A substrate processing apparatus

Abstract

The application discloses a substrate processing device, which comprises a cooling chamber body, a lifting module, a rotating module and a first door body. The cooling chamber body defines a transportation channel and a cooling cavity arranged around the transportation channel. The transportation channel has a first entrance and a second entrance. The first entrance is used for the substrate to enter and exit. The second entrance is connected with a feeding port of a hot furnace. A boat rack for carrying the substrate is arranged in the transportation channel. The lifting module comprises a lifting driving source and a lifting support. The outer side wall of the lifting support is abutted against the inner side wall of the transportation channel. The rotating module is arranged on the lifting support and is used for driving the boat rack to rotate. The first door body is matched at the first entrance. The substrate processing device can quickly realize the cooling of the substrate. When the substrate is cooled, the furnace body of the hot furnace is not cooled. Therefore, the furnace body does not need to be reheated when the hot furnace continues to produce, so that the production efficiency of the hot furnace is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more particularly to a substrate processing apparatus. Background Technology

[0002] In semiconductor manufacturing, substrates need to be heated in a furnace. During heat treatment in the furnace, the substrate is placed inside a quartz boat. After the process is completed in the furnace, the substrate and quartz boat need to be cooled. Currently, the cooling method involves cooling the substrate and quartz boat to a certain temperature within the furnace. Specifically, nitrogen or other inert gases are introduced into the furnace as cooling gases. This cooling method is slow, and the furnace body cools down simultaneously. When production needs to continue, the furnace body must be reheated, wasting energy and reducing production efficiency. Summary of the Invention

[0003] The purpose of this invention is to provide a substrate processing apparatus that can quickly cool the substrate without cooling the furnace body, so that the furnace body does not need to be reheated when the furnace continues to produce, thereby improving the production efficiency of the furnace.

[0004] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0005] This invention discloses a substrate processing apparatus, comprising: a cooling chamber body defining a transport channel and a cooling cavity surrounding the transport channel; the transport channel having a first inlet and a second inlet / outlet, the first inlet / outlet for loading and unloading a substrate, and the second inlet / outlet connecting to the feed port of a hot furnace; a boat frame for supporting the substrate within the transport channel; a lifting module including a lifting drive source and a lifting support, the outer side wall of the lifting support abutting against the inner side wall of the transport channel; a rotating module mounted on the lifting support for driving the boat frame to rotate; and a first door fitted at the first inlet / outlet.

[0006] In some embodiments, the lifting bracket has a mounting cavity with its upper end open for accommodating the rotating module, and the substrate processing apparatus further includes a process door that engages with the lifting bracket and closes the mounting cavity.

[0007] The rotating module includes: a rotating drive assembly disposed on one side of the process gate; and a magnetic fluid assembly comprising a magnetic fluid flange, a magnetic fluid, and a rotating spindle. The magnetic fluid flange abuts against the process gate, the magnetic fluid is sleeved on the rotating spindle and abuts against the side of the magnetic fluid flange opposite to the process gate, and the rotating spindle passes through the process gate, with one end connected to the drive shaft of the rotating drive assembly and the other end connected to the boat frame.

[0008] In some specific embodiments, the magnetic fluid is provided with a cooling channel inside, and a cooling connector communicating with the cooling channel is provided outside the magnetic fluid; and / or: the magnetic fluid flange is provided with a cooling flow channel and a cooling fluid inlet pipe and a cooling fluid outlet pipe communicating with the cooling flow channel.

[0009] In some embodiments, the process door is provided with a pressure block, the pressure block includes a horizontal plate and a vertical plate, the bottom wall of the boat frame is provided with a positioning protrusion, the positioning protrusion is provided with a positioning notch, the vertical plate can pass through the positioning notch, and the horizontal plate abuts against the upper surface of the positioning protrusion.

[0010] In some embodiments, the substrate processing apparatus further includes a sealing assembly disposed between the inner wall of the transport channel and the lifting bracket.

[0011] In some embodiments, the inner wall of the transport channel or the outer wall of the lifting bracket is provided with an installation groove, and the sealing assembly is installed in the installation groove; wherein: the sealing assembly includes: a sealing sleeve disposed in the installation groove; a sealing ring disposed in the installation groove and spaced apart from the sealing sleeve; a first sealing member sandwiched between the sealing sleeve and the sealing ring; and a sealing locking member threadedly connected to the cooling chamber body and pressed against the sealing ring.

[0012] In some embodiments, the lifting bracket is provided with a lifting arm and a guide arm, the lifting arm is provided with a nut, the lifting drive source includes a rotary motor and a lead screw, one end of the lead screw is connected to the drive shaft of the rotary motor, and the lead screw is fitted on the nut, the guide arm is provided with a guide slider, and the guide slider is fitted with a guide rail.

[0013] In some embodiments, the first door is a first gate valve, which includes a first valve body and a first valve plate. The first valve body is connected to the cooling chamber body and is arranged around the first inlet / outlet. The first valve plate is closable on the first valve body.

[0014] In some embodiments, the substrate processing apparatus further includes a second gate body, which is fitted at the second inlet / outlet; wherein: the second gate body is a second gate valve, which includes a second valve body and a second valve plate, the second valve body is connected to the cooling chamber body and arranged around the second inlet / outlet, and the second valve plate is closable on the second valve body.

[0015] The beneficial effects of the substrate processing apparatus in this embodiment are as follows: After the substrate heating process is completed, the substrate processing apparatus transports the boat carrying the substrate to the transport channel outside the furnace for cooling. During the substrate cooling process, since the transport channel is isolated from the furnace, the substrate cooling will not cause the furnace to cool down. On the one hand, this means that the hot furnace does not need to be reheated when it continues to produce, thus improving the production efficiency of the hot furnace. On the other hand, it can increase the cooling speed of the substrate, further improving the production efficiency.

[0016] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the substrate processing apparatus according to an embodiment of the present invention;

[0018] Figure 2 This is a cross-sectional schematic diagram of the substrate processing apparatus according to an embodiment of the present invention;

[0019] Figure 3 This is a schematic diagram of the substrate processing apparatus during feeding according to an embodiment of the present invention;

[0020] Figure 4 yes Figure 3 A magnified diagram showing point A (circled).

[0021] Figure 5 This is a schematic diagram of the substrate processing apparatus according to an embodiment of the present invention during substrate heating;

[0022] Figure 6 This is a schematic diagram of the cooperative structure of the rotating module, the process gate, and the boat frame according to an embodiment of the present invention;

[0023] Figure 7 yes Figure 6 A schematic diagram of the structure from another direction shown;

[0024] Figure 8 yes Figure 6 A cross-sectional view of the structure shown;

[0025] Figure 9 This is a schematic diagram of the structure of the magnetohydrodynamic flange according to an embodiment of the present invention;

[0026] Figure 10 This is a cross-sectional view of the magnetofluid flange according to an embodiment of the present invention.

[0027] Figure label:

[0028] 1. Cooling chamber body; 11. First housing; 111. Mounting slot; 12. Second housing; 121. Vacuum port; 122. Vacuum release port; 13. Annular base; 101. Transport channel; 1011. First inlet / outlet; 1012. Second inlet / outlet; 102. Cooling chamber;

[0029] 2. Lifting bracket; 21. Lifting arm; 211. Nut; 22. Guide arm; 221. Guide slider;

[0030] 3. Process door; 31. Pressing block; 311. Horizontal plate; 312. Vertical plate;

[0031] 4. Rotary module; 41. Rotary drive assembly; 411. Drive bracket; 412. Drive motor; 413. Reducer; 414. Rotary disk; 4141. Sensor; 42. Magnetofluid assembly; 421. Magnetofluid flange; 4211. Cooling channel; 4212. Cooling fluid inlet pipe; 4213. Cooling fluid outlet pipe; 4214. Mating groove; 422. Magnetofluid; 4221. Cooling connector; 423. Rotary spindle; 4231. Support flange;

[0032] 5. First door body; 51. First valve body; 52. First valve plate;

[0033] 6. Second door body; 61. Second valve body; 62. Second valve plate;

[0034] 7. Sealing assembly; 71. Sealing sleeve; 72. Sealing ring; 73. First seal; 74. Sealing lock;

[0035] 8. Second seal; 9. Third seal; 10. Fourth seal; 20. Fifth seal; 30. Sixth seal; 40. Detector;

[0036] 100. Boat frame; 110. Positioning protrusion; 120. Positioning notch. Detailed Implementation

[0037] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0038] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or substrate referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0039] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0040] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two substrates. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0041] The following is for reference. Figures 1-10 The specific structure of the substrate processing apparatus according to an embodiment of the present invention is described.

[0042] This invention discloses a substrate processing apparatus, such as... Figures 1-2 As shown, the substrate processing apparatus of this embodiment includes a cooling chamber body 1, a lifting module, a rotating module 4, and a first door 5. The cooling chamber body 1 defines a transport channel 101 and a cooling cavity 102 surrounding the transport channel 101. The transport channel 101 has a first inlet / outlet 1011 and a second inlet / outlet 1012. The first inlet / outlet 1011 is used for loading and unloading substrates, and the second inlet / outlet 1012 is connected to the feed port of a hot furnace. A boat frame 100 for carrying substrates is provided inside the transport channel 101.

[0043] The lifting module includes a lifting drive source and a lifting bracket 2. The outer side wall of the lifting bracket 2 abuts against the inner side wall of the transport channel 101. The rotating module 4 is installed on the lifting bracket 2 and is used for the rotation of the boat frame 100. The first door 5 is fitted at the first entrance / exit 1011.

[0044] Understandably, in actual operation, an external device is used to feed the substrate from the first inlet / outlet 1011 into the boat 100 located in the transport channel 101. After the substrate is completely placed in the boat 100, the first door 5 is closed, and the external vacuum equipment evacuates the transport channel 101 to a vacuum state. Then, the furnace door is opened, and the boat 100 enters the furnace from the feed port for heating under the action of the lifting module. After processing, the boat 100 returns to the transport channel 101 under the action of the lifting module. At this time, the furnace door is closed to isolate the transport channel 101 from the furnace. Then, coolant or cooling gas is introduced into the cooling chamber 102 to cool the cooling chamber 102 and thus cool the substrate. After cooling, the external protective gas source fills the transport channel 101 with protective gas to release the vacuum state in the transport channel 101. Then, the first door 5 is opened to transport the substrate out of the substrate processing device from the first inlet / outlet 1011. In summary, in this embodiment, after the substrate heating process is completed, the substrate-loaded boat 100 is transported to the transport channel 101 outside the furnace body for cooling. During the substrate cooling process, since the transport channel 101 is isolated from the furnace body, the substrate cooling will not cause the furnace body to cool down. On the one hand, this eliminates the need to reheat the furnace body when the hot furnace continues production, thus improving the production efficiency of the hot furnace. On the other hand, it can increase the substrate cooling rate, further improving production efficiency.

[0045] It should be noted that, in order to achieve cooling of the vacuum environment, the first door body 5 or the cooling chamber body 1 is also equipped with a vacuum extraction port 121 and a vacuum release port 122. The vacuum extraction port 121 is connected to an external vacuum extraction device, and the vacuum release port 122 is connected to an external protective gas source.

[0046] It should be added that during the substrate heating process, the process gas used for the reaction needs to be transported from outside the furnace to the substrate. With the help of external energy, a chemical or physical reaction occurs on the substrate surface to generate the required thin film. The rotating module 4 can drive the substrate to rotate during the substrate heating process. The rotating substrate can obtain better film uniformity and resistivity consistency, thereby improving the product yield.

[0047] In some embodiments, the lifting bracket 2 has a mounting cavity with its upper end open for accommodating the rotating module 4. The substrate processing apparatus also includes a process door 3, which is fastened to the lifting bracket 2 and closes the mounting cavity. It is understood that when the lifting module drives the boat 100 into the furnace body, the furnace door is open, and heat inside the furnace will diffuse outward through the door. In this embodiment, the added process door 3 can reduce the heat diffusion rate of the furnace body, thereby achieving energy-saving functionality.

[0048] In some embodiments, such as Figures 3-4As shown, the substrate processing apparatus also includes a sealing component 7, which is disposed between the inner wall of the transport channel 101 and the lifting bracket 2. It is understood that if the seal between the transport channel 101 and the lifting bracket 2 fails during the up-and-down movement of the lifting bracket 2, external air will enter the transport channel 101, causing substrate oxidation. In this embodiment, the substrate processing apparatus further includes a sealing component 7 disposed between the inner wall of the transport channel 101 and the lifting bracket 2. This ensures the sealing of the connection between the lifting bracket 2 and the transport channel 101 during the up-and-down movement of the lifting bracket 2, preventing external air from entering the transport channel 101, ensuring stable substrate cooling, and improving substrate manufacturing yield.

[0049] In some specific embodiments, such as Figure 4 As shown, the inner wall of the transport channel 101 or the outer wall of the lifting bracket 2 is provided with a mounting groove 111, and the sealing component 7 is installed in the mounting groove 111. It can be understood that this further ensures the sealing of the connection between the lifting bracket 2 and the transport channel 101, and prevents the entry of external air into the transport channel 101.

[0050] In some more specific embodiments, such as Figure 4 As shown, the sealing assembly 7 includes a sealing sleeve 71, a sealing ring 72, a first sealing element 73, and a sealing locking element 74. The sealing sleeve 71 is disposed in the mounting groove 111, and the sealing ring 72 is disposed in the mounting groove 111 and spaced apart from the sealing sleeve 71. The first sealing element 73 is sandwiched between the sealing sleeve 71 and the sealing ring 72. The sealing locking element 74 is threadedly connected to the cooling chamber body 1 and pressed onto the sealing ring 72. It can be understood that during actual assembly, the sealing sleeve 71, the first sealing element 73, and the sealing ring 72 are sequentially fitted onto the lifting bracket 2, and then the sealing locking element 74 is locked onto the cooling chamber body 1. This causes the sealing locking element 74 to compress the sealing ring 72, thus squeezing the first sealing element 73 between the sealing sleeve 71 and the sealing ring 72, thereby ensuring the sealing of the connection between the lifting bracket 2 and the transport channel 101 and preventing external air from entering the transport channel 101.

[0051] In some embodiments, the first gate 5 is a first gate valve, which includes a first valve body 51 and a first valve plate 52. The first valve body 51 is connected to the cooling chamber body 1 and is disposed around the first inlet / outlet 1011. The first valve plate 52 is disposed on the first valve body 51 in an openable and closable manner. It is understood that using a gate valve as the first gate 5 facilitates opening and closing and simplifies the structure of the first gate 5, thereby reducing the manufacturing cost of the entire substrate processing apparatus.

[0052] In some specific embodiments, such as Figure 2As shown, a second sealing element 8 is provided between the first valve body 51 and the cooling chamber body 1. It is understood that if the connection between the first valve body 51 and the cooling chamber body 1 is poorly sealed, external air will enter the transport channel 101 or the furnace body through the connection gap between the first valve body 51 and the cooling chamber body 1, thereby increasing the substrate scrap rate. In this embodiment, the second sealing element 8 is provided between the first valve body 51 and the cooling chamber body 1. The second sealing element 8 can improve the connection sealing between the first valve body 51 and the cooling chamber body 1, preventing external air from entering the transport channel 101 or the furnace body through the connection gap between the first valve body 51 and the cooling chamber body 1, ensuring that the substrate is cooled in a vacuum environment, and improving the substrate manufacturing yield. It should be noted that in this embodiment, the specific type of the second sealing element 8 can be selected according to actual needs, and the material and type of the second sealing element 8 are not limited here.

[0053] In some embodiments, such as Figure 3 As shown, the substrate processing apparatus also includes a second door 6, which is fitted at the second inlet / outlet 1012. It is understood that when the substrate is heated and needs to enter the transport channel 101 for cooling, if the second inlet / outlet 1012 remains open, heat from the furnace will continuously enter the transport channel 101, thus reducing the substrate's cooling rate. To avoid this, a separate furnace door would be required on the furnace body. However, compared to setting a furnace door on the furnace body, in this embodiment, directly setting the second door 6 at the second inlet / outlet 1012 achieves isolation between the transport channel 101 and the furnace body after the substrate has been heated and entered the transport channel 101, eliminating the need for a separate furnace door and simplifying the furnace structure.

[0054] In some embodiments, such as Figure 3 As shown, the second gate 6 is a second gate valve, which includes a second valve body 61 and a second valve plate 62. The second valve body 61 is connected to the cooling chamber body 1 and is arranged around the second inlet / outlet 1012. The second valve plate 62 is closable on the second valve body 61. It is understandable that using a gate valve as the second gate 6 facilitates opening and closing, simplifies the structure of the second gate 6, and reduces the manufacturing cost of the entire substrate processing device.

[0055] In some specific embodiments, such as Figure 2As shown, both ends of the second valve body 61 are provided with third seals 9. One third seal 9 is sandwiched between the second valve body 61 and the cooling chamber body 1, and the other third seal 9 is sandwiched between the second valve body 61 and the furnace shell. It is understood that if the connection between the second valve body 61 and the cooling chamber body 1, and between the second valve body 61 and the furnace shell, is poorly sealed, external air will enter the transport channel 101 or the furnace body through the connection gap between the second valve body 61 and the cooling chamber body 1, or between the second valve body 61 and the furnace, thereby increasing the substrate scrap rate. In this embodiment, third seals 9 are provided between the second valve body 61 and the cooling chamber body 1, and between the second valve body 61 and the furnace shell. The third seals 9 can improve the connection sealing between the second valve body 61 and the cooling chamber body 1, preventing external air from entering the transport channel 101 or the furnace body through the connection gap between the second valve body 61 and the cooling chamber body 1, ensuring that the substrate is cooled in a vacuum environment, and improving the substrate manufacturing yield. It should be noted that in this embodiment, the specific type of the third seal 9 can be selected according to actual needs, and the material and type of the third seal 9 are not limited here.

[0056] In some embodiments, such as Figure 3 and Figure 5 As shown, the rotating module 4 includes a rotating drive assembly 41 and a magnetic fluid assembly 42. The rotating drive assembly 41 is located on one side of the process door 3. The magnetic fluid assembly 42 includes a magnetic fluid flange 421, a magnetic fluid 422, and a rotating spindle 423. The magnetic fluid flange 421 abuts against the process door 3. The magnetic fluid 422 is sleeved on the rotating spindle 423 and abuts against the side of the magnetic fluid flange 421 away from the process door 3. The rotating spindle 423 passes through the process door 3, with one end connected to the drive shaft of the rotating drive assembly 41 and the other end connected to the boat frame 100.

[0057] It should be noted that in the existing structure, the rotating disk carrying the quartz boat is mounted on a rotating shaft via a shaft hole. The rotating shaft passes through the process gate, and a mechanical vacuum seal is used between the rotating shaft and the process gate. A synchronous pulley is mounted on the other end of the rotating shaft, located outside the furnace body. A motor mounted on the process gate transmits rotation to the rotating shaft via the synchronous belt. During actual operation, changes in the tension of the synchronous belt will cause changes in the rotational speed transmitted to the rotating shaft, resulting in uneven rotation speed of the quartz boat and affecting the uniformity of the film thickness formed on the substrate. Wear of the mechanical seal affects the vacuum level inside the furnace, and the powder generated by the wear entering the furnace also affects the substrate quality.

[0058] It should be noted that the magnetic fluid 422 consists of a housing, rolling bearings, magnetic fluid, permanent magnets, and magnetically permeable pole shoes. The structure of the magnetic fluid 422 can be obtained from existing technology and will not be described in detail here. When the rotating spindle 423 drives the magnetic fluid 422 to rotate, there is a gap between the permanent magnet, the magnetically permeable pole shoes, and the rotating spindle 423, forming a magnetic circuit. When the magnetic fluid is injected into this magnetic circuit, under the action of the magnetic field, the magnetic fluid 422 forms multiple liquid "O" rings in the gap, thereby achieving a sealing effect.

[0059] Understandably, in this embodiment, a magnetic fluid 422 is used as the sealing structure at the point where the rotating spindle 423 passes through the process gate 3. This eliminates solid-state contact wear and prevents dust generation, thus ensuring the substrate manufacturing yield. Furthermore, since the rotating spindle 423 passes through the process gate 3 and one end is connected to the drive shaft of the rotating drive assembly 41, the rotating spindle 423 is directly connected to the drive shaft of the rotating drive assembly 41, eliminating the need for a synchronous belt structure for transmission. This ensures a relatively uniform rotational speed of the rotating spindle 423 and guarantees uniform film thickness on the substrate.

[0060] In some specific embodiments, such as Figure 8 As shown, the magnetic fluid 422 has a cooling channel inside, and a cooling connector 4221 communicating with the cooling channel is provided outside the magnetic fluid 422. It is understood that during actual operation, the furnace body is in a high-temperature environment, which will cause the temperature of the rotating spindle 423 to rise. The rotating spindle 423 will transfer heat to the magnetic fluid 422. According to the characteristics of the magnetic fluid 422, when the temperature of the magnetic fluid 422 is too high, the performance of the internal magnetic fluid will become unstable, affecting the sealing performance. In this embodiment, the magnetic fluid 422 has a cooling channel inside, and a cooling connector 4221 communicating with the cooling channel is provided outside the magnetic fluid 422. Cooling fluid can circulate within the cooling channel to cool the magnetic fluid 422, thereby preventing the magnetic fluid 422 from overheating and reducing the sealing performance.

[0061] In some specific embodiments, such as Figures 9-10As shown, the magnetic fluid flange 421 is provided with a cooling channel 4211 and a cooling fluid inlet pipe 4212 and a cooling fluid outlet pipe 4213 connected to the cooling channel 4211. It is understood that during actual operation, the furnace body is in a high-temperature environment, which will cause the temperature of the process door 3 to rise, thereby raising the temperature of the magnetic fluid flange 421 and the magnetic fluid 422. According to the characteristics of the magnetic fluid 422, when the temperature of the magnetic fluid 422 is too high, the performance of the internal magnetic fluid will become unstable, affecting the sealing performance. In this embodiment, the magnetic fluid flange 421 is provided with a cooling channel 4211 and a cooling fluid inlet pipe 4212 and a cooling fluid outlet pipe 4213 connected to the cooling channel 4211. Cooling fluid can flow inside the magnetic fluid flange 421 to cool the magnetic fluid 422, thereby preventing the magnetic fluid 422 from becoming too hot and reducing the sealing performance.

[0062] In some specific embodiments, such as Figure 8 As shown, a support flange 4231 is provided on the rotating spindle 423, which is used to support the boat frame 100. It can be understood that because the rotating spindle 423 has a support flange 4231, the overall shape of the rotating spindle 423 is similar to a T-shape. The lower shaft section with a smaller diameter is used to install the magnetorheological fluid 422, while the upper support flange 4231 has a larger diameter. This reduces the runout of the support flange 4231 on the lower shaft section. After the boat frame 100 is installed parallel to the support flange 4231, the runout of the end face of the boat frame 100 is reduced, thus enabling the boat frame 100 to rotate smoothly when the rotating spindle 423 drives it to rotate.

[0063] In some embodiments, such as Figure 8 and Figure 10 As shown, the magnetic fluid flange 421 is provided with a mating groove 4214. One side of the magnetic fluid 422 abuts against the bottom wall of the mating groove 4214, and a fourth sealing element 10 is provided between the magnetic fluid 422 and the bottom wall of the mating groove 4214. It is understood that poor sealing between the magnetic fluid 422 and the magnetic fluid flange 421 will directly affect the vacuum level of the furnace. In this embodiment, the magnetic fluid 422 is installed in the mating groove 4214, and a fourth sealing element 10 is provided on the bottom wall of the mating groove 4214. This ensures the sealing of the connection between the magnetic fluid 422 and the magnetic fluid flange 421, thereby guaranteeing the vacuum level of the furnace. It should be noted that in this embodiment, the type of the fourth sealing element 10 can be selected according to actual needs, using high-temperature resistant and corrosion-resistant sealing elements. No specific limitations are made on the type and material of the fourth sealing element 10.

[0064] In some specific embodiments, such as Figure 8As shown, a fifth sealing element 20 is provided on the side of the magnetic fluid flange 421 facing the process door 3. It is understood that the sealing performance between the magnetic fluid flange 421 and the process door 3 directly affects the vacuum level of the furnace. In this embodiment, the fifth sealing element 20 is provided on the side of the magnetic fluid flange 421 facing the process door 3 to ensure the sealing performance between the magnetic fluid flange 421 and the process door 3, thereby ensuring the vacuum level of the furnace. It should be noted that in this embodiment, the type of the fifth sealing element 20 can be selected according to actual needs, using high-temperature resistant and corrosion-resistant sealing elements. No specific limitations are made on the type and material of the fifth sealing element 20.

[0065] In some specific embodiments, such as Figure 2 As shown, a sixth sealing element 30 is provided between the process door 3 and the lifting support 2. It is understood that the sealing performance between the process door 3 and the lifting support 2 directly affects the vacuum level of the furnace. In this embodiment, the sixth sealing element 30 ensures the sealing performance between the process door 3 and the lifting support 2, thereby ensuring the vacuum level of the furnace. It should be noted that in this embodiment, the type of the sixth sealing element 30 can be selected according to actual needs, using high-temperature resistant and corrosion-resistant sealing elements. No specific limitations are made on the type and material of the sixth sealing element 30.

[0066] In some embodiments, such as Figures 6-7 As shown, the rotary drive assembly 41 includes a drive bracket 411, a drive motor 412, a reducer 413, and a rotary disk 414. The drive bracket 411 is mounted on the process gate 3, the drive motor 412 is mounted on the drive bracket 411, and the drive motor 412 has a drive shaft. The reducer 413 is located on the drive bracket 411, and the power input end of the reducer 413 is connected to the drive shaft. One side of the rotary disk 414 is connected to the power output end of the reducer 413, and the other side is connected to the rotary spindle 423. It can be understood that the drive bracket 411 serves as a support structure for the drive motor 412, the reducer 413, and the rotary disk 414, ensuring that the rotary drive assembly 41 is stably mounted on the process gate 3 and drives the rotary spindle 423 to rotate. The reducer 413 can reduce the output speed of the rotary drive assembly 41 and increase the driving torque, thereby ensuring that the rotary drive assembly 41 stably drives the rotary spindle 423 to rotate the boat frame 100. In this embodiment, the specific types of drive motor 412 and reducer 413 can be selected according to actual needs, and no limitation is made on the specific types of drive motor 412 and reducer 413.

[0067] In some more specific embodiments, such as Figure 6As shown, a sensor 4141 is provided on the rotating disk 414, and a detector 40 for detecting the sensor 4141 is provided on the drive bracket 411. It can be understood that during actual operation, the rotational speed of the rotating disk 414 can be detected by the detector 40 detecting the sensor 4141, thereby monitoring the rotation of the boat frame 100. It should be noted that in this embodiment, the types of the sensor 4141 and detector 40 can be selected according to actual needs. For example, the detector 40 can be a photoelectric switch, and the sensor 4141 can be a light-shielding element; or, the detector 40 can be a Hall substrate, and the sensor 4141 can be a magnetic element, etc.

[0068] In some embodiments, such as Figure 6 As shown, the process gate 3 is provided with a pressure block 31, which includes a horizontal plate 311 and a vertical plate 312. The bottom wall of the boat frame 100 is provided with a positioning protrusion 110, which has a positioning notch 120. The vertical plate 312 can pass through the positioning notch 120, and the horizontal plate 311 abuts against the upper surface of the positioning protrusion 110. It can be understood that in the actual installation process, the boat frame 100 can be placed on the process gate 3, so that the positioning notch 120 is aligned with the horizontal plate 311 of the pressure block 31 on the process gate 3, and then the boat frame 100 can be rotated so that the positioning notch 120 and the horizontal plate 311 of the pressure block 31 are pressed against the positioning protrusion 110. This can improve the stability of the boat frame 100 and avoid the phenomenon of substrate shaking caused by the instability of the boat frame 100 during operation.

[0069] In some embodiments, such as Figure 2 As shown, the lifting support 2 is equipped with a lifting arm 21 and a guide arm 22. The lifting arm 21 has a nut 211. The lifting drive source includes a rotary motor and a lead screw. One end of the lead screw is connected to the drive shaft of the rotary motor and engages with the nut 211. The guide arm 22 has a guide slider 221, which engages with a guide rail. Understandably, in actual operation, the rotary motor drives the lead screw to rotate, causing the nut 211 to move up and down relative to the lead screw, thus driving the lifting support 2 to move up and down. This lead screw and nut 211 drive method improves the driving stability and stroke control accuracy of the lifting support 2, ensuring that the lifting support 2 can stably move up and down within the transport channel 101. The added guide slider 221 and guide rail limit the lifting direction of the lifting support 2, preventing tilting during lifting.

[0070] In some embodiments, the cooling chamber body 1 includes a first housing 11, a second housing 12, and two annular bases 13. The first housing 11 and the second housing 12 are spaced apart between the two annular bases 13, and a cooling cavity 102 is formed between the first housing 11 and the second housing 12. A transport channel 101 is formed inside the first housing 11. It is understood that the cooling chamber body 1 is constructed using the first housing 11, the second housing 12, and the two annular bases 13, which on the one hand ensures the sealing of the cooling cavity 102, and on the other hand simplifies the structure of the cooling chamber body 1, thereby reducing the manufacturing cost of the cooling chamber body 1.

[0071] Example:

[0072] The following is for reference. Figures 1-10 The specific structure of a substrate processing apparatus according to a particular embodiment of the present invention is described.

[0073] like Figures 1-10 As shown, the substrate processing apparatus of this embodiment includes a cooling chamber body 1, a lifting module, a process door 3, a rotating module 4, a first door body 5, a second door body 6, and a sealing assembly 7. The cooling chamber body 1 includes a first housing 11, a second housing 12, and two annular bases 13. The first housing 11 and the second housing 12 are spaced apart between the two annular bases 13, and a cooling cavity 102 is formed between the first housing 11 and the second housing 12. A transport channel 101 is formed inside the first housing 11, and a mounting groove 111 is also provided at the lower end of the first housing 11. The cooling chamber body 1 also has a vacuum port 121 and a vacuum release port 122 penetrating the first housing 11 and the second housing 12. One end of the vacuum pipe penetrates the cooling cavity 102 and communicates with the transport channel 101, while the other end extends out of the cooling chamber body 1 and connects to an external vacuum pumping device. One end of the vacuum release pipe penetrates the cooling cavity 102 and communicates with the transport channel 101, while the other end extends out of the cooling chamber body 1 and connects to an external protective gas source. The transport channel 101 has a first inlet / outlet 1011 and a second inlet / outlet 1012. The first inlet / outlet 1011 is used for entering and exiting the substrate, and the second inlet / outlet 1012 is connected to the material inlet of the heating furnace. The lifting module includes a lifting drive source and a lifting bracket 2. The outer side wall of the lifting bracket 2 abuts against the inner side wall of the transport channel 101. The lifting bracket 2 is used to support the boat frame 100. The lifting bracket 2 is provided with a lifting arm 21 and a guide arm 22. The lifting arm 21 is provided with a nut 211. The lifting drive source includes a drive motor 412 and a lead screw. One end of the lead screw is connected to the drive shaft of the drive motor 412, and the lead screw is fitted onto the nut 211. The guide arm 22 is provided with a guide slider 221, which is fitted onto a guide rail.

[0074] The process door 3 is located on top of the lifting support 2, and a sixth sealing element 30 is provided between the door and the lifting support 2. The rotating module 4 includes a rotating drive assembly 41 and a magnetohydrodynamic assembly 42. The rotating drive assembly 41 is located on one side of the process door 3 and includes a drive bracket 411, a drive motor 412, a reducer 413, and a rotating disk 414. The drive bracket 411 is mounted on the process door 3, and the drive motor 412 is mounted on the drive bracket 411. The drive motor 412 has a drive shaft. The reducer 413 is located on the drive bracket 411, and the power input end of the reducer 413 is connected to the drive shaft. One side of the rotating disk 414 is connected to the power output end of the reducer 413, and the other side is connected to the rotating main shaft 423. A sensor 4141 is provided on the rotating disk 414, and a detector 40 for detecting the sensor 4141 is provided on the drive bracket 411. The magnetofluid assembly 42 includes a magnetofluid flange 421, a magnetofluid 422, and a rotating spindle 423. The magnetofluid flange 421 has a cooling channel 4211 and cooling fluid inlet pipe 4212 and cooling fluid outlet pipe 4213 communicating with the cooling channel 4211. The magnetofluid flange 421 has a mounting groove 111. The magnetofluid 422 is fitted onto the rotating spindle 423, with one side abutting against the bottom wall of the mounting groove 111. A fourth seal 10 is provided between the magnetofluid 422 and the bottom wall of the mounting groove 111. The magnetofluid 422 has a cooling channel inside and a cooling connector 4221 communicating with the cooling channel outside. A fifth seal 20 is provided on the side of the magnetofluid flange 421 facing the process door 3. The rotating spindle 423 passes through the process door 3, with one end connected to the drive shaft of the rotating drive assembly 41 and the other end connected to the boat frame 100. The first gate body 5 is a first gate valve, comprising a first valve body 51 and a first valve plate 52. The first valve body 51 is connected to the cooling chamber body 1 and surrounds the first inlet / outlet 1011. The first valve plate 52 is closable on the first valve body 51. A second sealing element 8 is provided between the first valve body 51 and the cooling chamber body 1. The second gate body 6 is a second gate valve, comprising a second valve body 61 and a second valve plate 62. The second valve body 61 is connected to the cooling chamber body 1 and surrounds the second inlet / outlet 1012. The second valve plate 62 is closable on the second valve body 61. A third sealing element 9 is provided at both ends of the second valve body 61. One third sealing element 9 is sandwiched between the second valve body 61 and the cooling chamber body 1, and the other third sealing element 9 is sandwiched between the second valve body 61 and the furnace shell. The sealing assembly 7 includes a sealing sleeve 71, a sealing ring 72, a first sealing element 73, and a sealing locking element 74. The sealing sleeve 71 is disposed in the mounting groove 111, the sealing ring 72 is disposed in the mounting groove 111 and spaced apart from the sealing sleeve 71, the first sealing element 73 is sandwiched between the sealing sleeve 71 and the sealing ring 72, and the sealing locking element 74 is threaded to the cooling chamber body 1 and pressed onto the sealing ring 72.

[0075] Advantages of the substrate processing apparatus in this embodiment:

[0076] First, circulating water is used to cool the transport channel 101, thereby cooling the substrate and ensuring that the substrate is not contaminated by particulate matter after processing, thus improving the substrate quality.

[0077] Second: It reduces the cooling time after substrate processing and improves equipment utilization efficiency;

[0078] Third: Effectively control and adjust the cooling rate after substrate processing. The cooling rate is adjustable and can meet the cooling rate requirements of different processes.

[0079] Fourth: Transport channel 101 can be used as a loading chamber for the furnace, reducing the overall composition of the furnace and lowering its cost;

[0080] Fifth: The furnace body will not be cooled when the substrate is cooled. The furnace body does not need to be reheated when the substrate is processed, which shortens the process time, improves production efficiency, and reduces energy consumption.

[0081] Sixth, the use of magnetic fluid assembly 42 achieves high vacuum sealing, the rotating spindle 423 and process door 3 are non-contact sealing, there is no wear, the service life is long, and no powder is generated during rotation, thus improving product quality;

[0082] Seventh: The boat frame 100 and the rotating spindle 423 have high matching precision and reliable structure. The substrate has small vertical runout within the boat frame 100, which is beneficial to improving product yield.

[0083] Eighth: Direct-drive motion input ensures smooth movement when the boat frame rotates 100°, allowing the substrate to rotate smoothly within the quartz boat, reducing substrate damage and improving product yield.

[0084] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0085] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A substrate processing apparatus, characterized in that, include: A cooling chamber body (1) defines a transport channel (101) and a cooling cavity (102) surrounding the transport channel (101). The transport channel (101) has a first inlet (1011) and a second inlet (1012). The first inlet (1011) is used for entering and exiting the substrate, and the second inlet (1012) is connected to the feed port of the hot furnace. A boat frame (100) for carrying the substrate is provided in the transport channel (101). The lifting module includes a lifting drive source and a lifting bracket (2), the outer side wall of which abuts against the inner side wall of the transport channel (101). A rotating module (4) is mounted on the lifting bracket (2) and is used to drive the boat frame (100) to rotate. The first door (5) is fitted at the first entrance / exit (1011); The lifting bracket (2) has a mounting cavity, the upper end of which is open and used to accommodate the rotating module (4). The substrate processing device also includes a process door (3), which is fastened to the lifting bracket (2) and closes the mounting cavity. The substrate processing apparatus further includes a sealing assembly (7), which is disposed between the inner wall of the transport channel (101) and the lifting bracket (2); The inner wall of the transport channel (101) or the outer wall of the lifting bracket (2) is provided with a mounting groove (111), and the sealing assembly (7) is installed in the mounting groove (111); wherein: The sealing assembly (7) includes: A sealing sleeve (71) is provided in the mounting groove (111); A sealing ring (72) is provided in the mounting groove (111) and spaced apart from the sealing sleeve (71); A first seal (73) is sandwiched between the sealing sleeve (71) and the sealing ring (72); A sealing locking member (74) is threadedly connected to the cooling chamber body (1) and pressed onto the sealing pressure ring (72).

2. The substrate processing apparatus according to claim 1, characterized in that, The rotating module (4) includes: A rotary drive assembly (41) is disposed on one side of the process gate (3); The magnetic fluid assembly includes a magnetic fluid flange (421), a magnetic fluid (422), and a rotating spindle (423). The magnetic fluid flange (421) abuts against the process door (3). The magnetic fluid (422) is sleeved on the rotating spindle (423) and abuts against the side of the magnetic fluid flange (421) away from the process door (3). The rotating spindle (423) passes through the process door (3) and is connected at one end to the drive shaft of the rotating drive assembly (41) and at the other end to the boat frame (100).

3. The substrate processing apparatus according to claim 2, characterized in that, The magnetic fluid (422) has a cooling channel inside, and a cooling connector (4221) communicating with the cooling channel is provided outside the magnetic fluid (422); and / or: The magnetic fluid flange (421) is provided with a cooling channel (4211) and a cooling fluid inlet pipe (4212) and a cooling fluid outlet pipe (4213) connected to the cooling channel (4211).

4. The substrate processing apparatus according to any one of claims 1-3, characterized in that, The process door (3) is provided with a pressure block (31), the pressure block (31) includes a horizontal plate (311) and a vertical plate (312), the bottom wall of the boat frame (100) is provided with a positioning protrusion (110), the positioning protrusion (110) is provided with a positioning notch (120), the vertical plate (312) can pass through the positioning notch (120), and the horizontal plate (311) abuts against the upper surface of the positioning protrusion (110).

5. The substrate processing apparatus according to any one of claims 1-3, characterized in that, The lifting bracket (2) is provided with a lifting arm (21) and a guide arm (22). The lifting arm (21) is provided with a nut (211). The lifting drive source includes a rotary motor and a lead screw. One end of the lead screw is connected to the drive shaft of the rotary motor, and the lead screw is fitted on the nut (211). The guide arm (22) is provided with a guide slider (221), and the guide slider (221) is fitted with a guide rail.

6. The substrate processing apparatus according to any one of claims 1-3, characterized in that, The first door body (5) is a first gate valve. The first gate valve includes a first valve body (51) and a first valve plate (52). The first valve body (51) is connected to the cooling chamber body (1) and is arranged around the first inlet / outlet (1011). The first valve plate (52) is openable and closable on the first valve body (51).

7. The substrate processing apparatus according to any one of claims 1-3, characterized in that, The substrate processing device further includes a second gate (6), which is fitted at the second inlet (1012); wherein: the second gate (6) is a second gate valve, which includes a second valve body (61) and a second valve plate (62), the second valve body (61) is connected to the cooling chamber body (1) and arranged around the second inlet (1012), and the second valve plate (62) is closably disposed on the second valve body (61).

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