Static elimination device and method and evaporation equipment

By using the gas ionization module and charge adsorption module of the electrostatic elimination device in the vacuum coating process, using positive and negative ion neutralization and adsorption technology, the problem of electrostatic charge accumulation when the mask is separated from the substrate is solved, and the substrate charge is realized Efficient elimination avoids charge discharge damage and improves process stability.

CN115209598BActive Publication Date: 2025-01-10SHENZHEN AOLAN TECH CO LTD +1
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Patent Information

Application Number
CN202210927766.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-08-03
Publication Date
2025-01-10
Estimated Expiration
2042-08-03

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Abstract

The present application relates to an electrostatic elimination device and method and an evaporation device. The electrostatic elimination device includes: a gas ionization module connected to a vacuum chamber, used to ionize the gas in the vacuum chamber to generate positive ions and negative ions, one of the positive ions and the negative ions is used to neutralize the charge carried by the charged substrate; a charge adsorption module connected to the vacuum chamber, the charge adsorption module includes a connected metal conductive mesh and a power supply, the metal conductive mesh is placed in the vacuum chamber, and the metal conductive mesh is used to adsorb the other of the positive ions and the negative ions when receiving the voltage applied by the power supply. The use of this device can further eliminate the residual charge in the vacuum chamber on the basis of eliminating the original static charge carried by the substrate, thereby achieving the purpose of eliminating static electricity.
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Citation Information

Patent Citations

  • Ion generator

    CN101449628A

  • A vacuum chamber electrostatic elimination structure

    CN215187528U