Substrate processing apparatus, analysis method, display apparatus, and program

Abstract

The present application relates to a substrate processing apparatus, an analysis method, a display apparatus, and a program. An information storage section stores operation information related to operation of an operation section group including a load port group, a processing unit group, and a transfer mechanism. The operation information includes processing result information indicating a processing result of a substrate in the substrate processing apparatus, operation state information indicating a time profile of an operation state of the substrate processing apparatus and a time profile of an operation state of an operation section included in the operation section group. A display control section displays the processing result information on a display in a state where the processing result information is sorted with respect to a sorting item selected from among predetermined sorting item groups for any operation period of the substrate processing apparatus. The display control section classifies the operation state information into a plurality of major classification operation states and a plurality of minor classification operation states and displays the operation state information on the display. Thus, an operator can easily recognize the detailed operation state of the operation section in association with the processing result of the substrate.

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