Apparatus, method, and computer readable storage medium for outputting x-rays

Abstract

The application discloses a device, a method and a computer readable storage medium for outputting X-rays. The device comprises: an X-ray generating system configured to generate X-rays; a signal detection feedback system configured to collect and detect X-rays from the X-ray generating system to obtain and feedback an intensity signal about the X-rays; and a control system configured to: receive the intensity signal about the X-rays fed back by the signal detection feedback system; and perform parameter control on the X-ray generating system based on the intensity signal so as to realize feedback adjustment of X-rays generated by the X-ray generating system. The scheme of the application directly obtains and feeds back the intensity information of the X-rays and adjusts the parameters of the X-ray source according to the intensity information, so that the X-rays emitted by the device of the application are more stable.

Description

Technical Field

[0001] This invention generally relates to the field of semiconductor applications. More specifically, this invention relates to an apparatus, method, and computer-readable storage medium for outputting X-rays. Background Technology

[0002] An X-ray tube is a vacuum electronic device that generates X-rays by using high-speed electrons to bombard a metal target under high voltage. An X-ray tube typically consists of two electrodes: a filament that acts as the cathode to emit electrons, and a target that acts as the anode to receive the electron bombardment. Both electrodes are sealed within a high-vacuum glass or ceramic housing. During operation, factors such as target temperature, tube shape, air humidity, and internal transmission losses cause X-ray losses from generation to exit through the window. Therefore, even if the operating voltage of the X-ray source and the target current are stable, the actual output intensity will fluctuate. For ease of understanding, the existing technology of X-ray tubes is described below.

[0003] In 2016, Li Shu et al. designed a packaged X-ray tube. By placing a temperature control sensor on the outer surface of the X-ray tube shell, the temperature of the outer shell can be monitored in real time. Based on the detected temperature data, the opening and closing of the X-ray tube can be controlled, ultimately protecting it and improving the safety and performance of the packaged X-ray tube. In 2017, P.K. Lewis et al. invented a heat sink for the anode of an X-ray tube. This heat sink is directly connected to the anode through a thermal structure and uses a thermally conductive porous matrix to design the fluid path for receiving and circulating coolant, thereby achieving heat dissipation from the anode. This invention solves the problem of unstable X-ray tube output caused by changes in filament internal resistance due to heat accumulation at the anode.

[0004] In 2018, Zhang Wei et al. proposed a design method for a numerically controlled constant-power filament power supply for X-ray tubes. This design reduces the performance instability of X-ray tubes caused by changes in filament impedance and uses a numerically controlled power supply to meet the accuracy requirements of the X-ray tube output, thus overcoming the problem of unstable X-ray tube output caused by changes in filament impedance due to the continuous increase in tube temperature over time. In 2019, Zhai Juan et al. disclosed a method for X-ray tube stability correction. This method places a filter at the X-ray tube outlet. When primary X-rays passing through the filter are emitted, the controller transmits the sample irradiation results and calibration standard results to the analysis and processing unit for analysis and processing. Simultaneously, this method adds a monitoring channel for synchronous correction of X-ray tube stability. Through these technical means, the method improves the accuracy of elemental analysis and increases the stability of instrument operation.

[0005] In 2021, A.T. Cross et al. proposed a bias cathode assembly for X-ray tubes with improved thermal management and its manufacturing method. This method achieves thermal decoupling by increasing the distance between the emitter and the bias insulator. Simultaneously, it optimizes the heat conduction path to achieve thermal control of the cathode assembly. Through these techniques, the method ultimately achieves stable X-ray tube output. Also in 2021, Zhao Yingyi et al. studied the power supply system of X-ray tubes to address the problem of unstable output signals. Specifically, they designed the high-voltage power supply and filament power supply circuits for the X-ray tube and introduced voltage and filament current feedback, enabling the high-voltage power supply and filament power supply sections of the power supply system to output stable rated voltage and current. Ultimately, this scheme solved the problem of unstable X-ray tube output power caused by unstable high-voltage power supply.

[0006] From the aforementioned existing technologies for improving X-ray tube performance, the feedback introduced to achieve stable X-ray tube output intensity is primarily through indirect feedback regulation by measuring process parameters such as voltage and current. That is, when the voltage and current reach a stable state according to preset values, the radiation intensity of the output rays is considered stable. However, while using process control to feed back radiation intensity based on current and voltage measurements has some effect on stabilizing the X-ray tube output, the actual output is not stable, which is detrimental to subsequent trace and micro-level element detection and analysis. Furthermore, current technologies also attempt to stabilize the X-ray tube output by improving the stability of the high-voltage power supply and filament current. However, these techniques all rely on indirect control for radiation intensity regulation, which suffers from drawbacks such as slow adjustment speed, inaccurate adjustment, and poor stability. Summary of the Invention

[0007] To address one or more of the problems in the background art described above, the present invention provides an apparatus, method, and computer-readable storage medium for outputting X-rays. This allows for the direct acquisition of X-ray intensity information through detection when X-rays are generated, and the feedback of this intensity information to a control system for analysis and processing. Furthermore, the control system adjusts the X-ray emission parameters based on the processing results, thereby ultimately achieving stable X-ray output. To this end, the present invention provides solutions in several aspects, including...

[0008] Specifically, in one aspect, the present invention discloses an apparatus for outputting X-rays. The apparatus includes: an X-ray generating system configured to generate X-rays; a signal detection feedback system configured to acquire and detect X-rays from the X-ray generating system to obtain and feedback an intensity signal regarding the X-rays; and a control system configured to: receive the intensity signal regarding the X-rays fed back by the signal detection feedback system; and perform parameter control on the X-ray generating system based on the intensity signal to achieve feedback adjustment of the X-rays generated by the X-ray generating system.

[0009] In one embodiment, the apparatus further includes a beam-splitting system for focusing and separating the X-rays generated by the X-ray generating system.

[0010] In another embodiment, the beam splitting system includes: a collimator for focusing and processing X-rays generated by the X-ray generating system; and a beam splitting crystal for: separating and reflecting X-rays of a specific wavelength to the signal detection feedback system; and transmitting and outputting X-rays of other wavelengths.

[0011] In yet another embodiment, the collimator includes: a first collimator for receiving and converging X-rays generated by the X-ray generating system; and a second collimator for converging the X-rays separated and reflected by the spectroscopic crystal.

[0012] In one embodiment, the signal detection feedback system includes: a filter for decoupling X-rays separated by the spectroscopic crystal; and a detector system configured to process the X-rays decoupled by the filter in order to output an electrical signal related to the intensity of the X-rays.

[0013] In another embodiment, the detector system includes: a detector configured to receive X-rays decoupled from the filter and output an electrical signal via a photoelectric effect; and a preamplifier configured to amplify the electrical signal.

[0014] In yet another embodiment, the detector is a scintillation counter, comprising: a scintillator for receiving X-rays decoupled from the filter and generating fluorescence; and a photomultiplier tube for receiving the fluorescence generated by the scintillator and converting it into the electrical signal.

[0015] In one embodiment, the X-ray generating system includes: an X-ray tube configured to excite X-rays; a power supply for providing an operating voltage to the X-ray tube; and a cooling system for thermally balancing the X-ray tube.

[0016] In another embodiment, the device further includes a monitoring system electrically connected to the X-ray generating system, the signal detection feedback system, and the control system, and configured to monitor whether the device is functioning properly.

[0017] In yet another embodiment, the device further includes an external interface for communicating with external devices.

[0018] On the other hand, the present invention also discloses a method for outputting X-rays. The method includes: generating X-rays to be output; acquiring and detecting the X-rays to obtain an intensity signal of the X-rays to be output; performing parameter control on the generation of the X-rays based on the intensity signal to achieve feedback adjustment of the X-rays; and outputting the feedback-adjusted X-rays.

[0019] In another aspect, the present invention also discloses a computer-readable storage medium having stored thereon program instructions for outputting X-rays, which, when executed by a processor, cause the above-described method to be implemented.

[0020] As can be seen from the above-described solutions and embodiments, the present invention employs a direct feedback system at the output end of the X-ray source and introduces transmission and other factors during the direct monitoring of signal intensity. Therefore, compared with indirect control methods such as stabilization and feedback through voltage and current, the solution of the present invention provides more direct and accurate monitoring of the output results, thereby achieving better suppression of the influence of intensity instability factors other than voltage and current.

[0021] Furthermore, compared to existing X-ray source power supply and voltage feedback systems, the device of this invention exhibits better suppression of output signal fluctuations caused by external factors such as temperature and humidity, and also demonstrates greater timeliness and higher stability. Because this invention enables the X-ray tube to output more stable X-rays, it has broader applications in various fields. For example, in fields such as fluorescence spectroscopy, intensity-feedback X-ray sources allow instruments to obtain more stable sampling spectra, thereby acquiring more accurate qualitative and quantitative analysis data. Additionally, for light source-sensitive experimental systems such as ED-XRF and WD-XRF, the solution of this invention provides a more stable X-ray source, thus improving the accuracy of the detection data. Attached Figure Description

[0022] The above and other objects, features, and advantages of exemplary embodiments of the present invention will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the invention are illustrated by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0023] Figure 1 This is a structural block diagram illustrating an apparatus for outputting X-rays according to an embodiment of the present invention;

[0024] Figure 2 This is a detailed structural block diagram illustrating an apparatus for outputting X-rays according to an embodiment of the present invention;

[0025] Figure 3 This is a structural diagram illustrating the beam splitting system of a device according to an embodiment of the present invention;

[0026] Figure 4 This is a structural diagram illustrating a scintillator detector system according to an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram illustrating the structure of an apparatus for outputting X-rays according to an embodiment of the present invention; and

[0028] Figure 6 This is a flowchart illustrating a method for outputting X-rays according to an embodiment of the present invention. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0030] Figure 1 This is a structural block diagram illustrating an apparatus 100 for outputting X-rays according to an embodiment of the present invention.

[0031] like Figure 1 As shown, the device 100 for outputting X-rays according to the present invention may include an X-ray generating system 110, a signal detection and feedback system 120, and a control system 130. Specifically, the X-ray generating system may be, for example, an X-ray tube, which can generate X-rays under the drive of a high-voltage power supply to meet the needs of various fields such as industrial production and medicine. Further, the signal detection and feedback system is used to collect and detect X-rays from the aforementioned X-ray generating system to obtain and feedback intensity signals of the X-rays. The control system may have both device interaction and feedback control functions, and may be equipped with an external interface to output detector sampling signals, facilitating real-time monitoring by the user and allowing the system parameters to be changed according to different needs.

[0032] As is known to those skilled in the art, the performance of raw X-rays generated by an X-ray tube is unstable due to factors such as temperature, humidity, and power supply. Therefore, this invention designs a signal detection feedback system to receive and detect raw X-rays, thereby obtaining their performance information, such as intensity information, and feeding this intensity information back to the control system. Next, the control system of this invention receives the intensity signal of the X-rays fed back by the signal detection feedback system and performs parameter control on the X-ray generating system based on this intensity signal, such as adjusting the emission power of the X-ray tube, thereby achieving feedback regulation of the X-rays generated by the X-ray generating system. Finally, the device of this invention sends the feedback-regulated X-rays to an external application system for further processing and / or application.

[0033] Figure 2 This is a detailed structural block diagram illustrating an apparatus 200 for outputting X-rays according to an embodiment of the present invention. It will be understood that... Figure 2 The detailed structural block diagram of the device 200 for outputting X-rays shown is as follows: Figure 1 A further detailed embodiment of the structural block diagram of the device 100 for outputting X-rays shown, and Figure 2 Related structures and Figure 1 A corresponding relationship is formed, therefore Figure 1 The description of its composition and structure also applies to Figure 2 A description of the relevant structures within. For example, Figure 2 The X-ray generation system 210, signal detection feedback system 220, and control system 230 can respectively correspond to Figure 1 The X-ray generation system 110, signal detection and feedback system 120, and control system 130 are included. In addition, relative to... Figure 1 , Figure 2 It further includes a monitoring system 240 and a beam splitting system 250.

[0034] like Figure 2As shown, the device 200 for outputting X-rays according to the present invention may include an X-ray generating system 210, a signal detection and feedback system 220, a control system 230, a monitoring system 240, and a beam splitting system 250. Further, the X-ray generating system may include an X-ray tube, a power supply, and a cooling system. Specifically, the X-ray tube is used to excite and generate X-rays, and it may include a cathode, an anode, a cathode head, and an anode body. The cathode is a filament for emitting electrons, while the anode is a target material for receiving electron bombardment, which can suppress electrons and thus emit X-rays. As one embodiment, the cathode head of the X-ray tube can serve as a filament support and has the function of protecting the filament and focusing electrons; while the anode body can be used to support the target material and transfer the target's heat. X-ray tubes have different types according to different classification methods. Specifically, according to the different ways of generating electrons, X-ray tubes can be divided into gas-filled tubes and vacuum tubes; according to the different sealing materials, they can be divided into glass tubes, ceramic tubes, and metal-ceramic tubes; in addition, according to different applications, X-ray tubes can be divided into medical X-ray tubes and industrial X-ray tubes.

[0035] In one embodiment, the power supply of the X-ray generating system provides an operating voltage to the X-ray tube. Specifically, this power supply can be a high-voltage power supply, with its positive terminal connected to the anode of the X-ray tube and its cathode connected to the cathode of the X-ray tube. Further, for temperature control of the X-ray generating system, the X-ray generating system of the present invention may also include a cooling system for thermally balancing the X-ray tube. Preferably, this cooling system may be, for example, a water-cooling system.

[0036] In one embodiment, the signal detection feedback system 220 of the present invention may include a filter 221 and a detector system, wherein the detector system may include a detector 222 and a preamplifier 223. Further, the filter is used to decouple the X-rays separated by the spectroscopic system. Specifically, the present invention employs two filters in conjunction with spectral compression curve technology to achieve decoupling of the sampled signal. The filters are designed with different thicknesses according to the required spectrum to improve the peak-to-background ratio and enhance analytical sensitivity, thereby achieving optimal sampling performance.

[0037] In another embodiment, the detector is configured to receive X-rays decoupled from the filter and output an electrical signal related to the intensity of the X-rays via the photoelectric effect. As a specific implementation, the detector of the present invention may, for example, be a scintillation counter, which may include a scintillator and a photomultiplier tube, wherein the scintillator is used to receive the X-rays decoupled from the filter and generate fluorescence; and the photomultiplier tube is used to receive the fluorescence generated by the scintillator and convert it into the aforementioned electrical signal related to the intensity of the X-rays. The structure and operating principle of the scintillation counter will be discussed below. Figure 4The following description is provided. To increase the stability of the output electrical signal, the detector system of the present invention is further equipped with a preamplifier after the detector to amplify the electrical signal generated by the detector, thereby improving the stability of the output electrical signal.

[0038] In some application scenarios, the device for outputting X-rays according to the present invention may further include a monitoring system electrically connected to the X-ray generation system, the signal detection feedback system, and the control system, and configured to monitor whether the device and its various structural units are operating normally. Specifically, the monitoring system may include a processor and a display screen. When one or more of the X-ray generation system, the signal detection feedback system, the beam splitting system, and the control system malfunction, the monitoring system may send an alarm signal to the control system so that the control system can stop the system operation based on the alarm signal. Simultaneously, the monitoring system may also display the alarm signal on the screen in the form of graphics, text, or audio / video for user convenience. In one embodiment, the device for outputting X-rays according to the present invention may further include a beam splitting system for focusing and separating the X-rays generated by the X-ray generation system. The structure and working principle of the beam splitting system will be discussed below. Figure 3 Describe it.

[0039] Figure 3 This is a structural diagram illustrating the beam splitting system 300 of an apparatus according to an embodiment of the present invention. It should be noted that, for ease of understanding the working principle of the beam splitting system, Figure 3 The diagram also shows X-ray source 304 and X-ray detector 305.

[0040] like Figure 3 As shown, the beam splitting system 300 of this embodiment may include a collimator and a beam splitting crystal. Further, the collimator is used to focus and process the X-rays generated by the X-ray generation system; while the beam splitting crystal is used to separate and reflect X-rays of specific wavelengths to a filter; simultaneously, the beam splitting crystal can also transmit X-rays of other wavelengths for output.

[0041] In one embodiment, the spectroscopic system 300 of the present invention may include a first collimator 301, a second collimator 302, and a spectroscopic crystal 303. Further, the first collimator is used to receive and converge X-rays generated by the X-ray generation system; while the second collimator is used to converge the X-rays separated and reflected by the spectroscopic crystal. The spectroscopic crystal may, for example, be a thin spectroscopic sheet. Since the solution of the present invention only needs to collect a portion of the radiation, using a thinner spectroscopic sheet can reduce X-ray energy loss. Simultaneously, using a thinner spectroscopic sheet also helps to reduce measurement errors in the field of X-ray fluorescence spectroscopy.

[0042] During operation, the beam splitting system uses a first collimator to focus the X-rays output from the X-ray source, and through the principle of crystal diffraction, separates and reflects X-rays of specific wavelengths to the X-ray detector, while rays of other wavelengths pass through the beam splitter for further processing. Figure 3 As shown, the X-rays output from the X-ray source are focused by the first collimator and then incident on the beam splitter at an angle θ with the beam splitter. The beam splitter reflects a portion of the X-rays to the second collimator at the same angle. The second collimator then focuses the reflected wave and finally receives it by the X-ray detector.

[0043] Figure 4 This is a structural diagram illustrating a scintillator detector system 400 according to an embodiment of the present invention. It is understood that the scintillator detector system shown herein is merely exemplary and not limiting, and those skilled in the art will conceive of adding, removing, or substituting the components shown in the figure based on the teachings of the present invention.

[0044] like Figure 4 As shown, the detector system 400 of the device for outputting X-rays of the present invention can be a feedback X-ray detector system comprising a scintillation counter. The scintillation counter may include a scintillator 401, a reflective layer 402, a window 403, a semi-transparent photocathode 404, a focusing electrode 405, a dinter electrode 406, a vacuum housing 407, an anode 408, a tube socket 409, a voltage divider 410, a preamplifier 411, and a dark box 412. The entire detector system is surrounded by the dark box 412, wherein the aforementioned components such as the window, semi-transparent photocathode, focusing electrode, dinter electrode, vacuum housing, anode, and tube socket constitute a photomultiplier tube, which is used to receive the fluorescence generated by the scintillator and convert it into an electrical signal. Furthermore, to better illustrate the working principle of the scintillation counter, Figure 4 The image also shows the photoelectron trajectory 413 and the excited electron 414. The working principle of this detector system is briefly described below.

[0045] First, X-rays emitted from the X-ray tube pass through a spectrometer and filters into the scintillator, where the incident X-rays ionize or excite the atoms in the scintillator. Further, the excited atoms de-excite and emit fluorescence in the visible light range. Then, the fluorescent photons are collected at the photocathode of the photomultiplier tube and emit photoelectrons through the photoelectric effect; their trajectories can be... Figure 4The photoelectron trajectory 413 is shown. Subsequently, the photoelectrons move within the photomultiplier tube, colliding and multiplying. Finally, an electrical signal is output from the anode output circuit of the photomultiplier tube. Furthermore, to increase the stability of the output electrical signal, a preamplifier can be placed at the tail of the photomultiplier tube to amplify the signal before outputting it from a multi-channel or single-channel output port. Based on the above description of the detector system, it can be understood that the detector system used in this invention has advantages such as good linearity, excellent time characteristics, and high detection efficiency.

[0046] Figure 5 This is a schematic diagram illustrating the structure of an apparatus 500 for outputting X-rays according to an embodiment of the present invention. It is understood that the apparatus 500 shown herein is merely exemplary and not limiting, and those skilled in the art will conceive of adding, removing, or replacing the components shown in the figure based on the teachings of the present invention.

[0047] like Figure 5 As shown, the device 500 for outputting X-rays according to the present invention may include an X-ray tube 501, a high-voltage power supply 502, a beam splitter 503, a filter 504, a detector system 505 (internally including components such as a scintillator, a photomultiplier tube, and a preamplifier), a control system 506, an external interface 507, a monitoring system 508, a beam splitter control console 509, a filter control console 510, a high-voltage cable 511, a feedback line 512, a data transmission line 513, and a housing 514. The following description, in conjunction with... Figure 5 The working principle of the device 500 for outputting X-rays according to the present invention is briefly described below.

[0048] First, the X-ray tube emits X-rays under the excitation of a high-voltage power supply. Then, a beam splitter receives the X-rays, separates specific wavelengths, and reflects them to the detector system. Simultaneously, the beam splitter transmits the remaining wavelengths of X-rays for further processing. Subsequently, a filter decouples the X-rays reflected by the beam splitter and sends them to the detector system. Next, the scintillator in the detector system, excited by the X-rays, generates excited atoms, which then emit fluorescence in the visible light range. After the fluorescent photons collide and multiply, an electrical signal associated with the X-ray intensity information (i.e., an intensity signal of one form in this invention) is output at the anode of the photomultiplier tube. This electrical signal is amplified and stabilized by a preamplifier and then fed back to the control system via a feedback circuit.

[0049] Next, the control system analyzes and processes the received electrical signals to adjust the high-voltage power supply and thus control the emission intensity of the X-ray tube. Furthermore, the control system can also control the performance parameters of the beam splitter and filter via the beam splitter and filter control consoles, thereby controlling the output X-rays. Throughout the operation of the device, the monitoring system continuously monitors all parts and units of the device. When a fault is detected, an alarm message is sent to the customer for timely notification.

[0050] In one embodiment, the device for outputting X-rays according to the present invention may further include an external interface for communication between the transmitting device and external devices. Further, the external interface may be, but is not limited to, wired or wireless interfaces such as USB, serial, coaxial cable, Bluetooth, and Wi-Fi. Through these interfaces, the device of the present invention can interconnect with various devices such as personal computers, servers, and host computers.

[0051] Figure 6 This is a flowchart illustrating a method 600 for outputting X-rays according to an embodiment of the present invention.

[0052] like Figure 6 As shown, the process of the method 600 for outputting X-rays according to the present invention begins at step S601. At this step, X-rays to be output are generated. Specifically, X-rays can be generated using the aforementioned X-ray generating system, wherein the X-ray tube of the X-ray generating system emits X-rays under the drive of a high-voltage power supply. Next, the process of method 600 proceeds to step S602. At this step, the X-rays are acquired and detected to obtain an intensity signal regarding the X-rays to be output. Specifically, the aforementioned signal detection feedback system can be used to acquire and detect the X-rays from the X-ray generating system to obtain and feed back an intensity signal regarding the X-rays to the control system.

[0053] Subsequently, method 600 executes step S603. At this step, the generation of X-rays is parameter-controlled based on the intensity signal to achieve feedback regulation of the X-rays. Specifically, the aforementioned control system can be used to analyze and process the received intensity signal, and based on the processing results, control the high-voltage power supply, the beam splitter control console, and / or the filter control console, thereby controlling the power supply voltage, the performance parameters of the beam splitter and / or the filter, and thus controlling the output X-rays. Finally, the process of method 600 terminates at step S604. At this step, the feedback-regulated X-rays are output for further processing in medical or industrial fields.

[0054] Based on the above description, it can be understood that the X-ray output device of the present invention achieves direct detection of X-ray intensity by incorporating a direct intensity feedback loop before X-ray emission and employing a dual-filter combination with fast detector technology. Furthermore, the device rapidly acquires analog signals through a preamplifier and, after precise decoupling and control processes, analyzes whether the intensity of the output X-rays is adjusted via voltage or target current. Next, the device uses the feedback results to adjust the high-voltage power supply and / or target current, thereby achieving stable X-ray intensity output.

[0055] The above description of the simplified steps of method 600 is for illustrative and concise purposes only. However, depending on the application scenario, method 600 may additionally include other steps, such as specific steps for detecting and processing the acquired X-rays. In other words, method 600 may also include... Figures 1-5 The various specific operational steps described above. Furthermore, based on the above description, those skilled in the art will understand that the above-described method of the present invention can also be assisted by software instructions. Therefore, the present invention also discloses a computer-readable storage medium on which program instructions for outputting X-rays can be stored, which, when executed by a processor, cause the implementation of method 600 and its various additional steps.

[0056] It should be understood that when the terms "first," "second," "third," and "fourth," etc., are used in the claims, specification, and drawings of this invention, they are only used to distinguish different objects and not to describe a specific order. The terms "comprising" and "including" used in the specification and claims of this invention indicate the presence of the described features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or collections thereof.

[0057] It should also be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in this specification and claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations.

[0058] As used in this specification and claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrase "if determined" or "if [described condition or event] is detected" may be interpreted, depending on the context, as "once determined," "in response to determination," "once [described condition or event] is detected," or "in response to detection of [described condition or event]."

[0059] While the embodiments of the present invention are described above, these are merely examples for the purpose of facilitating understanding of the invention and are not intended to limit the scope or application scenarios of the invention. Any person skilled in the art can make any modifications and changes in form and detail of the implementation without departing from the spirit and scope disclosed herein; however, the patent protection scope of the present invention shall still be determined by the scope defined in the appended claims.

Claims

1. An apparatus for outputting X-rays, comprising: An X-ray generating system configured to generate X-rays; A signal detection feedback system configured to acquire and detect X-rays from the X-ray generating system to obtain and feedback an intensity signal of the X-rays; and The control system is configured for: Receive the intensity signal of X-rays fed back by the signal detection feedback system; and The parameters of the X-ray generating system are controlled based on the intensity signal to achieve feedback adjustment of the X-rays generated by the X-ray generating system. The control system is also configured to analyze and process the intensity signal it receives, and control the performance parameters of the beam splitter crystal and / or filter through the beam splitter control console and / or filter control console according to the processing results, thereby realizing the control of the output X-rays; The device also includes a beam-splitting system for focusing and separating the X-rays generated by the X-ray generating system; The beam splitting system includes: a collimator for focusing and processing X-rays generated by the X-ray generating system; and a beam splitting crystal for separating and reflecting X-rays of a specific wavelength to the signal detection feedback system, while transmitting and outputting X-rays of other wavelengths, wherein the beam splitting crystal is a beam splitting sheet. The signal detection feedback system includes: A filter configured to decouple X-rays separated and reflected by the spectroscopic crystal, wherein the filter employs a dual-path filter and utilizes spectral compression curve technology to achieve decoupling, and the filter is designed with different thicknesses according to the desired spectrum; and A detector system configured to process X-rays decoupled from the filter in order to output an electrical signal related to the intensity of the X-rays.

2. The apparatus of claim 1, wherein the collimator comprises: A first collimator is used to receive and converge the X-rays generated by the X-ray generating system; as well as The second collimator is used to converge the X-rays that have been separated and reflected by the beam splitter crystal.

3. The apparatus of claim 1, wherein the detector system comprises: A detector configured to receive X-rays decoupled from the filter and output the electrical signal via the photoelectric effect; as well as A preamplifier configured to amplify the electrical signal.

4. The apparatus of claim 3, wherein the detector is a scintillation counter, comprising: A scintillator, which receives X-rays decoupled from the filter and generates fluorescence; as well as A photomultiplier tube is used to receive the fluorescence generated by the scintillator and convert it into the electrical signal.

5. The apparatus of claim 1, wherein the X-ray generating system comprises: An X-ray tube, configured to excite X-rays; A power supply, which provides the operating voltage for the X-ray tube; as well as A cooling system is used to thermally balance the X-ray tube.

6. The apparatus according to claim 1 further includes a monitoring system electrically connected to the X-ray generating system, the signal detection feedback system, and the control system, and configured to monitor whether the apparatus is operating normally.

7. The apparatus according to any one of claims 1 to 6 further includes an external interface for communicating with external devices.

8. A method for outputting X-rays, comprising: The X-rays to be output are generated by an X-ray generation system; The X-rays are acquired and detected by a signal detection feedback system to obtain an intensity signal of the X-rays to be output. The control system controls the generation of X-rays based on the intensity signal to achieve feedback adjustment of the X-rays; and the control system analyzes and processes the intensity signal it receives, and controls the performance parameters of the beam splitter and / or filter through the beam splitter control console and / or filter control console according to the processing results, thereby achieving control of the output X-rays. Output X-rays after feedback adjustment; The method further includes: The X-rays generated by the X-ray generating system are focused and separated by a spectrophotometer. The beam splitting system includes a collimator and a beam splitting crystal; the collimator focuses and processes the X-rays generated by the X-ray generation system; the beam splitting crystal separates and reflects X-rays of a specific wavelength to the signal detection feedback system, while transmitting and outputting X-rays of other wavelengths; wherein the beam splitting crystal is a beam splitting thin film. The signal detection feedback system includes a filter and a detector system. The X-rays separated and reflected by the spectroscopic crystal are decoupled by the filter. The filter uses two filters and employs spectral compression curve technology to achieve decoupling. The filter is designed with different thicknesses according to the required spectrum. The detector system processes the X-rays decoupled by the filter to output an electrical signal related to the intensity of the X-rays.

9. A computer-readable storage medium having stored thereon program instructions for outputting X-rays, which, when executed by a processor, cause the method of claim 8 to be implemented.

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