Low melting point metal thin film coating apparatus and method

Abstract

The application provides a low-melting-point metal film coating device and method. The low-melting-point metal film coating device comprises a storage device provided with a storage cavity for placing low-melting-point metal; a heating device for heating and melting the low-melting-point metal in the storage cavity into liquid metal; a coating device for vibrating in a horizontal direction to coat the liquid metal on the surface of a workpiece and vibrating in a vertical direction to make the liquid metal wet and combine with the workpiece to form a metal film; a conveying device for conveying the liquid metal in the storage cavity to the coating device; and an ultrasonic pressure welding device for pressing the metal film on the workpiece and vibrating in the horizontal direction to rub on the surface of the workpiece to weld the metal film with the workpiece. In the application, the metal film can be uniformly coated on the surface of the workpiece and reliably connected with the workpiece, high sealing property and high conductivity of the coated film can be realized, and the product demand can be met.

Description

Technical Field

[0001] This invention relates to a low-melting-point metal thin film coating equipment and method. Background Technology

[0002] To meet the demands of vacuum metal sealing products and the fabrication of fine conductive circuits, a low-cost coating device with a simple fabrication process, a thickness in the micrometer range, and a width in the micrometer to centimeter range is needed. Traditional metal thin film coating technologies generally fall into two categories: the first involves screen printing followed by heat treatment or low-temperature curing, but this technology suffers from high costs and difficulties in raw material pretreatment, as well as the low environmental friendliness of the solvents. The second technology utilizes the hot-melt extrusion and self-flowing technique of metal wires or sheets, but this technique suffers from poor bonding due to poor wettability between low-melting-point metals and the workpiece, the use of additives affecting the properties of low-melting-point metals, or the increased complexity of the process due to the vacuum environment. Summary of the Invention

[0003] One of the objectives of this invention is to overcome at least one deficiency in the prior art and to provide a low-melting-point metal thin film coating device and method.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0005] According to a first aspect of the present invention, a low-melting-point metal thin film coating apparatus is provided. The low-melting-point metal thin film coating apparatus includes:

[0006] The storage device is provided with a storage cavity for storing low-melting-point metals;

[0007] A heating device is used to heat and melt the low-melting-point metal in the storage chamber into a liquid metal;

[0008] A coating device is used to apply liquid metal to the surface of a workpiece by vibrating horizontally and by vibrating vertically to wet and bond the liquid metal with the workpiece to form a metal film.

[0009] A conveying device for conveying the liquid metal in the storage chamber to the coating device;

[0010] An ultrasonic pressure welding device is used to press a metal film onto a workpiece and vibrate it horizontally to rub the workpiece surface so that the metal film is welded to the workpiece.

[0011] Optionally, the coating device has a built-in porous material vibrating block; the top of the porous material vibrating block is an ultrasonic transducer, and the bottom is a first porous material block; an eccentric vibrator is provided on one side of the coating device;

[0012] The eccentric vibrator is configured to drive the coating device to vibrate in the horizontal direction, thereby coating the liquid metal flowing out of the first porous material block onto the workpiece.

[0013] The ultrasonic transducer is configured to vibrate vertically with the first porous material block, causing the liquid metal flowing out of the first porous material block to wet and bond with the workpiece, thereby forming a bonding layer.

[0014] Optionally, the coating device has a second porous material block built in; the second porous material block and the porous material vibrating block are arranged side by side and spaced apart in the horizontal direction; the internal pore diameter of the second porous material block is arranged to increase in a gradient from bottom to top in the vertical direction;

[0015] The eccentric vibrator is configured to drive the coating device to vibrate in the horizontal direction, thereby coating the second porous material block with a bonding layer to form a metal film.

[0016] The second porous material block operates under normal pressure.

[0017] Optionally, the first porous material block is a porous metal or ceramic block;

[0018] The second porous material block is a porous metal or ceramic block.

[0019] Optionally, the ultrasonic pressure welding device is fixedly connected to the storage device and is arranged side by side and spaced apart from the coating device in the horizontal direction;

[0020] The ultrasonic pressure welding device contains, from top to bottom, a third pressure sensor, a buffer pad, a heat insulation sheet, a permanent magnet, a DC electromagnet, an ultrasonic transducer, and a vibration block.

[0021] The DC electromagnet is configured to generate a repulsive force with the permanent magnet, causing the vibrating block to press down on the workpiece.

[0022] The ultrasonic transducer is configured to vibrate in a horizontal direction and rub against the surface of the workpiece to weld the metal film to the workpiece.

[0023] Optionally, the conveying device includes a conveying pump; the orifice of the conveying pump is smaller than the critical size at which liquid metal can flow by gravity, and is used to prevent the liquid metal from flowing in the conveying pump under the action of gravity;

[0024] The delivery pump is equipped with an inlet, a filter, a piezoelectric pump, and a Tesla valve; the delivery pump is connected to the storage chamber through the inlet;

[0025] The piezoelectric pump is configured to change the volume of the delivery pump chamber by ultrasonic transducer vibration, thereby allowing liquid metal in the storage chamber to enter the delivery pump through the inlet and be delivered to the application device through the filter and the Tesla valve.

[0026] Optionally, it also includes:

[0027] A second temperature sensor, disposed on the storage device, is used to detect the temperature of the liquid metal within the storage chamber; and / or,

[0028] A first pressure sensor, built into the application device, is used to detect the pressure value of the liquid metal within the application device; and / or,

[0029] A second pressure sensor, disposed on the lower surface of the coating device, is used to detect the pressure value of the coating device on the workpiece surface; and / or,

[0030] A fourth pressure sensor, disposed at or near the top of the storage cavity, is used to detect the pressure value of the liquid metal at a predetermined height within the storage cavity to determine the remaining amount of liquid metal in the storage cavity; and / or,

[0031] A heat transfer oil heating circulation pipeline, which is installed on the application device, is used to control the operating temperature of the application device; and / or,

[0032] A protective gas delivery pipe is used to deliver protective gas between the coating device and the workpiece to prevent oxidation of the metal film or to cool and solidify the metal film.

[0033] Optionally, the heating device is provided with a heat-conducting oil cavity for holding heat-conducting oil; the heating device is provided with a heater for heating the heat-conducting oil in the heat-conducting oil cavity and a first temperature sensor for detecting the temperature of the heat-conducting oil in the heat-conducting oil cavity; the heat-conducting oil cavity is respectively connected to two external heat-conducting oil circulation ports for connecting external heat dissipation devices to regulate the temperature in the heat-conducting oil cavity; and / or,

[0034] The storage device includes a storage shell that encloses the storage cavity; the storage shell has a feeding port, a vent, and an exhaust port that are provided through it; the feeding port is connected to the storage cavity and is used to feed low-melting-point metal into the storage cavity; the storage shell is detachably connected to a sealing cover for closing or opening the feeding port; the vent is connected to the storage cavity and is used to introduce protective gas; the exhaust port is connected to the storage cavity and is used to discharge protective gas or water vapor and impurity gases generated during the melting of low-melting-point metal.

[0035] According to a second aspect of the present invention, a method for coating a low-melting-point metal thin film is provided. The method for coating a low-melting-point metal thin film includes:

[0036] Provide the above-mentioned low melting point metal thin film coating equipment; turn on the heating device to heat the temperature inside the storage chamber of the storage device to the set temperature, and dry the moisture inside the storage chamber; put the low melting point metal into the storage chamber, and heat the low melting point metal to melt it into liquid metal and reach the set temperature;

[0037] Turn on the conveying device to deliver the liquid metal to the coating device; when the liquid metal flows out of the lower surface of the coating device, turn off the conveying device; set the operating data values ​​of the coating equipment;

[0038] Move the coating equipment to the set working position above the workpiece, so that the coating device is close to the workpiece; adjust the height of the coating device so that the coating device and the workpiece achieve the set fit.

[0039] The traveling device is activated to move the coating equipment horizontally, and the conveying device is activated. The coating device is activated to vibrate horizontally to apply liquid metal to the workpiece surface, and vibrates vertically to wet and bond the liquid metal with the workpiece to form a metal film.

[0040] Turn on the ultrasonic pressure welding device, press the metal film down onto the workpiece, and vibrate it in the horizontal direction to rub against the surface of the workpiece so that the metal film is welded to the workpiece.

[0041] Optionally, the coating device has a built-in porous material vibrating block and a second porous material block; the top of the porous material vibrating block is an ultrasonic transducer, and the bottom is a first porous material block; the second porous material block and the porous material vibrating block are arranged side by side and spaced apart in the horizontal direction, and the second porous material block operates at normal pressure; an eccentric vibrator is provided on one side of the coating device;

[0042] The aforementioned opening of the coating device, causing it to vibrate horizontally to coat the liquid metal onto the workpiece surface, and vibrating vertically to wet and bond the liquid metal with the workpiece to form a metal film, includes:

[0043] Turn on the eccentric vibrator to drive the coating device to vibrate in the horizontal direction, and apply the liquid metal flowing out of the first porous material block to the workpiece; the ultrasonic transducer of the porous material vibrating block vibrates in the vertical direction with the first porous material block, so that the liquid metal flowing out of the first porous material block wets and combines with the workpiece to form a bonding layer.

[0044] An eccentric vibrator drives the coating device to vibrate in the horizontal direction, thereby coating the second porous material block with a bonding layer to form a metal film.

[0045] Unlike existing technologies, the low-melting-point metal thin film coating equipment and method provided by this invention uses a coating device to uniformly coat liquid metal onto the workpiece surface and reliably wet and bond the liquid metal to the workpiece to form a metal thin film. An ultrasonic welding device rubs the workpiece surface to securely weld the metal thin film to the workpiece. The metal thin film production process is simple and cost-effective. The metal thin film can be uniformly coated onto the workpiece surface and reliably bonded to it, achieving high sealing and high conductivity, thus meeting product requirements.

[0046] The low-melting-point metal thin film coating equipment and method can adjust the operating data values ​​of the coating equipment to achieve automatic coating of metal thin films, with a high degree of automation and high production efficiency.

[0047] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0048] Figure 1 This is a simplified cross-sectional view of a low-melting-point metal thin film coating apparatus provided in one embodiment of the present invention.

[0049] in:

[0050] 1- Heat transfer oil;

[0051] 2- First temperature sensor;

[0052] 3- Storage casing;

[0053] 4-Ventilation port;

[0054] 5-Exhaust port;

[0055] 6-Feeding port;

[0056] 7- Piezoelectric pump;

[0057] 8- Filter elements;

[0058] 9-Porous material vibrating block;

[0059] 10 - Second pressure sensor;

[0060] 11- Eccentric vibrator;

[0061] 12-Ultrasonic transducer;

[0062] 13- First pressure sensor;

[0063] 14- Second temperature sensor;

[0064] 15- Heater;

[0065] 16 - Fourth pressure sensor;

[0066] 17-Tesla valve;

[0067] 18-Vibrating block;

[0068] 19-Insulation sheet;

[0069] 20- Cushioning pad;

[0070] 21-Third pressure sensor;

[0071] 24- Imported;

[0072] 25 - Workpiece;

[0073] 26 - External circulation port for heat transfer oil;

[0074] 27 - External circulation port for heat transfer oil;

[0075] 30 - Heat-conducting oil cavity;

[0076] 31-Sealing cap;

[0077] 37- Tesla valve;

[0078] 38- Apply coating to the casing;

[0079] 39- Second porous material block;

[0080] 40 - Heat transfer oil heating circulation pipeline;

[0081] 41- Protect the gas delivery pipe;

[0082] 42-Permanent magnet;

[0083] 43-DC electromagnet. Detailed Implementation

[0084] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0085] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0086] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0087] It should be noted that the directional terms such as "upper," "lower," "left," and "right" described in the embodiments of this application are used to describe the angles shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when it is mentioned that an element is connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected to the other element "upper" or "lower" through an intermediate element.

[0088] According to a first embodiment of the present invention, a low-melting-point metal thin film coating apparatus is provided. This low-melting-point metal thin film coating apparatus is used to coat a metal thin film onto a workpiece.

[0089] Please see Figure 1 The low-melting-point metal thin-film coating equipment includes a storage device, a heating device, a coating device, a conveying device, and an ultrasonic pressure welding device. The storage device has a storage chamber for holding the low-melting-point metal. The heating device is configured to heat and melt the low-melting-point metal in the storage chamber into a liquid state.

[0090] The coating device is configured to vibrate in the horizontal direction to coat the liquid metal onto the surface of the workpiece 25, and to vibrate in the vertical direction to wet and bond the liquid metal with the workpiece 25 to form a metal film.

[0091] The conveying device is configured to deliver liquid metal from the storage chamber to the coating device.

[0092] The ultrasonic pressure welding device is configured to press a metal film onto the workpiece 25 and vibrate it in the horizontal direction to rub the surface of the workpiece 25 so that the metal film is welded to the workpiece 25.

[0093] The coating device in this embodiment can uniformly coat liquid metal onto the surface of workpiece 25 and reliably wet and bond the liquid metal to workpiece 25 to form a metal film. The ultrasonic welding device can rub the surface of workpiece 25 to reliably weld the metal film to workpiece 25. The metal film production process is simple and the production cost is low. The metal film can be uniformly coated on the surface of workpiece 25 and reliably connected to workpiece 25, achieving high sealing and high conductivity, thus meeting product requirements.

[0094] The specific structure of the heating and storage devices can be set as needed, and the application does not limit the structure.

[0095] In this embodiment, please refer to Figure 1 The heating device may include a heat transfer oil housing, which surrounds a heat transfer oil cavity 30. The heat transfer oil housing may be made of aluminum. The inner wall of the heat transfer oil cavity 30 is coated with polytetrafluoroethylene, and the heat transfer oil cavity 30 is used to hold the heat transfer oil 1.

[0096] The heating device may include a heater 15 and a first temperature sensor 2. The heater 15 is configured to heat the heat transfer oil 1 within the heat transfer oil cavity 30. For example, the heater 15 may be a resistance heating wire with a rated power of 1000W to 3000W. For example, the heater 15 may be fixedly installed within the heat transfer oil cavity 30.

[0097] The heat transfer oil cavity 30 can be connected to two external heat transfer oil circulation ports 26 and 27. These ports are used to connect external heat dissipation devices to regulate the temperature inside the heat transfer oil cavity 30. In particular, when the low-melting-point metal thin-film coating equipment operates in a vacuum environment, the heat transfer oil cavity 30 can achieve temperature control through the external heat dissipation devices connected to the two external heat transfer oil circulation ports 26 and 27.

[0098] The first temperature sensor 2 is configured to detect the temperature of the heat transfer oil within the heat transfer oil cavity 30, thereby providing temperature control data. For example, the range of the first temperature sensor 2 can be set to -30 degrees to 300 degrees. For example, the first temperature sensor 2 can be fixedly mounted on the inner wall of the heat transfer oil cavity 30.

[0099] The storage device may include a storage housing 3. The storage housing 3 encloses a storage cavity. The storage housing 3 may be made of stainless steel. The inner wall of the storage housing 3 may be coated with a polytetrafluoroethylene coating.

[0100] The storage shell 3 is provided with a feeding port 6, a vent 4, and an exhaust port 5. The feeding port 6 is connected to the storage cavity and is used to feed low-melting-point metal into the storage cavity. The feeding port 6 can be a round hole, for example, the diameter of the feeding port 6 can be 60mm.

[0101] The storage housing 3 is detachably connected to a sealing cover 31. The feeding port 6 can be closed or opened by connecting and disconnecting the sealing cover 31 from the storage housing 3. When the sealing cover 31 is connected to the storage housing 3, the feeding port 6 is closed. When the sealing cover 31 is disconnected from the storage housing 3, the feeding port 6 is opened. For example, the sealing cover 31 can be threaded onto the storage housing 3, or the sealing cover 31 can be screwed onto the storage housing 3 to achieve a threaded connection between the two.

[0102] Vent 4 is connected to the storage chamber and is used to introduce a protective gas that can prevent oxidation of the metal during heating or balance the gas pressure inside the storage chamber. The protective gas can be argon; or a mixture of 98% nitrogen and 2% hydrogen. The gas flow rate can be set to 1 ml / min.

[0103] The exhaust port 5 is connected to the storage chamber and is used to discharge protective gas or water vapor and impurity gas when the melting point metal is molten.

[0104] The coating device should be designed to apply liquid metal to the workpiece surface by vibrating horizontally and to wet and bond the liquid metal to the workpiece by vibrating vertically.

[0105] In this embodiment, please refer to Figure 1 The application device may include an application housing 38, which forms a cavity. The inner wall of the cavity of the application housing 38 is coated with a polytetrafluoroethylene coating.

[0106] The coating device incorporates a porous material vibrating block 9. The porous material vibrating block 9 is housed within the coating housing 18. The top of the porous material vibrating block 9 features an ultrasonic transducer, and the bottom features a first porous material block. The ultrasonic transducer at the top and the first porous material block at the bottom are connected to each other. When the ultrasonic transducer of the porous material vibrating block 9 is activated, it drives the first porous material block to vibrate. The frequency of the ultrasonic transducer of the porous material vibrating block 9 can be set to 15-28 kHz, and the amplitude can be set to 10-25 micrometers.

[0107] The first porous material block can be a porous metal block or a porous ceramic block. The first porous material block can be set as a closed pore type, and its pore diameter can be set to 1 micrometer-10 micrometers. Specifically, the first porous material block can be made into micropores on the side and bottom surface of the block by laser drilling. It can adopt a multi-micropore method, and the diameter, number and arrangement of the micropores can be specifically designed and determined according to the coating properties requirements.

[0108] An eccentric vibrator 11 is provided on one side of the coating device. When the eccentric vibrator 11 is turned on, it can drive the coating device to vibrate in the horizontal direction, thereby coating the liquid metal flowing out of the first porous material block onto the workpiece 25.

[0109] When the ultrasonic transducer of the porous material vibrating block 9 is turned on, it can vibrate together with the first porous material block in the vertical direction, so that the liquid metal flowing out of the first porous material block can effectively wet and bond with the workpiece 25. The metal atoms can penetrate into the surface of the workpiece 25 and bond with the surface atoms of the workpiece 25, thereby forming a bonding layer.

[0110] More preferably, please refer to Figure 1The coating device may include a second porous material block 39. The second porous material block 39 and the porous material vibrating block 9 are arranged side-by-side and spaced apart in the horizontal direction, and the second porous material block 39 operates at atmospheric pressure. Under atmospheric pressure, the second porous material block 39 is in a pre-adsorbed saturated state of liquid metal. For example, the second porous material and the porous material vibrating block 9 may be separated in the horizontal direction by a portion of the coating housing 38, the structure of which partially isolates them.

[0111] The second porous material block 39 can be made of porous metal or ceramic. The second porous material block 39 can be configured as a closed-pore type, with a pore size specifically set to 1 micrometer to 500 micrometers. The internal pore size of the second porous material block 39 increases in a gradient from bottom to top along the vertical direction. More specifically, the second porous material block 39 can be divided into multiple layers. The pore size of each layer of the second porous material block 39 increases by 30% to increase the capillary adsorption capacity and volume of the second porous material block 39. The second porous material block 39 is in a pre-adsorption saturated state of liquid metal, and can form a liquid metal brush through capillary adsorption.

[0112] The eccentric vibrator 11 drives the coating device to vibrate in the horizontal direction, thereby coating the second porous material block 39 with a bonding layer to form a metal film. In this way, the second porous material block 39 can be coated with a bonding layer to form a uniform metal film.

[0113] In this embodiment, please refer to Figure 1 The ultrasonic pressure welding device can be fixedly connected to the storage device. The ultrasonic pressure welding device and the coating device are arranged side by side and spaced apart in the horizontal direction. More specifically, the porous material vibrating block 9, the second porous material block 39, and the ultrasonic pressure welding device are arranged side by side and spaced apart in the horizontal direction, and the second porous material block 39 operates at normal pressure.

[0114] The ultrasonic pressure welding device can be installed vertically from top to bottom as follows: a third pressure sensor 21, a buffer pad 20, a heat insulation sheet 19, a permanent magnet 42, a DC electromagnet 43, an ultrasonic transducer 12, and a vibration block 18.

[0115] The ultrasonic transducer 12 is structured to vibrate horizontally, thereby rubbing against the surface of the workpiece 25 to weld the metal film to the workpiece 25. The vibrating block 18 may be made of stainless steel with a polytetrafluoroethylene coating. For example, the frequency of the ultrasonic transducer 12 may be set to 15 kHz-25 kHz, and the amplitude may be set to 10 micrometers-25 micrometers.

[0116] The DC electromagnet 43 is structured to generate a repulsive force, causing the vibrating block 18 to press down on the workpiece 25. The pressure exerted by the vibrating block 18 on the workpiece 25 can be adjusted by regulating the repulsive force generated by the current in the DC electromagnet 43. A third pressure sensor 21 is configured to detect the pressure value of the vibrating block 18 pressing down on the workpiece 25. Based on the feedback from the detected pressure value by the third pressure sensor 21, the pressure exerted by the vibrating block 18 on the workpiece 25 can be controlled and adjusted.

[0117] The ultrasonic transducer 12 is structured to vibrate in the horizontal direction, thereby rubbing against the surface of the workpiece 25 to weld the metal film to the workpiece 25. Thus, the vibration of the ultrasonic transducer 12 enables further welding of liquid metal to the workpiece 25, improving the adhesion and density of the metal film, achieving high sealing and high conductivity of the coating, and meeting product requirements.

[0118] In this embodiment, please refer to Figure 1 The conveying device may include a conveying pump. The conveying pump may be designed with a small orifice size. The orifice size of the conveying pump may be set to be smaller than the critical size at which the liquid metal can flow under gravity, in order to prevent the liquid metal from flowing within the conveying pump under gravity. The conveying pump may be equipped with an inlet 24, a filter 8, a piezoelectric pump 7, and Tesla valves 17 and 37. The conveying pump is connected to the storage chamber through inlet 24.

[0119] The inlet 24 can be located on one side of the horizontal direction on the upper surface of the heat transfer oil cavity 30. The filter element 8 can be made of porous metal or porous ceramic material. The filter element 8 can be of the open pore type, and its pore size can be set to 1 micrometer-5 micrometers.

[0120] The piezoelectric pump 7 includes an ultrasonic transducer. The piezoelectric pump 7 is configured to change the volume of the delivery pump chamber through the vibration of its ultrasonic transducer, so that the liquid metal in the storage chamber enters the delivery pump through the inlet 24 and is delivered to the coating device through the filter element 8 and Tesla valves 17 and 37 of the delivery pump.

[0121] In one optional example, the frequency of the piezoelectric pump 7 can be set to 0kHz-30kHz, continuously adjustable. Alternatively, the piezoelectric pump 7 can also be configured with a fixed frequency and a continuously adjustable operating voltage of 0-240V. This configuration can meet the different flow rate requirements of the delivery pump. By using additional power for transport, the delivery device can achieve precise control of flow rate and pressure.

[0122] A first Tesla valve 17 and a second Tesla valve 37 can be respectively installed on both sides of the piezoelectric pump 7 on the transfer pump. The inner diameter of Tesla valves 17 and 37 can be set to 0.5mm-3mm, preferably 0.5mm. Tesla valves 17 and 37 can be made of stainless steel, with their inner and outer walls coated with Teflon. Tesla valves 17 and 37 are approximately unidirectional, requiring no moving parts such as valve switches, resulting in a simple structure and stable operation. The combination of Tesla valves 17 and 37 with piezoelectric pump 7 can achieve controllable unidirectional transport of liquid metal by pressure and flow. The specific structure of Tesla valves 17 and 37 can be manufactured using existing technology and will not be described in detail here.

[0123] In this embodiment, please refer to Figure 1 The low-melting-point metal thin film coating equipment may also include a second temperature sensor 14. The second temperature sensor 14 is disposed on the storage device and is used to detect the temperature of the liquid metal in the storage chamber of the storage device.

[0124] The low-melting-point metal thin film coating equipment may also include a first pressure sensor 13. The first pressure sensor 13 is built into the coating device and is used to detect the pressure value of the liquid metal within the coating device. The first pressure sensor 13 can be electrically connected to a piezoelectric pump 7. The piezoelectric pump 7 can adjust its frequency in real time based on the liquid metal pressure value detected by the first pressure sensor 13 to stabilize the liquid metal pressure within the coating device.

[0125] The low-melting-point metal thin film coating equipment may also include a second pressure sensor 10. The second pressure sensor 10 is disposed on the lower surface of the coating device and is used to detect the pressure value of the coating device on the surface of the workpiece 25. Based on the pressure value detected by the second pressure sensor 10, the downward pressure of the coating device can be controlled, making the adhesion force between the coating device and the surface of the workpiece 25 adjustable, thereby controlling and adjusting the adhesion degree between the metal thin film and the surface of the workpiece 25 to obtain the optimal adhesion.

[0126] The low-melting-point metal thin-film coating equipment may also include a fourth pressure sensor 16. The fourth pressure sensor 16 is located at or near the top of the storage chamber and is used to detect the liquid metal pressure at a set height position within the storage chamber to determine the remaining liquid metal value in the storage chamber. When the liquid metal pressure detected by the fourth pressure sensor 16 is zero or less than a set value, it can be determined that the remaining liquid metal value in the storage chamber is less than the set value.

[0127] The low-melting-point metal thin film coating equipment may also include a heat transfer oil heating circulation pipeline 40. The heat transfer oil heating circulation pipeline 40 is installed on the coating device and is used to control the operating temperature of the coating device.

[0128] The low-melting-point metal thin film coating equipment may also include a protective gas supply pipe 41. The protective gas supply pipe 41 is used to deliver protective gas between the coating device and the workpiece 25 to prevent oxidation of the metal film or to cool and solidify the metal film. For example, by delivering protective gas between the coating device and the workpiece 25 through the protective gas supply pipe 41, the temperature of the metal film can be maintained at 50%-70% of its melting point temperature.

[0129] Based on the same inventive concept, the present invention also provides a second embodiment. According to the second embodiment of the present invention, a method for coating a low-melting-point metal thin film is provided. See also... Figure 1 The low-melting-point metal thin film coating method includes the following steps:

[0130] Step 1: Provide the low melting point metal thin film coating equipment of the first embodiment; turn on the heating device to heat the temperature inside the storage chamber of the storage device to the set temperature and dry the moisture inside the storage chamber; put the low melting point metal into the storage chamber, and heat the low melting point metal to melt it into liquid metal and reach the set temperature.

[0131] Specifically, the heating device may have a built-in heating wire. The heating device contains heat-conducting oil 1. When the heating wire operates, the temperature of the heat-conducting oil 1 in the heating device rises to 10 degrees Celsius above the melting point of the low-melting-point metal, thereby heating the storage chamber of the storage device and drying the moisture inside. The drying temperature can be set to no less than 120 degrees Celsius, and the drying time can be set to 15 minutes. The temperature inside the storage device / heating device can be detected by both a first temperature sensor 2 and a second temperature sensor 14, with the lower value being the standard. The first temperature sensor 2 and the second temperature sensor 14 can be connected to a control center, which can control the operation of the heating wire based on the temperature data detected by the first temperature sensor 2 and the second temperature sensor 14.

[0132] During the process of placing the low-melting-point metal into the storage chamber, the sealing cover 31 can be opened, and the low-melting-point metal block can be placed into the storage chamber of the storage device through the feeding port 6; then the sealing cover 31 is placed on the feeding port 6 of the storage shell 3; the vent 4 is opened to allow protective gas to pass through and enter the storage chamber of the storage device, and the protective gas is discharged through the exhaust port 5. The protective gas flow rate can be specifically set to 1 ml / min to avoid oxidation during the metal heating process. The low-melting-point metal is heated until it is completely melted and reaches the set temperature.

[0133] Step 2: Turn on the conveying device to transport the liquid metal to the coating device; when the liquid metal flows out from the lower surface of the coating device, turn off the conveying device; set the operating data values ​​of the low melting point metal film coating equipment.

[0134] In detail, the piezoelectric pump 7 is turned on, and the liquid metal flows through the inlet 24 of the transfer pump, through the filter element 8 and Tesla valves 17 and 37, and is injected into the porous material vibrating block 9 of the coating device, until the liquid metal flows out from the lower surface of the first porous material block. Then the piezoelectric pump 7 is stopped, and the low melting point metal thin film coating equipment enters the standby state.

[0135] The operating data values ​​of the low-melting-point metal thin film coating equipment are set according to actual needs. Specifically, the heating wire is controlled to operate based on the temperature values ​​detected by the first temperature sensor 2 and / or the second temperature sensor 14, thereby setting the temperature of the heat transfer oil 1 in the heating device. The piezoelectric pump 7 can operate accordingly based on the data value of the first pressure sensor 13 to control and set the pressure value of the liquid metal in the coating device. The frequency value of the ultrasonic transducer 12 of the ultrasonic pressure welding device can be set. The pressure value of the pressure sensor of the ultrasonic pressure welding device can be set. The traveling device can drive the coating equipment to move horizontally. The traveling speed value of the low-melting-point metal thin film coating equipment can be set.

[0136] Step 3: Move the low melting point metal film coating equipment to the set working position above the workpiece 25, so that the coating device is close to the workpiece 25; adjust the height position of the coating device so that the coating device and the workpiece 25 achieve the set adhesion degree.

[0137] In detail, the low melting point metal film coating equipment is moved to the set working position above the workpiece 25 and the coating device is brought close to the workpiece 25. The second pressure sensor 10 feeds back the pressure value to the control center. The control center can adjust the height position of the coating device in real time so that the coating device and the workpiece 25 achieve the set degree of contact.

[0138] Step 4: Open the walking device to drive the low melting point metal film coating equipment to move horizontally, open the conveying device; open the coating device to make the coating device vibrate in the horizontal direction to apply liquid metal to the surface of workpiece 25, and vibrate in the vertical direction to make the liquid metal wet and bond with workpiece 25 to form a metal film.

[0139] In detail, the traveling device drives the coating equipment, and the piezoelectric pump 7 starts at a preset frequency. After the conveying device is turned on, the flow rate of liquid metal in the coating device can be controlled according to the speed of the traveling device, the required amount of metal film to be coated, and the pressure value of the liquid metal in the coating device. More specifically, based on the amount of metal film to be coated, the traveling speed of the coating equipment, and the liquid metal pressure value monitored by the first pressure sensor 13, the control center adjusts the operating frequency of the piezoelectric pump 7 in real time to accurately control the real-time flow rate of liquid metal in the coating device.

[0140] Step 5: Turn on the ultrasonic pressure welding device, press the metal film down onto the workpiece 25, and vibrate it in the horizontal direction to rub against the surface of the workpiece 25 so that the metal film is welded to the workpiece 25.

[0141] In detail, when the ultrasonic pressure welding device is turned on, the DC electromagnet 43 generates an anisotropic magnetic field adjacent to the permanent magnet 42. The repulsive force of the magnetic field causes the vibrating block 18 to exert downward pressure on the surface of the metal film and the workpiece 25. Based on the pressure value monitored by the third pressure sensor 21, the control center adjusts the current intensity of the DC electromagnet 43 in real time to ensure that the vibrating block 18 applies stable pressure to the surface of the metal film and the workpiece 25. The ultrasonic transducer 12 operates, generating mechanical energy that is transferred to the vibrating block 18, causing the vibrating block 18 to vibrate in the horizontal direction. Under the pressure of the vibrating block 18 on the workpiece 25, the metal film rubs against the surface of the workpiece 25, achieving interlayer fusion of molecules to form a dense metal film with strong adhesion. The protective gas supply pipe 41 is activated simultaneously to protect the metal film and prevent oxidation when the metal film is at a high temperature.

[0142] In this embodiment, the remaining amount of liquid metal in the storage chamber of the storage device is monitored by the fourth pressure sensor 16. When the fourth pressure sensor 16 detects that the remaining amount of liquid metal in the storage chamber of the storage device is insufficient, metal raw materials are added, for example, all or part of the method in step one can be repeated.

[0143] In this embodiment, the coating device incorporates a porous material vibrating block 9 and a second porous material block 39. The top of the porous material vibrating block 9 is an ultrasonic transducer, and the bottom is a first porous material block. The second porous material block 39 is arranged side-by-side and spaced apart from the porous material vibrating block 9 in the horizontal direction, and the second porous material block 39 operates at normal pressure. An eccentric vibrator 11 is provided on one side of the coating device.

[0144] The aforementioned opening of the coating device, which vibrates horizontally to coat the liquid metal onto the surface of the workpiece 25, and vibrates vertically to wet and bond the liquid metal with the workpiece 25 to form a metal film, may specifically include the following steps:

[0145] Turn on the eccentric vibrator 11 to drive the coating device to vibrate in the horizontal direction, coating the liquid metal flowing out of the first porous material block onto the workpiece 25. The ultrasonic transducer of the porous material vibrating block 9 vibrates in the vertical direction with the first porous material block, causing the liquid metal flowing out of the first porous material block to wet and bond with the workpiece 25, thereby forming a bonding layer.

[0146] In detail, the eccentric vibrator 11 operates by horizontally reciprocating to coat the liquid metal flowing from the first porous material block onto the workpiece 25. The ultrasonic transducer of the porous material vibrating block 9 operates, and the ultrasonic transducer of the porous material vibrating block 9 and the first porous material block vibrate in a vertical direction, causing the liquid metal on the surface of the workpiece 25 to vibrate vertically. This generates a cavitation effect within the liquid metal, and the resulting impact force allows the liquid metal to penetrate into the workpiece 25 at a level of tens of nanometers. The instantaneous high temperature allows the liquid metal atoms to partially bond with the atoms on the surface of the workpiece 25, wetting the workpiece 25 and forming a bonding layer on its surface. During the movement of the coating equipment, the eccentric vibrator 11 continuously coats the liquid metal flowing from the first porous material block onto the workpiece 25 through horizontal reciprocating vibration, thereby forming a continuous and uniform bonding layer on the surface of the workpiece 25.

[0147] An eccentric vibrator 11 drives the coating device to vibrate in the horizontal direction, thereby coating the second porous material block 39 with a bonding layer to form a metal film.

[0148] In detail, the second porous material block 39 is in a state of liquid metal adsorption saturation, and a liquid metal brush is formed by capillary adsorption. During the movement of the coating equipment, the eccentric vibrator 11 drives the coating device to vibrate back and forth in the horizontal direction, so that the second porous material block 39 is continuously coated with the bonding layer to form a metal film, thereby achieving a uniform metal film.

[0149] In this invention, the coating device uniformly coats liquid metal onto the workpiece surface, ensuring a secure wetting and bonding between the liquid metal and the workpiece to form a metal film. The ultrasonic welding device rubs the workpiece surface to firmly weld the metal film to the workpiece. The metal film production process is simple and cost-effective. The metal film can be uniformly coated onto the workpiece surface and reliably bonded to it, achieving high sealing and high conductivity, thus meeting product requirements.

[0150] The low-melting-point metal thin film coating equipment and method can adjust the operating data values ​​of the coating equipment to achieve automatic coating of metal thin films, with a high degree of automation and high production efficiency.

[0151] The above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions or improvements within the spirit of the present invention are covered within the scope of the claims of the present invention.

Claims

1. A low-melting-point metal thin film coating equipment, characterized in that, include: The storage device is provided with a storage cavity for storing low-melting-point metals; A heating device is used to heat and melt the low-melting-point metal in the storage chamber into a liquid metal; A coating device is used to apply liquid metal to the surface of a workpiece by vibrating horizontally and by vibrating vertically to wet and bond the liquid metal with the workpiece to form a metal film. The coating device has a built-in porous material vibrating block; the top of the porous material vibrating block is an ultrasonic transducer, and the bottom is a first porous material block; an eccentric vibrator is provided on one side of the coating device; The eccentric vibrator is configured to drive the coating device to vibrate in the horizontal direction, thereby coating the liquid metal flowing out of the first porous material block onto the workpiece; the ultrasonic transducer is configured to vibrate in the vertical direction with the first porous material block, so that the liquid metal flowing out of the first porous material block wets and bonds with the workpiece to form a bonding layer. A conveying device for conveying the liquid metal in the storage chamber to the coating device; An ultrasonic pressure welding device is used to press a metal film onto a workpiece and vibrate it horizontally to rub the workpiece surface so that the metal film is welded to the workpiece.

2. The low-melting-point metal thin film coating equipment according to claim 1, characterized in that: The coating device has a built-in second porous material block; the second porous material block and the porous material vibration block are arranged side by side and spaced apart in the horizontal direction; the internal pore diameter of the second porous material block is arranged to increase in a gradient from bottom to top in the vertical direction; The eccentric vibrator is configured to drive the coating device to vibrate in the horizontal direction, thereby coating the second porous material block with a bonding layer to form a metal film. The second porous material block operates under normal pressure.

3. The low-melting-point metal thin film coating equipment according to claim 2, characterized in that: The first porous material block is a porous metal or ceramic block; The second porous material block is a porous metal or ceramic block.

4. The low-melting-point metal thin film coating equipment according to claim 1, characterized in that: The ultrasonic pressure welding device is fixedly connected to the storage device and is arranged side by side with the coating device in the horizontal direction with intervals. The ultrasonic pressure welding device contains, from top to bottom, a third pressure sensor, a buffer pad, a heat insulation sheet, a permanent magnet, a DC electromagnet, an ultrasonic transducer, and a vibration block. The DC electromagnet is configured to generate a repulsive force with the permanent magnet, causing the vibrating block to press down on the workpiece. The ultrasonic transducer is configured to vibrate in a horizontal direction and rub against the surface of the workpiece to weld the metal film to the workpiece.

5. The low-melting-point metal thin film coating equipment according to claim 1, characterized in that: The conveying device includes a conveying pump; the orifice of the conveying pump is smaller than the critical size at which liquid metal can flow by gravity, and is used to prevent the liquid metal from flowing in the conveying pump under the action of gravity; The delivery pump is equipped with an inlet, a filter, a piezoelectric pump, and a Tesla valve; the delivery pump is connected to the storage chamber through the inlet; The piezoelectric pump is configured to change the volume of the delivery pump chamber by ultrasonic transducer vibration, thereby allowing liquid metal in the storage chamber to enter the delivery pump through the inlet and be delivered to the application device through the filter and the Tesla valve.

6. The low-melting-point metal thin film coating equipment according to claim 1, characterized in that, Also includes: A second temperature sensor is disposed on the storage device for detecting the temperature of the liquid metal in the storage chamber; And / or, A first pressure sensor, built into the application device, is used to detect the pressure value of the liquid metal within the application device; and / or, A second pressure sensor, disposed on the lower surface of the coating device, is used to detect the pressure value of the coating device on the workpiece surface; and / or, A fourth pressure sensor, disposed at or near the top of the storage cavity, is used to detect the pressure value of the liquid metal at a predetermined height within the storage cavity to determine the remaining amount of liquid metal in the storage cavity; and / or, A heat transfer oil heating circulation pipeline, which is installed on the application device, is used to control the operating temperature of the application device; and / or, A protective gas delivery pipe is used to deliver protective gas between the coating device and the workpiece to prevent oxidation of the metal film or to cool and solidify the metal film.

7. The low-melting-point metal thin film coating equipment according to claim 1, characterized in that: The heating device is provided with a heat-conducting oil cavity for holding heat-conducting oil; the heating device is provided with a heater for heating the heat-conducting oil in the heat-conducting oil cavity and a first temperature sensor for detecting the temperature of the heat-conducting oil in the heat-conducting oil cavity; the heat-conducting oil cavity is respectively connected to two external heat-conducting oil circulation ports for connecting external heat dissipation devices to regulate the temperature in the heat-conducting oil cavity. And / or, The storage device includes a storage housing, which encloses the storage cavity; The storage shell is provided with a feeding port, a vent, and an exhaust port. The feeding port is connected to the storage cavity and is used to feed low-melting-point metal into the storage cavity; the storage shell is detachably connected to a sealing cover for closing or opening the feeding port; The vent is connected to the storage cavity and is used to introduce protective gas; The exhaust port is connected to the storage chamber and is used to discharge protective gas or water vapor and impurity gas generated during the melting of low-melting-point metals.

8. A method for coating low-melting-point metal thin films, characterized in that, include: Provide a low-melting-point metal thin film coating apparatus according to any one of claims 1-7; Turn on the heating device to heat the storage chamber of the storage device to the set temperature and dry the moisture in the storage chamber; put the low melting point metal into the storage chamber, heat the low melting point metal to melt it into liquid metal and reach the set temperature; Turn on the conveying device to deliver the liquid metal to the coating device; when the liquid metal flows out of the lower surface of the coating device, turn off the conveying device; set the operating data values ​​of the coating equipment; Move the coating equipment to the set working position above the workpiece, so that the coating device is close to the workpiece; adjust the height of the coating device so that the coating device and the workpiece achieve the set fit. The traveling mechanism is activated, thereby moving the coating equipment horizontally; the conveying mechanism is also activated. Turn on the coating device to make it vibrate horizontally to apply liquid metal to the surface of the workpiece, and vibrate vertically to make the liquid metal wet and bond with the workpiece to form a metal film. Turn on the ultrasonic pressure welding device, press the metal film down onto the workpiece, and vibrate it in the horizontal direction to rub against the surface of the workpiece so that the metal film is welded to the workpiece.

9. The low-melting-point metal thin film coating method according to claim 8, characterized in that: The coating device has a built-in porous material vibrating block and a second porous material block; the top of the porous material vibrating block is an ultrasonic transducer, and the bottom is a first porous material block; the second porous material block and the porous material vibrating block are arranged side by side and separated in the horizontal direction, and the second porous material block operates at normal pressure; an eccentric vibrator is provided on one side of the coating device; The aforementioned opening of the coating device, causing it to vibrate horizontally to coat the liquid metal onto the workpiece surface, and vibrating vertically to wet and bond the liquid metal with the workpiece to form a metal film, includes: Turn on the eccentric vibrator to drive the coating device to vibrate in the horizontal direction, and apply the liquid metal flowing out of the first porous material block to the workpiece; the ultrasonic transducer of the porous material vibrating block vibrates in the vertical direction with the first porous material block, so that the liquid metal flowing out of the first porous material block wets and combines with the workpiece to form a bonding layer. An eccentric vibrator drives the coating device to vibrate in the horizontal direction, thereby coating the second porous material block with a bonding layer to form a metal film.

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