Sensor device

Abstract

This invention provides a sensor device that can protect a sensor element from the outside and improve the 360-degree omnidirectionality of the sensor element. The sensor device (1) of this invention is characterized by having: a sensor element (3, 4) having a thermistor; and a protective cover (2) for protecting the sensor element; the sensor element is elongated in one direction, and the protective cover surrounds the sensor element by a plurality of pillars (13) extending in an oblique direction relative to the sensor element. Preferably, the plurality of pillars intersect in a grid pattern.

Description

Technical Field

[0001] The present invention relates to a sensor device capable of measuring, for example, wind speed. Background Technology

[0002] A heat-type sensor device exposes a heated flow-detecting resistive element to a fluid, detecting the fluid flow rate based on the heat released during this process. In addition to the flow-detecting resistive element, the sensor device also includes a temperature-compensating resistive element, which are integrated into a bridge circuit. When the flow-detecting resistive element is in contact with fluid, its temperature decreases, causing a change in resistance. This change allows the bridge circuit to generate a differential output. Based on this output, the fluid flow rate can be detected.

[0003] For example, in Patent Document 1, each sensor element having a flow detection resistor element and a temperature compensation resistor element is supported separately from an insulating substrate via wires.

[0004] Existing technical documents

[0005] Patent documents

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2019-215163

[0007] [Patent Document 2] Japanese Patent Application Publication No. 10-239169 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, in the sensor device shown in Patent Document 1, no protective cover is provided for the sensor element to protect it from external contact, and the sensor element is exposed to the outside.

[0010] Therefore, a structure in which a protective shield is arranged around the sensor element was considered. However, due to the direction of fluid flow, the detection accuracy decreases before the fluid reaches the sensor element due to the influence of the protective shield.

[0011] Furthermore, the structure of the sensor device shown in Patent Document 1 was originally intended to improve the accuracy of flow detection from a specific direction, rather than to obtain a non-directional structure around the sensor element in 360 degrees.

[0012] Patent document 2 discloses a temperature sensor with a cover covering the temperature sensor element, but it does not consider the use of flow detection, nor does it take into account the 360-degree non-directional structure around the temperature sensor element.

[0013] Therefore, the present invention was made in view of the above-mentioned problems, and its object is to provide a sensor device that can protect the sensor element from the outside and improve the omnidirectionality of the sensor element around 360 degrees.

[0014] Solution for solving the problem

[0015] The sensor device of the present invention is characterized by having: a sensor element having a thermistor; and a protective cover for protecting the sensor element; the sensor element having an elongated shape in one direction, and the protective cover surrounding the sensor element by a plurality of pillars extending in an inclined direction relative to the length direction of the sensor element.

[0016] Furthermore, the sensor device of the present invention is characterized by having: a sensor element having a thermistor; and a protective cover for protecting the sensor element; the sensor element is supported by a substrate, the thermistor is integrally formed across the periphery of the sensor element, and the protective cover surrounds the periphery of the sensor element by a plurality of pillars extending in an inclined direction relative to the direction in which the sensor element is arranged when viewed from the substrate.

[0017] Invention Effects

[0018] In the sensor device of the present invention, the sensor element can be protected from the outside and the 360-degree omnidirectional protection around the sensor element can be improved. Attached Figure Description

[0019] Figure 1 This is a perspective view of the sensor device according to the first embodiment.

[0020] Figure 2 This is a front view of the sensor device according to the first embodiment.

[0021] Figure 3 This is a side view of the sensor device according to the first embodiment.

[0022] Figure 4 This is a cross-sectional view of the sensor element in this embodiment.

[0023] Figure 5 This is a circuit diagram of the sensor device according to this embodiment.

[0024] Figure 6 yes Figure 2 The protective cover shown is a cross-sectional view along line AA.

[0025] Figure 7 yes Figure 1 An exploded perspective view of the sensor device shown.

[0026] Figure 8 It is Figure 7 A portion of the image is magnified to represent the front view.

[0027] Figure 9 This is a perspective view showing the protective cover of the second embodiment.

[0028] Figure 10 This is a perspective view showing the protective cover of the third embodiment.

[0029] Figure 11 This is a perspective view showing the protective cover of the fourth embodiment.

[0030] Figure 12 This is a perspective view of the protective cover of Comparative Example 1.

[0031] Figure 13 This is a perspective view of the protective cover of Comparative Example 2.

[0032] Figure 14 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Example 1.

[0033] Figure 15 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Example 2.

[0034] Figure 16 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Example 3.

[0035] Figure 17 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Example 4.

[0036] Figure 18 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Comparative Example 1.

[0037] Figure 19 This represents the experimental results showing the relationship between wind speed and angular pointing characteristics using the sensor device of Comparative Example 2.

[0038] Marker description

[0039] 1 Sensor device

[0040] 2, 40, 50, 6, 70, 80 protective covers

[0041] 2a Surrounding part

[0042] 2b Top Plate

[0043] 2c Fixed support part

[0044] 2d Part 1

[0045] 2e Part 2

[0046] 2f upper surface

[0047] 3. First sensor element

[0048] 4. Second sensor element

[0049] Wires 6a, 6b, 8a, 8b

[0050] 9 substrates

[0051] 9a Sensor Section

[0052] 9b driver substrate

[0053] 9c connector

[0054] 10 Resistors for Flow Detection

[0055] 11 Electrode Caps

[0056] 12 insulating film

[0057] 13, 41, 51, 61, 71, 72, 81, 82 pillars

[0058] 13a Intersection

[0059] 14 pillars

[0060] Through holes 15, 43, and 53

[0061] 18 Bridge Circuits

[0062] 19. First series circuit

[0063] 20. Second series circuit

[0064] 23 Differential Amplifier

[0065] 24 Feedback Circuit

[0066] 25 ring-shaped part

[0067] 26 Support bodies

[0068] 26a Claw

[0069] 26b claw receiving part

[0070] 27 Accommodation Department

[0071] 27a First Reception Section

[0072] 27b Second Reception Section

[0073] 27c Third Reception Section

[0074] 28a fitting convex part

[0075] 28b Fitting Hole

[0076] 29 fine pores

[0077] 30 microcomputers

[0078] 31 holes

[0079] 32 slits

[0080] 33, 34 shell

[0081] 34 boxes

[0082] 36 and 37 connectors

[0083] 38 Temperature Compensation Resistors

[0084] 42 holes

[0085] Center C

[0086] L1, L2 length dimensions

[0087] T-width dimension Detailed Implementation

[0088] The following provides a detailed description of one embodiment of the present invention (hereinafter referred to as "the embodiment"). However, the present invention is not limited to the following embodiment and can be implemented in various modifications within its scope.

[0089] <Description of the sensor device in the first embodiment>

[0090] Figure 1 This is a side view of the sensor device according to the first embodiment. Figure 2 This is a front view of the sensor device according to the first embodiment. Figure 3 This is a side view of the flow sensor device according to the first embodiment. Figure 4 This is a cross-sectional view of the sensor element in this embodiment. Figure 5 This is a circuit diagram of the sensor device according to this embodiment. Figure 6 yes Figure 2 The protective cover shown is a cross-sectional view along line AA.

[0091] (Overview of sensor device 1)

[0092] Figure 1 The X1-X2 and Y1-Y2 directions shown represent two perpendicular directions within the plane. Figure 1 The Z1-Z2 direction shown refers to the height direction that is perpendicular to both the X1-X2 and Y1-Y2 directions.

[0093] Figure 1The sensor device 1 of the first embodiment shown is configured to include: sensor elements 3 and 4, which have thermistors; and a protective cover 2, which protects the sensor elements 3 and 4 from the outside.

[0094] Hereinafter, in the first embodiment and the other embodiments described below, all will be... Figure 1 Based on the shape of the sensor device 1 shown, the aforementioned plane and height directions are defined. That is, the basic shape described is the sensor device 1 standing upright, with the protective cover 2 located above it.

[0095] like Figures 1-3 As shown, sensor elements 3 and 4 are disposed inside the protective cover 2 of the mesh structure.

[0096] like Figures 1-3 As shown, sensor elements 3 and 4 are formed in a shape that extends along the height direction (Z1-Z2 direction). Thus, sensor elements 3 and 4 are rod-shaped, specifically, they can be cylindrical or polygonal. Here, in this embodiment, sensor elements 3 and 4 are cylindrical that extend along the height direction.

[0097] like Figure 2 As shown, each sensor element 3 and 4 is connected to wires 6a, 6b, 8a, and 8b at its two ends, and each wire is connected to the substrate 9 (reference). Figure 7 )connect.

[0098] Sensor element 3 is a first sensor element with a flow detection resistor 10, and sensor element 4 is a second resistive element with a temperature compensation resistor 38.

[0099] use Figure 4 The internal structure of the first sensor element 3 will be described. For example... Figure 4 As shown, the first sensor element 3 is configured to have: a flow detection resistor 10 as a thermistor, electrode caps 11 disposed on both sides of the flow detection resistor 10, and an insulating film 12 covering the flow detection resistor 10 and the electrode caps 11.

[0100] The flow detection resistor 10 is formed by forming a resistive coating on the surface of a cylindrical substrate, such as ceramic. Therefore, the flow detection resistor (thermostat) 10 is integrally formed across the surrounding direction. Here, "integral across the surrounding direction" refers to the axial direction centered on the height direction (Z1-Z2 direction) of the first resistor element 3. Furthermore, although not shown, the surface of the resistive coating of the flow detection resistor 10 is trimmed to adjust the resistance.

[0101] The outer surface of the first sensor element 3 has: an element surface 5a that functions as a flow detection surface, and an upper surface 5b and a lower surface 5c located above and below the element surface 5a.

[0102] like Figure 4 As shown, the first wire 6a extends from the electrode cap 11 located on the lower surface 5c side along the Z2 direction. Furthermore, the first wire 6b extends from the electrode cap 11 located on the upper surface 5b side first along the Z1 direction, then bends midway and extends along the Z2 direction. Therefore, as... Figure 4 As shown, a pair of wires 6a and 6b are positioned opposite each other at a predetermined interval along the X1-X2 direction and extend together along the Z2 direction. Furthermore, the ends of the pair of wires 6a and 6b are connected to the substrate 9.

[0103] Regarding the second sensor element 4, it is also related to... Figure 4 It has the same structure, but instead of the flow detection resistor 10, it incorporates a temperature compensation resistor 38, which functions as a thermistor.

[0104] like Figure 5 As shown, the flow detection resistor 10 and the temperature compensation resistor 38 together form a bridge circuit. Figure 5 As shown, resistor 10 for flow detection, resistor 38 for temperature compensation, and resistors 16 and 17 form a bridge circuit 18. (As shown...) Figure 5 As shown, resistors 10 and 16 for flow detection form a first series circuit 19, and resistors 38 and 17 for temperature compensation form a second series circuit 20. Furthermore, the first series circuit 19 and the second series circuit 20 are connected in parallel to form a bridge circuit 18.

[0105] like Figure 5 As shown, the output 21 of the first series circuit 19 and the output 22 of the second series circuit 20 are each connected to the differential amplifier (amplifier) ​​23. The bridge circuit 18 is connected to the feedback circuit 24, which includes the differential amplifier 23. The feedback circuit 24 includes transistors (not shown) and the like.

[0106] The temperature coefficient of resistance (TCR) of resistors 16 and 17 is less than that of the flow detection resistor 10 and the temperature compensation resistor 38. The flow detection resistor 10 is controlled, for example, to have a predetermined resistance value Rs1 under a heating state where the ambient temperature is higher than a predetermined value. Similarly, the temperature compensation resistor 38 is controlled, for example, to have a predetermined resistance value Rs2 at the ambient temperature. Furthermore, the resistance value Rs1 is less than the resistance value Rs2. Resistor 16, which constitutes the flow detection resistor 10 and the first series circuit 19, is, for example, a fixed resistor having the same resistance value R1 as the flow detection resistor 10. Similarly, resistor 17, which constitutes the temperature compensation resistor 38 and the second series circuit 20, is, for example, a fixed resistor having the same resistance value R2 as the temperature compensation resistor 38.

[0107] The flow detection resistor 10 is adjusted to a temperature higher than the ambient temperature. When the first sensor element 3 is exposed to wind, the temperature of the flow detection resistor 10, which acts as a heating resistor, decreases. Therefore, the potential of the output section 21 of the first series circuit 19 to which the flow detection resistor 10 is connected changes. This allows a differential output to be obtained via the differential amplifier 23. Then, in the feedback circuit 24, a drive voltage is applied to the flow detection resistor 10 based on the differential output. Then, according to the change in voltage required to heat the flow detection resistor 10, the microcomputer 30 (reference 30) disposed within the substrate 9 can detect this change. Figure 7 The wind speed is calculated and output. In addition, the microcomputer is electrically connected to each sensor element 3 and 4 via wires 6a, 6b, 8a, and 8b.

[0108] Furthermore, the temperature compensation resistor 38 detects the temperature of the fluid itself and compensates for the effects of fluid temperature changes. Therefore, by having the temperature compensation resistor 38, the influence of fluid temperature changes on flow detection can be reduced, enabling accurate flow detection. As described above, the resistance of the temperature compensation resistor 38 is sufficiently higher than that of the flow detection resistor 10, and its temperature is set close to the ambient temperature. Therefore, even if the temperature compensation resistor 38 is exposed to wind, the potential of the output section 22 of the second series circuit 20 to which the temperature compensation resistor 38 is connected remains essentially unchanged. Therefore, by using the potential of the output section 22 as a reference potential, a differential output with good accuracy can be obtained based on the resistance change of the flow detection resistor 10.

[0109] in addition, Figure 5 The circuit structure shown is an example and is not limited to it.

[0110] (Protective Shield 2)

[0111] like Figure 1As shown, the protective cover 2 is configured to have: a peripheral portion 2a surrounding the sensor elements 3 and 4, a top plate portion 2b located above the peripheral portion 2a (Z1 side), and a fixed support portion 2c located below the peripheral portion 2a (Z2 side).

[0112] The periphery 2a of the protective cover 2 is surrounded by a plurality of pillars 13 extending in an inclined direction relative to the length direction (Z1-Z2 direction) of the sensor elements 3 and 4, and has a plurality of through holes 15. In the first embodiment, the plurality of pillars 13 intersect in a grid pattern.

[0113] Each support column 13 is twisted and tilted from the fixed support portion 2c to the top plate portion 2b, connecting the top plate portion 2b and the fixed support portion 2c. Each support column 13 is composed of two patterns with tilt directions differing by approximately 90 degrees, and the support columns 14 of each pattern intersect in a grid pattern from the tilt direction.

[0114] In the surrounding part 2a, the portion other than the support column 13 is a through hole 15, and the shape (outline) of each through hole 15 is rhomboid or rectangular. Moreover, the sensor elements 3 and 4 located inside the protective cover 2 can be seen from the outside through the through holes 15. Figure 2 yes Figure 1 The main view shown is from the perspective of arrow A. Figure 3 yes Figure 1 The side view shown is from the perspective of arrow B, but sensor elements 3 and 4 are visible through through hole 15. Moreover, even from... Figure 2 and Figure 3 From other angles, sensor elements 3 and 4 are also visible through the through-hole 15. This is because the support 13 constituting the protective cover 2 extends in an inclined direction relative to the length direction (Z1-Z2 direction) of sensor elements 3 and 4.

[0115] Therefore, when wind acts from a 360-degree radius around sensor elements 3 and 4—in other words, when wind acts from a 360-degree radius within the horizontal plane formed by the X1-X2 and Y1-Y2 directions—it will act on the first sensor element 3, which has the flow detection resistor 10, through the through-hole 15 of the peripheral portion 2a, regardless of the direction from which the wind blows. Thus, the first sensor element 3 can detect the flow rate through the action of wind from a 360-degree radius. In summary, in the sensor device 1 of the first embodiment, sensor elements 3 and 4 can be appropriately protected from the outside, and the omnidirectionality of the sensor elements 3 and 4 within a 360-degree radius can be improved.

[0116] In the first embodiment, the multiple support pillars 13 intersect in a grid pattern. This increases the strength of the protective cover 2.

[0117] Furthermore, it is preferable to have the following structure.

[0118] (1) Viewed from the side, relative to all angles in the surrounding directions, the intersection 13a of the multiple pillars 13 is offset from the center C of the first sensor element 3 (reference). Figure 2 , Figure 3 ).

[0119] like Figure 2 , Figure 3 As shown in the front and side views, the intersecting portion 13a is offset from the center C of the first sensor element 3 to either the upper (Z1 side) or lower (Z2 side). Figure 2 , Figure 3 The same applies to the surrounding angles. Thus, relative to the first sensor element 3, the wind can act appropriately from any direction within the surrounding 360 degrees, which can more effectively improve the omnidirectionality of the surrounding 360 degrees.

[0120] (2) The width T of the support column 13 is shorter than the length L1 of the first sensor element 3 in the longitudinal direction (Z1-Z2 direction) (reference). Figure 2 The following Figure 8 ).

[0121] In this way, by making the width T of the support column 13 narrower, the area of ​​overlap between the first sensor element 3 and the support column 13 when viewed from the side can be reduced, thereby effectively improving the omnidirectionality. In this embodiment, regardless of which side angle is viewed from, the area of ​​overlap between the support column 13 and the first sensor element 3 is 75% or less, more preferably 65% ​​or less, further preferably 60% or less, even more preferably 55% or less, and most preferably 50% or less.

[0122] (3) The length dimension (thickness dimension) L2 from the outside to the inside of the support 13 is longer than the width T of the support 13 (refer to...). Figure 6 ).

[0123] Here, "inner side of support 13" refers to the inner side of the protective cover 2 on which sensor elements 3 and 4 are arranged, and "outer side of support 13" refers to its opposite side (outer side of protective cover 2).

[0124] Figure 6 yes Figure 2 The cross-sectional view along line AA is shown below. Figure 6 As shown, the length L2 of the support column 13 is longer than its width T. Therefore, the wind blowing from the outside to the inside of the protective cover 2 is less likely to be blocked by the support column 13; in other words, the range of wind direction directly contacting the support column 13 can be reduced. This effectively improves the omnidirectional performance around the perimeter (360 degrees).

[0125] In addition, such as Figure 6As shown, in a manner where the width T varies from the outside to the inside of the support 13, the maximum width is compared with the length dimension (thickness dimension) L2 of the support 13.

[0126] (4) The support column 13 is formed as a protruding cross-sectional shape with its width gradually decreasing from the inside to the outside (see reference). Figure 6 ).

[0127] like Figure 6 As shown, by setting the cross-sectional shape of the protrusion to the outside, the wind can smoothly pass through the side of the support column 13 from the outside to the inside, thereby effectively improving the 360-degree omnidirectionality around the perimeter.

[0128] The top plate portion 2b, located above the surrounding portion 2a, will be described. For example... Figure 1 As shown, the top plate portion 2b has a structure comprising an annular portion 25 connecting each of the pillars 13 constituting the surrounding portion 2a, and two arc-shaped support bodies 26 intersecting above the annular portion 25, but this structure is not fixed. However, by having the top plate portion 2b, the strength of the protective cover 2 can be improved. By providing the support bodies 26, the strength of the protective cover 2 can be improved. In this case, compared to covering the entire top plate portion 2b, it can be considered that by configuring the columnar support bodies 26, the space outside the support bodies 26 is set as a space communicating with the interior of the protective cover 2, thereby reducing the impact on the detection accuracy of the surrounding 360 degrees for airflow from the inclined upward.

[0129] The fixed support portion 2c will be described below. When describing the fixed support portion 2c, the structure of its inner side is important; therefore, it will be used in the following description. Figure 7 , Figure 8 .

[0130] Figure 7 yes Figure 1 An exploded perspective view of the sensor device shown. Figure 8 It is Figure 7 A partially enlarged front view.

[0131] like Figure 7 As shown, the protective cover 2 can be divided into a first part 2d and a second part 2e, and these parts 2d and 2e can be combined to form a protective cover 2 surrounding the sensor elements 3 and 4. Each part 2d and 2e has the same shape and is formed by resin molding using a mold.

[0132] like Figure 7 , Figure 8 As shown, in the first part 2d, a recessed receiving portion 27 is formed on the inner side of the fixed support portion 2c. The receiving portion 27 is divided into a first receiving portion 27a, a second receiving portion 27b, and a third receiving portion 27c, which are connected.

[0133] The substrate 9 to which the sensor elements 3 and 4 are connected can be accommodated in each of the accommodating portions 27a to 27c of the fixed support portion 2c. The second part 2e also has the same accommodating portion 27 as the first part 2d. By assembling each part 2d and 2e, the support substrate 9 can be reliably fixed in the fixed support portion 2c.

[0134] In addition, such as Figure 7 , Figure 8 As shown, a plurality of fine holes 29 are provided on the upper surface of the fixed support portion 2c, and these fine holes 29 are connected to the receiving portion 27. Therefore, as Figure 8 As shown, the wires 6a, 6b, 8a, and 8b of the fixed sensor elements 3 and 4 can pass through the fine hole 29. As a result, the substrate 9 can be housed inside the fixed support portion 2c, and the sensor elements 3 and 4 can be arranged at intervals above (Z1 side) from the upper surface of the fixed support portion 2c.

[0135] like Figure 7 As shown, the support body 26 of the top plate portion 2b of the protective cover 2 is provided with a claw portion 26a and a recessed claw receiving portion 26b. Furthermore, the fixed support portion 2c is provided with a fitting protrusion 28a and a fitting hole portion 28b located on the opposite side of the fitting protrusion 28a. Therefore, when assembling the parts 2d and 2e, the parts 2d and 2e can be connected by inserting the claw portion 26a of the top plate portion 2b into the claw receiving portion 26b and then inserting the fitting protrusion 28a into the fitting hole portion 28b. This also prevents the pair of parts 2d and 2e from detaching due to external impacts, thus effectively protecting the sensor elements 3 and 4.

[0136] (Sensor elements 3 and 4)

[0137] Supplementary explanations are provided for sensor elements 3 and 4. For example... Figure 8 As shown, the first sensor element 3 is preferably positioned higher than the second sensor element 4. That is, the first sensor element 3 is preferably positioned away from the upper surface 2f of the fixed support portion 2c compared to the second sensor element 4. Furthermore, it is preferable that the first sensor element 3 is formed at a position higher than the wire 8b connected to the second sensor element 4. As a result, when wind acts on the first sensor element 3, the impact on the second sensor element 4 and consequently on the wire 8b can be reduced, effectively improving the omnidirectionality around 360 degrees.

[0138] Furthermore, it is preferable to arrange the sensor elements 3 and 4 and the wires 6a, 6b, 8a, 8b in a single line. Thus, viewed from the first sensor element 3, the second sensor element 4 and the wires are arranged along only one direction (e.g., ...). Figure 7As shown, the arrangement (X1-X2 direction) can minimize the angular range of the second sensor element 4 and the wire 8b affected by the wind when the wind acts on the first sensor element 3, and can effectively improve the omnidirectionality of the surrounding 360 degrees.

[0139] Furthermore, the first sensor element 3 is preferably located approximately at the center of the upper surface 2f of the fixed support portion 2c. In other words, the first sensor element 3 is preferably positioned at approximately the same distance from the periphery 2a of the protective cover 2. As a result, when wind acts from all around 360 degrees, the wind tends to act around the first sensor element 3, effectively improving the omnidirectional nature of the surrounding 360 degrees.

[0140] (Substrate 9)

[0141] The substrate 9 supporting sensor elements 3 and 4 will be described. The substrate 9 is an insulating substrate, which is not particularly limited, but is preferably a conventional printed circuit board in which glass cloth is impregnated with epoxy resin, such as an FR4 substrate.

[0142] like Figure 7 , Figure 8 As shown, the substrate 9 has: a sensor section 9a that supports sensor elements 3 and 4; a drive substrate 9b that is provided with a microcomputer 30, connectors 36 and 37, etc.; and a connection section 9c that connects the sensor section 9a and the drive substrate 9b.

[0143] The first receiving portion 27a formed in the fixed support portion 2c of the protective cover 2 is formed to accommodate the sensor portion 9a, the second receiving portion 27b is formed to accommodate the drive substrate 9b, and the third receiving portion 27c is formed to accommodate the connecting portion 9c.

[0144] like Figure 7 , Figure 8 As shown, the sensor section 9a has a plurality of holes 31 arranged in a horizontal row, and the wires 6a, 6b, 8a, 8b connected to the sensor elements 3 and 4 are inserted into the holes 31 for fixation.

[0145] like Figure 7 , Figure 8 As shown, the width of the connecting portion 9c is smaller than that of the sensor portion 9a and the driving substrate 9b. Therefore, the heat generated by the driving substrate 9b is less likely to reach the sensor portion 9a, and even less likely to reach the sensor elements 3 and 4. This maintains good detection accuracy. Furthermore, a slit 32 is formed in the sensor portion 9a next to the connecting portion 9c, thereby separating the heat sources of the sensor portion 9a and the driving substrate 9b. In summary, the thermal influence of the driving substrate 9b on the sensor portion 9a can be reduced, improving sensor responsiveness.

[0146] (Assembly of sensor devices)

[0147] In the first embodiment, a substrate 9 having sensor elements 3 and 4 is housed in a structure Figure 7 In the receiving portion 27 of the pair of portions 2d and 2e of the protective cover 2 shown, the assembly portions 2d and 2e are connected. Next, a pair of housings 33 and 34 to cover the drive board 9b are assembled at the lower end of the protective cover 2 and secured with screws 35. This completes the process. Figure 1 The sensor device 1 shown.

[0148] <Description of the sensor device in the second embodiment>

[0149] The sensor devices other than those described in the first embodiment will be described below. However, the main body of the device (including sensor elements 3 and 4, substrate 9, and housings 33 and 34) except for the protective cover has the same structure as in the first embodiment, so only the protective cover will be described in the following embodiments.

[0150] like Figure 9 As shown, the protective cover 40 used in the sensor device of the second embodiment has a plurality of pillars 41 that extend obliquely relative to the length direction, i.e., the height direction (Z1-Z2 direction), of the sensor elements 3 and 4. In the protective cover 40, the pillars 41 extend from the side to the top. At the apex, the hole 42 is empty, but the pillar 41 may extend in a manner that covers this portion. The protective cover 40 is formed with a plurality of through holes 43 extending from the side to the top, and the through holes 43 are approximately rhomboid in shape. Figure 9 The protective cover 40 shown differs from the protective cover 2 shown in the first embodiment. After fabricating a cover member of approximately a certain thickness that closes the through holes 43, multiple diamond-shaped through holes 43 are formed by punching holes in the side of the cover member. Furthermore, the protective cover 40 of the second embodiment is unlike... Figure 7 Instead of being divided into multiple parts, the protective cover 40 is embedded from the top of the device and the main body.

[0151] Figure 9 In the second embodiment shown, multiple support pillars 41 extend obliquely relative to the length direction, i.e., the height direction (Z1-Z2 direction), of the sensor elements 3 and 4, intersecting in a grid pattern. Therefore, by applying the protective cover 40 of the second embodiment, the sensor elements 3 and 4 can be protected from the outside, and the omnidirectionality around 360 degrees can be improved.

[0152] In this embodiment, preferably, the intersection of the multiple pillars 41, viewed from the side, is offset from the center C (reference point) of the first sensor element 3 at all angles relative to the surrounding directions. Figure 2 , Figure 3 ).

[0153] <Description of the sensor device in the third embodiment>

[0154] Figure 10 The protective cover 50 shown in the third embodiment is similar to... Figure 9 Unlike other holes, through hole 53 is roughly circular in shape, but otherwise it is the same as... Figure 9 Same structure. Figure 10 The protective cover 50 shown is also a grid structure in which multiple pillars 51 extend in an inclined direction relative to the length direction, i.e., the height direction (Z1-Z2 direction), of the sensor elements 3 and 4. Therefore, by applying the protective cover 50 of the third embodiment, the sensor elements 3 and 4 can be protected, and the omnidirectionality around 360 degrees can be improved.

[0155] In this embodiment, preferably, the intersection of the multiple pillars 51, viewed from the side, is offset from the center C (reference point) of the first sensor element 3 at all angles relative to the surrounding directions. Figure 2 , Figure 3 ).

[0156] <Description of the sensor device in the fourth embodiment>

[0157] Figure 11 The protective cover 60 of the fourth embodiment shown is provided with a plurality of spiral-shaped support columns 61 connecting the upper annular portion 62 and the lower fixed support portion 64. These support columns 61 extend obliquely relative to the length direction, i.e., the height direction (Z1-Z2 direction), of the sensor elements 3 and 4. Therefore, by applying the protective cover 60 of the fourth embodiment, the sensor elements 3 and 4 can be protected from the outside, and the omnidirectionality around 360 degrees can be improved. Furthermore, to improve the strength of the protective cover 60, it is preferable to... Figures 1-3 The grid structure shown.

[0158] <Comparison with comparative examples>

[0159] In contrast, Figure 12 , Figure 13 In the protective covers 70 and 80 of the sensor device shown in the comparative example, the support pillars 71 and 81 extend along the length direction, i.e., the height direction (Z1-Z2 direction), of the sensor elements 3 and 4. Figure 12 Comparative Example 1 shows a structure in which multiple supports 71 and 72 intersect in a grid pattern. Supports 71 extend along the height direction (Z1-Z2 direction). Furthermore, in... Figure 13 In Comparative Example 2, multiple supports 81 and 82 are arranged in an alternating manner with through holes 83. Among them, the supports 81 extend along the height direction (Z1-Z2 direction).

[0160] Using the sensor devices of the above-described embodiments and the sensor devices of the comparative examples, experiments were conducted to detect the flow rate when wind acts from 360 degrees. In the experiments, the main body of the device with the protective cover was the same for all of them. Furthermore, experiments using sensor devices 1 of embodiments 1 through 4 will be described as "Examples 1" through "Examples 4".

[0161] The surrounding 360 degrees is with Figure 1 The horizontal direction shown is parallel to the plane formed by the X1-X2 and Y1-Y2 directions. This horizontal direction is the radial direction of the first sensor element 3, which is perpendicular to the Z1-Z2 direction.

[0162] In the experiment, wind was applied to each sensor device from all directions. The wind speed controlled the inverter's operating frequency in four stages: 3Hz, 7Hz, 10Hz, and 14Hz. The higher the operating frequency, the greater the wind speed. These wind speeds were measured using the various sensor devices.

[0163] The experimental results of Example 1 are shown in Figure 14 .like Figure 14 As shown, the values ​​on the outer perimeter of the circular plot of the simulated wind direction map represent the direction of the wind toward the sensor device 1 located at the center.

[0164] The values ​​0, 2, 6, 8, 10, and 12 within the pie chart represent wind speed values. Additionally, the multiple curves highlighted in bold within the pie chart are measured wind speeds obtained by adjusting the inverter's operating frequency to 3Hz, 7Hz, 10Hz, and 14Hz, and measuring wind speeds from a 360-degree surrounding environment using sensor devices. Figure 14 The text also indicates the ideal value for the measurement when the inverter's operating frequency is adjusted to 14Hz.

[0165] For Examples 2-4 and Comparative Examples 1 and 2, wind speed measurements were also performed from the surrounding 360 degrees in the same manner as described above. The experimental results for Example 2 are shown below. Figure 15 The experimental results of Example 3 are shown in Figure 16 The experimental results of Example 4 are shown in Figure 17 The experimental results of Comparative Example 1 are shown in Figure 18 The experimental results of Comparative Example 2 are shown in Figure 19 .

[0166] like Figure 18 As shown, in Comparative Example 1, the airflow detection accuracy in the directions of approximately 30° to approximately 70°, approximately 115° to approximately 140°, approximately 200° to approximately 240°, and approximately 270° to approximately 320° is extremely low.

[0167] In addition, such as Figure 19As shown, in Comparative Example 2, the airflow detection accuracy for directions of approximately 30° to approximately 50°, approximately 60° to approximately 90°, approximately 100° to approximately 120°, approximately 130° to approximately 150°, approximately 160° to approximately 180°, approximately 200° to approximately 220°, approximately 230° to approximately 250°, approximately 270° to approximately 290°, approximately 310° to approximately 340°, and approximately 350° to approximately 10° is extremely low.

[0168] In Comparative Examples 1 and 2, the air volume detection accuracy decreased within the aforementioned angle range. This can be attributed primarily to the fact that, viewed from the side at these angles, the length direction (i.e., the height direction, Z1-Z2 direction) of the first sensor element 3 is essentially aligned with the support column, preventing the airflow from properly reaching the first sensor element.

[0169] In contrast, it can be seen that in Examples 1 to 4, as Figures 14-17 As shown, regardless of the angle of the wind, compared with Comparative Examples 1 and 2, there was no extreme decrease in the accuracy of the air volume detection; instead, it was close to the ideal value.

[0170] In embodiments 1 to 4, multiple support pillars surrounding sensor elements 3 and 4 extend in an inclined direction relative to the length direction (Z1-Z2 direction) of the sensor elements. Therefore, regardless of the angle, the support pillars and the length direction of the first sensor element 3 will not overlap when viewed from the side. Thus, for all angles in the surrounding direction, wind can be properly applied to the first sensor element 3, improving the omnidirectionality of the surrounding 360 degrees.

[0171] In Examples 1 to 4, Figure 16 In Example 3, the airflow detection accuracy in the direction of approximately 0° to 80° and approximately 230° to 350° is slightly lower than that in Examples 1, 2, and 4. Furthermore, in Examples 1 and 2, where multiple supports intersect in a grid pattern, Example 1 exhibits superior airflow detection accuracy in the direction of approximately 190° to approximately 150° compared to Example 2. Therefore, it can be concluded that the protective cover of Example 1 has excellent strength and excellent omnidirectional 360° coverage. In addition, Example 1 combines all the conditions described in (1) to (4) above.

[0172] <Regarding other implementation methods>

[0173] As another implementation, methods other than extending the first sensor element 3 with the flow detection resistor in one direction can also be applied. However, the condition is that the flow detection resistor of the first sensor element 3 is formed integrally across the circumferential direction of the sensor element. For example, the first sensor element can be a spherical sensor element. Specifically, in a structure where the flow detection resistor is formed over the entire surface area of ​​a substrate formed of a sphere, the flow detection resistor is formed integrally across the circumferential direction of the sensor element.

[0174] The first sensor element of the sphere via Figure 8 The wires 6a and 6b shown are connected to the substrate 9. Furthermore, the protective cover 2 (represented here by...) Figure 1 (As illustrated in the description of the protective cover 2) From the substrate 9, a plurality of pillars 13 extending in an inclined direction relative to the direction in which the sensor elements 3 and 4 are arranged, i.e., the height direction (Z1-Z2 direction), surround the sensor elements 3 and 4. This provides adequate external protection for the sensor elements 3 and 4 and improves 360-degree omnidirectional coverage. Preferably, the first sensor element 3 is formed at a position higher than the second sensor element 4. The protective cover can also utilize any of the structures described in the first to fourth embodiments.

[0175] In the above description, sensor device 1 is described as a sensor device for detecting wind, but the fluid to be detected can be gas or liquid in addition to wind.

[0176] [Industry Applicability]

[0177] This invention provides appropriate external protection for the sensor element and improves its 360-degree omnidirectional orientation, making it suitable for a wide variety of applications. Examples include air conditioning equipment, wind control systems, and analytical applications.

Claims

1. A sensor device, characterized in that, It comprises: a sensor element having a thermistor; and a protective cover for protecting the sensor element. The sensor element is elongated in one direction. The protective cover surrounds the sensor element by a plurality of pillars extending in an oblique direction relative to the length direction of the sensor element. The multiple pillars intersect in a grid pattern. Viewed from the side, the intersection of the multiple intersecting pillars overlaps with the sensor element in only one place.

2. The sensor device according to claim 1, characterized in that, Viewed from the side with respect to all angles in the surrounding directions, the intersections of the multiple intersecting pillars are off-center from the center of the sensor element.

3. The sensor device according to claim 1 or 2, characterized in that, The width of the support column is shorter than the length of the sensor element in the longitudinal direction.

4. The sensor device according to any one of claims 1 to 3, characterized in that, The length from the outside to the inside of the support is longer than the width of the support.

5. The sensor device according to any one of claims 1 to 4, characterized in that, The support is formed in a protruding cross-sectional shape with a width dimension that gradually decreases from the inside to the outside.

6. The sensor device according to any one of claims 1 to 5, characterized in that, The protective cover has a receiving portion at the lower end of the support column to accommodate a substrate that supports the sensor element.

7. A sensor device, characterized in that, It comprises: a sensor element having a thermistor; and a protective cover for protecting the sensor element. The sensor element is supported by a substrate. The thermistor is integrally formed across the circumferential direction of the sensor element. Viewed from the substrate, the protective cover surrounds the sensor element by a plurality of pillars extending in an oblique direction relative to the orientation in which the sensor element is configured. The multiple pillars intersect in a grid pattern. Viewed from the side, the intersection of the multiple intersecting pillars overlaps with the sensor element in only one place.

Images