Radio frequency-dc voltage multiplier rectifier device for internet of things sensing energy supply

CN114928175BActive Publication Date: 2026-09-29XI AN JIAOTONG UNIV +1
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Patent Information

Application Number
CN202210633704.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-06-07
Publication Date
2026-09-29
Estimated Expiration
2042-06-07

AI Technical Summary

Technical Problem

传统的电池供电会大大增加设备尺寸,且由于电池寿命有限,设备需要定期更换电池,造成一定的环境污染

Benefits of technology

[0027]本发明实现了基于射频能量收集的传感供能技术,结合环境中射频能量的功率密度和负载要求,对比传统取能方式(电池、CT、SAW),本发明污染小、功耗低、体积小、IP防护等级高,同时可以与传感器融合形成智能传感,研制出新型的自供电或免电池的无线传感网络。对比现有RF取能装置,本发明的体积更小、转换效率更高,远优于市面设备参数。本发明可以提高我国对无线传感网络研究深度和应用水平,对于我国双碳目标的实现具有重要的现实和战略意义。

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Abstract

Disclosed is a radio frequency-direct current voltage doubling rectifier device for Internet of Things sensing energy supply, wherein an antenna emits a signal, a first terminal is connected to the antenna to receive the signal, a full-wave second-order voltage doubling rectifier circuit is connected to the first terminal to output a positive and negative bipolar voltage, the full-wave second-order voltage doubling rectifier circuit is formed by connecting a forward second-order voltage doubling rectifier circuit and a negative second-order voltage doubling rectifier circuit in series with a ground terminal as a common terminal, the forward second-order voltage doubling rectifier circuit and the negative second-order voltage doubling rectifier circuit each comprise a packaged series Schottky diode assembly, an impedance matching network is connected to the full-wave second-order voltage doubling rectifier circuit to adjust the transmission power between the antenna and the full-wave second-order voltage doubling rectifier circuit, and a second terminal is connected to the full-wave second-order voltage doubling rectifier circuit to output a voltage, and the conversion efficiency of the radio frequency-direct current voltage doubling rectifier device for Internet of Things sensing energy supply can reach 78.6%.
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Description

Technical Field

[0001] This invention relates to the field of IoT sensor power supply, and in particular to a radio frequency DC voltage doubler rectifier device for IoT sensor power supply. Background Technology

[0002] With the development of the Internet of Things (IoT), energy harvesting technology is being applied more and more widely, including in distributed wireless sensor nodes, embedded and implantable medical devices, new energy vehicles, and smart homes. Traditional battery power supply significantly increases device size, and due to limited battery life, devices require periodic battery replacements, causing environmental pollution. CT energy harvesting utilizes electromagnetic induction, requiring high primary current amplitude (generally >5A), and suffers from unstable output voltage, significant current susceptibility, high heat generation, and poor IP protection. Surface acoustic wave (SAW) technology has poor stability and anti-interference capabilities, and its current implementation costs are high. In contrast, radio frequency (RF) energy harvesting offers controllability, predictability, and stability. Furthermore, RF energy is widely distributed in nature, unrestricted by location or environment. If it can be harvested and utilized, it will greatly improve the continuity of device operation, ultimately enabling battery-free operation of sensor nodes. This will enhance the depth of research and application level of wireless sensor networks in my country, and is of great significance for the construction of energy-saving IoT under the dual-carbon background.

[0003] The information disclosed in the background section is only intended to enhance the understanding of the background of the present invention, and therefore may contain information that does not constitute prior art known to those skilled in the art in this country. Summary of the Invention

[0004] To address the shortcomings or defects of the existing technologies, an RF-DC voltage doubler rectifier device for IoT sensing power supply is provided. Using Schottky diodes as the basic components of the voltage doubler rectifier circuit, the rectifier circuit order is determined through transient performance optimization. Based on this, the optimal input power, matching resistor, and impedance matching network are determined through harmonic balance optimization and LSSP testing optimization, significantly improving the conversion efficiency of the voltage doubler rectifier circuit. In actual testing, the device's steady-state output voltage is 3.5V, and the conversion efficiency can reach up to 78.6%, meeting the requirements of low power consumption and zero pollution for energy-saving IoT under a dual-carbon background.

[0005] RF-DC voltage doubler rectifier devices for powering IoT sensors include,

[0006] An antenna, which emits signals;

[0007] A first terminal is connected to the antenna to receive the signal;

[0008] A full-wave second-order voltage multiplier rectifier circuit is connected to the first terminal to output positive and negative bipolar voltages. The full-wave second-order voltage multiplier rectifier circuit is formed by connecting a positive second-order voltage multiplier rectifier circuit and a negative second-order voltage multiplier rectifier circuit in series with ground as the common terminal. The positive second-order voltage multiplier rectifier circuit and the negative second-order voltage multiplier rectifier circuit each include packaged series-connected Schottky diode components.

[0009] An impedance matching network, connected to the full-wave second-order voltage doubler rectifier circuit, adjusts the transmitted power between the antenna and the full-wave second-order voltage doubler rectifier circuit, enabling the RF-DC voltage doubler rectifier to achieve a conversion efficiency of up to 78.6%.

[0010] The second terminal is connected to the full-wave second-order voltage doubler rectifier circuit to output voltage.

[0011] In the aforementioned radio frequency-DC voltage doubler rectifier device for powering IoT sensing, the packaged series Schottky diode assembly includes two discrete diodes connected in series.

[0012] In the aforementioned RF-DC voltage doubler rectifier device for powering IoT sensors, the Schottky diode assembly includes,

[0013] Cathode metal,

[0014] N + A cathode layer, which is stacked on the cathode metal;

[0015] N-type substrate, which is stacked on the N + On the cathode layer;

[0016] N - An epitaxial layer is stacked on the N-type substrate;

[0017] Anode metal, which is stacked on the N - On the epitaxial layer, the upper surface of the anode metal is provided with a groove;

[0018] A silicon dioxide layer surrounds the outer surface of the anode metal and fills the bottom of the groove.

[0019] In the aforementioned RF-DC voltage doubler rectifier for IoT sensing power supply, the reverse saturation current of the Schottky diode assembly is 5 × 10⁻⁶. -6 A, with a series resistance of 20Ω, an emission coefficient of 1.05, and a transit time of 1×10⁻⁶. -11 The junction capacitance is 0.14 pF, the gradient coefficient is 0.4, the band gap is 0.69 eV, the saturation current temperature index is 2, the forward-biased depletion layer capacitance is 0.5, the reverse breakdown voltage is 2 V, and the reverse breakdown current is 1 × 10⁻⁶. -4 A, with a built-in potential of 0.34V.

[0020] In the aforementioned RF-DC voltage doubler rectifier device for powering IoT sensors, the order of the full-wave second-order voltage doubler rectifier circuit is determined through transient time-domain simulation, and the nonlinear characteristics of the full-wave second-order voltage doubler rectifier circuit are analyzed through frequency domain analysis to determine the optimal input power and matching resistor of the device.

[0021] In the aforementioned radio frequency-DC voltage doubler rectifier for powering IoT sensors, the optimal input power and matching resistance are 5dB and 100kΩ, respectively.

[0022] In the aforementioned radio frequency-DC voltage doubler rectifier for IoT sensing power supply, the radio frequency-DC voltage doubler rectifier has a size of 31.25mm × 13.75mm, an operating frequency of 915MHz, and an output voltage peaking at 3.763V when the input power is 5dBm. When the matching resistor is 100kΩ, the output voltage and output efficiency are 3.5V and 78.6%, respectively.

[0023] In the aforementioned radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the full-wave second-order voltage doubler rectifier circuit, with an input amplitude of 1V at a radio frequency of 915MHz, outputs a voltage amplitude of 3.361V after 26µs.

[0024] In the aforementioned radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the input power range of the impedance matching network is -30dB to 20dB, and the optimal input impedance is (49.945+j*0.048)Ω.

[0025] In the aforementioned radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the full-wave second-order voltage doubler rectifier circuit consists of 8 capacitors and 4 Schottky diodes.

[0026] Beneficial effects

[0027] This invention realizes a sensor-powered technology based on radio frequency (RF) energy harvesting. Considering the power density and load requirements of RF energy in the environment, compared with traditional power harvesting methods (batteries, CT, SAW), this invention has lower pollution, lower power consumption, smaller size, and higher IP protection level. It can also be integrated with sensors to form intelligent sensing, enabling the development of novel self-powered or battery-free wireless sensor networks. Compared with existing RF power harvesting devices, this invention is smaller and has higher conversion efficiency, far exceeding the parameters of commercially available equipment. This invention can improve the depth and application level of wireless sensor network research in my country, and has significant practical and strategic importance for achieving my country's dual-carbon goals.

[0028] The above description is merely an overview of the technical solution of the present invention. In order to make the technical means of the present invention clearer and more understandable, so that those skilled in the art can implement it according to the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more obvious and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0029] Various other advantages and benefits of the present invention will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. Furthermore, the same reference numerals denote the same parts throughout the drawings.

[0030] In the attached diagram:

[0031] Figure 1 A schematic diagram of the design and testing process for an RF DC voltage doubler rectifier device used for powering IoT sensors;

[0032] Figure 2 A three-dimensional structural diagram of a radio frequency-DC voltage doubler rectifier device used for powering IoT sensors;

[0033] Figures 3(a) to 3(b) Figure 3(a) shows the structure of a Schottky diode assembly for an RF-DC voltage doubler rectifier used for powering IoT sensors, and Figure 3(b) shows the series structure of a Schottky diode.

[0034] Figure 4 A schematic diagram of the full-wave second-order voltage doubler rectifier circuit topology for an RF-DC voltage doubler rectifier device used for powering IoT sensors.

[0035] Figure 5 A schematic diagram of the impedance matching network structure for an RF-DC voltage doubler rectifier used for powering IoT sensors;

[0036] Figure 6 A schematic diagram of the transient performance test results of the full-wave second-order voltage doubler rectifier circuit for an RF-DC voltage doubler rectifier device used for IoT sensing power supply;

[0037] Figures 7(a) to 7(d)Figure 7(a) shows the harmonic balance optimization test results of an RF-DC voltage doubler rectifier device used for IoT sensing power supply. Figure 7(b) shows the relationship between output voltage and input power, Figure 7(c) shows the relationship between output efficiency and load impedance, and Figure 7(d) shows the relationship between output efficiency and input power.

[0038] The present invention will be further explained below with reference to the accompanying drawings and embodiments. Detailed Implementation

[0039] The following will refer to the appendix. Figures 1 to 7(d) Specific embodiments of the invention will be described in more detail below. While specific embodiments of the invention are shown in the accompanying drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0040] It should be noted that certain terms are used in the specification and claims to refer to specific components. Those skilled in the art will understand that different terms may be used to refer to the same component. This specification and claims do not distinguish components based on differences in terminology, but rather on differences in function. The terms "comprising" or "including" used throughout the specification and claims are open-ended and should be interpreted as "comprising but not limited to." The following descriptions are preferred embodiments for carrying out the invention; however, these descriptions are for the purpose of understanding the general principles of the specification and are not intended to limit the scope of the invention. The scope of protection of this invention is determined by the appended claims.

[0041] To facilitate understanding of the embodiments of the present invention, the following will provide further explanation and description with reference to the accompanying drawings and several specific embodiments, and the accompanying drawings do not constitute a limitation on the embodiments of the present invention.

[0042] like Figures 1 to 7(d) As shown, the radio frequency-DC voltage doubler rectifier device for powering IoT sensors includes,

[0043] Antenna, which emits signals

[0044] The first terminal is connected to the antenna to receive the signal.

[0045] A full-wave second-order voltage multiplier rectifier circuit is connected to the first terminal to output positive and negative bipolar voltages. The full-wave second-order voltage multiplier rectifier circuit is formed by connecting a positive second-order voltage multiplier rectifier circuit and a negative second-order voltage multiplier rectifier circuit in series with ground as the common terminal. The positive second-order voltage multiplier rectifier circuit and the negative second-order voltage multiplier rectifier circuit each include packaged series-connected Schottky diode components.

[0046] An impedance matching network, connected to the full-wave second-order voltage doubler rectifier circuit, adjusts the transmitted power between the antenna and the full-wave second-order voltage doubler rectifier circuit, enabling the RF-DC voltage doubler rectifier to achieve a conversion efficiency of up to 78.6%.

[0047] The second terminal is connected to the full-wave second-order voltage doubler rectifier circuit to output voltage.

[0048] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the packaged series Schottky diode assembly includes two discrete diodes connected in series.

[0049] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the Schottky diode assembly includes,

[0050] Cathode metal,

[0051] N + A cathode layer, which is stacked on the cathode metal;

[0052] N-type substrate, which is stacked on the N + On the cathode layer;

[0053] N - An epitaxial layer is stacked on the N-type substrate;

[0054] Anode metal, which is stacked on the N - On the epitaxial layer, the upper surface of the anode metal is provided with a groove;

[0055] A silicon dioxide layer surrounds the outer surface of the anode metal and fills the bottom of the groove.

[0056] In a preferred embodiment of the RF-DC voltage doubler rectifier device for powering IoT sensors, the reverse saturation current of the Schottky diode assembly is 5 × 10⁻⁶. -6 A, series resistance 20Ω, emission factor 1.05, transit time 1×10⁻⁶ -11 s, junction capacitance 0.14pF, gradient coefficient 0.4, bandgap 0.69eV, saturation current temperature index 2, forward bias depletion layer capacitance 0.5, reverse breakdown voltage 2V, reverse breakdown current 1×10 -4 A, built-in potential 0.34V.

[0057] In a preferred embodiment of the RF-DC voltage doubler rectifier device for powering IoT sensors, the order of the full-wave second-order voltage doubler rectifier circuit is determined by transient time-domain simulation, and the nonlinear characteristics of the full-wave second-order voltage doubler rectifier circuit are analyzed by frequency domain analysis to determine the optimal input power and matching resistor of the device.

[0058] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the optimal input power and matching resistance are 5dB and 100kΩ, respectively.

[0059] In a preferred embodiment of the RF-DC voltage doubler rectifier for IoT sensing power supply, the RF-DC voltage doubler rectifier has a size of 31.25mm × 13.75mm, an operating frequency of 915MHz, and a peak output voltage of 3.763V when the input power is 5dBm. When the matching resistor is 100kΩ, the output voltage and output efficiency are 3.5V and 78.6%, respectively.

[0060] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for IoT sensing power supply, the full-wave second-order voltage doubler rectifier circuit, with an input amplitude of 1V at a radio frequency of 915MHz, outputs a voltage amplitude of 3.361V after 26µs.

[0061] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the input power range of the impedance matching network is -30dB to 20dB, and the optimal input impedance is (49.945+j*0.048)Ω.

[0062] In a preferred embodiment of the radio frequency-DC voltage doubler rectifier device for powering IoT sensors, the full-wave second-order voltage doubler rectifier circuit consists of 8 capacitors and 4 Schottky diodes.

[0063] In one embodiment, the radio frequency DC voltage doubler rectifier is directly integrated into the sensor.

[0064] In one embodiment, such as Figure 1As shown, the RF-DC voltage doubler rectifier device for powering IoT sensors includes rectifier device design, transient performance optimization, harmonic balance optimization, and LSSP test optimization. First, the main components and parameters of the device are selected. Schottky diodes are used as the basic components, and a full-wave second-order rectifier circuit is used as the main circuit. The optimal input power is adjusted to 5dm, the optimal matching resistor to 100kΩ, and the optimal input impedance to (49.945 + j*0.048)Ω. The operating frequency of the device is set to 915MHz. One end of the device's SMA terminal is connected to a rubber rod antenna to receive field signals, and the other end is connected to a multimeter to measure the device's output voltage. If the voltage is stable at 3.5V, the device can be connected to a low-power sensor. The sensor's normal operation is observed. If intermittent operation occurs, a higher-gain antenna needs to be replaced on-site to ensure the sensor's power supply reliability. If the 915MHz signal is weak on-site, a small RF signal source can be added to ensure stable operation of the device. For sensor fusion applications, this invention features small size, high integration, and strong electromagnetic interference resistance. It can be directly integrated into the sensor, with an external SMA terminal for antenna connection to achieve normal operation. Regularly check the operation of the device and sensor to ensure normal operation under harsh field conditions.

[0065] In one embodiment, such as Figures 2 to 3(b) As shown, the first terminal of the RF-DC voltage doubler rectifier device used for IoT sensing power supply is an SMA terminal, connected to an antenna to receive signals, and the second terminal of the other end is a DuPont terminal to output voltage. The device mainly operates at a frequency of 915MHz and outputs a steady-state voltage of 3.5V, suitable for powering low-power sensors in IoT applications. Furthermore, due to its small size, it can be integrated with sensors to form intelligent sensing nodes. As shown in Figure 3, the Schottky diode component package uses two discrete diodes connected in series. This method does not change the current direction during voltage doubler rectification, reduces the number of discrete diodes, lowers the device size, and improves the device integration, which is beneficial for intelligent sensing fusion. Transient performance optimization is based on transient time-domain simulation to determine the optimal order of the voltage doubler rectifier circuit. The results show that, compared with conventional first-order, second-order, third-order, and fourth-order circuits, the full-wave second-order voltage doubler rectifier circuit designed in this invention can output positive and negative bipolar voltages, with less additional device loss and higher conversion efficiency. The described full-wave second-order voltage doubler rectifier circuit consists of eight capacitors and four Schottky diodes, equivalent to a positive second-order voltage doubler rectifier circuit and a negative second-order voltage doubler rectifier circuit connected in series with ground as the common terminal. At a radio frequency of 915MHz and an input amplitude of 1V, the output voltage amplitude of the device is 3.361V after 26µs, meeting the low-power sensing energy consumption requirements of practical applications.

[0066] In one embodiment, such as Figure 4The full-wave second-order voltage doubler rectifier circuit shown consists of eight capacitors and four Schottky diode components, i.e., eight discrete Schottky diodes. It can be viewed as a positive second-order and a negative second-order rectifier connected in series. Taking the positive second-order rectifier as an example (upper half), under ideal conditions without considering line losses, it can be roughly divided into four steps. First, in the negative cycle, current flows through D1 and C1 to charge capacitor C1, resulting in a voltage of V. Second, in the positive cycle, current flows through C1, D2, and C2 to charge C2, resulting in a voltage of 2V (the power supply and C1 simultaneously charge C2). Next, in the negative cycle, current flows through C2, D3, and C3 to charge C3, resulting in a voltage of 3V (the power supply and C2 simultaneously charge C3). Finally, in the positive cycle, current flows through C3, D4, and C4 to charge C4, resulting in a voltage of 4V (the power supply and C3 simultaneously charge C3). The negative second-order circuit is similar to the positive second-order circuit, but the output voltage is opposite, so the full-wave circuit can ultimately output voltages of both positive and negative polarities.

[0067] In one embodiment, such as Figure 5 As shown, Figure 5 This is an impedance matching network designed using the lumped parameter method. It primarily uses discrete inductors or capacitors with no power consumption as the matching network components, offering advantages such as simplicity, efficiency, and ease of debugging. In actual testing, the optimal input impedance is determined by changing the values ​​of the series inductor (L1) and the parallel ground inductor (L2).

[0068] In one embodiment, such as Figure 6 As shown, Figure 6 This is the output voltage of the full-wave second-order rectifier circuit. Where m1 is the negative second-order output voltage (i.e., the voltage across C8), m2 is the positive second-order output voltage (i.e., the voltage across C4), and m3 is the output voltage across resistor R2. At 26µs, the output voltage across R2 is 3.361V, which meets the voltage requirements of low-power sensors in practical applications.

[0069] In one embodiment, such as Figures 7(a) to 7(d)As shown in Figure 7(a), the relationship between output voltage and input power is shown for different orders. The results show that when the input power is 5dBm, the output of each order of rectifier reaches its maximum value, proving that the optimal input power is 5dB. Figure 7(b) shows the relationship between output voltage and load impedance when the input power is 0. The results show that when the load impedance is greater than 500kΩ, increasing the load impedance has little effect on boosting the output voltage of the circuit. Figure 7(c) shows the relationship between output efficiency and load impedance for different input powers. The results show that the efficiency first increases and then decreases with the increase of the load impedance. Combining the curve relationship in Figure 7(b), the optimal load impedance was finally determined to be 100kΩ. Figure 7(d) shows the relationship between output efficiency and input power for different load impedances. The results show that when the input power is 5dB, the circuit output efficiency basically reaches its maximum value. This verifies that the optimal input power is 5dBm. Harmonic balance optimization is based on frequency domain analysis to analyze the nonlinear characteristics of the full-wave second-order voltage doubler rectifier circuit, thereby determining the optimal input power and matching resistor of the device. The results show that when the device operates at a center frequency of 915MHz and an input power of 5dBm, the output voltage reaches a peak of 3.763V. With a matching resistor of 100kΩ, the balance between output voltage and output efficiency is optimal, at 3.5V and 78.6% respectively, significantly higher than the conversion efficiency of existing devices, which is approximately 50%. LSSP test optimization is based on harmonic balance testing of a complete nonlinear circuit to determine the input impedance under different input powers, thereby optimizing the impedance matching network design to achieve maximum power transfer between the antenna and the voltage doubler rectifier circuit. With the input power range set to -30dB to 20dB, the optimal input impedance of the device after impedance matching is (49.945 + j*0.048)Ω.

[0070] Although embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the specific embodiments and application fields described above. The specific embodiments described above are merely illustrative and instructive, and not restrictive. Those skilled in the art can make many other forms based on the guidance of this specification and without departing from the scope of protection of the claims of the present invention, and all of these are within the scope of protection of the present invention.

Claims

1. A radio frequency-DC voltage doubler rectifier device for powering IoT sensors, characterized in that: It includes, An antenna, which emits signals; A first terminal is connected to the antenna to receive the signal; A full-wave second-order voltage multiplier rectifier circuit is connected to the first terminal to output positive and negative bipolar voltages. The full-wave second-order voltage multiplier rectifier circuit is formed by connecting a positive second-order voltage multiplier rectifier circuit and a negative second-order voltage multiplier rectifier circuit in series with ground as the common terminal. The positive second-order voltage multiplier rectifier circuit and the negative second-order voltage multiplier rectifier circuit each include packaged series-connected Schottky diode components. An impedance matching network is connected to the full-wave second-order voltage doubler rectifier circuit to adjust the transmission power between the antenna and the full-wave second-order voltage doubler rectifier circuit, so that the conversion efficiency of the RF-DC voltage doubler rectifier device reaches up to 78.6%; The second terminal is connected to the full-wave second-order voltage doubler rectifier circuit to output voltage. The order of the full-wave second-order voltage doubler rectifier circuit is determined by transient time-domain simulation. The nonlinear characteristics of the full-wave second-order voltage doubler rectifier circuit are analyzed by frequency domain analysis to determine the optimal input power and matching resistor of the device. The full-wave second-order voltage doubler rectifier circuit consists of 8 capacitors and 4 Schottky diodes. The RF-DC voltage doubler rectifier device is directly built into the sensor. The full-wave second-order voltage doubler rectifier circuit outputs positive and negative bipolar voltages. The packaged series Schottky diode assembly includes two discrete diodes connected in series.

2. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: Schottky diode assemblies include, Cathode metal, N + A cathode layer, which is stacked on the cathode metal; N-type substrate, which is stacked on the N + On the cathode layer; N _ An epitaxial layer is stacked on the N-type substrate; Anode metal, which is stacked on the N _ On the epitaxial layer, the upper surface of the anode metal is provided with a groove; A silicon dioxide layer surrounds the outer surface of the anode metal and fills the bottom of the groove.

3. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: The reverse saturation current of the Schottky diode assembly is 5 × 10⁻⁶. -6 A, with a series resistance of 20Ω, an emission coefficient of 1.05, and a transit time of 1×10⁻⁶. -11 The junction capacitance is 0.14 pF, the gradient coefficient is 0.4, the band gap is 0.69 eV, the saturation current temperature index is 2, the forward-biased depletion layer capacitance is 0.5, the reverse breakdown voltage is 2 V, and the reverse breakdown current is 1 × 10⁻⁶. -4 A, with a built-in potential of 0.34V.

4. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: The optimal input power and matching resistance are 5dB and 100kΩ, respectively.

5. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: The RF-DC voltage doubler rectifier measures 31.25mm × 13.75mm, operates at a frequency of 915MHz, and achieves a peak output voltage of 3.763V with an input power of 5dBm. With a matching resistor of 100kΩ, the output voltage and output efficiency are 3.5V and 78.6%, respectively.

6. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: When the full-wave second-order voltage doubler rectifier circuit operates at a frequency of 915MHz and the input amplitude is 1V, the output voltage amplitude of the device is 3.361V after 26µs.

7. The radio frequency-DC voltage doubler rectifier device for powering IoT sensors according to claim 1, characterized in that: The impedance matching network has an input power range of -30dB to 20dB, and the optimal input impedance is (49.945 + j * 0.048) Ω.

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