual image to the control unit 10. There are no particular limitations on the observation camera 9; for example, a CMOS image sensor can be used.

[0051] The control unit 10 controls the operation of each part of the laser processing apparatus 1. The control unit 10 is configured as a computer device including a processor, memory, storage, and communication devices. In the control unit 10, the processor executes software (programs) loaded into the memory, etc., controls the reading and writing of data in the memory and storage, and controls communication via the communication devices. Various types of data are stored in the control unit 10. The control unit 10 has a GUI (Graphical User Interface) 20.

[0052] GUI20 is the user interface unit. GUI20 may include at least one of a touch panel, keyboard, mouse, microphone, speaker, tablet terminal, and monitor. GUI20 may accept various data inputs from the user via at least one of touch input, keyboard input, mouse operation, and voice input. GUI20 may display various information on its display screen. GUI20 displays information related to the imaging results of the spot observation camera 8 on its display screen. GUI20 constitutes an input receiving unit and an information display unit.

[0053] In this embodiment, the control unit 10 executes a monitoring mode that monitors the collimation state (hereinafter also simply referred to as "collimation state") of the laser L modulated by the spatial light modulator 5. The control unit 10 starts the monitoring mode when the user inputs to start the monitoring mode via the GUI 20. The control unit 10 constitutes a monitoring mode execution unit.

[0054] In monitoring mode, a monitoring pattern is displayed on the display unit 51 of the spatial light modulator 5. The monitoring pattern is a modulation pattern that regularly changes according to the imaging result of the spot observation camera 8 based on the collimation state. The monitoring pattern has an intensity distribution on the image captured by the spot observation camera 8 that changes according to the collimation state, and can realize a numerical phase distribution that reflects the collimation state.

[0055] The monitoring pattern is a modulation pattern showing the change in the ellipticity of the laser beam shape (the shape of the focused image) captured by the spot-view camera 8 according to the collimation state. The monitoring pattern is a modulation pattern in which the laser beam shape captured by the spot-view camera 8 becomes elliptical when the collimation state shifts from a parallel state towards the diverging or converging side, and becomes a perfect circle when the collimation state is parallel. The elliptical shape includes not only a perfect ellipse, but also flattened circles, racetrack shapes, oblong shapes—in short, shapes with a long strip along the long side direction (major axis direction). The perfect circle shape includes not only a perfect circle, but also approximately a perfect circle.

[0056] Here, the display unit 51 displays a pattern for monitoring purposes. Figure 3 The astigmatic pattern HS is shown. The astigmatic pattern HS is a modulation pattern that imparts astigmatism to the laser L. The astigmatic pattern HS is a modulation pattern that varies in a manner that shifts from a parallel state towards the diverging or converging side as the collimation state is closer, and the ellipticity of the laser beam shape captured by the camera 8 at the light spot observation point is further away from 1. In addition, the monitoring pattern may be pre-derived based on the wavelength of the laser L and stored in the control unit 10. The monitoring pattern may also include correction patterns such as individual difference correction patterns for correcting individual differences generated in the laser processing apparatus 1.

[0057] In monitoring mode, image result information related to the imaging results of the laser L modulated by the spatial light modulator 5 and the spot observation camera 8 is output. In monitoring mode, as output of the image result information, information related to the ellipticity of the beam shape at the focal point of the laser L captured by the spot observation camera 8 is displayed on the GUI 20. The information related to the ellipticity includes the ellipticity, the spot width along the first axis, and the spot width along the second axis.

[0058] The spot width along the first axis is the width of the beam shape at the focal point of the laser L captured by the camera 8, orthogonal to the optical axis of the laser L (first direction). The spot width along the second axis is the width of the beam shape at the focal point of the laser L captured by the camera 8, orthogonal to both the optical axis of the laser L and the first axis (second direction). The ellipticity (hereinafter also simply referred to as "ellipticity") of the beam shape at the focal point of the laser L captured by the camera 8 is the value obtained by dividing the spot width along the first axis by the spot width along the second axis. Information related to ellipticity is not particularly limited; other information may be included as long as it pertains to ellipticity.

[0059] In monitoring mode, as output of the imaging results, the GUI20 displays an image (hereinafter also referred to as the "focus image") relating to the beam shape at the focal point of the laser L captured by the spot observation camera 8. The focus image contains the shape of the focus image of the laser L. The focus image may also contain the intensity distribution at the focus image of the laser L.

[0060] In monitoring mode, it is determined whether the ellipticity is within a specified range. This specified range is predetermined and stored in the control unit 10. For example, the specified range is 1.0 ± 0.3. In monitoring mode, the determination result of whether the ellipticity is within the specified range is displayed on the GUI 20 as output image result information. In monitoring mode, if it is determined that the ellipticity is outside the specified range, an alarm is output from the GUI 20, and a warning is displayed on the GUI 20 to notify and remind the user.

[0061] The notice is not limited.

[0062] In monitoring mode, the GUI20 displays and notifies users of the adjustment guide for adjusting the beam expander 4 to a collimated, parallel state (optimal state) based on the imaging results from the camera 8 used for spot observation. The adjustment guide includes, for example, the direction of movement of the lens 41 of the beam expander 4 (upstream or downstream direction in the optical path of the laser L) and the amount of movement. Information related to the direction and amount of movement of the lens 41 can also be pre-stored in the control unit 10 in association with the ellipticity of the beam shape at the focusing point of the laser L.

[0063] Figure 4 This is an example image showing a GUI20 display screen. For example... Figure 4As shown, the GUI20 display shows an execution button R1 for starting the monitoring mode. Monitoring mode is started by touching the execution button R1. The GUI20 display shows, as imaging result information, a focused image R2 including the focused image 16, a spot width R3 along the first axis, a spot width R4 along the second axis, an ellipticity R5, and a determination result R6 indicating whether the ellipticity is within a specified range. Furthermore, the GUI20 display shows an adjustment guide R7 for achieving a parallel collimation state. Additionally, the left-right direction of the focused image R2 corresponds to the first axis, and the up-down direction of the focused image R2 corresponds to the second axis. If the ellipticity is outside the specified range, a warning is displayed in the determination result R6.

[0064] The laser processing apparatus 1 described above implements a laser processing method in which a modified region 12 is formed inside the object 11 by irradiating the object 11 with a laser L. As an example, the operation of the laser processing apparatus 1 when a modified region 12 is formed inside the object 11 along a line 15 used to cut the object 11 will be explained.

[0065] First, the laser processing apparatus 1 rotates the support 2 so that the line 15 set on the object 11 is parallel to the X direction. Based on a visual image captured by the observation camera 9 (e.g., an image of the laser incident surface of the object 11), the laser processing apparatus 1 moves the laser processing head H (i.e., the focusing part 6) along the Z direction (height setting) so that the focusing point of the laser L is located on the laser incident surface. Using its position as a reference, the laser processing apparatus 1 moves the laser processing head H along the Z direction so that the focusing point of the laser L is located at a predetermined depth from the laser incident surface.

[0066] Next, the laser processing apparatus 1 moves the support 2 in the X direction such that a laser L is emitted from the laser source 3 and the focusing point of the laser L moves relative to each other along line 15. As a result, a modified region 12 is formed along line 15 and at a certain depth from the laser incident surface of the object 11. When the laser L is emitted from the laser source 3 in a pulse oscillation manner, multiple modified light spots 12s are formed in an X-direction arrangement. Each modified light spot 12s is formed by irradiation with one pulse of laser L. The modified region 12 is a collection of multiple modified light spots 12s. Adjacent modified light spots 12s may be connected or separated depending on the pulse spacing of the laser L (a value obtained by dividing the relative moving speed of the focusing point of the object 11 by the repetition frequency of the laser L).

[0067] Next, refer to Figure 4 The GUI20 display screen and Figure 5 The flowchart illustrates the laser processing method of the implementation method.

[0068] For example, in the laser processing apparatus 1, while monitoring whether the collimation state of the laser L modulated by the spatial light modulator 5 is optimized, the execution button R1 on the display screen of the GUI20 is touched to execute the next monitoring mode (monitoring step).

[0069] That is, as a monitoring pattern, the astigmatic pattern HS (refer to...) Figure 3 The light is displayed on the display unit 51 of the spatial light modulator 5 (step S1). Then, the laser L is irradiated (step S2). In step S2, the laser L is emitted from the laser source 3 and incident on the display unit 51 of the spatial light modulator 5. The laser L is modulated according to the astigmatic pattern HS displayed on the display unit 51. The modulated laser L is focused onto the object 11 by the focusing unit 6.

[0070] Next, the modulated laser L is received by the spot observation camera 8 via the lens 81, and the focal point of the laser L is imaged (step S3). Then, the control unit 10, based on the image captured by the spot observation camera 8, obtains the spot width in the first axis direction and the spot width in the second axis direction of the beam shape at the focal point of the laser L, and obtains the ellipticity of the beam shape (step S4). The ellipticity obtained in step S4 can be performed, for example, using a known image analysis method from the focal image image R2 captured by the spot observation camera 8.

[0071] Next, the control unit 10 determines whether the acquired ellipticity is within a specified range (step S5). If yes in step S5, and the collimation state is optimized to be parallel, the control unit 10 determines that the collimation state is qualified, and displays the imaging result of the spot observation camera 8 on the display screen of the GUI 20 (step S6). In step S6, the GUI 20 displays the focused image R2, the spot width R3 in the first axis direction, the spot width R4 in the second axis direction, the ellipticity R5, and the qualified determination result R6. Additionally, in step S6, the adjustment guide R7 is not displayed on the GUI 20. After step S6, the monitoring mode ends.

[0072] On the other hand, if step S5 is not successful, and the ellipticity is outside the specified range and the collimation state is shifted from the parallel state towards the divergent or convergent side and is not optimized, the control unit 10 determines that the collimation state is unqualified, and displays the imaging result of the spot observation camera 8 and a warning on the display screen of the GUI 20 (step S7). In step S7, the GUI 20 displays the focused image R2, the spot width R3 in the first axis direction, the spot width R4 in the second axis direction, the ellipticity R5, and the unqualified determination result R6 including the warning. Furthermore, in step S7, the GUI 20 displays an adjustment guide R7 for making the collimation state parallel. After step S7, the monitoring mode ends.

[0073] After step S7, the user moves the lens 41 of the beam expander 4 according to the adjustment guide R7 of the GUI20 to readjust the collimation state (step S8). Then, the user touches the execution button R1 on the display screen of the GUI20 again to execute the monitoring mode described above again. Step S1 constitutes step 1. Steps S2 and S3 constitute step 2. Steps S4 to S7 constitute step 3.

[0074] In the laser processing apparatus 1, when the monitoring mode is executed, a monitoring pattern is displayed on the display unit 51 of the spatial light modulator 5, and the laser L is modulated. The spot observation camera 8 receives the laser L via the lens 81 and outputs the imaging result information of the spot observation camera 8. The imaging result of the spot observation camera 8 changes regularly according to the monitoring pattern and the collimation state. Therefore, the collimation state can be grasped based on the imaging result information without moving the lens 41 or the like arranged in the optical path of the laser L. That is, it is easy to determine whether the collimation state of the laser L is optimal. Furthermore, monitoring can be performed through absolute value management. In principle, the collimation state determination does not depend on the brightness value of the focused image R2 each time.

[0075] In the laser processing apparatus 1, the monitoring pattern is a modulation pattern in which the ellipticity of the laser beam shape captured by the spot observation camera 8 changes according to the collimation state. In this case, the collimation state can be determined based on the ellipticity of the laser beam shape captured by the spot observation camera 8.

[0076] In the laser processing apparatus 1, the monitoring pattern is a modulation pattern in which the shape of the laser beam L captured by the spot observation camera 8 becomes elliptical when the collimation state shifts from a parallel state towards the diverging or converging side, and becomes circular when the collimation state is parallel. In this case, the state of collimation can be determined based on whether the shape of the laser beam L captured by the spot observation camera 8 is elliptical or circular.

[0077] In the laser processing apparatus 1, the monitoring pattern is a modulation pattern, i.e., an astigmatic pattern, that imparts astigmatism to the laser L. Specifically, it is possible to achieve the following: when the collimation state shifts from the parallel state to the diverging or converging side, the shape of the laser L captured by the spot observation camera 8 becomes elliptical, and when the collimation state is parallel, the shape of the laser L captured by the spot observation camera 8 becomes circular.

[0078] In the laser processing apparatus 1, during monitoring mode, information related to the ellipticity is output as the output of information related to the imaging results of the spot observation camera 8. In this case, the collimation state can be determined from the output information about the ellipticity.

[0079] In the laser processing apparatus 1, the information regarding the ellipticity includes the spot width along the first axis and the spot width along the second axis. In this case, the collimation state can be determined from the spot widths along the first and second axes.

[0080] In the laser processing apparatus 1, the monitoring pattern is a modulation pattern that varies in that the ellipticity changes as the collimation state shifts from a parallel state towards the divergence or convergence side. In monitoring mode, it is determined whether the ellipticity is within a specified range. If it is determined that the ellipticity is outside the specified range, a notification to draw attention is output as information related to the imaging result of the spot observation camera 8. Thus, for example, in the event of an apparatus malfunction such as a shift in the collimation state towards the divergence or convergence side by a certain amount, the user can be alerted. Furthermore, when the ellipticity is the target value, there is an advantage in that it is easy to normalize.

[0081] In the laser processing apparatus 1, input from the user can be received via the GUI 20, and the monitoring mode can be started when the user inputs to start the monitoring mode via the GUI 20. Thus, the monitoring mode can be executed at the time desired by the user.

[0082] In the laser processing apparatus 1, information related to the imaging results of the spot observation camera 8 can be displayed on the GUI 20. In monitoring mode, as output of information related to the imaging results of the spot observation camera 8, the GUI 20 displays an image, namely a focusing image R2, related to the beam shape of the laser L captured by the spot observation camera 8. Thus, the collimation state can be determined from the laser image R2 displayed on the GUI 20.

[0083] The laser processing apparatus 1 includes a beam expander 4 disposed between a laser source 3 and a spatial light modulator 5 in the optical path of the laser L. In monitoring mode, the GUI 20 displays and notifies the user of an adjustment guide R7 for adjusting the beam expander 4 to a collimated and parallel state based on the imaging results of the spot observation camera 8. This allows for easy adjustment of the collimated state to a parallel state.

[0084] In the laser processing apparatus 1, the spot observation camera 8 receives a portion of the laser L branching off from the spatial light modulator 5 and the focusing section 6 in the optical path of the laser L via the lens 81. In this case, the portion of the laser L branching off from the spatial light modulator 5 and the focusing section 6 can be utilized in the monitoring mode.

[0085] In the laser processing method, during the monitoring step, a monitoring pattern is displayed on the display unit 51 of the spatial light modulator 5 to modulate the laser L. The laser L is received by a spot observation camera 8 via a lens 81, and the image captured by the spot observation camera 8 is output. The image captured by the spot observation camera 8 changes regularly according to the monitoring pattern and the collimation state. Therefore, the collimation state can be determined based on this image capture without moving the lens 41 or other components positioned in the optical path of the laser L. In other words, it is easy to determine whether the collimation state of the laser L is optimal.

[0086] Figure 6 This is a diagram illustrating the relationship between collimation state and image result information. Figure 6 The image capture result information is the information when using the astigmatic pattern HS as the monitoring pattern. Example 1 in the figure is an example where the collimation state is either divergent or convergent, and the position of the focal point of the laser L focused by lens 81 is offset from the - side (upstream side of the laser L's optical path) of the camera face of the spot-observation camera 8. Example 2 in the figure is an example where the collimation state is parallel, and the position of the focal point of the laser L focused by lens 81 is aligned with the image face of the camera face of the spot-observation camera 8. Example 3 in the figure is an example where the collimation state is either divergent or convergent, and the position of the focal point of the laser L focused by lens 81 is offset from the + side (downstream side of the laser L's optical path) of the camera face of the spot-observation camera 8.

[0087] like Figure 6 As shown, in Example 1, the spot width along the first axis is smaller than the spot width along the second axis, and the ellipticity is significantly smaller than 1.0. The beam shape of the focused image R2 is an elongated ellipse along the second axis. In Example 3, the spot width along the first axis is larger than the spot width along the second axis, and the ellipticity is significantly larger than 1.0. The beam shape of the focused image R2 is also an elongated ellipse along the first axis. In contrast, in Example 2, the spot width along the first axis is the same as the spot width along the second axis, the ellipticity is close to 1.0, and the beam shape of the focused image R2 is closer to a perfect circle than in Examples 1 and 2. Therefore, it can be seen that by capturing the focused image of the laser L modulated with astigmatic pattern HS using the spot observation camera 8, and based on the captured image information, it is easy to determine the collimation state and whether the collimation state is optimized.

[0088] [Variation Example]

[0089] The present invention is not limited to the embodiments described above.

[0090] In the above embodiment, the observation camera 9 can also be used as the imaging unit that receives the laser L via a lens. In this case, for example... Figure 7 As shown, the observation camera 9 receives the laser L reflected from the surface 11a of the laser incident surface, which is the object 11, and after passing through the focusing part 6, dichroic mirrors M3 and M6, via the lens 92. That is, the observation camera 9 can capture an image of the focused laser L modulated by the spatial light modulator 5. The lens 92 focuses the incident laser L onto the imaging surface of the observation camera 9. The distance between the lens 92 and the imaging surface of the observation camera 9 in the optical axis direction of the laser L is pre-adjusted to the focal distance f of the lens 92.

[0091] In such a variation, when monitoring whether the collimation state of the laser L modulated by the spatial light modulator 5 is optimal, such as... Figure 8 As shown, firstly, the object 11 is placed on the support 2 (step S11). The object 11 here can be the sample object 11T (the object 11T for testing). Next, the execute button R1 on the display screen of the GUI20 is touched to execute the next monitoring mode (monitoring step).

[0092] That is, visible light V is emitted from the visible light source 91 via the control unit 10, and correspondingly, the laser processing head H (i.e., the focusing unit 6) is moved along the Z direction toward the position aligned with the focal point of the mark on the visible image captured by the observation camera 9 (step S12). As a monitoring pattern, an astigmatic pattern HS (see reference) is displayed on the display unit 51 of the spatial light modulator 5. Figure 3(Step S13).

[0093] Next, the object 11 is irradiated with laser L (step S14). In step S14, laser L is emitted from laser source 3 and incident on display unit 51 of spatial light modulator 5, modulating laser L in accordance with astigmatic pattern HS displayed on display unit 51. The modulated laser L is focused onto object 11 by focusing unit 6. In step S14, object 11 is irradiated with laser L at the output of object 11 before processing (i.e., the output where modified region 12 is not formed (smaller than processing threshold)). Next, observation camera 9 receives the reflected light of laser L after reflection from object 11 via focusing unit 6 and lens 92, and images the focusing point of laser L (step S15).

[0094] Next, the control unit 10, based on the imaging results captured by the observation camera 9, acquires the spot width in the first axis direction and the spot width in the second axis direction of the beam shape at the focusing point of the laser L, and acquires the ellipticity of the beam shape (step S16). The control unit 10 determines whether the acquired ellipticity is within a specified range (step S17). If the result is yes in step S17, the collimation state is considered to be parallel and optimized, and the control unit 10 determines that the collimation state is qualified, and displays the imaging results of the observation camera 9 on the display screen of the GUI 20 (step S18). After step S18, the monitoring mode ends. On the other hand, if the result is no in step S17, the ellipticity is outside the specified range and the collimation state is shifted from the parallel state to the divergent or convergent side and is not optimized, and the control unit 10 determines that the collimation state is unqualified, and displays the imaging results of the observation camera 9 and a warning on the display screen of the GUI 20 (step S19). After step S19, the monitoring mode ends.

[0095] After step S19, the user moves the lens 41 of the beam expander 4 according to the adjustment guide R7 of the GUI20 to readjust the collimation state (step S20). Then, the user touches the execution button R1 on the display screen of the GUI20 again to execute the monitoring mode described above again. Step S13 constitutes step 1. Steps S14 and S15 constitute step 2. Steps S16 to S19 constitute step 3.

[0096] In this modified example, the aforementioned effects, such as easily determining whether the collimation state of the laser L is optimal, can also be achieved. Furthermore, in this modified example, the laser L reflected from the object 11 can be used in monitoring mode. Additionally, the camera unit is not limited to the spot observation camera 8 and the observation camera 9; other camera units can also be used.

[0097] In the above embodiment, the monitoring pattern is a modulation pattern in which the shape of the laser beam L captured by the spot observation camera 8 is a perfect circle when the collimation state is parallel, but it is not limited to this. The monitoring pattern is any modulation pattern in which the shape of the laser beam L captured by the spot observation camera 8 is closer to a perfect circle than an elliptical shape when the collimation state is shifted to the divergence or convergence side.

[0098] In the above embodiments, using Figure 3 The astigmatic pattern HS is used as a monitoring pattern, but the monitoring pattern is not limited to this. For example, the monitoring pattern can also be... Figure 3 Astigmatic patterns other than HS. Furthermore, for example, the monitoring pattern can also be a modulation pattern, i.e., a cylindrical lens pattern, generated in a manner that achieves the function of a cylindrical lens. In this case, it is also possible to specifically achieve: when the collimation state shifts from a parallel state towards the diverging or converging side, the beam shape of the laser L becomes elliptical; and when the collimation state is parallel, the beam shape of the laser L becomes circular or a shape closer to a circle than an elliptical shape.

[0099] Furthermore, for example, the monitoring pattern can be a modulation pattern that varies the number of peaks in the line profile along a predetermined direction with respect to the intensity of the laser L captured by the camera unit, corresponding to the collimation state. In this case, the state of collimation can be determined based on the number of peaks in the line profile along a predetermined direction with respect to the intensity of the laser L captured by the camera unit (hereinafter also referred to as "line profile peak number"). As an example of such a monitoring pattern, a defocus pattern can be cited. A defocus pattern is a modulation pattern that separates at least two branched laser beams of laser L from each other in a predetermined direction and along the optical axis of laser L at the position of the focusing point. With a defocus pattern, it is possible to specifically achieve a change in the number of line profile peaks corresponding to the collimation state.

[0100] Figure 9 This is a diagram illustrating the relationship between collimation state and image result information. Figure 10 This is a schematic diagram illustrating the focusing points of branched lasers L1 and L2 passing through the defocused pattern. Figure 9 The camera result information is the information obtained when the aforementioned defocus pattern is used as the monitoring pattern. Figure 9 Examples 1-3 in the text are related to Figure 6 The same examples as those in Examples 1-3. In each of Examples 1-3, the line profile represents the intensity of the laser L on line 17 in the left-right direction of the focused image R2. In the line profile, the vertical axis is the intensity of the laser L, and the horizontal axis is the position on line 17.

[0101] like Figure 9As shown, in the line profile of Example 1, there is a large peak. This is because, in Example 1, in... Figure 10 The image at position C1 is captured as a focused image R2. Therefore, the intensity of the branched laser L1 is increased due to focusing, while the intensity of the branched laser L2 is less affected. As a result, the peak of the branched laser L1 is the dominant characteristic. Furthermore, as... Figure 9 As shown, in the line profile of Example 3, there is a large peak. This is because, in Example 3, Figure 10 The image at position C2 is captured as a focused image R2. Therefore, the intensity of the branch laser L2 is increased due to the focusing of the branch laser L2. On the other hand, the influence on the intensity of the branch laser L1 is small. As a result, the peak of the branch laser L2 mainly appears.

[0102] In contrast, such as Figure 9 As shown, in the line profile of Example 2, there are two peaks (the number of branches of laser L), and the sizes of the peaks are also similar. This is because, in Example 3, Figure 10 The image at position C3 is captured as the focused image R2. Therefore, due to the focusing of the branch lasers L1 and L2, their intensity increases, resulting in peaks for each branch laser L1 and L2. Thus, it can be seen that by capturing the focused image of the laser L modulated using the aforementioned defocus pattern, and based on the image capture results (especially the number of line contour peaks), it is easy to determine the collimation state and whether it is optimal.

[0103] In the above embodiment, the monitoring mode is started when the user inputs to start the monitoring mode via the GUI20, but the timing of starting the monitoring mode is not limited to this. The monitoring mode may also be started at at least any of the following times: periodically, at regular intervals, at regular running times, at a preset time, when the device is started, and when the device is finished.

[0104] In the above embodiment, a beam expander 4 is provided as a collimation state adjustment unit, but the collimation state adjustment unit is not limited to a beam expander 4, and may also be other adjustment mechanisms. The beam expander 4 may have two or more lenses.

[0105] In the above embodiment, a GUI20 is provided as both an input receiving unit and an information display unit, but the embodiment is not limited to this. The input receiving unit and the display unit may also have different structures. Various known devices can be used as the input receiving unit and the display unit. The above embodiment may also include multiple laser processing heads H. In the above embodiment, the spatial light modulator 5 is not limited to a reflective spatial light modulator, and a transmissive spatial light modulator may also be used.

[0106] In the above embodiments, the type, shape, size, number and orientation of the crystal orientations of the object 11, and orientation of the main face of the object 11 are not particularly limited. In the above embodiments, the object 11 may be formed by comprising a crystalline material with a crystalline structure, or it may be formed by replacing or based on this by comprising an amorphous material with an amorphous structure. The crystalline material may also be either anisotropic or isotropic crystals. For example, the object 11 may also comprise a substrate formed from at least one of gallium nitride (GaN), silicon (Si), silicon carbide (SiC), LiTaO3, diamond, GaOx, sapphire (Al2O3), gallium arsenide, indium phosphide, glass, and alkali-free glass.

[0107] In the above embodiments, the modified region 12 may be, for example, a crystalline region, a recrystallization region, or a gas-gathering region formed inside the object 11. The crystalline region maintains the structure of the object 11 before processing. The recrystallization region is the region that solidifies as a single crystal or polycrystalline crystal upon re-solidification after evaporation, plasmaification, or melting. The gas-gathering region is the region that collects and traps impurities such as heavy metals; it can be formed continuously or intermittently. The above embodiments can also be applied to processes such as trimming, slicing, and ablation.

[0108] The structures in the above-described embodiments and modifications are not limited to the materials and shapes described above; a wide variety of materials and shapes can be used. Furthermore, the structures in the above-described embodiments or modifications can be arbitrarily applied to structures in other embodiments or modifications.

[0109] According to the present invention, a laser processing apparatus and a laser processing method are provided that can easily determine whether the collimation state of the laser is optimal.

Claims

1. A laser processing apparatus, characterized in that: It is a laser processing device that forms a modified region inside an object by irradiating the object with a laser. include: Support portion, which supports the object; A laser source that emits the laser; A spatial light modulator having a display section on which the laser emitted from the laser source is incident, and modulating the laser in accordance with a modulation pattern displayed on the display section; A focusing section that focuses the laser beam modulated by the spatial light modulator onto the object supported by the support section; The camera unit receives the laser light modulated by the spatial light modulator via a lens; and The monitoring mode execution unit executes a monitoring mode that monitors the collimation state of the laser modulated by the spatial light modulator. In the monitoring mode, The display unit of the spatial light modulator displays a monitoring pattern that is a modulation pattern that regularly changes the imaging result of the camera unit in accordance with the collimation state, and outputs information about the laser modulated by the spatial light modulator related to the imaging result of the camera unit. The monitoring pattern is a modulation pattern of the ellipticity variation of the laser beam shape captured by the camera unit, corresponding to the collimation state.

2. The laser processing apparatus as described in claim 1, characterized in that: The monitoring pattern is a modulation pattern in which the shape of the laser beam captured by the camera becomes elliptical when the collimation state shifts from a parallel state to a diverging or converging state, and in which the shape of the laser beam captured by the camera becomes a circle or a shape closer to a circle than an elliptical shape when the collimation state is parallel.

3. The laser processing apparatus as described in claim 1, characterized in that: The monitoring pattern is an astigmatic pattern that serves as a modulation pattern for imparting astigmatism to the laser.

4. The laser processing apparatus as described in claim 2, characterized in that: The monitoring pattern is an astigmatic pattern that serves as a modulation pattern for imparting astigmatism to the laser.

5. The laser processing apparatus as described in claim 1, characterized in that: The monitoring pattern is a cylindrical lens pattern generated as a modulation pattern to achieve the function of a cylindrical lens.

6. The laser processing apparatus as described in claim 2, characterized in that: The monitoring pattern is a cylindrical lens pattern generated as a modulation pattern to achieve the function of a cylindrical lens.

7. The laser processing apparatus according to any one of claims 1 to 6, characterized in that: In the monitoring mode, as output of information related to the imaging results of the camera unit, information related to the ellipticity of the laser beam shape captured by the camera unit is output.

8. The laser processing apparatus as described in claim 7, characterized in that: The information related to the ellipticity includes the width of the beam shape in a first direction orthogonal to the optical axis of the laser and the width of the beam shape in a second direction orthogonal to both the optical axis of the laser and the first direction.

9. The laser processing apparatus according to any one of claims 1 to 6, characterized in that: The monitoring pattern is a modulation pattern that varies in that the ellipticity moves further away from 1 as the collimation state shifts from a parallel state toward the divergence or convergence side. In the monitoring mode, Determine whether the ellipticity of the laser beam shape captured by the camera is within a specified range. If it is determined that the ellipticity is outside the specified range, a notification to attract attention is output as information related to the imaging result of the camera unit.

10. The laser processing apparatus as described in claim 7, characterized in that: The monitoring pattern is a modulation pattern that varies in that the ellipticity moves further away from 1 as the collimation state shifts from a parallel state toward the divergence or convergence side. In the monitoring mode, Determine whether the ellipticity of the laser beam shape captured by the camera is within a specified range. If it is determined that the ellipticity is outside the specified range, a notification to attract attention is output as information related to the imaging result of the camera unit.

11. The laser processing apparatus as described in claim 8, characterized in that: The monitoring pattern is a modulation pattern that varies in that the ellipticity moves further away from 1 as the collimation state shifts from a parallel state toward the divergence or convergence side. In the monitoring mode, Determine whether the ellipticity of the laser beam shape captured by the camera is within a specified range. If it is determined that the ellipticity is outside the specified range, a notification to attract attention is output as information related to the imaging result of the camera unit.

12. A laser processing apparatus, characterized in that: It is a laser processing device that forms a modified region inside an object by irradiating the object with a laser. include: Support portion, which supports the object; A laser source that emits the laser; A spatial light modulator having a display section on which the laser emitted from the laser source is incident, and modulating the laser in accordance with a modulation pattern displayed on the display section; A focusing section that focuses the laser beam modulated by the spatial light modulator onto the object supported by the support section; The camera unit receives the laser light modulated by the spatial light modulator via a lens; and The monitoring mode execution unit executes a monitoring mode that monitors the collimation state of the laser modulated by the spatial light modulator. In the monitoring mode, The display unit of the spatial light modulator displays a monitoring pattern that is a modulation pattern that regularly changes the imaging result of the camera unit in accordance with the collimation state, and outputs information about the laser modulated by the spatial light modulator related to the imaging result of the camera unit. The monitoring pattern is a modulation pattern that corresponds to the collimation state and shows a variation in the number of peaks of a line profile in a predetermined direction with respect to the intensity of the laser captured by the camera unit.

13. The laser processing apparatus as described in claim 12, characterized in that: The monitoring pattern is a defocusing pattern of at least two branch lasers whose positions, with the laser branch as the focal point, are separated from each other in the specified direction and in the direction of the laser's optical axis.

14. The laser processing apparatus according to any one of claims 1 to 6, 12 to 13, characterized in that: The monitoring mode execution unit has an input receiving unit that accepts input from the user. When the user makes an input through the input receiving unit to start the monitoring mode, the monitoring mode is started.

15. The laser processing apparatus according to any one of claims 1-6, 12-13, characterized in that: The monitoring mode execution unit has an information display unit that displays information related to the imaging results of the camera unit. In the monitoring mode, as output of information related to the imaging results of the camera unit, an image related to the beam shape of the laser captured by the camera unit is displayed on the information display unit.

16. The laser processing apparatus according to any one of claims 1 to 6, 12 to 13, characterized in that: Includes a collimation state adjustment unit disposed between the laser source and the spatial light modulator in the optical path of the laser, for adjusting the collimation state. In the monitoring mode, a guide is provided for adjusting the collimation state adjustment unit in a manner that the collimation state becomes parallel, based on the imaging results of the camera unit.

17. The laser processing apparatus according to any one of claims 1-6 and 12-13, characterized in that: The camera unit receives, via the lens, a portion of the laser beam branching off between the spatial light modulator and the focusing unit in the optical path of the laser.

18. The laser processing apparatus according to any one of claims 1-6, 12-13, characterized in that: The camera receives the laser light reflected by the object via the focusing unit and the lens.

19. A laser processing apparatus, characterized in that: It is a laser processing device that forms a modified region inside an object by irradiating the object with a laser. include: Support portion, which supports the object; A laser source that emits the laser; A spatial light modulator having a display unit on which the laser emitted from the laser source is incident, and modulating the laser in accordance with a monitoring pattern displayed on the display unit; A focusing section that focuses the laser beam modulated by the spatial light modulator onto the object supported by the support section; The camera unit receives the laser light modulated by the spatial light modulator via a lens; and The information display unit displays information related to the imaging results of the camera unit. The monitoring pattern is a modulation pattern in which, when the collimation state of the laser shifts from a parallel state towards the diverging or converging side, the shape of the laser beam captured by the camera becomes elliptical, and when the collimation state is parallel, the shape of the laser beam captured by the camera becomes circular or a shape closer to a circle than an ellipse. The information display unit displays information related to the ellipticity of the laser beam shape captured by the camera unit.

20. A laser processing method, characterized in that: This is a laser processing method that forms a modified region inside an object by irradiating it with a laser. This includes a monitoring step that monitors the collimation state of the laser modulated by the spatial light modulator. The monitoring steps include: The first step involves displaying a monitoring pattern on the display unit of the spatial light modulator as a pattern that regularly changes the imaging result of the imaging unit receiving the laser modulated by the spatial light modulator via the lens, based on the collimation state. In the second step, the laser emitted from the laser source is directed towards the display unit of the spatial light modulator, modulating the laser in accordance with the monitoring pattern displayed on the display unit, and receiving the modulated laser through a lens and the camera unit; and Step 3 outputs information about the modulated laser related to the imaging results of the camera unit. The monitoring pattern is a modulation pattern of the ellipticity variation of the laser beam shape captured by the camera unit, corresponding to the collimation state.

21. A laser processing method, characterized in that: This is a laser processing method that forms a modified region inside an object by irradiating it with a laser. This includes a monitoring step that monitors the collimation state of the laser modulated by the spatial light modulator. The monitoring steps include: The first step involves displaying a monitoring pattern on the display unit of the spatial light modulator as a pattern that regularly changes the imaging result of the imaging unit receiving the laser modulated by the spatial light modulator via the lens, based on the collimation state. In the second step, the laser emitted from the laser source is directed towards the display unit of the spatial light modulator, modulating the laser in accordance with the monitoring pattern displayed on the display unit, and receiving the modulated laser through a lens and the camera unit; and Step 3 outputs information about the modulated laser related to the imaging results of the camera unit. The monitoring pattern is a modulation pattern that corresponds to the collimation state and shows a variation in the number of peaks of a line profile in a predetermined direction with respect to the intensity of the laser captured by the camera unit.

Images