A boat stacking device, a vertical furnace including the same, and a quartz boat handling control method

Abstract

The application discloses a vertical furnace boat stacking device, which comprises a mounting bottom plate, a heat insulation baffle, a gripper assembly and a driving assembly; the mounting bottom plate is arranged on the top of the heat insulation baffle and is used for mounting and fixing the boat stacking device; the heat insulation baffle is internally provided with the driving assembly; two groups of the gripper assemblies are symmetrically arranged on the side of the heat insulation baffle and are in transmission connection with the driving assembly; under the driving of the driving assembly, the two groups of the gripper assemblies are close to or away from each other, so as to clamp or release the stacked quartz boats. The application further discloses a vertical furnace comprising the boat stacking device and a quartz boat carrying control method. The application has the advantages of compact structure, simple operation and reliable operation. Through the design of the boat stacking device, the length of the constant temperature zone and the quartz boat placing zone needs to be increased only in the case of increasing the production capacity, the quartz boat taking and placing space is reduced, the overall height of the equipment is reduced, and the production cost is saved.

Description

Technical Field

[0001] This invention belongs to the field of solar cell equipment technology, specifically relating to a stacking boat device, a vertical furnace including the device, and a quartz boat handling control method. Background Technology

[0002] With rapid societal development and ever-increasing energy demand, the finite nature of conventional energy sources and the growing environmental pollution necessitate the search for relatively clean and renewable energy alternatives. Solar energy, as one of the most promising renewable energy sources, has seen continuous improvement and breakthroughs in conversion efficiency thanks to the maturation of solar cell technology and the constant upgrading of different processes and equipment.

[0003] The diffusion furnace is a key piece of equipment in the photovoltaic cell manufacturing process. During low-pressure boron diffusion, liquid or gaseous boron sources are carried by a carrier gas into a quartz tube in a high-temperature, low-pressure environment. They react with silicon on the surface of the silicon wafer to generate boron atoms, which diffuse into the silicon wafer to form a PN junction.

[0004] In the operation of vertical boron diffusion equipment, due to the vertical layout of the reaction chamber, the equipment height increases accordingly when the length of the isothermal zone needs to be extended. The length of the isothermal zone directly determines the wafer load and production capacity per process. Using the traditional quartz boat structure, lengthening the isothermal zone also increases the boat handling space, and the height of the reaction chamber severely restricts the equipment's production capacity and reduces its cost-effectiveness. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a stacking boat device for a vertical furnace that is compact in structure, has a large heat exchange area, has a significant cooling effect and is easy to maintain.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A stacking device for a vertical furnace includes: a mounting base plate, a heat insulation baffle, a gripper assembly, and a drive assembly; the mounting base plate is disposed on top of the heat insulation baffle for mounting and fixing the stacking device; the heat insulation baffle is provided with a drive assembly, and two sets of gripper assemblies are symmetrically installed on the side of the heat insulation baffle, and the drive assembly is connected to the gripper assembly in a transmission manner. Under the drive of the drive assembly, the two sets of gripper assemblies move closer to each other or further away from each other to clamp or release the stacked quartz boats.

[0008] As a further improvement of the present invention, the gripper assembly includes: a gripper joint plate, a first limiting block, a second limiting block, a third limiting block, a support plate, and a rotating plate; the gripper joint plate is connected to the drive assembly, one end of the rotating plate is connected to the gripper joint plate, and the other end of the rotating plate is equipped with a support plate; the first limiting block, the second limiting block, and the third limiting block are installed on the support plate, and the first limiting block, the second limiting block, and the third limiting block form a limiting groove; under the drive of the drive assembly, the gripper joint plate drives the rotating plate to move, so as to realize the limiting groove clamping or releasing the stacked quartz boat.

[0009] As a further improvement of the present invention, the gripper assembly further includes a rotating shaft and a fourth limiting block; the end of the rotating plate is rotatably connected to the gripper joint plate via the rotating shaft; the fourth limiting block is disposed at the bottom of the gripper joint plate and is used to limit the rotation of the rotating plate.

[0010] As a further improvement of the present invention, the driving assembly includes: a guide rail mounting plate, a guide rail, a gripper connecting plate, and a driving element; the guide rail mounting plate is disposed on the side of the heat insulation baffle, the guide rail is mounted on the guide rail mounting plate, the gripper connecting plate is slidably mounted on the guide rail, and one end of the gripper connecting plate is connected to the gripper joint plate, and the other end of the gripper connecting plate is connected to the output end of the driving element; under the drive of the driving element, the gripper joint plate reciprocates on the guide rail to drive the rotating plate to move, thereby realizing the clamping or releasing of the stacked quartz boat by the limiting groove.

[0011] As a further improvement of the present invention, a switch bracket is installed at the bottom of the gripper connecting plate.

[0012] As a further improvement of the present invention, it also includes a solenoid valve mounting plate and a fixing plate. The fixing plate is mounted on a heat insulation baffle, and the bottom of the fixing plate is equipped with a solenoid valve mounting plate. The solenoid valve mounting plate is equipped with a solenoid valve and a terminal block. The solenoid valve is used to control the opening and closing of the drive element.

[0013] As a further improvement of the present invention, a supporting side plate and a first adjusting block are installed on the top of the fixed plate, and a second adjusting block is installed on both sides of the fixed plate; the first adjusting block and the second adjusting block are used to adjust the alignment of the stacking boat device with the quartz boat.

[0014] As a general technical concept, the present invention also provides a vertical furnace, including: a lower cabinet, a furnace door assembly, a reaction chamber, a robotic arm, and the aforementioned stacking boat device; the reaction chamber is disposed above the lower cabinet, and multiple stacking boat devices are disposed in the lower cabinet for stacking multiple quartz boats outside the reaction chamber; the furnace door assembly and the robotic arm are both disposed in the lower cabinet, the furnace door assembly is used to transport the quartz boats into the reaction chamber, and the robotic arm is used to handle the quartz boats.

[0015] As a general technical concept, the present invention also provides a quartz boat handling control method based on the above-mentioned vertical furnace, comprising the following steps:

[0016] S1. The robotic arm moves the No. 1 quartz boat to the furnace door assembly. The furnace door assembly then moves the quartz boat upward to a preset position outside the reaction chamber. The No. 1 quartz boat is then fixed by the stacking device.

[0017] S2. The furnace door assembly moves to the lower position again. The robot arm moves the second quartz boat to the furnace door assembly. The furnace door assembly moves the second quartz boat to the preset position outside the reaction chamber. The stacking device releases its grip on the first quartz boat, realizing the stacking of the two quartz boats.

[0018] S3. The furnace door assembly continues to transport the two stacked quartz boats into the reaction chamber for processing. After the process is completed, the furnace door assembly transports the two stacked quartz boats down to a preset position outside the reaction chamber. After the stacking boat device clamps the first quartz boat, the furnace door assembly continues to move down to a preset position in the lower cabinet, where the robot arm removes the quartz boat from the furnace door assembly.

[0019] S4. The furnace door assembly moves upward again to the preset position outside the reaction chamber. The stacking boat device releases its grip on the No. 1 quartz boat. The furnace door assembly then transfers the No. 1 quartz boat downward to the preset position in the lower cabinet. The robotic arm removes the quartz boat from the furnace door assembly, thus completing one full production process.

[0020] As a further improvement of the present invention, step S2 is repeated to achieve the stacking of multiple quartz boats outside the reaction chamber.

[0021] In steps S2 and S3, after the furnace door assembly transports the quartz boat to a preset position outside the reaction chamber, the control system transmits a signal to the solenoid valve to control the opening and closing of the drive element. When the drive element is activated, the gripper assembly connected to the gripper connecting plate moves together with the gripper connecting plate on the guide rail to perform clamping and releasing actions on the quartz boat, thereby completing the stacking and placing process.

[0022] Compared with the prior art, the advantages of the present invention are as follows:

[0023] 1. The stacking boat device of the present invention achieves a detachable connection between the stacking boat device and the vertical furnace by setting an installation base plate on the top of the heat insulation baffle; by setting the drive component inside the heat insulation baffle and symmetrically arranging two sets of gripper components on the side of the heat insulation baffle, and drivingly connecting the gripper components to the drive component, the two sets of gripper components move closer or further away from each other under the drive component, thereby achieving the clamping or releasing of the stacked quartz boats, which is both simple and reliable; furthermore, by slidingly connecting the gripper connecting plate to the guide rail, and connecting one end of the gripper connecting plate to the gripper component and the other end of the gripper connecting plate to the output end of the drive element, a solenoid valve is set to control the opening and closing of the drive element. Under the drive element, the reciprocating movement of the gripper connecting plate on the guide rail is precisely controlled, thereby driving the reciprocating movement of the gripper component, which improves the accuracy and stability of clamping the quartz boats.

[0024] 2. The vertical furnace of the present invention, by setting the above-mentioned stacking boat device in the lower cabinet, and through the cooperation of the furnace door assembly and the robot, effectively realizes the stacking of multiple quartz boats outside the reaction chamber. When it is necessary to increase the production capacity, only the height of the reaction chamber needs to be increased, and the lower cabinet does not need to be increased. This reduces the overall height of the equipment, reduces transportation costs, facilitates installation, and also reduces the height of the plant, reduces the cleanroom space, and reduces the construction cost.

[0025] 3. The quartz boat handling control method of the present invention uses a robotic arm to transport the quartz boat to the furnace door assembly, and the furnace door assembly to transport the quartz boat to a preset position outside the reaction chamber. The stacking device fixes the quartz boat, which not only realizes the stacking of multiple quartz boats outside the reaction chamber, but also saves the height of the lower cabinet during the process of picking up and putting down the quartz boat, thus improving production efficiency and promoting increased production capacity. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structural principle of the vertical furnace in this invention.

[0027] Figure 2 This is a schematic diagram of the structural principle of the vertical furnace in this invention from another perspective.

[0028] Figure 3 This is a schematic diagram illustrating the structural principle of the quartz boat in this invention.

[0029] Figure 4 This is one of the schematic diagrams illustrating the structural principle of the stacking boat device in this invention.

[0030] Figure 5 This is the second schematic diagram of the structural principle of the stacking boat device in this invention.

[0031] Figure 6 This is the third schematic diagram illustrating the structural principle of the stacking boat device in this invention.

[0032] Figure 7 This is the fourth schematic diagram illustrating the structural principle of the stacking boat device in this invention.

[0033] Figure 8 This is a schematic diagram illustrating the connection principle between the stacked boat device and the quartz boat in this invention.

[0034] Figure 9 This is a schematic diagram of the connection structure between the stacked boat device and the quartz boat in this invention from another perspective.

[0035] Figure 10 This is a flowchart illustrating the quartz boat handling control method of the present invention.

[0036] Legend: 100, Stacking boat device; 101, Mounting base plate; 102, Guide rail mounting plate; 103, Gripper joint plate; 104, Rotating shaft; 105, First limiting block; 106, Second limiting block; 107, Third limiting block; 108, Fourth limiting block; 109, Bearing plate; 110, Rotating plate; 111, Heat insulation baffle; 112, Support side plate; 113, First adjusting block; 114, Solenoid valve; 115, Solenoid valve mounting plate; 116, Terminal block; 117, Mounting back plate; 118, Second adjusting block; 119, Fixing plate; 120, Switch bracket; 121, Guide rail; 122, Gripper connecting plate; 123, Drive element; 200, Lower cabinet; 300, Furnace door assembly; 400, Quartz boat; 401, Ear plate; 500, Reaction chamber; 600, Robotic arm. Detailed Implementation

[0037] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0038] Example 1

[0039] like Figures 4 to 7 As shown, the stacking device for a vertical furnace of the present invention includes: a mounting base plate 101, a heat insulation baffle 111, a gripper assembly, and a drive assembly. The mounting base plate 101 is disposed on top of the heat insulation baffle 111 for mounting and fixing the stacking device in the vertical furnace. The heat insulation baffle 111 is provided with a drive assembly, and two sets of gripper assemblies are symmetrically installed on the sides of the heat insulation baffle 111. The drive assembly is connected to the gripper assembly in a transmission manner. Under the drive of the drive assembly, the two sets of gripper assemblies move closer to each other or further away from each other to clamp or release the stacked quartz boats 400. The heat insulation baffle 111 can effectively prevent the heat generated in the reaction chamber of the vertical furnace from being conducted to the drive assembly, thereby improving the service life of the drive assembly.

[0040] In this embodiment, by setting a mounting base plate 101 on the top of the heat insulation baffle 111, a detachable connection between the stacking boat device and the vertical furnace is achieved. By setting the drive assembly inside the heat insulation baffle 111, symmetrically arranging two sets of gripper assemblies on the side of the heat insulation baffle 111, and connecting the gripper assemblies with the drive assembly, the two sets of gripper assemblies move closer or further away from each other under the drive of the drive assembly, thus achieving the clamping or releasing of the stacked quartz boats, which is both simple and reliable.

[0041] like Figure 4 and Figure 5 As shown, in this embodiment, the gripper assembly includes: a gripper joint plate 103, a first limiting block 105, a second limiting block 106, a third limiting block 107, a support plate 109, and a rotating plate 110. The gripper joint plate 103 is connected to the drive assembly. One end of the rotating plate 110 is connected to the gripper joint plate 103, and the other end of the rotating plate 110 is equipped with the support plate 109. The first limiting block 105, the second limiting block 106, and the third limiting block 107 are installed on the support plate 109, forming a limiting groove. Under the drive of the drive assembly, the gripper joint plate 103 drives the rotating plate 110 to move, thereby enabling the limiting groove to clamp or release the stacked quartz boat 400.

[0042] Furthermore, such as Figure 3 As shown, ear plates 401 are provided on both sides of the bottom of the quartz boat 400. Figure 8 and Figure 9 As shown, during clamping, two sets of limiting grooves clamp and fix the quartz boat 400 from both sides of the ear plate 401 to prevent the quartz boat 400 from shifting, thereby improving the safety and reliability of the stacking of the quartz boat 400.

[0043] In this embodiment, the gripper assembly further includes a rotating shaft 104 and a fourth limiting block 108. The end of the rotating plate 110 is rotatably connected to the gripper joint plate 103 via the rotating shaft 104, enabling the rotating plate 100 to rotate in the vertical direction. The fourth limiting block 108 is disposed at the bottom of the gripper joint plate 103 and is used to limit the rotation of the rotating plate 110 in the vertical direction.

[0044] like Figure 6 and Figure 7As shown, in this embodiment, the driving assembly includes: a guide rail mounting plate 102, a guide rail 121, a gripper connecting plate 122, and a driving element 123. The guide rail mounting plate 102 is disposed on the side of the heat insulation baffle 111, the guide rail 121 is mounted on the guide rail mounting plate 102, the gripper connecting plate 122 is slidably mounted on the guide rail 121, and one end of the gripper connecting plate 122 is connected to the gripper joint plate 103, and the other end of the gripper connecting plate 122 is connected to the output end of the driving element 123. Under the drive of the driving element 123, the gripper joint plate 103 reciprocates on the guide rail 121 to drive the rotating plate 110 to move, thereby achieving the clamping or releasing of the stacked quartz boat 400 by the limiting groove. It can be understood that the driving element 123 can specifically be in the form of a cylinder or a motor, as long as it can drive the gripper assembly to move smoothly and achieve precise clamping and releasing of the quartz boat 400.

[0045] Furthermore, such as Figure 7 As shown, a switch bracket 120 is mounted on the bottom of the gripper connecting plate 122. By installing a limit switch on the switch bracket 120, it is possible to detect whether the drive element 123 has moved to a preset position and to feed back the position information of the drive element 123 to the external control system.

[0046] In this embodiment, the system also includes a solenoid valve mounting plate 115, a mounting back plate 117, and a fixing plate 119. The mounting back plate 117 is located on the back of the heat insulation baffle 111, i.e., the gripper assembly is located at the front of the heat insulation baffle 111. The mounting back plate 117 and the gripper assembly are respectively located on opposite sides of the heat insulation baffle 111. The fixing plate 119 is mounted on the mounting back plate 117. The solenoid valve mounting plate 115 is mounted on the bottom of the fixing plate 119. The solenoid valve mounting plate 115 is equipped with a solenoid valve 114 and a terminal block 116. The solenoid valve 114 is used to control the opening and closing of the drive element 123, and the terminal block 116 is used for wiring components such as the solenoid valve.

[0047] In this embodiment, a supporting side plate 112 and a first adjusting block 113 are installed on the top of the fixing plate 119, and second adjusting blocks 118 are installed on both sides of the fixing plate 119. Due to the existence of machining accuracy errors and installation position errors, the stacking boat device 100 cannot perfectly align with the quartz boat 400. By adjusting and correcting the first adjusting block 113 and the second adjusting block 118, the stacking boat device 100 and the quartz boat 400 can be finely aligned.

[0048] Example 2

[0049] like Figure 1 and Figure 2As shown, this embodiment also provides a vertical furnace, including a lower cabinet 200, a furnace door assembly 300, a reaction chamber 500, a robotic arm 600, and the stacking boat device 100 described in Embodiment 1. The reaction chamber 500 is located above the lower cabinet 200, and quartz boats 400 loaded with silicon wafers complete the corresponding diffusion process within the reaction chamber 500. Multiple stacking boat devices 100 are located in the lower cabinet 200 to stack multiple quartz boats 400 outside the reaction chamber 500. The furnace door assembly 300 and the robotic arm 600 are both located in the lower cabinet 200. The furnace door assembly 300 is used to transport the quartz boats 400 into the reaction chamber 500 and to seal the reaction chamber 500. The robotic arm 600 reciprocates on a slide rail provided in the lower cabinet 200 to transport the quartz boats 400. The connection relationship between the stacking boat device 100 and the quartz boats 400 is as follows. Figure 8 and Figure 9 As shown, the stacking boat device 100 clamps multiple quartz boats 400 to achieve stable stacking, thereby improving the overall production capacity of the vertical furnace equipment.

[0050] In this embodiment, by placing the stacking boat device 100 in the lower cabinet 200, and through the cooperation of the furnace door assembly 300 and the robotic arm 600, multiple quartz boats 400 are effectively stacked outside the reaction chamber 500. When increased production capacity is required, only the height of the reaction chamber 500 needs to be increased, without the need to increase the size of the lower cabinet 200. This reduces the overall height of the equipment, reduces transportation costs, facilitates installation, and also reduces the height of the plant, the cleanroom space, and the construction cost.

[0051] Example 3

[0052] like Figure 10 As shown, this embodiment also provides a quartz boat handling control method based on the vertical furnace described in Embodiment 2, including the following steps:

[0053] S1. The first quartz boat 400 is transported to the furnace door assembly 300 by the robotic arm 600. The furnace door assembly 300 then moves the quartz boat 400 upward to a preset position outside the reaction chamber 500, where the stacking boat device 100 clamps and fixes the first quartz boat 400.

[0054] S2, the furnace door assembly 300 moves to the lower position again, the robot arm 600 transports the second quartz boat 400 to the furnace door assembly 300, the furnace door assembly 300 transports the second quartz boat 400 to the preset position outside the reaction chamber 500, and the stacking boat device 100 releases the clamp on the first quartz boat 400 to realize the stacking of the two quartz boats 400.

[0055] S3. The furnace door assembly 300 continues to transport the two stacked quartz boats 400 into the reaction chamber 500 for diffusion processing. After the diffusion process is completed, the furnace door assembly 300 transports the two stacked quartz boats 400 downward to a preset position outside the reaction chamber 500. After the stacking boat device 100 clamps the first quartz boat 400, the furnace door assembly 300 continues to move downward to a preset position in the lower cabinet 200, where the robot arm 600 removes the second quartz boat 400 from the furnace door assembly 300.

[0056] S4. The furnace door assembly 300 moves upward again to the preset position outside the reaction chamber 500. The stacking boat device 100 releases its grip on the first quartz boat 400. The furnace door assembly 300 then transfers the first quartz boat 400 downward to the preset position in the lower cabinet 200. The robot arm 600 removes the first quartz boat 400 from the furnace door assembly 300, thus completing one complete production process.

[0057] Furthermore, according to actual production needs, multiple stacking boat devices 100 are set in the lower cabinet 200, and step S2 is repeated to increase the corresponding number of handling operations, so that multiple quartz boats 400 can be stacked outside the reaction chamber 500.

[0058] In this embodiment, in steps S2 and S3, after the furnace door assembly 300 transports the quartz boat 400 to a preset position outside the reaction chamber 500, the external control system (not shown in the figure) transmits a signal to the solenoid valve 114 to control the opening and closing of the drive element 123. When the drive element 123 is activated, the gripper assembly connected to the gripper connecting plate 122 moves together with the gripper connecting plate 122 on the guide rail 121, performing clamping and releasing actions on the quartz boat 400, thereby completing the stacking and placing process of the boat.

[0059] In this embodiment, the quartz boat 400 is transported to the furnace door assembly 300 by the robot arm 600, and then transported to a preset position outside the reaction chamber 500 by the furnace door assembly 300. The stacking boat device 100 fixes the quartz boat 400, which not only realizes the stacking of multiple quartz boats 400 outside the reaction chamber 500, but also saves the height dimension of the lower cabinet 200 during the process of picking up and putting down the quartz boat 400, thereby improving production efficiency and promoting increased production capacity.

[0060] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the spirit and technical essence of the invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A stacking boat device, characterized in that, include: The mounting base plate (101), heat insulation baffle (111), gripper assembly, and drive assembly are installed. The mounting base plate (101) is set on top of the heat insulation baffle (111) for installing and fixing the stacking boat device. The heat insulation baffle (111) is equipped with a drive assembly. Two sets of gripper assemblies are symmetrically installed on the side of the heat insulation baffle (111), and the drive assembly is connected to the gripper assembly in a transmission manner. Under the drive of the drive assembly, the two sets of gripper assemblies move closer to each other or further away from each other to clamp and release the stacked quartz boats (400). The gripper assembly includes: a gripper joint plate (103), a first limiting block (105), a second limiting block (106), a third limiting block (107), a support plate (109), and a rotating plate (110); the gripper joint plate (103) is connected to the drive assembly, one end of the rotating plate (110) is connected to the gripper joint plate (103), and the other end of the rotating plate (110) is equipped with a support plate (109). The support plate (109) is equipped with a first limiting block (105), a second limiting block (106), and a third limiting block (107), which together form a limiting groove; under the drive of the drive assembly, the gripper joint plate (103) drives the rotating plate (110) to move, so as to realize the limiting groove clamping or releasing the stacked quartz boat (400).

2. The stacking boat device according to claim 1, characterized in that, The gripper assembly also includes a rotating shaft (104) and a fourth limiting block (108); the end of the rotating plate (110) is rotatably connected to the gripper joint plate (103) via the rotating shaft (104); the fourth limiting block (108) is located at the bottom of the gripper joint plate (103) and is used to limit the rotation of the rotating plate (110).

3. The stacking boat device according to claim 2, characterized in that, The drive assembly includes: a guide rail mounting plate (102), a guide rail (121), a gripper connecting plate (122), and a drive element (123); the guide rail mounting plate (102) is disposed on the side of the heat insulation baffle (111), the guide rail (121) is mounted on the guide rail mounting plate (102), the gripper connecting plate (122) is slidably mounted on the guide rail (121), and one end of the gripper connecting plate (122) is connected to the gripper joint plate (103), and the other end of the gripper connecting plate (122) is connected to the output end of the drive element (123); under the drive of the drive element (123), the gripper joint plate (103) moves back and forth on the guide rail (121) to drive the rotating plate (110) to move, thereby realizing the clamping of the stacked quartz boat (400) by the limiting groove or the release of the quartz boat (400).

4. The stacking boat device according to claim 3, characterized in that, A switch bracket (120) is installed at the bottom of the gripper connecting plate (122).

5. The stacking boat device according to any one of claims 1 to 4, characterized in that, It also includes a solenoid valve mounting plate (115) and a fixing plate (119). The fixing plate (119) is mounted on the heat insulation baffle (111). The bottom of the fixing plate (119) is equipped with the solenoid valve mounting plate (115). The solenoid valve mounting plate (115) is equipped with a solenoid valve (114) and a terminal block (116). The solenoid valve (114) is used to control the opening and closing of the drive element (123).

6. The stacking boat device according to claim 5, characterized in that, The top of the fixed plate (119) is equipped with a support side plate (112) and a first adjusting block (113), and the two sides of the fixed plate (119) are equipped with second adjusting blocks (118); the first adjusting block (113) and the second adjusting block (118) are used to adjust the alignment of the stacking boat device (100) with the quartz boat (400).

7. A vertical furnace, characterized in that, include: The assembly comprises a lower cabinet (200), a furnace door assembly (300), a reaction chamber (500), a robotic arm (600), and a stacking boat device (100) as described in any one of claims 1 to 6. The reaction chamber (500) is located above the lower cabinet (200), and multiple stacking boat devices (100) are located in the lower cabinet (200) to enable multiple quartz boats (400) to be stacked outside the reaction chamber (500). The furnace door assembly (300) and the robotic arm (600) are both located in the lower cabinet (200). The furnace door assembly (300) is used to transport the quartz boats (400) into the reaction chamber (500), and the robotic arm (600) is used to move the quartz boats (400).

8. A method for controlling the handling of a quartz boat in a vertical furnace according to claim 7, characterized in that, Includes the following steps: S1. The robotic arm (600) moves the No. 1 quartz boat (400) to the furnace door assembly (300). The furnace door assembly (300) then moves the quartz boat (400) upward to a preset position outside the reaction chamber (500). The No. 1 quartz boat (400) is then fixed by the stacking boat device (100). S2, the furnace door assembly (300) moves to the lower position again, the robot (600) moves the second quartz boat (400) to the furnace door assembly (300), the furnace door assembly (300) moves the second quartz boat (400) to the preset position outside the reaction chamber (500), the stacking device (100) releases the clamp on the first quartz boat (400) to realize the stacking of the two quartz boats (400); S3. The furnace door assembly (300) continues to transport the two stacked quartz boats (400) to the reaction chamber (500) for processing. After the process is completed, the furnace door assembly (300) transports the two stacked quartz boats (400) down to a preset position outside the reaction chamber (500). After the first quartz boat (400) is clamped by the stacking boat device (100), the furnace door assembly (300) continues to move down to a preset position in the lower cabinet (200). The robot arm (600) removes the second quartz boat (400) from the furnace door assembly (300). S4. The furnace door assembly (300) moves upward again to the preset position outside the reaction chamber (500). The stacking boat device (100) releases its grip on the first quartz boat (400). The furnace door assembly (300) transfers the first quartz boat (400) downward to the preset position in the lower cabinet (200). The robot arm (600) removes the first quartz boat (400) from the furnace door assembly (300).

9. The method for controlling the transport of a quartz boat in a vertical furnace according to claim 8, characterized in that, Repeat step S2 to stack multiple quartz boats (400) outside the reaction chamber (500); In steps S2 and S3, after the furnace door assembly (300) transports the quartz boat (400) to a preset position outside the reaction chamber (500), the control system transmits a signal to the solenoid valve (114) to control the opening and closing of the drive element (123). When the drive element (123) is activated, the gripper assembly connected to the gripper connecting plate (122) moves together with the gripper connecting plate (122) on the guide rail (121) to perform clamping and releasing actions on the quartz boat (400), thereby completing the stacking process.

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