Humidity sensor based on graphene oxide and method for manufacturing the same

CN114923957BActive Publication Date: 2025-11-25BEIJING INFORMATION SCI & TECH UNIV
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Patent Information

Application Number
CN202210396980.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-15
Publication Date
2025-11-25
Estimated Expiration
2042-04-15

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Abstract

The application discloses a humidity sensor based on graphene oxide, which is simple in structure, short in response time and high in sensitivity. The humidity sensor comprises an insulating substrate (1), a gold electrode (2) and a graphene oxide film (3). The insulating substrate is flat, two parallel gold electrodes are vacuum thermal evaporated on the insulating substrate, and the three form an insulating groove. The graphene oxide film is arranged above the insulating groove. A preparation method is also provided.
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Citation Information

Patent Citations

  • Gas sensor

    JP1999295251A

  • KR1017107980000B1