A cassette inverting device

Abstract

This invention belongs to the field of wafer immersion process technology, and specifically relates to a wafer cassette flipping device. The wafer cassette includes two sets of side plates and multiple wafer fixing components arranged circumferentially between the two sets of side plates. Each wafer fixing component has a first wafer fixing groove and a second wafer fixing groove of different depths, which respectively support wafers of different sizes. Each wafer fixing component includes a main support rod with multiple protrusions linearly and equidistantly arranged on it. The first wafer fixing groove is formed on the end face of each protrusion, and the second wafer fixing groove is formed between two protrusions, with a depth greater than that of the first wafer fixing groove. This invention uses multiple sets of wafer fixing components between two sets of side plates to accommodate wafers of various sizes, achieving a simple structure, convenient fabrication, low cost, adjustability, and space saving.

Description

Technical Field

[0001] This invention belongs to the field of wafer immersion process technology, and specifically relates to a wafer cassette flipping device. Background Technology

[0002] Silicon wafers, also known as silicon ingots, are made from silicon ingots. Through specialized processes, millions of transistors can be etched onto silicon wafers, making them widely used in integrated circuit manufacturing. Currently, the manufacturing process for semiconductor devices and integrated circuits generally involves completing the front-side wafer processing first, followed by the back-side processing. Taking insulated-gate bipolar transistors (IGBTs) as an example, the front-side wafer processing typically includes front-side photolithography, front-side etching, front-side ion implantation, front-side annealing, front-side oxidation, and front-side deposition. The back-side wafer processing typically includes front-side film deposition, back-side thinning, cleaning, film removal, back-side ion implantation, back-side annealing, and back-side metallization. In these different processes, depending on the processing steps and equipment, sometimes the front side of the wafer needs to be used as the processing surface, and sometimes the back side needs to be used. Therefore, the orientation of the front and back sides of the wafer must be reversed. Even in the same wafer face processing technology, some processing equipment requires the front side of the wafer to face the wafer stage, while other processing equipment requires the back side of the wafer to face the wafer stage. Existing wafer cassettes have complex shapes, are difficult to manufacture, and have high costs. The number of wafers that a wafer cassette can hold is limited by the length of the wafer cassette, and each wafer cassette can only hold wafers of the same size, which further increases the cost and time of chip fabrication.

[0003] A wafer is a silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seed crystals. Then it is slowly pulled out to form a cylindrical single crystal silicon. After the silicon crystal rod is ground, polished and sliced, it forms a silicon wafer, which is a wafer. The wafer immersion process is one of the important production processes of wafer manufacturing. The wafer immersion process requires the wafer cassette containing the wafer to be turned over in the immersion solution.

[0004] Existing tablet cassette flipping devices require at least two driving forces to work together to flip the tablet cassette. Due to the limitation of the immersion space, the installation of the driving forces is inconvenient. In addition, two driving forces are costly and have complex motion. Summary of the Invention

[0005] To address the aforementioned problems, the present invention aims to provide a tablet cassette flipping device that solves the problems of existing tablet cassette flipping devices requiring at least two driving forces to cooperate in order to flip the tablet cassette, and the inconvenience of installing the driving forces due to the limitation of the soaking space.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A tablet cassette flipping device includes a tablet cassette frame, an active swing rod, a drive assembly, a support assembly, and a tablet cassette, wherein at least one of the tablet cassettes is mounted on the tablet cassette frame; the support assembly is disposed on the tablet cassette frame and is used to connect to an external fixed object.

[0008] The active swing arm is hinged to both sides of the disc holder, and the drive assembly is hinged to the top of the active swing arm. The drive assembly is used to connect to an external drive device.

[0009] Furthermore, the support assembly includes a connecting plate, a fixing plate, a driven swing rod, and a mounting bracket, wherein the mounting bracket is mounted on an external fixed object;

[0010] The connecting plate and one end of the driven swing rod are vertically connected by a fixing plate, the other end of the connecting plate is vertically connected to the disc holder, and the other end of the driven swing rod is hinged to the mounting bracket.

[0011] Furthermore, the drive assembly includes a hinge seat, an adjusting rod, a drive rod, and a threaded rod; wherein the hinge seat is fixedly connected to the active swing rod, one end of the adjusting rod is hinged to the hinge seat, the other end of the adjusting rod is fixedly connected to one end of the threaded rod, and the other end of the threaded rod is threadedly connected to one end of the drive rod.

[0012] Furthermore, the wafer cassette includes two sets of side plates and a plurality of wafer fixing components disposed between the two sets of side plates and distributed circumferentially. Each wafer fixing component has a first wafer fixing groove and a second wafer fixing groove of different depths, and supports wafers of different sizes through the first wafer fixing groove and the second wafer fixing groove respectively.

[0013] Furthermore, the wafer fixing assembly includes a main support rod with a plurality of protrusions arranged linearly and equidistantly on the main support rod. The first wafer fixing groove is formed on the end face of each of the protrusions, and the second wafer fixing groove is formed between two of the protrusions, and the depth of the second wafer fixing groove is greater than the depth of the first wafer fixing groove.

[0014] Furthermore, the width of the first wafer fixing groove and the second wafer fixing groove gradually decreases from the opening to the bottom; the bottom of both the first wafer fixing groove and the second wafer fixing groove is provided with elastic clamping components for assisting in clamping the wafer.

[0015] Furthermore, the elastic clamping assembly includes an elastic post and an abutment structure;

[0016] The bottom of the first wafer fixing slot and the second wafer fixing slot are provided with insertion holes. One end of the elastic post is fixedly inserted into the insertion hole, and the other end of the elastic post is provided with an abutment structure. A rough-surfaced pad is installed on the abutment structure.

[0017] Furthermore, the elastic column includes an outer tube, an annular stop, a rod, a cylindrical limiting plate, and a compression spring, wherein the opening of the outer tube is provided with an annular stop; one end of the rod passes through the annular stop and is inserted into the outer tube and connected to the cylindrical limiting plate, and the other end of the rod is connected to the abutment structure.

[0018] The compression spring is housed inside the outer sleeve, and its two ends abut against the bottom of the outer sleeve and the cylindrical limiting plate, respectively.

[0019] Furthermore, the abutting structure includes an abutting block with a V-shaped groove, and the pad is fixed to the inner wall of the V-shaped groove.

[0020] Furthermore, the side plate is a circular plate, and the side plate has a plurality of immersion liquid through holes and a plurality of fixing structures for mounting the wafer fixing assembly;

[0021] The fixing structure includes a slot and a through hole at the bottom of the slot;

[0022] Both ends of the main support rod are integrally formed with plug-in blocks, and threaded blind holes are opened on the end face of the plug-in blocks; the plug-in blocks are inserted into the inside of the slot, so that the threaded blind holes correspond to the through holes, and are locked and fixed by fixing bolts.

[0023] The tablet cassette flipping device provided in this invention has the advantages of simple structure, convenient preparation and flexible movement. It only requires one driving force to achieve tablet cassette flipping. The installation of the driving device is not limited by the soaking space, and it is easy to install and has low cost. Attached Figure Description

[0024] Figure 1 This is one of the isometric views of the cassette in an embodiment of the present invention;

[0025] Figure 2 This is a second isometric view of the cassette in an embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the wafer fixing assembly in an embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the side plate structure in an embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of the structure of the elastic clamping assembly in an embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram of the structure of the elastic column in an embodiment of the present invention;

[0030] Figure 7 This is one of the isometric views of the disc cassette flipping device in an embodiment of the present invention;

[0031] Figure 8 This is the second isometric view of the disc cassette flipping device in an embodiment of the present invention;

[0032] Figure 9 This is a schematic diagram of the structure of the disc holder in an embodiment of the present invention;

[0033] Figure 10 This is a schematic diagram of the structure of the driving component in an embodiment of the present invention;

[0034] Figure 11 This is a schematic diagram of the supporting component in an embodiment of the present invention;

[0035] In the diagram: 1. Side plate; 2. Waist hole; 3. Waist fixing assembly; 4. First wafer fixing slot; 5. Second wafer fixing slot; 6. Fixing structure; 7. Main support rod; 8. Protrusion; 9. Insertion block; 10. Immersion solution through hole; 11. Threaded blind hole; 12. Through hole; 13. Slot; 15. Countersunk hole; 16. Elastic post; 17. Insertion hole; 18. Abutment structure; 19. Pad; 20. Outer sleeve; 21. Annular stop; 22. Insertion rod; 23. 24. Cylindrical limiting plate; 25. Compression spring; 26. Abutment block; 27. V-groove; 28. Reinforcing plate; 39. Disc holder; 30. Active swing rod; 31. Hinge seat; 32. Adjusting rod; 33. Drive rod; 34. Connecting plate; 35. First fixing plate; 36. Second fixing plate; 37. Driven swing rod; 48. Mounting bracket; 49. Locking rod; 40. Locking plate; 41. Connecting rod; 42. Threaded rod; 43. Intermediate plate; 100. Disc holder. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The specific embodiments described herein are merely used to explain the present invention and are not intended to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] Another embodiment of the present invention provides a tablet cassette flipping device, which is simple in structure, easy to manufacture, low in cost, and flexible in movement. The flipping movement of the tablet cassette assembly can be realized by fixing the mounting frame and the frame and by the coordinated movement between only one reciprocating drive component and each rod.

[0038] See Figure 7 , Figure 8As shown, the cassette flipping device includes a cassette frame 31, an active swing rod 32, a drive assembly, a support assembly, and a cassette 100, wherein at least one cassette 100 is mounted on the cassette frame 31.

[0039] The support assembly is mounted on the disc tray 31 and is used to connect to an external rack.

[0040] The active swing arm 32 is hinged to both sides of the disc holder 31, and the drive assembly is hinged to the top of the active swing arm 32. The drive assembly is used to connect to an external drive device.

[0041] In this embodiment, two disc boxes 100 are installed side by side inside the disc box holder 31.

[0042] As one embodiment of the present invention, the wafer cassette 100 is a wafer cassette that can accommodate wafers of various sizes. It has a simple structure, is easy to manufacture, has low cost, is adjustable, and saves space.

[0043] In this embodiment, see Figure 1 , Figure 2 As shown, the wafer cassette 100 includes two sets of side plates 1 and a plurality of wafer fixing assemblies 3 arranged circumferentially between the two sets of side plates 1. The plurality of wafer fixing assemblies 3 are arranged in parallel, and their two ends are fixedly connected to the two sets of side plates 1 respectively. Each wafer fixing assembly 3 has a first wafer fixing groove 4 and a second wafer fixing groove 5 of different depths on its inner side, which support wafers of different sizes respectively.

[0044] See Figure 3 As shown in the embodiment of the present invention, the wafer fixing assembly 3 includes a main support rod 7, on which a plurality of protrusions 8 are linearly and equidistantly arranged. A first wafer fixing groove 4 is formed on the end face of each protrusion 8, and a second wafer fixing groove 5 is formed between two protrusions 8. The depth of the second wafer fixing groove 5 is greater than the depth of the first wafer fixing groove 4. That is, the first wafer fixing groove 4 is used to support small-sized wafers, and the second wafer fixing groove 5 is used to support large-sized wafers.

[0045] Furthermore, the widths of the first wafer fixing slot 4 and the second wafer fixing slot 5 gradually decrease from the opening to the bottom to facilitate wafer insertion and fixation. Specifically, the second wafer fixing slot 5 is formed by a wedge-shaped opening at the lower end between two adjacent protrusions 8. Therefore, without changing the length of the wafer cassette, the number of wafers that the cassette can hold is increased, allowing for the placement of two different sizes of wafers. If actual needs require a design that can accommodate more than two sizes, it is also possible. Through the combined use of the first wafer fixing slot 4 and the second wafer fixing slot 5, wafers of various sizes can be supported and fixed, such as 8-inch and 6-inch or 8-inch and 4-inch wafers.

[0046] Furthermore, the bottom of both the first wafer fixing groove 4 and the second wafer fixing groove 5 is provided with elastic clamping components for assisting in clamping the wafer. The wafer is elastically supported by the elastic clamping components to avoid damaging the wafer.

[0047] See Figure 5 As shown, in an embodiment of the present invention, the elastic clamping assembly includes an elastic post 16 and an abutment structure 18; the bottom of the first wafer fixing groove 4 and the second wafer fixing groove 5 are provided with insertion holes 17, one end of the elastic post 16 is fixedly inserted into the insertion hole 17, and the other end of the elastic post 16 is provided with an abutment structure 18. A rough-surfaced pad 19 is installed on the abutment structure 18 to protect the wafer. In this embodiment, the pad 19 is a corrosion-resistant pad made of polytetrafluoroethylene.

[0048] See Figure 6 As shown, in an embodiment of the present invention, the elastic column 16 includes an outer sleeve 20, an annular stop 21, a rod 22, a cylindrical limiting plate 23, and a compression spring 24. The annular stop 21 is provided at the opening of the outer sleeve 20. One end of the rod 22 passes through the annular stop 21 and is inserted into the outer sleeve 20, connecting to the cylindrical limiting plate 23. The other end of the rod 22 is connected to the abutment structure 18. The compression spring 24 is housed within the outer sleeve 20, with both ends abutting against the bottom of the outer sleeve 20 and the cylindrical limiting plate 23, respectively. The compression spring 24 serves as a buffer. Preferably, the diameter of the cylindrical limiting plate 23 is 1-2 mm larger than the inner diameter of the annular stop 21.

[0049] See Figure 5 As shown, in an embodiment of the present invention, the contact structure 18 includes a contact block 25, a V-shaped groove 26 is provided on the contact block 25, and a pad block 19 is fixed on the inner wall of the V-shaped groove 26. The V-shaped groove 26 further improves the support stability of the wafer.

[0050] See Figure 4 As shown, in an embodiment of the present invention, the side plate 1 is a circular plate, with a waist hole 2 in the middle. The side plate 1 also has several sets of immersion liquid through holes 10 and several sets of fixing structures 6 for mounting the wafer fixing assembly 3. In this embodiment, the fixing structure 6 includes a slot 13 and a through hole 12 disposed at the bottom of the slot 13. See also... Figure 3 As shown, the two ends of the main support rod 7 are integrally formed with plug-in blocks 9, and the end face of the plug-in block 9 is provided with threaded blind holes 11; the plug-in block 9 is inserted into the inside of the slot 13, so that the threaded blind hole 11 corresponds to the through hole 12, and is locked and fixed by fixing bolts.

[0051] Furthermore, a reinforcing plate 27 is fixed to the outer side of the main support rod 7 by fixing bolts. The reinforcing plate 27 has countersunk holes 15 at equal intervals, and the side wall of the main support rod 7 has mounting holes corresponding to the countersunk holes 15. One end of the fixing bolt passes through the countersunk hole 15 and is fixed inside the mounting hole. The strength of the film box is ensured by adding the reinforcing plate 27. The reinforcing plate 27 is made of stainless steel.

[0052] In this embodiment, the wafer is supported by the coordinated use of three sets of wafer fixing components 3, and the wafer is fixed and positioned by the coordinated use of elastic clamping components to prevent the wafer from falling out of the wafer cassette. This arrangement of the wafer fixing components 3 between the two sets of side plates 1, compared to existing wafer cassettes with outer shells, ensures that the wafer is fully in contact with the immersion solution during processes such as wafer soaking, guaranteeing thorough immersion.

[0053] One embodiment of the present invention provides a wafer cassette capable of accommodating wafers of various sizes. It comprises several sets of wafer fixing components arranged between two sets of side plates, and a first wafer fixing slot and a second wafer fixing slot designed for the wafer fixing components. This design allows for the precise clamping of wafers of different specifications. The structure is simple, easy to manufacture, low in cost, adjustable, and space-saving, accommodating wafers of multiple sizes. Compared to existing wafer cassettes with outer shells, this design ensures that the wafers are fully in contact with the immersion solution during processes such as wafer soaking, guaranteeing thorough immersion.

[0054] See Figure 11 As shown, in an embodiment of the present invention, the support assembly includes a connecting plate 36, a fixing plate, a driven swing rod 39, and a mounting frame 40, wherein the mounting frame 40 is disposed on a frame or other external fixed object; one end of the connecting plate 36 and the driven swing rod 39 are vertically connected through the fixing plate, the other end of the connecting plate 36 is vertically connected to the disc tray 31, and the other end of the driven swing rod 39 is hinged to the mounting frame 40.

[0055] Specifically, the fixing plate includes a first fixing plate 37 and a second fixing plate 38. The first fixing plate 37 is disposed on the top of the connecting plate 36. One side of the first fixing plate 37 is connected to the second fixing plate 38. The side of the second fixing plate 38 away from the first fixing plate 37 is connected to the driven swing rod 39. Through the cooperative use of the connecting plate 36, the first fixing plate 37, the second fixing plate 38 and the driven swing rod 39, the disc holder 1 and the mounting frame 40 can be installed and connected together.

[0056] See Figure 10As shown in the embodiment of the present invention, the driving assembly includes a hinge seat 33, an adjusting rod 34, a driving rod 35, and a threaded rod 44. The hinge seat 33 is fixedly connected to the active swing rod 32. One end of the adjusting rod 34 is hinged to the hinge seat 33, and the other end of the adjusting rod 34 is fixedly connected to one end of the threaded rod 44. The other end of the threaded rod 44 is threadedly connected to one end of the driving rod 35. The distance between the driving rod 35 and the active swing rod 32 can be adjusted by rotating the threaded rod 44.

[0057] See Figure 8 , Figure 9 As shown in the embodiment of the present invention, two sets of main support rods 7 in the wafer cassette 100 are symmetrically arranged. An intermediate plate 45 is fixedly installed on the surface of the two sets of main support rods 7. Multiple sets of connecting rods 43 are threadedly connected to the surface of the wafer cassette frame 31, connecting the wafer cassette frame 31, the intermediate plate 45, and the main support rods 7 together. An intermediate plate is provided on the outer side of the third set of main support rods 7. A locking plate 42 is fixedly installed on the top of the intermediate plate. The two sides of the bottom of the locking plate 42 are respectively attached to the top of the two sets of side plates 1. The surfaces of the two sets of side plates 1 are provided with grooves adapted to the wafer cassette frame 1 and the locking plate 42. One side of the wafer cassette frame 31 and the locking plate 42 are respectively attached to the surface of the grooves. A connecting rod 43 is threadedly connected to the surface of the locking plate 42, connecting to the top of the side plate 1. During use, a limiting support rod with the same structure as the main support rod 7 is added. The limiting support rod can be used in conjunction with the three sets of main support rods 7 to limit and fix the wafer. After placing the wafer into the wafer slot on the surface of the three main support rods 7, the limiting support rod can be clamped on the surface of the wafer. At this time, the bottom of the locking plate 42 is in contact with the top of the two side plates 1. The user can tighten the connecting rod 43. The rotation of the connecting rod 43 causes one end to pass through the locking plate 42 and extend to the outside of the locking plate 42 and be threaded to the top of the side plate 1, thereby locking the limiting support rod between the two side plates 1. By setting the groove, the locking plate 42 and the wafer holder 31 can fit more closely to the side plate 1, so as to improve the stability of the device.

[0058] In this embodiment, the two sets of film boxes 100 can be installed and fixed together by setting the film box frame 31. When installing the film box frame 31 and the film box 100 together, the two sets of film boxes 100 can be placed in the film box frame 31, and then the connecting rod 43 is tightened to install and fix the film box frame 31 and the two sets of film boxes 100 together.

[0059] The disc cassette 100 can be rotated at an angle by the drive assembly. When rotation of the disc cassette 100 is required, the user can move the drive rod 35 using the drive device. In this embodiment, the drive device can be an electric cylinder, a pneumatic cylinder, or a motor, etc. The drive device moves the drive rod 35, which in turn moves the active swing rod 32. The movement of the active swing rod 32 causes the disc cassette holder 31 to rotate around the mounting frame 40, making it stand upright or lie flat. In this embodiment, the device can be mounted on a frame using the mounting frame 40. The distance between the active swing rod 32 and the drive rod 35 can be adjusted by the adjusting rod 34, and the active swing rod 32 and the drive rod 35 can be locked together. In this embodiment, the drive rod 35 is placed vertically, and a drive device is provided at the upper end of the drive rod 35. The drive device is used to make the drive rod 35 move vertically up and down. The lower end of the drive rod 35 has a threaded hole. A threaded rod 44 is installed above the adjusting rod 34 and connects with the threaded hole at the bottom of the drive rod 35. The threaded connection facilitates the adjustment of the length by rotation during assembly, so that the tablet cassette assembly can be flipped smoothly. The adjusting rod 34 and the active swing rod 32 form a movable hinge connection. The other end of the active swing rod 32 is connected to both ends of the tablet cassette frame 1. Importantly, the active swing rod 32 cannot be connected to the end of the tablet cassette frame 1, and the active swing rod 32 and the horizontally set tablet cassette frame 1 cannot be set at a 90-degree angle. Otherwise, when the drive rod 35 moves upward, the active swing rod 32 will not have an upward component force, and the tablet cassette assembly may easily have a dead point when flipping, making it unable to rotate. The mounting bracket 40 is mounted on the frame and is movablely hinged to the driven swing rod 39. One side of the top of the tablet cassette frame 31 is fixedly connected to the driven swing rod 39 through the first fixing plate 37 and the second fixing plate 38. The upward movement of the drive rod 35 causes the horizontally placed disc cassette 100 to flip upwards under the coordinated action of the various rods. Conversely, the downward movement of the drive rod 35 causes the vertically placed disc cassette 100 to flip downwards under the coordinated action of the various rods. This invention achieves the flipping motion of the disc cassette assembly through the fixing between the mounting bracket 40 and the frame, and the coordinated movement between a single reciprocating drive rod 35 and the various rods.

[0060] The tablet cassette flipping device provided by this invention has the advantages of simple structure, convenient preparation, low cost and flexible movement. It only requires one driving force to achieve tablet cassette flipping. The installation of the driving device is not limited by the soaking space, making it easy to install and highly efficient.

[0061] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A disc cassette flipping device, characterized in that, It includes a film cassette holder (31), an active swing rod (32), a drive assembly, a support assembly, and a film cassette (100), wherein at least one of the film cassettes (100) is mounted on the film cassette holder (31); the support assembly is disposed on the film cassette holder (31) for connection to an external fixed object; The support assembly includes a connecting plate (36), a fixing plate, a driven swing rod (39), and a mounting frame (40), wherein the mounting frame (40) is mounted on an external fixed object; one end of the connecting plate (36) and the driven swing rod (39) are vertically connected through the fixing plate, the other end of the connecting plate (36) is vertically connected to the disc holder (31), and the other end of the driven swing rod (39) is hinged to the mounting frame (40); The active swing arm (32) is hinged to both sides of the disc holder (31), and the drive assembly is hinged to the top of the active swing arm (32). The drive assembly is used to connect to an external drive device. The drive assembly includes a hinge seat (33), an adjusting rod (34), a drive rod (35), and a threaded rod (44); wherein the hinge seat (33) is fixedly connected to the active swing rod (32), one end of the adjusting rod (34) is hinged to the hinge seat (33), the other end of the adjusting rod (34) is fixedly connected to one end of the threaded rod (44), the other end of the threaded rod (44) is threadedly connected to one end of the drive rod (35), and the drive rod (35) is arranged in a vertical direction; The drive rod (35) is used to connect to an external drive device, which drives the drive rod (35) to reciprocate in the vertical direction, causing the disc box (100) to flip. The active swing arm (32) is not perpendicular to the horizontally placed disc holder (31).

2. The cassette flipping device according to claim 1, characterized in that, The wafer cassette (100) includes two sets of side plates (1) and a plurality of wafer fixing components (3) arranged between the two sets of side plates (1) and distributed circumferentially. Each wafer fixing component (3) has a first wafer fixing groove (4) and a second wafer fixing groove (5) of different depths, and wafers of different sizes are supported by the first wafer fixing groove (4) and the second wafer fixing groove (5).

3. The tablet cassette flipping device according to claim 2, characterized in that, The wafer fixing assembly (3) includes a main support rod (7), on which a plurality of protrusions (8) are arranged linearly and equidistantly. The first wafer fixing groove (4) is opened on the end face of each of the protrusions (8), and the second wafer fixing groove (5) is opened between two of the protrusions (8), and the depth of the second wafer fixing groove (5) is greater than the depth of the first wafer fixing groove (4).

4. The cassette flipping device according to claim 3, characterized in that, The width of the first wafer fixing groove (4) and the second wafer fixing groove (5) gradually decreases from the opening to the bottom; the bottom of the first wafer fixing groove (4) and the second wafer fixing groove (5) are provided with elastic clamping components for assisting in clamping the wafer.

5. The cassette flipping device according to claim 4, characterized in that, The elastic clamping assembly includes an elastic post (16) and an abutment structure (18). The first wafer fixing slot (4) and the second wafer fixing slot (5) are provided with insertion holes (17) at the bottom. One end of the elastic post (16) is fixedly inserted into the insertion hole (17), and the other end of the elastic post (16) is provided with a contact structure (18). A rough pad (19) is installed on the contact structure (18).

6. The cassette flipping device according to claim 5, characterized in that, The elastic column (16) includes an outer tube (20), an annular stop (21), a plug rod (22), a cylindrical limiting plate (23), and a compression spring (24). The opening of the outer tube (20) is provided with an annular stop (21). One end of the plug rod (22) passes through the annular stop (21) and is inserted into the outer tube (20) and connected to the cylindrical limiting plate (23). The other end of the plug rod (22) is connected to the abutment structure (18). The compression spring (24) is housed inside the outer tube (20), and the two ends of the compression spring (24) abut against the bottom of the outer tube (20) and the cylindrical limiting plate (23), respectively.

7. The cassette flipping device according to claim 5, characterized in that, The contact structure (18) includes a contact block (25), on which a V-shaped groove (26) is provided, and the pad (19) is fixed on the inner wall of the V-shaped groove (26).

8. The cassette flipping device according to claim 3, characterized in that, The side plate (1) is a circular plate, and the side plate (1) is provided with a number of soaking liquid through holes (10) and a number of fixing structures (6) for installing the wafer fixing assembly (3). The fixing structure (6) includes a slot (13) and a through hole (12) provided at the bottom of the slot (13); The main support rod (7) has two integrally formed plug-in blocks (9) at both ends. The plug-in blocks (9) have threaded blind holes (11) on their end faces. The plug-in blocks (9) are inserted into the slot (13) so that the threaded blind holes (11) correspond to the through holes (12) and are locked and fixed by fixing bolts.

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