Plasma power sources and plasma discharge methods

Abstract

This invention discloses a plasma power supply and a plasma discharge method. The plasma power supply includes an AC switch, a main controller, multiple pulse modules, and a plasma device. The AC switch connects to the multiple pulse modules in parallel for receiving AC power. The main controller connects to the multiple pulse modules in parallel and inputs corresponding control signals to each pulse module, causing each pulse module to convert the AC power into a corresponding pulse signal output. The pulse signals output by each pulse module are used to form a combined pulse signal. The multiple pulse modules are connected to the plasma device, which performs plasma discharge based on the combined pulse signal. This invention achieves high-frequency, high-voltage, and high-current pulse output by sending control signals from the main controller to the combined pulse modules, causing each pulse module to output a corresponding combined pulse signal according to a predetermined output mode.

Description

Technical Field

[0001] This invention relates to the field of plasma power sources, and more particularly to a plasma power source and a plasma discharge method. Background Technology

[0002] Plasma power supplies play a vital role in various fields, including industrial production. In practical applications, high-voltage, high-current pulse output is required to meet demands. However, due to limitations in the performance parameters of power devices, ordinary high-voltage pulse power supplies struggle to achieve high-frequency, high-power pulse output with a single switching group. Therefore, how to configure a plasma power supply to output high-voltage, high-current pulses is an urgent problem to be solved. Summary of the Invention

[0003] In view of this, in order to solve the problems caused by the prior art, the present invention provides a plasma power supply and a plasma discharge method.

[0004] In a first aspect, the present invention provides a plasma power supply, comprising: an AC switch, a main controller, multiple pulse modules, and a plasma device;

[0005] The AC switch connects the multiple pulse modules in parallel and is also used to connect to AC power.

[0006] The main controller connects to the multiple pulse modules in parallel and is used to input corresponding control signals to the corresponding pulse modules so that each pulse module converts the AC power into a corresponding pulse signal for output. The pulse signals output by each pulse module are used to form a combined pulse signal.

[0007] The plurality of pulse modules are connected to a plasma device, which is used to perform plasma discharge according to the combined pulse signal.

[0008] Each of the multiple pulse modules is equipped with an arc-extinguishing absorption circuit for absorbing the electric arc generated in the plasma device.

[0009] In an optional embodiment, the plasma power supply further includes a protection module connected to the plurality of pulse modules;

[0010] The protection module includes a first pre-protection module and a first detection module;

[0011] The first detection module is connected to the plurality of pulse modules and is used to detect the total current value and total voltage value output by the plurality of pulse modules;

[0012] The first pre-protection module is connected to the first detection module and is used to output protection signals to the connected plurality of pulse modules based on the total current value and total voltage value detected by the first detection module.

[0013] In an optional implementation, the pulse module includes: an AC / DC conversion module, a power module, a drive module, a second detection module, a second pre-protection module, and a protection module;

[0014] The AC / DC conversion module, the power module, and the protection module are connected in sequence;

[0015] The power module is connected to the second detection module and the drive module respectively;

[0016] The second pre-protection module is connected to the second detection module and the drive module respectively. The second pre-protection module is used to output protection signals to the drive module and the main controller according to the current value and voltage value of the power module output detected by the second detection module, so that the main controller adjusts the control signal to the drive module according to the received protection signal.

[0017] The drive module is also connected to the first pre-protection module and the second pre-protection module respectively. The drive module is used to convert the control signal and the received protection signal into a drive signal.

[0018] In an optional implementation, the power module includes a first switching device, a first non-inductive capacitor, a first inductor, a first freewheeling diode, and a first spike absorption circuit.

[0019] The first spike absorption circuit is connected to the first switching device and is used to absorb the spike voltage generated by the first switching device.

[0020] One end of the first switching device is connected to the first non-inductive capacitor and the AC / DC conversion module, and the other end of the first switching device is connected to the first freewheeling diode and the first inductor.

[0021] The first freewheeling diode and the first non-inductive capacitor are respectively connected to the driving module;

[0022] The first inductor is connected to the protection module.

[0023] In an optional embodiment, the pulse module further includes a waveform adjustment circuit, which is connected to the power module and the protection module respectively.

[0024] The waveform adjustment circuit includes a second switching device, a second non-inductive capacitor, a second freewheeling diode, and a second peak absorption circuit.

[0025] The second spike absorption circuit is connected to the second switching device and is used to absorb the spike voltage generated by the second switching device;

[0026] One end of the second switching device is connected to the second non-inductive capacitor and the first inductor respectively, and the other end of the second switching device is used to connect to the protection module and the second freewheeling diode respectively;

[0027] The second freewheeling diode is connected to the plasma device.

[0028] In an optional implementation, the arc-extinguishing absorption circuit is connected to both the power module and the protection module.

[0029] The arc extinguishing absorption circuit includes a third switching device, a fourth switching device, a resistor, a third non-inductive capacitor, and a second inductor.

[0030] One end of the third switching device is connected to one end of the first inductor and one end of the second inductor, and the other end of the third switching device is connected to the fourth switching device and the third non-inductive capacitor, and the other end of the second inductor is connected to the protection module;

[0031] One end of the fourth switching device is connected to one end of the third non-inductive capacitor, and the other end of the fourth switching device is connected to one end of the resistor;

[0032] The other end of the third non-inductive capacitor is connected to the first freewheeling diode and the plasma device, respectively, and the other end of the resistor is connected to the first freewheeling diode and the plasma device, respectively.

[0033] In an optional implementation, the AC / DC conversion module includes an AC / DC converter and an energy storage device;

[0034] The AC / DC converter is connected to the energy storage device and is used to convert the AC power to DC power and store the energy through the energy storage device.

[0035] The first detection module includes a first current detection unit and a first voltage detection unit;

[0036] The second detection module includes a second current detection unit and a second voltage detection unit;

[0037] The first current detection unit and the second current detection unit are respectively a current transformer, a sampling resistor, or a Roots coil;

[0038] The first voltage detection unit and the second voltage detection unit are respectively a resistive voltage divider sampling circuit, a Hall sensor, or an isolation transformer;

[0039] The first pre-protection module and the second pre-protection module each include any one or more combinations of amplifiers, comparators, delayers and logic chips;

[0040] The protection module is a diode or an isolation transformer;

[0041] The main controller is any one or more combinations of ARM logic chips, FPGA logic chips, and DSP logic chips.

[0042] In an optional embodiment, the plasma power supply further includes a human-machine interface module, which is connected to the main controller and is used to display status data and record operating waveforms.

[0043] In a second aspect, the present invention provides a plasma discharge method for use with a plasma power source as described in any of the foregoing embodiments, the method comprising:

[0044] The control inputs corresponding control signals to the corresponding pulse modules so that each pulse module converts the incoming AC power into a corresponding pulse signal output. The pulse signals output by each pulse module are used to form a combined pulse signal and input to the plasma device for plasma discharge.

[0045] In an optional implementation, the combined pulse signal includes high-frequency pulse signals of the same amplitude or high-frequency pulse signals of different amplitudes and different output frequencies.

[0046] The present invention has the following beneficial effects:

[0047] This invention provides a plasma power supply, comprising an AC switch, a main controller, multiple pulse modules, and a plasma device. The AC switch connects to the multiple pulse modules in parallel for receiving AC power. The main controller connects to the multiple pulse modules in parallel and inputs corresponding control signals to each pulse module, causing each pulse module to convert the AC power into a corresponding pulse signal output. The pulse signals output by each pulse module are used to form a combined pulse signal. The multiple pulse modules are connected to the plasma device, which performs plasma discharge based on the combined pulse signal. In this embodiment of the invention, the main controller sends control signals to the combined pulse modules to cause each pulse module to output a corresponding combined pulse signal according to a predetermined output mode, thereby achieving high-frequency, high-voltage, and high-current pulse output. Attached Figure Description

[0048] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope of protection of the present invention. In the various drawings, similar components are numbered similarly.

[0049] Figure 1 A schematic diagram of the first structure of the plasma power supply in an embodiment of the present invention is shown;

[0050] Figure 2 A schematic diagram of the second structure of the plasma power supply in an embodiment of the present invention is shown;

[0051] Figure 3 A schematic diagram of a pulse module structure is shown in an embodiment of the present invention;

[0052] Figure 4 A schematic diagram of the structure of the first detection module in an embodiment of the present invention is shown;

[0053] Figure 5 A schematic diagram of the structure of the second detection module in an embodiment of the present invention is shown;

[0054] Figure 6 A schematic diagram of the third structure of the plasma power supply in an embodiment of the present invention is shown;

[0055] Figure 7 A schematic diagram of the fourth structure of the plasma power supply in an embodiment of the present invention is shown;

[0056] Figure 8 This diagram illustrates a pulse waveform with an amplitude that is initially high and then decreases in an embodiment of the present invention.

[0057] Figure 9 This diagram illustrates a pulse waveform with amplitude initially low and then increasing, as shown in an embodiment of the present invention.

[0058] Figure 10 This diagram illustrates the changes in current and voltage during ignition of the plasma device cavity in an embodiment of the present invention.

[0059] Figure 11 A schematic diagram of the ignition voltage and current waveforms of the plasma power supply in an embodiment of the present invention is shown;

[0060] Figure 12 A schematic diagram of high-frequency combined pulse waveforms with the same amplitude is shown in an embodiment of the present invention;

[0061] Figure 13 This invention illustrates a schematic diagram of high-frequency combined pulse waveforms with different amplitudes and output frequencies in an embodiment of the invention.

[0062] Figure 14 A schematic diagram of the arc-initiating pulse effect in an embodiment of the present invention is shown;

[0063] Figure 15 A schematic diagram of a seven-channel pulse waveform with arc initiation function is shown in an embodiment of the present invention. Detailed Implementation

[0064] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0065] The components of the embodiments of the invention described and illustrated herein can typically be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0066] In the following, the terms “comprising,” “having,” and their cognates, which may be used in various embodiments of the invention, are intended only to indicate a particular feature, number, step, operation, element, component, or combination thereof, and should not be construed as excluding, firstly, the presence of one or more other features, numbers, steps, operations, elements, components, or combinations thereof, or adding the possibility of one or more features, numbers, steps, operations, elements, components, or combinations thereof.

[0067] Furthermore, the terms "first," "second," and "third" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0068] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of the invention pertain. Terms (such as those defined in commonly used dictionaries) shall be interpreted as having the same meaning as in their contextual meaning in the relevant technical field and shall not be interpreted as having an idealized or overly formal meaning, unless clearly defined in the various embodiments of the invention.

[0069] Example 1

[0070] Please refer to Figure 1 This embodiment proposes a plasma power source, which will be described in detail below.

[0071] The plasma power supply includes an AC switch 10, a main controller 20, multiple pulse modules 30, and a plasma device 60.

[0072] Exemplarily, the AC switch 10 connects multiple pulse modules 30 in parallel and is also used to connect AC power to supply AC power to the multiple pulse modules 30; the main controller 20 connects multiple pulse modules 30 in parallel and is used to input corresponding control signals to the corresponding pulse modules 30 so that each pulse module 30 converts AC power into a corresponding pulse signal output. The pulse signals output by each pulse module 30 are used to form a combined pulse signal. The main controller 20 can be a logic chip, for example, the main controller 20 is any one or more combinations of ARM / FPGA / DSP logic chips; the multiple pulse modules 30 are used to connect to a plasma device 60, and the plasma device 60 is used to perform plasma discharge according to the combined pulse signal.

[0073] In this embodiment, as Figure 2 As shown, the plasma power supply also includes a protection module 40, which is connected to multiple pulse modules 30; the protection module 40 includes a first detection module 410 and a first pre-protection module 420.

[0074] The first detection module 410 is used to connect multiple pulse modules 30 and detect the pulse current value and pulse voltage value output by the multiple pulse modules 30. The first pre-protection module 420 is connected to the first detection module 410 and is used to output protection signals to the connected multiple pulse modules 30 according to the total current value and total voltage value detected by the first detection module 410. The multiple pulse modules 30 are connected in parallel to the plasma power supply. The multiple pulse modules 30 include the first pulse module to the nth pulse module. The number of pulse modules 30 is not limited, but is set according to the output power of the pulse signal required in the actual application scenario.

[0075] Exemplarily, the pulse module 30 includes an AC / DC conversion module 310, a power module 320, a drive module 330, a second detection module 340, a second pre-protection module 350, and a protection module 360.

[0076] The AC / DC conversion module 310, power module 320, and protection module 360 ​​are connected in sequence; the power module 320 is connected to the second detection module 340 and the drive module 330 respectively; the second pre-protection module 350 is connected to the second detection module 340 and the drive module 330 respectively; the drive module 330 is connected to the first pre-protection module 420 and the second pre-protection module 350 respectively.

[0077] It is understood that the AC switch 10 connects to AC power and transmits the AC power to the AC-DC conversion module 310 of multiple pulse modules 30, such as... Figure 3As shown, the AC / DC conversion module 310 includes an AC / DC converter 311 and a capacitive energy storage device 312. The AC / DC converter 311 converts the input AC power into DC power, transforming it into high-voltage DC power and supplying it to the power module 320. The energy storage device 312 stores the energy generated by the AC / DC converter 311. The energy storage device 312 can be a high-voltage large capacitor bank, for example... Figure 3 As shown, the energy storage device is a capacitor bank EC1-EC6 formed by six high-voltage large capacitors.

[0078] The power module 320 is connected to high-voltage DC power, such as... Figure 3 As shown, the power module 320 includes a first switching device (Q1), a first non-inductive capacitor (EC7), a first inductor (L1), a first freewheeling diode (D3, D4), and a first spike absorption circuit 321. The first spike absorption circuit 321 is connected to the first switching device and is used to absorb the spike voltage generated by the first switching device. One end of the first switching device is connected to the first non-inductive capacitor and the AC / DC conversion module 310, respectively, and the other end of the first switching device is used to connect to the first inductor and the first freewheeling diode, respectively. The first freewheeling diode is connected to the drive module 330, and the first inductor is connected to the protection module 360. The first freewheeling diode can play a freewheeling role when the first switching device is turned off, thereby preventing the induced voltage from being too high and breaking down the first switching device. The first switching device can be a switching transistor Q1.

[0079] The protection module 360 ​​can be used to prevent voltages and currents from outside the pulse module 30 from entering the pulse module 30. The protection module 360 ​​can be a diode (D1, D2) or an isolation transformer.

[0080] In one feasible implementation, the first spike absorption circuit is a switching circuit formed by a combination of low-power MOSFETs, SiC transistors, or high-voltage high-power IGBTs (1700V, 3200A) and related auxiliary circuits, such as an RCD absorption circuit, which includes resistors, capacitors, and diodes.

[0081] It is understood that the AC switch 10 supplies AC power to multiple pulse modules 30, and the main controller 20 sends control signals to the drive modules 330 in the multiple pulse modules 30 to control the output power and waveform of the pulse signals output by the pulse modules 30, so that the output power and waveform meet the requirements. The multiple pulse modules 30 output pulse signals to the connected plasma device. In addition, when the multiple pulse modules 30 output pulse signals to the plasma device, the first detection module 410 in the protection module 40 connected to the multiple pulse modules 30 detects the voltage value, current value and corresponding voltage and current change trend of the pulse modules 30, and sends the detection results to the first pre-protection module 420. The first pre-protection module 420 calculates the current derivative (di), voltage derivative (du), maximum current (Imax), voltage difference over a period of time (ΔU), current difference over a period of time (ΔI) and other values ​​based on the voltage value, current value and corresponding voltage and current change trend, in order to determine whether to send a protection signal to the drive module 330 of the pulse module 30.

[0082] The AC / DC conversion module 310 in the multiple pulse modules 30 converts AC power to DC power, and the energy storage device in the AC / DC conversion module 310 stores energy and outputs it to the connected power module 320. The second detection module 340 of the pulse module 30 detects the voltage and current values ​​output by the power module 320 and the corresponding voltage and current change trends, and sends the detection results to the second pre-protection module 350. Based on the voltage and current values ​​and the corresponding voltage and current change trends, the second pre-protection module 350 calculates values ​​such as current derivative (di), voltage derivative (du), maximum current (Imax), voltage difference over a period of time (ΔU), and current difference over a period of time (ΔI), and determines whether to send a protection signal to the drive module 330 and the main controller 20.

[0083] The main controller 20 also outputs control signals to the drive module 330 of the multiple pulse modules 30 based on the protection signal from the second pre-protection module 350.

[0084] The drive module 330 receives control signals from the main controller 20 and protection signals from the first pre-protection module 420 and the second pre-protection module 350, and converts the control signals and protection signals into drive signals required by the first switching device of the power module 320.

[0085] In one feasible implementation, such as Figure 4 and Figure 5As shown, the first detection module 410 includes a first current detection unit 411 and a first voltage detection unit 412; the second detection module 340 of the pulse module 30 includes a second current detection unit 341 and a second voltage detection unit 342. Specifically, the first current detection unit 411 detects the current values ​​and their changing trends output by the multiple pulse modules 30 and sends them to the driving module 330 of the multiple pulse modules 30; the first voltage detection unit 412 detects the voltage values ​​and their changing trends output by the multiple pulse modules 30 and sends them to the driving module 330 of the multiple pulse modules 30. The second current detection unit 341 detects the current value and its changing trend of the switching device in a single pulse module 30 and sends it to the driving module 330 of that pulse module 30; the second voltage detection unit 342 detects the voltage value and its changing trend of the switching device in a single pulse module 30 and sends it to the driving module 330 of that pulse module 30.

[0086] By way of example, the first current detection unit 411 and the second current detection unit 341 are respectively selected as current transformers, sampling resistors or Roots coils; the first voltage detection unit 342 and the second voltage detection unit 342 are respectively selected as resistive voltage divider sampling circuits or Hall sensors or isolation transformers.

[0087] In one feasible implementation, the first pre-protection module 420 and the second pre-protection module 350 respectively include any one or more combinations of amplifiers, comparators, delayers and logic chips.

[0088] In one feasible implementation, such as Figure 6 As shown, the plasma power supply also includes a human-machine interface module 50, which is connected to the main controller 20 and is used to set parameters, display status data, and record operating waveforms. The human-machine interface module 50 includes, but is not limited to, an industrial touch screen and a display button module.

[0089] In one feasible implementation, see also Figure 7 The pulse module 30 also includes a waveform adjustment circuit 370, which is connected to the power module 320 and the protection module 360. The waveform adjustment circuit 370 includes a second switching device (Q2), a second non-inductive capacitor (EC8), a second freewheeling diode (D7 and D8), and a second peak absorption circuit 371. The second peak absorption circuit 371 is connected to the second switching device and is used to absorb the peak voltage generated by the second switching device. One end of the second switching device is connected to the second non-inductive capacitor and the first inductor, and the other end of the second switching device is used to connect to the protection module 360 ​​and the second freewheeling diode. The second freewheeling diode is connected to the plasma device 60. The second switching device can be a switching transistor Q2, and the second peak absorption circuit 371 is an RCD circuit.

[0090] The waveform adjustment circuit 370 can combine the pulse signal output by the power module 320 into a pulse waveform with an amplitude tilt, that is, the waveform adjustment circuit 370 can combine multiple high-frequency pulses into a low-frequency pulse signal with a single waveform change, achieving a rapid ignition effect to improve coating efficiency or reduce the probability of target poisoning. The pulse waveform with an amplitude tilt includes waveforms with an amplitude that is initially high and then decreases, and waveforms with an amplitude that is initially low and then increases.

[0091] like Figure 8 As shown, the first switching device (Q1) and the second switching device (Q2) can be combined to control the output pulse waveform, thereby outputting a pulse waveform with an amplitude that is initially high and then decreases. This waveform has a ignition effect. By adjusting the amplitude of the output pulse signal through the waveform adjustment circuit, a current-balanced square wave effect can be formed, which is helpful for ionization ignition of gas targets that are difficult to ignite. After ignition, the voltage gradually decays, reducing the attraction and binding of metal ions to the target material and increasing the number of metal ions reaching the target plating part.

[0092] like Figure 9 As shown, the first switching device (Q1) and the second switching device (Q2) can be combined to control the output pulse waveform, thereby outputting a pulse waveform with a low amplitude followed by a high amplitude. The waveform with a low amplitude followed by a high amplitude has the effect of reducing target poisoning. For materials that easily form bonds and adhere to the target, such as TiN, the low voltage point is used for ignition. As the voltage in a single pulse gradually increases, the pulse current gradually increases, the metal ionization gradually increases, and the electron beam formed by the vacuum load pushes TiN away from the target, reducing the poisoning of the process target.

[0093] The waveform adjustment circuit 370 combines multiple high-frequency pulse signals into a low-frequency pulse signal with a single waveform change, achieving a rapid ignition effect, thereby improving the coating efficiency of the plasma device 60 or reducing the probability of target poisoning in the plasma device 60.

[0094] In one feasible implementation, such as Figure 7As shown, the pulse module 30 also includes an arc extinguishing absorption circuit 380, which is connected to the power module 320 and the protection module 360 ​​respectively. The arc extinguishing absorption circuit includes a third switching device (Q3), a fourth switching device (Q4), a resistor (R6), a third non-inductive capacitor (EC9), and a second inductor (L2). One end of the third switching device is connected to one end of the first inductor and one end of the second inductor respectively, and the other end of the third switching device is connected to the fourth switching device and the third non-inductive capacitor respectively. The other end of the second inductor is connected to the protection module 360. One end of the fourth switching device is connected to one end of the third non-inductive capacitor, and the other end of the fourth switching device is connected to one end of the resistor. The other end of the third non-inductive capacitor is connected to the first freewheeling diode and the plasma device respectively, and the other end of the resistor is connected to the first freewheeling diode and the plasma device respectively.

[0095] When the plasma power supply is working normally or stopped, the third switching device (Q3) and the fourth switching device (Q4) are open-circuited; when the plasma power supply detects arcing (ignition) in the cavity of the plasma device (vacuum load) 60 during operation (e.g.) Figure 10 As shown at time T1, after the first switching device Q1 and the second switching device Q2 are opened, the third switching device Q3 is closed, absorbing the energy stored in the devices (cables, vacuum chamber) that are equivalent to inductors and capacitors in the plasma power supply, and charging the third non-inductive capacitor (EC9), thereby reducing the voltage and current at the vacuum load terminal 60 and achieving the effect of vacuum arc extinguishing; after time T2, the third switching device (Q3) is opened and the fourth switching device (Q4) is closed, and the charge in the third non-inductive capacitor (EC9) is discharged through the resistor (R6).

[0096] The arc extinguishing absorption circuit 380 can quickly detect the arcing state of the plasma device 60 and quickly extinguish the local arc on the target material in the plasma device 60 by absorption, so as to reduce the damage to the target material. That is, it absorbs the arc generated in the plasma device 60 (vacuum load) to reduce the damage to the target material caused by the arcing phenomenon in vacuum load coating and improve the quality of vacuum load coating.

[0097] It should be noted that the addition of waveform adjustment circuit 370 and arc extinguishing absorption circuit 380 is not limited to their combined use in pulse module 30. This embodiment does not limit this. That is, the pulse module 30 can have waveform adjustment circuit 370 added alone to adjust the waveform of the output pulse signal, or arc extinguishing absorption circuit 380 added alone to achieve the arc extinguishing effect, or both waveform adjustment circuit 370 and arc extinguishing absorption circuit 380 can be added simultaneously for combined use.

[0098] In one feasible implementation, when a short-circuit arc occurs in the plasma device 60, its voltage and current are as follows: Figure 11The changes are shown. The first current detection unit 411 can quickly detect the current rising trend, i.e., the di and ΔI signals, and send them to the first pre-protection module 420; the first voltage detection unit 412 can quickly detect the voltage falling trend, i.e., the du and ΔV signals, and send them to the first pre-protection module 420. After filtering, comparing and delaying these two sets of signals respectively, the first pre-protection module 420 sends a protection signal to the drive module 330 of the pulse module 30. The pulse module 30 shuts down the switching device according to the protection signal to form a pre-protection mechanism.

[0099] In one feasible implementation, when the pre-protection mechanism is invalid, when the current value detected by the first current detection unit 411 exceeds the set value (Imax), the first pre-protection module 420 outputs a protection signal to the drive module 330, so that the pulse module 30 shuts down the first switching device to form a peak current protection mechanism.

[0100] It is understandable that the combination of pre-protection mechanism and peak current protection mechanism can ensure the safe and effective use of plasma power supply.

[0101] The plasma power supply provided in this embodiment includes an AC switch, a main controller, multiple pulse modules, and a plasma device. The AC switch connects to the multiple pulse modules in parallel for receiving AC power. The main controller connects to the multiple pulse modules in parallel and inputs corresponding control signals to the respective pulse modules, so that each pulse module converts the AC power into a corresponding pulse signal output. The pulse signals output by each pulse module are used to form a combined pulse signal. The multiple pulse modules are connected to the plasma device, which is used to perform plasma discharge according to the combined pulse signal. In this embodiment, the main controller sends control signals to the combined pulse modules to make each pulse module output a corresponding combined pulse signal according to a predetermined output mode, thereby achieving high-frequency, high-voltage, and high-current pulse output.

[0102] Example 2

[0103] This invention provides a plasma discharge method for use with the plasma power supply described in the above embodiments. The plasma discharge method will be described in detail below.

[0104] The main controller 20 inputs corresponding control signals to the corresponding pulse modules 30 so that each pulse module 30 converts the incoming AC power into a corresponding pulse signal output. The pulse signals output by each pulse module 30 are used to form a combined pulse signal and input to the plasma device 60 for plasma discharge.

[0105] AC switch 10 connects to AC power and supplies AC power to multiple pulse modules 30. The main controller 20 (MCU) controls multiple parallel pulse modules 30 through CAN communication to adjust the output voltage of the pulse modules 30, thereby controlling the amplitude of the pulse signal output waveform.

[0106] Exemplary, such as Figure 12 As shown, taking six pulse modules as an example, the six pulse modules 30 can output six pulse waveforms with phase differences and different pulse widths. The main controller 20 sets the output mode of the pulse signal according to the program and sends control signals to the multiple pulse modules 30 so that each pulse module 30 outputs a combined pulse signal according to the predetermined output mode. The combined pulse signal includes high-frequency pulse signals with the same amplitude or high-frequency pulse signals with different amplitudes and different waveforms. For example, the waveforms of high-frequency pulse signals with the same amplitude or high-frequency pulse signals with different amplitudes and different waveforms can be as follows: Figure 12 , Figure 13 As shown.

[0107] Specifically, the main controller 20 can charge each capacitor in the capacitor bank of the power module 320 of the pulse power supply according to the preset charging voltage, charging current, and charging polarity based on the multiple power combination pulse modules 30. The main controller 20 outputs a control signal to the drive module 330 of the pulse module to convert the control signal into a drive signal that meets the requirements of the switching devices in the power module 320. The detection module forms a closed-loop feedback signal by high-speed sampling of the voltage and current output by the power modules and using calculation control methods such as di / dt, du / dt, ΔU, and ΔI. When the plasma source in the plasma device 60 ignites an arc, its arc ignition effect is as follows: Figure 14 As shown. Taking the seven-pulse module 30 as an example, the seven-pulse module 30 can output seven pulse waveforms. When the seven-pulse module 30 is in the arc initiation stage, it can output as follows: Figure 15 The pulse waveform shown is such that, at the moment of arc initiation, the second detection module 340 and the second pre-protection module 350 in the pulse module 30 can quickly detect and respond, and drive the switch Q1 in a closed loop; the second pre-protection module 350 feeds back the protection signal to the main controller 20, and the main controller 20 regulates the AC switch 10 to form a second-order fully closed-loop control.

[0108] As an example, each pulse module 30 can be connected in parallel for output. By replacing the AC / DC conversion module 310, the pulse output power can be set in combination. Alternatively, by increasing the number of pulse modules 30, the pulse output frequency can be increased. Depending on the different types of switching devices in the power module 320 of the pulse module 30, the frequency range can even reach megahertz and above, and different waveforms can be combined for output.

[0109] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods can also be implemented in other ways. The apparatus embodiments described above are merely illustrative; for example, the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of apparatus, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code, which contains one or more executable instructions for implementing a specified logical function. It should also be noted that, as an alternative implementation, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and combinations of blocks in the block diagram and / or flowchart, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0110] In addition, the functional modules or units in the various embodiments of the present invention can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0111] If the functionality is implemented as a software module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this invention, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a smartphone, personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of this invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0112] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A plasma power source, characterized in that, include: AC switch, main controller, multiple pulse modules, protection module and plasma device; The AC switch connects the multiple pulse modules in parallel and is also used to connect to AC power. The main controller connects to the multiple pulse modules in parallel and is used to input corresponding control signals to the corresponding pulse modules so that each pulse module converts the AC power into a corresponding pulse signal for output. The pulse signals output by each pulse module are used to form a combined pulse signal. The plurality of pulse modules are connected to a plasma device, which is used to perform plasma discharge according to the combined pulse signal. Each of the multiple pulse modules is equipped with an arc-extinguishing absorption circuit for absorbing the electric arc generated in the plasma device. The protection module is connected to the plurality of pulse modules; the protection module includes a first pre-protection module and a first detection module; the pulse module includes an AC / DC conversion module, a power module, a drive module, a second detection module, a second pre-protection module, and a protection module; the AC / DC conversion module, the power module, and the protection module are connected in sequence; the power module is connected to the second detection module and the drive module respectively; the second pre-protection module is connected to the second detection module and the drive module respectively, and the drive module is also connected to the first pre-protection module and the second pre-protection module respectively; The power module includes a first switching device, a first non-inductive capacitor, a first inductor, a first freewheeling diode, and a first peak absorption circuit. The first peak absorption circuit is connected to the first switching device and is used to absorb the peak voltage generated by the first switching device. One end of the first switching device is connected to the first non-inductive capacitor and the AC / DC conversion module, and the other end of the first switching device is connected to the first freewheeling diode and the first inductor. The first freewheeling diode and the first non-inductive capacitor are respectively connected to the drive module. The first inductor is connected to the protection module. The arc-extinguishing absorption circuit is connected to the power module and the protection module respectively; the arc-extinguishing absorption circuit includes a third switching device, a fourth switching device, a resistor, a third non-inductive capacitor, and a second inductor; one end of the third switching device is connected to one end of the first inductor and one end of the second inductor respectively, the other end of the third switching device is connected to the fourth switching device and the third non-inductive capacitor respectively, and the other end of the second inductor is connected to the protection module; one end of the fourth switching device is connected to one end of the third non-inductive capacitor, and the other end of the fourth switching device is connected to one end of the resistor; the other end of the third non-inductive capacitor is connected to the first freewheeling diode and the plasma device respectively, and the other end of the resistor is connected to the first freewheeling diode and the plasma device respectively.

2. The plasma power source according to claim 1, characterized in that, The first detection module is connected to the plurality of pulse modules and is used to detect the total current value and total voltage value output by the plurality of pulse modules; The first pre-protection module is connected to the first detection module and is used to output protection signals to the connected plurality of pulse modules based on the total current value and total voltage value detected by the first detection module.

3. The plasma power source according to claim 2, characterized in that, The second pre-protection module is used to output a protection signal to the drive module and the main controller based on the current value and voltage value output by the power module detected by the second detection module, so that the main controller adjusts the control signal to the drive module according to the received protection signal; The drive module is used to convert the control signal and the received protection signal into drive signals.

4. The plasma power source according to claim 1, characterized in that, The pulse module further includes a waveform adjustment circuit, which is connected to the power module and the protection module respectively. The waveform adjustment circuit includes a second switching device, a second non-inductive capacitor, a second freewheeling diode, and a second peak absorption circuit. The second spike absorption circuit is connected to the second switching device and is used to absorb the spike voltage generated by the second switching device; One end of the second switching device is connected to the second non-inductive capacitor and the first inductor respectively, and the other end of the second switching device is used to connect to the protection module and the second freewheeling diode respectively; The second freewheeling diode is connected to the plasma device.

5. The plasma power source according to claim 1, characterized in that, The AC / DC conversion module includes an AC / DC converter and an energy storage device; The AC / DC converter is connected to the energy storage device and is used to convert the AC power to DC power and store the energy through the energy storage device. The first detection module includes a first current detection unit and a first voltage detection unit; The second detection module includes a second current detection unit and a second voltage detection unit; The first current detection unit and the second current detection unit are respectively a current transformer, a sampling resistor, or a Roots coil; The first voltage detection unit and the second voltage detection unit are respectively a resistive voltage divider sampling circuit, a Hall sensor, or an isolation transformer; The first pre-protection module and the second pre-protection module each include any one or more combinations of amplifiers, comparators, delayers and logic chips; The protection module is a diode or an isolation transformer; The main controller is any one or more combinations of ARM logic chips, FPGA logic chips, and DSP logic chips.

6. The plasma power source according to claim 1, characterized in that, The plasma power supply also includes a human-machine interface module, which is connected to the main controller and is used to display status data and record operating waveforms.

7. A plasma discharge method, characterized in that, The method for a plasma power source as described in any one of claims 1 to 6 comprises: The control inputs corresponding control signals to the corresponding pulse modules so that each pulse module converts the incoming AC power into a corresponding pulse signal output. The pulse signals output by each pulse module are used to form a combined pulse signal and input to the plasma device for plasma discharge.

8. The plasma discharge method according to claim 7, characterized in that, The combined pulse signal includes high-frequency pulse signals of the same amplitude or high-frequency pulse signals of different amplitudes and different output frequencies.

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