Dust removing head and dust removing device

Abstract

A dust removing head (21) for a dust removing device for removing dust from a dust removing object and ejecting gas to be blown against the dust removing object, comprising: an ejection portion (70) formed with a plurality of guide inlets (81), a plurality of slits extending along a predetermined direction and adjacent in the predetermined direction, and flow passages respectively connecting the plurality of guide inlets with the same number of slits; and a main body (22) to which the ejection portion is attached, the main body being formed with a supply chamber (23) for supplying the gas, a first communication passage for communicating the supply chamber with the outside, and second communication passages (25 to 28) for respectively communicating the supply chamber with the plurality of guide inlets.

Description

[0001] Cross-reference of related applications

[0002] This application is based on Japanese application No. 2021-64891, filed on April 6, 2021, the contents of which are incorporated herein by reference. Technical Field

[0003] This invention relates to a dust removal head, which is a dust removal device for removing dust from precision dust removal objects such as exposure masks and substrates, and sprays gas to the dust removal object. Background Technology

[0004] Previously, such dust removal heads had a type of dust removal head that ejected air (gas) from a slit that spanned approximately the entire length of the long side (see Patent Document 1).

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent No. 3975205 Summary of the Invention

[0008] The problem the invention aims to solve

[0009] However, to increase the velocity of the ejected air, the slits are usually made very narrow, for example, 0.1 mm. Therefore, in the dust removal head described in Patent Document 1, it is difficult to form a slit with a uniform width across the entire length of the dust removal head by means of machining. In contrast, it is also possible to form multiple slits along the long side of the ejection section. However, in this case, there is a possibility that the amount of gas supplied to each slit may differ. Therefore, it is difficult to uniformly eject air along the long side (predetermined direction) of the dust removal head.

[0010] This disclosure is made to solve the above-mentioned problems, and the main objective of this disclosure is to provide a dust removal head that can uniformly spray gas in a predetermined direction extending from the slit of the dust removal head.

[0011] means for solving problems

[0012] A first solution to the above problem is a dust removal head, which is a dust removal device for removing dust from a dust removal object and spraying gas onto the dust removal object. The dust removal head comprises:

[0013] The ejection section comprises multiple inlets, multiple slits, and flow channels. The multiple slits extend along a predetermined direction and are adjacent to each other in that direction. The flow channels connect the multiple inlets to the same number of slits.

[0014] The main body, wherein the ejector part is mounted on the main body,

[0015] The main body includes: a supply chamber for supplying the gas; a first connecting channel connecting the supply chamber to the outside; and a second connecting channel connecting the supply chamber to the plurality of inlets respectively.

[0016] According to the above configuration, the dust removal head is a dust removal device used to remove dust from the dust removal object, and sprays out gas that is blown onto the dust removal object.

[0017] Here, the ejection section has multiple inlets, multiple slits extending in a predetermined direction and adjacent to each other in the predetermined direction, and flow channels connecting each of the multiple inlets to the same number of the multiple slits. Therefore, by supplying gas into the interior of the ejection section from the multiple inlets, gas can be supplied to the multiple slits through the flow channels, and gas can be ejected from the multiple slits. Therefore, it is not necessary to form slits spanning the entire length of the predetermined direction in the dust collector head, and each slit can be easily formed with a uniform width. Furthermore, multiple inlets are formed in the ejection section. Therefore, even when the number of slits increases, i.e., when the length of the ejection section in the predetermined direction increases, it is easy to supply the required amount of gas from the multiple inlets to the multiple slits through the flow channels. Moreover, the flow channels connect each of the multiple inlets to the same number of slits. Therefore, it is possible to suppress differences in the amount of gas supplied to each slit.

[0018] Furthermore, the main body where the ejector is installed includes: a supply chamber for supplying the gas; and a first connecting channel connecting the supply chamber to the outside. Therefore, gas can be supplied to the supply chamber from the outside of the dust collector head through the first connecting channel. Moreover, the main body has a second connecting channel connecting the supply chamber to each of the plurality of inlets. Therefore, gas can be supplied from the supply chamber to the plurality of inlets of the ejector head and then to the slit through the second connecting channel. Furthermore, since gas is supplied from the first connecting channel to the plurality of second connecting channels through the supply chamber, the number of first connecting channels for supplying gas to the plurality of second connecting channels can be reduced. Moreover, compared to supplying gas to the plurality of second connecting channels through branch channels branching from the first connecting channel, it is easier to supply gas evenly to the plurality of second connecting channels. Based on the above, gas can be easily and evenly ejected in a predetermined direction extending from the slit of the dust collector head.

[0019] In the second embodiment, the main body is formed in the shape of a cuboid, and a predetermined plane is formed at the bottom of the main body, extending across the entire length of the main body in the predetermined direction and forming a predetermined angle with the bottom surface of the main body. The ejector is mounted on the predetermined plane so that the gas is ejected from the slit parallel to the predetermined plane.

[0020] According to the above configuration, the main body is formed in a cuboid shape, and a predetermined plane extending across the entire length of the main body in the predetermined direction and forming a predetermined angle with the bottom surface of the main body is formed at the bottom of the main body. Therefore, by cutting the bottom of the cuboid-shaped main body, the predetermined plane extending across the entire length of the main body in the predetermined direction can be easily formed. Furthermore, when forming the predetermined plane, the predetermined angle between the predetermined plane and the bottom surface of the main body can be easily adjusted.

[0021] Furthermore, the ejector is mounted on the predetermined plane so that the gas is ejected from the slit parallel to the predetermined plane. Therefore, even without changing the configuration of the ejector itself, the ejection angle of the gas relative to the bottom surface of the main body can be easily adjusted by adjusting the predetermined angle.

[0022] In the third embodiment, the predetermined angle is between 15° and 45°. Experiments and simulations conducted by the inventors of this application have confirmed that, with this configuration, when the upper surface of the dust removal object and the bottom surface of the main body are arranged in parallel, and gas is ejected from the nozzle and blown onto the dust removal object, the air between the bottom of the dust removal head and the dust removal object is pulled towards the horizontal component of the velocity of the gas ejected from the slit due to negative pressure and the viscosity of the air. Therefore, it is possible to prevent dust removed from the dust removal object from scattering in the direction opposite to the horizontal component of the velocity of the gas ejected from the slit, and to prevent the removed dust from re-adhering to the dust removal object.

[0023] In the fourth embodiment, the predetermined angle is 25° to 35°. Experiments and simulations conducted by the inventors of this application have confirmed that, according to this configuration, when gas is ejected from the ejector section and blown onto the dust-collecting object, the air between the bottom of the dust-collecting head and the dust-collecting object is significantly directed towards the horizontal component of the velocity of the gas ejected from the slit due to negative pressure and the viscosity of the air.

[0024] In the fifth embodiment, the second connecting channel opens on the predetermined plane, the inlet is opposite to the opening end of the second connecting channel on the predetermined plane, and a receiving groove for receiving a sealing member is formed around the opening end of the second connecting channel on the predetermined plane. The main body and the ejection part are sealed by the sealing member received in the receiving groove.

[0025] According to the above configuration, the second connecting channel opens on the predetermined plane, and the inlet is opposite to the opening end of the second connecting channel on the predetermined plane. Therefore, the second connecting channel can be connected to the inlet. Here, a receiving groove for receiving a sealing member is formed around the opening end of the second connecting channel on the predetermined plane, and the main body and the ejection part are sealed by the sealing member received in the receiving groove. With this configuration, since a receiving groove for receiving a sealing member is formed on the predetermined plane of the main body, it is not necessary to form a receiving groove in the ejection part. Therefore, the ejection part can be formed into a thin type such as a thin plate, and the configuration of the ejection part can be simplified.

[0026] In the sixth embodiment, a plurality of ejector sections are arranged side-by-side on the main body in the predetermined direction, and the supply chamber extends along the plurality of ejector sections in the predetermined direction. A second connecting channel communicates the supply chamber with the plurality of inlets of the plurality of ejector sections. With this configuration, by arranging the plurality of ejector sections side-by-side in the predetermined direction, a dust removal head with a long length in the predetermined direction can be achieved. Furthermore, compared to the case where a dust removal head with a long length in the predetermined direction is achieved using a single ejector section, it is easier to uniformly eject gas across the entire length of the predetermined direction from each ejector section, thus enabling easy uniform gas ejection across the entire length of the dust removal head in the predetermined direction. Moreover, since gas is introduced from the common supply chamber extending along the plurality of ejector sections in the predetermined direction to the plurality of inlets of the plurality of ejector sections, gas can be supplied to the supply chamber through a first connecting channel.

[0027] In the seventh embodiment, the receiving grooves correspond to the plurality of ejector parts, which are arranged side by side in the predetermined direction, and the main body and each ejector part are sealed by sealing members respectively housed in the receiving grooves. With this configuration, compared to the case where a long ejector part in the predetermined direction is sealed to the main body by a single sealing member, each ejector part and the main body can be sealed more stably by sealing members.

[0028] In the eighth embodiment, the main body is divided into main body components corresponding to a plurality of ejection portions respectively. A first engaging portion communicating with the supply chamber is provided at one end of the main body component in the predetermined direction, and a second engaging portion communicating with the supply chamber and engaging with the first engaging portion is provided at the other end of the main body component.

[0029] According to the above configuration, the main body is divided into main body components corresponding to a plurality of ejection portions. Therefore, the main body can be constructed by dividing it into multiple main body components, and by increasing the number of main body components, the length of the main body in a predetermined direction can be increased. Furthermore, a first engaging portion communicating with the supply chamber is provided at one end of each main body component in the predetermined direction, and a second engaging portion communicating with the supply chamber and engaging with the first engaging portion is provided at the other end of each main body component. Therefore, by engaging the first engaging portion and the second engaging portion, adjacent main body components can be connected, and the supply chambers of adjacent main body components can be connected.

[0030] In the ninth embodiment, the length of the second connecting channel is equal to the length of the inlet in the predetermined direction. With this configuration, gas can easily flow uniformly from the supply chamber to the inlet in the predetermined direction.

[0031] In the tenth embodiment, the second connecting channel extends from the supply chamber to the side opposite to the inlet, then turns back towards the inlet and connects to the inlet. With this configuration, since the length from the supply chamber to the inlet of the second connecting channel can be easily increased, the gas flow rate in a predetermined direction can be made nearly uniform during the gas flow through the second connecting channel.

[0032] In the eleventh embodiment, the flow area of ​​the reversing portion in the second connecting channel is smaller than that of the other portions. With this configuration, by temporarily narrowing the flow channel in the reversing portion of the second connecting channel, the unevenness of gas flow in the predetermined direction can be reduced.

[0033] The twelfth option is a dust removal device, which includes:

[0034] Two first dust removal heads, wherein the first dust removal head is the dust removal head described in any one of the second to eleventh schemes;

[0035] Two second dust removal heads, each shorter than the first dust removal head in the predetermined direction, eject the gas from a slit; and

[0036] The cover is formed into a rectangular cylinder with a pair of long sides and a pair of short sides. A first opening on the upper side of the cover is connected to an air duct for drawing in air, and the cover draws in air from a second opening on the lower side.

[0037] The first dust removal heads are respectively installed on the pair of long sides, such that the gas ejected from the slits of the two first dust removal heads is directed towards the lower inner side of the shroud.

[0038] The second dust removal heads are respectively installed on the pair of short sides, such that the gas ejected from the slits of the two second dust removal heads is directed toward the lower inner side of the shroud.

[0039] According to the above configuration, the hood is formed into a rectangular cylinder with a pair of long sides and a pair of short sides. The first opening on the upper side of the hood is connected to the air duct for drawing in air, and the hood draws in air from the second opening on the lower side. Therefore, dust removed from the dust-collecting object by the gas ejected from the dust collection head can be drawn in from the second opening and discharged into the air duct from the first opening.

[0040] Here, the first dust removal heads are respectively installed on the pair of long sides, such that the gas ejected from the slits of the two first dust removal heads is directed toward the lower inner side of the cover. Therefore, the gas ejected from the two first dust removal heads can collide on the lower inner side of the cover, and leakage of gas ejected from the first dust removal heads from the lower side of the cover to the outer side can be suppressed. In particular, by having the configuration of the third (fourth) solution, where the predetermined angle is 15° to 45° (25° to 35°), when the upper surface of the dust removal object and the bottom surface of the main body are arranged in parallel, the air between the bottom of the dust removal head and the dust removal object can be directed in the direction of the horizontal component of the velocity of the gas ejected from the slit by using negative pressure and the viscosity of the air.

[0041] Furthermore, the second dust removal heads are respectively installed on the pair of short sides, such that the gas ejected from the slits of the two second dust removal heads is directed towards the lower inner side of the hood. Therefore, it is possible to prevent the gas ejected from the first dust removal head installed on the long side from leaking outwards from the lower side of the short side of the hood after removing dust adhering to the object being dusted.

[0042] In the thirteenth embodiment, the first angle is 15° to 45°, which is the angle between the direction of travel of the gas ejected from the slits of the two first dust removal heads and the upper surface of the object being dusted, when viewed from a direction parallel to the long side. The second angle is 15° to 45°, which is the angle between the direction of travel of the gas ejected from the slits of the two second dust removal heads and the upper surface of the object being dusted, when viewed from a direction parallel to the short side. With this configuration, the air between the bottom of the dust removal head and the object being dusted can be directed towards the horizontal component of the velocity of the gas ejected from the slits using negative pressure and the viscosity of the air.

[0043] In the fourteenth embodiment, the first angle is 25° to 35°, and the second angle is 25° to 35°. With this configuration, the air between the bottom of the dust removal head and the object being dusted is significantly directed towards the horizontal component of the velocity of the gas ejected from the slit, utilizing negative pressure and the viscosity of the air.

[0044] In the fifteenth embodiment, the distance between the opening ends of the slits of the two first dust removal heads and the upper surface of the dust removal object, and the distance between the opening ends of the slits of the two second dust removal heads and the upper surface of the dust removal object, are 5mm to 20mm. Through experiments and simulations conducted by the inventors of this application, it has been confirmed that this configuration can achieve the effect of any one of the eighth to tenth embodiments.

[0045] In the sixteenth embodiment, a first port and a second port for supplying the gas to two first dust removal heads are respectively located at one end of the predetermined direction of the dust removal device. The dust removal device includes: a first supply channel for supplying the gas from the first port through the supply chamber of one of the first dust removal heads to one of the second dust removal heads; and a second supply channel for directly supplying the gas from the second port to the other first dust removal head and the other second dust removal head.

[0046] According to the above configuration, a first port and a second port, which supply gas to two first dust removal heads respectively, are provided at one end of the dust removal device in the predetermined direction. Therefore, the first port and the second port can be concentrated at one end of the dust removal device in the predetermined direction. Furthermore, a first supply channel supplies gas from the first port through the supply chamber of one of the first dust removal heads to one of the second dust removal heads. Therefore, by utilizing the supply chamber of the first dust removal head, gas can be supplied to the second dust removal head, which is located at the end of the dust removal device in the predetermined direction opposite to the first port. Additionally, the second supply channel can directly supply gas from the second port to both the other first dust removal head and the other second dust removal head.

[0047] In the seventeenth embodiment, the dust removal device supplies the gas at equal flow rates to the first and second ports. With this configuration, it is easy to supply equal flow rates of gas to the multiple slits of the multiple ejection sections, and differences in the amount of gas supplied to each slit can be suppressed.

[0048] Alternatively, the configuration described in the eighteenth embodiment can be adopted, which includes: a first supply channel for supplying the gas to one of the first dust removal heads; a second supply channel for supplying the gas to the other of the first dust removal heads; a third supply channel for supplying the gas to one of the second dust removal heads; and a fourth supply channel for supplying the gas to the other of the second dust removal heads.

[0049] In the nineteenth embodiment, equal flow rates of gas are supplied to the first and second supply channels, and equal flow rates of gas are supplied to the third and fourth supply channels. With this configuration, it is easy to supply equal flow rates of gas to the two first dust collectors, thus suppressing any difference in the amount of gas ejected from the slits of the two first dust collectors. Furthermore, it is easy to supply equal flow rates of gas to the two second dust collectors, thus suppressing any difference in the amount of gas ejected from the slits of the two second dust collectors.

[0050] In the twentieth embodiment, the flow area of ​​the supply chamber is larger than the flow area of ​​the first supply channel and the flow area of ​​the second supply channel. With this configuration, the gas supplied to the first and second supply channels can temporarily diffuse within the supply chamber, facilitating the supply of equal flow rates of gas from the supply chamber to multiple second connecting channels. Attached Figure Description

[0051] The foregoing objectives, other objectives, features, and beneficial effects of this disclosure will become clearer from the following detailed description taken in conjunction with the accompanying drawings.

[0052] Figure 1 This is a perspective view showing the dust removal device.

[0053] Figure 2 This is a 3D view of the dust collector head assembly.

[0054] Figure 3 This is a three-dimensional cross-sectional view of the dust collector head assembly.

[0055] Figure 4 This is a three-dimensional longitudinal section view of the dust collector head assembly.

[0056] Figure 5 It is a 3D diagram of the supply block.

[0057] Figure 6 This is a three-dimensional view showing the connection status of the supply blocks.

[0058] Figure 7 This is a 3D view of the connecting ring.

[0059] Figure 8 yes Figure 4 Enlarged 3D view of part A.

[0060] Figure 9 This is a three-dimensional view of the lower part of the supply block and the ejector plate.

[0061] Figure 10 This is an exploded perspective view showing the upper surface of the ejector plate.

[0062] Figure 11 This is an exploded perspective view showing the lower surface of the ejector plate.

[0063] Figure 12 This is a 3D view of the ejector plate.

[0064] Figure 13 It is a three-dimensional longitudinal section view of the two first dust removal heads.

[0065] Figure 14 This is a side view showing the angle of the ejector plate relative to the photomask.

[0066] Figure 15 It is the longitudinal section of the two second dust collectors. Detailed Implementation

[0067] Hereinafter, an embodiment of a dust removal apparatus for removing dust from a photomask used in an exposure apparatus will be described with reference to the accompanying drawings. The dust removal apparatus sprays air (gas) onto the upper surface of the photomask to remove dust, and then draws in the removed dust and discharges it through an air duct.

[0068] like Figure 1 As shown, the dust removal device 10 includes a dust removal head assembly 20, a cover 11, handles 12A and 12B, etc.

[0069] The cover 11 is mounted on the dust collector assembly 20. The cover 11 is formed as a bottomed rectangular cylinder (rectangular cylinder) having a pair of long sides 11a, a pair of short sides 11b, and an upper bottom 11c. A first opening 11d, which serves as the opening on the upper side of the cover 11, is connected to an air duct 18. The air duct 18 is connected to a suction device (not shown) to draw air from inside the cover 11, and further draws air from a second opening, which serves as the opening on the lower side of the cover 11.

[0070] Figure 2 This is a perspective view of the dust collector head assembly 20. The dust collector head assembly 20 includes two first dust collector heads 21, two second dust collector heads 40, two first connecting blocks 50, two second connecting blocks 60, and a connecting plate 20a, etc.

[0071] Two first dust removal heads 21 are arranged parallel to each other. The two first dust removal heads 21 are respectively installed on the aforementioned pair of long side surfaces 11a (refer to...). Figure 1 The first dust removal head 21 (dust removal head) has six (or more) supply blocks 22. The six supply blocks 22 are arranged and connected to each other along the long side (predetermined direction) of the first dust removal head 21 (dust removal device 10). The length of the first dust removal head 21 along the long side is, for example, 60 mm to 800 mm. In addition, the main body is composed of the six supply blocks 22, and the main body is divided into six supply blocks 22 (main body components).

[0072] Two second dust collectors 40 are arranged parallel to each other. The two second dust collectors 40 are respectively installed on the aforementioned pair of short sides 11b (see reference). Figure 1 The second dust removal head 40 is formed to be shorter than the length of the long side of the first dust removal head 21.

[0073] A first connecting block 50 or a second connecting block 60 is provided between the first dust removal head 21 and the second dust removal head 40. The connecting plate 20a is a rectangular frame-shaped plate that connects the two first dust removal heads 21, the two second dust removal heads 40, the two first connecting blocks 50, and the two second connecting blocks 60 into a rectangular frame shape.

[0074] The first connecting block 50 is provided with a first port 51 for supplying high-pressure (predetermined pressure) clean air (clean and dry air). The second connecting block 60 is provided with a second port 61 for supplying high-pressure (predetermined pressure) clean air (clean and dry air). Air of equal flow rate is supplied to the first port 51 and the second port 61. The dust removal device 10 is located at one end in the long side direction of the first port 51 and the second port 61.

[0075] like Figure 3 , 4 As shown, each supply chamber 23 is formed inside each supply block 22. The supply chamber 23 is formed as a rectangular column space, extending along the long side of the first dust removal head 21. Adjacent supply chambers 23 are interconnected. The supply chamber 23 of the supply block 22 at one end along the long side of the first dust removal head 21 is connected to the first outlet 51 through a connecting channel 52 formed inside the first connecting block 50. The supply chamber 23 of the supply block 22 at the other end along the long side of the first dust removal head 21 is connected to a connecting channel 62 formed inside the second connecting block 60.

[0076] The second dust collector head 40 includes a supply block 42. A supply chamber 43 is formed inside the supply block 42. The supply chamber 43 communicates with a connecting channel 62. Furthermore, connecting channels 52 and 62, which supply air from the first opening 51 through the supply chambers 23 of one first dust collector head 21 to one second dust collector head 40, constitute a first supply channel. A connecting channel 62, which directly supplies air from the second opening 61 to both the other first dust collector head 21 and the other second dust collector head 40, constitutes a second supply channel. The channel areas of the supply chambers 23 and 43 are larger than the channel areas of both the first and second supply channels. Additionally, in the long side direction of the first dust collector head 21, the ends opposite to the first opening 51 and the ends opposite to the second opening 61 are closed by other components.

[0077] Figure 5 This is a 3D view of supply block 22.

[0078] The supply block 22 is formed in a cuboid shape. A triangular groove 29 with a right-angled triangular cross-section is formed at the bottom (bottom) of the supply block 22. The triangular groove 29 extends the entire length of the supply block 22 along its long side (predetermined direction). Two openings 33 (see reference) are formed on the bottom surface 29a (predetermined plane), which is the larger bottom surface of the triangular groove 29. Figure 9 At the bottom of the supply block 22, there are storage grooves 34 for storing sealing components such as O-rings formed around the two openings 33.

[0079] First connecting channels 24 are formed at both ends of the supply block 22 along its long side, connecting the supply chamber 23 to the outside along its long side. Two openings 30 are formed at the upper bottom (bottom) of the supply block 22. Around the two openings 30 at the upper bottom of the supply block 22, there are receiving grooves 31 for receiving sealing components such as O-rings.

[0080] A connecting channel 25 is formed in the supply block 22, connecting the supply chamber 23 to each of the two openings 30. A connecting channel 27 extends parallel to the connecting channel 25 in the supply block 22. A connecting channel 26 connects the connecting channels 25 and 27 in the supply block 22. A connecting channel 28 connects the connecting channel 27 to the opening 33 in the supply block 22. The lengths of connecting channels 25, 27, and 28 are equal along the long side of the supply block 22. The flow area of ​​connecting channel 26 is smaller than that of connecting channel 25 and connecting channel 27.

[0081] Two openings 30 are covered by connecting plate 20a. The upper bottom of supply block 22 is sealed to connecting plate 20a by a sealing member housed in receiving groove 31. Additionally, connecting channels 25 to 28 constitute a second connecting channel. That is, the second connecting channel extends from supply chamber 23 to the side opposite to opening 33, then bends back towards opening 33 and connects to it. In the second connecting channel, the flow area of ​​connecting channel 26, which is the bend-back portion, is smaller than the flow area of ​​other portions. The second connecting channel opens at bottom surface 29a.

[0082] Along the long side of the supply block 22, a first engaging portion 35 communicating with the supply chamber 23 is provided at one end of the supply block 22, and a second engaging portion 36 is provided at the other end of the supply block 22. The second engaging portion 36 communicates with the supply chamber 23 and engages with the first engaging portion 35 of the adjacent supply block 22. The first engaging portion 35 and the second engaging portion 36 are formed as annular recesses.

[0083] like Figure 6 As shown, adjacent supply blocks 22 are connected by a connecting ring 37. Figure 7As shown, the connecting ring 37 has a square cylindrical (ring-shaped) ring body 37b. An annular strip-shaped protrusion 37a is provided on the outer periphery of the ring body 37b. The strip-shaped protrusion 37a is located at the center of the ring body 37b along the central axis.

[0084] Figure 8 It is Figure 4 The perspective view shown in enlarged form of section A. The connecting ring 37 engages with the inner circumferential surfaces of the two first connecting channels 24, the first engaging portion 35, and the second engaging portion 36. That is, the first engaging portion 35 and the second engaging portion 36 are engaged by the connecting ring 37. The first engaging portion 35 and the second engaging portion 36 are separated by the strip-shaped protrusion 37a of the connecting ring 37. Sealing members 38, such as O-rings, are respectively housed in the first engaging portion 35 and the second engaging portion 36. The sealing member 38 seals the first engaging portion 35 (supply block 22) and the ring body 37b of the connecting ring 37. The sealing member 38 seals the second engaging portion 36 (supply block 22) and the ring body 37b of the connecting ring 37. The sealing member 38 is compressed radially in the connecting ring 37. Therefore, even if the relative positions of adjacent supply blocks 22 in the long side direction deviate, the first engaging part 35 and the connecting ring 37, as well as the second engaging part 36 and the connecting ring 37, can be stably sealed by the sealing member 38.

[0085] Figure 9 This is a perspective view showing the lower part of the supply block 22 and the ejector plate 70. The ejector plate 70 is mounted on the bottom surface 29a. The bottom surface 29a (the lower bottom of the supply block 22) and the ejector plate 70 are sealed by a sealing member housed in the receiving groove 34. The ejector plate 70 ejects air that is blown towards the photomask.

[0086] Figure 10 This is an exploded perspective view showing the upper surface of the ejector plate 70. Figure 11 This is an exploded perspective view showing the lower surface of the ejector plate 70. The ejector plate 70 (ejection section, ejection section for a dust removal device) includes a first plate 71, a second plate 72, a third plate 80, etc.

[0087] The first plate 71 (first component) is formed, for example, from stainless steel (metal) of a predetermined thickness into a rectangular plate having a short side direction and a long side direction. The thickness of the first plate 71 is, for example, 0.3 mm to 0.7 mm, preferably 0.4 mm to 0.6 mm, and in this embodiment, 0.5 mm. The first plate 71 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 71a arranged in the short side direction are formed at both ends in the long side direction and at the center of the first plate 71. The screw holes 71a are formed by etching the first plate 71.

[0088] The second plate 72 (second component) is formed, for example, from stainless steel (metal) of a predetermined thickness into a rectangular plate having a short side and a long side. The shape of the second plate 72 corresponds to the shape of the first plate 71. The thickness of the second plate 72 is preferably, for example, 0.1 mm to 0.3 mm, and in this embodiment, it is 0.1 mm. The second plate 72 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 72a arranged in the short side direction are formed at both ends in the long side direction and at the center of the second plate 72.

[0089] Multiple notches 73, each opening at one end in the short side direction, are formed adjacent to each other along the entire length of the second plate 72. The notches 73 are rectangular in shape. Within each of the multiple notches 73, an inclined portion 73b is formed within a predetermined range in the short side direction of the second plate 72, starting from the opening end 73a. The closer the inclined portion 73b is to the opening end 73a, the longer the length of the notch 73 in the long side direction becomes. That is, the opening end 73a side of the multiple notches 73 has an extended shape. Screw holes 72a and notches 73 are formed by etching the second plate 72.

[0090] On the second plate 72, each boundary portion 74, which is the portion between notches 73, is formed symmetrical about a central line C, wherein the central line C defines the center of the boundary portion 74 in the long side direction of the second plate 72. That is, each boundary portion 74 has a shape symmetrical about its own central line C. In the long side direction of the second plate 72, the width of the front end of each boundary portion 74, that is, the interval between the opening ends 73a of adjacent notches 73, is preferably 0.5 mm or less, and in this embodiment, it is 0.4 mm.

[0091] Along the long side of the second plate 72, half-divided portions 74h are formed at both ends of the second plate 72, which are shaped to longitudinally divide the boundary portion 74 in half. Along the long side of the second plate 72, when the two second plates 72 are adjacent, a boundary portion 74 is formed by the two half-divided portions 74h (adjacent half-divided portions 74h).

[0092] The third plate 80 (third component) is formed, for example, from stainless steel (metal) of a predetermined thickness into a rectangular plate having a short side and a long side. The shape of the third plate 80 corresponds to the shape of the first plate 71. The thickness of the third plate 80 is preferably 0.8 mm to 1.2 mm, and in this embodiment, it is 1.0 mm. The third plate 80 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 80a arranged in the short side direction are formed at both ends in the long side direction and at the center of the third plate 80, respectively.

[0093] Two (or more) through holes 81 are formed on the third plate 80. The through holes 81 (inlet holes) are rectangular in shape and extend along the long side of the third plate 80 between screw holes 80a. The screw holes 80a are formed by etching the third plate 80.

[0094] A plurality of grooves 82 are formed on the third plate 80, extending from the through hole 81 toward the opening end 73a of the notch 73 in the short side direction of the third plate 80. The depth of the grooves 82 is preferably 0.4 mm to 0.6 mm, and in this embodiment, it is 0.5 mm. The grooves 82 are formed by half-etching the third plate 80. The grooves 82 communicate with the through hole 81. In the assembled state of the ejector plate 70, each groove 82 constitutes a flow channel communicating between the through hole 81 and each notch 73. The end 82a of the groove 82 at the opening end 73a is closer to the notch 73 than the inclined portion 73b of the notch 73 (see reference). Figure 12 In the plurality of slots 82, the flow channel areas of the connecting portions with the through holes 81 are equal to each other.

[0095] Multiple slots 83, corresponding to the groove 82, are formed on the third plate 80. These slots 83 communicate with both ends of the through hole 81 along the long side of the third plate 80. Each slot 83 communicates with two notches 73 (see reference). Figure 12 The other components of groove 83 are the same as those of groove 82. Two through holes 81 are connected to 10 (the same number) notches 73 through multiple grooves 82 and 83 (flow channels).

[0096] The first plate 71, the second plate 72, and the third plate 80 are formed of the same material (e.g., SUS304). The second plate 72 is sandwiched between the first plate 71 and the third plate 80, and the first plate 71, the second plate 72, and the third plate 80 are diffusely bonded. For example, diffusion bonding is performed by pressurizing the first plate 71, the second plate 72, and the third plate 80 in the thickness direction with a predetermined pressure and heating them to 800°C to 900°C in a vacuum furnace. When the first plate 71, the second plate 72, and the third plate 80 are joined together, slits are formed through the spaces inside the notches 73 defined by the first plate 71, the second plate 72, and the third plate 80. The width of the slits in the thickness direction of the first plate 71, the second plate 72, and the third plate 80 is predetermined by the thickness of the second plate 72 and is 0.1 mm.

[0097] Figure 13 This is a longitudinal sectional perspective view of the two first dust removal heads 21. Additionally, the representation of the long side surface 11a on the front side is omitted.

[0098] A second connecting channel, consisting of connecting channels 25 to 28, connects the supply chamber 23 to multiple through holes 81 in the ejection plate 70. Specifically, the through holes 81 are opposite to the openings of the second connecting channel on the bottom surface 29a of the supply block 22 (see reference). Figure 9 In the long side direction of the supply block 22 (first dust removal head 21), the length of the second connecting channel is equal to the length of the through hole 81.

[0099] Each supply block 22 is equipped with a spray plate 70. That is, on the main body composed of 6(more) supply blocks 22, 6(more) spray plates 70 are installed side by side along the long side of the main body. The supply chamber 23 extends along the multiple spray plates 70 along the long side of the main body.

[0100] The first dust removal head 21 is mounted on a pair of long sides 11a such that the air ejected from the slits of the ejection plates 70 of the two first dust removal heads 21 is directed toward the lower inner side of the cover 11.

[0101] Figure 14 This is a side view showing the angle of the ejector plate 70 relative to the photomask M. The bottom surface 29a of the supply block 22 forms a first angle θ1 with the bottom surface 29b of the supply block 22. Moreover, the ejector plate 70 is mounted on the bottom surface 29a such that the first plate 71, the second plate 72, and the third plate 80 are parallel to the bottom surface 29a. Therefore, air is ejected from the slit of the ejector plate 70 parallel to the bottom surface 29a, and the angle between the direction of travel of the gas ejected from the slit of the ejector plate 70 (first dust removal head 21) and the upper surface of the photomask M is the first angle θ1. The first angle θ1 is preferably 15° to 45°, more preferably 25° to 35°, and in this embodiment, it is 30°.

[0102] The distance h1 between the opening end of the slit of the ejection plate 70 of the first dust removal head 21 and the upper surface of the photomask M is preferably 5 mm to 20 mm, and in this embodiment it is 7.0 mm.

[0103] Figure 15 These are the longitudinal sections of the two second dust removal heads 40. The supply block 42 has a configuration similar to that of the supply block 22 described above. Inside the supply block 42, a supply chamber 43 and connecting channels 45 to 48 are formed corresponding to the supply chamber 23 and connecting channels 25 to 28 of the supply block 22. The supply chamber 43 of one of the supply blocks 42 is connected to the connecting channel 62 of the second connecting block 60 through an opening 62a. The channel area of ​​the supply chamber 43 is larger than the channel area of ​​the opening 62a.

[0104] An ejector plate 90 is installed on the supply block 42. The ejector plate 90 has a configuration similar to that of the ejector plate 70, which is obtained by dividing the ejector plate 70 in half along its long side.

[0105] The second dust removal heads 40 are respectively installed on a pair of short sides 11b, so that the air ejected from the slits of the ejection plates 90 of the two second dust removal heads 40 is directed toward the lower inner side of the cover 11.

[0106] The bottom surface 49a of the supply block 42 forms a second angle θ2 with the bottom surface 49b of the supply block 42. Furthermore, the ejector plate 90 is mounted on the bottom surface 49a. Therefore, air is ejected from the slit of the ejector plate 90 parallel to the bottom surface 49a. The second angle θ2 is set to be equal to the first angle θ1.

[0107] The height of the bottom surface 49b of the supply block 42 is equal to the height of the bottom surface 29b of the supply block 22. Therefore, the distance h2 (not shown) between the opening end of the slit of the ejection plate 90 of the second dust removal head 40 and the upper surface of the photomask M is equal to the distance h1.

[0108] The lower surface of the dust removal device 10 with the above configuration is positioned opposite the upper surface of the photomask M, and the photomask M is moved relative to it along the short side direction of the dust removal device 10. As a result, the dust adhering to the upper surface of the photomask M is removed by the air ejected from the slits of the ejection plates 70 and 90, and the dust is drawn in by the air duct 18 connected to the upper part of the cover 11.

[0109] At this time, air is ejected from all four directions toward the upper surface of the photomask M through the two ejection plates 70 and two ejection plates 90. In particular, since the first angle θ1 and the second angle θ2 are set to 15° to 45°, the air between the bottom of the dust removal heads 21 and 40 and the photomask M is directed towards the horizontal component of the velocity of the air ejected from the slit by the negative pressure and the viscosity of the air. This has been confirmed by the inventors' experiments and simulations. That is, it is possible to suppress the leakage of dust removed from the upper surface of the photomask M from the lower side of the dust removal device 10. In addition, it has been confirmed by the inventors' experiments and simulations that in conventional dust removal devices, a large amount of dust removed from the upper surface of the photomask M leaks out from the lower side of the dust removal device.

[0110] The above-described embodiment has the following beneficial effects.

[0111] The width of the multiple slits in the ejector plate 70 is predetermined by the predetermined thickness of the second plate 72. Therefore, without the need for machining or other methods to form the slits, it is easy to form multiple slits with a uniform width along the entire length of the ejector plate 70.

[0112] • In the plurality of notches 73, an inclined portion 73b is formed within a predetermined range starting from the opening end 73a. The closer the inclined portion 73b is to the opening end 73a, the longer the length of the notch 73 in the long side direction becomes. Therefore, it is easy to shorten the interval between the opening ends 73a of adjacent slits, and it is easy to shorten the length of the portion formed between the slits where air is not ejected. Moreover, by causing air to flow along the inclined portion 73b, the air ejected from the slits can easily expand in the long side direction. Therefore, it is possible to suppress the weakening of air flow between slits, and it is easy to uniformly eject air in the long side direction of the ejection plate 70.

[0113] On the second plate 72, the boundary portion 74, which is the part between the notches 73 and 73, is formed symmetrically about the central line C, wherein the central line C defines the center of the boundary portion 74 in the long side direction. Therefore, air can be easily ejected symmetrically from adjacent slits with respect to the central line C, and air can be easily ejected evenly in the long side direction of the ejector plate 70. Furthermore, in the long side direction, half-divided portions 74h are formed at both ends of the second plate 72, which are shaped to longitudinally divide the boundary portion 74 in half. Therefore, when multiple ejector plates 70 are connected in the long side direction, a boundary portion 74 can be formed by connecting the half-divided portions 74h at the ends of the ejector plates 70 to each other. Therefore, even when multiple ejector plates 70 are connected in the long side direction, air can be easily and evenly ejected across multiple ejector plates 70.

[0114] • The end 82a of the groove 82 (flow channel) on the opening end 73a side of the notch 73 is positioned further forward than the inclined portion 73b. With this configuration, air flowing through the flow channel enters the portion further forward than the inclined portion 73b at the notch 73. Therefore, by utilizing the inclined portion 73b as a whole, air can easily flow along the inclined portion 73b.

[0115] • The thickness of the second plate 72 is 0.1 mm to 0.3 mm. With this configuration, it is easy to form a slit with a width of 0.1 mm to 0.3 mm with a uniform width along the entire long side of the ejector plate 70.

[0116] Since the thickness of the third plate 80 is 0.8 mm to 1.2 mm, the depth of the through hole 81, which serves as an air passage in the thickness direction of the third plate 80, can be ensured to be 0.8 mm to 1.2 mm. Furthermore, the depth of the flow channel is 0.4 mm to 0.6 mm in the thickness direction of the third plate 80, and the width of the slit is 0.1 mm to 0.3 mm. Therefore, the depth of the air passage can gradually decrease from the through hole 81 towards the flow channel and the slit in the thickness direction of the third plate 80. This suppresses air pressure loss and increases the air velocity ejected from the slit.

[0117] • Along the long side of the ejector plate 70, the opening ends 73a of adjacent notches 73 are spaced apart by 0.5 mm or less. With this configuration, it is easy to further shorten the length of the portion of the air not ejected between the slits.

[0118] • The first plate 71, the second plate 72, and the third plate 80 are diffusely bonded. With this configuration, compared to the case where the first plate 71, the second plate 72, and the third plate 80 are bonded with adhesives or the like, it is easier to accurately determine the distance between the first plate 71 and the third plate 80, i.e., the width of the slit, by the thickness of the second plate 72.

[0119] A plurality of through holes 81 are formed on the third plate 80. Therefore, even when the number of notches 73 (slits) increases, that is, when the length of the ejection plate 70 in the long side direction increases, it is easy to supply the required amount of air to the multiple slits through the multiple through holes 81 via the flow channel. In addition, the flow channel connects the multiple through holes 81 to the same number of notches 73. Therefore, it is possible to suppress differences in the amount of air supplied to each notch 73 (slit).

[0120] The first dust removal head 21 includes a spray plate 70 and a supply block 22 on which the spray plate 70 is mounted. The supply block 22 has a supply chamber 23 for supplying air and a first connecting channel 24 connecting the supply chamber 23 to the outside. Therefore, air can be supplied from the outside of the first dust removal head 21 to the supply chamber 23 through the first connecting channel 24. Furthermore, the supply block 22 has a second connecting channel connecting the supply chamber 23 to a plurality of through holes 81. Therefore, air can be supplied from the supply chamber 23 to the plurality of through holes 81 of the spray plate 70 and then to the notch 73 (slit) through the second connecting channel. In addition, since air is supplied from the first connecting channel 24 to the plurality of second connecting channels through the supply chamber 23, the number of first connecting channels 24 used to supply air to the plurality of second connecting channels can be reduced. Moreover, compared to the case where air is supplied to the plurality of second channels through branch channels branching from the first connecting channel 24, it is easier to supply air equally to the plurality of second connecting channels.

[0121] The supply block 22 is formed in a cuboid shape, and a bottom surface 29a is formed at the bottom of the supply block 22, extending across the entire length of the supply block 22 in the long side direction and forming a first angle θ1 (a predetermined angle) with the bottom surface 29b of the supply block 22. Therefore, by cutting the bottom of the cuboid-shaped supply block 22, the bottom surface 29a extending across the entire length of the supply block 22 in the long side direction can be easily formed. In addition, the first angle θ1 between the bottom surface 29a and the bottom surface 29b of the supply block 22 can be easily adjusted when forming the bottom surface 29a.

[0122] • The ejector plate 70 is mounted on the bottom surface 29a so that air is ejected from the slit parallel to the bottom surface 29a. Therefore, even without changing the configuration of the ejector plate 70 itself, the ejection angle of the air relative to the bottom surface of the supply block 22 can be easily adjusted by adjusting the first angle θ1 mentioned above.

[0123] • The first angle θ1 is between 15° and 45°. With this configuration, when air is ejected from the ejector plate 70 and blown onto the photomask M, the air between the bottom of the first dust removal head 21 and the photomask M is directed towards the horizontal component of the velocity of the air ejected from the slit due to negative pressure and the viscosity of the air. This has been confirmed through experiments and simulations by the inventors of this application. Therefore, it is possible to prevent dust removed from the photomask M from scattering in the direction opposite to the horizontal component of the velocity of the air ejected from the slit, and to prevent the removed dust from re-adhering to the photomask M.

[0124] • The first angle θ1 is 25° to 35°. Through experiments and simulations conducted by the inventors of this application, it has been confirmed that, according to this configuration, when air is ejected from the ejector plate 70 and blown onto the photomask M, the air between the bottom of the first dust removal head 21 and the photomask M is significantly directed towards the horizontal component of the velocity of the air ejected from the slit by utilizing negative pressure and the viscosity of the air.

[0125] The second connecting channel opens on the bottom surface 29a, and the through hole 81 is opposite to the opening end of the second connecting channel on the bottom surface 29a. Therefore, the second connecting channel can be connected to the through hole 81. Here, a receiving groove 34 for receiving a sealing member is formed on the bottom surface 29a around the opening end of the second connecting channel, and the supply block 22 and the ejection plate 70 are sealed by the sealing member received in the receiving groove 34. With this configuration, since the receiving groove 34 for receiving the sealing member is formed on the bottom surface 29a of the supply block 22, it is not necessary to form a receiving groove 34 on the ejection plate 70. Therefore, the ejection plate 70 can be formed into a thin plate type, which simplifies the structure of the ejection plate 70.

[0126] The ejector plate 70 has a plurality of through holes 81, a plurality of slits extending in a predetermined direction (the direction of the long side of the ejector plate 70) and adjacent to each other in the predetermined direction, and flow channels connecting the plurality of through holes 81 to the same number of slits. Therefore, by supplying air into the interior of the ejector plate 70 through the plurality of through holes 81, air can be supplied to the slits through the flow channels, and air can be ejected from the slits. Therefore, it is not necessary to form slits spanning the entire length of the predetermined direction in the first dust removal head 21, and each slit can be easily formed with a uniform width. Furthermore, the ejector plate 70 has a plurality of through holes 81. Therefore, even when the number of slits increases, i.e., when the length of the ejector plate 70 in the predetermined direction increases, it is easy to supply the required amount of air from the plurality of through holes 81 to the slits through the flow channels. Moreover, the flow channels connect the plurality of through holes 81 to the same number of slits. Therefore, it is possible to suppress differences in the amount of air supplied to each slit.

[0127] The supply block 22, on which the ejector plate 70 is mounted, has a supply chamber 23 for supplying air and a first connecting channel 24 that connects the supply chamber 23 to the outside. Therefore, air can be supplied to the supply chamber 23 from the outside of the first dust removal head 21 through the first connecting channel 24. Furthermore, the supply block 22 has a second connecting channel that connects the supply chamber 23 to a plurality of through holes 81. Therefore, air can be supplied from the supply chamber 23 to the plurality of through holes 81 of the ejector plate 70 through the second connecting channel, and further to the slit. In addition, since air is supplied from the first connecting channel 24 to the plurality of second connecting channels through the supply chamber 23, the number of first connecting channels 24 used for supplying air to the plurality of second connecting channels can be reduced. Moreover, compared to the case where air is supplied to the plurality of second channels through branch channels branching from the first connecting channel 24, it is easier to supply air evenly to the plurality of second connecting channels. Based on these effects, air can be easily and evenly ejected in a predetermined direction extending from the slit of the first dust removal head 21.

[0128] Multiple ejector plates 70 are mounted side-by-side on the supply block 22 along a predetermined direction. A supply chamber 23 extends along the multiple ejector plates 70 in the predetermined direction. A second connecting channel connects the supply chamber 23 to multiple through holes 81 of the multiple ejector plates 70. With this configuration, by mounting multiple ejector plates 70 side-by-side along a predetermined direction, a first dust removal head 21 with a long length in the predetermined direction can be achieved. Furthermore, compared to achieving a long first dust removal head 21 in the predetermined direction with a single ejector plate 70, it is easier to uniformly eject air across the entire length of the predetermined direction in each ejector plate 70, thus easily achieving uniform air ejection across the entire predetermined length of the first dust removal head 21. Moreover, air can be introduced from the common supply chamber 23 extending along the multiple ejector plates 70 in the predetermined direction into the multiple through holes 81 of the multiple ejector plates 70, thus allowing air to be supplied to the supply chamber 23 through a first connecting channel 24.

[0129] The receiving slots 34 correspond to the plurality of ejector plates 70 and are arranged side by side in a predetermined direction. The supply block 22 and each ejector plate 70 are sealed by sealing members respectively housed in the receiving slots 34. With this configuration, compared with the case where the ejector plate 70 with a longer length in the predetermined direction is sealed to the supply block 22 by a single sealing member, each ejector plate 70 and the supply block 22 can be sealed more stably by sealing members.

[0130] The main body is divided into supply blocks 22, each corresponding to a plurality of ejection plates 70. Therefore, the main body can be constructed by dividing it into multiple supply blocks 22, and by increasing the number of supply blocks 22, the length of the main body in a predetermined direction can be increased. Furthermore, in the predetermined direction, a first engaging portion 35 communicating with a supply chamber 23 is provided at one end of each supply block 22, and a second engaging portion 36 communicating with a supply chamber 23 and engaging with the first engaging portion 35 is provided at the other end of each supply block 22. Therefore, by engaging the first engaging portion 35 and the second engaging portion 36, adjacent supply blocks 22 can be connected, and the supply chambers 23 of adjacent supply blocks 22 can be connected.

[0131] • In the predetermined direction, the length of the second connecting channel is equal to the length of the through hole 81. With this configuration, it is easy to make air flow uniformly from the supply chamber 23 to the through hole 81 in the predetermined direction.

[0132] The second connecting channel extends from the supply chamber 23 to the side opposite to the through hole 81, then turns back towards the through hole 81 and connects to it. With this configuration, it is easy to lengthen the length from the supply chamber 23 to the through hole 81 of the second connecting channel, thus enabling the airflow in a predetermined direction to be nearly uniform during the airflow through the second connecting channel.

[0133] • In the second connecting channel, the flow area of ​​the reversing section (connecting channel 26) is smaller than that of the other sections. Based on this configuration, by temporarily narrowing the flow channel in the reversing section of the second connecting channel, the unevenness of airflow in the predetermined direction can be reduced.

[0134] The cover 11 is formed as a rectangular cylinder with a pair of long sides 11a and a pair of short sides 11b. The first opening 11d on the upper side is connected to the air duct 18 for drawing air, and air is drawn in from the second opening on the lower side. Therefore, dust removed from the photomask M by the air ejected from the first dust removal head 21 can be drawn in from the second opening and discharged from the first opening 11d into the air duct 18.

[0135] The first dust removal heads 21 are respectively mounted on a pair of long side surfaces 11a, such that the air ejected from the slits of the two first dust removal heads 21 is directed toward the lower inner side of the cover 11. Therefore, on the lower inner side of the cover 11, the air ejected from the two first dust removal heads 21 can collide, and leakage of air ejected from the first dust removal heads 21 from the lower side of the cover 11 to the outer side can be suppressed. In particular, the first angle θ1 is 15° to 45° (25° to 35°), and when the upper surface of the photomask M is arranged parallel to the bottom surface 29b of the supply block 22, the air between the bottom of the first dust removal head 21 and the photomask M can be directed toward the horizontal component of the velocity of the air ejected from the slit by negative pressure and the viscosity of the air.

[0136] The second dust removal heads 40 are respectively installed on a pair of short sides 11b, such that the air ejected from the slits of the two second dust removal heads 40 is directed toward the lower inner side of the cover 11. Therefore, it is possible to prevent the air ejected from the first dust removal head 21 installed on the long side 11a from leaking out from the lower side 11b toward the outer side of the cover 11 after removing the dust attached to the photomask M.

[0137] Viewed from a direction parallel to the long side 11a, the angle θ1 between the direction of air ejected from the slits of the two first dust removal heads 21 and the upper surface of the photomask M is 15° to 45°. Viewed from a direction parallel to the short side 11b, the angle θ2 between the direction of air ejected from the slits of the two second dust removal heads 40 and the upper surface of the photomask M is 15° to 45°. With this configuration, the air between the bottom of the dust removal heads 21 and 40 and the photomask M can be directed towards the horizontal component of the velocity of the air ejected from the slits by negative pressure and air viscosity.

[0138] • The first angle θ1 is 25° to 35°, and the second angle θ2 is 25° to 35°. With this configuration, the air between the bottom of the dust removal heads 21 and 40 and the photomask M is significantly directed towards the horizontal component of the velocity of the air ejected from the slit by utilizing negative pressure and the viscosity of the air.

[0139] The distance h1 between the opening ends of the slits of the two first dust removal heads 21 and the upper surface of the photomask M, and the distance h2 between the opening ends of the slits of the two second dust removal heads 40 and the upper surface of the photomask M, are 5 mm to 20 mm. Experiments and simulations conducted by the inventors of this application have confirmed that the aforementioned effects can be achieved with this configuration.

[0140] A first inlet 51 and a second inlet 61, supplying air to the two first dust removal heads 21 respectively, are provided at one end of the dust removal device 10 in a predetermined direction. Therefore, the first inlet 51 and the second inlet 61 can be concentrated at one end of the dust removal device 10 in the predetermined direction. Furthermore, a first supply channel supplies air from the first inlet 51 through the supply chamber 23 of one of the first dust removal heads 21 to one of the second dust removal heads 40. Therefore, by utilizing the supply chamber 23 of the first dust removal head 21, air can be supplied to the second dust removal head 40, which is located at the end of the dust removal device 10 opposite to the first inlet 51 in the predetermined direction. Additionally, a second supply channel can directly supply air from the second inlet 61 to the other first dust removal head 21 and the other second dust removal head 40.

[0141] The dust removal device 10 supplies air at equal flow rates to the first port 51 and the second port 61. With this configuration, it is easy to supply air at equal flow rates to the multiple slits of the multiple ejection plates 70, and it is possible to suppress differences in the amount of air supplied to each slit.

[0142] • The flow area of ​​the supply chamber 23 is larger than the flow area of ​​the first supply flow channel and the flow area of ​​the second supply flow channel. With this configuration, the air supplied to the first supply flow channel and the second supply flow channel can be temporarily diffused in the supply chamber 23, and it is easy to supply equal flow rates of air from the supply chamber 23 to multiple second connecting channels.

[0143] • By diffusion bonding of the first plate 71, the second plate 72 and the third plate 80, the boundary portion 74 of the second plate 72 is bonded to the first plate 71 and the third plate 80, thus stabilizing the width of each slit.

[0144] Alternatively, the above embodiments can be modified as shown below. Since the same reference numerals are used for parts identical to those in the above embodiments, descriptions are omitted.

[0145] • The distances h1 and h2 can also be set from 2mm to 30mm.

[0146] • The first angle θ1 and the second angle θ2 can also be set to 10° to 50°.

[0147] • The two second dust removal heads 40 can also be omitted.

[0148] • The first engaging portion 35 and the second engaging portion 36 can also be formed by direct engagement. For example, the first engaging portion 35 can be formed as an annular protrusion and the second engaging portion 36 can be formed as an annular concave portion, so that the first engaging portion 35 and the second engaging portion 36 fit together.

[0149] • As an alternative to forming a storage groove 34 in the supply block 22, a storage groove may also be formed in the ejection plate 70.

[0150] • Alternatively, a bottom surface 29a (a predetermined plane) can be formed integrally at the bottom of the supply block 22.

[0151] • The spacing between the opening ends 73a of adjacent notches 73 in the long side direction of the ejector plate 70 can also be set to 0.5 mm to 1.0 mm.

[0152] • The thickness of the second plate 72 can also be set to 0.05mm to 0.5mm.

[0153] • Alternatively, the end 82a of the notch 73 of the groove 82 (flow channel) can be located further inward than the inclined portion 73b.

[0154] • The boundary part 74 may also adopt a non-axisymmetric shape.

[0155] • Alternatively, the bottom surface 29a can be configured such that the direction of air ejected from the slit of the ejector plate 70 is not parallel to that of the air ejected from the bottom surface 29a.

[0156] • Aluminum alloys and copper alloys can also be used to form the first plate 71, the second plate 72, and the third plate 80.

[0157] • The first plate 71, the second plate 72, and the third plate 80 can also be joined by welding or by adhesive.

[0158] Alternatively, a configuration can be adopted that includes a first supply channel supplying air to one first dust removal head 21, a second supply channel supplying air to the other first dust removal head 21, a third supply channel supplying air to one second dust removal head 40, and a fourth supply channel supplying air to the other second dust removal head 40. Furthermore, equal flow rates of air are supplied to the first and second supply channels, and equal flow rates of air are supplied to the third and fourth supply channels. With this configuration, it is easy to supply equal flow rates of air to the two first dust removal heads 21, and it is possible to suppress differences in the amount of air ejected from the slits of the two first dust removal heads 21. Similarly, it is easy to supply equal flow rates of air to the two second dust removal heads 40, and it is possible to suppress differences in the amount of air ejected from the slits of the two second dust removal heads 40.

[0159] • Nitrogen, oxygen, argon, etc. can also be used as the gas ejected from the ejector plates 70 and 90.

[0160] • As a dust removal target, liquid crystal substrates, wafers, glass substrates, etc. can also be used.

[0161] Alternatively, the above-mentioned variations can be combined for implementation.

[0162] This disclosure has been described in accordance with embodiments, but it should be understood that this disclosure is not limited to the described embodiments or structures. This disclosure also includes various modifications and equivalent variations. Moreover, various combinations and methods, as well as other combinations and methods including only one element, more than one element, or less than one element, also fall within the scope and spirit of this disclosure.

[0163] Explanation of reference numerals in the attached figures

[0164] 10…Dust removal device, 20…Dust removal head assembly, 21…First dust removal head (dust removal head), 22…Supply block, 23…Supply chamber, 24…First connecting channel, 25…Connecting channel, 26…Connecting channel, 27…Connecting channel, 28…Connecting channel, 40…Second dust removal head (dust removal head), 42…Supply block, 43…Supply chamber, 45…Connecting channel, 46…Connecting channel, 47…Connecting channel, 48…Connecting channel, 62a…Opening, 70…Spray plate (spraying part), 71…First plate (first component), 72…Second plate (second component), 73…Notch, 73a…Opening end, 73b…Inclined part, 74…Boundary part, 80…Third plate (third component), 81…Through hole (inlet), 82…Slot (flow channel), 83…Slot (flow channel), 90…Spray plate (spraying part).

Claims

1. A dust removal device for removing dust from a dust-collecting object, comprising: Two first dust removal heads and two second dust removal heads spray gas onto the dust removal object; as well as The cover is formed into a rectangular cylinder with a pair of long sides and a pair of short sides. A first opening on the upper side of the cover is connected to an air duct for drawing in air, and the cover draws in air from a second opening on the lower side. The first dust removal head and the second dust removal head are equipped with: The ejector plate has multiple through holes, multiple slits and flow channels. The multiple slits extend along a predetermined direction and are adjacent to each other in the predetermined direction. The flow channels connect the multiple through holes to the same number of slits respectively. as well as The supply block, wherein the ejector plate is mounted on the supply block. The supply block includes: a supply chamber for supplying the gas; a first connecting channel connecting the supply chamber to the outside; and a second connecting channel connecting the supply chamber to the plurality of through holes. The predetermined direction is the long side direction of the spray plate, and the length of the second dust removal head along the long side direction of the spray plate is shorter than the length of the first dust removal head along the long side direction of the spray plate. Two first dust removal heads are respectively mounted on the pair of long sides, such that the gas ejected from the slits of the two first dust removal heads is directed toward the lower inner side of the shroud. Two second dust removal heads are respectively installed on the pair of short sides, such that the gas ejected from the slits of the two second dust removal heads is directed towards the lower inner side of the shroud. The two first dust removal heads are positioned parallel to each other, and the two second dust removal heads are positioned parallel to each other. The first dust removal head has a plurality of supply blocks arranged and connected to each other along the long side of the dust removal device. The supply block is formed in the shape of a cuboid. A predetermined plane is formed at the bottom of the supply block of the first dust removal head and the second dust removal head. The predetermined plane extends across the entire length of the supply block in the predetermined direction and forms a predetermined angle with the bottom surface of the supply block, which is arranged parallel to the upper surface of the dust removal object. The ejector plate is mounted on the predetermined plane such that the gas is ejected from the slit parallel to the predetermined plane. The predetermined angle is between 15° and 45°.

2. The dust removal device as described in claim 1, wherein, The predetermined angle is 25° to 35°.

3. The dust removal device as described in claim 1, wherein, The second connecting channel opens on the predetermined plane. The through hole is opposite to the opening end of the second connecting channel on the predetermined plane. A receiving groove for receiving a sealing member is formed around the opening end of the second connecting channel on the predetermined plane. The supply block and the ejection plate are sealed by the sealing member housed in the receiving groove. Each of the through holes is formed in a rectangular shape extending along the long side of the ejector plate, and each through hole communicating with the same number of the slits is respectively connected to the opening end of the facing second connecting channel. The length of the second connecting channel in the long side direction of the supply block is equal to the length of the through hole in the long side direction of the supply block.

4. The dust removal device as described in claim 3, wherein, On the supply block, a plurality of the ejector plates are mounted side by side in the predetermined direction. The supply chamber extends along the plurality of ejection plates in the predetermined direction. The second connecting channel connects the supply chamber to the plurality of through holes of the plurality of ejection plates.

5. The dust removal device as described in claim 4, wherein, The receiving slots correspond to the plurality of ejection plates, which are arranged side by side in the predetermined direction. The supply block and each ejector plate are sealed by the sealing members respectively housed in the receiving groove.

6. The dust removal device as described in claim 4, wherein, The supply block is divided into supply blocks corresponding to the plurality of ejection plates respectively. In the predetermined direction, a first engaging portion communicating with the supply chamber is provided at one end of the supply block, and a second engaging portion communicating with the supply chamber and engaging with the first engaging portion is provided at the other end of the supply block.

7. The dust removal device as described in claim 1, wherein, In the predetermined direction, the length of the second connecting channel is equal to the length of the through hole.

8. The dust removal device as described in claim 1, wherein, The second connecting channel extends from the supply chamber to the side opposite to the through hole, then turns back to the through hole and connects to the through hole.

9. The dust removal device as described in claim 8, wherein, In the second connecting channel, the flow area of ​​the reversing portion is smaller than the flow area of ​​the other portions.

10. The dust removal device according to any one of claims 1 to 9, wherein, The distance between the opening end of the slit of the two first dust removal heads and the upper surface of the dust removal object, and the distance between the opening end of the slit of the two second dust removal heads and the upper surface of the dust removal object, are 5 mm to 20 mm.

11. The dust removal device according to any one of claims 1 to 9, wherein, A first port and a second port, which supply gas to the two first dust collection heads respectively, are located at one end of the dust collection device in the predetermined direction. The dust removal device includes: a first supply channel for supplying gas from a first port through the supply chamber of a first dust removal head to a second dust removal head; and a second supply channel for directly supplying gas from a second port to both a first dust removal head and a second dust removal head.

12. The dust removal device as claimed in claim 11, wherein, The gas is supplied to the first port and the second port at equal flow rates.

13. The dust removal device according to any one of claims 1 to 9, wherein, The dust removal device includes: a first supply channel for supplying the gas to one of the first dust removal heads; a second supply channel for supplying the gas to the other of the first dust removal heads; a third supply channel for supplying the gas to one of the second dust removal heads; and a fourth supply channel for supplying the gas to the other of the second dust removal heads.

14. The dust removal device as described in claim 13, wherein, The gas is supplied in equal flow rates to the first supply channel and the second supply channel, and in equal flow rates to the third supply channel and the fourth supply channel.

15. The dust removal device as claimed in claim 11, wherein, The flow channel area of ​​the supply chamber is larger than the flow channel area of ​​the first supply flow channel and the flow channel area of ​​the second supply flow channel.

Images