Large-format rotary laser high-resolution precision laser machining apparatus and method

Abstract

The application discloses a large-format rotating laser high-resolution precision laser processing equipment and method. The precision laser processing equipment comprises a rotating laser processing unit, a motion generating unit, a vibration generating unit and a control unit, the control unit is connected with the rotating laser processing unit, the motion generating unit and the vibration generating unit, and is used at least for regulating and controlling the working states of the rotating laser processing unit, the motion generating unit and the vibration generating unit. The precision laser processing equipment provided in the embodiment of the application can realize the effects of speed improvement, processing precision control and quality guarantee of large-format laser processing, and improves the processing resolution.

Description

Technical Field

[0001] This invention relates in particular to a large-format rotating laser high-resolution precision laser processing equipment and method, belonging to the field of high-efficiency precision laser processing technology. Background Technology

[0002] Currently, in laser processing, the adjustable range and form of the processing spot size after the laser beam generated by the laser is focused by a lens directly affect the control of laser energy density. It is difficult to improve processing efficiency at low power because the laser energy density corresponding to the conventional spot size at low power is limited. If it does not reach the material ablation threshold, the material cannot be processed and removed. At the same time, improving efficiency requires high scanning speed, but high-speed scanning at low power will introduce the problem of insufficient laser energy absorption, affecting the material processing effect. High-power processing with a larger pulse width can achieve a certain high-speed scanning processing, and the laser energy density can reach the material ablation threshold, but at the same time, it will introduce the problem of a larger heat-affected zone.

[0003] Generally, when a laser beam focused by a field lens is used for material removal, it is difficult to control the processing resolution. This is because the laser beam has processing capabilities within a certain spatial range near the beam waist, resulting in low laser processing resolution. Single-point focused laser beam processing also results in low material removal rates or surface treatment efficiency. Therefore, controlling the size of the laser beam spot and the spatial range processed by the beam waist to improve material processing resolution is a key issue and technical requirement for advancing laser precision machining. Consequently, large-area high-speed scanning precision machining places technical demands on the control of spot size coverage and laser beam focusing capability. Summary of the Invention

[0004] The main objective of this invention is to provide a microlens array assembly, a laser processing assembly, and a precision laser processing equipment, which can achieve controllable short focal length focusing, high-precision laser beam generation, and high-speed laser processing applications, thereby achieving the effects of increasing the speed of large-format laser processing, controlling processing accuracy, and ensuring quality, while improving processing resolution, thus overcoming the shortcomings of the prior art.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0006] This invention provides a large-format rotating laser high-resolution precision laser processing device, comprising:

[0007] A rotary laser processing unit, used to provide at least multiple rotating laser spots formed by a laser beam to perform laser processing on a workpiece;

[0008] The motion generating unit is at least used to drive the light spot and the workpiece to move relative to each other along at least one of the x, y, and z axes of a three-dimensional coordinate system;

[0009] The vibration generating unit is at least used to drive the workpiece and the light spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system;

[0010] The control unit is connected to at least the rotary laser processing unit, the motion generating unit, and the vibration generating unit, and is used at least to regulate the working state of the rotary laser processing unit, the motion generating unit, and the vibration generating unit.

[0011] This invention also provides a method for high-resolution precision laser processing using large-format rotating lasers, comprising:

[0012] Provides the aforementioned large-format rotating laser high-resolution precision laser processing equipment;

[0013] The workpiece surface is laser-processed using a rotating laser spot provided by a rotating laser processing unit.

[0014] Compared with the prior art, the advantages of the present invention include:

[0015] 1) The precision laser processing equipment provided in this embodiment of the invention can achieve a processing laser spot with light field control, high resolution with short focusing, and large coverage by arranging multiple spherical or cylindrical microlenses in a single array or composite array in an irregular or regular shaped structural cavity; by using a high-power, light field-controlled large-diameter laser beam for irradiation, and then focusing it with a short focal length by the microlens array assembly, high-resolution processing of the workpiece can be achieved, thereby improving processing quality and processing efficiency;

[0016] 2) The precision laser processing equipment provided in this embodiment of the invention has multiple degrees of freedom in multiple directions, and can realize the processing of workpiece materials under various posture conditions;

[0017] 3) The precision laser processing equipment provided in this embodiment of the invention has multi-degree-of-freedom motion drive, more diverse processing postures, and a wider processing space range;

[0018] 4) The precision laser processing equipment provided in this embodiment of the invention can achieve the effects of increasing the speed of large-format laser processing, controlling processing accuracy, ensuring quality, and improving processing resolution. Attached Figure Description

[0019] Figure 1a , Figure 1b This is a schematic diagram of a spherical microlens array arranged in a quadrilateral array, provided in a typical embodiment of the present invention.

[0020] Figure 1c yes Figure 1aA schematic diagram of the cross-sectional structure formed at point AA along the middle edge;

[0021] Figure 2a , Figure 2b , Figure 2c These are schematic diagrams of a spherical microlens array distributed in a triangular, pentagonal, or octagonal receiving chamber, provided in a typical embodiment of the present invention.

[0022] Figure 3a , Figure 3c This is a schematic diagram of a spherical microlens array distributed in a hexagonal receiving chamber, provided in a typical embodiment of the present invention;

[0023] Figure 3b yes Figure 3a A schematic diagram of the cross-sectional structure formed at point BB in the middle;

[0024] Figure 4a , Figure 4b This is a schematic diagram of a spherical microlens array arranged in an elliptical ring trajectory, provided in a typical embodiment of the present invention.

[0025] Figure 5a This is a schematic diagram of a spherical microlens eccentric array arranged in a circular trajectory, provided in a typical embodiment of the present invention.

[0026] Figure 5b , Figure 5c This is a schematic diagram of a cylindrical microlens eccentric array arranged in a circular trajectory, provided in a typical embodiment of the present invention.

[0027] Figure 6a , Figure 6b This is a schematic diagram of a concentric array of circular microlenses and cylindrical microlenses arranged in a circular trajectory, provided in a typical embodiment of the present invention.

[0028] Figure 7a , Figure 7b This is a schematic diagram of an eccentric array of circular microlenses and cylindrical microlenses arranged in a circular trajectory, provided in a typical embodiment of the present invention.

[0029] Figure 8a , Figure 8c , Figure 8d This is a schematic diagram of a columnar microlens array arranged in a composite pattern of circular and linear trajectories, provided in a typical embodiment of the present invention.

[0030] Figure 8b This is a schematic diagram of a columnar microlens array arranged in a circular trajectory, provided in a typical embodiment of the present invention;

[0031] Figure 8e , Figure 8f This is a schematic diagram of a columnar microlens array arranged in a linear trajectory, provided in a typical embodiment of the present invention.

[0032] Figure 9 This is a schematic diagram illustrating the focusing characteristics of focusing lenses, spherical microlenses, and cylindrical microlenses;

[0033] Figure 10 This is a schematic diagram of the processing head of a rotary laser processing assembly provided in a typical embodiment of the present invention;

[0034] Figure 11 This is a schematic diagram of the structure of a precision laser processing equipment provided in a typical embodiment of the present invention;

[0035] Figure 12 This is a schematic diagram of a process for laser processing of a workpiece using a precision laser processing equipment, provided in a typical embodiment of the present invention. Detailed Implementation

[0036] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate this technical solution, its implementation process, and its principles.

[0037] This invention provides a method for using a spherical or cylindrical microlens array within a structural cavity (i.e., a receiving chamber, hereinafter the same) of irregular or fixed shape. The spherical or cylindrical microlenses can be arranged in any one or a combination of linear arrays, ring arrays, parallel arrays, and cross arrays, and can be concentric or eccentrically distributed. This enables the design of a lens array layout with short focusing, high precision, high speed rotation, and large coverage area, controlled by the optical field, and its application in efficient and high-resolution laser processing, thereby overcoming the shortcomings of the prior art.

[0038] This invention provides a large-format rotating laser high-resolution precision laser processing device, comprising:

[0039] A rotary laser processing unit, used to provide at least multiple rotating laser spots formed by a laser beam to perform laser processing on a workpiece;

[0040] The motion generating unit is at least used to drive the light spot and the workpiece to move relative to each other along at least one of the x, y, and z axes of a three-dimensional coordinate system;

[0041] The vibration generating unit is at least used to drive the workpiece and the light spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system;

[0042] The control unit is connected to at least the rotary laser processing unit, the motion generating unit, and the vibration generating unit, and is used at least to regulate the working state of the rotary laser processing unit, the motion generating unit, and the vibration generating unit.

[0043] In one specific embodiment, the rotary laser processing unit includes a laser source and a beam shaper, a laser beam expander, a laser reflector, a light field modulator, and a microlens array assembly arranged sequentially on the optical path of the laser beam provided by the laser source. The microlens array assembly includes multiple microlenses and is rotatably connected to the light field modulator, and is capable of rotating about its own axis relative to the light field modulator.

[0044] And a first driving mechanism, which is connected to the microlens array assembly and is used to drive the microlens array assembly to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis.

[0045] In one specific embodiment, the rotary laser processing unit further includes a laser water cooling mechanism, which is thermally connected to the laser source.

[0046] In one specific embodiment, the rotary laser processing unit further includes a lens cooling mechanism, which is thermally connected to the microlens array assembly and is used at least to cool the microlens array assembly.

[0047] In one specific embodiment, the motion generating unit includes a second driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the x-axis of the three-dimensional coordinate system.

[0048] In one specific embodiment, the motion generating unit further includes a third driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the y-axis of the three-dimensional coordinate system.

[0049] In one specific embodiment, the motion generating unit further includes a fourth driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

[0050] In one specific embodiment, the motion generating unit is also used to drive the workpiece to rotate about at least one rotation axis.

[0051] In one specific embodiment, the motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the workpiece and is used to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

[0052] In one specific embodiment, the vibration generating unit includes a vibration generating mechanism, which is used to drive the rotary laser processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system.

[0053] This invention also provides a method for high-resolution precision laser processing using large-format rotating lasers, comprising:

[0054] Provides the aforementioned large-format rotating laser high-resolution precision laser processing equipment;

[0055] The workpiece surface is laser-processed using a rotating laser spot provided by a rotating laser processing unit.

[0056] In one specific embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: during the laser processing of the workpiece surface with a rotating laser spot, the rotating laser spot is rotated around its own axis or around a rotation axis.

[0057] In one specific embodiment, the rotary selective surface treatment laser processing method further includes: using a motion generating unit to drive the rotary laser spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

[0058] In one specific embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: driving the workpiece to rotate around the z-axis of the three-dimensional coordinate system using a motion generating unit.

[0059] In one specific embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: using a vibration generating unit to drive the workpiece and the rotating laser spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

[0060] This invention provides a microlens array assembly, including a lens holder, a first light-transmitting lens, a second light-transmitting lens, and multiple microlenses. The multiple microlenses are disposed on the lens holder. The first light-transmitting lens and the second light-transmitting lens are respectively disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. An incident laser beam incident from the first light-transmitting lens is focused by the multiple microlenses to form multiple outgoing beams.

[0061] In one specific embodiment, the lens holder has a receiving hole that extends through the lens holder along its own axial direction. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder and are fixedly connected to the lens holder. The first light-transmitting lens, the second light-transmitting lens and the receiving hole form a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0062] In one specific embodiment, the lens holder has a receiving groove recessed along its own axis, the bottom of the receiving groove is a light-transmitting structure, the first light-transmitting lens and the second light-transmitting lens are arranged opposite to each other on both sides of the lens holder along the axial direction of the lens holder, at least the first light-transmitting lens is fixedly connected to the lens holder, the first light-transmitting lens and the receiving groove enclose a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0063] In another specific embodiment, the lens holder has a receiving groove recessed along its own axis, and the bottom of the receiving groove is provided with a plurality of mounting holes. Each microlens is respectively disposed in a mounting hole. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. At least the first light-transmitting lens is fixedly connected to the lens holder. The first light-transmitting lens and the receiving groove enclose a receiving chamber, and the plurality of microlenses are distributed in the receiving chamber.

[0064] In one specific implementation, a plurality of the microlenses are combined to form at least one microlens group, each microlens group includes at least one microlens, and the at least one microlens contained in each microlens group is arranged along a selected trajectory. The distribution trajectories of any two microlens groups are spaced apart or intersected, wherein the selected trajectory includes a linear trajectory and a circular trajectory.

[0065] In one specific implementation, the lens holder, the first light-transmitting lens, and the second light-transmitting lens are coaxially arranged, and the center of the annular trajectory is located on the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens, or the center of the annular trajectory is located in an area outside the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens.

[0066] In one specific implementation, the first and second light-transmitting lenses are circular light-transmitting lenses, and the annular trajectory is either concentric or eccentric with the center of the first and second light-transmitting lenses.

[0067] In one specific embodiment, the microlens includes a plurality of first microlenses and a plurality of second microlenses, the plurality of first microlenses being combined to form at least one first microlens group, and the plurality of second microlenses being combined to form at least one second microlens group, wherein the first microlenses include spherical microlenses and the second microlenses include cylindrical microlenses.

[0068] In one specific implementation, the axial direction of the cylindrical microlens is parallel to the radial direction of the first and second light-transmitting lenses.

[0069] In one specific embodiment, the lens holder is further provided with a fluid inlet and a fluid outlet. The fluid inlet and fluid outlet of the receiving chamber are connected to the receiving chamber. The fluid inlet can also be connected to the lens cooling mechanism, thereby forming a cooling channel between the fluid inlet, the receiving chamber, and the fluid outlet.

[0070] In one specific implementation, the bottom of the receiving tank is provided with at least one guide channel, the guide channel is connected to the receiving tank, and the guide channel is located on one side of a microlens group or between two microlens groups. Furthermore, the guide channel is also connected to the fluid inlet and the fluid outlet, thereby forming a cooling channel between the fluid inlet, the guide channel, and the fluid outlet.

[0071] In one specific implementation, the shape of the receiving chamber is a regular or irregular shape.

[0072] In one specific embodiment, the shape of the receiving chamber includes any one of polygonal, circular, and elliptical shapes, but is not limited thereto.

[0073] In one specific embodiment, the microlens array assembly further includes a torsion connector and a lens holder. The torsion connector is rotatably connected to the lens holder, and the lens holder is rotatable about its own axis together with the movable part in the torsion connector. The lens holder is fixedly mounted on the lens holder and is rotatable together with the lens holder.

[0074] This invention also provides a rotary laser processing assembly, including a laser source and a beam shaper, a laser beam expander, a laser reflector, a light field modulator, and the aforementioned microlens array assembly, which are sequentially arranged in the optical path of the laser beam provided by the laser source. The lens holder of the microlens array assembly is rotatably connected to the light field modulator and is capable of rotating about its own axis relative to the light field modulator.

[0075] And a first driving mechanism, which is connected to the lens holder of the microlens array assembly and is used to drive the lens holder to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis.

[0076] In one specific embodiment, the lens holder is connected to the light field modulator via a torsion connecting frame. The fixed part of the torsion connecting frame is fixedly connected to the light field modulator, and the movable part is fixedly connected to the lens holder. The fixed part and the movable part of the torsion connecting frame are rotatably engaged.

[0077] In one specific implementation, a beam channel is also provided between the optical field modulator and the lens holder, allowing the laser beam to pass through.

[0078] In one specific embodiment, the rotary laser processing assembly further includes a lens cooling mechanism connected to a fluid inlet on the lens holder and used at least to provide a cooling medium, including air or cooling water, into the cooling chamber.

[0079] The following will further explain the technical solution, its implementation process and principle in conjunction with the accompanying drawings and specific implementation examples. Unless otherwise specified, the optical components such as beam shapers, laser beam expanders, laser reflectors, light field modulators, and microlenses used in the embodiments of the present invention, as well as the drive motor, drive cylinder, vibration generating mechanism, control computer, CNC program and software, can all be those known to those skilled in the art and can all be obtained commercially. Different models and sizes of the above components will not affect the implementation of the technical solution of the present invention and the corresponding results obtained. Those skilled in the art can select different models or sizes of components according to specific needs. Here, the model of each functional component is not specifically limited.

[0080] Example 1

[0081] A microlens array assembly includes a lens holder, a first light-transmitting lens, a second light-transmitting lens, and a plurality of microlenses. The plurality of microlenses are disposed on the lens holder. The first light-transmitting lens and the second light-transmitting lens are respectively disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder. An incident laser beam incident from the first light-transmitting lens is focused by the plurality of microlenses to form a plurality of outgoing beams or a plurality of light spots.

[0082] In this embodiment, the lens holder has a receiving hole that extends through the lens holder along its own axial direction. The first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder and are fixedly connected to the lens holder. The first light-transmitting lens, the second light-transmitting lens and the receiving hole enclose a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0083] Alternatively, the lens holder has a receiving groove recessed along its own axis, the bottom of the receiving groove is a light-transmitting structure, the first light-transmitting lens and the second light-transmitting lens are arranged opposite to each other on both sides of the lens holder along the axial direction of the lens holder, at least the first light-transmitting lens is fixedly connected to the lens holder, the first light-transmitting lens and the receiving groove enclose a receiving chamber, and a plurality of microlenses are distributed in the receiving chamber.

[0084] Alternatively, the lens holder has a receiving groove recessed along its own axis, the bottom of the receiving groove is provided with a plurality of mounting holes, each of the microlenses is respectively disposed in a mounting hole, the first light-transmitting lens and the second light-transmitting lens are disposed opposite to each other on both sides of the lens holder along the axial direction of the lens holder, at least the first light-transmitting lens is fixedly connected to the lens holder, the first light-transmitting lens and the receiving groove enclose a receiving chamber, and the plurality of microlenses are distributed in the receiving chamber.

[0085] It should be noted that the first and second light-transmitting lenses can be referred to as the upper cover (support) light-transmitting lens and the lower support light-transmitting lens, respectively, and multiple microlenses are located between the first and second light-transmitting lenses.

[0086] In this embodiment, multiple microlenses are combined to form at least one microlens group. Each microlens group includes at least one microlens, and the at least one microlens in each microlens group is arranged along a selected trajectory. The distribution trajectories of any two microlens groups are spaced apart or intersected. The selected trajectory includes a straight trajectory and a circular trajectory.

[0087] In this embodiment, the lens holder, the first light-transmitting lens, and the second light-transmitting lens are coaxially arranged. The center of the annular trajectory is located on the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens, or the center of the annular trajectory is located in an area outside the axis of the lens holder, the first light-transmitting lens, and the second light-transmitting lens.

[0088] In this embodiment, the first and second light-transmitting lenses are circular light-transmitting lenses, and the annular trajectory is either concentric or eccentric with the center of the first and second light-transmitting lenses.

[0089] In this embodiment, the microlens includes a plurality of first microlenses and a plurality of second microlenses. The plurality of first microlenses are combined to form at least one first microlens group, and the plurality of second microlenses are combined to form at least one second microlens group. The first microlenses include spherical microlenses (i.e., spherical lenses), and the second microlenses include cylindrical microlenses (i.e., cylindrical lenses).

[0090] In this embodiment, the axial direction of the cylindrical microlens is parallel to the radial direction of the first and second light-transmitting lenses.

[0091] In this embodiment, the lens holder is also provided with a fluid inlet and a fluid outlet. The fluid inlet and fluid outlet of the receiving chamber are connected to the receiving chamber. The fluid inlet can also be connected to the lens cooling mechanism, thereby forming a cooling channel between the fluid inlet, the receiving chamber, and the fluid outlet.

[0092] In this embodiment, the bottom of the receiving tank is provided with at least one guide channel, the guide channel is connected to the receiving tank, and the guide channel is located on one side of a microlens group or between two microlens groups. Furthermore, the guide channel is also connected to the fluid inlet and the fluid outlet, thereby forming a cooling channel between the fluid inlet, the guide channel, and the fluid outlet.

[0093] In this embodiment, the shape of the receiving chamber is a regular or irregular shape. For example, the shape of the receiving chamber includes any one of polygons, circles, and ellipses, but is not limited to these.

[0094] In this embodiment, the microlens array assembly further includes a torsion connector and a lens holder. The torsion connector is rotatably connected to the lens holder, and the lens holder can rotate around its own axis together with the movable part in the torsion connector. The lens fixing bracket is fixedly mounted on the lens holder and can rotate together with the lens holder.

[0095] In this embodiment, a gap may be provided between the multiple microlenses to avoid the spherical microlenses and / or cylindrical microlenses being squeezed and damaged during acceleration and deceleration during vibration. The specific size of the gap can be adjusted according to specific needs and is not specifically limited here.

[0096] It should be noted that the microlenses can be arranged in various ways and do not necessarily fill all the "micro-concave feature positions" (i.e., mounting holes) within the lens holder. Multiple microlenses can be selectively arranged and set. The shape of the receiving chamber can be square, rectangular, elliptical, or a personalized contouring / forming processing chamber that matches the workpiece. The receiving chamber can be a curved surface. Furthermore, the arrangement of multiple microlenses is not limited to a regular row arrangement. Various typical arrangements and settings can be achieved according to a certain eccentric principle. It can be combined with the composite motion of multiple processing heads and worktables to control the energy interaction law and mechanism between the focused spot and the workpiece, thereby achieving different processing characteristics.

[0097] An embodiment of the present invention provides a structure for a spherical microlens array arranged in a quadrilateral array, as shown below. Figure 1a , Figure 1b , Figure 1c As shown; a structure of a spherical microlens array distributed in triangular, pentagonal, and octagonal receiving chambers is as follows. Figure 2a , Figure 2b , Figure 2c As shown; a structure of a spherical microlens array distributed in a hexagonal receiving chamber is as follows. Figure 3a , Figure 3b , Figure 3c As shown, a structure of a spherical microlens array arranged in an elliptical ring trajectory is as follows: Figure 4a , Figure 4b As shown in the figure, the embodiment of the present invention provides a structure of an eccentric array of spherical microlenses arranged in a circular trajectory, as follows: Figure 5a As shown; a structure of an eccentric array of cylindrical microlenses arranged in a circular trajectory is as follows. Figure 5b , Figure 5c As shown; a concentric array of circular and cylindrical microlenses arranged in a ring-shaped trajectory is described. Figure 6a , Figure 6b As shown; a structure of an eccentric array of circular and cylindrical microlenses arranged in a circular orbit is described. Figure 7a , Figure 7b As shown; a typical embodiment of the present invention provides a structure for a cylindrical microlens array arranged in a combination of circular and linear trajectories, as shown in the figure. Figure 8a , Figure 8c , Figure 8d As shown, Figure 8b This is a schematic diagram of a cylindrical microlens array arranged in a circular trajectory, provided in a typical embodiment of the present invention; the structure of a cylindrical microlens array arranged in a linear trajectory is as follows. Figure 8e , Figure 8f As shown.

[0098] Please see Figure 9 , Figure 9This is a schematic diagram of the focusing characteristics of a focusing lens, a spherical microlens, and a cylindrical microlens. It can be seen that by distributing the spherical and cylindrical microlenses in a selected array form according to the embodiments of the present invention, short focal length focusing of the microlens array assembly can be achieved, the beam waist size of the emitted beam can be controlled within a small range, thereby achieving high-resolution processing and improving processing quality.

[0099] Example 2

[0100] Please see Figure 10 and Figure 11 A rotary laser processing assembly includes a laser source 2 and a beam shaper 3, a laser beam expander 4, a laser reflector 5, a light field modulator, a beam channel 12, and the aforementioned microlens array assembly, which are sequentially arranged on the optical path of the laser beam provided by the laser source 2; and a first driving mechanism 11, which is transversely connected to the lens holder 14 and / or the lens fixing frame, and is used to drive the microlens array assembly to rotate around its own axis so that the light spot formed by the laser beam can rotate around its own axis.

[0101] It should be noted that the microlens array assembly 13 can be fixed on the lens holder 14.

[0102] In one embodiment, the beam channel 12 passes through the middle of the first driving mechanism 11, and the microlens array assembly is disposed at one end of the beam channel 12 and is connected to the first driving mechanism 11 in a transmission manner. The beam channel 12 can be rotatably engaged with the first driving mechanism 11 via a bearing.

[0103] In this embodiment, the laser source 2 can be a fiber laser, etc., and the optical field modulator can modulate the laser beam. The beam modulation generates modulated laser (such as a line laser). The modulated laser includes, but is not limited to, line spots, and can include various shaped spots that are focused by a microlens array component and then scanned. The laser beam provided by the laser source 2 can be a high-power, large-diameter beam, which can be a continuous laser or a high-power pulsed laser.

[0104] In this embodiment, the first driving mechanism 11 is a rotary driving mechanism, such as a rotary driving motor or a rotary driving cylinder.

[0105] In this embodiment, the rotary laser processing assembly further includes a laser water cooling mechanism 10, which is thermally connected to the laser source 2 and is used at least to cool the laser source 2. It should be noted that the laser water cooling mechanism 10 can be any type of water cooling equipment, and its specific structure and working principle are not limited or described here. Of course, the lens holder can also be cooled by a cooling mechanism. For example, the heat of the lens can be reduced by dry cooling (air cooling / gas cooling, etc.) and wet cooling to achieve effective cooling.

[0106] In this embodiment, the rotary laser processing assembly further includes a laser controller 1, which is electrically connected to the laser source 2 and is used at least to adjust the working state and working parameters of the laser source 2. The laser controller 1 may be a commercially available laser control computer, and its specific product model is not limited here.

[0107] The laser beam emitted from the laser source undergoes optical field shaping, and then optical elements are used to modulate the optical field of irregular or fixed-shape structures. The input laser beam can then be controlled into a spot with an adjustable projection shape / area. Furthermore, through spherical or cylindrical microlenses, multiple microlenses are used to achieve short focal length focusing, controlling the beam waist size of the output laser beam within a small range, thereby achieving high-resolution processing.

[0108] This embodiment of a rotary laser processing component can apply a certain angular velocity to the lens holder that houses spherical or cylindrical microlenses. The application of rotational freedom enables dynamic rotational laser processing with a large coverage area. At the same time, by combining parameters such as the gap, rotation speed, and motion trajectory of the microlenses, the laser energy density on the surface of the workpiece material can be controlled, thereby improving the processing effect.

[0109] Example 3

[0110] Please see Figure 11 A precision laser processing device includes a rotary laser processing unit, a motion generating unit, a vibration generating unit, and a control unit. The control unit is connected to the rotary laser processing unit, the motion generating unit, and the vibration generating unit, and is at least used to regulate the working state of the rotary laser processing unit, the motion generating unit, and the vibration generating unit.

[0111] In this embodiment, the rotary laser processing unit includes the rotary laser processing component and is at least used to provide a spot formed by a laser beam to perform laser processing on the workpiece; the motion generating unit is at least used to drive the spot and the workpiece to move relative to each other along at least one of the x, y, and z axes of a three-dimensional coordinate system; the vibration generating unit is at least used to drive the workpiece and the spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system.

[0112] In this embodiment, the structure of the rotary laser processing unit can be referred to the description in Embodiment 2.

[0113] In this embodiment, the motion generating unit includes a second driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7, and is used to drive the rotary laser processing unit or the workpiece 7 to move along the x-axis of the three-dimensional coordinate system.

[0114] As a preferred option, please refer to [the relevant documentation / reference]. Figure 11 The second driving mechanism is in transmission cooperation with the rotary laser processing unit. Specifically, the motion generating unit includes a first motion platform 6, the rotary laser processing unit is mounted on the first motion platform 6 and is movably cooperated with the first motion platform 6, the rotary laser processing unit is connected to the second driving mechanism and can move along the x-axis of the three-dimensional coordinate system on the first motion platform 6 under the drive of the second driving mechanism, thereby realizing the movement of the rotary laser processing unit on the x-axis. For example, the rotary laser processing unit as a whole can achieve movable cooperation with the first motion platform through guide rails, etc. Specifically, the second driving mechanism can be fixedly mounted on the first motion platform 6, the first motion platform 6 is provided with guide rails extending along the x-axis, and the rotary laser processing unit is fixedly connected to the slider on the guide rail, thereby realizing the movable cooperation between the rotary laser processing unit and the first motion platform 6. The second driving mechanism is a linear driving mechanism, for example, it can be a linear drive motor or a linear drive cylinder.

[0115] In an embodiment, the motion generating unit further includes a third driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7 and is used to drive the rotary laser processing unit or the workpiece 7 to move along the y-axis of the three-dimensional coordinate system.

[0116] As a preferred option, please refer to [the relevant documentation / reference]. Figure 11The third driving mechanism is in transmission cooperation with the workpiece 7. Specifically, the motion generating unit includes a second motion platform that can move along the y-axis. The workpiece 7 is fixedly mounted on the second motion platform. The second motion platform is transmissionally connected to the third driving mechanism and can move along the y-axis of the three-dimensional coordinate system under the drive of the third driving mechanism, thereby realizing the movement of the workpiece 7 along the y-axis.

[0117] Alternatively, the second motion platform can be fixed, and the workpiece 7 can be movably mounted on the second motion platform. The third drive mechanism is in transmission cooperation with the workpiece 7 and is used to drive the workpiece 7 to move along the y-axis on the second motion platform. For example, the third drive mechanism can be fixedly mounted on the second motion platform, and the second motion platform is provided with a guide rail extending along the y-axis. The workpiece 7 is fixedly connected to a slider on the guide rail, thereby realizing the movable cooperation between the workpiece 7 and the second motion platform. The third drive mechanism is a linear drive mechanism, such as a linear drive motor or a linear drive cylinder.

[0118] In this embodiment, the motion generating unit further includes a fourth driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 7, and is used to drive the rotary laser processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

[0119] As a preferred option, please refer to [the relevant documentation / reference]. Figure 11 The fourth driving mechanism is in transmission cooperation with the rotary laser processing unit. Specifically, the motion generating unit includes a third motion platform, which is movable. The rotary laser processing unit is disposed on the third motion platform, and the third motion platform is connected to the fourth driving mechanism. Under the drive of the fourth driving mechanism, the third motion platform can move along the z-axis of the three-dimensional coordinate system, thereby realizing the movement of the rotary laser processing unit along the z-axis. Alternatively, the third motion platform is fixed, and the rotary laser processing unit is movably disposed on the third motion platform. The fourth driving mechanism is in transmission cooperation with the rotary laser processing unit and is used to drive the rotary laser processing unit to move along the z-axis on the third motion platform. For example, the third motion platform may be provided with a guide rail extending along the z-axis, and the rotary laser processing unit is disposed on the guide rail and can move along the z-axis.

[0120] As a more preferred embodiment, the first motion platform 6 can be mounted on the third motion platform, and the rotary laser processing unit is mounted on the first motion platform 6. The first motion platform is fixed relative to the third motion platform in the x-axis direction, but movable in the z-axis direction. The rotary laser processing unit is movable in the x-axis direction with the first motion platform. The second drive mechanism is fixedly mounted on the first motion platform and drives the rotary laser processing unit. The fourth drive mechanism is fixedly mounted on the third motion platform and drives the first motion platform. The first motion platform 6, the rotary laser processing unit, and the second drive mechanism as a whole can move along the z-axis under the drive of the fourth drive mechanism.

[0121] Alternatively, the first motion platform 6 is fixedly mounted on the third motion platform, the rotary laser processing unit is mounted on the first motion platform 6, the second drive mechanism is fixedly mounted on the first motion platform or the third motion platform and is in transmission cooperation with the rotary laser processing unit; the fourth drive mechanism is in transmission connection with the third motion platform, and the first motion platform 6, the third motion platform, the rotary laser processing unit, and the second drive mechanism as a whole can move along the z-axis under the drive of the fourth drive mechanism.

[0122] In this embodiment, the fourth driving mechanism is a linear driving mechanism, such as a linear drive motor or a linear drive cylinder.

[0123] In this embodiment, the motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the workpiece 7 and is used to drive the workpiece 7 to rotate around the z-axis of the three-dimensional coordinate system. The fifth driving mechanism is a rotary driving mechanism, such as a rotary driving motor or a rotary driving cylinder.

[0124] In this embodiment, the motion generating unit further includes a motion system control computer 9, which is connected to the second drive mechanism and / or the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism, and is used to control / adjust the working state of the second drive mechanism and / or the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism. The motion system control computer may be independently set up and connected to the control unit, or it may be part of the control unit.

[0125] In this embodiment, the vibration generating unit includes a vibration generating mechanism, which drives the rotary laser processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system. The introduction of vibration can change the periodicity of the interaction mechanism between the workpiece and the laser, and realize diversified control of energy distribution (dynamic spot overlap rate, energy uniformity). For example, the vibration generating mechanism includes a vibration platform 8, which can be fixedly set on a second motion platform. The workpiece 7 is placed on the vibration platform, and the vibration platform 8 can move along the y-axis together with the workpiece 7. For example, the vibration platform can be an electric vibration table, an ultrasonic vibration table, etc., which can realize conventional, ultrasonic or ultra-high frequency vibration.

[0126] In this embodiment, a method for processing a workpiece using a precision laser processing device is described. (See also: [link to relevant documentation]). Figure 12 As shown, it can specifically include:

[0127] Provides the aforementioned large-format rotating laser high-resolution precision laser processing equipment;

[0128] The workpiece surface is laser-processed using a rotating laser spot provided by a rotating laser processing unit.

[0129] In this embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: during the laser processing of the workpiece surface with a rotating laser spot, the rotating laser spot is rotated around its own axis or around a rotation axis.

[0130] In this embodiment, the rotary selective surface treatment laser processing method further includes: using a motion generating unit to drive the rotary laser spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

[0131] In this embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: driving the workpiece to rotate around the z-axis of the three-dimensional coordinate system using a motion generating unit.

[0132] In this embodiment, the large-format rotating laser high-resolution precision laser processing method further includes: using a vibration generating unit to drive the workpiece and the rotating laser spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

[0133] The present invention provides a precision laser processing equipment that, by arranging multiple spherical or cylindrical microlenses in a single or composite array within an irregularly shaped or regular-shaped cavity, can achieve a processing laser spot with optical field modulation, high resolution with short focusing, and large-area coverage with high speed rotation. By using a high-power, optical field-modulated large-diameter laser beam for irradiation, and then focusing it with a short focal length by the microlens array assembly, high-resolution processing of the workpiece can be achieved, thereby improving processing quality and efficiency.

[0134] This invention provides a precision laser processing device that can apply linear motion degrees of freedom along the x, y, and z axes to a turntable / cavity with microlenses mounted, while simultaneously applying rotational motion around two or three rotation axes; alternatively, it can apply rotational motion around the rotation axes only to the turntable / cavity with microlenses mounted, and apply linear motion along the x, y, and z axes to the worktable below the cavity, while simultaneously applying rotational motion around two or three rotation axes of the worktable; by applying three linear motion degrees of freedom and two / three rotational degrees of freedom, the spatial relationship between the processing head of the rotary laser processing unit and the workpiece surface material can be effectively controlled, enabling workpiece material processing applications under various posture conditions.

[0135] The present invention provides a precision laser processing equipment that can be equipped with a vibration table on the worktable, which can realize unidirectional or composite vibration in the xy plane, realize unidirectional multi-frequency vibration or realize cycloidal motion in the laser beam processing process in the plane.

[0136] This invention provides a precision laser processing device in which a workpiece to be processed is placed on a worktable or on a vibration table attached to the worktable. The workpiece is located at a certain distance below a processing head designed with a certain shape and dot matrix arrangement. By adjusting the relative position between the focal point of the microlens array assembly and the workpiece, laser processing applications under various working conditions such as focusing, positive defocusing, and negative defocusing can be realized through the adjustment of the distance.

[0137] The present invention provides a precision laser processing equipment with advantages such as multi-degree-of-freedom motion drive, diverse processing postures, and a wide processing space. The workpiece being processed can be a planar workpiece, a free-form surface workpiece, or an analytical three-dimensional surface workpiece that can be described by analytical formulas.

[0138] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A large-format rotating laser high-resolution precision laser processing device, characterized in that... include: A rotary laser processing unit is used to provide multiple rotating laser spots formed by a laser beam to perform laser processing on a workpiece. The rotary laser processing unit includes a laser source and a beam shaper, a laser beam expander, a laser reflector, an optical field modulator, and a microlens array assembly arranged sequentially on the optical path of the laser beam provided by the laser source. The microlens array assembly includes multiple microlenses and is rotatably connected to the optical field modulator, and is capable of rotating about its own axis relative to the optical field modulator. And a first driving mechanism, which is connected to the microlens array assembly and is used to drive the microlens array assembly to rotate around its own axis so that the multiple light spots formed by the laser beam can rotate around their own axis. The motion generating unit is at least used to drive the light spot and the workpiece to move relative to each other along at least one of the x, y, and z axes of a three-dimensional coordinate system; The vibration generating unit is at least used to drive the workpiece and the light spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system; The control unit is connected to at least the rotary laser processing unit, the motion generating unit, and the vibration generating unit, and is used at least to regulate the working state of the rotary laser processing unit, the motion generating unit, and the vibration generating unit.

2. The large-format rotating high-resolution precision laser processing equipment according to claim 1, characterized in that: The rotary laser processing unit also includes a laser water cooling mechanism, which is thermally connected to the laser source.

3. The large-format rotating high-resolution precision laser processing equipment according to claim 1, characterized in that: The rotary laser processing unit further includes a lens cooling mechanism, which is thermally connected to the microlens array assembly and is used at least to cool the microlens array assembly.

4. The large-format rotating high-resolution precision laser processing equipment according to claim 1, characterized in that: The motion generating unit includes a second driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the x-axis of the three-dimensional coordinate system.

5. The large-format rotating high-resolution precision laser processing equipment according to claim 1 or 4, characterized in that: The motion generating unit further includes a third driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the y-axis of the three-dimensional coordinate system.

6. The large-format rotating high-resolution precision laser processing equipment according to claim 1 or 4, characterized in that: The motion generating unit further includes a fourth driving mechanism, which cooperates with the rotary laser processing unit or the workpiece transmission and is used to drive the rotary laser processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

7. The large-format rotating high-resolution precision laser processing equipment according to claim 1 or 4, characterized in that: The motion generating unit is also used to drive the workpiece to rotate about at least one rotation axis.

8. The large-format rotating high-resolution precision laser processing equipment according to claim 7, characterized in that: The motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the workpiece and is used to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

9. The large-format rotating high-resolution precision laser processing equipment according to claim 1, characterized in that: The vibration generating unit includes a vibration generating mechanism, which is used to drive the rotary laser processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system.

10. A large-format rotating laser high-resolution precision laser processing method, characterized in that... include: Provides a large-format rotating high-resolution precision laser processing device according to any one of claims 1-9; Laser processing is performed on the processing surface of a workpiece using a rotating laser spot provided by a rotating laser processing unit, and during the laser processing of the processing surface of the workpiece using a rotating laser spot, the rotating laser spot is rotated about its own axis or about a rotation axis.

11. The large-format rotating laser high-resolution precision laser processing method according to claim 10, characterized in that, The rotary selective surface treatment laser processing method further includes: using a motion generating unit to drive the rotary laser spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

12. The large-format rotating high-resolution precision laser processing method according to claim 10 or 11, characterized in that, The large-format rotating laser high-resolution precision laser processing method further includes: using a motion generating unit to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

13. The large-format rotating laser high-resolution precision laser processing method according to claim 12, characterized in that, The large-format rotating laser high-resolution precision laser processing method further includes: using a vibration generating unit to drive the workpiece and the rotating laser spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

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