Display substrate and manufacturing method thereof, and display device

Abstract

The present disclosure provides a display substrate and a manufacturing method thereof, and a display device. The display substrate comprises: a plurality of sub-pixels arranged on a substrate, the sub-pixels comprising: a sub-pixel opening area, a reflective layer, an insulating layer, a plurality of mutually independent anode patterns, a light-emitting functional layer and a cathode, the positive projection of the reflective layer on the substrate at least partially overlaps with the positive projection of the sub-pixel opening area on the substrate; the insulating layer is located on the side of the reflective layer facing away from the substrate; the plurality of anode patterns are located on the side of the insulating layer facing away from the substrate, the positive projections of the plurality of anode patterns on the substrate at least partially overlap with the positive projections of the sub-pixel opening area on the substrate; the light-emitting functional layer is located on the side of the plurality of anode patterns facing away from the substrate, the positive projection of the light-emitting functional layer on the substrate is located inside the positive projection of the sub-pixel opening area on the substrate; the cathode is located on the side of the light-emitting functional layer facing away from the substrate, the positive projection of the cathode on the substrate covers the positive projection of the light-emitting functional layer on the substrate.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a display substrate and a manufacturing method thereof, and a display device. Background Art

[0002] Organic Light-Emitting Diode (OLED) display screens are widely used in various fields due to their advantages of being lighter, thinner, brighter, lower power consumption, faster response, higher definition, better flexibility, and higher luminous efficiency. In existing OLED display screens, the anode generally adopts a stacked multi-layer structure, and the orthographic projection of the sub-pixel opening area in the OLED display screen on the substrate can be located inside the orthographic projection of the anode on the substrate. Summary of the invention

[0003] The purpose of the present disclosure is to provide a display substrate and a manufacturing method thereof, and a display device.

[0004] In order to achieve the above objectives, the present disclosure provides the following technical solutions:

[0005] A first aspect of the present disclosure provides a display substrate, comprising: a substrate, and a plurality of sub-pixels disposed on the substrate, wherein the sub-pixels include a sub-pixel opening area; and the sub-pixels further include:

[0006] a reflective layer, wherein an orthographic projection of the reflective layer on the substrate at least partially overlaps with an orthographic projection of the sub-pixel opening area on the substrate;

[0007] an insulating layer, the insulating layer being located on a side of the reflective layer facing away from the substrate;

[0008] A plurality of mutually independent anode patterns, the plurality of anode patterns being located on a side of the insulating layer facing away from the substrate, and the orthographic projections of the plurality of anode patterns on the substrate at least partially overlapping with the orthographic projections of the sub-pixel opening area on the substrate;

[0009] a light-emitting functional layer, the light-emitting functional layer being located on a side of the plurality of anode patterns facing away from the substrate, and an orthographic projection of the light-emitting functional layer on the substrate at least partially overlapping with an orthographic projection of the sub-pixel opening area on the substrate;

[0010] A cathode, wherein the cathode is located on the side of the light-emitting functional layer facing away from the substrate, and the orthographic projection of the cathode on the substrate covers the orthographic projection of the light-emitting functional layer on the substrate; the orthographic projection of the first part of the cathode on the substrate is located inside the orthographic projection of the sub-pixel opening area on the substrate, and the surface of the first part facing away from the substrate has a step difference, and in the direction perpendicular to the substrate, the height of the step difference is less than or equal to the thickness of the anode pattern.

[0011] Optionally, the thickness D1 of the anode pattern in a direction perpendicular to the substrate satisfies:

[0012] Optionally, the plurality of anode patterns in the sub-pixel are arranged along a first direction, and the shortest distance H between two adjacent sides of the adjacent anode patterns satisfies: 0.5 μm≤H≤1.5 μm.

[0013] Optionally, the anode pattern is a single-layer structure, and the material of the anode pattern includes indium tin oxide.

[0014] Optionally, the insulating layer includes a transparent insulating layer.

[0015] Optionally, the insulating layer is made of inorganic material.

[0016] Optionally, a thickness D2 of the insulating layer in a direction perpendicular to the substrate satisfies:

[0017] Optionally, the sub-pixel further includes a bonding layer, and the bonding layer is located between the reflective layer and the substrate.

[0018] Optionally, the sub-pixel further includes a protection layer, and the protection layer is located between the reflective layer and the insulating layer.

[0019] Optionally, the bonding layer, the protective layer and the anode pattern are made of the same material.

[0020] Optionally, the sub-pixel further includes:

[0021] A hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer are stacked in sequence in a direction away from the substrate, wherein the hole injection layer and the hole transport layer are both located between the light-emitting functional layer and the multiple anode patterns, and the electron transport layer and the electron injection layer are both located between the light-emitting functional layer and the cathode.

[0022] Optionally, the sub-pixel further includes a driving circuit, wherein the driving circuit is located between the plurality of anode patterns and the substrate, and the driving circuit is used to provide driving signals for the plurality of anode patterns respectively.

[0023] Optionally, the driving circuit includes a plurality of sub-driving circuits corresponding one-to-one to the plurality of anode patterns, and the sub-driving circuits are coupled to the corresponding anode patterns through via structures to provide driving signals for the corresponding anode patterns.

[0024] Optionally, the driving circuit includes a driving subcircuit and a plurality of control subcircuits respectively coupled to the driving subcircuit, the plurality of control subcircuits corresponding one-to-one to the plurality of anode patterns, each of the control subcircuits being coupled to the corresponding anode pattern through a via structure, and the plurality of control subcircuits being capable of conducting the electrical connection between the driving subcircuit and the corresponding anode pattern in a time-sharing manner.

[0025] Optionally, the display substrate further includes a pixel defining layer, which is located on the side of the anode pattern facing away from the substrate, the pixel defining layer defines a plurality of sub-pixel opening areas, and an orthographic projection of the pixel defining layer on the substrate at least partially overlaps with an orthographic projection of the via structure on the substrate.

[0026] Optionally, the pixel defining layer includes a first defining portion and a second defining portion, an orthographic projection of the first defining portion on the substrate at least partially overlaps with an orthographic projection of the via structure on the substrate, and an orthographic projection of the second defining portion on the substrate does not overlap with an orthographic projection of the via structure on the substrate;

[0027] The orthographic projection of the cathode on the substrate does not overlap with the orthographic projection of the first defining portion on the substrate, and the orthographic projection of the cathode on the substrate at least partially overlaps with the orthographic projection of the second defining portion on the substrate.

[0028] Optionally, the reflective layer is located between the driving circuit and the pixel defining layer.

[0029] Optionally, the via structure passes through the insulating layer, and an orthographic projection of the via structure on the substrate does not overlap with an orthographic projection of the reflective layer on the substrate.

[0030] Optionally, the via structures corresponding to the multiple anode patterns are arranged along a first direction.

[0031] Based on the technical solution of the display substrate, a second aspect of the present disclosure provides a display device, comprising the above-mentioned display substrate.

[0032] Based on the technical solution of the display substrate, the third aspect of the present disclosure provides a method for manufacturing a display substrate, comprising: manufacturing a plurality of sub-pixels on a substrate, wherein the sub-pixels include a sub-pixel opening area; the steps of manufacturing the sub-pixels specifically include:

[0033] Manufacturing a reflective layer, wherein an orthographic projection of the reflective layer on the substrate at least partially overlaps an orthographic projection of the sub-pixel opening area on the substrate;

[0034] manufacturing an insulating layer, wherein the insulating layer is located on a side of the reflective layer facing away from the substrate;

[0035] Manufacturing a plurality of mutually independent anode patterns, wherein the plurality of anode patterns are located on a side of the insulating layer facing away from the substrate, and the orthographic projections of the plurality of anode patterns on the substrate at least partially overlap with the orthographic projections of the sub-pixel opening area on the substrate;

[0036] Manufacturing a light-emitting functional layer, wherein the light-emitting functional layer is located on a side of the plurality of anode patterns facing away from the substrate, and an orthographic projection of the light-emitting functional layer on the substrate at least partially overlaps with an orthographic projection of the sub-pixel opening area on the substrate;

[0037] A cathode is manufactured, wherein the cathode is located on the side of the light-emitting functional layer facing away from the substrate, and the orthographic projection of the cathode on the substrate covers the orthographic projection of the light-emitting functional layer on the substrate; the orthographic projection of the first part of the cathode on the substrate coincides with the orthographic projection of the sub-pixel opening area on the substrate, and the surface of the first part facing away from the substrate has a step difference, and in the direction perpendicular to the substrate, the height of the step difference is less than or equal to the thickness of the anode pattern.

[0038] Optionally, the step of making a plurality of mutually independent anode patterns specifically includes:

[0039] forming an anode transition layer;

[0040] The anode transition layer is etched by dry etching process to form a plurality of anode patterns independent of each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The drawings described herein are used to provide a further understanding of the present disclosure and constitute a part of the present disclosure. The illustrative embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation on the present disclosure. In the drawings:

[0042] Figure 1 is a cross-sectional schematic diagram of a sub-pixel in the related art;

[0043] Figure 2 A first cross-sectional schematic diagram of a sub-pixel provided in an embodiment of the present disclosure;

[0044] Figure 3 A second cross-sectional schematic diagram of a sub-pixel provided in an embodiment of the present disclosure;

[0045] Figure 4 A cross-sectional schematic diagram of coupling an anode pattern and a driving circuit provided in an embodiment of the present disclosure;

[0046] Figure 5 A schematic diagram of the structure of multiple sub-pixels provided in an embodiment of the present disclosure;

[0047] Figure 6 A first electron microscope image of a sub-pixel provided in an embodiment of the present disclosure;

[0048] Figure 7 A second electron microscope image of a sub-pixel provided in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0049] In order to further illustrate the display substrate and its manufacturing method, and the display device provided by the embodiments of the present disclosure, a detailed description is given below in conjunction with the accompanying drawings.

[0050] like Figure 1 As shown, it is a schematic diagram of the structure of sub-pixels in existing OLED display screens, the anode 80 includes a stacked multi-layer structure (such as: a first anode layer 801, a second anode layer 802, and a third anode layer 803), and the orthographic projection of the sub-pixel opening area 20 on the substrate 10 can be located inside the orthographic projection of the anode 80 on the substrate, that is, the anode 80 can cover the bottom of the sub-pixel opening area.

[0051] The OLED display screen with the above sub-pixel structure cannot meet the requirements of 3D display of multiple viewpoints.

[0052] Based on the above problems, it has been found through research that the requirements of 3D display with multiple viewpoints can be met by subdividing the sub-pixel into multiple independent sub-pixels. This not only meets the requirements of 3D display with multiple viewpoints, but also ensures high-resolution 3D display effects, so that the resolution of 3D display will not be reduced compared to 2D display.

[0053] Specifically, the present disclosure provides a display substrate, wherein the sub-pixel structure in the display substrate is as follows: Figure 2 As shown, the anode in each sub-pixel is divided into a plurality of independent anode units 70 (including a first anode pattern 701, a second anode pattern 702 and a third anode pattern 703), the plurality of anode units 70 can be driven independently, and each anode unit 70 forms a corresponding sub-pixel.

[0054] Exemplarily, the anode unit includes an indium tin oxide pattern (ITO), a silver pattern (Ag), and an indium tin oxide pattern that are stacked.

[0055] It can be seen that in the display substrate provided by the present disclosure, the sub-pixel is subdivided into sub-pixels, and one sub-pixel is subdivided into multiple sub-pixels that can be independently controlled, so that multiple sub-pixels can achieve independent grayscale control. The display substrate provided by the present disclosure not only meets the requirements of 3D display of multiple viewpoints, but also ensures a high-resolution 3D display effect, so that the resolution of 3D display will not be reduced compared to 2D display.

[0056] However, in the above display substrate, a spacing region (i.e., a space region) is introduced between adjacent sub-pixels, so that a step difference in the vertical direction of the substrate is formed between the anode unit and the surrounding space region. The height of the step difference is about This may lead to the risk of leakage or short circuit between the edge of the anode unit and the cathode (such as Figure 2 Especially for blue light sub-pixels, the thickness of the blue organic light-emitting material layer is basically The distance between the cathode and anode units at the edge of the fault is very close, about Around, it is very easy to cause leakage and short circuit.

[0057] See also Figure 3 The embodiment of the present disclosure provides a display substrate, comprising: a substrate 10, and a plurality of sub-pixels arranged on the substrate 10, wherein the sub-pixels include a sub-pixel opening area 20; the sub-pixels further include:

[0058] a reflective layer 27, wherein an orthographic projection of the reflective layer 27 on the substrate 10 at least partially overlaps with an orthographic projection of the sub-pixel opening area 20 on the substrate 10;

[0059] an insulating layer 21, wherein the insulating layer 21 is located on a side of the reflective layer 27 facing away from the substrate 10;

[0060] A plurality of mutually independent anode patterns 22, wherein the plurality of anode patterns 22 are located on a side of the insulating layer 21 facing away from the substrate 10, and the orthographic projections of the plurality of anode patterns 22 on the substrate 10 at least partially overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10;

[0061] A light-emitting functional layer 23, wherein the light-emitting functional layer 23 is located on a side of the plurality of anode patterns 22 facing away from the substrate 10, and an orthographic projection of the light-emitting functional layer 23 on the substrate 10 at least partially overlaps with an orthographic projection of the sub-pixel opening area 20 on the substrate 10;

[0062] A cathode 24, wherein the cathode 24 is located on the side of the light-emitting functional layer 23 facing away from the substrate 10, and the orthographic projection of the cathode 24 on the substrate 10 covers the orthographic projection of the light-emitting functional layer 23 on the substrate 10; the orthographic projection of the first part of the cathode 24 on the substrate 10 is located inside the orthographic projection of the sub-pixel opening area 20 on the substrate 10, and the surface of the first part facing away from the substrate 10 has a step difference, and in the direction perpendicular to the substrate 10, the height of the step difference is less than or equal to the thickness of the anode pattern 22.

[0063] Exemplarily, the substrate 10 includes a flexible substrate or a rigid substrate. Exemplarily, the substrate 10 includes a glass substrate.

[0064] Exemplarily, the plurality of sub-pixels include a plurality of red sub-pixels, a plurality of green sub-pixels, and a plurality of blue sub-pixels. Exemplarily, each sub-pixel includes a sub-pixel opening area 20, and the sub-pixel opening area 20 is used to accommodate a corresponding light-emitting functional layer 23. Exemplarily, each sub-pixel opening area 20 accommodates a light-emitting functional layer 23 that emits light of one color.

[0065] Exemplarily, the reflective layer 27 is made of a metal material, such as metallic silver. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is located inside the orthographic projection of the reflective layer 27 on the substrate 10. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is surrounded by the orthographic projection of the reflective layer 27 on the substrate 10.

[0066] Exemplarily, the insulating layer 21 includes a passivation layer. Exemplarily, the insulating layer 21 completely covers the reflective layer 27, and the insulating layer 21 can insulate the reflective layer 27 from the multiple anode patterns 22. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is located inside the orthographic projection of the insulating layer 21 on the substrate 10. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is surrounded by the orthographic projection of the insulating layer 21 on the substrate 10.

[0067] Exemplarily, the multiple anode patterns 22 are made of the same material, and the multiple anode patterns 22 can be formed simultaneously in one patterning process. Exemplarily, the anode pattern 22 is a single-layer pattern made of a single material. Exemplarily, the multiple anode patterns 22 are arranged along a first direction. Exemplarily, the multiple anode patterns 22 are distributed in an array. Exemplarily, the multiple anode patterns 22 are uniformly distributed. Exemplarily, a spacing area is formed between adjacent anode patterns 22, and the height of the step formed between each anode pattern 22 and the spacing area around it is related to the thickness of the anode pattern 22 in a direction perpendicular to the substrate 10.

[0068] Exemplarily, the orthographic projections of the plurality of anode patterns 22 on the substrate 10 overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10. Exemplarily, the orthographic projections of a portion of the plurality of anode patterns 22 on the substrate 10 are located inside the orthographic projections of the sub-pixel opening area 20 on the substrate 10, and the orthographic projections of another portion of the plurality of anode patterns 22 on the substrate 10 overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10.

[0069] Exemplarily, each anode pattern 22 forms a corresponding sub-pixel.

[0070] Exemplarily, the light-emitting functional layer 23 is made of an organic light-emitting material. Exemplarily, the orthographic projection of the light-emitting functional layer 23 on the substrate 10 at least partially overlaps with the orthographic projection of the sub-pixel opening area 20 on the substrate 10. Exemplarily, the orthographic projection of the light-emitting functional layer 23 on the substrate 10 is located inside the orthographic projection of the sub-pixel opening area 20 on the substrate 10. Exemplarily, the light-emitting functional layer 23 covers at least part of each of the anode patterns 22, and fills in the spacing area between adjacent anode patterns 22.

[0071] Exemplarily, the cathode 24 is a whole layer structure covering each sub-pixel opening area 20. Exemplarily, the cathode 24 is made of metal material.

[0072] Exemplarily, the cathode 24 includes a first part and a second part, wherein the orthographic projection of the first part on the substrate 10 is located inside the orthographic projection of the sub-pixel opening area 20 on the substrate 10, and the orthographic projection of the second part on the substrate overlaps with the orthographic projection of the pixel defining layer in the display substrate on the substrate.

[0073] Exemplarily, an orthographic projection of the first portion on the substrate does not overlap with an orthographic projection of the pixel defining layer on the substrate.

[0074] By setting the surface of the first portion facing away from the substrate 10 to have a step difference, in the direction perpendicular to the substrate 10, the height of the step difference is less than or equal to the thickness of the anode pattern 22; this is beneficial to increase the distance between the edge portion of the anode pattern 22 and the cathode 24, and greatly reduces the risk of leakage or short circuit between the edge portion of the anode pattern 22 and the cathode 24.

[0075] In the display substrate provided by the embodiment of the present disclosure, the sub-pixels are arranged to include the reflective layer 27, the insulating layer 21 and the multiple anode patterns 22, so that the reflective layer 27 and the insulating layer 21 are both a whole layer structure arranged below the multiple anode patterns 22, so that the height of the step difference generated between each anode pattern 22 and the spacing area is only related to the thickness of the anode pattern 22, but has nothing to do with the thickness of the insulating layer 21 and the reflective layer 27, thereby greatly reducing the height of the step difference, so that the part of the light-emitting functional layer 23 filled in the spacing area is reduced, and the thickness of the light-emitting functional layer 23 covering the edge part of the anode pattern 22 is increased, thereby effectively increasing the distance between the edge part of the anode pattern 22 and the cathode 24, and greatly reducing the risk of leakage or short circuit between the edge part of the anode pattern 22 and the cathode.

[0076] Moreover, the display substrate provided in the embodiment of the present disclosure effectively improves the flatness of the side of the multiple anode patterns 22 facing away from the substrate 10 by significantly reducing the height of the step difference, so that the light-emitting functional layer 23 arranged on the side of the multiple anode patterns 22 facing away from the substrate 10 can smoothly transition between adjacent anode patterns 22, making the surface of the light-emitting functional layer 23 approximately flat, thereby better achieving the uniformity of light emission of the display substrate.

[0077] It should be noted that, compared with the display substrate provided in the embodiment of the present disclosure and the above-mentioned display substrate with anode units, the present disclosure is equivalent to connecting the silver patterns included in each of the anode units in the same sub-pixel into one layer (i.e., as the reflective layer 27), connecting the ITO patterns located at the bottom layer included in each of the anode units in the same sub-pixel into one layer (i.e., as the bonding layer 25 mentioned later), or removing the ITO patterns located at the bottom layer included in each of the anode units in the same sub-pixel, and providing an insulating layer 21 between the silver patterns and the ITO patterns located at the top layer, and using the ITO patterns located at the top layer as the anode patterns 22; in this way, the height of the step to be covered by the light-emitting functional layer 23 is only determined by the thickness of the ITO patterns located at the top layer, thereby effectively increasing the distance between the edge portion of the anode pattern 22 and the cathode 24, and greatly reducing the risk of leakage or short circuit between the edge portion of the anode pattern 22 and the cathode.

[0078] like Figure 3 As shown, in some embodiments, the thickness D1 of the anode pattern 22 in a direction perpendicular to the substrate 10 satisfies:

[0079] The above setting D1 satisfies: Not only is the conductivity of the anode pattern 22 well guaranteed, and the driving function of the anode pattern 22 for the light-emitting functional layer 23 is guaranteed, but also the height of the step difference is greatly reduced, so that the portion of the light-emitting functional layer 23 filled in the spacing area is reduced, and the thickness of the light-emitting functional layer 23 covering the edge of the anode pattern 22 is increased, thereby effectively increasing the distance between the edge of the anode pattern 22 and the cathode 24, and greatly reducing the risk of leakage or short circuit between the edge of the anode pattern 22 and the cathode.

[0080] Exemplarily, when the light-emitting functional layer 23 is a red light-emitting functional layer, the thickness of the red light-emitting functional layer in the direction perpendicular to the substrate 10 is 328 nm, when the light-emitting functional layer 23 is a green light-emitting functional layer, the thickness of the green light-emitting functional layer in the direction perpendicular to the substrate 10 is 266 nm, and when the light-emitting functional layer 23 is a blue light-emitting functional layer, the thickness of the blue light-emitting functional layer in the direction perpendicular to the substrate 10 is 226 nm. Exemplarily, the thickness of the cathode 24 is between 10 nm and 16 nm, which may include end point values.

[0081] like Figure 3 and Figure 5 As shown, in some embodiments, the plurality of anode patterns 22 in the sub-pixel are arranged along a first direction, and the shortest distance H between two adjacent sides of the adjacent anode patterns 22 satisfies: 0.5 μm≤H≤1.5 μm.

[0082] Exemplarily, the first direction includes a horizontal direction or a vertical direction.

[0083] Exemplarily, the distance H is the minimum distance between adjacent anode patterns 22 along the first direction.

[0084] Exemplarily, the manufacturing process of the plurality of anode patterns 22 is as follows:

[0085] An anode transition layer is formed by using an indium tin oxide material, a photoresist is formed on the anode transition layer, and the photoresist is exposed to form a photoresist retaining area and a photoresist removing area, wherein the photoresist retaining area corresponds to an area where the multiple anode patterns 22 are located, and the photoresist removing area corresponds to other areas except the multiple anode patterns 22; the photoresist located in the photoresist removing area is removed to expose the anode transition layer located in the photoresist removing area, and the exposed anode transition layer is subjected to a dry etching process using the photoresist in the photoresist retaining area as a mask to etch and remove the exposed anode transition layer to form the multiple anode patterns 22.

[0086] It is worth noting that Figure 2As shown, in the display substrate having the anode units 70 , the minimum distance L between adjacent anode units 70 is generally between 3.5 μm and 4.5 μm.

[0087] In the plurality of anode patterns 22 manufactured by the dry etching process, the distance H between adjacent anode patterns 22 can be greatly reduced, and the distance H is set to satisfy: 0.5 μm≤H≤1.5 μm, which is more conducive to realizing a continuous light-emitting surface within a sub-pixel.

[0088] like Figure 3 and Figure 4 As shown, in some embodiments, the anode pattern 22 is set to a single-layer structure, and the material of the anode pattern includes indium tin oxide.

[0089] Exemplarily, the anode pattern has a rectangular structure, the length of the anode pattern is between 5 μm and 32 μm, the width of the anode pattern is between 3 μm and 14 μm, and the end values ​​may be included. Exemplarily, the size of the anode pattern includes 17 μm×9 μm and 32 μm×14 μm.

[0090] Exemplarily, the sizes of the multiple anode patterns included in the same sub-pixel may be the same or different.

[0091] Exemplarily, a sub-pixel may include multiple anode patterns, which is not limited in the present aspect, for example: including 2, 4, 8, 11, 14, 17, 20, etc.

[0092] The above configuration ensures the driving performance of the anode pattern 22 while better reducing the thickness of the anode pattern 22 , thereby effectively reducing the step difference and greatly reducing the risk of leakage or short circuit between the edge of the anode pattern 22 and the cathode 24 .

[0093] In some embodiments, the insulating layer 21 includes a transparent insulating layer.

[0094] Exemplarily, the transmittance of the transparent insulating layer is greater than or equal to 85%.

[0095] The above configuration enables the light emitted by the light-emitting functional layer 23 to pass through the insulating layer 21 and be better reflected by the reflective layer 27 out of the display substrate, thereby effectively improving the light extraction rate of the display substrate.

[0096] like Figure 3 and Figure 4 As shown, in some embodiments, the insulating layer 21 is made of inorganic material.

[0097] Exemplarily, the insulating layer 21 includes a thinned flat layer.

[0098] For example, the insulating layer 21 is made of SiN x or SiO x And other inorganic materials.

[0099] Exemplarily, the insulating layer 21 is made of Al2O3.

[0100] The insulating layer 21 is made of inorganic material, which can better control the thickness of the insulating layer 21 while ensuring the insulating performance of the insulating layer 21, thereby better realizing microcavity adjustment.

[0101] like Figure 3 and Figure 4 As shown, in some embodiments, the thickness D2 of the insulating layer 21 in a direction perpendicular to the substrate 10 satisfies:

[0102] Exemplarily, the value of D2 is:

[0103] It is worth noting that the reflective layer 27, the insulating layer 21, the multiple anode patterns 22, the light-emitting functional layer 23 and the cathode together constitute an optical resonant microcavity, which is configured to resonate and enhance the light emitted by the light-emitting functional layer 23 and reflect it out of the display substrate, thereby improving the luminous efficiency of the display substrate.

[0104] It is worth noting that the thinner the insulating layer 21 is, the more beneficial it is to the modulation of the optical resonance microcavity.

[0105] The above setting thickness D2 satisfies: This not only ensures good insulation performance of the insulating layer 21, but also facilitates modulation of the optical resonance microcavity.

[0106] For more details, see Figure 6 and Figure 7 , Figure 6 and Figure 7 The electron microscope images of the insulating layer 21 at two thicknesses are shown. Figure 6 and Figure 7 The thickness of the anode pattern 22 is Figure 6 and Figure 7 The total thickness of the bonding layer 25, the protective layer 26 and the reflective layer 27 is Figure 6 The thickness of the middle insulating layer 21 is Figure 7 The thickness of the middle insulating layer 21 is

[0107] like Figure 3 and Figure 4 As shown, in some embodiments, the sub-pixel further includes a bonding layer 25 , and the bonding layer 25 is located between the reflective layer 27 and the substrate 10 .

[0108] Exemplarily, the bonding layer 25 is made of indium tin oxide material.

[0109] Exemplarily, the display substrate further includes a planar layer PLN, wherein the planar layer PLN is located between the base 10 and the reflective layer 27 , and the bonding layer 25 is disposed between the planar layer PLN and the reflective layer 27 .

[0110] By providing the bonding layer 25 , the bonding between the reflective layer 27 and the planar layer PLN can be better enhanced, which is beneficial to improving the reliability of the display substrate.

[0111] like Figure 4 As shown, in some embodiments, the sub-pixel further includes a protection layer 26 , and the protection layer 26 is located between the reflective layer 27 and the insulating layer 21 .

[0112] Exemplarily, the protection layer 26 is made of indium tin oxide material.

[0113] Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10, the orthographic projection of the bonding layer 25 on the substrate 10, the orthographic projection of the reflective layer 27 on the substrate 10, and the orthographic projection of the protective layer 26 on the substrate 10 all overlap.

[0114] Exemplarily, the orthographic projection of the bonding layer 25 on the substrate 10 , the orthographic projection of the reflective layer 27 on the substrate 10 , and the orthographic projection of the protective layer 26 on the substrate 10 all at least partially overlap with the orthographic projection of the sub-pixel opening area 20 on the substrate 10 .

[0115] Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is located inside the orthographic projection of the bonding layer 25 on the substrate 10 , the orthographic projection of the reflective layer 27 on the substrate 10 , and the orthographic projection of the protective layer 26 on the substrate 10 .

[0116] By providing the protective layer 26 between the reflective layer 27 and the insulating layer 21 , the protective layer 26 can protect the reflective layer 27 from being oxidized during the process of manufacturing the insulating layer 21 , thereby better ensuring the good reflective performance of the reflective layer 27 .

[0117] like Figure 4As shown, in some embodiments, the bonding layer 25, the protective layer 26 and the anode pattern 22 are made of the same material.

[0118] Exemplarily, the bonding layer 25 , the protective layer 26 and the anode pattern 22 are all made of indium tin oxide material.

[0119] Exemplarily, the thickness of the bonding layer 25 and the protective layer 26 are both The thickness of the reflective layer 27 is

[0120] The above configuration enables the bonding layer 25, the protective layer 26 and the anode pattern 22 to be manufactured using the same equipment, thereby better saving the manufacturing cost of the display substrate.

[0121] In some embodiments, the sub-pixel further includes:

[0122] A hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer are stacked in sequence in a direction away from the substrate 10, wherein the hole injection layer and the hole transport layer are both located between the light-emitting functional layer 23 and the plurality of anode patterns 22, and the electron transport layer and the electron injection layer are both located between the light-emitting functional layer 23 and the cathode 24.

[0123] Exemplarily, the hole injection layer, the hole transport layer, the electron transport layer and the electron injection layer are all whole film layers covering all sub-pixel regions in the display substrate.

[0124] In the display substrate provided by the above embodiment, by setting the reflective layer 27, the insulating layer 21 and the multiple anode patterns 22, the step difference generated by the anode pattern 22 is effectively reduced. In this way, when the hole injection layer, the hole transport layer, the electron transport layer and the electron injection layer covering the multiple anode patterns 22 are set, the probability of the hole injection layer, the hole transport layer, the electron transport layer and the electron injection layer being broken due to the step difference is reduced, which is more conducive to the transmission of carriers in directions other than the direction perpendicular to the substrate 10, so that the carriers can move more obliquely upward of the anode pattern 22, thereby further improving the luminous continuity between sub-pixels.

[0125] Therefore, in the display substrate provided by the above embodiment, by setting the distance H to satisfy: 0.5 μm≤H≤1.5 μm and reducing the step difference generated by the anode pattern 22, the light emission continuity between sub-pixels in a sub-pixel is better achieved.

[0126] like Figure 4As shown, in some embodiments, the sub-pixel further includes a driving circuit 30, and the driving circuit 30 is located between the plurality of anode patterns 22 and the substrate 10, and the driving circuit 30 is used to provide driving signals for the plurality of anode patterns 22 respectively.

[0127] The display substrate further includes a planar layer PLN. The driving circuit 30 is disposed between the planar layer PLN and the base 10. The driving circuit 30 can provide a driving signal to each anode pattern 22 individually, and realize independent grayscale control of multiple sub-pixels formed by multiple anode patterns 22.

[0128] In some embodiments, the driving circuit 30 includes a plurality of sub-driving circuits corresponding to the plurality of anode patterns 22 one by one, and the sub-driving circuits are coupled to the corresponding anode patterns 22 through via structures 40 to provide driving signals to the corresponding anode patterns 22 .

[0129] Exemplarily, the sub-driving circuit includes a 6T1C structure, that is, it includes 6 transistors and one capacitor. The sub-driving circuit includes a 7T1C structure, that is, it includes 7 transistors and one capacitor. Exemplarily, the sub-driving circuit includes a 2T1C structure, that is, it includes 2 transistors and one circuit. The sub-driving circuits of the 6T1C structure, the 7T1C structure and the 2T1C structure are all conventional structures and will not be described in detail here.

[0130] Exemplarily, the anode pattern 22 is located on a side of the corresponding sub-driving circuit facing away from the substrate 10 .

[0131] Exemplarily, the plurality of anode patterns 22 are arranged along a first direction, and the plurality of sub-driving circuits corresponding to the plurality of anode patterns 22 are arranged along the first direction.

[0132] Exemplarily, in the case where the sub-driving circuit includes a 7T1C structure, the sub-driving circuit includes a driving transistor and a light-emitting control transistor, the gate of the light-emitting control transistor is coupled to the corresponding light-emitting control signal line (i.e., the EM line), the input electrode of the light-emitting control transistor is coupled to the output electrode of the driving transistor, and the output electrode of the light-emitting control transistor is coupled to the corresponding anode pattern 22. Exemplarily, the orthographic projection of the output electrode of the light-emitting control transistor on the substrate 10 has an overlapping area with the orthographic projection of the corresponding anode pattern 22 on the substrate 10, and the output electrode of the light-emitting control transistor is coupled to the corresponding anode pattern 22 through a via structure 40 located at the overlapping area.

[0133] Exemplarily, in the case where the sub-driving circuit includes a 2T1C structure, the sub-driving circuit includes a driving transistor, and an output electrode of the driving transistor is coupled to a corresponding anode pattern 22. Exemplarily, an orthographic projection of the output electrode of the driving transistor on the substrate 10 and an orthographic projection of the corresponding anode pattern 22 on the substrate 10 have an overlapping area, and the output electrode of the driving transistor is coupled to the corresponding anode pattern 22 through a via structure 40 located at the overlapping area.

[0134] In the display substrate provided in the above embodiment, the driving circuit 30 is arranged to include a plurality of sub-driving circuits corresponding one-to-one to the plurality of anode patterns 22, so that each sub-driving circuit can independently provide a driving signal for the corresponding anode pattern 22. Therefore, the display substrate can realize independent grayscale control of a plurality of sub-pixels formed by the plurality of anode patterns 22. The display substrate not only meets the requirements of multiple viewpoints of 3D display, but also ensures a high-resolution 3D display effect, so that the resolution during 3D display is not reduced compared to that during 2D display.

[0135] like Figure 4 As shown, in some embodiments, the driving circuit 30 includes a driving subcircuit and a plurality of control subcircuits respectively coupled to the driving subcircuit, the plurality of control subcircuits corresponding one-to-one to the plurality of anode patterns 22, each of the control subcircuits being coupled to the corresponding anode pattern 22 through a corresponding via structure 40, and the plurality of control subcircuits being capable of conducting the electrical connection between the driving subcircuit and the corresponding anode pattern 22 in a time-sharing manner.

[0136] Exemplarily, the driving subcircuit comprises a 7T1C structure, that is, comprises 7 transistors and one capacitor. Exemplarily, the driving subcircuit comprises a 2T1C structure, that is, comprises 2 transistors and one circuit.

[0137] Exemplarily, the anode pattern 22 is located on a side of the corresponding control subcircuit facing away from the substrate 10 .

[0138] Exemplarily, the plurality of anode patterns 22 are arranged along a first direction, and the plurality of control sub-circuits corresponding to the plurality of anode patterns 22 are arranged along the first direction.

[0139] Exemplarily, the control subcircuit includes a control transistor, a gate of the control transistor is coupled to a corresponding light-emitting control signal line, an input electrode of the control transistor is coupled to the driving subcircuit, an orthographic projection of an output electrode of the control transistor on the substrate 10 has an overlapping area with an orthographic projection of a corresponding anode pattern 22 on the substrate 10, and the output electrode of the control transistor is coupled to the corresponding anode pattern 22 through a via structure 40 located at the overlapping portion.

[0140] Exemplarily, in the case where the driving subcircuit includes a 7T1C structure, the driving subcircuit includes a driving transistor and a light-emitting control transistor, a gate of the light-emitting control transistor is coupled to a corresponding light-emitting control signal line, an input electrode of the light-emitting control transistor is coupled to an output electrode of the driving transistor, and the output electrodes of the light-emitting control transistor are respectively coupled to the multiple control subcircuits.

[0141] Exemplarily, when the driving subcircuit adopts a 7T1C structure, the light emitting control transistor included in the driving subcircuit may be removed, and the output electrodes of the driving transistor included in the driving subcircuit may be coupled to the multiple control subcircuits respectively.

[0142] Exemplarily, in the case where the driving subcircuit includes a 2T1C structure, the driving subcircuit includes a driving transistor, and output electrodes of the driving transistor are respectively coupled to the plurality of control subcircuits.

[0143] In the display substrate provided in the above embodiment, the driving circuit 30 is arranged to include a driving sub-circuit and the multiple control sub-circuits respectively coupled to the driving sub-circuit, so that the driving circuit 30 can provide a driving signal for each anode pattern 22 separately. Therefore, the display substrate can realize independent grayscale control of multiple sub-pixels formed by multiple anode patterns 22. The display substrate not only meets the requirements of multiple viewpoints of 3D display, but also ensures a high-resolution 3D display effect, so that the resolution during 3D display will not be reduced compared to 2D display.

[0144] like Figures 3 to 5 As shown, in some embodiments, the display substrate further includes a pixel defining layer 50, and the pixel defining layer 50 is located on the side of the anode pattern 22 facing away from the substrate 10, and the pixel defining layer 50 defines a plurality of sub-pixel opening areas 20, and the orthographic projection of the pixel defining layer 50 on the substrate 10 at least partially overlaps with the orthographic projection of the via structure 40 on the substrate 10.

[0145] Exemplarily, after forming the plurality of anode patterns 22 , the pixel defining layer 50 is formed, and the pixel defining layer 50 can define the plurality of sub-pixel opening regions 20 .

[0146] Exemplarily, the orthographic projection of the pixel defining layer 50 on the substrate 10 overlaps with the orthographic projection of each anode pattern 22 on the substrate 10. Exemplarily, the multiple anode patterns 22 are arranged along a first direction, and the orthographic projection of the pixel defining layer 50 on the substrate 10 overlaps with the orthographic projection of the first end of each anode pattern 22 on the substrate 10; the orthographic projection of the pixel defining layer 50 on the substrate 10 overlaps with the orthographic projection of the second end of each anode pattern 22 on the substrate 10; the first end and the second end of the anode pattern are opposite to each other along the extension direction of the long side of the anode pattern.

[0147] Exemplarily, the orthographic projection of the pixel defining layer 50 on the substrate 10 at least partially overlaps with the orthographic projection of the via structure 40 on the substrate 10 , and the pixel defining layer 50 is filled in the via structure 40 .

[0148] In the display substrate provided in the above embodiment, the pixel defining layer 50 is configured such that the orthographic projection of the pixel defining layer 50 on the substrate 10 at least partially overlaps with the orthographic projection of the via structure 40 on the substrate 10 , so that the pixel defining layer 50 can flatten the depression formed by the via structure 40 .

[0149] In some embodiments, the pixel defining layer 50 includes a first defining portion and a second defining portion, wherein the orthographic projection of the first defining portion on the substrate 10 at least partially overlaps with the orthographic projection of the via structure 40 on the substrate 10, and the orthographic projection of the second defining portion on the substrate 10 does not overlap with the orthographic projection of the via structure 40 on the substrate 10;

[0150] The orthographic projection of the cathode 24 on the substrate 10 does not overlap with the orthographic projection of the first defining portion on the substrate 10 , and the orthographic projection of the cathode 24 on the substrate 10 at least partially overlaps with the orthographic projection of the second defining portion on the substrate 10 .

[0151] Exemplarily, the first defining portion and the second defining portion are formed as an integral structure.

[0152] Exemplarily, the first defining portion is located on two opposite sides of a same pixel opening area, the second defining portion is located on two opposite sides of a same pixel opening area, and the first defining portion is adjacent to the second defining portion.

[0153] In some embodiments, the reflective layer 27 is located between the driving circuit and the pixel definition layer 50 .

[0154] like Figure 4 and Figure 5As shown, in some embodiments, the via structure 40 penetrates the insulating layer 21 , and the orthographic projection of the via structure 40 on the substrate 10 does not overlap with the orthographic projection of the reflective layer 27 on the substrate 10 .

[0155] Exemplarily, the display substrate further includes a planar layer PLN, the planar layer PLN is located between the anode pattern 22 and the driving circuit 30, and the via structure 40 penetrates the insulating layer 21 and the planar layer PLN.

[0156] The above arrangement ensures that the orthographic projection of the via structure 40 on the substrate 10 does not overlap with the orthographic projection of the reflective layer 27 on the substrate 10 , thereby preventing the anode pattern 22 from short-circuiting with the reflective layer 27 when connected to the drive circuit 30 .

[0157] like Figure 5 As shown, in some embodiments, the via structures 40 corresponding to the plurality of anode patterns 22 are arranged along a first direction.

[0158] Need to explain, Figure 5 Three sub-pixels are shown in FIG. 3 , and the three sub-pixels are arranged in a direction perpendicular to the first direction, and each sub-pixel includes a plurality of anode patterns 22.

[0159] The above arrangement is conducive to the pixel defining layer 50 completely covering the via structures 40 corresponding to the plurality of anode patterns 22, thereby just ensuring the flatness of the display substrate.

[0160] In some embodiments, among the multiple anode patterns 22 included in the same sub-pixel, the via holes corresponding to some of the anode patterns 22 are located on the first side of the anode pattern, the via holes corresponding to some of the anode patterns 22 are located on the second side of the anode pattern, and the via holes corresponding to some of the anode patterns 22 are located on the third side of the anode pattern. The first side and the second side of each anode pattern are opposite, and the third side is adjacent to both the first side and the second side.

[0161] An embodiment of the present disclosure further provides a display device, comprising the display substrate provided by the above embodiment.

[0162] In the display substrate provided by the above embodiment, the sub-pixel is arranged to include the reflective layer 27, the insulating layer 21 and the multiple anode patterns 22, so that the reflective layer 27 and the insulating layer 21 are both a whole layer structure arranged below the multiple anode patterns 22, so that the height of the step difference generated between each anode pattern 22 and the spacing area is only related to the thickness of the anode pattern 22, but has nothing to do with the thickness of the insulating layer 21 and the reflective layer 27, thereby greatly reducing the height of the step difference, so that the part of the light-emitting functional layer 23 filled in the spacing area is reduced, and the thickness of the light-emitting functional layer 23 covering the edge part of the anode pattern 22 is increased, thereby effectively increasing the distance between the edge part of the anode pattern 22 and the cathode 24, and greatly reducing the risk of leakage or short circuit between the edge part of the anode pattern 22 and the cathode.

[0163] Moreover, the display substrate provided in the above embodiment effectively improves the flatness of the side of the multiple anode patterns 22 facing away from the substrate 10 by significantly reducing the height of the step difference, so that the surface of the light-emitting functional layer 23 arranged on the side of the multiple anode patterns 22 facing away from the substrate 10 is approximately flat, thereby better realizing the uniformity of the display brightness of the display substrate.

[0164] The display device provided by the embodiment of the present disclosure also has the above-mentioned beneficial effects when including the above-mentioned display substrate, which will not be described in detail here.

[0165] It should be noted that the display device may be any product or component with a display function, such as a television, a monitor, a digital photo frame, a mobile phone, and a tablet computer.

[0166] The present disclosure also provides a method for manufacturing a display substrate, which is used to manufacture the display substrate provided in the above embodiment. Figure 3 As shown, the manufacturing method includes: manufacturing a plurality of sub-pixels on a substrate 10, wherein the sub-pixels include a sub-pixel opening area 20; and the steps of manufacturing the sub-pixels specifically include:

[0167] A reflective layer 27 is formed, wherein an orthographic projection of the reflective layer 27 on the substrate 10 at least partially overlaps with an orthographic projection of the sub-pixel opening area 20 on the substrate 10;

[0168] Manufacturing an insulating layer 21, wherein the insulating layer 21 is located on a side of the reflective layer 27 facing away from the substrate 10;

[0169] Manufacturing a plurality of mutually independent anode patterns 22, wherein the plurality of anode patterns 22 are located on a side of the insulating layer 21 facing away from the substrate 10, and the orthographic projections of the plurality of anode patterns 22 on the substrate 10 at least partially overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10;

[0170] Manufacturing a light-emitting functional layer 23, wherein the light-emitting functional layer 23 is located on a side of the plurality of anode patterns 22 facing away from the substrate 10, and an orthographic projection of the light-emitting functional layer 23 on the substrate 10 at least partially overlaps with an orthographic projection of the sub-pixel opening area 20 on the substrate 10;

[0171] A cathode 24 is manufactured, wherein the cathode 24 is located on the side of the light-emitting functional layer 23 facing away from the substrate 10, and the orthographic projection of the cathode 24 on the substrate 10 covers the orthographic projection of the light-emitting functional layer 23 on the substrate 10; the orthographic projection of a first portion of the cathode 24 on the substrate 10 is located inside the orthographic projection of the sub-pixel opening area 20 on the substrate 10, and the surface of the first portion facing away from the substrate 10 has a step difference, and in the direction perpendicular to the substrate 10, the height of the step difference is less than or equal to the thickness of the anode pattern 22.

[0172] Exemplarily, the substrate 10 includes a flexible substrate 10 or a rigid substrate 10 .

[0173] Exemplarily, the reflective layer 27 is made of a metal material, such as metallic silver. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is located inside the orthographic projection of the reflective layer 27 on the substrate 10. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is surrounded by the orthographic projection of the reflective layer 27 on the substrate 10.

[0174] Exemplarily, the insulating layer 21 includes a passivation layer. Exemplarily, the insulating layer 21 completely covers the reflective layer 27, and the insulating layer 21 can insulate the reflective layer 27 from the multiple anode patterns 22. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is located inside the orthographic projection of the insulating layer 21 on the substrate 10. Exemplarily, the orthographic projection of the sub-pixel opening area 20 on the substrate 10 is surrounded by the orthographic projection of the insulating layer 21 on the substrate 10.

[0175] Exemplarily, the insulating layer 21 is formed by depositing an inorganic material.

[0176] Exemplarily, the multiple anode patterns 22 are made of the same material, and the multiple anode patterns 22 can be formed simultaneously in one patterning process. Exemplarily, the anode pattern 22 is a single-layer pattern made of a single material. Exemplarily, the multiple anode patterns 22 are arranged along a first direction. Exemplarily, the multiple anode patterns 22 are distributed in an array. Exemplarily, the multiple anode patterns 22 are uniformly distributed. Exemplarily, a spacing area is formed between adjacent anode patterns 22, and the height of the step formed between each anode pattern 22 and the spacing area around it is related to the thickness of the anode pattern 22 in a direction perpendicular to the substrate 10.

[0177] Exemplarily, the orthographic projections of the plurality of anode patterns 22 on the substrate 10 overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10. Exemplarily, the orthographic projections of a portion of the plurality of anode patterns 22 on the substrate 10 are located inside the orthographic projections of the sub-pixel opening area 20 on the substrate 10, and the orthographic projections of another portion of the plurality of anode patterns 22 on the substrate 10 overlap with the orthographic projections of the sub-pixel opening area 20 on the substrate 10.

[0178] Exemplarily, the light-emitting functional layer 23 is made of an organic light-emitting material. Exemplarily, the orthographic projection of the light-emitting functional layer 23 on the substrate 10 coincides with the orthographic projection of the sub-pixel opening area 20 on the substrate 10. Exemplarily, the light-emitting functional layer 23 covers at least part of each of the anode patterns 22, and fills in the spacing area between adjacent anode patterns 22.

[0179] Exemplarily, the cathode 24 is a whole layer structure covering each sub-pixel opening area 20. Exemplarily, the cathode 24 is made of metal material.

[0180] In the display substrate manufactured by the manufacturing method provided by the embodiment of the present disclosure, the sub-pixel is arranged to include the reflective layer 27, the insulating layer 21 and the multiple anode patterns 22, so that the reflective layer 27 and the insulating layer 21 are both a whole layer structure arranged below the multiple anode patterns 22, so that the height of the step difference generated between each anode pattern 22 and the spacing area is only related to the thickness of the anode pattern 22, but has nothing to do with the thickness of the insulating layer 21 and the reflective layer 27, thereby greatly reducing the height of the step difference, so that the part of the light-emitting functional layer 23 filled in the spacing area is reduced, and the thickness of the light-emitting functional layer 23 covering the edge part of the anode pattern 22 is increased, thereby effectively increasing the distance between the edge part of the anode pattern 22 and the cathode 24, and greatly reducing the risk of leakage or short circuit between the edge part of the anode pattern 22 and the cathode.

[0181] Moreover, the display substrate manufactured by the manufacturing method provided by the embodiment of the present disclosure significantly reduces the height of the step difference, thereby effectively improving the flatness of the side of the multiple anode patterns 22 facing away from the substrate 10, thereby making the surface of the light-emitting functional layer 23 arranged on the side of the multiple anode patterns 22 facing away from the substrate 10 approximately flat, thereby better realizing the uniformity of the display brightness of the display substrate.

[0182] like Figure 3 As shown, in some embodiments, the steps of making a plurality of mutually independent anode patterns 22 specifically include:

[0183] An anode transition layer is formed.

[0184] The anode transition layer is etched by dry etching process to form a plurality of anode patterns 22 independent of each other.

[0185] Exemplarily, the manufacturing process of the plurality of anode patterns 22 is as follows:

[0186] An anode transition layer is formed by using an indium tin oxide material, a photoresist is formed on the anode transition layer, and the photoresist is exposed to form a photoresist retaining area and a photoresist removing area, wherein the photoresist retaining area corresponds to an area where the multiple anode patterns 22 are located, and the photoresist removing area corresponds to other areas except the multiple anode patterns 22; the photoresist located in the photoresist removing area is removed to expose the anode transition layer located in the photoresist removing area, and the exposed anode transition layer is subjected to a dry etching process using the photoresist in the photoresist retaining area as a mask to etch and remove the exposed anode transition layer to form the multiple anode patterns 22.

[0187] In the plurality of anode patterns 22 manufactured by the dry etching process, the distance H between adjacent anode patterns 22 can be greatly reduced, and the distance H is set to satisfy: 0.5 μm≤H≤1.5 μm, which is more conducive to realizing a continuous light-emitting surface within a sub-pixel.

[0188] It should be noted that each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment, since it is basically similar to the product embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the product embodiment.

[0189] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect", "couple" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0190] It will be understood that when an element such as a layer, film, region, or substrate is referred to as being “on” or “under” another element, it can be “directly on” or “under” the other element or intervening elements may be present.

[0191] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0192] The above is only a specific embodiment of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A display substrate, comprising: A substrate, and a plurality of sub-pixels disposed on the substrate, wherein the sub-pixels include sub-pixel opening areas; The sub-pixel further includes: a reflective layer, wherein an orthographic projection of the reflective layer on the substrate at least partially overlaps with an orthographic projection of the sub-pixel opening area on the substrate; an insulating layer, the insulating layer being located on a side of the reflective layer facing away from the substrate; A plurality of mutually independent anode patterns, the plurality of anode patterns being located on a side of the insulating layer facing away from the substrate, and the orthographic projections of the plurality of anode patterns on the substrate at least partially overlapping with the orthographic projections of the sub-pixel opening area on the substrate; a light-emitting functional layer, the light-emitting functional layer being located on a side of the plurality of anode patterns facing away from the substrate, and an orthographic projection of the light-emitting functional layer on the substrate at least partially overlapping with an orthographic projection of the sub-pixel opening area on the substrate; A cathode, wherein the cathode is located on the side of the light-emitting functional layer facing away from the substrate, and the orthographic projection of the cathode on the substrate covers the orthographic projection of the light-emitting functional layer on the substrate; the orthographic projection of the first part of the cathode on the substrate is located inside the orthographic projection of the sub-pixel opening area on the substrate, and the surface of the first part facing away from the substrate has a step difference, and in the direction perpendicular to the substrate, the height of the step difference is less than or equal to the thickness of the anode pattern.

2. The display substrate according to claim 1, wherein: The thickness D1 of the anode pattern in a direction perpendicular to the substrate satisfies:

3. The display substrate according to claim 1, wherein: The plurality of anode patterns in the sub-pixel are arranged along a first direction, and the shortest distance H between two adjacent sides of the adjacent anode patterns satisfies: 0.5 μm≤H≤1.5 μm.

4. The display substrate according to claim 1, wherein: The anode pattern is a single-layer structure, and the material of the anode pattern includes indium tin oxide.

5. The display substrate according to claim 1, wherein: The insulating layer includes a transparent insulating layer.

6. The display substrate according to claim 1, wherein: The insulating layer is made of inorganic material.

7. The display substrate according to claim 1, wherein: The thickness D2 of the insulating layer in a direction perpendicular to the substrate satisfies:

8. The display substrate according to claim 1, wherein: The sub-pixel further includes a bonding layer, and the bonding layer is located between the reflective layer and the substrate.

9. The display substrate according to claim 8, wherein: The sub-pixel further includes a protection layer, and the protection layer is located between the reflective layer and the insulating layer.

10. The display substrate according to claim 9, wherein: The bonding layer, the protective layer and the anode pattern are made of the same material.

11. The display substrate according to claim 1, wherein: The sub-pixel further includes: A hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer are stacked in sequence in a direction away from the substrate, wherein the hole injection layer and the hole transport layer are both located between the light-emitting functional layer and the multiple anode patterns, and the electron transport layer and the electron injection layer are both located between the light-emitting functional layer and the cathode.

12. The display substrate according to claim 1, wherein: The sub-pixel further includes a driving circuit, which is located between the plurality of anode patterns and the substrate, and is used to provide driving signals for the plurality of anode patterns respectively.

13. The display substrate according to claim 12, wherein: The driving circuit includes a plurality of sub-driving circuits corresponding to the plurality of anode patterns one by one, and the sub-driving circuits are coupled to the corresponding anode patterns through via structures to provide driving signals for the corresponding anode patterns.

14. The display substrate according to claim 12, wherein: The driving circuit includes a driving subcircuit and a plurality of control subcircuits respectively coupled to the driving subcircuit, the plurality of control subcircuits corresponding to the plurality of anode patterns one by one, each of the control subcircuits coupled to the corresponding anode pattern through a via structure, and the plurality of control subcircuits can conduct the electrical connection between the driving subcircuit and the corresponding anode pattern in a time-sharing manner.

15. The display substrate according to claim 13 or 14, wherein: The display substrate also includes a pixel defining layer, which is located on the side of the anode pattern facing away from the substrate. The pixel defining layer defines a plurality of sub-pixel opening areas, and the orthographic projection of the pixel defining layer on the substrate at least partially overlaps with the orthographic projection of the via structure on the substrate.

16. The display substrate according to claim 15, wherein: The pixel defining layer comprises a first defining portion and a second defining portion, wherein an orthographic projection of the first defining portion on the substrate at least partially overlaps with an orthographic projection of the via structure on the substrate, and an orthographic projection of the second defining portion on the substrate does not overlap with an orthographic projection of the via structure on the substrate; The orthographic projection of the cathode on the substrate does not overlap with the orthographic projection of the first defining portion on the substrate, and the orthographic projection of the cathode on the substrate at least partially overlaps with the orthographic projection of the second defining portion on the substrate.

17. The display substrate according to claim 15, wherein: The reflective layer is located between the driving circuit and the pixel definition layer.

18. The display substrate according to claim 13 or 14, wherein: The via structure passes through the insulating layer, and an orthographic projection of the via structure on the substrate does not overlap with an orthographic projection of the reflective layer on the substrate.

19. The display substrate according to claim 13 or 14, wherein: The via structures corresponding to the plurality of anode patterns are arranged along a first direction.

20. A display device comprising the display substrate according to any one of claims 1 to 19.

21. A method for manufacturing a display substrate, comprising: Fabricating a plurality of sub-pixels on a substrate, wherein the sub-pixels include a sub-pixel opening area; The steps of making the sub-pixel specifically include: Manufacturing a reflective layer, wherein an orthographic projection of the reflective layer on the substrate at least partially overlaps an orthographic projection of the sub-pixel opening area on the substrate; manufacturing an insulating layer, wherein the insulating layer is located on a side of the reflective layer facing away from the substrate; Manufacturing a plurality of mutually independent anode patterns, wherein the plurality of anode patterns are located on a side of the insulating layer facing away from the substrate, and the orthographic projections of the plurality of anode patterns on the substrate at least partially overlap with the orthographic projections of the sub-pixel opening area on the substrate; Manufacturing a light-emitting functional layer, wherein the light-emitting functional layer is located on a side of the plurality of anode patterns facing away from the substrate, and an orthographic projection of the light-emitting functional layer on the substrate at least partially overlaps with an orthographic projection of the sub-pixel opening area on the substrate; A cathode is manufactured, wherein the cathode is located on the side of the light-emitting functional layer facing away from the substrate, and the orthographic projection of the cathode on the substrate covers the orthographic projection of the light-emitting functional layer on the substrate; the orthographic projection of the first part of the cathode on the substrate coincides with the orthographic projection of the sub-pixel opening area on the substrate, and the surface of the first part facing away from the substrate has a step difference, and in the direction perpendicular to the substrate, the height of the step difference is less than or equal to the thickness of the anode pattern.

22. The method for manufacturing a display substrate according to claim 21, wherein: The steps of making multiple independent anode patterns specifically include: forming an anode transition layer; The anode transition layer is etched by dry etching process to form a plurality of anode patterns independent of each other.

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