A method for ultra-flat tension stretching bending straightening of special alloy precision foil with a thickness of less than 0.05 mm

Abstract

The present invention discloses a stretching and straightening method for special alloy precision foil with a thickness of less than 0.05 mm, which is implemented by a 23-roll stretching and straightening machine. The stretching and straightening method comprises: (1) adjusting the straightening roller box of the 23-roll stretching and straightening machine according to the initial plate shape of the special alloy precision foil, and performing an initial straightening treatment on the special alloy precision foil according to a set first straightening tension, a first elongation, a first reduction and a first straightening speed; (2) performing a product straightening treatment on the foil after the initial straightening treatment according to a set second straightening tension, a second elongation, a second reduction and a second straightening speed. The method of the present invention enables the plate shape straightness to meet the use and processing requirements of different application fields.

Description

Technical Field

[0001] The invention relates to the technical field of production and manufacturing of ultra-thin precision foil materials, and in particular to an ultra-flat tension stretching, bending and straightening method for special alloy precision foil materials with a thickness of less than 0.05 mm. Background Art

[0002] In recent years, with the development of high-end electronic products, aerospace, new energy and other industries, new demands have been put forward for special alloy foils. For example, in the semiconductor industry, the low expansion alloy 4J36 foil used in the production of OLED display screens has a thickness of less than 0.03mm and a flatness requirement of less than 10IU (i.e., flatness ≤0.1mm / m); in the aerospace field, the fixed expansion alloy 4J29 foil used for solar panel connection equipment has a thickness of ≤0.02mm and is also required to have a flatness of 0.1mm / m; in addition, in the new energy industry and high-end electronics industry, special alloy foils such as 4J32, 4J42, and 4J36 used for packaging materials are widely used.

[0003] However, there has been no report in China on the production of special alloy foils below 0.05 mm, such as 4J29, 4J36, 4J42, 4J32 and other varieties of precision foil products, and the process technology of related products is blank in China. In addition, the application of high-end fields requires not only the special physical properties of materials, but also the overall quality of foils. Whether in China or abroad, special alloy foils, especially 4J36 alloy foils used in the semiconductor industry, have high manufacturing costs and unsatisfactory performance.

[0004] Therefore, there is an urgent need to provide an ultra-flat tension multi-point stretching bending straightening method for special alloy precision foil with a thickness of less than 0.05 mm, so as to improve the overall quality of the foil. Summary of the invention

[0005] In order to solve all or part of the above problems, the present invention aims to provide a method for ultra-flat tension stretching, bending and straightening of special alloy precision foil with a thickness of less than 0.05 mm.

[0006] Specifically, the present invention is achieved through the following technical solutions:

[0007] A stretching and straightening method for special alloy precision foil is implemented by using a 23-roller stretching and straightening machine. The stretching and straightening method comprises:

[0008] (1) adjusting the straightening roller box of the 23-roller stretch straightening machine according to the initial plate shape of the special alloy precision foil, and performing initial straightening treatment on the special alloy precision foil according to the set first straightening tension, first elongation, first reduction and first straightening speed;

[0009] (2) performing product straightening treatment on the foil that has undergone the initial straightening treatment according to the set second straightening tension, second elongation, second reduction amount and second straightening speed.

[0010] Optionally, in step (1), the first straightening tension is ≥50N / mm 2 , the first elongation is ≥0.3%, the first reduction is -2.1~-2.8, and the first straightening speed is ≥120m / min.

[0011] Optionally, in step (2), the second straightening tension is ≤35N / mm 2 , the second elongation is 0.1% to 0.25%, the second reduction is -1.5 to -2.0, and the second straightening speed is ≤40m / min.

[0012] Optionally, each support roller in the straightening roller box of the 23-roller stretching straightening machine is provided with 7 backing bearings.

[0013] Optionally, the initial plate shape of the special alloy precision foil is a defective plate shape with regular bubble-like appearance on one side or both sides; the straightening roller box of the 23-roll stretching straightening machine is adjusted as follows: adjust the two sets of backing bearings adjacent to the edges of the support rollers corresponding to the one side or both sides, and the adjustment amount is -2 to 2 unit values.

[0014] Optionally, the initial plate shape of the special alloy precision foil is a transverse groove shape in the width direction of the foil; the straightening roller box of the 23-roller stretching straightening machine is adjusted as follows: adjust the 4 sets of bearings in the middle of the support roller, and the adjustment amount is -4 to 4 unit values.

[0015] Optionally, the initial plate shape of the special alloy precision foil is a regular bubble-shaped defective plate shape appearing within 2 / 3 of the middle part of the foil along the width direction; the straightening roller box of the 23-roll stretching straightening machine is adjusted as follows: adjust the 2 sets of bearings in the middle part of the support roller, the adjustment amount is -2 to 2 unit values, and adjust the 1 set of bearings on the upper edge of the support roller, the adjustment amount is -2 to 2 unit values.

[0016] Optionally, the initial plate shape of the special alloy precision foil is a single-sided or double-sided edge wave with a wave width exceeding 50 mm; the straightening roller box of the 23-roller stretching straightening machine is adjusted as follows: adjust a set of backing bearings on the upper edge of the support roller corresponding to the single-sided or double-sided edge, and the adjustment amount is -2 to 2 unit values.

[0017] Optionally, the thickness of the special alloy precision foil is ≤0.05 mm; the grade of the special alloy precision foil is 4J29, 4J36, 4J42 or 4J32.

[0018] Optionally, the foil material that has been straightened has a flatness of ≤0.1 mm / m and a verticality of ≤10 mm / m.

[0019] It can be seen from the above technical solution that the stretching straightening method of the present invention has at least the following advantages:

[0020] The present invention provides an ultra-flat tension multi-point stretching bending straightening method for special alloy precision foil with a thickness of less than 0.05mm. Based on a 23-roller multi-point straightening unit, with the help of the process design of "high tension, high pressure, high elongation, low speed initial straightening + low tension, low pressure, low elongation, high speed finished product straightening", and the straightening roller box of the 23-roller straightening unit is adjusted according to different initial plate shapes, so as to achieve a plate straightness of 0.1mm / m with a thickness of ≤0.05mm. Under the guarantee of the ultra-flat tension multi-point stretching bending straightening process of the present invention, the plate straightness of special alloy foil meets the use and processing requirements of different application fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0022] Figure 1 It is a schematic structural diagram of the 23-roller stretching straightening machine used in the present invention, wherein the direction of the arrow indicates the running direction of the foil, 1 indicates a straightening roller box, 2 indicates a front tension roller group, and 3 indicates a rear tension roller group.

[0023] Figure 2 It is a schematic front view of the roll box of the 23-roller stretching straightening machine used in the present invention, wherein 11, 11' represent working rolls, 12, 12' represent an intermediate roll, 13, 13' represent support rolls, and 4 represents foil.

[0024] Figure 3 It is a top view of the roller box of the 23-roller stretch straightening machine used in the present invention.

[0025] Figure 4 A roller box adjustment scheme according to a first embodiment of the present invention is shown.

[0026] Figure 5 A roller box adjustment scheme according to a second embodiment of the present invention is shown.

[0027] Figure 6 A roller box adjustment scheme according to a third embodiment of the present invention is shown.

[0028] Figure 7 A roller box adjustment scheme for single-sided wave of foil according to a fourth embodiment of the present invention is shown.

[0029] Figure 8 A roller box adjustment scheme for double-sided corrugation of foil according to a fourth embodiment of the present invention is shown.

[0030] Fig. 9 A schematic diagram showing the straightness of the foil after etching according to Example 2 of the present invention is shown. DETAILED DESCRIPTION

[0031] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to enable the scope of the present invention to be fully communicated to those skilled in the art.

[0032] In the present invention, "special alloy precision foil" or "foil" includes alloys with grades 4J29, 4J36, 4J42, and 4J32, with a thickness of ≤0.05 mm and a width of ≥420 mm.

[0033] In the present invention, the term "wave" refers to a type of bad plate shape, which is manifested as a wave-shaped bending defect with ups and downs along the rolling direction of the steel strip, and is specifically distinguished according to the different distribution positions of the waves on the steel strip surface. Along the width direction of the steel strip surface, the waves distributed on one side of the plate surface are called "single-sided waves", those distributed on both sides of the plate surface are called "double-sided waves", those distributed in the middle of the plate surface are called "middle waves", and those distributed at 1 / 4 of the plate surface are called "1 / 4 waves".

[0034] In the present invention, "straightness", "flatness" or "plate straightness" refers to the maximum wave height of a horizontal surface on which a 1 m long steel strip is placed.

[0035] In the present invention, "verticality" refers to the maximum warping height above the fixed steel belt and below the steel belt when the 1 m long steel belt is placed vertically.

[0036] In the present invention, "bearing" and "backing bearing" have the same meaning and can be used interchangeably.

[0037] The present invention designs a stretching straightening method for special alloy precision foils with a thickness of less than 0.05mm. Through the innovative design of high tension, high pressure, high extension, low speed initial straightening + low tension, low pressure, low extension, high speed finished product straightening process, and the provision of a 23-roller multi-point straightening roller box adjustment scheme for different initial plate states, the ultra-flat straightening treatment of special alloy precision foils with a thickness of 0.05mm and below is achieved, and the plate flatness reaches 0.1mm / m, meeting the processing and use requirements in high-end electronics, aerospace and other fields.

[0038] The stretching and straightening method of the present invention is implemented by a 23-roller stretching and straightening machine. The 23-roller stretching and straightening machine (also called a 23-roller multi-point straightening machine, a 23-roller straightening machine or a 23-roller straightening machine) is a conventional device, and its structure is as follows: Figure 1 The 23-roller stretch straightening machine comprises a straightening roller box 1, a front tension roller group 2 and a rear tension roller group 3.

[0039] Several laminating rollers are symmetrically arranged in the straightening roller box 1, such as Figure 2 As shown, the straightening roll box 1 is provided with working rolls 11 and 11', an intermediate roll 12 and 12', and support rolls 13 and 13'. Each support roll is provided with seven backing bearings. The structure and parameter settings of the working roll, the intermediate roll, and the support roll can refer to the solutions in the prior art. Figure 3 A top view of the straightening roller cassette 1 is shown.

[0040] The stretch straightening method of the present invention comprises: (1) a primary straightening treatment, and (2) a product straightening treatment.

[0041] In the initial straightening treatment of step (1), high tension, high pressure, high elongation and low speed initial straightening is adopted. Specifically, the tensile straightening method of the present invention comprises:

[0042] (1) Perform initial straightening treatment on the special alloy precision foil (focusing on straightening the foil wave shape) according to the set first straightening tension, first elongation, first reduction and first straightening speed. Specifically, the first straightening tension is ≥ 50N / mm 2 , the first elongation is ≥0.3%, the first reduction is -2.1~-2.8, and the first straightening speed is ≥120m / min.

[0043] (2) Perform product straightening treatment (i.e., product straightening) on ​​the foil after the initial straightening treatment according to the set second straightening tension, second elongation, second reduction amount and second straightening speed. Specifically, the second straightening tension is ≤35N / mm 2 , the second elongation is 0.1% to 0.25%, the second reduction is -1.5 to -2.0, and the second straightening speed is ≤40m / min.

[0044] Preferably, in step (1), it is also necessary to adjust the straightening roll box of the 23-roller stretch straightening machine according to the initial plate shape of the special alloy precision foil so as to compensate the working rolls.

[0045] In the first embodiment, the initial shape of the special alloy precision foil is a regular bubble-like shape appearing on one or both sides at the 1 / 4 position of the foil. Figure 4As shown, bubbles appear on one side of the foil, and along the width direction of the foil, regular bubbles 5 appear at a position 1 / 4 away from the edge of the foil. The adjustment plan of the roller box is: according to the width of the foil, the two sets of bearings 101 and 102 (two sets of bearings near the edge) corresponding to the position of the regular bubbles 5 of each support roller in the roller box are adjusted, and the adjustment amount is -2 to 2 unit values ​​(the so-called "unit value" refers to the displacement value of the roller box bearing relative to the mechanical zero point), so as to compensate the working roller and adjust the wave to the edge. When regular bubbles appear on both sides of the foil, the adjustment plan of the roller box can be adaptively adjusted, and the two sets of bearings near the edge on both sides of each support roller can be adjusted separately. After adjustment, the plate type of the foil is double-sided wave, the wave width is less than 30mm, and the wave height is less than 1.0mm / m.

[0046] It should be noted that the roller box adjustment scheme in the first embodiment described above is also applicable to the case where the initial plate shape of the special alloy precision foil is a single-sided or double-sided 1 / 4 wave.

[0047] In a second embodiment, the initial plate shape of the special alloy precision foil is a transverse groove shape in the width direction of the foil, such as Figure 5 As shown, the arrow direction indicates the width direction. The adjustment scheme of the roller box is: according to the width of the foil, the middle 4 sets of bearings (for example, bearings 102, 103, 104 and 105, or bearings 103, 104, 105 and 106) of each supporting roller in the roller box are adjusted, and the adjustment amount is -4 to 4 units. The working roller is compensated and the wave can be adjusted to the 1 / 4 position, that is, after adjustment, the plate shape of the foil is double 1 / 4 waves, and the wave width does not exceed 50mm. On this basis, the adjustment scheme of the roller box in the first embodiment above can be further adopted to repeat straightening, so that the plate shape of the foil becomes double-sided waves.

[0048] In the third embodiment, the initial plate shape of the special alloy precision foil is a bad plate shape with regular bubbles appearing within 2 / 3 of the middle of the foil in the width direction. Figure 6 As shown, along the width direction of the foil, regular bubbles 6 appear within 2 / 3 of the middle of the plate. The adjustment plan for the roller box is: according to the width of the foil, the middle two sets of bearings of each support roller in the roller box are adjusted, and the adjustment amount is -2 to 2 units, and the two sets of bearings on both sides of each support roller are adjusted, and the adjustment amount is -2 to 2 units to compensate the working roller. For example, bearings 101, 103, 104 and 107, or bearings 101, 104, 105 and 107. After adjustment, the plate type of the foil is double-sided wave, the wave width is less than 30mm, and the wave height is less than 1.0mm / m.

[0049] In the fourth embodiment, the initial plate shape of the special alloy precision foil is a single-side or double-side edge wave of the foil, and the wave width is greater than or equal to 50mm. The adjustment scheme of the roller box is: adjust a set of bearings on the edge of each support roller in the roller box, the position of the bearing corresponds to the position of the edge wave, the adjustment amount is -2 to 2 units, and the working roller is compensated to reduce the edge wave width. For example, Figure 7 As shown, if the foil has a single-sided wave on the edge, the bearing 101 is adjusted. After adjustment, the foil has a single-sided wave shape, with a wave width of less than 30 mm and a wave height of less than 1.0 mm / m. Figure 8 As shown, the foil has double-sided waves on its edge, so the bearings 101 and 107 are adjusted. After the adjustment, the foil has double-sided waves, with a wave width of less than 30 mm and a wave height of less than 1.0 mm / m.

[0050] By means of the first straightening tension, first elongation, first reduction and first straightening speed defined in the above step (1), combined with the roller box adjustment scheme, the foil can be basically eliminated after the initial straightening treatment, such as edge waves, middle waves, 1 / 4 waves, etc., and the C type is controlled below 80mm / m, and the appearance of bad plate types such as groove type and big belly plate is strictly controlled, laying the foundation for product straightening treatment. Then the final straightening treatment of the product is carried out, so that the product straightness reaches below 0.1mm / m, various bad wave shapes are eliminated, and the verticality is controlled below 10mm / m, achieving ultra-flat flat flatness control, meeting the processing and use requirements of various fields.

[0051] Example

[0052] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples. The experimental methods in the following examples without specifying specific conditions are carried out according to conventional methods and conditions, or selected according to the product specifications.

[0053] The 23-roller stretching and straightening machine used in the following embodiments is a B+S 23-roller stretching and straightening machine, wherein the diameter of the support roll is 40 mm, the diameter of the intermediate roll is 28 mm, and the diameter of the working roll is 16 mm.

[0054] Embodiment 1:

[0055] Constant expansion alloy 4J29, specification 0.05×420mm, super flat straightening:

[0056] The initial plate type of the 0.05mm strip has a single-sided wave on the transmission side, with a wave width of 50mm and a wave height of 3mm. The straightening scheme uses the fourth implementation scheme, adjusts the bearing 101 to -2 unit value, and achieves the goal of reducing the wave width and wave height by squeezing the edge. The specific straightening process parameters are as follows:

[0057] 1. Initial straightening (straightening of foil wave shape)

[0058] (1) Straightening tension: 58N / mm 2

[0059] (2) Elongation: 0.36%

[0060] (3) Depression -2.3

[0061] (4) Straightening speed: 160m / min

[0062] After initial straightening, the foil wave height reaches 0.4mm / m, the wave width is 20mm, and the verticality C-type is controlled at 50mm / m.

[0063] 2. Product straightening (straightening of foil’s final flatness) process:

[0064] (1) Straightening tension: 28N / mm 2

[0065] (2) Elongation: 0.25%

[0066] (3) Depression - 1.6

[0067] (4) Straightening speed: 25m / min

[0068] After product straightening, the foil straightness reaches 0.08mm / m, and the verticality of C type: 8mm / m.

[0069] Embodiment 2:

[0070] Low expansion alloy 4J36, specification 0.025×570mm, super flat straightening:

[0071] The initial plate shape of the 0.025mm strip is a 1 / 4 wave on one side of the operating side. The straightening scheme uses the first implementation scheme. A group of bearings 101 at the edge are adjusted to press down to -1 unit value, and bearing 102 is adjusted to 2 unit value, and the 1 / 4 wave is gradually adjusted to the edge. The specific straightening process is as follows:

[0072] 1. Initial straightening (straightening of foil wave shape)

[0073] (1) Straightening tension: 53N / mm 2

[0074] (2) Elongation: 0.42%

[0075] (3) Pressing amount -2.4

[0076] (4) Straightening speed: 120m / min

[0077] After initial straightening, the foil wave height reaches 0.5mm / m, the wave width is 25mm, and the verticality C-type is controlled at 50mm / m.

[0078] 2. Product straightening (straightening of foil’s final flatness) process:

[0079] (1) Straightening tension: 32N / mm 2

[0080] (2) Elongation: 0.21%

[0081] (3) Depression -1.8

[0082] (4) Straightening speed: 35m / min

[0083] After product straightening, the foil straightness reaches 0.1mm / m, and the verticality of C type: 9mm / m.

[0084] Application Example: Mask Application

[0085] The foil straightened in Example 2 is etched, opened and sliced, and the product straightness accuracy can reach below 80 microns. Fig. 9 shown.

[0086] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other substitutions, modifications, combinations, changes, simplifications, etc. made without departing from the spirit and principles of the present invention shall be equivalent replacement modes and shall be included in the protection scope of the present invention.

Claims

1. A stretching and straightening method for special alloy precision foil, characterized in that: The stretching and straightening method is implemented by using a 23-roller stretching and straightening machine, and the stretching and straightening method comprises: (1) According to the initial plate shape of the special alloy precision foil, the straightening roller box of the 23-roller stretch straightening machine is adjusted, and the special alloy precision foil is initially straightened according to the set first straightening tension ≥50N / mm², first elongation ≥0.3%, first reduction -2.1 to -2.8 and first straightening speed ≥120m / min; (2) The foil that has undergone the initial straightening treatment is straightened according to the set second straightening tension ≤35N / mm², the second elongation 0.1%~0.25%, the second reduction -1.5~-2.0 and the second straightening speed ≤40m / min.

2. The stretch straightening method according to claim 1, characterized in that: Each support roller in the straightening roller box of the 23-roller stretching straightening machine is provided with 7 backing bearings.

3. The stretch straightening method according to claim 2, characterized in that: The initial plate shape of the special alloy precision foil is a bad plate shape with regular bubbles on one side or both sides; The straightening roller box of the 23-roller stretch straightening machine is adjusted as follows: the two sets of backing bearings on the edges of the support roller corresponding to the single side or double side are adjusted by -2 to 2 unit values.

4. The stretch straightening method according to claim 2, characterized in that: The initial plate shape of the special alloy precision foil is a transverse groove shape in the width direction of the foil; The straightening roll box of the 23-roller stretch straightening machine is adjusted as follows: the 4 sets of backing bearings in the middle of the support roll are adjusted by -4 to 4 unit values.

5. The stretch straightening method according to claim 2, characterized in that: The initial plate shape of the special alloy precision foil is a regular bubble-shaped defective plate shape within 2 / 3 of the middle of the foil in the width direction; The straightening roller box of the 23-roll stretching straightening machine is adjusted as follows: adjust the two sets of backing bearings in the middle of the support roller by an adjustment amount of -2 to 2 units, and adjust the one set of backing bearings on the upper edge of the support roller by an adjustment amount of -2 to 2 units.

6. The stretch straightening method according to claim 2, characterized in that: The initial plate shape of the special alloy precision foil is a single-side or double-side edge wave with a wave width exceeding 50 mm; The straightening roller box of the 23-roller stretch straightening machine is adjusted as follows: a set of backing bearings on the support roller corresponding to one side or both sides of the edge are adjusted, and the adjustment amount is -2 to 2 unit values.

7. The stretch straightening method according to any one of claims 1 to 6, characterized in that: The thickness of the special alloy precision foil is ≤0.05 mm; the grade of the special alloy precision foil is 4J29, 4J36, 4J42 or 4J32.

8. The stretch straightening method according to any one of claims 1 to 6, characterized in that: The flatness of the foil after product straightening treatment is ≤0.1mm / m and the verticality is ≤10 mm / m.

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