An ion beam implantation system

Abstract

The application discloses an ion beam injection system, comprising: a slit cover plate queue module and a manipulator; the ion source generator slit cover plate queue module is located in an ion beam vacuum chamber and comprises a plurality of slit cover plates; the ion source generator manipulator is arranged on the outer wall of the ion beam vacuum chamber and is used for controlling the replacement of the slit cover plates on the ion source generator; the ion source generator manipulator comprises a slit cover plate driving module and a slit cover plate counting module; the ion source generator slit cover plate driving module comprises a driving connection device and a driving power device and is used for driving the slit cover plates in the slit cover plate queue module; and the ion source generator slit cover plate counting module is used for controlling, recording and feeding back the displacement of the slit cover plates in the slit cover plate queue module. Through the arrangement of the manipulator, the slit cover plate replacement is carried out in the ion beam vacuum chamber, the vacuum breaking replacement operation is avoided, the ion beam adjustment time is reduced, and the corresponding production capacity loss is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device technology, and in particular to an ion beam implantation system. Background Technology

[0002] Ion implantation is a doping technique for semiconductor materials that can significantly improve the yield of integrated circuits. Ion implanters are now widely used on production lines for manufacturing semiconductor devices and integrated circuits.

[0003] In the process of developing this disclosure, the inventors discovered at least the following problems in the prior art:

[0004] Current ion beam implantation systems can damage the sourcehead slit (Slit) of the ion source generator during operation. Manual replacement after damage occurs cannot be done alone, inevitably affecting the machine's vacuum and resulting in lengthy replacement times. Because the Slit cannot be replaced individually, other components of the ion source generator are easily affected, potentially leading to damage or shortened lifespan. Manual replacement requires the machine to be shut down, disrupting the independent vacuum operation of the ion source generator and causing a loss in production capacity. Even with an automatic Slit replacement system, the ion beam adjustment time is long, impacting production capacity by 1.5%. The replacement, cleaning, and restarting of the Slit requires at least 3 hours, impacting production capacity by 1%. Furthermore, the disruption of the vacuum deteriorates machine conditions, shortening the lifespan of the ion source generator's filament and cathode. A well-closed ion beam vacuum chamber has a good vacuum condition with very few impurities, and has a negligible impact on other parts of the ion beam injection system and the ion beam. Once the chamber is opened to replace the slit, the ion source generator needs to be removed. Water vapor entering the ion beam vacuum chamber will cause the rebuild vacuum to deteriorate, and oxygen will oxidize components such as the filament and cathode. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide an ion beam implantation system.

[0006] An ion beam implantation system includes a machine, an ion beam vacuum chamber, and an ion source generator, and further includes:

[0007] Slot cover queue module and manipulator;

[0008] The slit cover plate queue module is located inside the ion beam vacuum chamber and includes multiple slit covers;

[0009] The manipulator is connected to the slit cover queue module and is used to control the replacement of the slit cover on the ion source generator.

[0010] The manipulator includes a slit cover driving module and a slit cover step counting module;

[0011] The slot cover driving module includes a driving connection device and a driving power device, used to drive the slot covers in the slot cover queue module;

[0012] The drive connection device is disposed in a sealing hole on the wall of the ion beam vacuum chamber and is connected to the slit cover plate queue module.

[0013] The sealing hole is used to pass through the drive connection device and seal the ion beam vacuum chamber;

[0014] The driving power device is connected to the driving connection device, and the driving connection device moves the slot cover in the slot cover queue module.

[0015] The pedometer module for the slot cover is signal-connected to the slot cover queue module and is used to control, record and provide feedback on the displacement of the slot cover in the slot cover queue module.

[0016] Optionally, an insulating gasket is provided between the manipulator and the outer wall of the ion beam vacuum chamber, the insulating gasket being used to maintain insulation between the manipulator and the outer wall of the ion beam vacuum chamber.

[0017] Specifically, the driving power device includes a first-direction moving motor and a second-direction moving motor. The first-direction moving motor is used to provide power for the slit cover plates in the slit cover plate queue module to move in a first direction, and the second-direction moving motor is used to provide power for the slit cover plates in the slit cover plate queue module to move in a second direction.

[0018] Specifically, the pedometer module for the gap cover includes a first-direction pedometer and a second-direction pedometer. The first-direction pedometer is used to control, record, and provide feedback on the displacement of the gap cover in the gap cover queue module in the first direction. The second-direction pedometer is used to control, record, and provide feedback on the displacement of the gap cover in the gap cover queue module in the second direction.

[0019] Specifically, the pedometer module for the gap cover also includes a displacement signal receiving unit, which is used to receive the displacement setting signal of the gap cover in the gap cover queue module, and decompose the set displacement into displacement in a first direction and a second direction, and transmit the decomposed displacement in the first direction and the second direction to the first direction pedometer and the second direction pedometer, respectively.

[0020] Furthermore, the gap cover step counting module also includes a displacement setting unit, which is used to set the displacement of the gap cover in the gap cover queue module and transmit the displacement setting signal to the displacement signal receiving unit.

[0021] Specifically, the manipulator also includes a limiting module for limiting the maximum displacement of the slit cover drive module and the slit cover step counting module.

[0022] Specifically, the limiting module includes a first direction limiter and a second direction limiter. The first direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in the first direction, and the second direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in the second direction.

[0023] Specifically, the manipulator also includes a position detection module for detecting the positions of the slit cover driving module and the slit cover step counting module.

[0024] Specifically, the position detection module is associated with the machine tool interlocking system. When the position of the gap cover driving module or the gap cover step counting module reaches a preset threshold, the machine tool interlocking system controls the gap cover driving module to stop driving.

[0025] Specifically, the position detection module includes a first direction position detector and a second direction position detector. The first direction position detector is used to detect the position of the gap cover driving module and the gap cover step counting module in a first direction, and the second direction position detector is used to detect the position of the gap cover driving module and the gap cover step counting module in a second direction.

[0026] Specifically, the manipulator also includes a manipulator cavity for encapsulating the slit cover driving module and the slit cover step counting module.

[0027] Specifically, the outer wall of the manipulator cavity is provided with an observation and operation device, which is used to display and set the displacement of the slit cover in the slit cover queue module.

[0028] Specifically, the slot cover queue module also includes a slot cover trapezoidal bracket for arranging the multiple slot covers into a single column.

[0029] Specifically, an ion beam implantation system also includes an automatic control module for automatically controlling the slit cover plate step counting module according to a preset automatic control program.

[0030] Specifically, when the slit cover needs to be replaced, the manipulator moves the slit cover in the slit cover queue module to place the new slit cover on the ion source generator.

[0031] The beneficial effects of the above-described technical solutions provided in the embodiments of the present invention include at least the following:

[0032] By using a manipulator to replace the slit cover within the ion beam vacuum chamber, the vacuum-breaking replacement operation is avoided, reducing the corrosive damage of oxygen to other components of the ion beam injection system. This minimizes replacement time and manpower costs, making the process faster and more efficient. It also reduces the time needed to adjust the ion beam due to poor slit cover condition, thus reducing corresponding production capacity losses. The addition of a manipulator control system improves the efficiency and accuracy of slit cover replacement. The addition of signal lines controls and displays the slit cover's movement position, further enhancing accuracy and ease of use. Linking the slit cover's movement position to the machine's interlocking system increases safety.

[0033] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings.

[0034] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0035] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0036] Figure 1 This is a schematic diagram of a conventional ion beam implantation system in an embodiment of the present invention;

[0037] Figure 2 This is a schematic diagram of the ion beam implantation system in an embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of damage to the slit cover plate of the ion beam implantation system in an embodiment of the present invention;

[0039] Figure 4 This is a schematic diagram of the slit cover switching of the ion beam implantation system in an embodiment of the present invention;

[0040] Figure 5 This is a schematic diagram of the components of the ion beam implantation system, including the motor, limiter, and position detector, in an embodiment of the present invention.

[0041] Figure 6 This is a schematic diagram of the position of the manipulator on the machine in an embodiment of the present invention. Detailed Implementation

[0042] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0043] Existing ion beam implantation systems such as Figure 1 As shown, the ion beam vacuum chamber is located on the machine platform, specifically a diffusion machine or a strip ion beam injection machine. The ion source generator is located within the ion beam vacuum chamber, generating and ejecting a large number of ions. A slit is installed at the ion outlet of the ion source generator to filter the ions. Ions passing through the slit form an ion beam, which enters the ion beam vacuum chamber. When replacing the ion source generator slit, it is often impossible to replace it individually, leading to frequent incidents of damage or shortened lifespan of other components of the ion source generator. If the ion source generator slit could be automatically replaced with a new one without affecting the machine's operation, and even if manual replacement is necessary, it could be done independently without affecting vacuum operation, thus extending the lifespan of the ion source generator and avoiding production losses caused by machine downtime.

[0044] To address the problems existing in the prior art, embodiments of the present invention provide an ion beam implantation system.

[0045] Example 1

[0046] This invention provides an ion beam implantation system, including a machine, an ion beam vacuum chamber, and an ion source generator, the structure of which is as follows: Figure 2 As shown, the ion beam implantation system also includes:

[0047] Slot cover queue module and manipulator;

[0048] The slit cover plate queue module is located within the ion beam vacuum chamber and includes multiple slits. The arrangement of these slits can be varied, such as single-row, double-row, multi-row, circular, fan-shaped, or any other arbitrary arrangement. The slit type of the slits can be fixed or adjustable, and the slit shape can be selected according to different situations.

[0049] The manipulator is connected to the slit cover plate queue module and is used to control the replacement of the slit cover plate on the ion source generator; an opening is made on the outer wall side of the ion beam vacuum chamber, the slit cover plate queue connected to the manipulator is inserted into the ion beam vacuum chamber, the ion beam vacuum chamber is sealed, and the ion beam vacuum chamber is evacuated.

[0050] The manipulator includes a slit cover driving module and a slit cover step counting module;

[0051] The slit cover driving module includes a driving connection device and a driving power device, used to drive the slit covers in the slit cover queue module; driving the slit covers in the slit cover queue module, thereby changing the slit cover facing the ion outlet of the ion source generator. During the formation of the ion beam, the slit will experience loss and erosion. When it reaches a certain level, the uniformity of the ion beam formed by the slit will decrease, failing to meet the requirements of ion implantation. Therefore, it is necessary to judge the condition of the slit cover at the ion outlet of the ion source generator based on the current condition of the slit cover and the specific ion beam requirements. When the condition of the slit cover at the ion outlet of the ion source generator is insufficient to meet the requirements, the slit cover needs to be replaced. In the embodiments of the present invention, as shown... Figure 3 and Figure 4 As shown, by moving the slit cover queue, slit covers that do not meet the requirements are removed from the ion outlet of the ion source generator, and new slit covers are simultaneously moved to the appropriate position at the ion outlet of the ion source generator. Figure 4 In this context, "Sourcechamber" refers to the ion beam vacuum chamber. Figure 3 This indicates that the slit cover plate at the ion outlet of the ion source generator is damaged, causing erosion and affecting the quality of the generated ion beam. Figure 4 This indicates a slit cover switch. The drive connection device moves the slit cover in the slit cover queue module, removing the damaged slit cover from the ion outlet of the ion source generator, and simultaneously moving the new slit cover to the appropriate position at the ion outlet of the ion source generator.

[0052] The drive connection device is disposed in a sealing hole on the wall of the ion beam vacuum chamber and is connected to the slit cover plate queue module.

[0053] The sealing hole is used to pass through the drive connection device and seal the ion beam vacuum chamber;

[0054] The driving power device is connected to the driving connection device, and moves the slit covers in the slit cover queue module through the driving connection device. The driving power device can be a device that generates driving force, such as a motor. The driving power device is connected to the driving connection device, and the driving force generated is transmitted to the slit covers in the slit cover queue module through the driving connection device, thereby causing the slit covers in the slit cover queue module to move. Specifically, the movement of the slit covers in the slit cover queue module can include multiple directions. It can move in a direction perpendicular to the ion beam to replace the slit cover, or it can move in a direction parallel to the ion beam to adjust the distance from the slit to the ion outlet of the ion source generator, thereby generating different ion beams.

[0055] The slit cover plate step counting module is signal-connected to the slit cover plate queue module and is used to control, record, and provide feedback on the displacement of the slit cover plates in the slit cover plate queue module. The slit cover plate step counting module records the movement of the slit cover plates in the slit cover plate queue module and controls the movement of the slit cover plates in the slit cover plate queue module. Specifically, the slit cover plate step counting module controls the drive power device to generate a driving force on the slit cover plates in the slit cover plate queue module, or to stop driving the slit cover plates in the slit cover plate queue module. The slit cover plate step counting module can also provide feedback on the displacement of the slit cover plates in the slit cover plate queue module, thereby facilitating more accurate control of the displacement of the slit cover plates in the slit cover plate queue module by the user of the ion beam implantation system.

[0056] This embodiment of an ion beam implantation system utilizes a manipulator to replace the slit cover within the ion beam vacuum chamber. This avoids vacuum-breaking replacement operations, reduces oxygen corrosion and damage to other components of the ion beam implantation system, minimizes replacement time and manpower costs, and is fast and efficient. It also reduces the time needed to adjust the ion beam due to poor slit cover condition and consequently reduces production capacity losses. The addition of a manipulator control system improves the efficiency and accuracy of slit cover replacement. Controlling and feeding back the movement position of the slit cover enhances the accuracy of replacement and facilitates use. Linking the slit cover's movement position to the machine interlock system increases safety.

[0057] Example 2

[0058] This invention provides an ion beam implantation system, including a machine, an ion beam vacuum chamber, and an ion source generator, the structure of which is as follows: Figure 5As shown, it also includes: a slit cover plate queue module and a manipulator; the slit cover plate queue module is located within the ion beam vacuum chamber and includes multiple slit covers; the manipulator is connected to the slit cover plate queue module and is used to control the replacement of slit covers on the ion source generator; the manipulator includes a slit cover plate drive module and a slit cover plate step counting module; the slit cover plate drive module includes a drive connection device and a drive power device, used to drive the slit covers in the slit cover plate queue module; the drive connection device is disposed in a sealing hole on the wall of the ion beam vacuum chamber and is connected to the slit cover plate queue module; the sealing hole is used to pass through the drive connection device and seal the ion beam vacuum chamber; the drive power device is connected to the drive connection device and moves the slit covers in the slit cover plate queue module through the drive connection device; the slit cover plate step counting module is signal-connected to the slit cover plate queue module and is used to control, record, and feedback the displacement of the slit covers in the slit cover plate queue module. The arrangement of the multiple slit covers can be varied, such as single-row, double-row, multi-row, circular, fan-shaped, or any other arbitrary arrangement. The slit type of the slit covers can be fixed or adjustable, and the slit shape can be selected according to different situations. An opening is made on the side of the outer wall of the ion beam vacuum chamber. The array of slit covers connected to the manipulator is inserted into the ion beam vacuum chamber, and the chamber is sealed. A vacuum is then evacuated from the ion beam vacuum chamber.

[0059] Optionally, an insulating gasket is provided between the manipulator and the outer wall of the ion beam vacuum chamber, the insulating gasket being used to maintain insulation between the manipulator and the outer wall of the ion beam vacuum chamber. Figure 5 As shown in the left and top views, the insulating gasket separates the manipulator from the ion beam vacuum chamber, preventing the current on the manipulator from interfering with the ion beam vacuum chamber and the ion source generator.

[0060] Specifically, the driving power device includes a first-direction moving motor and a second-direction moving motor. The first-direction moving motor provides power for the slit covers in the slit cover queue module to move in a first direction, and the second-direction moving motor provides power for the slit covers in the slit cover queue module to move in a second direction. Figure 5As shown in the top view, the first directional moving motor is a lateral moving motor, used to provide power for the lateral movement of the slit cover plates in the slit cover plate queue module. Lateral movement refers to the direction perpendicular to the ion beam. Lateral movement is used to replace the slit cover plates. The second directional moving motor is a longitudinal moving motor, used to provide power for the longitudinal movement of the slit cover plates in the slit cover plate queue module. Longitudinal movement refers to the direction parallel to the ion beam. Longitudinal movement is used to adjust the distance from the slit of the slit cover plate to the ion outlet of the ion source generator, thereby generating ion beams that meet different requirements.

[0061] Specifically, the pedometer module for the slot cover includes a first-direction pedometer and a second-direction pedometer. The first-direction pedometer is used to control, record, and provide feedback on the displacement of the slot cover in the slot cover queue module in a first direction. The second-direction pedometer is used to control, record, and provide feedback on the displacement of the slot cover in the slot cover queue module in a second direction. Figure 5 As shown in the top view, the first direction pedometer is a lateral pedometer, used to control, record and provide feedback on the lateral displacement of the slit cover plate in the slit cover plate queue module. Lateral refers to the direction perpendicular to the ion beam. The second direction pedometer is a longitudinal pedometer, used to control, record and provide feedback on the longitudinal displacement of the slit cover plate in the slit cover plate queue module. Longitudinal refers to the direction parallel to the ion beam.

[0062] Specifically, the pedometer module for the slot cover further includes a displacement signal receiving unit, used to receive a displacement setting signal for the slot cover in the slot cover queue module, and decompose the set displacement into displacements in a first direction and a second direction, respectively transmitting the decomposed displacements in the first direction and the second direction to the first direction pedometer and the second direction pedometer. In this embodiment, the displacement signal receiving unit decomposes the displacement into lateral and longitudinal displacements, and transmits the decomposed lateral and longitudinal displacements to the lateral pedometer and the longitudinal pedometer, respectively. The signal transmission can be via electrical signals or network signals.

[0063] Furthermore, the gap cover step counting module also includes a displacement setting unit, used to set the displacement of the gap cover in the gap cover queue module, and transmit the displacement setting signal to the displacement signal receiving unit. The signal transmission can be via electrical signals or network signals.

[0064] Specifically, the manipulator also includes a limiting module for limiting the maximum displacement of the slot cover driving module and the slot cover step counting module. In this embodiment, the slot cover queue is connected to the slot cover driving module; specifically, the slot cover queue is connected to the drive connection device, and the drive connection device is connected to the drive power device. Therefore, when the slot covers in the slot cover queue module move, the slot cover driving module also moves. Furthermore, when a scheme is used where the slot cover step counting module is connected to the slot cover driving module to count the displacement of the slot covers, the slot cover step counting module also moves along with the slot covers in the slot cover queue module. When the displacement of the slot cover driving module or the slot cover step counting module exceeds a certain limit, it may rub or squeeze against other components of the manipulator, causing damage to the devices. Therefore, to prevent the displacement of the slot cover driving module or the slot cover step counting module from exceeding a certain limit, it is necessary to limit the maximum displacement of the slot cover driving module and the slot cover step counting module.

[0065] Specifically, the limiting module includes a first-direction limiter and a second-direction limiter. The first-direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in a first direction, and the second-direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in a second direction. Figure 5 As shown in the top view, two limiters are provided in the horizontal and vertical directions respectively. The horizontal limiter is used to limit the maximum horizontal displacement of the slit cover driving module and the slit cover step counting module. The horizontal direction refers to the direction perpendicular to the ion beam. The vertical limiter is used to limit the maximum vertical displacement of the slit cover driving module and the slit cover step counting module. The vertical direction refers to the direction parallel to the ion beam.

[0066] Furthermore, the controller also includes a position detection module for detecting the positions of the slot cover driving module and the slot cover pedometer module. Detecting the positions of these modules allows for a more accurate understanding of their location, helping to ensure the normal operation of the equipment within the controller, preventing friction or compression with other components, thus avoiding damage and improving system safety.

[0067] Specifically, the position detection module is associated with the machine tool interlocking system. When the position of the slot cover drive module or the slot cover step counting module reaches a preset threshold, the machine tool interlocking system controls the slot cover drive module to stop driving. To prevent the displacement of the slot cover drive module or the slot cover step counting module from exceeding a certain limit, the positions of the slot cover drive module and the slot cover step counting module are detected, and corresponding thresholds are set and associated with the machine tool interlocking system. When the corresponding threshold is reached, the machine tool interlocking system controls the slot cover drive module to stop driving. This can more accurately limit the position of the slot cover drive module and the slot cover step counting module, ensuring the normal operation of the equipment inside the operator and the safety of the system, and avoiding friction or squeezing with other components of the operator, which could cause damage to the devices.

[0068] Specifically, the position detection module includes a first-direction position detector and a second-direction position detector. The first-direction position detector is used to detect the position of the slot cover driving module and the slot cover step counting module in a first direction, and the second-direction position detector is used to detect the position of the slot cover driving module and the slot cover step counting module in a second direction. Figure 5 As shown in the top view, two position detectors are provided in the horizontal and vertical directions respectively. The horizontal position detector is used to limit the horizontal position of the slit cover driving module and the slit cover step counting module. The horizontal direction refers to the direction perpendicular to the ion beam. The vertical position detector is used to limit the vertical position of the slit cover driving module and the slit cover step counting module. The vertical direction refers to the direction parallel to the ion beam.

[0069] Specifically, the manipulator also includes a manipulator cavity for encapsulating the slit cover driving module and the slit cover pedometer module. For example... Figure 5 As shown, the manipulator cavity includes a manipulator housing and a manipulator cover plate, which can encapsulate the slit cover plate drive module and the slit cover plate step counting module. It can also encapsulate the limit module and the position detection module in the manipulator cavity, which helps to isolate the main components of the manipulator from the outside and helps to improve system safety and stability.

[0070] Specifically, such as Figure 5 As shown in the front view, the outer wall of the manipulator cavity is provided with an observation and operation device, which is used to display and set the displacement of the slit cover in the slit cover queue module.

[0071] Specifically, such as Figure 2 , 3 As shown in Figures 4, 5, and 6, the slit cover plate queue module further includes a slit cover plate trapezoidal support for arranging the plurality of slit covers into a single column. The position of the manipulator in the ion beam implantation system provided in this embodiment of the invention is as follows: Figure 6 As shown, the manipulator is connected to the slit cover plate queue module and is mounted on the outer wall of the ion beam vacuum chamber.

[0072] Specifically, an ion beam implantation system also includes an automatic control module for automatically controlling the slit cover plate step counting module according to a preset automatic control program.

[0073] Specifically, such as Figure 3 and Figure 4 As shown, when the slit cover needs to be replaced, the manipulator moves the slit cover in the slit cover queue module to place the new slit cover on the ion source generator. Driving the slit cover in the slit cover queue module changes the slit cover facing the ion outlet of the ion source generator. During ion beam formation, the slit will experience loss and erosion. When this reaches a certain level, the uniformity of the ion beam formed by the slit will decrease, failing to meet the requirements for ion implantation. Therefore, it is necessary to judge the condition of the slit cover at the ion outlet of the ion source generator based on the current condition of the slit cover and the specific ion beam requirements. When the condition of the slit cover at the ion outlet of the ion source generator is insufficient to meet the requirements, the slit cover needs to be replaced. In this embodiment of the invention, as... Figure 3 and Figure 4 As shown, by moving the slit cover queue, slit covers that do not meet the requirements are removed from the ion outlet of the ion source generator, and new slit covers are simultaneously moved to the appropriate position at the ion outlet of the ion source generator. Figure 4 In the middle, "Source chamber" refers to the ion beam vacuum chamber. Figure 3 This indicates that the slit cover plate at the ion outlet of the ion source generator is damaged, causing erosion and affecting the quality of the generated ion beam. Figure 4 This indicates a slit cover switch. The drive connection device moves the slit cover in the slit cover queue module, removing the damaged slit cover from the ion outlet of the ion source generator, and simultaneously moving the new slit cover to the appropriate position at the ion outlet of the ion source generator.

[0074] This embodiment of an ion beam implantation system utilizes a manipulator to replace the slit cover within the ion beam vacuum chamber. This avoids vacuum-breaking replacement operations, reduces oxygen corrosion and damage to other components of the ion beam implantation system, minimizes replacement time and manpower costs, and is fast and efficient. It also reduces the time needed to adjust the ion beam due to poor slit cover condition, thus reducing corresponding production capacity losses. The addition of a manipulator control system improves the efficiency and accuracy of slit cover replacement. The addition of signal lines controls and displays the movement position of the slit cover, further enhancing the accuracy of replacement and facilitating use. Linking the slit cover's movement position to the machine interlock system increases safety.

[0075] Any modifications, additions, and equivalent substitutions made within the scope of the principles of this invention shall still fall within the patent coverage of this invention.

Claims

1. An ion beam implantation system comprising a machine table, an ion beam vacuum chamber and an ion source generator, characterized in that, Also includes: Slot cover queue module and manipulator; The slit cover plate queue module is located inside the ion beam vacuum chamber and includes multiple slit covers; The manipulator is connected to the slit cover plate queue module and is used to control the replacement of the slit cover plate on the ion source generator. The manipulator includes a slit cover driving module and a slit cover step counting module; The slot cover driving module includes a driving connection device and a driving power device, used to drive the slot covers in the slot cover queue module; The drive connection device is disposed in a sealing hole on the wall of the ion beam vacuum chamber and is connected to the slit cover plate queue module. The sealing hole is used to pass through the drive connection device and seal the ion beam vacuum chamber; The driving power device is connected to the driving connection device, and the driving connection device moves the slot cover in the slot cover queue module. The pedometer module for the slot cover is signal-connected to the slot cover queue module and is used to control, record and provide feedback on the displacement of the slot cover in the slot cover queue module.

2. The system of claim 1, wherein, An insulating gasket is provided between the manipulator and the outer wall of the ion beam vacuum chamber, and the insulating gasket is used to maintain insulation between the manipulator and the outer wall of the ion beam vacuum chamber.

3. The system of claim 1, wherein, The driving power device includes a first-direction moving motor and a second-direction moving motor. The first-direction moving motor is used to provide power for the slit cover plates in the slit cover plate queue module to move in a first direction, and the second-direction moving motor is used to provide power for the slit cover plates in the slit cover plate queue module to move in a second direction.

4. The system of claim 3, wherein, The pedometer module for the gap cover includes a first-direction pedometer and a second-direction pedometer. The first-direction pedometer is used to control, record, and provide feedback on the displacement of the gap cover in the gap cover queue module in the first direction. The second-direction pedometer is used to control, record, and provide feedback on the displacement of the gap cover in the gap cover queue module in the second direction.

5. The system of claim 4, wherein, The pedometer module for the slit cover plate also includes a displacement signal receiving unit, which is used to receive the displacement setting signal of the slit cover plate in the slit cover plate queue module, decompose the set displacement into displacement in a first direction and a second direction, and transmit the decomposed displacement in the first direction and the second direction to the first direction pedometer and the second direction pedometer, respectively.

6. The system of claim 5, wherein, The gap cover step counting module further includes a displacement setting unit, which is used to set the displacement of the gap cover in the gap cover queue module and transmit the displacement setting signal to the displacement signal receiving unit.

7. The system of claim 1, wherein, The manipulator also includes a limiting module for limiting the maximum displacement of the slit cover drive module and the slit cover step counting module.

8. The system of claim 7, wherein, The limiting module includes a first direction limiter and a second direction limiter. The first direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in the first direction, and the second direction limiter is used to limit the maximum displacement of the gap cover driving module and the gap cover step counting module in the second direction.

9. The system of claim 1, wherein, The manipulator also includes a position detection module for detecting the positions of the slit cover driving module and the slit cover step counting module.

10. The system of claim 9, wherein, The position detection module is associated with the machine tool interlocking system. When the position of the gap cover driving module or the gap cover step counting module reaches a preset threshold, the machine tool interlocking system controls the gap cover driving module to stop driving.

11. The system of claim 9, wherein, The position detection module includes a first-direction position detector and a second-direction position detector. The first-direction position detector is used to detect the position of the gap cover driving module and the gap cover step counting module in a first direction, and the second-direction position detector is used to detect the position of the gap cover driving module and the gap cover step counting module in a second direction.

12. The system of any one of claims 1-11, wherein, The manipulator also includes a manipulator cavity for encapsulating the slit cover driving module and the slit cover step counting module.

13. The system of claim 12, wherein, The outer wall of the manipulator cavity is provided with an observation and operation device, which is used to display and set the displacement of the slit cover in the slit cover queue module.

14. The system of any one of claims 1-11, wherein, The slot cover queue module also includes a slot cover trapezoidal bracket for arranging the multiple slot covers into a single column.

15. The system of any one of claims 1-11, wherein, It also includes an automatic control module, which is used to automatically control the pedometer module of the slit cover according to a preset automatic control program.

16. The system of any one of claims 1-11, wherein, When the slit cover needs to be replaced, the manipulator moves the slit cover in the slit cover queue module to place the new slit cover on the ion source generator.

Images