Clamp assembly for silicon disc

Abstract

The present application relates to a clamp assembly for a silicon disc. The clamp assembly comprises a base plate having a seat hole for receiving the silicon disc, a support mechanism comprising a plurality of support blocks arranged and fixed in the inner wall of the seat hole at intervals along the entire circumference of the inner wall, each support block having a first axial arc surface higher than the inner wall along a radially inward direction and a first support plane extending from the bottom of the first axial arc surface toward the center line of the seat hole in a radial direction and adapted to abut against the outer edge of the lower surface of the silicon disc, and an adjusting mechanism comprising a plurality of adjusting blocks arranged at intervals along the inner wall and spaced apart from the support blocks, each adjusting block being movably fixed in the inner wall and configured to push the silicon disc radially inward so that the circumferential edge of the silicon disc abuts against the first axial arc surface of the opposite support block, wherein the support blocks and the adjusting blocks are both made of resin material. The clamp assembly is convenient to operate and can improve the processing quality of the silicon disc.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing, and more particularly to a clamping assembly for silicon disks. Background Technology

[0002] Integrated circuits (ICs) are the foundation of modern information technology. They are circuits with specific functions that integrate a certain number of electronic components (such as resistors, capacitors, and transistors) through semiconductor manufacturing processes (such as thin film fabrication, etching, and doping). The main raw materials for ICs are semiconductors such as silicon, germanium, and gallium arsenide. Among them, silicon has many advantages such as stable properties, ease of purification, and huge reserves. Therefore, silicon has become the semiconductor material with the largest production scale and the most complete manufacturing process.

[0003] A silicon plate (also known as a "silicon wafer") is a thin slice cut from high-purity single-crystal silicon, serving as a crucial carrier for integrated circuit fabrication. With the rapid advancements in semiconductor manufacturing processes, the required line widths of silicon plates are becoming increasingly fine, and the quality requirements for the surface layer of the silicon plate are also rising. Currently, silicon plate processing mainly includes slicing, grinding, etching, and polishing. During these processes, the precise and stable clamping of the silicon plate has a significant impact on the quality of its surface layer.

[0004] Extensive research has been conducted on wafer clamping fixtures. For example, Chinese utility model patent CN202585375U discloses a wafer clamp. This wafer clamp includes a substrate with a first through-hole in the center. Two or more first positioning posts and at least one second positioning post are distributed circumferentially on the front side of the substrate. The ends of the first and second positioning posts are respectively provided with first and second ends for holding the wafer in place, and both the first and second ends have gaps with the front side of the substrate adapted to the wafer thickness. The second positioning post can move between a position where the second end can hold the wafer and a position where the second end does not hold the wafer. When using this wafer clamp, the wafer needs to be constrained in a first slot between the first end and the substrate along a direction approximately parallel to the substrate (i.e., the radial direction of the wafer), which is extremely inconvenient. Furthermore, because the gap in the first slot is small (adapted to the wafer thickness), the wafer is easily scratched by collision with the substrate during assembly and disassembly, affecting the wafer processing quality.

[0005] Therefore, a new technical solution is needed in this field to solve the above problems. Summary of the Invention

[0006] To address the technical problems of inconvenient operation and poor processing quality of existing clamps used for silicon disks, this invention provides a clamping assembly for silicon disks. The clamping assembly includes: a substrate with a mounting hole for receiving the silicon disk; a support mechanism comprising a plurality of support blocks spaced apart from each other and fixed within the circumferential inner wall surrounding the mounting hole, each support block having a first axial arc surface higher than the circumferential inner wall in a radially inward direction and a first support plane extending radially from the bottom of the first axial arc surface toward the centerline of the mounting hole, the first support plane being adapted to abut against the outer edge of the lower surface of the silicon disk; and an adjustment mechanism comprising a plurality of adjustment blocks spaced apart from each other along the circumferential inner wall and spaced from the support blocks, each adjustment block being movably fixed within the circumferential inner wall and configured to push the silicon disk radially inward so that the circumferential edge of the silicon disk abuts against the first axial arc surface of the opposing support block, wherein both the support blocks and the adjustment blocks are made of resin material.

[0007] The clamping assembly for silicon disks of the present invention includes components such as a substrate, a support mechanism, and an adjustment mechanism. The substrate has a mounting hole for receiving the silicon disk to be processed. The support mechanism includes multiple support blocks fixed in the circumferential inner wall of the mounting hole. These support blocks are spaced apart from each other around the entire circumferential inner wall of the mounting hole, resulting in more uniform force distribution on each support block and more stable clamping of the silicon disk. Each support block has a first axial arc surface extending radially inward above the circumferential inner wall, allowing the first axial arc surface of the support block to directly contact the silicon disk, thereby reducing the probability of other components (such as the circumferential inner wall of the mounting hole) contacting the silicon disk and reducing the risk of scratching the silicon disk. Each support block also has a first support plane extending radially from the bottom of the first axial arc surface toward the centerline of the mounting hole, and the first support plane can be used to abut against the outer edge of the lower surface of the silicon disk, so that the silicon disk can be stably supported axially by the support block when placed in the mounting hole. The adjustment mechanism includes multiple adjusting blocks spaced apart from each other along the circumferential inner wall of the mounting hole and also spaced apart from the support blocks, resulting in more uniform force distribution on the silicon disk during clamping. Each adjusting block is movably fixed within the circumferential inner wall of the mounting hole, and each adjusting block is configured to push the silicon disk radially inward, so that the circumferential edge of the silicon disk abuts against the first axial arc surface of the opposing support block. This configuration allows the silicon disk to be conveniently placed axially within the mounting hole, facilitating operation and preventing the silicon disk from contacting the substrate and scratching its surface. Furthermore, the cooperation between the adjusting blocks and the support blocks ensures the silicon disk is firmly and stably constrained within the mounting hole, preventing displacement during processing and ensuring processing accuracy and stability. Moreover, both the support blocks and adjusting blocks are made of resin material, giving them good rigidity and moderate hardness, meeting the mechanical strength requirements for clamping the silicon disk while preventing excessive hardness from scratching the silicon disk surface.

[0008] In the preferred embodiment of the clamping assembly for the silicon disk described above, the adjustment mechanism further includes fastening blocks detachably fixed to the substrate. Each fastening block is connected to a corresponding adjustment block, and the degree of fastening relative to the substrate is adjustable to adjust the inward radial displacement applied to the silicon disk by the corresponding adjustment block. With the above configuration, the adjustment mechanism has a simple structure and is easy to operate.

[0009] In the preferred embodiment of the clamping assembly for the silicon disk described above, a first inclined surface extending downwards in a direction away from the center line is formed on the side of the adjusting block, and a second inclined surface is formed on the fastening block opposite to and abutting against the first inclined surface. With this configuration, when the tightness between the fastening block and the substrate is increased, the fastening block can compress the adjusting block; that is, the second inclined surface can apply a radially inward component force to the first inclined surface, forcing the adjusting block to move inwards. This causes the silicon disk to move towards the first axial arc surface on the support block opposite to the adjusting block, thus achieving radial clamping of the silicon disk.

[0010] In the preferred embodiment of the clamping assembly for the silicon disk described above, the fastening block is made of metal. This design provides the fastening block with high rigidity, enabling it to apply compressive force to the adjusting block made of resin.

[0011] In the preferred embodiment of the clamping assembly for silicon disks described above, a second support plane is formed at the bottom of each adjusting block, extending towards the center line and located on the same radial plane as the first support plane. This arrangement increases the number of support points on the lower surface of the silicon disk, making the force distribution more uniform.

[0012] In the preferred embodiment of the clamping assembly for silicon disks described above, a second axial arc surface is formed on each adjusting block, extending vertically upward from the second support plane and located on the same arc surface as the first axial arc surface. This arrangement allows for a larger contact area between the adjusting block and the silicon disk, further improving the uniformity of force distribution on the silicon disk.

[0013] In the preferred embodiment of the clamping assembly for the silicon disk described above, the clamping assembly further includes: at least one pressure block, the pressure block being configured to be fixed on a corresponding support block, and the pressure block having a pressure plane parallel to the first support plane, the pressure plane being adapted to abut against the outer edge of the upper surface of the silicon disk. Through the above arrangement, the upper surface of the silicon disk can be subjected to the pressure applied by the pressure block, thereby making the silicon disk more stable and firmly constrained within the mounting hole in the axial direction.

[0014] In the preferred embodiment of the clamping assembly for silicon disks described above, a plurality of spaced-apart positioning grooves are formed on one circumferential outer edge of the substrate, each positioning groove being adapted to mate with a positioning pin on a predetermined mounting surface. The cooperation between the positioning grooves and the positioning pins allows the substrate to be easily positioned onto the predetermined mounting surface, thereby improving assembly efficiency.

[0015] In the preferred embodiment of the clamping assembly for silicon disks described above, a first calibration member and a second calibration member are provided on a circumferentially outer side of the substrate, spaced apart from each other. Each of the first and second calibration members has a calibration plane extending axially along the centerline direction. This arrangement allows the substrate's mounting position to be adjusted by measuring the positional parameters of the first and second calibration members when the substrate is fixed to a predetermined mounting surface, thereby improving the substrate's mounting accuracy and ultimately enhancing the processing quality of the silicon disk.

[0016] In the preferred embodiment of the clamping assembly for silicon disks described above, a plurality of limiting grooves are provided on the substrate, spaced apart from each other along the circumferential inner wall. Each limiting groove is configured to receive a limiting block fixed on a predetermined mounting surface. This arrangement allows the substrate to be easily fixed on the predetermined mounting surface, further improving assembly efficiency. Attached Figure Description

[0017] The preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

[0018] Figure 1 This is an assembly diagram of the clamping assembly for holding silicon disks according to the present invention;

[0019] Figure 2 This is a first structural schematic diagram of an embodiment of the clamping assembly for silicon disks of the present invention;

[0020] Figure 3 This is a second structural schematic diagram of an embodiment of the clamping assembly for silicon disks of the present invention;

[0021] Figure 4 This is a schematic diagram of the structure of a substrate in an embodiment of the clamping assembly for silicon disks according to the present invention;

[0022] Figure 5 This is a schematic diagram of an embodiment of the first support block and pressure block in the clamping assembly for silicon disks of the present invention;

[0023] Figure 6 This is a schematic diagram of the structure of the second support block in an embodiment of the clamping assembly for silicon disks of the present invention;

[0024] Figure 7 This is a schematic diagram of an embodiment of the adjustment mechanism in the clamping assembly for silicon disks according to the present invention;

[0025] Figure 8 This is a schematic diagram of the structure of an embodiment of the adjusting block in the clamping assembly for silicon disks according to the present invention;

[0026] Figure 9 This is a schematic diagram of the structure of an embodiment of the fastening block in the clamping assembly of the silicon disk according to the present invention;

[0027] Figure 10 This is a schematic diagram of an embodiment of the positioning element in the clamping assembly for silicon disks according to the present invention;

[0028] Figure 11 This is a schematic diagram of an embodiment of the calibration element in the clamping assembly for silicon disks according to the present invention;

[0029] Figure 12 This is a first structural schematic diagram of an embodiment of a work platform that mates with the clamping assembly for silicon disks of the present invention;

[0030] Figure 13 This is a schematic diagram of the structure of a limiting block in a work platform that mates with the clamping assembly for silicon disks of the present invention;

[0031] Figure 14 This is a second structural schematic diagram of an embodiment of a work platform that mates with the clamping assembly for silicon disks of the present invention.

[0032] List of reference numerals in the attached diagram:

[0033] 100. Fixture assembly; 110. Substrate; 110a. Front side of substrate; 110b. Back side of substrate; 110c. Outer circumferential edge; 111. Substrate body; 112. Sealing hole; 1121. Inner circumferential wall; 113a. First support block mounting slot; 113b. Second support block mounting slot; 113c. Adjustment mechanism mounting slot; 113d. Positioning component mounting slot; 113e. Calibration component mounting slot; 114. Limiting slot; 115. Probe movement slot; 116. Grip hole; 117. Fixing hole; 120. Support mechanism; 121. Support block; 121a. First support block; 121b. Second support block Support block; 1211, Fixing part; 12111, First mounting hole; 12112, Second mounting hole; 12113, Third mounting hole; 1212, Connecting part; 12121, First axial arc surface; 1213, Supporting part; 12131, First supporting plane; 122, Pressing block; 1221, Pressing block body; 12211, Pressing block mounting hole; 12212, Pressing plane; 130, Adjusting mechanism; 131, Adjusting block; 1311, Fixing section; 13111, Adjusting block mounting hole; 13112, First inclined surface; 1312, Connecting section; 13121, Second axial arc surface; 131 3. Support section; 13131, Second support plane; 132, Fastening block; 1321, Fastening block mounting hole; 1322, Second inclined surface; 140, Positioning component; 140a, First positioning component; 140b, Second positioning component; 141, Positioning component body; 1411, Positioning groove; 142, First lug; 1421, First positioning component mounting hole; 143, Second lug; 1431, Second positioning component mounting hole; 150, Calibration component; 150a, First calibration component; 150b, Second calibration component; 151, Calibration component body; 1511, Calibration protrusion; 15111, Calibration plane; 15 2. Mounting boss; 1521, Calibration part mounting hole; 200, Working platform; 210, Plate-shaped body; 210a, Front of plate-shaped body; 210b, Back of plate-shaped body; 211, Central through hole; 212, Clearance hole; 213, Substrate mounting hole; 214, Working platform mounting hole; 220, Annular groove; 230, Limiting block; 231, Limiting block body; 2311, Limiting block mounting hole; 232, Limiting protrusion; 2321, Auxiliary pressure plane; 240, Positioning pin; 250, Drainage groove; 300, Silicon disk; 310, Silicon disk body; 311, Upper surface; 312, Circumferential edge. Detailed Implementation

[0034] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0035] It should be noted that in the description of this invention, terms such as "upper," "lower," "left," "right," "inner," and "outer," indicating directional or positional relationships, are based on the directional or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] Furthermore, it should be noted that, in the description of this invention, unless otherwise explicitly specified and limited, the terms "installation," "setting," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection, an indirect connection through an intermediate medium, or a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] To address the technical problems of inconvenient operation and reduced processing quality of existing clamps used for silicon disks, this invention provides a clamp assembly 100 for a silicon disk 300. The clamp assembly 100 includes: a substrate 110 with a mounting hole 112 for receiving the silicon disk 300; and a support mechanism 120, comprising a plurality of support blocks 121 spaced apart and fixed within the circumferential inner wall 1121 surrounding the mounting hole 112. Each support block 121 has a first axial arc surface 12121 extending radially inward above the circumferential inner wall 1121 and a first support plane 12131 extending radially from the bottom of the first axial arc surface 12121 toward the centerline of the mounting hole 112. 12131 is adapted to abut against the outer edge of the lower surface of the silicon disk 300; and adjustment mechanism 130, the adjustment mechanism 130 including a plurality of adjustment blocks 131 spaced apart from each other along the circumferential inner wall 1121 and spaced apart from the support block 121, each adjustment block 131 being movably fixed in the circumferential inner wall 1121 and each adjustment block 131 being configured to push the silicon disk 300 radially inward so that the circumferential edge 312 of the silicon disk 300 abuts against the first axial arc surface 12121 of the opposing support block 121, wherein the support block 121 and the adjustment block 131 are both made of resin material.

[0038] In this document, unless otherwise stated, the term "axial" refers to the axial direction of the seat hole 112, the term "radial" refers to the radial direction of the seat hole 112, and the term "circumferential" refers to the circumferential direction of the seat hole 112.

[0039] Figure 1 This is an assembly diagram of the clamping assembly for holding silicon disks according to the present invention. Figure 1 As shown, in one or more embodiments, the clamping assembly 100 is configured to hold a silicon disk 300 to be processed therein, and the clamping assembly 100 is detachably fixed to the work platform 200 for machining the silicon disk 300. The silicon disk 300 has a generally circular silicon disk body 310. The silicon disk body 310 has opposing upper surfaces 311 and lower surfaces (not shown). The upper surface 311 is the surface to be processed away from the work platform 200, while the lower surface is a plane facing the work platform 200. In the assembled state, the silicon disk 300 can be constrained within the seat hole 112 of the clamping assembly 100, i.e., the circumferential edge 312 of the silicon disk 300 is opposite the circumferential inner wall 1121 of the seat hole 112.

[0040] Figure 2 This is a first structural schematic diagram of an embodiment of the clamping assembly for silicon disks of the present invention; Figure 3 This is a second structural schematic diagram of an embodiment of the clamping assembly for silicon disks according to the present invention. (See diagram below.) Figure 2 and Figure 3 As shown, in one or more embodiments, the clamping assembly 100 for the silicon disk 300 of the present invention includes components such as a substrate 110, a support mechanism 120, and an adjustment mechanism 130. The support mechanism 120 is disposed on the substrate 110 and configured to clamp the silicon disk 300 axially. The adjustment mechanism 130 is also disposed on the substrate, and the silicon disk 300 can be pushed toward the support mechanism 120 opposite to the adjustment mechanism 130 to achieve radial clamping of the silicon disk 300.

[0041] See also Figure 2 and Figure 3 The substrate 110 has a front side 110a and a back side 110b. In the assembled state, the front side 110a faces away from the work platform 200, while the back side 110b faces the work platform 200. The substrate 110 has a plate-shaped substrate body 111 that is approximately square with rounded corners. Alternatively, the substrate body 111 can also be provided in other suitable shapes, such as rectangles, circles, etc. The substrate body 111 can be made of a suitable metal material by machining, such as stainless steel, aluminum alloy, etc.

[0042] Figure 4 This is a schematic diagram of the substrate in an embodiment of the clamping assembly for silicon disks according to the present invention. Figure 4As shown, in one or more embodiments, a generally circular mounting hole 112 is formed in the center of the substrate body 111 to receive the silicon disk 300. The mounting hole 112 has a center line (not shown) extending axially and passing through its center. The diameter of the mounting hole 112 can be adjusted according to the specifications of the silicon disk 300 to be processed. The mounting hole 112 has a circumferential inner wall 1121 extending circumferentially. In one or more embodiments, three first support block mounting slots 113a are formed on the circumferential inner wall 1121, which are evenly spaced from each other. Each first support block mounting slot 113a is configured to receive a corresponding first support block 121a in the support mechanism 120. Two mounting holes (not shown) are provided in the first support block mounting slot 113a, which are circumferentially spaced from each other, to mate with the first support block 121a to form a fixed connection. Alternatively, the number of first support block mounting slots 113a can also be set to other suitable numbers, more or less than three, such as two, four, etc.

[0043] See also Figure 4 In one or more embodiments, two second support block mounting slots 113b, spaced apart from and separated from the first support block mounting slot 113a, are also formed on the circumferential inner wall 1121. Each second support block mounting slot 113b is configured to receive a corresponding second support block 121b of the support mechanism 120. Two radially spaced mounting holes (not shown) are provided in each second support block mounting slot 113b to mate with the second support block 121b and form a fixed connection. Alternatively, the number of second support block mounting slots 113b may be set to other suitable numbers, more or less than two, such as one, three, etc.

[0044] See also Figure 4 In one or more embodiments, two adjustment mechanism mounting grooves 113c are also formed on the circumferential inner wall 1121, spaced apart from each other and spaced apart from the first support block mounting groove 113a and the second support block mounting groove 113b. Based on Figure 4 As shown, the two adjustment mechanism mounting slots 113c are arranged above the circumferential inner wall 1121, while the two second support block mounting slots 113b are arranged below the circumferential inner wall 1121. Each adjustment mechanism mounting slot 113c is configured to receive a corresponding adjustment block 131 and a fastening block 132 from the adjustment mechanism 130. Two radially spaced mounting holes (not shown) are provided within the adjustment mechanism mounting slot 113c to mate with the adjustment block 131 and the fastener 132 respectively to form a fixed connection. Alternatively, the adjustment mechanism mounting slots 113c may be provided in other suitable numbers, such as one or three.

[0045] See also Figure 4In one or more embodiments, two spaced-apart positioning mounting grooves 113d are formed on a circumferential outer edge 110c of the substrate body 111. Based on Figure 4 As shown, the circumferential outer edge 110c is the lower outer edge of the substrate body 111. Alternatively, the positioning mounting groove 113d may also be provided on other outer edges of the substrate body 111, such as the left outer edge, right outer edge, or upper outer edge. Each positioning mounting groove 113d is configured to receive a corresponding positioning member 140. A length direction (based on the circumferential outer edge 110c) is provided within the positioning mounting groove 113d. Figure 4 The two mounting holes (not shown in the figure) spaced apart from each other (in the left-right direction) are used to mate with the positioning element 140 to form a fixed connection. Alternatively, the positioning element mounting slots 113d can also be provided in other suitable numbers, such as 3 or 4.

[0046] See also Figure 4 In one or more embodiments, two spaced-apart calibration mounting slots 113e are also formed on a circumferential outer edge 110c of the substrate body 111. Based on Figure 4 As shown, the circumferential outer edge 110c is also the lower outer edge of the substrate body 111. Alternatively, the calibration element mounting slot 113e may also be provided on other outer edges of the substrate body 111, such as the left outer edge, right outer edge, or upper outer edge. Each calibration element mounting slot 113e is configured to receive a corresponding calibration element 150. A mounting hole (not shown) is formed in the calibration element mounting slot 113e to mate with the calibration element 150 to form a fixed connection.

[0047] See also Figure 4 In one or more embodiments, six spaced-apart limiting grooves 114 are also formed on the circumferential inner wall 1121. Each limiting groove 114 is configured to receive a corresponding limiting block 230 fixed on the work platform 200, so that the substrate 110 can be easily snapped onto the work platform 200. Alternatively, the number of limiting grooves 114 may be set to other suitable numbers, more or less than six, such as five, seven, etc.

[0048] See also Figure 4 In one or more embodiments, seven probe slots 115 spaced apart from each other are also formed on the circumferential inner wall 1121. Each probe slot 115 is configured to allow a probe in an automated calibration device to move therein for automated calibration and positioning of the silicon disk 300 arranged within the mounting hole 112, thereby improving automation and processing accuracy. It should be noted that the number and shape of the probe slots 115 can be adjusted according to practical needs.

[0049] See also Figure 4In one or more embodiments, four symmetrically arranged gripping holes 116 are provided at the four corners of the substrate body 111. Each gripping hole 116 has a generally rectangular shape with rounded corners so that the user can easily grip the substrate 110. Alternatively, the number of gripping holes 116 may be set to other suitable numbers, more or less than four, such as two, six, etc.

[0050] See also Figure 4 In one or more embodiments, the substrate body 111 is further provided with eight fixing holes 117 spaced apart from each other. Each fixing hole 117 is configured to mate with a corresponding fastener, so that the substrate 110 is detachably fixed on the work platform 200 to enhance the effective connection between the substrate 110 and the work platform 200.

[0051] like Figures 1-3 As shown, in one or more embodiments, the support mechanism 120 includes a plurality of support blocks 121 arranged at intervals around and fixed within the circumferential inner wall 1121 surrounding the seat hole 112. Each support block 121 is configured to be manufactured from a suitable resin material, such that the support block 121 has good rigidity and strength to meet mechanical strength requirements, while also having moderate hardness to prevent scratching the silicon disk 300 and affecting processing quality. Resin materials include, but are not limited to, ABS, PP, etc. In one or more embodiments, the plurality of support blocks 121 includes three first support blocks 121a and two second support blocks 121b. The first support blocks 121a are fixed in corresponding first support block mounting grooves 113a, and the second support blocks 121b are fixed in corresponding second support block mounting grooves 113b. Alternatively, the number of first support blocks 121a and second support blocks 121b can be adjusted to other suitable quantities as needed.

[0052] Figure 5 This is a schematic diagram of an embodiment of the first support block and pressure block in the clamping assembly for silicon disks according to the present invention. Figure 5 As shown, in one or more embodiments, the first support block 121a includes an integrally formed fixing portion 1211, a connecting portion 1212, and a support portion 1213. The fixing portion 1211 extends substantially circumferentially along the seat hole 112. A first mounting hole 12111 and a second mounting hole 12112, spaced apart circumferentially, are formed on the fixing portion 1211 so that the first support block 121a can mate with the mounting hole in the first support block mounting groove 113a and be fixed to the base plate 110 by fasteners (not shown). Fasteners include, but are not limited to, screws and bolts. A third mounting hole 12113, which mates with the pressure block 122, is also formed between the first mounting hole 12111 and the second mounting hole 12112.

[0053] See also Figure 5 In one or more embodiments, the connecting portion 1212 is configured to extend axially downward from the side of the fixing portion 1211 near the center line of the seat hole 112. A first axial arc surface 12121 is formed on the connecting portion 1212, extending radially inward along the seat hole 112 and higher than the circumferential inner wall 1121 of the seat hole 112. This allows the circumferential edge 312 of the silicon disk 300 to abut against the first axial arc surface 12121 in the assembled state, without contacting the circumferential inner wall 1121 of the seat hole 112, thereby effectively preventing the metal substrate 110 from scratching the silicon disk 300. Preferably, the first axial arc surface 12121 is parallel to the circumferential edge 312 of the silicon disk 300, resulting in a large contact area between the first axial arc surface 12121 and the circumferential edge 312, ensuring the effectiveness and stability of the clamping.

[0054] See also Figure 5 In one or more embodiments, the support portion 1213 is configured to extend radially inward from the bottom of the connecting portion 1212 along the seat hole 112 (i.e., toward the center line of the seat hole 112). That is, the entire first support block 121a has a generally "Z"-shaped shape. A first support plane 12131 is formed on the support portion 1213, located on its upper part and extending radially inward, such that in the assembled state, the first support plane 12131 can abut against the outer edge of the lower surface of the silicon disk 300, thereby stably supporting the silicon disk 300.

[0055] See also Figure 1 and Figure 5 In one or more embodiments, a pressure block 122 is also fixed on each first support block 121a. The pressure block 122 has a generally block-shaped pressure block body 1221. The pressure block body 1221 is made of a suitable resin material by injection molding, such as ABS, PP, etc. A pressure block mounting hole 12211 is formed on the pressure block body 1221 to mate with the third mounting hole 12113 of the first support block 121a, so that the pressure block 122 and the first support block 121a can be fixedly connected by fasteners. Fasteners include, but are not limited to, screws, bolts, etc. The lower surface of the pressure block body 1221 has a pressure plane 12212 that extends radially inward along the seat hole 112 (i.e., parallel to the first support plane 12131), such that in the assembled state, the pressure plane 12212 can abut against the outer edge of the upper surface 311 of the silicon disk 300, thereby firmly and stably constraining the silicon disk 300 between the first support block 121a and the pressure block 122.

[0056] Figure 6 This is a schematic diagram of the structure of the second support block in an embodiment of the clamping assembly for silicon disks according to the present invention. Figure 6As shown, in one or more embodiments, the second support block 121b has an integrally formed fixing portion 1211, connecting portion 1212, and support portion 1213. The fixing portion 1211 extends substantially radially along the seat hole 112. A first mounting hole 12111 and a second mounting hole 12112, spaced apart from each other circumferentially, are formed on the fixing portion 1211 so that the second support block 121b can mate with the mounting holes in the second support block mounting groove 113b and be fixed to the base plate 110 by fasteners (not shown). Fasteners include, but are not limited to, screws, bolts, etc. The connecting portion 1212 is configured to extend axially downward from the side of the fixing portion 1211 near the centerline of the seat hole 112. A first axial arcuate surface 12121 is formed on the connecting portion 1212, extending radially inward along the seat hole 112 and higher than the circumferential inner wall 1121 of the seat hole 112. The support portion 1213 is configured to extend radially inward from the bottom of the connecting portion 1212 along the mounting hole 112. That is, the entire second support block 121b also has a roughly "Z"-shaped form. A first support plane 12131 is formed on the support portion 1213, located on its upper part and extending radially inward. With the above configuration, the silicon disk 300 can obtain more support points in the assembled state, making it more stably fixed in the mounting hole 112.

[0057] like Figures 1-2 As shown, in one or more embodiments, the adjustment mechanism 130 includes two adjustment mechanisms 130 spaced apart from each other along the circumferential inner wall 1121 of the seat hole 112 and also spaced apart from the support block 121. Each adjustment mechanism 130 can be fixed in a corresponding adjustment mechanism mounting slot 113c of the base plate 110. Alternatively, the number of adjustment mechanisms 130 can also be set to other suitable numbers, more or less than two, such as one, three, etc.

[0058] Figure 7 This is a schematic diagram of an embodiment of the adjustment mechanism in the clamping assembly for silicon disks according to the present invention; Figure 8 This is a schematic diagram of the structure of an embodiment of the adjusting block in the clamping assembly for silicon disks according to the present invention;

[0059] Figure 9 This is a schematic diagram of an embodiment of the fastening block in the clamping assembly of the silicon disk according to the present invention. Figures 7-9As shown, in one or more embodiments, each adjustment mechanism 130 includes an adjustment block 131 and a fastening block 132 that mate with each other. In the assembled state, the adjustment block 131 is positioned near the seat hole 112, while the fastening block 132 is positioned away from the seat hole 112. Preferably, the adjustment block 131 is made of a suitable resin material, such as ABS or PP, so that the adjustment block 131 has good rigidity and strength to meet mechanical strength requirements, and also has moderate hardness to avoid scratching the silicon disk 300 due to excessive hardness. Further, the fastening block 132 is made of a suitable metal material, so that the fastening block 132 has high hardness, so as to compress the adjustment block 131 to control the radial displacement between the adjustment block 131 and the silicon disk 300. The metal material includes, but is not limited to, stainless steel and aluminum alloy.

[0060] See Figure 7 and Figure 8 In one or more embodiments, the adjusting block 131 includes an integrally formed fixing section 1311, a connecting section 1312, and a supporting section 1313. The fixing section 1311 extends generally radially along the seat hole 112. An adjusting block mounting hole 13111 is formed on the fixing section 1311 to mate with a mounting hole in the adjusting mechanism mounting groove 113c on the substrate 110, thereby detachably fixing the adjusting block 131 to the substrate 110. A first inclined surface 13112 is formed on the side of the fixing section 1311 away from the seat hole 112. Based on... Figure 8 As shown, the first inclined surface 13112 extends obliquely downward to the right, that is, in the assembled state, it extends from top to bottom along the direction away from the center line of the seat hole 112.

[0061] See also Figure 7 and Figure 8 In one or more embodiments, the connecting segment 1312 is configured to extend axially downward from the side of the fixing segment 1311 near the seat hole 112. A second axial arcuate surface 13121 facing the centerline of the seat hole 112 is formed on the connecting segment 1312. The second axial arcuate surface 13121 is configured to be higher than the circumferential inner wall 1121 of the seat hole 112 in the radially inward direction along the seat hole 112, such that in the assembled state, the circumferential edge 312 of the silicon disk 300 can abut against the second axial arcuate surface 13121 without contacting the circumferential inner wall 1121 of the seat hole 112, thereby avoiding scratches to the silicon disk 300 by the metal substrate 110. Preferably, the second axial arc surface 13121 and the first axial arc surface 12121 on the support block 121 (including the first support block 121a and the second support block 121b) are located on the same arc surface, so that the circumferential edge 312 of the silicon disk 300 can obtain more contact points and contact area in the assembled state, making the force on the silicon disk 300 more uniform and the clamping more stable.

[0062] See also Figure 7 and Figure 8 In one or more embodiments, the support segment 1313 is configured to extend radially inward from the bottom of the connecting segment 1312 along the seat hole 112. That is, the entire adjusting block 131 has a generally "Z"-shaped form. A second support plane 13131 is formed on the support segment 1313, located on its upper part and extending radially inward. Preferably, the second support plane 13131 and the first support plane 12131 on the support block 121 are located on the same radial plane, so that the lower surface of the silicon disk 300 can obtain more support points to improve the stability of clamping the silicon disk 300.

[0063] See also Figure 7 and Figure 9 In one or more embodiments, the fastening block 132 is a generally trapezoidal block structure. A fastening block mounting hole 1321 is formed on the fastening block 132 to mate with another mounting hole in the adjustment mechanism mounting groove 113c on the substrate 110, allowing a fastener (not shown) to detachably fix the fastening block 132 to the substrate 110. Fasteners include, but are not limited to, screws and bolts. The tightness of the fastening block 132 on the substrate 110 can be adjusted by controlling the tightness of the fastener in the fastening block mounting hole 1321. A second inclined surface 1322, generally parallel to the first inclined surface 13112, is formed on the side of the fastening block 132 near the seat hole 112, allowing the fastening block 132 to tightly abut against the adjustment block 131. In the assembled state, both the second inclined surface 1322 and the first inclined surface 13112 extend obliquely downwards toward a direction away from the centerline of the seat hole 112. When the adjusting fastening block 132 is more securely fixed to the substrate 110, the second inclined surface 1322 applies a pressing force approximately perpendicular to the first inclined surface 13112. This pressing force has a radially inward component, causing the adjusting block 131 to have a radially inward tendency to move. This causes the second axial arc surface 13121 of the adjusting block 131 to fully contact the circumferential edge 312 of the silicon disk 300 and push the silicon disk 300 radially inward, so that the circumferential edge 312 of the silicon disk 300 can abut against the first axial arc surface 12121 of the support block 121 opposite to the adjusting block 131, thereby achieving radial clamping of the silicon disk 300.

[0064] like Figure 1 and Figure 2As shown, in one or more embodiments, the clamping assembly 100 for the silicon disk 300 of the present invention further includes positioning elements 140. Positioning elements 140 include a first positioning element 140a and a second positioning element 140b spaced apart from each other on a circumferential outer edge 110c of the substrate 110. Each positioning element 140 can be fixed in a corresponding positioning element mounting groove 113d on the substrate 110. Each positioning element 140 can be made of a suitable metal material (e.g., stainless steel, aluminum alloy, etc.) to give it high rigidity and strength, preventing deformation and thus improving positioning accuracy. Alternatively, the number of positioning elements 140 can also be set to other suitable numbers, such as 3, 4, etc.

[0065] Figure 10 This is a schematic diagram of an embodiment of the positioning element in a clamping assembly for silicon disks according to the present invention. Figure 10 As shown, in one or more embodiments, each positioning member 140 includes a positioning member body 141 and a first lug 142 and a second lug 143 located on both sides of the positioning member body 141. The positioning member body 141 has a generally columnar structure. A generally "V"-shaped positioning groove 1411 is formed on one side of the positioning member body 141 (in the assembled state, i.e., the side away from the substrate body 111) to mate with the positioning pin 240 on the work platform 200, allowing the substrate 110 to be conveniently and accurately positioned on the work platform 200. A first positioning member mounting hole 1421 is formed on the first lug 142, and a second positioning member mounting hole 1431 is formed on the second lug 143 to mate with the mounting hole in the positioning member mounting groove 113d, allowing the positioning member 140 to be fixedly connected to the substrate 110.

[0066] like Figure 1 and Figure 2 As shown, in one or more embodiments, the clamp assembly 100 for the silicon disk 300 of the present invention further includes calibration elements 150. Calibration elements 150 include a first calibration element 150a and a second calibration element 150b disposed on a circumferential outer edge 110c of the substrate 110 and spaced apart from each other. Each calibration element 150 can be fixed in a corresponding calibration element mounting slot 113e on the substrate 110. Each calibration element 150 can be made of a metal material (e.g., stainless steel, aluminum alloy, etc.) to give it high rigidity and strength, thereby improving calibration accuracy.

[0067] Figure 11 This is a schematic diagram of an embodiment of the calibration element in the clamping assembly for silicon disks according to the present invention. Figure 11As shown, in one or more embodiments, each calibration element 150 includes an integrally formed calibration element body 151 and a mounting boss 152. The calibration element body 151 has a generally columnar structure. A vertically extending calibration protrusion 1511 is formed on the side of the calibration element body 151 away from the mounting boss 152 (in the assembled state, i.e., the side away from the substrate body 111). The calibration protrusion 1511 has a calibration plane 15111 extending along the centerline of the mounting hole 112. During calibration, the position parameters of the calibration plane 15111 of the first calibration element 150a and the second calibration element 150b are respectively tested using a testing tool, and then the position parameters of these two calibration elements 150 are compared to determine and adjust the position of the substrate 110 on the worktable 200 to further improve the mounting accuracy of the substrate 110, thereby improving the processing quality of the silicon disk 300. A calibration component mounting hole 1521 is formed on the mounting boss 152 so as to match the mounting hole in the corresponding calibration component mounting groove 113e on the substrate 110, so that the calibration component 150 is fixedly connected to the substrate 110.

[0068] Figure 12 This is a first structural schematic diagram of an embodiment of a work platform that mates with the clamping assembly for silicon disks of the present invention; Figure 13 This is a schematic diagram of the structure of a limiting block in a work platform that mates with the clamping assembly for silicon disks of the present invention; Figure 14 This is a second structural schematic diagram of an embodiment of a work platform that mates with the clamping assembly for silicon disks of the present invention. The following is in conjunction with... Figures 12-14 This paper introduces an embodiment of a work platform 200 that is matched with the clamp assembly 100 for silicon disk 300 of the present invention.

[0069] like Figure 12 and Figure 14 As shown, in one or more embodiments, the work platform 200 has a generally square plate-shaped body 210 with rounded corners. This plate-shaped body 210 is configured to be fixed to a predetermined processing device to secure a clamping assembly 100 holding the silicon disk 300 to be processed. The plate-shaped body 210 may be made of a suitable metal material (e.g., stainless steel) to give it good mechanical properties. The plate-shaped body 210 has opposing plate-shaped body front faces 210a (see...). Figure 12 ) and the back surface of the plate-shaped body 210b (see Figure 14 In the assembled state, the front side 210a of the plate-shaped body faces the clamp assembly 100, while the back side 210b of the plate-shaped body is away from the clamp assembly 100.

[0070] See also Figure 12 and Figure 14In one or more embodiments, a generally circular central through-hole 211 is formed at the center of the plate-shaped body 210, allowing liquids such as cutting fluid, cleaning fluid, and electroplating solution used for processing the silicon disk 300 to drain smoothly from the central through-hole 211, preventing them from stagnating on the front surface 210a of the plate-shaped body and affecting the lower surface of the silicon disk 300. See also Figure 12 In one or more embodiments, an annular groove 220 with the same center as the central through hole 211 is also provided on the front surface 210a of the plate-shaped body, so that the liquid can be discharged more conveniently from the central through hole 211. See Figure 14 In one or more embodiments, drainage grooves 250 are formed on the back surface 210b of the plate-shaped body, extending radially outward from the central through hole 211 to the four side edges of the plate-shaped body 210, so that the liquid flowing down from the central through hole 211 can be conveniently discharged along the drainage grooves 250. It should be noted that the number and arrangement of the drainage grooves 250 can also be adjusted according to actual needs.

[0071] See also Figure 12 and Figure 14 In one or more embodiments, the plate-shaped body 210 is further provided with a plurality of spaced-apart clearance holes 212. Each clearance hole 212 has a generally rectangular shape and is configured to receive the support portion 1213 of the support block 121 and the support section 1313 of the adjustment block 131 in the clamping assembly 100, so that the substrate 110 can fit more smoothly on the work platform 200. It should be noted that the number and arrangement of the clearance holes 212 can be adjusted according to the needs of the support block 121 and the adjustment block 131.

[0072] See also Figure 12 and Figure 14 In one or more embodiments, the plate-shaped body 210 is further provided with a plurality of spaced-apart substrate mounting holes 213. Each substrate mounting hole 213 is configured to mate with a corresponding fixing hole 117 on the substrate 110, so that the substrate 110 can be fixedly connected to the work platform 200 by means of fasteners (not shown in the figure). Fasteners include, but are not limited to, screws, bolts, etc. In one or more embodiments, the plate-shaped body 210 is further provided with a plurality of spaced-apart work platform mounting holes 214, so that the plate-shaped body 210 can be fixed to a predetermined processing equipment by means of mating fasteners.

[0073] See also Figure 12In one or more embodiments, two locating pins 240 spaced apart from each other are further provided on the plate-shaped body 210. Each locating pin 240 extends vertically from the front side 210a of the plate-shaped body and has a generally cylindrical shape. Each locating pin 240 is configured to be constrained within a locating groove 1411 on a corresponding locating member 140 on the substrate 110 to improve the assembly efficiency and positioning accuracy of the substrate 110.

[0074] See also Figure 12 In one or more embodiments, four spaced-apart limiting blocks 230 are further provided on the plate-shaped body 210. Each limiting block 230 is detachably fixed to the plate-shaped body 210, and each limiting block 230 can be inserted into a corresponding limiting groove 114 of the substrate 110, so that the substrate 110 can be firmly and stably fixed on the working platform 200. Alternatively, the number of limiting blocks 230 can be arranged in other suitable numbers, more or less than four, such as three or five, depending on actual needs.

[0075] In one or more embodiments, each limiting block 30 has a generally columnar limiting block body 231. The limiting block body 231 can be manufactured from a suitable resin material by injection molding, such as ABS, PP, etc. A limiting block mounting hole 2311 is formed on the limiting block body 231, so that the limiting block 230 can be fixedly connected to the plate-shaped body 210 by fasteners. In one or more embodiments, a limiting protrusion 232 extending radially inward along the seat hole 112 is formed on the upper part of the limiting block body 231, and an auxiliary pressure plane 2321 extending radially inward is formed on the lower surface of the limiting protrusion 232. In the assembled state, the auxiliary pressure plane 2321 can abut against the outer edge of the upper surface 311 of the silicon disk 300 to further enhance the firmness and stability of clamping the silicon disk 300.

[0076] The technical solution of the present invention has been described above with reference to the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will all fall within the scope of protection of the present invention.

Claims

1. A clamping assembly for silicon disks, characterized in that, The clamp assembly includes: A substrate having a mounting hole for receiving the silicon disk; A support mechanism comprising a plurality of support blocks spaced apart from each other and fixed within the circumferential inner wall surrounding the entire circumferential inner wall of the seat hole. Each support block has a first axial arcuate surface extending radially inward above the circumferential inner wall and a first support plane extending radially from the bottom of the first axial arcuate surface toward the centerline of the seat hole. The first support plane is adapted to abut against the outer edge of the lower surface of the silicon disk. An adjustment mechanism comprising a plurality of adjustment blocks spaced apart from each other along the circumferential inner wall and spaced apart from the support blocks, each adjustment block being movably fixed in the circumferential inner wall and configured to push the silicon disk radially inward so that the circumferential edge of the silicon disk abuts against the first axial arc surface of the opposing support block. Both the support block and the adjustment block are made of resin material. The adjustment mechanism further includes fastening blocks that are detachably fixed to the substrate. Each fastening block is connected to a corresponding adjustment block, and the degree of fastening relative to the substrate is adjustable so as to adjust the amount of inward radial displacement applied to the silicon disk by the corresponding adjustment block.

2. The clamping assembly for silicon disks according to claim 1, characterized in that, A first inclined surface is formed on the side of the adjusting block away from the center line, extending downward in a direction away from the center line, and a second inclined surface is formed on the fastening block opposite to the first inclined surface and abutting against the first inclined surface.

3. The clamping assembly for silicon disks according to claim 2, characterized in that, The fastening block is made of metal.

4. The clamping assembly for silicon disks according to claim 1, characterized in that, A second support plane is formed at the bottom of each of the adjustment blocks, extending toward the center line and located on the same radial plane as the first support plane.

5. The clamping assembly for silicon disks according to claim 4, characterized in that, Each of the adjustment blocks has a second axial arc surface that extends vertically upward from the second support plane and is located on the same arc surface as the first axial arc surface.

6. The clamping assembly for a silicon disk according to any one of claims 1-5, wherein the clamping assembly further comprises: At least one pressure block is configured to be fixed to a corresponding support block, and the pressure block has a pressure plane parallel to the first support plane, the pressure plane being adapted to abut against the outer edge of the upper surface of the silicon disk.

7. The clamping assembly for silicon disks according to claim 1, characterized in that, A plurality of positioning grooves spaced apart from each other are formed on one circumferential outer edge of the substrate, each positioning groove being adapted to mate with a positioning pin on a predetermined mounting surface.

8. The clamping assembly for silicon disks according to claim 1, characterized in that, A first calibration element and a second calibration element are provided on a circumferentially outer side of the substrate, spaced apart from each other. Each of the first calibration element and the second calibration element has a calibration plane extending axially along the centerline direction.

9. The clamping assembly for silicon disks according to claim 1, characterized in that, The substrate is provided with a plurality of limiting grooves arranged at intervals along the circumferential inner wall, each limiting groove being configured to receive a limiting block fixed on a predetermined mounting surface.

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