A composite blade structure, a turbine rotor, and a turbomolecular pump

Abstract

This invention relates to the field of turbomolecular pump technology, specifically to a composite blade structure, a turbine rotor, and a turbomolecular pump. The composite blade structure includes: a first blade disposed in the pumping section of the turbine rotor; both the pressure and suction surfaces of the first blade are curved; the inlet angle α1 of the first blade ranges from 25° to 35°; the outlet angle β1 of the first blade ranges from 40° to 50°; and a third blade disposed in the compression section of the turbine rotor; both the pressure and suction surfaces of the third blade are non-curved; the inlet angle α3 of the third blade ranges from 20° to 25°; and the outlet angle β3 of the third blade ranges from 20° to 25°. The composite blade structure provided by this invention improves both the pumping capacity of the turbomolecular pump and the manufacturability of the turbine rotor blades, reducing processing difficulty and shortening the processing cycle.

Description

Technical Field

[0001] This invention relates to the field of turbomolecular pump technology, specifically to a composite blade structure, a turbine rotor, and a turbomolecular pump. Background Technology

[0002] As a vacuum-generating device, turbomolecular pumps have wide applications in industries requiring high vacuum, such as the semiconductor industry. Chip manufacturing demands a high vacuum environment, and turbomolecular pumps can extract most of the air from a confined space, leaving only a small amount of hydrogen as residual gas, thus achieving the required ultimate vacuum environment. The high pumping speed and high compression ratio of turbomolecular pumps are key to the turbine blade structure design and are also the standards for evaluating the ultimate vacuum capability of this pump product.

[0003] Traditional turbomolecular pumps have planar pressure and suction surfaces, with the blade root to tip angle being the same. This design offers advantages such as ease of machining, low cost, and short machining cycle. However, it significantly reduces important characteristics like pumping speed and compression ratio. Turbine rotors, on the other hand, utilize curved blades. While curved blades offer higher pumping speeds and compression ratios, their machining is more difficult, time-consuming, and costly. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the existing turbomolecular pump increases the processing difficulty while achieving high pumping characteristics, thereby providing a composite blade structure that can achieve high pumping characteristics while reducing processing difficulty.

[0005] Another technical problem to be solved by the present invention is to overcome the defect that the existing turbomolecular pump increases the processing difficulty while achieving high pumping characteristics, thereby providing a turbine rotor that can achieve high pumping characteristics while reducing processing difficulty.

[0006] To solve the above-mentioned technical problems, the present invention provides a composite blade structure comprising:

[0007] The first blade is located in the extraction section of the turbine rotor; both the pressure surface and the suction surface of the first blade are curved surfaces; the inlet angle α1 of the first blade is in the range of 25°≤α1≤35°; the outlet angle β1 of the first blade is in the range of 40°≤β1≤50°; and the axial tilt angle γ1 of the first blade is in the range of 0°≤γ1≤20°.

[0008] The third blade is located in the compression section of the turbine rotor; both the pressure surface and the suction surface of the third blade are non-curved surfaces; the inlet angle α3 of the third blade is in the range of 20°≤α3≤25°; the outlet angle β3 of the third blade is in the range of 20°≤β3≤25°; and the axial tilt angle γ3 is the same in all regions of the third blade.

[0009] Optionally, the composite blade structure further includes a second blade disposed in the transition section of the turbine rotor; the inlet angle α2 of the second blade is in the range of 25°≤α2≤26°; the outlet angle β2 of the second blade is in the range of 25°≤β2≤26°; and the axial tilt angle γ2 is the same in each region of the second blade.

[0010] Optionally, the first blade includes multiple span curves; the axial tilt angle γ1 corresponding to the first blade is different on different span curves.

[0011] Optionally, both the pressure surface and the suction surface of the second blade are non-curved surfaces.

[0012] The turbine rotor provided by the present invention includes:

[0013] The turbine rotor comprises a sequentially connected extraction section, a transition section, and a compression section; each of the extraction section, the transition section, and the compression section has one or more stages of blades arranged along the axial direction of the turbine rotor shaft.

[0014] And the aforementioned composite blade structure.

[0015] Optionally, the extraction section is provided with one or more stages of curved blades; the transition section and the compression section are both provided with one or more stages of non-curved blades.

[0016] Optionally, each stage of the extraction section includes M first blades, where 16 ≤ M ≤ 33; the M first blades are arranged circumferentially along the axis of rotation of the turbine rotor; the thickness of the first blade is d1, where 2 mm ≤ d1 ≤ 4 mm.

[0017] Optionally, each stage of the transition section includes N second blades, where 37≤N≤57; the N second blades are arranged circumferentially along the axis of the turbine rotor; the blade thickness of the second blade is d2, where 2mm≤d2≤4mm.

[0018] Optionally, each stage of the compression section includes L third blades, where 65≤L≤66; the L third blades are arranged circumferentially along the axis of the turbine rotor; the thickness of the third blade is d3, where 1.5mm≤d3≤3mm.

[0019] The present invention also provides a turbomolecular pump, comprising: a turbomolecular pump body, stationary blades, a drive system, and the aforementioned turbine rotor.

[0020] The technical solution of this invention has the following advantages:

[0021] 1. The composite blade structure provided by the present invention includes: a first blade disposed in the pumping section of a turbine rotor; both the pressure surface and the suction surface of the first blade are curved surfaces; a third blade disposed in the compression section of the turbine rotor; both the pressure surface and the suction surface of the third blade are non-curved surfaces; by setting the composite blade structure in the turbomolecular pump and setting the first blade in the pumping section of the turbine rotor, the gas capture capability and backflow prevention capability are improved, thereby increasing the compression ratio and thus improving the pumping capacity of the turbomolecular pump; by setting the third blade in the compression section of the turbine rotor, under the same parameters, compared with a single curved blade structure, the processing difficulty of the turbomolecular pump blade is reduced, the processing cycle is shortened, and the cost is reduced while ensuring the pumping speed and compression ratio.

[0022] 2. The composite blade structure provided by the present invention further includes a second blade, which is disposed in the transition section of the turbine rotor; both the pressure surface and the suction surface of the second blade are non-curved surfaces; the composite blade structure improves the gas capture capability and reverse backflow prevention capability through the curved blade design of the extraction section, thereby increasing the compression ratio accordingly; by adopting a non-curved surface design for the blades in the transition section and the compression section, the blade processing speed is further improved while ensuring the extraction speed and compression ratio, reducing the blade processing cycle and lowering the cost.

[0023] 3. The turbine rotor provided by the present invention has one or more stages of curved blades arranged in the extraction section along the axial direction of the turbine rotor shaft; each stage of the extraction section includes M first blades, where 16≤M≤33; the M first blades are arranged circumferentially along the turbine rotor shaft; the thickness of the first blades gradually decreases from the root to the top; since the first blades adopt different inclination angles and gradually varying thicknesses from the blade root to the blade top, and the first blades are set with a smaller inlet angle and a larger outlet angle, the blades' ability to capture gas and prevent backflow is improved, thereby improving the pumping speed and compression ratio of the turbomolecular pump.

[0024] 4. The turbine rotor provided by the present invention has one or more stages of non-curved blades in its transition section and compression section; each stage of blades in the transition section includes N second blades, where 37≤N≤57; each stage of blades in the compression section includes L third blades, where 65≤L≤66; the non-curved blades are arranged circumferentially along the axis of rotation of the turbine rotor; by setting non-curved blades in the transition section and compression section to cooperate with the curved blades in the extraction section, under the same parameters, compared with a turbine rotor with a single curved blade structure, the turbine rotor reduces the processing difficulty of the turbomolecular pump blades, shortens the processing cycle, and reduces costs while ensuring the pumping speed and compression ratio of the turbomolecular pump.

[0025] 5. The turbine rotor provided by the present invention is provided with eight stages of rotor blades. The first three stages are the extraction section, the middle two stages are the transition section, and the last three stages are the compression section. The extraction section is provided with three stages of curved blades along the rotor shaft axis. Each stage of blades includes M first blades, where 16≤M≤33. The first blades have different inclination angles from the root to the tip to improve the blades' ability to capture gas and prevent backflow. The transition section is provided with two stages of non-curved blades along the rotor shaft axis. Each stage of blades includes N second blades, where 37≤N≤57. The compression section is provided with three stages of non-curved blades along the rotor shaft axis. Each stage of blades includes L third blades, where 65≤L≤66. Compared with a turbine rotor with a single blade structure, the turbine rotor improves both the extraction capacity of the turbomolecular pump and the manufacturability of the turbine rotor blades, reduces the processing difficulty, and shortens the processing cycle. Attached Figure Description

[0026] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the overall structure of the first blade of the composite blade structure of the present invention;

[0028] Figure 2 This is a schematic diagram of the axial structure of the turbine rotor of the present invention;

[0029] Figure 3 This is a schematic diagram of the radial arrangement of the blades in the extraction section of the turbine rotor of the present invention.

[0030] Explanation of reference numerals in the attached figures:

[0031] 1. Exhaust section; 10. First blade; 2. Transition section; 20. Second blade; 3. Compression section; 30. Third blade. Detailed Implementation

[0032] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0035] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0036] Combination Figures 1-3 As shown, the composite blade structure provided in this embodiment includes:

[0037] The first blade 10 is disposed in the extraction section 1 of the turbine rotor; both the pressure surface and the suction surface of the first blade 10 are curved surfaces; the inlet angle α1 of the first blade 10 is in the range of 25°≤α1≤35°; the outlet angle β1 of the first blade 10 is in the range of 40°≤β1≤50°; the axial tilt angle γ1 of the first blade 10 is in the range of 0°≤γ1≤20°.

[0038] The third blade 30 is disposed in the compression section 3 of the turbine rotor; the pressure surface and suction surface of the third blade 30 are both non-curved surfaces; the inlet angle α3 of the third blade 30 is in the range of 20°≤α3≤25°; the outlet angle β3 of the third blade 30 is in the range of 20°≤β3≤25°; the axial tilt angle γ3 of each region of the third blade 30 is the same.

[0039] It should be noted that the pressure surface refers to Figure 2 The surface indicated by the center lead "P"; the suction surface refers to Figure 2 The surface indicated by the center line "Q"; both the pressure surface and the suction surface include multiple span curves, wherein the first span curve refers to Figure 2 The curve referred to by the middle line "Sps1", the second span curve refers to Figure 2 The curve referred to by the middle line "Sps2", the third span curve refers to Figure 2 The curve referred to by the middle line "Sps3", the fourth span curve refers to Figure 2 The curve referred to by the middle line "Sps4", the fifth span curve refers to Figure 2 The curve referred to by the center line "Sps5"; the inlet angle refers to Figure 2 The angle indicated by the center line "α" refers to the following: the inlet angle of the first blade 10 is α1, the inlet angle of the second blade 20 is α2, and the inlet angle of the third blade 30 is α3; the outlet angle refers to... Figure 2 The angle indicated by the center line "β" refers to the exit angle of the first blade 10 (β1), the exit angle of the second blade 20 (β2), and the exit angle of the third blade 30 (β3); the axial tilt angle refers to... Figure 2 The angle indicated by the center line "γ" refers to the axial direction. Figure 2 The direction indicated by the middle arrow "Z" refers to the axial tilt angle of the first blade 10 being γ1, the axial tilt angle of the second blade 20 being γ2, and the axial tilt angle of the third blade 30 being γ3; the blade thickness refers to... Figure 2 The angle indicated by the middle arrow "d" refers to the following: the blade thickness of the first blade 10 is d1, the blade thickness of the second blade 20 is d2, and the blade thickness of the third blade 30 is d3. The inlet angle, the outlet angle, the axial tilt angle, and the blade thickness can be adjusted according to the actual usage conditions such as the specifications and model of the turbomolecular pump, and are not limited to the situation described in this embodiment.

[0040] Optionally, the inlet angle α1 of the first blade 10 is smaller than the outlet angle β1 of the first blade 10, thereby improving the ability to capture the gas being pumped, improving the ability to discharge the gas being pumped, and improving the ability to prevent backflow.

[0041] Optionally, the inlet angle α1 of the first blade 10 is 30°; the outlet angle β1 of the first blade 10 is 45°.

[0042] Optionally, the first blade 10 is disposed in the pumping section 1 of the turbine rotor; both the pressure surface and the suction surface of the first blade 10 are set as curved surfaces, and the root to the top of the first blade 10 adopts different inclination angles and gradual thicknesses, which can further improve the blade's ability to capture gas and prevent backflow. Under the same other parameters, the pumping speed and compression ratio of the turbomolecular pump are improved, thereby enhancing the pumping capacity of the turbomolecular pump under low-pressure conditions.

[0043] Optionally, the axial tilt angle γ1 of the first blade 10 gradually increases from the inlet end to the outlet end.

[0044] Optionally, both the pressure surface and the suction surface of the third blade 30 are planar.

[0045] Optionally, the inlet angle α3 of the third blade 30 is 25°; the outlet angle β3 of the third blade 30 is 25°.

[0046] Optionally, the pressure surface and suction surface of the third blade 30 are both non-curved surfaces; the third blade 30 is disposed in the compression section 3 of the turbine rotor; by disposing of the third blade 30 in the compression section 3 of the turbine rotor, the machining difficulty of the turbomolecular pump blades is reduced, the machining cycle is shortened, and product costs are saved.

[0047] In this embodiment, the composite blade structure includes: a first blade 10 disposed in the extraction section 1 of the turbine rotor; both the pressure surface and the suction surface of the first blade 10 are curved surfaces; a third blade 30 disposed in the compression section 3 of the turbine rotor; both the pressure surface and the suction surface of the third blade 30 are non-curved surfaces. By setting the composite blade structure in the turbomolecular pump and setting the first blade 10 in the extraction section 1 of the turbine rotor, the gas capture capability and the reverse backflow prevention capability are improved, thereby increasing the compression ratio and thus improving the pumping capacity of the turbomolecular pump. By setting the third blade 30 in the compression section 3 of the turbine rotor, under the same parameters, compared with a single curved blade structure, the processing difficulty of the turbomolecular pump blades is reduced, the processing cycle is shortened, and the cost is reduced while ensuring the pumping speed and compression ratio.

[0048] Specifically, the composite blade structure further includes a second blade 20, which is disposed in the transition section 2 of the turbine rotor; the inlet angle α2 of the second blade 20 is in the range of 25°≤α2≤26°; the outlet angle β2 of the second blade 20 is in the range of 25°≤β2≤26°; and the axial tilt angle γ2 of each region of the second blade 20 is the same.

[0049] Optionally, the inlet angle α2 of the second blade 20 is 25°; the outlet angle β2 of the second blade 20 is 25°.

[0050] Optionally, the axial tilt angle γ2 of the second blade 20 is a constant value, the axial tilt angle γ3 of the third blade 30 is a constant value, and γ2≠γ3.

[0051] Specifically, the first blade 10 includes multiple span curves; the first blade 10 has different axial tilt angles γ1 on different span curves.

[0052] Optionally, the first blade 10 includes a first span curve, a second span curve, a third span curve, a fourth span curve, and a fifth span curve; any two of the first span curve, the second span curve, the third span curve, the fourth span curve, and the fifth span curve have different corresponding axial tilt angles γ1.

[0053] Optionally, the axial tilt angle γ1 at the inlet end of the first blade 10 is 0° from the end to the top, and the axial tilt angle γ1 at the outlet end of the first blade 10 gradually increases from 10° to 20° from the end to the top.

[0054] Specifically, both the pressure surface and the suction surface of the second blade 20 are non-curved surfaces.

[0055] Optionally, the second blade 20 is disposed in the transition section 2 of the turbine rotor; both the pressure surface and the suction surface of the second blade 20 are non-curved surfaces; by disposing of the second blade 20 in the transition section 2 of the turbine rotor, under the same conditions as other parameters, compared with a single curved blade structure, the processing difficulty of the turbomolecular pump blade is further reduced, the processing cycle is shortened, and the cost is reduced while ensuring the pumping speed and compression ratio.

[0056] In this embodiment, the composite blade structure further includes a second blade 20, which is disposed in the transition section 2 of the turbine rotor; both the pressure surface and the suction surface of the second blade 20 are non-curved surfaces; the composite blade structure improves the gas capture capability and reverse backflow prevention capability through the curved blade design of the extraction section, thereby increasing the compression ratio accordingly; by adopting a non-curved surface design for the blades in the transition section and compression section, the blade processing speed is further improved while ensuring the extraction speed and compression ratio, the blade processing cycle is reduced, and the cost is lowered.

[0057] Combination Figures 1-3 As shown, the turbine rotor provided in this embodiment includes:

[0058] The turbine rotor comprises a sequentially connected extraction section 1, a transition section 2, and a compression section 3; each of the extraction section 1, the transition section 2, and the compression section 3 has one or more stages of blades arranged along the axial direction of the turbine rotor shaft.

[0059] And the aforementioned composite blade structure.

[0060] It should be noted that nitrogen was used as the test gas in the experimental calculations. By comparing the original fully curved blade structure with the composite blade structure, the results are as follows: At a temperature of 25℃, the composite blade structure increases the pumping speed by nearly 10% compared to the original fully curved blade structure; the compression ratio of the composite blade structure is 4.4 times that of the original fully curved blade structure. This demonstrates that, under the same parameters, compared to the original single curved blade structure, the composite blade structure, while maintaining pumping speed and compression ratio, reduces the machining difficulty of the turbomolecular pump blades, shortens the machining cycle, and lowers costs.

[0061] Optionally, the turbine rotor is axially provided with eight stages of rotor blades, the first three stages being the extraction section 1, the middle two stages being the transition section 2, and the last three stages being the compression section 3; wherein, the extraction section 1 determines the pumping speed of the entire turbomolecular pump, and the compression section 3 can greatly improve the compression ratio of the entire turbomolecular pump.

[0062] Specifically, the extraction section 1 is provided with one or more curved blades; the transition section 2 and the compression section 3 are both provided with one or more non-curved blades.

[0063] Optionally, the extraction section 1 includes three stages of curved blades; the transition section 2 includes two stages of non-curved blades; and the compression section 3 includes three stages of non-curved blades.

[0064] Specifically, each stage of the extraction section 1 includes M first blades 10, where 16≤M≤33; the M first blades 10 are arranged circumferentially along the axis of rotation of the turbine rotor; the thickness of the first blade 10 is d1, where 2mm≤d1≤4mm.

[0065] Optionally, the pressure surface and suction surface of the blades in the extraction section 1 are both set as curved surfaces. The blades from the root to the tip of the blade body in the extraction section 1 are made of blades with different inclination angles and gradually varying thicknesses to improve the blades' ability to capture gas and prevent backflow. Under the same other parameters, this improves the pumping speed and compression ratio of the turbomolecular pump, and greatly enhances the pumping capacity of the turbomolecular pump under low-pressure conditions.

[0066] Optionally, the extraction section 1 includes three stages of curved blades, wherein the first stage is provided with 16 first blades 10, the second stage is provided with 24 first blades 10, and the third stage is provided with 33 first blades 10.

[0067] As a variation, the extraction section 1 includes three stages of curved blades, wherein the first stage is provided with 16 first blades 10, the second stage is provided with 29 first blades 10, and the third stage is provided with 33 first blades 10.

[0068] Optionally, the blades of the extraction section 1 are configured with a smaller inlet angle and a larger outlet angle to improve the ability to capture the extracted gas, improve the ability to discharge the extracted gas, and improve the ability to prevent backflow.

[0069] Optionally, the thickness of the first blade 10 gradually decreases from the root to the top, with the thickness at the root of the first blade 10 being 4 mm, the thickness at the top of the first blade 10 being 2.5 mm, the inlet angle of the first blade 10 being 35°, and the outlet angle of the first blade 10 being 50°.

[0070] As a variation, the thickness of the first blade 10 gradually decreases from the root to the top, with the thickness at the root of the first blade 10 being 3.5 mm and the thickness at the top of the first blade 10 being 2 mm. The inlet angle of the first blade 10 is 25° and the outlet angle of the first blade 10 is 40°.

[0071] In this embodiment, the extraction section 1 of the turbine rotor is provided with one or more stages of curved blades along the axial direction of the turbine rotor shaft; each stage of the extraction section 1 includes M first blades 10, where 16≤M≤33; the M first blades 10 are arranged circumferentially along the axial direction of the turbine rotor shaft; the thickness of the first blades 10 gradually decreases from the root to the top; since the first blades 10 adopt blades with different inclination angles and gradually varying thicknesses from the blade root to the blade top, and the first blades 10 are set with a smaller inlet angle and a larger outlet angle, the blades' ability to capture gas and prevent backflow is improved, thereby improving the pumping speed and compression ratio of the turbomolecular pump.

[0072] Specifically, each stage of the transition section 2 includes N second blades 20, where 37≤N≤57; the N second blades 20 are arranged circumferentially along the axis of the turbine rotor; the blade thickness of the second blade 20 is d2, where 2mm≤d2≤4mm.

[0073] Optionally, the transition section 2 includes two stages of non-curved blades; wherein the fourth stage is provided with 37 second blades 20 and the fifth stage is provided with 57 second blades 20.

[0074] As a variation, the transition section 2 includes two stages of non-curved blades; wherein, the fourth stage is provided with 47 second blades 20, and the fifth stage is provided with 57 second blades 20.

[0075] Optionally, the thickness of the second blade 20 gradually decreases from 4 mm to 2 mm from the root to the top, the inlet angle of the second blade 20 is 25°, and the outlet angle of the second blade 20 is 25°.

[0076] Specifically, each stage of the compression section 3 includes L third blades 30, where 65≤L≤66; the L third blades 30 are arranged circumferentially along the axis of the turbine rotor; the thickness of the third blade 30 is d3, where 1.5mm≤d3≤3mm.

[0077] Optionally, the compression section 3 includes three stages of non-curved blades; wherein the sixth stage is provided with 65 third blades 30, the seventh stage is provided with 66 third blades 30, and the eighth stage is provided with 66 third blades 30.

[0078] Optionally, the thickness of the third blade 30 gradually decreases from 3 mm to 1.5 mm from the root to the top, the inlet angle of the third blade 30 is 25°, and the outlet angle of the third blade 30 is 25°.

[0079] In this embodiment, the transition section 2 and compression section 3 of the turbine rotor are provided with one or more stages of non-curved blades; each stage of blades in the transition section 2 includes N second blades 20, where 37≤N≤57; each stage of blades in the compression section 3 includes L third blades 30, where 65≤L≤66; the non-curved blades are all arranged circumferentially along the rotation axis of the turbine rotor; by providing non-curved blades in the transition section 2 and compression section 3 to cooperate with the curved blades in the extraction section 1, under the same parameters, compared with a turbine rotor with a single curved blade structure, the turbine rotor reduces the processing difficulty of the turbine pump blades, shortens the processing cycle, and reduces costs while ensuring the pumping speed and compression ratio of the turbomolecular pump.

[0080] Combination Figure 1As shown, in this embodiment, the turbine rotor is provided with eight stages of rotor blades. The first three stages are the extraction section 1, the middle two stages are the transition section 2, and the last three stages are the compression section 3. The extraction section 1 is provided with three stages of curved blades along the rotor shaft axis. Each stage of blades includes M first blades 10, where 16≤M≤33. The first blades 10 have different inclination angles from the root to the tip to improve the blades' ability to capture gas and prevent backflow. The transition section 2 is provided with two stages of non-curved blades along the rotor shaft axis. Each stage of blades includes N second blades 20, where 37≤N≤57. The compression section 3 is provided with three stages of non-curved blades along the rotor shaft axis. Each stage of blades includes L third blades 30, where 65≤L≤66. Compared with a turbine rotor with a single blade structure, the turbine rotor improves both the extraction capacity of the turbomolecular pump and the manufacturability of the turbine rotor blades, reduces the processing difficulty, and shortens the processing cycle.

[0081] Optionally, the turbine rotor is installed in the mounting cavity of the turbomolecular pump. During the operation of the turbomolecular pump, the turbine rotor rotates around the axial direction. The high-speed rotating rotor blades transfer momentum to the gas molecules, enabling the gas molecules to obtain directional velocity, thereby compressing and driving the gas molecules out of the closed space, and then performing vacuum treatment on the closed space.

[0082] This embodiment also provides a turbomolecular pump, including: a turbomolecular pump body, stationary blades, a drive system, and the aforementioned turbine rotor.

[0083] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A turbine rotor, characterized in that, include: The turbine is connected in sequence to form an extraction section (1), a transition section (2), and a compression section (3); each of the extraction section (1), the transition section (2), and the compression section (3) has one or more stages of blades along the axial direction of the turbine rotor; the extraction section (1) has one or more stages of curved blades; the transition section (2) and the compression section (3) have one or more stages of non-curved blades; each stage of blades in the extraction section (1) includes M first blades (10), each stage of blades in the transition section (2) includes N second blades (20), and each stage of blades in the compression section (3) includes L third blades (30). The first blade (10) is located in the extraction section (1) of the turbine rotor; both the pressure surface and the suction surface of the first blade (10) are curved surfaces; the inlet angle α1 of the first blade (10) is 25°≤α1≤35°; the outlet angle β1 of the first blade (10) is 40°≤β1≤50°; and the axial tilt angle γ1 of the first blade (10) is 0°≤γ1≤20°. The second blade (20) is located in the transition section (2) of the turbine rotor; the inlet angle α2 of the second blade (20) is 25°≤α2≤26°; the outlet angle β2 of the second blade (20) is 25°≤β2≤26°; the axial tilt angle γ2 of each region of the second blade (20) is the same; the pressure surface and suction surface of the second blade (20) are both non-curved surfaces. The third blade (30) is located in the compression section (3) of the turbine rotor. The pressure surface and suction surface of the third blade (30) are both non-curved surfaces. The inlet angle α3 of the third blade (30) is in the range of 20°≤α3≤25°. The outlet angle β3 of the third blade (30) is in the range of 20°≤β3≤25°. The axial tilt angle γ3 of each region of the third blade (30) is the same. The extraction section (1), the transition section (2) and the compression section (3) are distributed sequentially along the airflow direction.

2. The turbine rotor according to claim 1, characterized in that, The first blade (10) includes multiple span curves; the first blade (10) has different axial tilt angles γ1 on different span curves.

3. The turbine rotor according to claim 1, characterized in that, 16≤M≤33; M is the first blade (10) arranged circumferentially along the axis of the turbine rotor; the blade thickness of the first blade (10) is d1, where 2mm≤d1≤4mm.

4. The turbine rotor according to claim 1, characterized in that, 37≤N≤57; N second blades (20) are arranged circumferentially along the axis of the turbine rotor; the blade thickness of the second blade (20) is d2, where 2mm≤d2≤4mm.

5. The turbine rotor according to claim 1, characterized in that, 65≤L≤66; The third blade (30) of the L-plate is arranged circumferentially along the axis of rotation of the turbine rotor; The blade thickness of the third blade (30) is d3, wherein 1.5mm≤d3≤3mm.

6. A turbomolecular pump, characterized in that, include: The turbomolecular pump body, stationary blades, drive system, and turbine rotor as described in any one of claims 1-5.

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