Quartz resonator pin calibration device, calibration tool determination method and calibration method

Abstract

The present invention provides a quartz resonator pin calibration device, a method for determining a calibration tool, and a quartz resonator pin calibration method, belonging to the field of pin calibration technology. The device comprises a holder with adsorption holes, a calibration tool that can be adsorbed on the holder, a clamping and straightening mechanism, and a positioning cam; the clamping and straightening mechanism is arranged on the holder and is symmetrical to the left and right sides of the calibration tool, and comprises a linear actuator and a clamping claw connected to the linear actuator; the positioning cam has an eccentric shaft that is rotatably connected to the holder and is symmetrical to the left and right sides of the calibration tool; the clamping claw pushes the positioning cam until it abuts the calibration tool, thereby obtaining the straightened position of the quartz resonator pin. This embodiment provides a semi-automated calibration device to replace the current fully manual visual adjustment of the quartz resonator pins. This can improve the accuracy of the verticality of the pin calibration and avoid crushing the pins during the resistance welding process, thereby avoiding product scrapping caused by product scrapping.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor production, and in particular relates to a quartz resonator pin calibration device. Background Art

[0002] A quartz resonator is a device made using the principle that when the frequency of an electrical signal is equal to the natural frequency of a quartz crystal, the crystal resonates due to the piezoelectric effect. It is a key component of crystal oscillators and narrowband filters.

[0003] In the semiconductor production line, resistance welding is an important process in the production of quartz resonators. Figure 11 Define the X and Y directions of the quartz resonator (X is the length direction of the shell, Y is the width direction of the shell). Due to requirements such as device miniaturization, the gap between the quartz resonator pins and the upper mold in the Y direction is very small. A slightly larger deviation in the perpendicularity between the pins and the shell surface in the Y direction will cause the pins to be crushed during the resistance welding process. Tests have found that when the pin length is 13.2mm, the pin will not be crushed as long as the angle between it and the mold surface is within 90°±2.24°.

[0004] Currently, to reduce product scrapping caused by crushed pins, production lines use visual inspection to check the verticality of the pins. When workers visually determine that the pin angle is inappropriate, they manually adjust the pins with tweezers. However, this manual adjustment method can lead to different deviations in the pin adjustment due to factors such as individual techniques, personal experience, and individual visual differences. The scrap generated by this situation accounts for more than 80% of the scrap rate of this process, resulting in high product scrap rate, high production costs, and waste of resources. Figure 12 、 Figure 13 Schematic diagrams of the positions of the upper die 21 and the lower die 22 during resistance welding standby and product processing respectively. Summary of the Invention

[0005] The embodiments of the present invention provide a quartz resonator pin calibration device, a method for determining a calibration tool, and a quartz resonator pin calibration method, aiming to improve the accuracy of the pin calibration verticality and reduce the high scrap rate problem in semiconductor device production.

[0006] In the first aspect, in order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: to provide a quartz resonator pin calibration device, including a holding table with adsorption holes, a calibration tool that can be adsorbed on the holding table, a clamping and straightening mechanism and a positioning cam; the clamping and straightening mechanism is arranged on the holding table and is symmetrical to the left and right sides of the calibration tool, including a linear actuator and a clamping claw connected to the linear actuator; the positioning cam, whose eccentric shaft is rotatably connected to the holding table, and is symmetrical to the left and right sides of the calibration tool; the clamping claw pushes the positioning cam until the clamping claw hits the calibration tool, so that the straightening position of the quartz resonator pin can be obtained.

[0007] In the first aspect, in a possible implementation, a raised supporting platform is provided in the middle of the holding table, a raised adsorption platform is provided in the middle of the supporting platform, a row of adsorption holes is provided on the adsorption platform, and an air path connecting the adsorption holes is provided in the adsorption platform; the positioning cams are four groups, symmetrically arranged on the left and right sides of the adsorption platform, and rotatably connected to the supporting platform.

[0008] In the first aspect, in a possible implementation, the positioning cam is also provided with a top screw parallel to the eccentric shaft and a positioning column parallel to the eccentric shaft, and the clamp is a bent part, including a vertical plate connected to the linear actuator and a horizontal plate connected to the upper end of the vertical plate, the vertical plate presses against the positioning column, and the horizontal plate clamps the calibration tooling.

[0009] In the first aspect, in a possible implementation, the holding table is further provided with an adjustment seat, the adjustment seat is fixed to the holding table by an adjustment bolt, and the adjustment seat is provided with a long hole that allows the adjustment seat to move left and right; the linear actuator is a cylinder, which is fixed on the adjustment seat.

[0010] In the first aspect, in a possible implementation, the quartz resonator pin calibration device also includes a base, a reversing solenoid valve and a vacuum generator arranged on the base, the reversing solenoid valve is connected to the vacuum generator, and the linear actuator and the adsorption hole are connected to the reversing solenoid valve.

[0011] In a first aspect, in a possible implementation, a positioning plate is provided on the base, a row of positioning holes is provided on the positioning plate, and the reversing solenoid valve is fixed on the positioning plate.

[0012] In a first aspect, in a possible implementation, the calibration tool includes a rectangular substrate, the rectangular substrate includes a base and a straightening plate provided on the base, and the distance between the straightening plate and the base is a calibration value d.

[0013] In a first aspect, in a possible implementation, a pin that can be plugged into the adsorption hole is provided at the bottom of the base.

[0014] In a second aspect, the present invention provides a method for determining a calibration tool, based on the quartz resonator pin calibration device, the method comprising:

[0015] Place the quartz resonator shell to be straightened on the holder, and use a protractor to adjust the angle of the quartz resonator pins so that the pins of the quartz resonator coincide with the 90° scale line of the protractor.

[0016] Use tweezers to move the top of the pin to one side and measure the maximum angle θ at which the pin can rebound to the 90° position.

[0017] Drag the clamping claw to contact the pin of the quartz resonator, and measure the length h from the contact point to the root of the pin along the pin;

[0018] According to the formula d = h·sinθ, the calibration value d can be obtained;

[0019] According to the calibration value d, the calibration tool can be made.

[0020] In a third aspect, the present invention further provides a method for calibrating a quartz resonator pin. Based on the quartz resonator pin calibration device, the calibration method includes:

[0021] Calibration of positioning cams;

[0022] Step 1: Place the calibration fixture on the workpiece holder, with the straightening surface of the straightening plate facing the positioning cam to be calibrated;

[0023] Step 2: Loosen the top screw that fixes the positioning cam so that the positioning cam can rotate around the eccentric shaft;

[0024] Step 3: Start the cylinder on the side of the positioning cam to be calibrated so that the clamping jaw on that side presses against the straightening surface of the calibration tool;

[0025] Step 4: Rotate the positioning cam to be calibrated and make the positioning column fit against the clamping jaws;

[0026] Step 5: Lock the eccentric shaft, tighten the top screw, and fix the positioning cam to determine the position of the positioning column;

[0027] Step 6: Flip the calibration fixture so that the straightening surface of the straightening plate faces the positioning cam on the other side, and repeat the above steps to calibrate the positioning cam on the other side;

[0028] Calibration of quartz resonator pins;

[0029] Step 7: Remove the calibration tool and place the shell of the quartz resonator to be calibrated in the adsorption hole, with the pins exposed.

[0030] Step eight, start the air source to make the clamping jaws on both sides press against the positioning posts on the same side at the same time, or press against the positioning posts on the same side in sequence, so that the clamping jaws on both sides clamp the pins to achieve calibration of the quartz resonator pins.

[0031] Compared with the prior art, the quartz resonator pin calibration device, calibration tool determination method, and pin calibration method provided by the present invention have the following advantages: a semi-automated calibration device replaces the current technical means of manually adjusting the quartz resonator pins with a semi-automated calibration device, thereby avoiding pin verticality errors caused by factors such as individual techniques, personal experience, and individual visual differences, and improving the accuracy of the verticality of the pin calibration, thereby reducing the product scrap rate and production costs and reducing resource waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of the exploded structure of a quartz resonator pin calibration device provided by an embodiment of the present invention;

[0033] Figure 2 Schematic diagram of the three-dimensional structure of the quartz resonator pin calibration device provided by the embodiment of the present invention Figure 1 ;

[0034] Figure 3 Schematic diagram of the three-dimensional structure of the quartz resonator pin calibration device provided by the embodiment of the present invention Figure 2 ;

[0035] Figure 4 for Figure 3 A schematic top view of the structure of the quartz resonator pin calibration device shown;

[0036] Figure 5 for Figure 4 The schematic diagram of the structure of the quartz resonator pin calibration device without the clamping claws is shown;

[0037] Figure 6 A schematic diagram of the three-dimensional structure of a piece holding platform provided in an embodiment of the present invention;

[0038] Figure 7 for Figure 6 A schematic diagram of the top view of the provided piece holding table;

[0039] Figure 8 For the Figure 7 Cross-sectional structural diagram along line AA;

[0040] Figure 9 A schematic diagram of the three-dimensional structure of a calibration tool provided in an embodiment of the present invention;

[0041] Figure 10 A schematic side view of the calibration tool provided in an embodiment of the present invention;

[0042] Figure 11 A schematic structural diagram of a quartz resonator provided in an embodiment of the present invention;

[0043] Figure 12 A schematic diagram of the structure of the quartz resonator and upper and lower molds provided in an embodiment of the present invention;

[0044] Figure 13 A schematic diagram of the structure of the upper and lower molds of the quartz resonator provided by an embodiment of the present invention;

[0045] Description of reference numerals:

[0046] 1. Vacuum generator; 2. Reversing solenoid valve; 3. Base; 4. Adjustment plate; 5. Long hole; 6. Linear actuator; 7. Adjustment seat; 8. Gripper; 9. Calibration tool; 91. Base; 92. Straightening plate; 93. Pin; 10. Adsorption hole; 11. Holder; 12. Support column; 13. Quick connector; 14. Positioning cam; 15. Top screw; 16. Positioning column; 17. Support platform; 18. Adsorption platform; 19. Air channel; 20. Quartz resonator; 21. Upper mold; 22. Lower mold. DETAILED DESCRIPTION

[0047] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0048] In the description of the present invention, it should be noted that if terms such as "front", "back", "left", and "right" appear to indicate directions or positional relationships, they are based on the attached Figure 1 The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] Please also refer to Figures 1 to 10The quartz resonator pin calibration device provided by the present invention is now described. The quartz resonator pin calibration device comprises a holder 11 having adsorption holes 10, a calibration fixture 9 that can be attached to the holder 11, a clamping and straightening mechanism, and a positioning cam 14. The clamping and straightening mechanism is disposed on the holder 11, symmetrically on the left and right sides of the calibration fixture 9, and comprises a linear actuator 6 and a clamping jaw 8 connected to the linear actuator 6. The positioning cam 14 has an eccentric shaft that is rotatably connected to the holder 11 and symmetrically on the left and right sides of the calibration fixture 9. The clamping jaw 8 pushes the positioning cam 14 until it abuts the calibration fixture 9, thereby achieving the straightened position of the quartz resonator 20 pin.

[0050] Compared to existing technologies, the quartz resonator 20 pin calibration device provided in this embodiment has the following advantages: By replacing the current manual visual adjustment of the quartz resonator 20 pins with a semi-automated calibration device, the device can effectively improve the verticality between the quartz resonator 20 pins and the housing, avoiding pin verticality errors caused by factors such as individual technique, personal experience, and individual visual differences. This improves the accuracy of pin calibration and prevents pin damage during resistance welding, which can lead to product scrap. In actual production, a pin calibration process can be added before welding to ensure that all pins meet welding requirements after this process, thereby reducing product scrap rate and production costs, reducing resource waste, and contributing to the intelligent and automated resistance welding process.

[0051] In some embodiments, see Figures 1 to 8 As shown, a raised support platform 17 is provided in the middle of the holding platform 11, and a raised adsorption platform 18 is provided in the middle of the support platform 17. The adsorption platform 18 is provided with a row of adsorption holes 10, and an air passage 19 is provided in the adsorption platform 18 to connect the adsorption holes. Four sets of positioning cams 14 are symmetrically arranged on the left and right sides of the adsorption platform 18 and are rotatably connected to the support platform 17. This invention has a simple structure and low manufacturing cost. The reliability and consistency after adjustment are better than manual adjustment. It can adjust multiple resonator pins at one time. Multiple adsorption holes are provided, and each adsorption hole 10 can adsorb one quartz resonator 20. Therefore, when the clamping jaws 8 clamp the calibration pins, multiple quartz resonator 20 pins can be calibrated at one time, which can effectively improve work efficiency.

[0052] In some embodiments, see Figures 1 to 5 The positioning cam 14 is also provided with a top screw 15 parallel to the eccentric shaft and a positioning column 16 parallel to the eccentric shaft. The clamping jaw 8 is a bent part, including a vertical plate connected to the linear actuator 6 and a horizontal plate connected to the upper end of the vertical plate. The vertical plate pushes against the positioning column 16, and the horizontal plate clamps the calibration tooling 9.

[0053] In some embodiments, see Figures 1 to 5As shown, the holding platform 11 is also provided with an adjusting seat 7, which is fixed to the holding platform 11 by adjusting bolts, and the adjusting seat 7 is provided with a long hole 5 that allows the adjusting seat 7 to move left and right; the linear actuator 6 is a cylinder, which is fixed on the adjusting seat 7.

[0054] In some embodiments, see Figures 1 to 3 As shown, the pin calibration device of the quartz resonator 20 also includes a base 3, a reversing solenoid valve 2 and a vacuum generator 1 arranged on the base 3, the reversing solenoid valve 2 is connected to the vacuum generator 1, and the linear actuator 6 and the adsorption hole 10 are connected to the reversing solenoid valve 2; wherein, support columns 12 are provided at the four corners of the base 3, and the holding platform 11 is connected to the support columns 12 by nuts.

[0055] The linear actuator is provided with a quick-connect connector 13 , which is connected to the reversing solenoid valve 2 via an air pipe.

[0056] In some embodiments, see Figures 1 to 3 As shown, a positioning plate 4 is provided on the base 3 , and a row of positioning holes is provided on the positioning plate 4 . The reversing solenoid valve 2 is fixed on the positioning plate 4 , and the position of the reversing solenoid valve 2 can be adjusted along the positioning plate 4 .

[0057] See also Figures 1 to 3 As shown, this device mainly consists of a holder 11, a cylinder, a cylinder adjustment seat 7, a clamping jaw 8, a positioning cam 14, a positioning column 16, a base 3, a vacuum generator 1, a reversing solenoid valve 2, a PLC, a touch screen, and a calibration fixture 9 for the positioning cam 14. Since the programming of the PLC and touch screen for controlling the solenoid valve is a common and simple program, it is not the inventive point of this invention and will not be described again. The cylinder model used in this device is MCFA-11-20-40M-K-RCE_2, the reversing solenoid valve 2 model is RSM2-DRDV-2B-T4, and the vacuum generator 1 model is VSQP-B1010-1. The cylinder, reversing solenoid valve 2, and vacuum generator 1 are common products on the market and can be replaced with other similar products according to actual conditions.

[0058] The calibration fixture 9 is a key component of the pin calibration accuracy of the present invention. The calibration value d plays a decisive role in whether the entire device can effectively adjust the resonator pin. Specifically, see Figures 1 to 5 、 Figure 9 and Figure 10As shown, the calibration fixture 9 comprises a rectangular substrate, which includes a base 91 and a straightening plate 92 mounted on the base. The distance between the straightening plate and the base is the calibration value d. The present invention uses two clamping jaws 8 to calibrate the pins of a quartz resonator 20. Because the pins have a certain degree of elasticity, an overshoot method is employed to mitigate the effects of pin rebound. Specifically, the clamping jaws 8 push the pins a certain distance beyond the center position. This amount can be precisely adjusted by adjusting the positioning cam 14 using a calibration tool. Different overshoot amounts require different calibration tools, but the overshoot remains constant across all products of the same model.

[0059] In some embodiments, see Figure 9 and Figure 10 As shown, the bottom of the base 91 is provided with a pin 93 that can be plugged into the adsorption hole 10.

[0060] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0061] See also Figures 1 to 10 As shown, the present invention provides two determination methods for determining the d value of the calibration tool 9, as follows:

[0062] In the first embodiment, a method for determining the calibration tool 9 includes:

[0063] Step 1: Place the shell of the quartz resonator 20 to be straightened on the holder 11 and use a protractor to adjust the angle of the pins of the quartz resonator 20 so that the pins of the quartz resonator 20 coincide with the 90° scale line of the protractor.

[0064] Step 2: Use tweezers to move the top of the pin to one side and measure the maximum angle θ at which the pin can rebound to a 90° position.

[0065] Step 3: Drag the clamping claw 8 to contact the pin of the quartz resonator 20, and measure the length h from the contact point to the root of the pin along the pin;

[0066] Step 4: Calculate the calibration value d according to the formula d = h·sinθ;

[0067] Step 5: According to the calibration value d, the calibration tool 9 can be manufactured.

[0068] Example 2, a method for determining the calibration tool 9, is as follows:

[0069] Step 1: disconnect the two air pipes of any cylinder and adsorb the quartz resonator 20 to be calibrated on the holder 11;

[0070] Step 2: Using a protractor and tweezers, adjust the pins to be perpendicular to the holder 11;

[0071] Step 3: Manually drag the cylinder clamp 8 to make it contact the pin of the quartz resonator 20, and mark the contact position on the pin;

[0072] Step 4: Restore the cylinder and place a ruler on the holder 11. At the same time, adjust the angle of the marked pin and the position of the ruler so that the pin coincides with any long scale line of the ruler.

[0073] Step 5: Use tweezers to move the top of the pin to one side and measure the maximum displacement of the pin mark when the pin bounces back to the position aligned with the scale line. This is the calibration value d.

[0074] Step six: make a calibration tool 9 according to the value d.

[0075] The critical dimension d is related to the material, diameter, and length of the pin. For the same type of quartz resonator 20 , the value of d only needs to be determined once.

[0076] Based on the same inventive concept, the present invention also provides a quartz resonator pin calibration method, based on the quartz resonator 20 pin calibration device, see Figures 1 to 10 As shown, the calibration method includes:

[0077] Calibration of the positioning cam 14;

[0078] For the same type of resonator, it is only necessary to calibrate the positioning cam 14 once before production. The specific calibration method is as follows:

[0079] Step 1: Disconnect the air circuits of the two clamping jaws 8 driving the cylinders, and manually move the clamping jaws 8 away from the center of the workpiece holding platform 11; adsorb the calibration tool 9 on the workpiece holding platform 11, and make the straightening surface of the straightening plate 92 face the positioning cam 14 to be calibrated;

[0080] Step 2: Loosen the top screw 15 and the nut on the eccentric shaft that fix the positioning cam 14, so that the positioning cam 14 can rotate around the eccentric shaft; here, the nut and the top screw 15 only need to be loosened and do not need to be removed;

[0081] Step 3: Adjust the air intake pressure to 0.1 MPa, start the cylinder on the side of the positioning cam 14 to be calibrated, and supply air to the cylinder of the corresponding clamping jaw 8, so that the clamping jaw 8 on this side moves to press against the straightening surface of the calibration tool;

[0082] Step 4: Rotate the positioning cam 14 to be calibrated and make the positioning column 16 fit against the clamping jaw 8;

[0083] Step 5: Lock the eccentric shaft, tighten the top screw 15, and fix the positioning cam 14 to determine the position of the positioning column 16;

[0084] Step 6: Flip the calibration fixture 9 so that the straightening surface of the straightening plate faces the positioning cam 14 on the other side, and repeat steps 1 to 5 above to calibrate the positioning cam 14 on the other side;

[0085] Calibration of the quartz resonator 20 pins;

[0086] Step 7: Remove the calibration tool 9 and adsorb the shell of the quartz resonator 20 to be calibrated into the adsorption hole, with the pins exposed;

[0087] In step eight, the air source is activated to make the clamping jaws 8 on both sides press against the positioning posts 16 on the same side simultaneously, or press against the positioning posts 16 on the same side in sequence, so that the clamping jaws 8 on both sides clamp the pins and calibrate the pins of the quartz resonator 20.

[0088] The operating signal instructions and action sequence of the calibration device for the quartz resonator 20 pin provided by the embodiment of the present invention are as follows:

[0089] Turn on the main switch (which can be integrated with the touch screen or PLC), connect the power, and power on the reversing solenoid valve 2 and the vacuum generator 1. The device is in standby mode, both cylinders are in the retracted state, and the workpiece holder 11 is not vacuumed. At this time, the rear position sensors of the two cylinders receive signals and activate the start button.

[0090] Place the quartz resonator 20 to be calibrated with its pins facing upwards into the adsorption hole of the holder 11, turn on the vacuum generator 1 to provide vacuum to the holder 11; press the start button, the reversing solenoid valve 2 will be activated, the cylinder clamp 8 on the left side will be extended, when the lower end of the clamp 8 presses against the positioning cam 14, the cylinder front position sensor will receive a signal, after this signal is fed back to the PLC, the PLC outputs an instruction, the solenoid valve performs a reversing action, and the cylinder retracts to the rear position; after the rear position sensor receives the signal, it is fed back to the PLC, the PLC outputs an instruction, the reversing solenoid valve 2 performs a reversing action, the right cylinder is extended, when the lower end of its clamp 8 presses against the positioning cam 14, the cylinder front position sensor receives a signal, after this signal is fed back to the PLC, the PLC outputs an instruction, the solenoid valve performs a reversing action, and the cylinder retracts to the rear position. At this time, the cylinder sensor receives a signal, the vacuum generator 1 switch is disconnected, and the product is taken out.

[0091] The above process is only a reference for circuit design and PLC programming. When using this device, you only need to perform the following simple operations: turn on the power - put in the product - click the run button - take out the product.

[0092] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A quartz resonator pin calibration device, characterized in that: include: A piece holding platform (11) having adsorption holes (10); A calibration tool (9) can be adsorbed on the holding platform (11); A clamping and straightening mechanism is provided on the holding platform (11) and is symmetrical to the left and right sides of the calibration fixture (9), comprising a linear actuator (6) and a clamping claw (8) connected to the linear actuator (6); and A positioning cam (14), the eccentric shaft of which is rotatably connected to the holder (11) and symmetrically located on the left and right sides of the calibration fixture (9); The clamping jaw (8) pushes the positioning cam (14) until the clamping jaw (8) abuts against the calibration fixture (9), thereby obtaining the straightened position of the pin of the quartz resonator (20); The positioning cam (14) is also provided with a top screw (15) parallel to the eccentric shaft and a positioning column (16) parallel to the eccentric shaft. The clamping jaw (8) is a bent part, comprising a vertical plate connected to the linear actuator (6) and a horizontal plate connected to the upper end of the vertical plate. The vertical plate abuts against the positioning column (16), and the horizontal plate clamps the calibration tool (9). The calibration tool (9) comprises a rectangular substrate, the rectangular substrate comprises a base (91) and a straightening plate (92) provided on the base (91), and the distance between the straightening plate (92) and the base (91) is a calibration value d; By starting the air source, the clamping jaws (8) on both sides can simultaneously press against the positioning posts (16) on the same side, or press against the positioning posts (16) on the same side in sequence, so that the clamping jaws (8) on both sides can clamp the pins, thereby achieving calibration of the pins of the quartz resonator (20).

2. The quartz resonator pin calibration device according to claim 1, wherein: A raised supporting platform (17) is provided in the middle of the holding platform (11), a raised adsorption platform (18) is provided in the middle of the supporting platform (17), a row of adsorption holes (10) are provided on the adsorption platform (18), and an air passage (19) communicating with the adsorption holes (10) is provided in the adsorption platform (18); the positioning cams (14) are four groups, symmetrically arranged on the left and right sides of the adsorption platform (18), and are rotatably connected to the supporting platform (17).

3. The quartz resonator pin calibration device according to claim 1, wherein: The piece holding platform (11) is also provided with an adjustment seat (7), which is fixed to the piece holding platform (11) by an adjustment bolt, and is provided with a long hole (5) that enables the adjustment seat (7) to move left and right; the linear actuator (6) is a cylinder, which is fixed to the adjustment seat (7).

4. The quartz resonator pin calibration device according to claim 1, wherein: The quartz resonator (20) pin calibration device further comprises a base (3), a reversing solenoid valve (2) and a vacuum generator (1) arranged on the base (3); the reversing solenoid valve (2) is connected to the vacuum generator (1); and the linear actuator (6) and the adsorption hole (10) are connected to the reversing solenoid valve (2).

5. The quartz resonator pin calibration device according to claim 4, characterized in that: The base (3) is provided with a position adjustment plate (4), the position adjustment plate (4) is provided with a row of position adjustment holes, and the reversing solenoid valve (2) is fixed on the position adjustment plate (4).

6. The quartz resonator pin calibration device according to claim 1, wherein: The bottom of the base (91) is provided with a pin (93) that can be plugged into the adsorption hole (10).

7. A method for determining a calibration tool, characterized in that: Based on the quartz resonator pin calibration device according to claim 1, the determination method includes: The tube shell of the quartz resonator (20) to be straightened is adsorbed on the holder (11), and the angle of the pin of the quartz resonator (20) is adjusted using a protractor so that the pin of the quartz resonator (20) coincides with the 90° scale line of the protractor; Use tweezers to move the top of the pin to one side and measure the maximum angle θ at which the pin can rebound to the 90° position. Drag the clamp (8) to contact the pin of the quartz resonator (20), and measure the length h from the contact point to the root of the pin along the pin; According to the formula d=h•sinθ, the calibration value d can be obtained; According to the calibration value d, the calibration tool (9) can be manufactured.

8. A method for calibrating a quartz resonator pin, characterized in that: Based on the quartz resonator pin calibration device according to any one of claims 1 to 6, the calibration method includes: Calibration of the positioning cam (14); Step 1: adsorb the calibration tool (9) onto the holder (11), and make the straightening surface of the straightening plate (92) face the positioning cam (14) to be calibrated; Step 2: loosen the top screw (15) that fixes the positioning cam (14) so ​​that the positioning cam (14) can rotate around the eccentric shaft; Step 3: Start the cylinder on the side of the positioning cam (14) to be calibrated so that the clamping jaw (8) on that side presses against the straightening surface of the calibration tool; Step 4: Rotate the positioning cam (14) to be calibrated and make the positioning column (16) and the clamping jaw (8) stick together; Step 5: Lock the eccentric shaft, tighten the top screw (15), and fix the positioning cam (14) to determine the position of the positioning column (16); Step 6: Flip the calibration fixture (9) so that the straightening surface of the straightening plate (92) faces the positioning cam (14) on the other side, and repeat the above steps to calibrate the positioning cam (14) on the other side; Calibration of the pins of the quartz resonator (20); Step 7: Remove the calibration tool (9), and adsorb the shell of the quartz resonator (20) to be calibrated into the adsorption hole, with the pins exposed; Step eight, start the air source, so that the clamping jaws (8) on both sides simultaneously press against the positioning posts (16) on the same side, or press against the positioning posts (16) on the same side in sequence, so that the clamping jaws (8) on both sides clamp the pins, thereby achieving calibration of the pins of the quartz resonator (20).

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