Laser shock microforming pressurization and size expansion device and method

Abstract

The present invention discloses a laser impact microforming pressurization and size widening device and method, and relates to the field of laser processing microforming. The device includes a laser loading system, a pressurization and size widening device, a centering system, a control system, and a forming system; the method utilizes the radiation absorption layer of the laser loading system to generate shock wave pressure, which is transmitted through a liquid medium to drive the pressurized rubber punch with different diameters at the upper and lower ends to move, thereby increasing the liquid pressure, and realizing efficient and low-cost processing and forming of parts with complex fine features and difficult-to-form materials. The method can form a fine structure with a size below the minimum laser spot diameter, broadens the size range of the formed part, and reduces the requirements for the laser spot accuracy. The multi-layer conical high-pressure liquid chamber design can not only avoid the rupture of the liquid chamber, but also ensure the variable pressurization ratio of the pressurization device.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser shock metal foil micro-forming, and is particularly suitable for laser shock forming of difficult-to-form material parts with complex fine features and morphology sizes smaller than the minimum spot diameter. More specifically, it is a laser shock micro-forming pressurization and size expansion device and method. Background Art

[0002] In recent years, with the continuous development of micro-electromechanical, biomedical, and aerospace fields, the demand for miniaturized products has increased, and the miniaturization of products has led to the increasing application of parts with complex and fine features such as fillets and chamfers. When forming the above parts, the existing plastic processing technologies such as micro-punching, micro-drawing, and micro-bending have low forming efficiency and are significantly affected by the size effect, resulting in low forming accuracy.

[0003] Laser shock microforming has significant advantages in the forming of micro parts. Its laser energy is precisely controllable and the forming accuracy is high. The strain rate is high, which significantly improves the forming limit of the material and reduces the occurrence of defects such as necking and cracking. The pulsed laser replaces the rigid punch, effectively avoiding the problem of punch manufacturing and centering. However, the forming effect of the traditional laser shock forming process for parts of difficult-to-form materials with complex and fine features needs to be improved. For example, patent CN106077216B uses soft film as a flexible punch for laser shock forming; patent CN107552947B uses laser pulses as an energy source and uses soft film to compress liquid to generate impact pressure, thereby realizing microforming of thin plates. Due to the limitation of the fluidity of the soft film, the shock wave pressure of the above-mentioned traditional laser shock forming process is relatively small, and the forming effect of difficult-to-form parts of materials with large thickness and complex and fine features is not good. In addition, since the minimum spot diameter of the fixed lens is limited by the spot effect of balanced diffraction and spherical aberration, there is a minimum value. The existing laser shock forming process is difficult to form tiny features below the minimum spot diameter. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention proposes a laser shock microforming pressurization and size expansion device and method.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A laser impact micro-forming pressurization and size widening device comprises a laser loading system, a pressurization and size widening device, a centering system, a control system and a forming system. The multi-layer high-pressure liquid chamber system is a layered design of a first layer of high-pressure liquid chamber, a second layer of high-pressure liquid chamber, a third layer of high-pressure liquid chamber and a fourth layer of high-pressure liquid chamber; a three-dimensional mobile platform is connected to the base, an outer mold is connected to the upper side of the three-dimensional mobile platform, an inner mold with micro features is arranged in the outer mold, a workpiece to be processed is placed on the upper side of the inner mold, the first layer of high-pressure liquid chamber, the second layer of high-pressure liquid chamber, the third layer of high-pressure liquid chamber and the fourth layer of high-pressure liquid chamber are sequentially connected from the outside to the inside and combined into a cylinder with a circular hole in the center, and the A cylinder with a circular hole in the center is placed on the upper side of the workpiece to be processed, a low-pressure liquid chamber is placed on the upper side of the cylinder with a circular hole in the center, a pressurizing and size widening rubber punch is a combined cylinder with a large diameter at the upper end and a small diameter at the lower end, the upper end of the pressurizing and size widening rubber punch is slidably connected to the low-pressure liquid chamber, the lower end of the pressurizing and size widening rubber punch is slidably connected to the circular hole of the cylinder with a circular hole in the center, the constraint layer is located on the upper side of the absorption layer, the absorption layer is located on the upper side of the low-pressure liquid chamber, a blank holder is pressed on the constraint layer, a fastening bolt passes through the blank holder, the lower end of the fastening bolt is threadedly connected to the outer mold, a lens holder is fixedly connected to the upper part of the base, and a focusing lens is mounted on the lens holder;

[0007] There is a liquid medium between the low-pressure liquid chamber, the pressurizing and size-widening rubber punch and the absorbing layer, and there is a liquid medium between the first-layer high-pressure liquid chamber, the pressurizing and size-widening rubber punch and the workpiece to be processed.

[0008] Furthermore, the laser loading system includes a pulse laser, a reflector, a lens holder, a focusing lens and a base; the lens holder is fixedly connected to the upper part of the base, and the focusing lens is installed on the lens holder and is located on the optical path of the laser after being reflected by the reflector; the lens holder is installed on the base; and the reflector is at 45° with the pulse laser.

[0009] Furthermore, the centering system includes a CCD sensor, an image collector, a computer and a three-dimensional mobile platform; the CCD sensor is connected to the image collector and the computer in sequence.

[0010] Furthermore, the control system includes a laser controller, a three-dimensional mobile platform controller and a hydraulic controller, and the laser controller, the three-dimensional mobile platform controller and the hydraulic controller are all connected to the computer;

[0011] The laser controller is connected to the pulse laser;

[0012] The three-dimensional mobile platform controller is connected to the three-dimensional mobile platform;

[0013] The hydraulic controller is connected to the pump, the one-way valve and the stop valve in sequence.

[0014] Furthermore, the forming system is used to form the workpiece to be processed; the pulse laser penetrates the constraint layer and the radiation absorption layer; the blank holder is connected to the outer mold under the action of the fastening bolts, and the blank holder is pressed on the constraint layer; the shock wave pressure is matched with the inner mold with micro features through the pressurization and size widening device.

[0015] Furthermore, the high-pressure liquid chamber composed of the first layer of high-pressure liquid chamber, the second layer of high-pressure liquid chamber, the third layer of high-pressure liquid chamber and the fourth layer of high-pressure liquid chamber is a layered conical structure.

[0016] Furthermore, the pressure-boosting and size-widening rubber punch is a combined cylinder with a large diameter at the upper end and a small diameter at the lower end, and is made of rubber material.

[0017] Furthermore, the liquid medium is water or hydraulic oil having good fluidity and force transmission properties.

[0018] A processing method using a laser shock microforming pressurization and size widening device for processing, the method comprising the following steps:

[0019] S1: Alignment of the center of the light spot and the liquid chamber: The laser loading system emits a debugging light, and the CCD sensor records the relative position of the center of the debugging light spot and the center of the liquid chamber. The image acquisition device processes and inputs the image into the computer, and the computer issues a command to drive the three-dimensional mobile platform to complete the alignment of the center of the light spot and the center of the liquid chamber; turn off the laser; take out the low-pressure liquid chamber, the first-layer high-pressure liquid chamber, the second-layer high-pressure liquid chamber, the third-layer high-pressure liquid chamber, and the fourth-layer high-pressure liquid chamber in turn;

[0020] S2: Forming device construction: Place the workpiece to be processed into the inner mold with micro features; place the fourth layer high-pressure liquid chamber, the third layer high-pressure liquid chamber, the second layer high-pressure liquid chamber, the first layer high-pressure liquid chamber, and the low-pressure liquid chamber on the workpiece to be processed in sequence; place the small-diameter cylindrical end of the pressurized and dimensionally widened rubber punch in the first layer high-pressure liquid chamber, and the large-diameter cylindrical end in the low-pressure liquid chamber; place the absorption layer and the constraint layer on the low-pressure liquid chamber in sequence; connect the blank holder to the outer mold with fastening bolts; the hydraulic controller controls the pump and the one-way valve to cooperate in loading the liquid medium; after filling, send a signal to the hydraulic controller to control the pump and the stop valve to close and stop loading;

[0021] S3: Workpiece laser impact micro-forming: The pulsed laser is turned on, and the emitted laser passes through the reflector, focusing lens, and constraint layer and then radiates the absorption layer; the absorption layer generates a plasma explosion to compress the liquid medium in the low-pressure liquid chamber to generate shock wave pressure, which drives the pressurization and size-widening rubber punch to move, thereby compressing the liquid in the first layer of high-pressure liquid chamber, increasing the fluid pressure, and relying on the good fluidity of the liquid medium to complete the forming of the workpiece to be processed;

[0022] S4: Disassembly of forming device and removal of workpiece: turn off the laser, and the hydraulic controller controls the pump to discharge the liquid medium; unscrew the fastening bolts, and remove the edge holding ring, constraint layer, absorption layer, low-pressure liquid chamber, pressurization and size widening rubber punch, first-layer high-pressure liquid chamber, second-layer high-pressure liquid chamber, third-layer high-pressure liquid chamber and fourth-layer high-pressure liquid chamber in turn; take out the processed workpiece; and then start the next cycle from S2.

[0023] The beneficial effects produced by the present invention are:

[0024] 1. The laser shock microforming pressurization and size expansion device and method proposed in the present invention adopts liquid medium to transmit shock wave pressure, and drives the rubber punch with different diameters at the upper and lower ends to move to increase the shock wave pressure. It can realize the efficient and low-cost processing and forming of difficult-to-form material parts with complex and fine features such as fillets and chamfers and sizes smaller than the minimum spot diameter.

[0025] 2. The present invention broadens the size range of laser impact forming parts and reduces the dependence on laser manufacturing accuracy. Due to the attenuation of the laser, it is easy to cause difficulty in accurate focusing when used for too long, the actual irradiation area is too large, the energy cannot be concentrated, and the forming effect is poor. After the size expansion effect of the pressurization and size expansion device and the pressure equalization effect of the liquid medium, the energy can be concentrated, thereby obtaining a good forming effect;

[0026] 3. The multi-layer high-pressure liquid chamber design of the present invention can, on the one hand, cause a slight lateral displacement along the contact surface to withstand the high-pressure liquid pressure after the pressurization, thereby avoiding the risk of rupture that is easy to occur in a single-layer structure; on the other hand, by replacing the first layer of high-pressure liquid chamber, not only can the area ratio between the upper and lower bottom surfaces of the rubber punch be changed to obtain different pressurization ratios, but also the forming of fine features of different sizes can be completed, thereby improving the adaptability of the device; BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0028] Figure 1 It is a laser shock microforming system with a pressurization and size widening device;

[0029] Figure 2 yes Figure 1 Schematic diagram of the pressurization and size widening devices involved;

[0030] Figure 3 yes Figure 1 Schematic diagram of the three-dimensional structure of the pressurizing and size widening device involved;

[0031] Figure 4 It is a flow chart of the laser shock microforming pressurization and size expansion method of the present invention.

[0032] In the figure: base 1; three-dimensional mobile platform 2; outer mold 3; inner mold with micro features 4; workpiece to be processed 5; fourth-layer high-pressure liquid chamber 6; third-layer high-pressure liquid chamber 7; second-layer high-pressure liquid chamber 8; first-layer high-pressure liquid chamber 9; low-pressure liquid chamber 10; liquid medium 11; pressurization and size widening rubber punch 12; fastening bolt 13; pressure ring 14; lens bracket 15; stop valve 16; pump 17; absorption layer 18; constraint layer 19; one-way valve 20; hydraulic controller 21; computer 22; three-dimensional mobile platform controller 23; CCD sensor 24; image collector 25; focusing lens 26; laser controller 27; reflector 28; pulse laser 29. DETAILED DESCRIPTION

[0033] In order to further understand the present invention, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited thereto.

[0034] Combined with Figure 1-3As shown, a three-dimensional moving platform 2 is connected to the base 1, and an outer mold 3 is connected to the upper side of the three-dimensional moving platform 2. The three-dimensional moving platform 2 is used to drive the outer mold 3 to move to complete the alignment of the center of the light spot and the center of the liquid chamber. The inner mold 4 with micro features is arranged in the outer mold 3, and the workpiece 5 to be processed is placed on the upper side of the inner mold 4. The upper side of the inner mold 4 with micro features has the required micro features. When the workpiece 5 to be processed is pressed down on the inner mold 4 with micro features, micro features are processed on the workpiece 5 to complete the forming of the workpiece 5 to be processed. The first layer of high-pressure liquid chamber 9 and the second layer The high-pressure liquid chamber 8, the third-layer high-pressure liquid chamber 7 and the fourth-layer high-pressure liquid chamber 6 are sequentially connected from the outside to the inside and combined into a cylinder with a circular hole in the center. The cylinder with a circular hole in the center is placed on the upper side of the workpiece 5 to be processed, and the low-pressure liquid chamber 10 is placed on the upper side of the cylinder with a circular hole in the center. The pressurization and size widening rubber punch 12 is a combined cylinder with a large diameter at the upper end and a small diameter at the lower end. The high-pressure liquid chamber composed of the first-layer high-pressure liquid chamber 9, the second-layer high-pressure liquid chamber 8, the third-layer high-pressure liquid chamber 7 and the fourth-layer high-pressure liquid chamber 6 is a layered conical structure, and a small lateral displacement can occur along the contact surface. The design of multiple high-pressure liquid chambers allows for slight lateral displacement along the contact surface to withstand the high-pressure liquid pressure after the pressurization, thereby avoiding the risk of rupture that is prone to occur in a single-layer structure; the second is that by replacing the first layer of high-pressure liquid chambers, not only can the area ratio between the upper and lower bottom surfaces of the rubber punch be changed to obtain different pressurization ratios, but also the forming of fine features of different sizes can be completed, thereby improving the adaptability of the device. The first layer of high-pressure liquid chamber 9, the second layer of high-pressure liquid chamber 8, the third layer of high-pressure liquid chamber 7 and the fourth layer of high-pressure liquid chamber 6 are all solid metals, and are integrated into one by the force and gravity applied by the low-pressure liquid chamber 10. They are not connected by welding or other processes, are free from each other, and can be easily disassembled and removed from the top, and the pressurization and size of the rubber punch are widened. The upper end of 12 is slidably connected to the low-pressure liquid chamber 10, and the lower end of the pressurizing and size widening rubber punch 12 is slidably connected to the circular hole of the cylinder with a circular hole in the center. The constraint layer 19 is located on the upper side of the absorption layer 18, and the absorption layer 18 is located on the upper side of the low-pressure liquid chamber 10. The blank holder 14 is pressed on the constraint layer 19, and the fastening bolt 13 passes through the blank holder 14. The lower end of the fastening bolt 13 is threadedly connected to the outer mold 3. The fastening bolt 13 is rotated to move downward so that the fastening bolt 13 is pressed against the blank holder 14, and then the blank holder 14 is pressed down on the constraint layer 19. The lens bracket 15 is fixedly connected to the upper part of the base 1, and the focusing lens 26 is installed on the lens bracket 15. The lens bracket 15 plays a role in supporting the focusing lens 26;

[0035] A liquid medium 11 is stored between the low-pressure liquid chamber 10, the pressurization and size widening rubber punch 12 and the absorption layer 18, and a liquid medium 11 is stored between the first-layer high-pressure liquid chamber 9, the pressurization and size widening rubber punch 12 and the workpiece 5 to be processed, and the liquid medium 11 is liquid;

[0036] The plasma explosion of the absorption layer 18 compresses the liquid medium 11 in the low-pressure liquid chamber 10 to generate shock wave pressure. The shock wave pressure propagates in the liquid medium 11 and acts on the compression, pressurization and size widening rubber punch 12, generating downward pressure, pushing the punch 12 downward, compressing the liquid on the lower surface of the compression, pressurization and size widening rubber punch 12, thereby increasing its pressure. When the pressure exceeds the dynamic yield strength of the workpiece 5, the workpiece deforms.

[0037] Since the pressurized and dimensionally widened rubber punch 12 is divided into two ends with different areas, the large area is the low-pressure end, and the small area is the high-pressure end, the low-pressure pressure generated by the plasma explosion will push the pressurized and dimensionally widened rubber punch 12 to move downward and compress the liquid column at the high-pressure end to generate high pressure. The high-pressure pressure pushes the liquid medium 11 with good fluidity to move downward, pushing the workpiece 5 to be processed into shape.

[0038] Combined with Figure 1 As shown, the laser shock microforming pressurization and size widening device of the present invention comprises a laser loading system, a pressurization and size widening device, a centering system, a control system and a forming system;

[0039] Combined with Figure 1 As shown, the laser loading system includes a pulse laser 29, a reflector 28, a lens bracket 15, a focusing lens 26 and a base 1; the angle between the reflector 28 and the pulse laser 29 is 45°, thereby reflecting the horizontal laser into a vertical laser; the focusing lens 26 is installed on the lens bracket 15 and is located on the optical path of the laser after being reflected by the reflector 28; the lens bracket 15 is installed on the base 1.

[0040] Combined with Figure 2 and 3As shown, the pressurizing and size widening device includes a liquid medium 11, a pressurizing and size widening rubber punch 12 and a multi-layer high-pressure liquid chamber system; the liquid medium 11 is a fluid such as water or hydraulic oil with good fluidity and force transmission properties, which is used to transmit shock wave pressure; under the action of a hydraulic controller 21, a pump 17, a one-way valve 20 and a stop valve 16, the loading and unloading of the liquid medium 11 are controlled; the pressurizing and size widening rubber punch 12 is a combined cylinder made of rubber material with a large diameter at the upper end and a small diameter at the lower end, which is used to pressurize and widen the size range; the multi-layer high-pressure liquid chamber The system is designed in layers with a first-layer high-pressure liquid chamber 9, a second-layer high-pressure liquid chamber 8, a third-layer high-pressure liquid chamber 7 and a fourth-layer high-pressure liquid chamber 6, which are combined into a cylinder with a circular hole in the center; the design of multiple high-pressure liquid chambers can cause slight lateral displacement along the contact surface to withstand the high-pressure liquid pressure after the pressurization, avoiding the risk of rupture that is easy to occur in a single-layer structure; and by replacing the first-layer high-pressure liquid chamber, not only can the area ratio between the upper and lower bottom surfaces of the rubber punch be changed to obtain different pressurization ratios, but also the forming of fine features of different sizes can be completed, thereby improving the adaptability of the device.

[0041] Combined with Figure 1 As shown, the centering system includes a CCD sensor 24, an image collector 25, a computer 22 and a three-dimensional mobile platform 2; the CCD sensor 24 is connected to the image collector 25 and the computer 22 in sequence. The CCD sensor 24 records the relative position of the center of the debugging light spot and the center of the liquid chamber, and the image collector 25 processes and inputs it into the computer 22. The computer 22 issues an instruction to drive the three-dimensional mobile platform 2 to complete the centering of the light spot center and the center of the liquid chamber;

[0042] Combined with Figure 1 As shown, the control system includes a laser controller 27, a three-dimensional mobile platform controller 23 and a hydraulic controller 21, all of which are connected to a computer 22, and the laser controller 27, the three-dimensional mobile platform controller 23 and the hydraulic controller 21 are controlled by the computer 22; the laser controller 27 is connected to a pulse laser 29, and the laser controller 27 controls the pulse laser 29 to emit laser; the three-dimensional mobile platform controller 23 is connected to a three-dimensional mobile platform 2, and the three-dimensional mobile platform controller 23 controls the movement of the three-dimensional mobile platform 2, thereby completing the alignment of the center of the light spot and the center of the liquid chamber; the hydraulic controller 21 is connected to a pump 17, a one-way valve 20 and a stop valve 16 in sequence, and controls the loading and unloading of the liquid medium 11, and the hydraulic controller 21 controls the operation of the pump 17, the one-way valve 20 and the stop valve 16, thereby controlling the loading and unloading of the liquid medium 11.

[0043] Combined with Figure 1As shown, the forming system is used for forming a workpiece 5 to be processed whose material is a difficult-to-form material under conventional forming methods; the pulse laser penetrates the constraint layer 19 to radiate the absorption layer 18, and the absorption layer 18 generates a plasma explosion to compress the liquid medium 11 in the low-pressure liquid chamber 10 to generate shock wave pressure; the pressure ring 14 is connected to the outer mold 3 under the action of the fastening bolts 13 and pressed on the constraint layer 19; the shock wave pressure passes through the pressurization and size widening device, and cooperates with the inner mold 4 with micro features, so that the workpiece 5 to be processed undergoes plastic deformation, and forms a formed part with a size below the minimum spot diameter and with complex micro features such as fillets and chamfers.

[0044] A processing method using a laser shock microforming pressurization and size widening device for processing, the method comprising the following steps:

[0045] S1: Alignment of the light spot and the center of the liquid chamber: The laser loading system emits a debugging light, and the CCD sensor 24 records the relative position of the center of the debugging light spot and the center of the liquid chamber. The image acquisition device 25 processes and inputs the image into the computer 22, and the computer 22 issues a command to drive the three-dimensional mobile platform 2 to complete the alignment of the center of the light spot and the center of the liquid chamber; turn off the laser 29; take out the low-pressure liquid chamber 10, the first-layer high-pressure liquid chamber 9, the second-layer high-pressure liquid chamber 8, the third-layer high-pressure liquid chamber 7 and the fourth-layer high-pressure liquid chamber 6 in sequence;

[0046] S2: Building the forming device: Place the workpiece 5 to be processed into the inner mold 4 with micro features; sequentially place the fourth layer high pressure liquid chamber 6, the third layer high pressure liquid chamber 7, the second layer high pressure liquid chamber 8, the first layer high pressure liquid chamber 9, and the low pressure liquid chamber 10 on the workpiece 5 to be processed; place the small diameter cylindrical end of the pressurized and dimensionally widened rubber punch 12 in the first layer high pressure liquid chamber 9, and the large diameter cylindrical end in the low pressure liquid chamber 10; place the absorption layer 18 and the constraint layer 19 on the low pressure liquid chamber 10 in sequence; connect the blank holder 14 to the outer mold 3 with the fastening bolts 13; the hydraulic controller 21 controls the pump 17 and the one-way valve 20 to cooperate in loading the liquid medium 11; after filling, send a signal to the hydraulic controller 21 to control the pump 17 and the stop valve 16 to close and stop loading;

[0047] S3: Workpiece laser impact micro-forming: The pulse laser 29 is turned on, and the emitted laser passes through the reflector 28, the focusing lens 26, and the constrained layer 19 and then radiates the absorption layer 18; the absorption layer 18 generates a plasma explosion to compress the liquid medium 11 in the low-pressure liquid chamber 10 to generate shock wave pressure, which drives the pressurization and size widening rubber punch 12 to move, thereby compressing the liquid in the first layer of high-pressure liquid chamber 9, increasing the fluid pressure, and relying on the good fluidity of the liquid medium 11, the forming of the workpiece 5 to be processed is completed;

[0048] S4: Disassembly of the forming device and removal of the workpiece: turn off the laser 29, and the hydraulic controller 21 controls the pump 17 to discharge the liquid medium 11; unscrew the fastening bolts 13, and remove the edge holding ring 14, the constraint layer 19, the absorption layer 18, the low-pressure liquid chamber 10, the pressurization and size widening rubber punch 12, the first layer high-pressure liquid chamber 9, the second layer high-pressure liquid chamber 8, the third layer high-pressure liquid chamber 7 and the fourth layer high-pressure liquid chamber 6 in turn; take out the processed workpiece; and then start the next cycle from S2.

[0049] The embodiments are preferred implementations of the present invention, but the present invention is not limited to the above-mentioned implementations. Any obvious improvements, substitutions or modifications that can be made by personnel in this technical field without departing from the essential content of the present invention belong to the protection scope of the present invention.

Claims

1. A laser impact microforming pressurization and size widening device, comprising a laser loading system, a pressurization and size widening device, a centering system, a control system and a forming system, characterized in that: The multi-layer high-pressure liquid chamber system is a layered design of a first-layer high-pressure liquid chamber (9), a second-layer high-pressure liquid chamber (8), a third-layer high-pressure liquid chamber (7) and a fourth-layer high-pressure liquid chamber (6); a three-dimensional mobile platform (2) is connected to a base (1); an outer mold (3) is connected to the upper side of the three-dimensional mobile platform (2); an inner mold (4) with micro features is arranged in the outer mold (3); a workpiece to be processed (5) is placed on the upper side of the inner mold (4); the first-layer high-pressure liquid chamber (9), the second-layer high-pressure liquid chamber (8), the third-layer high-pressure liquid chamber (7) and the fourth-layer high-pressure liquid chamber (6) are sequentially connected from the outside to the inside and combined into a cylinder with a circular hole in the center; the cylinder with a circular hole in the center is placed on the upper side of the workpiece to be processed (5); and a low-pressure liquid chamber (10) is placed on the cylinder with a circular hole in the center. The upper side of the cylinder, the pressurizing and sizing widening rubber punch (12) is a combined cylinder with a large diameter at the upper end and a small diameter at the lower end, the upper end of the pressurizing and sizing widening rubber punch (12) is slidably connected to the low-pressure liquid chamber (10), the lower end of the pressurizing and sizing widening rubber punch (12) is slidably connected to the circular hole of the cylinder with a circular hole in the center, the constraint layer (19) is located on the upper side of the absorption layer (18), the absorption layer (18) is located on the upper side of the low-pressure liquid chamber (10), the pressure ring (14) is pressed on the constraint layer (19), the fastening bolt (13) passes through the pressure ring (14), the lower end of the fastening bolt (13) is threadedly connected to the outer mold (3), the lens bracket (15) is fixedly connected to the upper part of the base (1), and the focusing lens (26) is installed on the lens bracket (15); A liquid medium (11) is stored between the low-pressure liquid chamber (10), the pressurizing and size-enlarging rubber punch (12) and the absorbing layer (18), and a liquid medium (11) is stored between the first-layer high-pressure liquid chamber (9), the pressurizing and size-enlarging rubber punch (12) and the workpiece to be processed (5); The high-pressure liquid chamber composed of the first-layer high-pressure liquid chamber (9), the second-layer high-pressure liquid chamber (8), the third-layer high-pressure liquid chamber (7) and the fourth-layer high-pressure liquid chamber (6) is a layered conical structure.

2. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The laser loading system comprises a pulse laser (29), a reflector (28), a lens bracket (15), a focusing lens (26) and a base (1); the lens bracket (15) is fixedly connected to the upper part of the base (1); the focusing lens (26) is mounted on the lens bracket (15) and is located on the optical path of the laser after being reflected by the reflector (28); the lens bracket (15) is mounted on the base (1); the reflector (28) and the pulse laser (29) are at an angle of 45 degrees.

3. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The centering system comprises a CCD sensor (24), an image collector (25), a computer (22) and a three-dimensional mobile platform (2); the CCD sensor (24) is connected to the image collector (25) and the computer (22) in sequence.

4. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The control system comprises a laser controller (27), a three-dimensional mobile platform controller (23) and a hydraulic controller (21), and the laser controller (27), the three-dimensional mobile platform controller (23) and the hydraulic controller (21) are all connected to a computer (22); The laser controller (27) is connected to the pulse laser (29); The three-dimensional mobile platform controller (23) is connected to the three-dimensional mobile platform (2); The hydraulic controller (21) is connected to the pump (17), the one-way valve (20) and the stop valve (16) in sequence.

5. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The forming system is used to form a workpiece (5) to be processed; a pulse laser penetrates a constraining layer (19) and a radiation absorbing layer (18); the blank holder (14) is connected to an outer mold (3) under the action of a fastening bolt (13), and the blank holder (14) is pressed on the constraining layer (19); the shock wave pressure is matched with an inner mold (4) with micro features through a pressurizing and size widening device.

6. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The pressure-boosting and size-widening rubber punch (12) is a combined cylinder with a large diameter at the upper end and a small diameter at the lower end, and is made of rubber material.

7. The laser shock microforming pressurization and size expansion device according to claim 1, characterized in that: The liquid medium (11) is water or hydraulic oil having good fluidity and force transmission properties.

8. A processing method using the laser shock microforming pressurization and size widening device according to claim 1, characterized in that: The method comprises the following steps: S1: Alignment of the center of the light spot and the liquid chamber: the laser loading system emits a debugging light, the CCD sensor (24) records the relative position of the center of the debugging light spot and the center of the liquid chamber, the image acquisition device (25) processes and inputs the data into the computer (22), the computer (22) issues a command to drive the three-dimensional mobile platform (2) to complete the alignment of the center of the light spot and the center of the liquid chamber; the pulse laser (29) is turned off; the low-pressure liquid chamber (10), the first-layer high-pressure liquid chamber (9), the second-layer high-pressure liquid chamber (8), the third-layer high-pressure liquid chamber (7) and the fourth-layer high-pressure liquid chamber (6) are taken out in sequence; S2: Building the forming device: placing the workpiece to be processed (5) into the inner mold (4) with micro features; placing the fourth layer high-pressure liquid chamber (6), the third layer high-pressure liquid chamber (7), the second layer high-pressure liquid chamber (8), the first layer high-pressure liquid chamber (9), and the low-pressure liquid chamber (10) on the workpiece to be processed (5) in sequence; placing the small-diameter cylindrical end of the pressurized and dimensionally widened rubber punch (12) in the first layer high-pressure liquid chamber (9), and the large-diameter cylindrical end in the low-pressure liquid chamber (10); placing the absorption layer (18) and the constraint layer (19) on the low-pressure liquid chamber (10) in sequence; connecting the blank holder (14) to the outer mold (3) with the fastening bolts (13); the hydraulic controller (21) controls the pump (17) and the one-way valve (20) to cooperate in loading the liquid medium (11); after filling, a signal is given to the hydraulic controller (21) to control the pump (17) and the stop valve (16) to close and stop loading; S3: Workpiece laser impact micro-forming: The pulse laser (29) is turned on, and the emitted laser passes through the reflector (28), the focusing lens (26), and the constrained layer (19) and then radiates the absorption layer (18); the absorption layer (18) generates a plasma explosion to compress the liquid medium (11) in the low-pressure liquid chamber (10) to generate shock wave pressure, which drives the pressurization and size-widening rubber punch (12) to move, thereby compressing the liquid in the first layer of high-pressure liquid chamber (9), increasing the fluid pressure, and relying on the good fluidity of the liquid medium (11), the forming of the workpiece to be processed (5) is completed; S4: Disassembly of the forming device and removal of the workpiece: turn off the pulse laser (29), and the hydraulic controller (21) controls the pump (17) to discharge the liquid medium (11); unscrew the fastening bolts (13), and remove the edge holding ring (14), the constraint layer (19), the absorption layer (18), the low-pressure liquid chamber (10), the pressurization and size widening rubber punch (12), the first layer high-pressure liquid chamber (9), the second layer high-pressure liquid chamber (8), the third layer high-pressure liquid chamber (7) and the fourth layer high-pressure liquid chamber (6) in turn; remove the processed workpiece; and then enter the next cycle starting from S2.

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