Planar drive system, method for operating a planar drive system, and stator for driving a mover

Abstract

The present invention relates to a planar drive system (1). The planar drive system (1) has a stator (5) and a mover (200). The stator (5) has a plurality of stator conductors (125). The mover (200) has a magnet arrangement with at least one mover magnet. The stator (5) is configured to energize the stator conductors (125). A magnetic interaction can be induced between the energized stator conductors (125) of the stator (5) and the magnet arrangement of the mover (200) to drive the mover (200). The stator (5) is configured to energize the stator conductors (125) by current regulation based on pulse width modulation. Due to the current regulation, a ripple current can be generated in the energized stator conductors (125) of the stator (5) and thus an alternating magnetic field can be generated. The mover (200) has at least one mover coil in which an alternating voltage can be induced due to the alternating magnetic field. The present invention also relates to a method for operating the planar drive system (1) and a stator (5) for use in the planar drive system (1) for driving the mover (200).

Description

Field of the Invention

[0001] The present invention relates to a planar drive system. The present invention also relates to a method for operating a planar drive system, and a stator for a planar drive system for driving a mover.

[0002] This patent application claims the priority of European patent application EP20164167.7, the disclosure of which is incorporated herein by reference. Background Art

[0003] Planar drive systems can be applied in different fields. Possible examples are automation technology, especially production technology, handling technology and process technology. With the aid of a planar drive system, a movable element, which can be part of a facility or a machine, for example, can be moved or positioned in at least two linearly independent directions. A planar drive system can include a permanent magnet-excited electromagnetic planar motor having a planar stator and at least one mover, which can move in at least two directions over the stator.

[0004] The stator of a planar drive system can have a plurality of energizable stator conductors. The mover can have a magnet arrangement with a plurality of permanent magnets. The mover can be driven by energizing the stator conductors of the stator. In this way, a magnetic interaction can be induced between the energized stator conductors and the magnet arrangement of the mover, whereby the mover can remain floating above the stator and can move above the stator.

[0005] EP1842101B1 describes a planar motor having a stator and a movable mover. The mover has a plurality of electronic devices and pick-up coils for absorbing energy, so that the electronic devices can be supplied with energy. Summary of the Invention

[0006] The object of the present invention is to provide an improved planar drive system which is suitable for wirelessly transmitting energy from the stator to the mover. Another object of the present invention is to provide a corresponding method for operating a planar drive system and a stator for a planar drive system for driving a mover.

[0007] This object is solved by the features of the independent claims. Other advantageous embodiments of the present invention are specified in the dependent claims.

[0008] According to one aspect of the present invention, a planar drive system is provided. The planar drive system has a stator and a mover. The stator has a plurality of stator conductors. The mover has a magnet device with at least one mover magnet. The stator is configured to energize the stator conductors. A magnetic interaction can be induced between the energized stator conductors of the stator and the magnet device of the mover to drive the mover. The stator is configured to energize the stator conductors by current regulation based on pulse width modulation. Due to the current regulation based on pulse width modulation, a ripple current can be generated in the energized stator conductors of the stator and thus an alternating magnetic field can be generated. The mover has at least one mover coil, in which an alternating voltage can be induced due to the alternating magnetic field.

[0009] The proposed planar drive system is suitable for reliably transmitting energy from the stator to the mover wirelessly or inductively. In this case, the energized stator conductors of the stator serve as the primary winding or primary coil, and at least one mover coil of the mover serves as the secondary winding or secondary coil. In order to induce a voltage in the mover coil of the mover, a time-varying magnetic field needs to be generated in the region of the mover coil. The time-varying current in the electrically controlled stator conductors of the stator can ensure the transmission of such a time-varying magnetic flux in the region of the mover coil.

[0010] In this context, in the planar drive system, current regulation based on pulse width modulation (PWM) is used to energize the stator conductors of the stator that serve as the primary winding. In this case, a voltage controlled by a clock and generated by means of pulse width modulation is applied to the stator conductors to be energized, and thus a periodic voltage pulse subjected to pulse width modulation is applied, or in other words, a periodic voltage pulse predefined by the PWM clock frequency or by the time grid of the pulse width modulation is applied. A side effect of this type of current regulation is that an alternating current component, namely the so-called ripple current, is superimposed on the current generated in the energized stator conductors. This is due to the smoothing effect of the stator conductors serving as the primary coil, whereby the current flowing in the electrically controlled stator conductors follows the voltage subjected to pulse width modulation, resulting in a sawtooth or triangular current curve. In this case, the current can oscillate back and forth around the average value.

[0011] The occurrence of the ripple current is related to the time-varying magnetic field. In this way, an alternating voltage can be induced in at least one mover coil of the mover, and thus electrical energy can be transmitted from the stator to the mover. The induced alternating voltage can be substantially proportional to the change in the magnetic flux through the mover coil over time.

[0012] Thus, in the case of a planar drive system, no additional primary coil is used on the stator to inductively transfer electrical energy from the stator to the mover. Instead, the energy transfer is based on the parasitic utilization of the ripple current induced by the energization controlled by a pulse-width modulated clock, and thus on the alternating magnetic field generated by the ripple current in the mover region.

[0013] Further possible details and embodiments that can be considered for the planar drive system are described in more detail below.

[0014] The PWM clock frequency can be in the kHz range and can be, for example, 64 kHz.

[0015] At least one mover magnet of the magnet arrangement of the mover can be a permanent magnet.

[0016] Regarding at least one mover coil of the mover, different designs can be envisioned. For example, the mover can have at least one printed circuit board (PCB). The at least one printed circuit board can be implemented as multilayer. At least one mover coil of the mover can be realized in the form of one or more spiral-shaped metallic printed conductors of at least one printed circuit board.

[0017] For example, the mover can include a single printed circuit board having one or more spiral-shaped printed conductors that can form one or more mover coils. Additionally, the mover can have a plurality of separate printed circuit boards, each printed circuit board having one or more spiral-shaped printed conductors, and each printed conductor can form one or more mover coils. The plurality of spiral-shaped printed conductors or mover coils can be electrically connected to each other or electrically connected in series.

[0018] The magnet arrangement of the mover can have a plurality of mover magnets. These mover magnets can be arranged such that the mover magnets surround a region. Additionally, the magnet arrangement can, for example, have a rectangular or square profile.

[0019] In another embodiment that can be applied in this context, at least one mover coil of the mover is arranged in a region surrounded by the mover magnet of the magnet device. In this embodiment, a multilayer printed circuit board can be used, which has a plurality of layers arranged one above the other and a plurality of spiral printed conductors arranged one above the other. In this design, the printed circuit board can be integrated into the mover relatively simply. In this case, the mover can have an exposed recess in its center, and the printed circuit board can be arranged within this exposed recess. The printed circuit board can also include a relatively large number of layers and spiral printed conductors arranged one above the other, which enables energy to be effectively transferred from the stator to the mover. This can also be facilitated by a large number of windings of the spiral printed conductors. The number of layers and the number of spiral printed conductors can be, for example, six or eight. The printed circuit board used can have a thickness of, for example, 1 mm.

[0020] In another embodiment, the mover has a plurality of mover coils, and the plurality of mover coils are arranged in a region below the magnet device of the mover. During the operation of the planar drive system, these mover coils can be located between the stator and the magnet device of the mover. In this embodiment, a multilayer printed circuit board having a plurality of layers and a plurality of spiral printed conductors arranged one above the other can also be used. Within the region of each layer, there can also be a plurality of spiral printed conductors arranged side by side. The printed circuit board can be arranged on the lower side of the mover. The printed circuit board can also extend over the entire surface or substantially the entire surface of the mover. In this way, a relatively large coil area can be provided, which promotes the effective transfer of energy from the stator to the mover. In addition, this embodiment is compatible with a mover design that does not have an exposed recess in the center of the mover. Since in this embodiment the floating height of the mover can be reduced by the thickness of the printed circuit board, a relatively flat circuit board with fewer layers compared to the above embodiment can be considered. For example, two layers are possible. In addition, the printed circuit board used can have a thickness of, for example, 0.3 mm.

[0021] In another embodiment, the mover has a plurality of mover coils, and the plurality of mover coils are arranged in the lateral outer region of the mover. This embodiment is also compatible with a mover design that does not have an exposed recess in the center of the mover. In this embodiment, a plurality of multilayer printed circuit boards having a plurality of layers and a plurality of spiral printed conductors arranged one above the other can be used. These printed circuit boards can include a relatively large number of layers and spiral printed conductors arranged one above the other, and the number can be, for example, six or eight. The printed circuit board used can also have a thickness of, for example, 1 mm. In addition, the printed circuit board can be integrated into a spacer of the mover, and the spacer can be present in the lateral outer region of the mover.

[0022] Wound metal wires can also be used as mover coils. In this context, the following designs can be considered.

[0023] In another embodiment, at least one mover coil of the mover is configured in the form of a winding wire and surrounds the magnet device of the mover. In this design, energy can be efficiently inductively transferred from the stator to the mover, and thus a relatively large amount of electric power can be transferred. This embodiment is also compatible with a mover design in which there is no recess exposed at the center of the mover. The mover coil implemented as a winding wire can be arranged in the lateral outer region of the mover. In addition, the mover coil can be integrated in the circumferential spacer or circumferential spacer structure of the mover. In addition, the mover coil can have a plurality of circumferential wire windings.

[0024] As described above, a mover design in which there is no recess exposed at the center of the mover enables a relatively small mover structural shape with a small lateral dimension to be achieved.

[0025] In another embodiment, the mover has a rectifier for converting the induced alternating voltage into a direct current voltage. The direct current voltage can be supplied to at least one additional device. The additional device that can be a component of the mover and / or can be arranged on the mover can be, for example, an electronic device. The rectifier can be, for example, a bridge rectifier or a synchronous rectifier. In addition, the rectifier can be implemented as a voltage amplifier or a voltage multiplier.

[0026] As described above, the stator conductors of the stator are energized to drive the mover. The driving of the mover is based on the magnetic interaction between the energized stator conductors of the stator and the magnet device of the mover. In this case, the mover can remain floating above the stator and can additionally also move above the stator. As will be explained in more detail below, the stator conductors of the stator can be interconnected into a multi-coil or multi-phase system that can be energized independently of each other. To drive the mover, the stator conductors or a part of the multi-phase system can be energized simultaneously according to the position of the mover. The driving of the mover can be based on the average value of the current flowing in the energized stator conductors. In contrast, the ripple current caused by the pulse-width modulated energization may have no effect or only a very small and thus negligible effect on the driving of the mover.

[0027] The ripple current generated in the energized stator conductors or the multi-phase system of the stator can be relatively large, that is, it has a relatively large oscillation width (Peak-to-Peak Amplitude). For example, an oscillation width in the range of single-digit amperes is possible, for example, in the range up to 4 A. In a corresponding manner, the alternating magnetic field generated due to the ripple current can have a relatively large oscillation width, which enables energy to be efficiently inductively transferred from the stator to the mover. The presence of a relatively large ripple current may be due to the low inductance of the stator conductors of the stator that are used as primary coils. The magnitude of the ripple current can depend on the average value of the current flowing in the energized stator conductors.

[0028] The current regulation performed in a planar drive system can be referred to as direct current regulation or DC (Direct Current) current regulation. During the operation of the planar drive system, although different rated current values can be pre-given within the range of current regulation for the stator conductors of the stator or a polyphase system, such that different currents can also flow evenly through the stator conductors. However, compared with the superimposed ripple current, this current variation may be significantly slower or involve a significantly longer time period. In this regard, despite the different average currents, the term "DC current regulation" can still be used.

[0029] According to an embodiment, in order to perform current regulation, the planar drive system has a plurality of current regulators, a PWM signal generation device, an output stage device connected to the stator conductors or a polyphase system, and a current measurement device. The output stage device can include a plurality of output stages. Such components can be part of the stator. For example, the current measurement device, which can respectively include an analog-to-digital converter (ADC), can be configured to detect the actual current value of the stator conductors or a polyphase system. The actual current value can be transmitted to the current regulator together with the rated current value. For the actual current value, the stator can also have a processing device that further processes the actual current value obtained by the current measurement device, such that the actual current value is transmitted to the current regulator in a processed form. The current regulator can be configured to generate a control signal or a rated voltage signal. The generation of the control signal can be based on the rated current value and the (processed) actual current value. The PWM signal generation device can be configured to generate pulse-width modulated control signals, which will be applied to the output stage device. In this sense, the control signal generated by the current regulator can be converted into a pulse-width modulated control signal by means of the PWM signal generation device. Based on this, pulse-width modulated or clock-controlled voltage pulses can be applied to the stator conductors or a polyphase system of the stator by means of the output stage device, thereby periodically energizing the stator conductors or the polyphase system. For this purpose, an intermediate circuit voltage can be supplied to the output stage device.

[0030] In another embodiment, the planar drive system has a main control device that is configured to generate a rated current value for energizing the stator conductors or a polyphase system of the stator. The rated current value can be transmitted to the above-mentioned current regulator.

[0031] In addition, the main control device can be configured to set the system clock of the planar drive system, and the operating timing of the planar drive system can be based on the system clock. In this context, time parameters of current regulation, such as the PWM clock frequency, can be pre-given based on the system clock.

[0032] In another embodiment, the stator of the planar drive system comprises one or more stator modules. In a design with multiple stator modules, the multiple stator modules can be arranged side by side horizontally. Such a stator module can have a plurality of the above-mentioned components, namely, a plurality of stator conductors or a polyphase system, a current regulator, a PWM signal generation device, an output stage device, a current measurement device, and a processing device. In addition, the stator module or each stator module can have a module control device, and the module control device can include the current regulator, the PWM signal generation device, and the processing device of the corresponding stator module. The module control device can be implemented, for example, in the form of an FPGA (Field Programmable Gate Array).

[0033] The current regulation in such a stator module can be carried out in the above-mentioned manner by detecting the actual current value of the stator conductor or the polyphase system with the aid of an associated current measurement device. The actual current value can be fed to the module control device of the stator module and processed by the processing device of the module control device and transmitted to the current regulator of the module control device. In addition, the rated current value generated by the main control device can be transmitted to the current regulator of the module control device. The current regulator can generate a control signal based on the rated current value and the processed actual current value, and the control signal can be converted into a pulse-width modulated and thus clock-controlled control signal by the PWM signal generation device of the module control device and applied to the output stage device of the associated stator module.

[0034] As described above, according to another embodiment, the stator conductors of the stator are interconnected to form a polyphase system that can be energized independently of each other. Each polyphase system can have a plurality of coils formed by the stator conductors. In this regard, the polyphase system can also be referred to as a coil system or a multi-coil system. To drive the mover, a part of the polyphase system can be energized simultaneously.

[0035] For the above design, the stator of the planar drive system can be configured to apply a polyphase current to the polyphase system of the stator. In this case, the corresponding phase of the current can be fed to each coil of the energized polyphase system. The current regulation performed by the stator for this purpose can be based on center-aligned pulse-width modulation (Center Aligned PWM), where voltage pulses that are centered with respect to each other in the time grid of the PWM clock frequency or pulse-width modulation are applied to the coils of the polyphase system.

[0036] The multiphase system of the stator can be a three-phase system or a three-coil system. Each three-phase system or three-coil system includes three coils formed by stator conductors, and each coil is connected together to a common star point. During the operation of the planar drive system, three-phase currents can be applied to such a coil system. With reference to this design, the output stage device can be implemented in the form of a circuit having three half-bridges.

[0037] For the independent energization of the multiphase system, the stator is configured to perform its own current regulation for each multiphase system. To this end, the stator can have the components mentioned above, namely a current regulator, a PWM signal generation device, an output stage device connected to the multiphase system, a current measurement device, and a processing device. The current measurement device can be configured to detect the actual current value of the coils or stator conductors of the multiphase system. This can be carried out by sampling. The processing device can be configured to process the detected actual current value. In this case, a coordinate transformation (Clarke-Park transformation) can be performed on the actual current value obtained on the multiphase system. The current regulator can be configured to generate a control signal or a voltage signal based on the rated current value and the processed actual current value. The PWM signal generation device can be configured to generate a pulse-width modulated control signal or to convert the control signal output by the current regulator into a pulse-width modulated control signal. A coordinate transformation (inverse Clarke-Park transformation) can also be performed within the scope of the conversion. The pulse-width modulated control signal generated by the PWM signal generation device can be applied to the output stage device, whereby periodic voltage pulses can be applied to the associated multiphase system and thereby energized. In this case, center-aligned voltage pulses can be applied to the multiphase system.

[0038] For each multiphase system, the stator can have a current regulator, a PWM signal generation device, an output stage device, and a processing device. For each multiphase system, there can also be a current measurement device associated with the corresponding multiphase system. The current measurement device can be configured to sample or periodically sample the current flowing in the associated multiphase system. In the above design where the multiphase system is a star-connected three-phase system, the sampling can respectively involve two of the three coils of the three-phase system. This is because the current flowing in the unsampled coil can be inferred based on the currents flowing in the two sampled coils. Alternatively, different embodiments described below can be considered.

[0039] In another embodiment, the stator conductors of the stator are interconnected to form a polyphase system that can be energized independently of each other, and the stator is configured to perform separate current regulation for each polyphase system. To perform current regulation, the stator has a plurality of current measuring devices, each of which is connected to a group composed of a plurality of polyphase systems and is thus assigned to such a group of polyphase systems. The current measuring devices are also configured to periodically sample the current flowing in the polyphase systems of each associated group and to perform current sampling simultaneously only with respect to one of the polyphase systems. This embodiment of the stator having current measuring devices corresponding to a group composed of a plurality of polyphase systems is prominent due to its low hardware cost and thus low cost.

[0040] In the above design where the polyphase system is a star-connected three-phase system, the simultaneous sampling can respectively involve two of the three coils of the three-phase system. This is because the current flowing in the unsampled coil can be inferred based on the currents flowing in the two sampled coils.

[0041] In the case of periodic sampling, the actual current value of the current can be obtained. The sampling can be performed at a pre-given moment. It is also possible to consider sampling the polyphase system in temporal coordination with its pulse-width modulated energization. In this case, the sampling moment can be selected to be synchronized with the clock frequency of the pulse-width modulation, so that the actual current value obtained by sampling corresponds to the average value of the corresponding current. For this purpose, the sampling can be performed at the time center between the corresponding voltage pulses (so-called conventional sampling method). It is also possible to perform a measurement once per PWM clock cycle. This process can achieve accurate current regulation.

[0042] In the above embodiment, only one current measuring device is used for each group composed of a plurality of polyphase systems. The current measuring device is also configured to perform current sampling simultaneously only with respect to one of the polyphase systems of the associated group.

[0043] In order to also provide accurate current regulation in this case, according to another embodiment, the stator is configured to periodically sample the current of the multi-phase system in the group by means of an associated current measuring device in time coordination with the pulse-width modulation of the on-time of the multi-phase system in the group. The stator is also configured to perform pulse-width modulation power-on of the multi-phase system in the group and sampling coordinated with this power-on with a time offset from each other, or in other words, with mutually offset time grids. A time offset existing between the pulse-width modulation power-ons of different multi-phase systems in the group concerned and between the samplings of different multi-phase systems in the group, or existing from one multi-phase system in the group to the corresponding next multi-phase system in the group, corresponds to the sampling duration or the minimum sampling duration of the current measuring device. This embodiment can be applied to each multi-phase system group of the stator. The pulse-width modulation power-on of multi-phase systems with a time offset from each other provides the possibility of reducing the burden on the intermediate circuit that provides the intermediate circuit voltage.

[0044] In the foregoing embodiment, each multi-phase system of a group is sampled in a manner coordinated with its pulse-width modulation electrical control. In this case, a current measurement can be performed once for each PWM cycle. The average current value can also be obtained as the actual current value, which enables accurate current regulation. Since only one multi-phase system can be sampled simultaneously by means of an associated current measuring device, the current measuring device samples multiple or all multi-phase systems of the group concerned with a time offset in time or with mutually offset time grids, and correspondingly, powers on multiple or all multi-phase systems of the group concerned with a time offset in time or with mutually offset time grids based on pulse-width modulation. The above time grid can be pre-given by the clock frequency of the pulse-width modulation, by means of which the pulsed power-on of the multi-phase system is performed.

[0045] During the operation of the stator, it is also possible to simultaneously power on the multi-phase systems in multiple multi-phase system groups, which are correspondingly assigned to different current measuring devices. In this case, the offset time grids in different groups can be synchronized with each other, or in other words, the multi-phase systems from different groups are respectively powered on in a pulse-width modulation manner with time synchronization with each other and sampled synchronously with each other.

[0046] It is also provided according to the above-described embodiment that the time offset corresponds to the sampling duration or the minimum sampling duration of the current measuring device. This is the duration required for the current measuring device to simultaneously sample the currents of the associated polyphase system. This design takes into account the fact that during the operation of the planar drive system, the mover and thus at least one mover coil of the mover can be located inside or above the influence area of a plurality of energized polyphase systems of the stator. In this way, the mover coil can be affected by the resulting alternating magnetic field, which is formed by the superposition of a plurality of alternating magnetic fields, each of which is caused by the ripple current flowing in the polyphase system in question. The above-described phase-shifted pulse-width modulation electrical control of the polyphase systems relative to each other has the following result: the ripple currents and thus the resulting alternating magnetic fields are also offset or phase-shifted relative to each other. In this way, depending on the position of the mover, different constructive superpositions and destructive or attenuating superpositions of alternating magnetic fields with different field strength variations can result. Correspondingly, the magnitude of the alternating voltage induced in the mover coil and thus the energy transferred from the stator to the mover can be different.

[0047] Therefore, in the above-described embodiment, the phase-shifted pulse-width modulation energization of the polyphase system is carried out with a minimum time offset in the form of the sampling duration of the current measuring device. Thereby, a partial or a large part of the constructive superposition of the alternating magnetic fields of the energized polyphase system can be achieved. In this way, the inductive energy transfer from the stator to the mover can be as effective as possible and largely position-independent, and the fluctuations in the energy transfer quality can be relatively small. The minimum offset can also avoid a change in the voltage of another polyphase system at the moment of sampling one polyphase system, which would lead to interference with the current measurement. The minimum sampling duration can be, for example, in the single-digit microsecond range and can be, for example, 1.2 μs.

[0048] In another or alternative embodiment, the stator is configured to periodically sample the current of the polyphase system in the group in a pulse-width modulated (PWM) on-time coordinated manner with the associated current measuring device in a first operating mode, and to perform the PWM on-time of the polyphase system in the group and the coordinated sampling thereof with a time offset from each other or, in other words, with an offset time grid from each other. Corresponding to the above description, a current measurement can be performed once per PWM cycle, and an average current value can be obtained as the actual current value, which can achieve accurate current regulation. The stator is also configured to perform PWM on-time on the polyphase systems in the group synchronously with each other in a second operating mode, and to periodically sample the current flowing in the polyphase systems in the group with a time offset from each other by means of the associated current measuring device. This embodiment can also be applied to each polyphase system group of the stator. The time offsets present in the first and second operating modes can respectively correspond to the sampling duration or the minimum sampling duration of the current measuring device.

[0049] In the first operating mode, current regulation is performed as in the previously described embodiment. This operating mode can be used when energy transfer from the stator to the rotor is not required or specified, or in other words, when the alternating voltage induced in at least one rotor coil is not used.

[0050] In contrast, the second operating mode can be used to effectively transfer energy from the stator to the rotor in a targeted manner. In the second operating mode, the polyphase systems of a group are energized synchronously with each other (or in other words, without a time offset), and thus the energization is performed with a common time grid. As described above, during the operation of the planar drive system, the polyphase systems from multiple polyphase system groups can also be energized simultaneously. In this context, in the second operating mode, the polyphase systems in multiple groups can also be PWM-energized synchronously with each other in time or with a common time grid. The time-synchronized energization of multiple polyphase systems causes the ripple currents flowing in the respective polyphase systems and the resulting alternating magnetic fields to be synchronous with each other and in phase with each other, and to be superimposed only or to a large extent structurally. In this way, a relatively large change in the magnetic field strength can be caused, and a relatively large alternating voltage can be induced in at least one rotor coil of the rotor. This enables effective and position-independent energy transfer from the stator to the rotor.

[0051] In the second operating mode, current measurement can also be performed once per PWM cycle. However, due to the time offset in the second operating mode (which exists between the sampling of different polyphase systems in the corresponding group or from one polyphase system to the next corresponding polyphase system in the group), in the second operating mode, only one polyphase system in the group can be sampled in coordination with its pulse-width modulated energized phase, so that an average current value is obtained as the actual current value for this polyphase system of the group. In contrast, this is not possible for one or more other polyphase systems of the group involved because sampling is performed with an offset from each other in the second operating mode. As a result, actual current values deviated from the average current value can be determined for these polyphase systems. This will somewhat weaken the accuracy of current regulation. However, as described above, the second operating mode can only be used for the case of targeted energy transfer from the stator to the rotor, and thus is applied limitedly in time, so that this weakening can be neglected.

[0052] The energization of the polyphase systems of one or more groups from the stator corresponding to the first or second operating mode can be determined or initiated by the main control device of the planar drive system. For this purpose, the main control device can transmit corresponding control signals to one or more current regulators or module control devices to preset the respective operating mode.

[0053] In another embodiment, the stator has an optional activatable influencing device, which is configured to influence current regulation such that amplified ripple currents can be generated in the energized stator conductors of the stator or in one or more energized polyphase systems of the stator, and thus an amplified alternating magnetic field can be generated. This can be done by keeping the average value of the current flowing in the energized stator conductors or polyphase systems unchanged.

[0054] The amplified ripple currents and the amplified alternating magnetic field by means of the influencing device can have an increased oscillation width. Through the amplified alternating magnetic field, an increased alternating voltage can be induced in at least one rotor coil of the rotor, and this increased alternating voltage can also have an increased oscillation width. In this way, effective energy transfer from the stator to the rotor can be achieved. It is also possible to influence the magnitude or oscillation width of the ripple current independently of the average value of the current flowing in the electrically controlled stator conductors by means of the influencing device.

[0055] For example, the influencing device may be configured to generate an influencing signal, which may be added to the control signal before the control signal generated by one or more current regulators is transmitted to one or more PWM signal generating devices. The influencing signal added to the control signal may exist, for example, in the form of an alternating voltage without an average value, or may reproduce the effect of such an alternating voltage. In this way, it can be achieved that the average value of the output voltage and thus the average value of the current flowing in the energized stator conductors remain the same as described above. This fact may relate to a plurality of PWM cycles. Alternatively, it is possible to add the influencing signal to the control signal before the pulse-width modulated control signal generated by one or more PWM signal generating devices is applied to the corresponding output stage device.

[0056] By means of the influencing signal, the ripple current flowing in the energized stator conductors can be amplified. For example, it may be possible that, due to the influencing signal, voltage pulses with different pulse durations and / or opposite polarities to each other are applied to the stator conductors or one or more multiphase systems. For example, a plurality of voltage pulses with increasing pulse durations and subsequent voltage pulses with opposite polarities compared to the previous voltage pulses may occur alternately in sequence.

[0057] The stator may have an influencing device, or in a design where the stator has a plurality of stator modules, the stator has an influencing device for each stator module. It is also possible that the stator has a separate influencing device for each multiphase system and thus for each current regulator or PWM signal generating device. One or more influencing devices may be integrated respectively in the module control device of the stator module. The activation of one or more influencing devices for influencing current regulation and the deactivation of the influencing devices may be caused by the main control device of the planar drive system. For this purpose, the main control device may transmit corresponding control signals to one or more influencing devices or module control devices.

[0058] According to another aspect of the present invention, a method for operating a planar drive system is proposed. The planar drive system may be configured as described above or according to one or more of the above embodiments. The planar drive system has a stator and a mover. The stator has a plurality of stator conductors. The mover has a magnet device with at least one mover magnet. By energizing the stator conductors of the stator, a magnetic interaction is induced between the energized stator conductors and the magnet device of the mover to drive the mover. The stator conductors are energized by current regulation based on pulse width modulation. Due to the pulse-width modulated current regulation, a ripple current is generated in the energized stator conductors of the stator and thus an alternating magnetic field is generated. The mover has at least one mover coil, in which an alternating voltage may be induced due to the alternating magnetic field.

[0059] With the aid of the proposed method, reliable inductive energy transfer from the stator to the rotor can be effected. The ripple current generated by pulse-width modulation energization and the alternating magnetic field induced in the rotor region by the ripple current are used for said energy transfer.

[0060] The same features, details and embodiments as explained above with regard to the planar drive system can be applied to this method, and the same advantages as explained above with regard to the planar drive system can be considered.

[0061] In this sense, according to a possible embodiment, the stator conductors of the stator are interconnected to form a polyphase system that can be energized independently of one another. In addition, separate current regulation is performed for each energized polyphase system. The stator has a plurality of current measuring devices for performing current regulation, and these current measuring devices are respectively connected to a group composed of a plurality of polyphase systems and are thus respectively assigned to such a group composed of polyphase systems. The current flowing in the energized polyphase systems of each associated group is periodically sampled by means of the current measuring devices. In this case, current sampling is performed simultaneously only for one of the polyphase systems. This embodiment can be achieved with a relatively small hardware expenditure for the stator.

[0062] In addition to the current measuring devices, the stator can also have other components as described above. This includes a current regulator, a PWM signal generation device, an output stage device connected to the polyphase system, and a processing device.

[0063] In another embodiment, the current in the polyphase systems of the group is periodically sampled by means of the associated current measuring devices in time coordination with the pulse-width modulation energization time of the polyphase systems in the group. In addition, the polyphase systems in the group are pulse-width modulated and sampled in coordination with this energization with a time offset from one another. The time offset existing between the pulse-width modulation energizations of different polyphase systems in the group concerned and between the samplings of different polyphase systems in this group, or the time offset from one polyphase system in this group to the corresponding next polyphase system, corresponds to the sampling duration or the minimum sampling duration of the current measuring device. This embodiment can be applied to each energized polyphase system group of the stator.

[0064] In the case of sampling a group of polyphase systems in a manner coordinated with the pulse-width modulated energized phases thereof, an average current is obtained as the actual current value, which enables accurate current regulation. Due to the fact that by means of the associated current measuring device only one polyphase system is sampled simultaneously respectively, the plurality or all polyphase systems of the group involved are sampled with a time offset from each other or in other words with an offset time grid with respect to each other and energized in a pulse-width modulated manner. The time offset corresponds to the (minimum) sampling duration of the current measuring device, whereby a large majority of the energy transfer from the stator to the rotor independent of the rotor position can be achieved.

[0065] In another embodiment, in a first operating mode, the currents of the polyphase systems in the group are periodically sampled by means of the associated current measuring device in a time-coordinated manner with the pulse-width modulated energization times of the polyphase systems in the group, and the pulse-width modulated energization of the polyphase systems in the group and the sampling coordinated therewith are performed with a time offset from each other. In this case, an average current can be obtained as the actual current value, which enables accurate current regulation. In a second operating mode, the pulse-width modulated energization of the polyphase systems in the group is performed with time synchronization with each other, and the currents flowing in the polyphase systems in the group are periodically sampled with a time offset from each other by means of the associated current measuring device. This embodiment can be applied to one or more groups of energized polyphase systems of the stator. The time offsets present in the first operating mode and the second operating mode can respectively correspond to the sampling durations of the current measuring device.

[0066] The first operating mode can be used in cases where energy transfer from the stator to the rotor is not required or not specified. In contrast, the second operating mode can be used to inductively transfer energy from the stator to the rotor in a targeted manner. In this case, in the second operating mode, the polyphase systems in a plurality of polyphase system groups can also be operated so as to energize the polyphase systems in these groups synchronously with each other or in other words with a common time grid. In this way, the ripple currents flowing in the polyphase systems involved and the alternating magnetic fields caused thereby are in phase with each other and superposed structurally, so that a relatively large alternating voltage can be induced in at least one rotor coil of the rotor. As described above, although the accuracy of current regulation in the second operating mode may be weakened to a certain extent, however, since the second operating mode can be used only for targeted energy transfer from the stator to the rotor and can thus be applied for a limited time, this weakening can be ignored.

[0067] In another embodiment, the current regulation is influenced by means of an optionally activatable influencing device of the stator such that amplified ripple currents are generated in the energized stator conductors of the stator and thus an amplified alternating magnetic field is generated. This can be done by keeping the average value of the current flowing in the energized stator conductors constant. By means of the amplified alternating magnetic field, an increased alternating voltage can be induced in at least one mover coil of the mover, which enables effective energy transfer from the stator to the mover.

[0068] According to another aspect of the invention, a stator for a planar drive system for driving a mover is proposed. The mover has a magnet arrangement with at least one mover magnet and at least one mover coil. The stator has a plurality of stator conductors. The stator is configured to energize the stator conductors. A magnetic interaction can be initiated between the energized stator conductors of the stator and the magnet arrangement of the mover to drive the mover. The stator is configured to perform the energization of the stator conductors by means of a pulse-width modulation-based current regulation. Due to the pulse-width modulation-based current regulation, ripple currents can be generated in the energized stator conductors of the stator and thus an alternating magnetic field can be generated, by means of which an alternating voltage can be induced in at least one mover coil of the mover.

[0069] The same features, details and embodiments as explained above with respect to the planar drive system and method can be applied to the mover, and the same advantages as explained above with respect to the planar drive system and method can be considered. For example, the following embodiments can be envisaged.

[0070] In a possible embodiment, the stator has one or more stator modules. In a design in which the stator has a plurality of stator modules, the plurality of stator modules can be arranged side by side transversely.

[0071] In another embodiment, the stator conductors of the stator are interconnected to form a polyphase system that can be energized independently of each other. The stator is configured to perform a separate current regulation for each polyphase system. To perform the current regulation, the stator has a plurality of current measuring devices, which are respectively connected to a group consisting of a plurality of polyphase systems. The current measuring devices are configured to periodically sample the currents flowing in the polyphase systems of the respective associated groups and to perform current sampling simultaneously only with respect to one of the polyphase systems.

[0072] In another embodiment, the stator is configured to periodically sample the current of the polyphase system in the group in time coordination with the pulse-width modulation (PWM) energization of the polyphase system in the group by means of an associated current measuring device. In addition, the stator is configured to perform PWM energization of the polyphase system in the group with a time offset from each other and sampling coordinated with this energization. A time offset exists between the PWM energizations of different polyphase systems in the group and between the samplings of different polyphase systems in the group, or from one polyphase system in the group to the corresponding next polyphase system, corresponding to the sampling duration of the current measuring device.

[0073] In another embodiment, the stator is configured to, in a first operating mode, periodically sample the current of the polyphase system in the group in time coordination with the PWM energization of the polyphase system in the group by means of an associated current measuring device, and to perform PWM energization of the polyphase system in the group with a time offset from each other and sampling coordinated therewith. The stator is further configured to, in a second operating mode, perform PWM energization of the polyphase systems in the group in time synchronization with each other and to periodically sample the current flowing in the polyphase systems in the group with a time offset from each other by means of an associated current measuring device. The time offsets existing in the first and second operating modes can each correspond to the sampling duration of the current measuring device.

[0074] In another embodiment, the stator has an optionally activatable influencing device. The influencing device is configured to influence the current regulation such that amplified ripple currents are generated in the energized stator conductors of the stator and thus an amplified alternating magnetic field is generated. This can be done by keeping the average value of the current flowing in the energized stator conductors constant.

[0075] Except, for example, in cases of explicit dependencies or incompatible alternatives, the advantageous embodiments and extensions of the invention explained above and / or reproduced in the dependent claims can be used individually or in any combination with each other. Description of the Drawings

[0076] The above-mentioned characteristics, features, and advantages of the invention and the ways to achieve them will become clearer and easier to understand in connection with the following description of embodiments, which will be explained in more detail in conjunction with the schematic diagrams.

[0077] [[ID=?]] Figure 1 A perspective view of a planar drive system having a stator and a mover is shown, wherein the stator has stator modules;

[0078] Figure 2 A perspective view of a stator having a plurality of stator modules arranged side by side is shown;

[0079] Figure 3Shows a perspective view of a mover having a magnet device and a printed circuit board surrounded by the magnet device;

[0080] Figure 4 Shows a perspective view of a stator module without a mover;

[0081] Figure 5 Shows an exploded view of the magnet device of the mover and the stator layer of the stator module;

[0082] Figure 6 and Figure 7 Shows a top view of the stator layer of the stator module;

[0083] Figure 8 and Figure 9 Shows an equivalent circuit diagram of the three-phase coil system of the stator module;

[0084] Figure 10 Shows the interconnection of the coil system and the output stage device;

[0085] Figure 11 Shows a regulation loop for current regulation of the coil system based on pulse width modulation;

[0086] Figure 12 Shows an arrangement including current measuring devices connected to three coil systems;

[0087] Figure 13 Shows the time variation curves of voltage and current during pulse width modulation power-on of single-phase and three-phase coil systems;

[0088] Figure 14 Shows the time variation curves of voltage and current, the time variation curve of effective current, and the time variation curve of magnetic field strength variation during offset pulse width modulation power-on and time-synchronized pulse width modulation power-on of two coil systems;

[0089] Figure 15 Shows the time variation curves of voltage and current of three coil systems that are powered on with an offset from each other;

[0090] Figure 16 Shows the local variation curves of magnetic field strength at different times during pulse width modulation power-on of two coil systems;

[0091] Figure 17 Shows the time variation curves of voltage and current of three coil systems that are powered on synchronously in time and in which current measurement is performed with a time offset;

[0092] Figure 18A further control loop for current control of a coil system based on pulse width modulation is shown, wherein the control loop has an additional influencing device for influencing the current control;

[0093] Figure 19 shows the time profile of the voltage and the current when the coil system is energized in a pulse-width-modulated manner in the uninfluenced state and in the state influenced by the influencing device;

[0094] Figure 20 A perspective view of a stator module and a mover is shown, wherein a printed circuit board of the mover is shown in a partial cross-sectional view of the mover;

[0095] Figure 21 shows a top view of the stator module and the mover;

[0096] Figure 22 Shown is a circuit with multiple mover coils Figure 20 Exploded view of the mover's printed circuit board;

[0097] Figure 23 shows a top view of the mover coil;

[0098] Figure 24 A diagram of a mover with a printed circuit board, a rectifier, and another device is shown;

[0099] Figure 25 shows a perspective view of another embodiment of a mover with a printed circuit board arranged on the underside of the mover;

[0100] Figure 26 Shown is a circuit with multiple mover coils Figure 25 Exploded view of the mover's printed circuit board;

[0101] Figure 27 A diagram showing another design of a mover having a plurality of printed circuit boards in the laterally outer region; and

[0102] Figures 28 to 31 Different illustrations of another embodiment of a mover are shown, wherein the mover has a circumferential mover coil in the form of a wound wire. DETAILED DESCRIPTION

[0103] Implementations of a planar drive system and a method for operating a planar drive system are described based on the following schematic diagrams. The planar drive system, comprising a planar stator and a movable mover, is suitable for reliably transmitting energy inductively from the stator to the mover. Regarding the implementations described below, it should be noted that aspects and details described with respect to one implementation may also apply to other implementations. Furthermore, it is possible to combine features from multiple implementations.

[0104] Figure 1 A perspective view showing the design of a planar drive system 1 having a stator 5 with at least one stator module 10 and a mover 200. During operation of the planar drive system 1, the mover 200 is movably arranged above the stator 5 and the stator module 10. The stator module 10 includes a module housing 18 and a stator unit 100 arranged on the upper side of the module housing 18. The stator unit 100 is configured as a planar stator and has a flat or planar stator surface 11. The stator surface 11 extends over the entire upper side of the stator unit 100 and the stator module 10. The stator unit 100 has a plurality of metal stator conductors 125 to which an electric drive current can be applied. The stator conductors 125 can also be referred to as coil conductors or conductor strips.

[0105] By energizing the stator conductors 125 of the stator module 10, a magnetic field can be generated that can drive the mover 200 interactively with the magnet arrangement 201 of the mover 200 (see Figure 3 ). The mover 200 can in this case remain suspended above the stator surface 11 and additionally move above the stator surface 11. The mover 200 can move both in a first direction 12 and in a second direction 14. As Figure 1 shown, the first and second directions 12, 14 are perpendicular to each other and are respectively oriented parallel to the stator surface 11. By simultaneously moving the mover 200 in the first direction 12 and in the second direction 14, the mover 200 can move in any direction above the stator surface 11. The mover 200 can also move in a third direction 15 that is perpendicular to the first direction 12, the second direction 14, and the stator surface 11. In this way, the distance between the mover 200 and the stator surface 11 can vary, i.e., the mover 200 can be raised or lowered above the stator surface 11.

[0106] Other electrical and electronic components and devices not shown in Figure 1 are arranged in the module housing 18. These components are used in particular for generating the drive current and thus for energizing the stator conductors 125 of the stator module 10. As will be explained in more detail below, this energization is carried out by means of pulse-width-based current regulation.

[0107] On the lower side 32 of the module housing 18 opposite the stator surface 11 there is Figure 1Connection terminals not shown in the figure, which are used to connect the stator module 10 to a plurality of connection lines 16. The connection lines 16 may include an energy supply line for supplying electrical energy to the stator module 10, an input data line, and an output data line. Electrical energy can be transmitted to the stator module 10 via the energy supply line to generate a drive current in particular. Data can be sent to and from the stator module 10 via the input and output data lines. In this way, data communication can be achieved between the stator module 10 and the main control device 500 (see Figure 11 ) of the planar drive system 1. This includes, for example, transmitting control signals or control data such as rated current values from the main control device 500 to the stator module 10.

[0108] Based on Figure 1 It can be clearly seen that the module housing 18, the stator unit 100, and the stator surface 11 are constructed as rectangles or squares in a top view of the stator surface 11. The stator surface 11 is bounded by four straight outer edges 21 respectively. Every two mutually opposite outer edges 21 are oriented parallel to the first direction 12, and the other two mutually opposite outer edges 21 are oriented parallel to the second direction 14. The stator module 10 and the module housing 18 also have four flat sides 33 between the stator surface 11 and the underside 32 opposite thereto, and the sides are flush with the outer edges 21 on the stator surface 11.

[0109] The stator 5 of the planar drive system 1 can be implemented not only with one stator module 10, but also with Figure 1 a plurality of structurally identical examples of the stator module 10 shown. A plurality of stator modules 10 can be arranged side by side such that the outer edges 21 and the sides 33 of adjacent stator modules 10 abut against each other. In this way, the stator surfaces 11 of the stator modules 10 can form a continuous working surface above which the mover 200 can move uninterruptedly. This is carried out by correspondingly energizing the stator conductors 125 of the stator module 10 and thereby generating a magnetic field that drives the mover 200.

[0110] For illustration, Figure 2 a perspective view of the design of the stator 5 is shown, which has six stator modules 10 arranged side by side. The stator modules 10 are arranged side by side in two first rows and three second rows or columns. The first rows are side by side with each other in the second direction 14 and extend along the first direction 12, and the second rows or columns are side by side with each other in the first direction 12 and extend along the second direction 14. The stator surfaces 11 of the stator modules 10 form a continuous and planar working surface for the mover 200. The mover 200 can move seamlessly from the stator surface 11 of one stator module 10 to the stator surface 11 of an adjacent stator module 10 or across the stator surface 11.

[0111] In addition to Figure 2In addition to the design shown, other designs of the stator 5 of the planar drive system 1 can also be considered with other arrangements and / or other numbers of stator modules 10 arranged side by side. In principle, the stator modules 10 can be assembled into a stator 5 of any size in the first and / or second directions 12, 14.

[0112] The above-mentioned energy supply and data communication can be implemented at each stator module 10 of the stator 5 via the respective connection lines 16 of each stator module 10. Alternative designs of the stator modules 10 not shown here can also have electrical connection elements by means of which electrical energy and / or data can be transmitted from one stator module 10 to an adjacent stator module 10. Such connection elements can be arranged, for example, on the side 33 of the stator module 10.

[0113] Figure The design of the mover 200 of the planar drive system 1 is shown in a perspective view from below of the underside of the mover 200. During operation of the planar drive system 1, the underside of the mover 200 is arranged to face one or more stator modules 10 of the stator 5. The mover 200 or its underside is also oriented parallel or substantially parallel to the stator surface 11. The mover 200 has a magnet arrangement 201 on its underside. The magnet arrangement 201 has a rectangular or square outer contour and includes a first magnet unit 210, a second magnet unit 212, a third magnet unit 213, and a fourth magnet unit 214. The first magnet unit 210 and the third magnet unit 213 each have elongated mover magnets 216 arranged side by side in a first mover direction 206 and extending in a second mover direction 208 oriented perpendicular to the first mover direction 206. The second magnet unit 212 and the fourth magnet unit 214 each have elongated mover magnets 216 arranged side by side in the second mover direction 208 and extending in the first mover direction 206. The mover magnets 216 are permanent magnets. During operation of the planar drive system 1, the first and third magnet units 210, 213 are used to drive the mover 200 in the first mover direction 206. During operation, the second and fourth magnet units 212, 214 are used to drive the mover 200 in the second mover direction 208.

[0114] The magnet units 210, 212, 213, 214 of the magnet arrangement 201 and their mover magnets 216 are arranged such that they enclose an area. In the area enclosed by the mover magnets 216, according to ​The mover 200 of the illustrated design has a first printed circuit board 230 with at least one mover coil 240. The at least one mover coil 240, together with the stator conductors 125 of the stator 5, is used to inductively transfer energy from the stator 5 to the mover 200. As explained in more detail below, this energy transfer is based on the generation of a ripple current and, thereby, an alternating magnetic field by pulse-width-modulated electrical control of the stator conductors 125, thereby inducing an alternating voltage in the mover coil 240. The induced alternating voltage can be substantially proportional to the temporal variation of the magnetic flux passing through the mover coil 240.

[0115] like ​ As shown, the mover 200 also has four spacers 204 that surround the magnet arrangement 201 and form the lateral outer sides of the mover 200. When a plurality of movers 200 of the same structure (not shown) are used in the planar drive system 1, the spacers 204 can ensure that a minimum distance is maintained between the magnet arrangements 201 of the movers 200 when the spacers 204 of two movers 200 arranged side by side contact each other. In this way, it is possible to prevent the lower sides of the movers 200 from being erected from a position parallel to the stator surface 11 due to the attraction between their magnet arrangements 201, and the two movers 200 with their lower sides facing each other remain magnetically attached. The spacers 204 can have an elastically deformable material or can be formed of such a material.

[0116] ​ A perspective view of a stator module 10 without a mover 200 is shown. In a design where the stator 5 has a plurality of stator modules 10, as in the example ​ As shown in FIG, all stator modules 10 can be designed to be structurally identical or substantially structurally identical. Therefore, the details described above and below with respect to all stator modules 10 of the stator 5 can be applied.

[0117] ​ The stator unit 100 of the illustrated design of the stator module 10 includes a first stator sector 110, a second stator sector 112, a third stator sector 113, and a fourth stator sector 114. Each of the stator sectors 110, 112, 113, 114 includes a portion of a stator conductor 125 that is electrically insulated from one another. Each stator conductor 125 is completely disposed within one of the stator sectors 110, 112, 113, 114. The stator sectors 110, 112, 113, 114 are rectangular in shape. The stator sectors 110, 112, 113, 114 can be square in shape, such that the extent of the stator sectors 110, 112, 113, 114 in the first direction 12 corresponds to the extent of the stator sectors 110, 112, 113, 114 in the second direction 14. The stator sectors 110 , 112 , 113 , 114 each comprise a quarter of the area of the stator unit 100 , ie, a quadrant.

[0118] Within the stator sectors 110, 112, 113, 114, the stator conductors 125 can be arranged in a plurality of vertically stacked stator layers or stator planes, where each stator layer has stator conductors 125 extending only along the first direction 12 or along the second direction 14. With respect to the orientation and arrangement of the stator conductors 125 and with respect to the stator layers, the stator sectors 110, 112, 113, 114 can be configured to be the same or substantially the same.

[0119] For further illustration, ​ An exploded view of the magnet arrangement 201 of the rotor 200 and the first stator sector 110 is shown, the first stator sector 110 having four vertically stacked stator layers. As long as the differences are not described, the second, third, and fourth stator sectors 112, 113, 114 are constructed the same as the first stator sector 110. According to ​ the design shown, the first stator sector 110 has a first stator layer 104, a second stator layer 106 arranged below the first stator layer 104, and two additional stator layers 108 arranged below the second stator layer 106. The first stator layer 104 includes only stator conductors 125 arranged side by side along the first direction 12 and elongated along the second direction 14. The second stator layer 106 includes only stator conductors 125 arranged side by side along the second direction 14 and elongated along the first direction 12. Correspondingly, the first additional stator layer 108 arranged below the second stator layer 106 includes only stator conductors 125 elongated along the second direction 14, while the second additional stator layer 108 arranged below the first additional stator layer 108 includes only stator conductors 125 elongated along the first direction 12.

[0120] The first stator sector 110 may also have additional stator layers 108 (not shown) below ​ the stator layers 104, 106, 108 shown. In summary, the first stator sector 110 thus alternately includes the first or additional stator layers 104, 108 having stator conductors 125 extending only along the second direction 14, and the second or additional stator layers 106, 108 having stator conductors 125 extending only along the first direction 12.

[0121] In addition to the design based on ​ the description, other non - shown designs of the stator layers 104, 106, 108 with other arrangements can be considered for the stator module 10, where the stator layers have stator conductors 125 extending along the first direction 12 and along the second direction 14. One possible example is the following design, where first as ​There is shown a first stator layer 104 having stator conductors 125 extending only along a second direction 14, and below it there is a second stator layer 106 having stator conductors 125 extending only along a first direction 12. Different from ​ , a first additional stator layer 108 disposed below the second stator layer 106 may include stator conductors 125 extending only along the first direction 12, and a second additional stator layer 108 disposed below the first additional stator layer 108 may include stator conductors 125 extending only along the second direction 14. Below it, there may be additional stator layers 108 having stator conductors 125 with orientations corresponding to and repeating the orientations of the previously described four stator layers 104, 106, 108.

[0122] As ​ shown, the stator conductors 125 of the first stator sector 110 are combined into stator segments 120, 121 within the stator layers 104, 106, 108 respectively. The first stator sector 110 includes three stator segments 120, 121 arranged side by side and adjacent to each other in each of the stator layers 104, 106, 108. Each of the stator segments 120, 121 includes six stator conductors 125 arranged side by side. The first stator sector 110 includes three first stator segments 120 in the first stator layer 104 and three second stator segments 121 in the second stator layer 106. The first stator segments 120 each include six stator conductors 125 arranged side by side and extending along the second direction 14. The second stator segments 121 each include six stator conductors 125 arranged side by side and extending along the first direction 12. In the additional stator layers 108, the first stator sector 110 includes three first stator segments 120 or three second stator segments 121 alternately or in some other order. The first and second stator segments 120, 121 have the same dimensions except for their directions.

[0123] During operation of the planar drive system 1, the mover 200 may be oriented above the stator unit 100 such that a first mover direction 206 is oriented along the first direction 12 and a second mover direction 208 is oriented along the second direction 14. This orientation is shown in ​ . In this case, the first and third magnet units 210, 213 of the magnet arrangement 201 of the mover 200 may interact with the magnetic field generated by the stator conductors 125 of the first stator segment 120 to move the mover 200 along the first direction 12. The second and fourth magnet units 212, 214 of the magnet arrangement 201 of the mover 200 may interact with the magnetic field generated by the stator conductors 125 of the second stator segment 121 to move the mover 200 along the second direction 14.

[0124] Alternatively, compared with ​Conversely, as shown, the mover 200 can be oriented such that the first mover direction 206 is oriented along the second direction 14 and the second mover direction 208 is oriented along the first direction 12. In this case, the first and third magnet units 210, 213 can interact with the magnetic field of the second stator segment 121 to drive the mover 200 in the second direction 14, and the second and fourth magnet units 212, 214 can interact with the magnetic field of the first stator segment 120 to drive the mover 200 in the first direction 12.

[0125] ​ A top view of the first stator segment 120 of the first stator sector 110 is shown. ​ A corresponding top view of the second stator segment 121 of the first stator sector 110 is shown. As long as the differences are not described, the construction of the second, third, and fourth stator sectors 112, 113, 114 is the same as that of the first stator sector 110. According to ​ and ​ the design shown, the stator segments 120, 121 have a segment width 127, which can be, for example, 40 mm. The stator conductors 125 of the individual stator segments 120, 121 of the corresponding stator layers 104, 106, 108 can be energized with drive current independently of the stator conductors 125 of the remaining stator segments 120, 121 of the stator layers 104, 106, 108 involved. Therefore, the drive current in one of the stator segments 120, 121 does not necessarily depend on the drive current in the other of the stator segments 120, 121. In addition, the stator conductors 125 of one of the stator segments 120, 121 can be energized with drive current while the stator conductors 125 of the other, for example, adjacent stator segments 120, 121 are without current.

[0126] The stator conductors 125 of the individual stator segments 120, 121 are respectively connected to a common star point 157 to form a three-phase coil system that can be energized independently of each other, hereinafter also referred to as the three-phase system 150 (see ​ and ​ ). During the operation of the planar drive system 1, three-phase drive current can be applied to the three-phase system 150. In this case, the first phase U, the second phase V, and the third phase W of the drive current can each have a phase shift of 120° relative to each other.

[0127] In ​ and ​Shows the possible distribution of phases U, V, W on the stator conductors 125 of the first and second stator segments 120, 121. The stator segments 120, 121 each have a first positive conductor 131 and a first return conductor 132 for the first phase U of the drive current, a second positive conductor 141 and a second return conductor 142 for the second phase V of the drive current, and a third positive conductor 146 and a third return conductor 147 for the third phase W of the drive current. Since the individual stator segments 120, 121 can be energized independently of each other, the drive currents applied to the individual stator segments 120, 121 can be different. In particular, the individual first phases U that can be applied to different stator segments 120, 121 can be different. In addition, the individual second phases V that can be applied to different stator segments 120, 121 and the individual third phases W that can be applied to different stator segments 120, 121 can be different.

[0128] Phases U, V, and W can be fed into the positive conductors 131, 141, 146 on the first side of the stator segments 120, 121 respectively and into the return conductors 132, 142, 147 on the opposite second side of the stator segments 120, 121. In addition, phases U, V, and W can be coupled out from the positive conductors 131, 141, 146 on the second side of the stator segments 120, 121 respectively and from the return conductors 132, 142, 147 on the first side of the stator segments 120, 121.

[0129] The first positive and return conductors 131, 132 of the first stator segment 120 stacked on the plurality of first and additional stator layers 104, 108 can be connected in series respectively. Similarly, the second positive and return conductors 141, 142 and the third positive and return conductors 146, 147 of the first stator segment 120 stacked on the plurality of first and additional stator layers 104, 108 can be connected in series respectively. In this case, phases U, V, W can be input and coupled into the positive conductors 131, 141, 146 of one of the first and additional stator segments 120 on one of the first and additional stator layers 104, 108 respectively, then flow through all the positive and return conductors 131, 141, 146, 132, 142, 147 assigned to the involved phases U, V, W on all the first and additional stator layers 104, 108 of the involved first stator segment 120, and finally converge at the star point 157 (see ​ ). Similar to the first stator segment 120, the first positive and return conductors 131, 132, the second positive and return conductors 141, 142 and the third positive and return conductors 146, 147 of the second stator segment 121 stacked on the plurality of second and additional stator layers 106, 108 can also be connected in series respectively and converge at the star point 157 (see ​ ).

[0130] ​ shows an equivalent circuit diagram of a first stator section 120 of a first stator sector 110, which equivalent circuit diagram can be considered for the above design. In ​ the shown equivalent circuit diagram, all the stacked and serially connected stator conductors 125 of the first stator section 120 are shown as a single conductor. The shown first positive conductor 131 includes all the positive conductors 131 of the first stator section 120 that are stacked and serially connected in different first and further stator layers 104, 108, and the shown first return conductor 132 includes all the first return conductors 132 of the first stator section 120 that are stacked and serially connected in different first and further stator layers 104, 108. Similarly, the shown second positive conductor 141, second return conductor 142, third positive conductor 146, and third return conductor 147 respectively include all the second positive conductors 141, second return conductors 142, third positive conductors 146, and third return conductors 147 of the first stator section 120 that are stacked and serially connected in different first and further stator layers 104, 108.

[0131] As ​ shown, the stator conductors 125 or the positive and return conductors 131, 132, 141, 142, 146, 147 of the respective first stator sections 120 are respectively connected to form a three-phase system 150. With reference to the first stator section 120, these three-phase systems are also referred to as the first three-phase systems 151. A first connection point 154 for feeding the first phase U, a second connection point 155 for feeding the second phase V, and a third connection point 156 for feeding the third phase W are respectively arranged on a first side 601 of the respective first stator sections 120 that is oriented in a first direction 12. The first connection point 154 can be connected to the first positive conductor 131 arranged in one of the first or further stator layers 104, 108. The second connection point 155 can be connected to the second positive conductor 141 arranged in one of the first or further stator layers 104, 108. The third connection point 156 can be connected to the third positive conductor 146 arranged in one of the first or further stator layers 104, 108. In addition, a star point 157 is arranged on the first side 601 of the respective first stator sections 120. The first return conductor 132 of one of the first or further stator layers 104, 108, the second return conductor 142 of one of the first or further stator layers 104, 108, and the third return conductor 147 of one of the first or further stator layers 104, 108 can be respectively interconnected at the star point 157.

[0132] ​ shows an equivalent circuit diagram of a second stator section 121 of the first stator sector 110, which equivalent circuit diagram can be considered for the above design. In​ In the equivalent circuit diagram shown, it is the same as the equivalent circuit diagram of the first stator section 120 shown ​ All the stacked and serially connected stator conductors 125 of the second stator section 121 are shown as a single conductor. The stator conductors 125 of the second stator section 121 or the forward and return conductors 131, 132, 141, 142, 146, 147 are respectively connected to form a three-phase system 150. With reference to the second stator section 121, these three-phase systems are also referred to as the second three-phase system 152. A first connection point 154 for feeding the first phase U, a second connection point 155 for feeding the second phase V, and a third connection point 156 for feeding the third phase W are respectively arranged on the second side 602 of the second stator section 121 along the second direction 14. The first connection point 154 can be connected to the first forward conductor 131 arranged in one of the second or another stator layer 106, 108. The second connection point 155 can be connected to the second forward conductor 141 arranged in one of the second or another stator layer 106, 108. The third connection point 156 can be connected to the third forward conductor 146 arranged in one of the second or another stator layer 106, 108. In addition, a star point 157 is arranged on the second side 602 of each second stator section 121. The first return conductor 132 of one of the second or another stator layer 106, 108, the second return conductor 142 of one of the second or another stator layer 106, 108, and the third return conductor 147 of one of the second or another stator layer 106, 108 can be respectively interconnected at the star point 157.

[0133] ​ and ​ The design of the first stator sector 110 shown clearly shows that the first three-phase system 151 representing the first stator section 120 and the second three-phase system 152 representing the second stator section 121 in the first stator sector 110 are arranged relative to each other rotated by 90°. The first stator sector 110 includes three first three-phase systems 151 and three second three-phase systems 152. The magnetic field generated by the first three-phase system 151 can be responsible for the movement of the mover 200 along the first direction 12. The magnetic field generated by the second three-phase system 152 can be responsible for the movement of the mover 200 along the second direction 14. This design is applicable to the second, third, and fourth stator sectors 112, 113, 114 in a corresponding manner.

[0134] As a result, ​ The stator unit 100 of the stator module 10 shown includes twelve first three-phase systems 151 and twelve second three-phase systems 152, so there are a total of twenty-four three-phase systems 150. The stator unit 100 can be implemented in the form of a multi-layer printed circuit board not shown, where the stator layers 104, 106, 108 are respectively arranged in different layers of the printed circuit board. In order to implement according to​ and ​ For the interconnection of the forward and return conductors 131, 141, 146, 132, 142, 147 of the equivalent circuit diagram shown in ​ , the stator unit 100 may have an electrical connection structure (not shown), such as a horizontal connection structure and a vertical connection structure.

[0135] By appropriately energizing one or at least one three-phase system 150 of the stator modules 10 of the stator 5, the mover 200 can be driven as described above. In this case, a part of the three-phase system 150 can be energized simultaneously. This relates to the three-phase system 150 located in the region of the mover 200. In this context, one or each stator module 10 of the stator 5 may have a position sensor (not shown), such as a Hall sensor, by means of which the current position of the mover 200 can be detected. In a design of the stator 5 having a plurality of stator modules 10, for example as ​ shown, a part of the three-phase system 150 of one or more adjacent stator modules 10 can be electrically controlled correspondingly simultaneously to drive the mover 200.

[0136] The energization of the three-phase system 150 of one or each stator module 10 of the stator 5 is carried out as described above by current regulation based on pulse width modulation. As ​ shown for a single three-phase system 150 of the stator module 10, in particular, the output stage device 180 assigned to and connected to the three-phase system 150 of the stator module 10 can be used for this purpose. In the present case, the three-phase system 150 includes a first coil 165, a second coil 166, and a third coil 167, which are interconnected at a common star point 157. Referring to ​ and ​ the equivalent circuit diagram shown, the first coil 165 may include first forward and return conductors 131, 132, the second coil 166 may include second forward and return conductors 141, 142, and the third coil 167 may include third forward and return conductors 146, 147. During operation, the first coil 165 can be used to apply the first phase U of the three-phase drive current, and the second coil 166 can be used to apply the second phase V, and the third coil 167 can be used to apply the third phase W of the drive current.

[0137] According to ​In the illustrated design, the output stage device 180 is connected to the intermediate circuit voltage Ud of an unillustrated DC voltage intermediate circuit or intermediate circuit memory of the associated stator module 10. In the present case, the output stage device 180 includes a first switch 181, a second switch 182, a third switch 183, a fourth switch 184, a fifth switch 185, and a sixth switch 186. The first and second switches 181, 182 are connected to the first coil 165 and can form a first output stage assigned to the first coil 165. The third and fourth switches 183, 184 are connected to the second coil 166 and can form a second output stage assigned to the second coil 166. The fifth and sixth switches 185, 186 are connected to the third coil 167 and can form a third output stage assigned to the third coil 167.

[0138] ​ The illustrated output stage device 180 with switches 181, 182, 183, 184, 185, 186 can be configured in the form of a drive circuit of three half - bridges. In this design, the switches 181, 182, 183, 184, 185, 186 can be implemented in the form of transistors.

[0139] During operation, different from the illustration in ​ , one of the two first and second switches 181, 182 is closed and the other of the two first and second switches 181, 182 is open. Correspondingly, one of the two third and fourth switches 183, 184 and one of the two fifth and sixth switches 185, 186 are respectively open, while the other of the two third and fourth switches 183, 184 and the other of the two fifth and sixth switches 185, 186 are respectively closed. Depending on the switching states of the switches 181, 182, 183, 184, 185, 186 of the output stage device 180, a voltage or voltage pulse with a voltage value (Spannungsbetrag) equal to the supply voltage Ud or the reference potential or ground potential can be applied to the coils 165, 166, 167 of the three - phase system 150.

[0140] ​ It is shown that the output stage device 180 is connected to the module control device 190 of the associated stator module 10. During operation, the output stage device 180 or its switches 181, 182, 183, 184, 185, 186 can be periodically controlled in a pulse - width - modulated manner via the module control device 190. In this way, the coils 165, 166, 167 of the three - phase system 150 can be applied with a pulse - width - modulated periodic voltage pulse of magnitude equal to the intermediate circuit voltage Ud and can thus be energized correspondingly.

[0141] For further illustration, ​A block diagram of an adjustment circuit for current regulation of a three-phase system 150 of a stator module 10 based on pulse width modulation is shown, and the adjustment circuit can be applied in a planar drive system 1. ​ The shown adjustment circuit includes an external main control device 500, a module control device 190, an output stage device 180, a three-phase system 150, and a current measurement device 172 of the planar drive system 1. The module control device 190, the output stage device 180, the three-phase system 150, and the current measurement device 172 are components of the stator 5 or a stator module 10 of the planar drive system 1. Refer to ​ For the shown stator module 10, the module control device 190, the output stage device 180, and the current measurement device 172 are integrated in a module housing 18.

[0142] ​ The shown module control device 190 includes a current regulator 170, a PWM signal generation device 171, and a processing device 173. The module control device 190 can be implemented in the form of an FPGA.

[0143] The current measurement device 172, which may include an analog-to-digital converter and is appropriately connected to the three-phase system 150, is configured to detect the actual current value of the three-phase system 150. This can be done by performing periodic sampling at a pre-given moment. During current measurement, only the currents of two of the three coils from the three-phase system 150 can be sampled. This is because the current flowing in the non-sampled coil can be inferred based on the currents flowing in the two sampled coils. This is due to the coils of the three-phase system 150 being star-connected.

[0144] As ​ shown in the adjustment circuit, during the operation of the planar drive system 1, a rated current value 300 is generated by the main control device 500 and transmitted to the current regulator 170. In addition, the current measurement device 172 forwards the actual current value 304 obtained by sampling the three-phase system 150 to the processing device 173 that processes the actual current value, and as a result, the processed actual current value 305 is transmitted to the current regulator 170. The processed actual current value 305 can relate to a two-phase reference system (d / q system). In this sense, a coordinate transformation, i.e., a Clarke-Park transformation, can be performed during processing by the processing device 173. In this case, the actual current value 304 related to the three-phase system 150 can be converted into the processed actual current value 305 related to the two-phase reference system. The rated current value 300 generated by the main control device 500 and transmitted to the current regulator 170 can also relate to the two-phase reference system.

[0145] The current regulator 170 generates a control signal 301 based on the rated current value 300 and the processed actual current value 305, and transmits it to the PWM signal generating device 171. The control signal 301, which can also relate to a two-phase reference system, can be a rated voltage signal or reproduce such a voltage signal. Based on this, the PWM signal generating device 171 generates a pulse-width modulated control signal 303 and applies this control signal to the output stage or switch of the output stage device 180. In other words, the control signal 301 output by the current regulator 170 is converted into a pulse-width modulated control signal 303 by means of the PWM signal generating device 171. During the conversion by the PWM signal generating device 171, a further coordinate transformation, namely the inverse Clarke-Park transformation, can be performed. In this case, the control signal 301 coming from the current regulator 170 and relating to a two-phase reference system can be converted into a control signal 303 relating to the three-phase system 150 and also pulse-width modulated. Based on the pulse-width modulated control signal 303, a pulse-width modulated clock-controlled voltage pulse can be applied to the three-phase system 150 or its coils by means of the output stage device 180, whereby a corresponding drive current can flow into the three-phase system 150 or its coils.

[0146] As described above, one or each stator module 10 of the stator 5 includes twenty-four three-phase systems 150. The stator module 10 or each stator module 10 is constructed in this context such that, for each of the associated three-phase systems 150, a separate and thus independent current regulation is performed for the associated three-phase system 150 with respect to the ​ regulation loop shown. Thus, the stator module 10 or each stator module 10 has a current regulator 170, a PWM signal generating device 171, a processing device 173, and an output stage device 180 for each associated three-phase system 150. As a result, there are twenty-four current regulators 170, twenty-four PWM signal generating devices 171, and twenty-four processing devices 173 in each stator module 10, which are integrated in the associated module control device 190, and there are twenty-four output stage devices 180.

[0147] Conversely, the following design is specified with reference to current measurement to keep the hardware cost low. In this case, the stator module 10 of the stator 5 or each stator module 10 has a plurality of current measuring devices 172, each current measuring device 172 being connected to a group consisting of three three-phase systems 150 and thus assigned to such a group consisting of three three-phase systems 150 for current sampling. In ​ the current measuring device 172 is shown. The current measuring device 172 is also constructed to perform periodic sampling of the current only simultaneously with respect to one of the associated three-phase systems 150.

[0148] For the implementation of the above-described twenty-four three-phase systems 150, the stator module 10 of the stator 5 or each stator module 10 has eight current measuring devices 172 in a corresponding manner. As explained above based on ​ and ​ , the twenty-four three-phase systems 150 of the stator module 10 include twelve first three-phase systems 151 and twelve second three-phase systems 152, where the first three-phase systems 151 can cause the mover 200 to move along the first direction 12, while the second three-phase systems 152 can cause the mover 200 to move along the second direction 14. In this context, the stator module 10 or each stator module 10 can be configured such that a group consisting of three three-phase systems 150 that respectively belong to one current measuring device 172 includes only three first three-phase systems 151 or only three second three-phase systems 152.

[0149] ​ The main control device 500 of the planar drive system 1 shown as ​ is suitably connected to the stator module 10 of the stator 5, and in a design where the stator 5 has multiple stator modules 10 - for example as shown

[0150] - to multiple stator modules 10 to enable data communication between the main control device 500 and one or more stator modules 10. As described above, corresponding data lines and, in the case of multiple stator modules 10, interconnected stator modules 10 are used for this purpose. During operation, the main control device 500 can transmit rated current values to one or more current regulators 170 of one or more stator modules 10, whereby the associated three-phase systems 150 can be energized in a pulse-width modulated manner. Regarding the generation and transmission of the rated current values, the main control device 500 can take into account the current position of the mover 200. Corresponding position data can be transmitted from one or more stator modules 10 to the main control device 500. As described above, such position data can be obtained by means of position sensors of one or more stator modules 10.

[0151] ​ Possible voltage and current curves over time t are shown, which can occur during pulse-width modulated periodic electrical control of the coil system. For simplicity, ​The upper diagram above shows the corresponding situation when controlling a single-phase coil system (not shown) having only one coil. An electrical control voltage pre-given by a pulse-width modulated clock frequency is applied to the coil system, and thus a periodic first voltage pulse 410 is applied. This voltage has an almost rectangular profile including two voltage levels. Supplementally, the period duration Ts of the pulse-width modulation, as well as the pulse duration Ton and the rest duration Toff, are also shown. During the pulse duration Ton of the voltage applied to the coil system, there is respectively the first voltage pulse 410. No voltage is applied to the coil system during the rest duration Toff.

[0152] Due to the smoothing effect of the coil system, the current flowing in the coil system follows the first voltage pulse 410, such that there is a triangular first current profile 430. If the first voltage pulse 410 is applied to the coil system, the current or the current value (Strombetrags) increases, otherwise it decreases. In this way, the current flowing in the coil system oscillates back and forth around the average value with the pulse-width modulated clock frequency and thus with the period duration Ts. The average value of the current depends on the duty cycle, i.e., the ratio of the pulse duration Ton to the period duration Ts. Therefore, the current flowing in the coil system has an alternating current component, i.e., the so-called ripple current, which is associated with the emergence of a time-varying magnetic field.

[0153] In contrast, ​ the lower diagram below shows the corresponding situation that can exist when electrically controlling a three-phase coil system having three coils. This control based on center-aligned pulse-width modulation (English: Center Aligned PWM) can be used in the three-phase system 150 of the planar drive system 1 and is implemented by means of the above-described regulation loop and the above components such as the output stage device 180. ​ described.

[0154] As ​ shown in the lower part, three control voltages pre-given by a pulse-width modulated clock frequency are applied to the three-phase coil system, and thus three periodic voltage pulses 421, 422, 423 having different pulse widths or pulse durations are applied. These are hereinafter referred to as the second voltage pulse 421, the third voltage pulse 422, and the fourth voltage pulse 423. These three voltages have an almost rectangular profile with two voltage levels. The second voltage pulse 421 can relate to the first phase U of the three-phase drive current, the third voltage pulse 422 relates to the second phase V of the three-phase drive current, and the fourth voltage pulse 423 relates to the third phase W of the three-phase drive current. In a corresponding manner, for example, with reference to ​The three-phase system 150 shown in FIG. may apply a second voltage pulse 421 to the first coil 165, a third voltage pulse 422 to the second coil 166, and a fourth voltage pulse 423 to the third coil 167. This can be achieved by switching the switches 181, 182, 183, 184, 185, 186 of the associated output stage device 180 in coordination therewith.

[0155] The electrical control is carried out in such a way that the second, third, and fourth voltage pulses 421, 422, 423 are centered relative to each other, and the centers of the corresponding voltage pulses 421, 422, 423 are thus superimposed. To illustrate this aspect, on the right side of the following diagram in ​ are shown the second, third, and fourth voltage pulses 421, 422, 423 with different pulse magnitudes. The illustration with different pulse magnitudes is only used to emphasize the centered arrangement of the second, third, and fourth voltage pulses 421, 422, 423. This is because during the control, the second, third, and fourth voltage pulses 421, 422, 423 with consistent voltage magnitudes are applied to the coils of the three-phase coil system, as is also shown in the case of the remaining second, third, and fourth voltage pulses 421, 422, 423 shown in ​

[0156] In ​ the following diagram of is also shown a second current curve 435, which may occur in one of the three coils of the three-phase coil system to which three control voltages and thus the second, third, and fourth voltage pulses 421, 422, 423 are applied. This can be, for example, the first phase U of the three-phase drive current, and referring to the three-phase system 150 shown in ​ is the first coil 165. Due to the smoothing effect of the coil system, the second current curve 435 also has a triangular shape and oscillates back and forth around the average value at the pulse-width modulation clock frequency. If all three control voltages are not at the same (upper or lower) voltage level, the current value increases. Conversely, if the three voltages have the same voltage level, the current value decreases. The ripple current present during this process also causes the appearance of an alternating magnetic field here.

[0157] In the other two coils of the three-phase coil system, there are current curves (not shown) corresponding to the second current curve 435, which are triangular and affected by the ripple current. In this case, if all three control voltages are not at the same voltage level, the current value also increases, otherwise the current value decreases. At least one of the non-shown current curves may have an appearance opposite to that of the second current curve 435, i.e., there is a current change with a sign opposite to that of the second current curve 435.

[0158] ​In the energized three-phase system 150 of the planar drive system 1, the drive current flowing in the associated coil is superimposed with a ripple current in the same way. The occurrence of this ripple current is associated with a time-varying magnetic field. This effect is used in the planar drive system 1 to induce an alternating voltage in at least one mover coil 240 of the mover 200, and thereby transfer electrical energy from the stator 5 to the mover 200. The ripple current can be relatively large, that is, it has a relatively large oscillation width. For example, an oscillation width in the single-digit ampere range is possible, for example, in the range up to 4 A. Correspondingly, the alternating magnetic field generated due to the ripple current can have a relatively large oscillation width, thereby enabling energy to be effectively inductively transferred from the stator 5 to the mover 200. The magnitude of the ripple current can depend on the average value of the current flowing in the energized three-phase system 150.

[0159] In ​ it is shown that the first current curve 430 in the single-phase coil system can coincide with the second current curve 435 in the three-phase coil system. Therefore, ​ the upper diagram above can be used as an equivalent representation of the three-phase coil system, and the first current curve 430 can also relate to one of the three coils of the three-phase coil system. In the case of this way of observing, the first voltage pulse 410 can be regarded as an effective and current-increasing alternative pulse actually applied to the second, third, and fourth voltage pulses 421, 422, 423 of the three-phase coil system. This relationship is based on the dashed line representation between the upper diagram and the lower diagram in ​ The equivalent representation of the control of the single-phase coil system for controlling the three-phase coil system is used in the figures described below in a corresponding manner, such as ​ , ​ , ​ and ​ .

[0160] In addition, ​ it is shown that current measurement times 470 at which the coil system can be sampled to obtain actual current values. The periodic sampling is coordinated with the pulse width modulation-based periodic energization time, and the current measurement times 470 are located in the middle between successive first voltage pulses 410 or second, third, and fourth voltage pulses 421, 422, 423. Thereby, it can be achieved that the actual current value obtained by sampling corresponds to the average value of the corresponding current (the so-called regular sampling method). This process can achieve accurate current regulation.

[0161] In ​ the lower diagram below, the current measurement times 470 are respectively arranged between the second, third, and fourth voltage pulses 421, 422, 423. In ​In the upper diagram that can be used as an equivalent representation, the current measurement time 470 is shown as corresponding to the lower diagram. In this way, the current measurement time 470 does not exist between all the first voltage pulses 410. However, the current measurement time 470 can also be set between all the first voltage pulses 410, so as to perform a measurement once for each PWM clock cycle, for example as ​ shown.

[0162] In the planar drive system 1, the current regulation performed according to the ​ regulation loop shown in can be carried out in the following manner, that is, the three-phase system 150 to be energized corresponds to ​ and is controlled in a pulse-width modulation manner and thus energized. In this case, a pulse-width modulated control signal 303 is generated using the rated current value 300 pre-given by the main control device 500, and the control signal is transmitted to the corresponding output stage device 180 (see ​ ). In this way, voltage pulses with a pre-given duty cycle and pulse duration are applied to the three-phase system 150 to be energized, as a result of which the three-phase system is energized. The average value of the current flowing in the three-phase system 150 is based on the rated current value 300 pre-given by the main control device 500. By changing the rated current value 300, a change in the pulse-width modulated control signal 303 and thus a change in the duty cycle and pulse duration of the voltage pulse can be caused, thereby also changing the average value of the current. Compared with the superimposed ripple current, this current change may be significantly slower or involve a significantly longer time period. As a result, the current regulation performed in the planar drive system 1 can also be referred to as direct current regulation or DC current regulation (Direct Current), although there are different currents over a longer time period.

[0163] As explained above based on ​ the stator module 10 of the stator 5 or each stator module 10 has eight current measurement devices 172, and each current measurement device 172 is connected to a group composed of three three-phase systems 150 and is respectively used for current sampling of such a group of three-phase systems 150. The current measurement device 172 is configured to simultaneously sample the current flowing in the associated three-phase system 150 only in relation to one of the three-phase systems 150.

[0164] In this context, the following design can be applied to the planar drive system 1. In this case, the stator module 10 of the stator 5 or each stator module 10 is configured to periodically sample the three-phase system 150 in the group in a pulse-width modulated power-on time coordinated manner with the three-phase system 150 of the three-phase system 150 in the pair as described above by means of the associated current measuring device 172. In this way, an average current value can be obtained as the actual current value, which can achieve accurate current regulation. Since only one three-phase system 150 can be sampled simultaneously by means of the associated current measuring device 172 each time, the stator module 10 of the stator 5 or each stator module 10 is also configured to perform the pulse-width modulated power-on of the three-phase system 150 in the group and the coordinated sampling by means of the associated current measuring device 172 with a time offset from each other and thus with an offset time grid from each other, as will be explained in more detail below based on ​ and ​ . Here, the time offset exists between the pulse-width modulated power-ons of different three-phase systems 150 in the group involved and between the samplings of different three-phase systems 150 in the group. This design can be set for all current measuring devices 172 and the associated three-phase system 150 groups of the stator 5 of the planar drive system 1.

[0165] The pulse-width modulated power-on of the three-phase system 150 of the stator modules 10 with a time offset from each other makes it possible to reduce the burden on the intermediate circuit of the stator module 10. This is because in this case, the three-phase systems 150 involved do not draw current from the intermediate circuit simultaneously, but cancel each other out, resulting in lower current peaks possibly occurring in the intermediate circuit.

[0166] During the operation of the planar drive system 1, multiple three-phase systems 150 can be powered on simultaneously to drive the mover 200. This can be controlled by the main control device 500 in such a way that the main control device 500 outputs the corresponding rated current value 300 to the associated current regulator 170 (see ​ ). Multiple three-phase systems 150 from different groups can also be powered on simultaneously, and the multiple three-phase systems are thus assigned to different current measuring devices 172 for current sampling. In the design where the stator 5 has multiple stator modules 10 (see ​ ), the multiple simultaneously powered-on three-phase systems 150 can also be part of multiple adjacent stator modules 10, depending on the position of the mover 200.

[0167] In the case of simultaneous energization of a plurality of three-phase systems 150, the above-mentioned time offsets respectively relate to a group of three-phase systems 150 assigned to one current measuring device 172. In contrast, for different groups of three-phase systems 150 of the stator 5, time grids with offsets from each other can be synchronized, that is, the three-phase systems 150 of different groups and, if necessary, different stator modules 10 can be pulse-width modulated and energized synchronously with each other and sampled synchronously with each other.

[0168] Furthermore, in the case of simultaneous energization of a plurality of three-phase systems 150, the rotor 200 and thus at least one rotor coil 240 of the rotor 200 for inductively transmitting energy can be located within the influence area of the plurality of energized three-phase systems and be affected by the generated alternating magnetic field, which is formed by the superposition of a plurality of alternating magnetic fields, and each alternating magnetic field is caused by the ripple current flowing in the three-phase system 150. The alternating voltage induced in the rotor coil 240 of the rotor 200 depends on the generated alternating magnetic field. The pulse-width modulated energization of the three-phase systems 150 with time offsets from each other results in the ripple currents flowing in the three-phase systems 150 being offset or phase-shifted from each other in time and thus results in the time profiles of the alternating magnetic fields caused by the ripple currents being offset or phase-shifted from each other in time.

[0169] Based on two adjacent energized coil systems ​ This correlation is shown in. For the stator 5 of the planar drive system 1, this can relate, for example, to two three-phase systems 150 arranged side by side transversely or two three-phase systems 150 stacked on top of each other. ​ The upper two diagrams of show the voltage and current profiles as a function of time t, which can exist when two coil systems are electrically controlled with offset pulse-width modulation. A first control voltage s1(t) and thus a periodic fifth voltage pulse 411 are applied to the first coil system of the two coil systems, such that the first current i1(t) flowing in the first coil system has a triangular third current profile 431. In a corresponding manner, a second control voltage s2(t) and thus a periodic sixth voltage pulse 412 are applied to the second coil system of the two coil systems, such that the second current i2(t) flowing in the second coil system has a triangular fourth current profile 432. In both coil systems, current sampling coordinated with the respective pulse-width modulation control is also carried out at the current measurement times 470, which are respectively in the middle between successive fifth voltage pulses 411 or sixth voltage pulses 412.

[0170] According to ​For the two upper diagrams, the periodic electrical control and thus the energization of the two coil systems as well as the time-coordinated periodic sampling are each carried out in a time grid that is offset from one another and pre-given by a pulse-width-modulated clock frequency. Thus, there is a time offset 480 between the fifth and sixth voltage pulses 411, 412 and between the current measurement instants 470 related to the first and second coil systems, respectively. Due to the time offset 480, it is possible to temporarily increase the current value in one of the two coil systems while a decrease in the current value occurs in the other of the two coil systems.

[0171] For the fifth and sixth voltage pulses 411, 412, the time offset 480 can be related to the rising edges of the fifth and sixth voltage pulses 411, 412 as ​ shown. Alternatively, the time offset 480 can also be related to the centers of the fifth and sixth voltage pulses 411, 412. In contrast, this is not the case for the falling edges of the fifth and sixth voltage pulses 411, 412. This is because there is the possibility that the duty cycles (i.e., the ratio Ton / Ts) in the current regulation of the two coil systems have different magnitudes, although the same current is regulated in each case. The reason for this may be parameter scatter or other tolerances. If the duty cycles are different (even if only slightly), then the time offset 480 between the current measurement instants 470 is not equal to the time interval between the falling edges of the fifth and sixth voltage pulses 411, 412, but is equal to the time interval between the centers of the fifth and sixth voltage pulses 411, 412.

[0172] ​The penultimate figure shows the first curve of variation 451 of the virtual total current over time, which is formed by adding the currents i1(t), i2(t) or by adding the third and fourth curves of variation 431, 432 of the current. Also shown is the first time range 441 and the first curve of variation 461 of the magnetic field strength variation over time, in which there is a time overlap of the fifth and sixth voltage pulses 411, 412 with an offset. The first curve of variation 461 of the magnetic field strength relates to the temporal superposition of the alternating magnetic fields of two coil systems. For the first curve of variation 461 of the magnetic field strength variation, a fictitious magnitude scale is shown on the ordinate. In the first time range 441, the first curve of variation 451 of the virtual total current has the largest variation of the current value depending on the time t. The first curve of variation 461 of the magnetic field strength variation corresponds to the alternating magnetic field caused by the currents i1(t), i2(t) in the two coil systems and depends on the first curve of variation 451 of the virtual total current. In the first time range 441, this results in a maximum constructive superposition of the alternating magnetic field caused by the coil systems, and thus the largest variation of the magnetic field strength. In contrast, outside the first time range 441, the variation of the magnetic field strength is smaller, in which there is a partial attenuation superposition of the alternating magnetic field due to the offset energization of the two coil systems in the first time range.

[0173] In contrast, ​ The last or bottommost figure shows the case of electrically controlling two coil systems synchronously in time, i.e., when the first current i1(t) is applied to the two coil systems respectively. Also shown are the second curve of variation 452 of the virtual total current over time formed by adding the first current i1(t) or the third curve of variation 431 of the current twice, the second time range 442 corresponding to the fifth voltage pulse 411, and the second curve of variation 462 of the magnetic field strength variation over time, which depends on the second curve of variation 452 of the virtual total current. The second curve of variation 462 of the magnetic field strength variation relates to the superposition of the alternating magnetic fields of two coil systems. When the coil systems are controlled synchronously in time, there is only a constructive superposition of the alternating magnetic fields caused by the coil systems, and this superposition is maximum in the second time range 442. In this regard, the variation of the magnetic field strength is also greater in the case of synchronous time control than in the case of controlling the coil systems with a time offset, which can be seen from the comparison of the different curves of variation 461, 462 of the magnetic field strength variation. This applies in a corresponding manner to the alternating voltage that can be induced in at least one mover coil 240 of the mover 200.

[0174] In the planar drive system 1, a group consisting of three three-phase systems 150 is respectively assigned to the current measuring device 172 (see ​)。As described above, a design of the planar drive system 1 can be applied, in which the stator module 10 of the stator 5 or each stator module 10 is configured to perform the energization of the three-phase system 150 in the group and the coordinated periodic sampling with a time offset from each other, respectively.

[0175] In ​ this is shown for a possible voltage and current profile over time t for such a group consisting of three coil systems, all three coil systems being energized. A periodic fifth voltage pulse 411 is applied to the first coil system of the three coil systems, such that a triangular third current profile 431 exists in the first coil system. A periodic sixth voltage pulse 412 and a periodic seventh voltage pulse 413 are applied to the second and third coil systems, respectively, in a corresponding manner, whereby a triangular fourth current profile 432 is generated in the second coil system and a triangular fifth current profile 433 is generated in the third coil system. In each coil system, the current sampling is performed in time coordination with the respective electrical actuation, i.e., at current measurement times 470 that are respectively in the middle between successive fifth, sixth, and seventh voltage pulses 411, 412, 413. The current sampling is performed once per PWM period. It is also conceivable to perform the current sampling multiple times per PWM period, for example, twice.

[0176] As ​ shown, the electrical actuation and thus the energization of the three coil systems and the sampling coordinated therewith are performed offset from each other. A time offset 480 exists respectively between the periodic actuation of the first coil system and the periodic actuation of the second coil system and between the periodic actuation of the second coil system and the periodic actuation of the third coil system. In a corresponding manner, a time offset 480 exists respectively between the periodic sampling of the first coil system and the periodic sampling of the second coil system and between the periodic sampling of the second coil system and the periodic sampling of the third coil system. With respect to the fifth, sixth, and seventh voltage pulses 411, 412, 413, the time offset 480 corresponds to ​ It can relate to the rising edges of the fifth, sixth, and seventh voltage pulses 411, 412, 413. Alternatively, the time offset 480 can also relate to the centers of the fifth, sixth, and seventh voltage pulses 411, 412, 413.

[0177] Another effect that can occur when the coil systems are actuated with a time offset is that the change in the magnetic field strength of the generated magnetic field can depend on the location. In a corresponding manner, the alternating voltage that can be induced in at least one mover coil 240 of the mover 200 can depend on the position of the mover 200.

[0178] For further illustration, ​shows an arrangement of three adjacent three-phase systems 150 and spatial variation curves 465, 466, 467 of the magnetic field strength depending on the position x. These variation curves are hereinafter referred to as the first variation curve 466 of the magnetic field strength, the second variation curve 465 of the magnetic field strength, and the third variation curve 467 of the magnetic field strength. The three-phase system 150 can be the first three-phase system 151 or the second three-phase system 152 of the stator 5, as explained above with reference to ​ and ​ as explained. Correspondingly, the position x can relate to the first direction 12 or the second direction 14. In the three-phase system 150 shown in ​ , only two of the three-phase systems 150 are energized, and it is the left three-phase system 150 and the middle three-phase system 150 in ​ that are energized. The variation curves 465, 466, 467 of the magnetic field strength - which respectively illustrate the local strength of the magnetic field generated by the two energized three-phase systems 150 - relate to three different instants. The first spatial variation curve 466 of the magnetic field strength shown by a solid line has a continuous sinusoidal shape and can illustrate the average value of the strength of the generated magnetic field over time.

[0179] In the arrangement shown in ​ , the left three-phase system 150 and the middle three-phase system 150 are electrically controlled in a pulse-width modulated manner in the above-mentioned manner, whereby the three-phase system 150 is energized and the current flowing in the three-phase system 150 is affected by the ripple current. This results in fluctuations of the magnetic field strength over time in the magnetic field generated by the energized three-phase system 150 and thus in the generated magnetic field, as shown by the different variation curves 465, 466, 467 of the magnetic field strength existing at different instants.

[0180] According to ​ , the left three-phase system 150 and the middle three-phase system 150 are also pulse-width modulated and controlled with a time offset relative to each other. This can lead to the magnetic fields generated by the three-phase system 150 having different magnetic field strengths from each other in the transition region of the three-phase system 150. In this way, the generated magnetic field can have jumps or kinks 469 in the form of relatively large local variations of the magnetic field strength in the said transition region, as shown by the second and third variation curves 465, 467 of the magnetic field strength shown by the dashed lines in ​ . Thus, compared with the first variation curve 466 of the magnetic field strength, the second and third variation curves 465, 467 of the magnetic field strength only have a sinusoidal shape outside the said transition region. In the present case, the offset control of the three-phase system 150 thus results in the efficiency of the inductive energy transfer in the transition region of the three-phase system 150 possibly being lower than that in the remaining regions traversed by the generated magnetic field. In this regard, the inductive energy transfer can be location-dependent and thus dependent on the position of the mover 200.

[0181] In ​ , multiple positions called xmov-L / 2, xmov-L / 4, xmov, xmov+L4, and xmov+L / 2 are also indicated on the x-axis, where the change curves 465, 466, 467 of the magnetic field strength have peaks and zero-crossing points. The variable L can be the width of the three-phase system 150 or the stator sections 120, 121 and corresponds to ​ and ​ the section width 127 shown in. In addition, the central position of the mover 200 can be represented by xmov, and the center of the mover 200 and the center of at least one mover coil 240 of the mover 200 can be located at this central position.

[0182] In order to suppress as much as possible the damage to the inductive energy transfer caused by the offset control in the above design of the planar drive system 1 with a three-phase system 150 that is electrically controlled with an offset from each other, the following configuration regarding the planar drive system 1 can also be considered. In this case, the stator module 10 of the stator 5 or each stator module 10 is configured such that the time offset 480 (see ​ and ​ ) existing during the offset control of the three-phase system 150 is as small as possible or minimized. To this end, the time offset 480 can correspond to the sampling duration or the minimum sampling duration of the current measuring device 172, and the current measuring device 172 requires the sampling duration or the minimum sampling duration to simultaneously sample the currents of the associated three-phase system 150. In this way, when the three-phase system 150 is energized with an offset and the three-phase system 150 is sampled in coordination therewith, it can be achieved that the alternating magnetic fields of the energized three-phase system 150 are at least partially or largely structurally superimposed. As a result, the inductive energy transfer from the stator 5 to the mover 200 can be as effective as possible and also largely position-independent, and the fluctuations in the magnitude of the energy transfer can be relatively small. The minimum sampling duration, which can also be referred to as the sampling time, can be in the single-digit microsecond range, for example, and can be 1.2 μs.

[0183] Alternatively, the following design of the planar drive system 1 can also be applied. In this case, the stator module 10 of the stator 5 or each stator module 10 is configured to periodically sample the current of the multiphase system 150 in a pulse-width modulation (PWM) duty cycle coordinated manner with the multiphase system 150 in the first operating mode by means of the associated current measuring device 172. The multiphase system 150 is assigned to the current measuring device 172 for current sampling, and the PWM energization of the three-phase system 150 in the group is performed with a time offset from each other and the associated sampling is coordinated. The stator module 10 of the stator 5 or each stator module 10 is also configured to perform PWM energization of the three-phase system 150 in the group assigned to the current measuring device 172 in a time-synchronized manner with each other in the second operating mode, and to periodically sample the current flowing in the three-phase system in the group with a time offset from each other by means of the associated current measuring device 172. This design can also be provided for all current measuring devices 172 and the associated three-phase system 150 groups of the stator 5 of the planar drive system 1.

[0184] The time offsets set in the first and second operating modes can respectively correspond to the above-mentioned sampling duration or minimum sampling duration of the current measuring device 172. In addition, in the first and second operating modes, current sampling can be performed for each PWM cycle accordingly.

[0185] In the first operating mode, current regulation of the three-phase system 150 assigned to the current measuring device 172 and current sampling coordinated in time in the above-mentioned offset manner from each other are performed, as also shown in the two upper diagrams of ​ and ​ . If the inductive energy transfer from the stator 5 to the mover 200 is not required or the alternating voltage induced in at least one mover coil 240 of the mover 200 is not used, the first operating mode can be used. In the first operating mode, the current average value can be obtained as the actual current value as described above, which enables accurate current regulation.

[0186] In contrast, the second operating mode can be used to achieve as efficient an inductive energy transfer as possible from the stator 5 to the mover 200 in a targeted manner. In the second operating mode, the three-phase system 150 assigned to the current measuring device 172 in the group is PWM-energized synchronously with each other and thus with a common time grid.

[0187] ​The second operating mode is illustrated by means of the possible voltage and current profiles over time t for a group consisting of three coil systems, where all three coil systems are energized. A periodic fifth voltage pulse 411 is applied to the first coil system of the three coil systems, such that a triangular third current profile 431 exists in the first coil system. In a corresponding manner, the second and third coil systems are respectively controlled by a periodic sixth voltage pulse 412 and a periodic seventh voltage pulse 413, thereby generating a triangular fourth current profile 432 and a triangular fifth current profile 433 in the second and third coil systems, respectively. The fifth, sixth, and seventh voltage pulses 411, 412, 413 applied to the coil systems for pulse-width modulation energization are synchronized with each other in time and lie on a common time grid. This time grid is represented in ​ based on grid line 490. In the present case, grid line 490 and thus the time grid are related to the rising edges of the fifth, sixth, and seventh voltage pulses 411, 412, 413. Alternatively, grid line 490 and thus the time grid can also be related to the falling edges or the centers of the fifth, sixth, and seventh voltage pulses 411, 412, 413.

[0188] As described above, in the operation of the planar drive system 1, a plurality of three-phase systems 150 can be energized simultaneously to drive the mover 200. For this purpose, the main control device 500 outputs corresponding rated current values 300 to the associated current regulators 170 (see ​ ). It is also possible to energize a plurality of three-phase systems 150 from different groups simultaneously, and these plurality of three-phase systems are thus assigned to different current measuring devices 172 for current sampling. In a design where the stator 5 has a plurality of stator modules 10 (see ​ ), a plurality of simultaneously energized three-phase systems 150 can also be part of a plurality of adjacent stator modules 10. In this regard, the stator 5 or the stator modules 10 of the stator 5 or each stator module 10 can be configured such that in the second operating mode, a plurality of or all of the three-phase systems 150 to be energized can be pulse-width modulated energized synchronously with each other in time and thus in a common time grid, and these three-phase systems can be part of different groups and, if necessary, part of different stator modules 10.

[0189] When a plurality of three-phase systems 150 of the stator 5 are energized synchronously in time, as performed in the second operating mode, the ripple currents flowing in the three-phase systems 150 involved and the alternating magnetic fields thereby induced can be synchronous and in phase with each other, and can be superimposed completely or to a large extent structurally. In this way, a relatively large change in the magnetic field strength can be caused, as based on ​as shown in the last diagram. In a corresponding manner, a relatively large alternating voltage can be induced in at least one mover coil 240 of the mover 200, which enables an effective inductive energy transfer from the stator 5 to the mover 200. In addition, location-dependent effects based on ​ the explanations can be avoided, so that the energy transfer can be independent of the position of the mover 200.

[0190] In the second operating mode, the three-phase system 150 in the group is periodically sampled with a time offset from each other by means of the associated current measuring device 172. This is because, as described above, only one associated three-phase system 150 can be sampled simultaneously by means of the current measuring device 172 accordingly. In this sense, in the second operating mode, only one three-phase system 150 in the group assigned to the current measuring device 172 can be sampled by means of the current measuring device 172 involved in coordination with its pulse-width modulated energization, so that an average current value is obtained as the actual current value for this three-phase system 150. In contrast, this is not possible for the other three-phase systems 150 of the group because offset sampling from each other is performed.

[0191] In ​ this aspect is also shown. In this case, only the second coil system is sampled in coordination with its pulse-width modulated energization, so that the average current value can be detected as the actual current value. For this purpose, the current measurement instants 470 are respectively located in the middle between the sixth voltage pulses 412. The sampling of the first and third coil systems is performed with an offset therefrom. Compared with the sampling of the second coil system, the current measurement instants 470 are shifted forward in time in the first coil system and backward in time in the third coil system. Therefore, there is a time offset 480 respectively between the periodic sampling of the first coil system and the periodic sampling of the second coil system and between the periodic sampling of the second coil system and the periodic sampling of the third coil system. In this way, the current measurement instants 470 are not located in the middle between the sixth voltage pulses 412 or the seventh voltage pulses 413 in the first coil system and in the third coil system either, so that in this regard, an average current value cannot be obtained as the actual current value for either the first coil system or the third coil system. The time offset 480 can also correspond to the sampling duration or the minimum sampling duration of the current measuring device 172 here.

[0192] As a result, the accuracy of current regulation may be impaired when the planar drive system 1 is operating in the second operating mode. For example, it may occur that the current deviates from the rated current value in one or more energized three-phase systems 150. However, the second operating mode can be used only in a targeted manner to cause an effective inductive transfer of energy from the stator 5 to the mover 200 and thus used within a limited time, so that this impairment can be ignored.

[0193] The energization of the three-phase system 150 of the stator 5 of the planar drive system 1 corresponding to the first or second operating mode can be determined or initiated by the main control device 500 of the planar drive system 1. For this purpose, the main control device 500 can transmit corresponding control signals to one or more current regulators 170 or to one or more module control devices 190 of one or more stator modules 10 to predefine the corresponding operating mode (not shown).

[0194] To achieve an effective inductive energy transfer from the stator 5 to the mover 200, the following-described design of the planar drive system 1 can also be used. This design is based on intervening in a targeted manner in the current regulation described above based on ​ the explanation such that the ripple current flowing in the energized three-phase system 150 is amplified.

[0195] For illustration, ​ a block diagram of another regulating circuit for current regulation of the three-phase system 150 based on pulse width modulation is shown, and this regulating circuit can be provided in the planar drive system 1 for this purpose. ​ The shown regulating circuit basically corresponds to ​ the regulating circuit of ​ and, in addition to the main control device 500, also includes the above-mentioned components such as the module control device 190, the output stage device 180, the three-phase system 150, and the current measuring device 172.The module control device 190 includes a current regulator 170, a PWM signal generating device 171, and a processing device 173. For details of these components and their interaction, reference is made to the description for

[0196] ​ Another component of the regulating circuit shown in ​ is an optional activatable influencing device 175, which can be a component of the module control device 190 as shown in ​ If the influencing device 175 is not activated or switched on, the current regulation of the three-phase system 150 is carried out in the above-described manner as explained based on

[0197] When the influencing device 175 is activated or switched on, as shown in ​As shown, an influence signal 307 is generated by means of an influence device 175, and the influence signal is added to the control signal 301 output from the current regulator 170. The influence signal 307 can be an alternating voltage without an average value. The influence signal 307 can also reproduce an alternating voltage without an average value or the effect of such an alternating voltage. Adding the influence signal 307 to the control signal 301 results in a change or modulation of the control signal 301, such that the affected control signal 302 is transmitted to the PWM signal generation device 171. Based on this, the PWM signal generation device 171 generates a pulse-width modulated control signal 303, and the control signal is applied to the output stage or switch of the output stage device 180 as described above. Since the PWM signal generation device 171 receives the affected control signal 302 instead of the control signal 301, the pulse-width modulated control signal 303 generated by the PWM signal generation device 171 is also affected by the influence device 175, and an amplified ripple current flows in the three-phase system 150 energized by means of the output stage device 180.

[0198] The amplified ripple current generated by means of the influence device 175 can have a larger oscillation width than the ripple current present in the unaffected operation without the influence device 175. Correspondingly, the alternating magnetic field induced by the amplified ripple current and the alternating voltage that can be induced in at least one mover coil 240 of the mover 200 can have a larger oscillation width. In addition, the above use of the influence signal 307, which exists in the form of an alternating voltage without an average value or reflects the effect of such an alternating voltage, also keeps the average value of the current flowing in the energized three-phase system 150 and affected by the influence device 175 the same. This situation may be related to multiple PWM cycles. In addition, by means of the influence device 175, the magnitude or oscillation width of the ripple current can be affected independently of the average value of the current flowing in the three-phase system 150.

[0199] For further illustration, ​ possible voltage and current curves over time t are shown, which may occur during pulse-width modulation energization of the coil system in the unaffected state and the state affected by the influence device 175. ​ The upper diagram above illustrates the unaffected electrical control of the coil system. A periodic first voltage pulse 410 is applied to the coil system, such that a triangular first current curve 430 exists in the coil system. The current oscillates back and forth around the current average value 439. For this current, a fictional magnitude scale is shown on the vertical axis. For time t, a fictional magnitude scale is also shown on the horizontal axis.

[0200] In contrast, ​The following figure shows possible situations that may exist when electrically controlling the coil system using the influencing device 175. In the example shown in the current situation, two eighth voltage pulses 415 and two ninth voltage pulses 416 are alternately applied to the coil system in a periodic manner. To achieve the desired effect of maintaining the same average current, the eighth and ninth voltage pulses 415, 416 can be, for example, voltage pulses triggered by the first voltage pulse 410, where twice the pulse width of the first voltage pulse 410 is added (eighth voltage pulse 415) or subtracted (ninth voltage pulse 416). In this way, the pulse duration of the eighth voltage pulse 415 can be three times the pulse duration of the unaffected first voltage pulse 410. Regarding the ninth voltage pulse 416, the subtraction will result in a negative pulse width, which has an absolute value corresponding to the pulse width of the first voltage pulse 410. Therefore, equivalently, the ninth voltage pulse 416 is generated in such a way that the ninth voltage pulse 416 has the same pulse duration as the unaffected first voltage pulse 410 and has a polarity opposite to that of the first voltage pulse 410 and thus also opposite to that of the eighth voltage pulse 415. Due to the periodic eighth and ninth voltage pulses 415, 416, a triangular third current variation curve 437 is generated in the coil system, which has a greater oscillation width compared to the unaffected first current variation curve 430. Here, the current also oscillates back and forth around the same average value 439, but is related to multiple PWM periods or cycle durations.

[0201] For ​ the regulation loop shown, the following possibilities exist: The stator module 10 of the stator 5 or each stator module 10 has a single influencing device 175. In this case, the influencing device 175 of the stator module 10 can be configured to influence the control signal 301 generated by one, several, or all current regulators 170 of the associated stator module 10 in the above-described manner. For each three-phase system 150 of the stator module 10 and thus for each current regulator 170, the stator module 10 or each stator module 10 can also have its own influencing device 175. In this design, the stator module 10 or each stator module 10 can have twenty-four influencing devices 175, by means of which the control signal 301 from each current regulator 170 can be influenced. As ​ shown, the influencing device 175 or the plurality of influencing devices 175 of the stator module 10 can be integrated in the associated module control device 190.

[0202] To influence the current regulation, it is also possible to consider in connection with ​In a different, not shown design, the influencing signal 307 generated by the influencing device 175 is added to the pulse-width modulated control signal 303 generated by the PWM signal generating device 171, such that a modified or influenced pulse-width modulated control signal is applied to the output stage or the switches of the output stage device 180. Thereby, the electrical control of the three-phase system 150 can be influenced correspondingly, and thereby the amplification of the ripple current is triggered. In such a design, the stator module 10 of the stator 5 or each stator module 10 can also have a single influencing device 175 or multiple or twenty-four influencing devices 175, by means of which the pulse-width modulated control signals 303 of one, several or all PWM signal generating devices 171 from the associated stator module 10 are influenced.

[0203] As described above, during the operation of the planar drive system 1, multiple three-phase systems 150 can be energized simultaneously to drive the mover 200. The multiple simultaneously energized three-phase systems 150 can be part of multiple groups, i.e., assigned to multiple current measuring devices 172, or can be part of multiple stator modules 10. In this context, in multiple or all of the three-phase systems 150 to be energized, the current regulation can be intervened in a manner that amplifies the ripple current by means of one or more influencing devices 175. In this way, the alternating magnetic field generated by the three-phase system 150 and thus the generated alternating magnetic field can be amplified, and the alternating voltage that can be induced in at least one mover coil 240 of the mover 200 can be amplified correspondingly. This enables an effective inductive energy transfer from the stator 5 to the mover 200.

[0204] The activation and deactivation of one or more influencing devices 175 for influencing the current regulation of one or more three-phase systems 150 can be initiated by the main control device 500 of the planar drive system 1. For this purpose, the main control device 500 can transmit corresponding control signals to one or more influencing devices 175 or to one or more module control devices (not shown) of one or more stator modules 10.

[0205] Based on ​ and ​ The designs in which the current regulation can be influenced, as explained, can be combined with the design of the planar drive system 1 described above. This includes designs in which the three-phase system 150 is energized with an offset (see ​ ), and designs having a first and a second operating mode, in which the three-phase systems 150 are energized synchronously with each other in the second operating mode (see ​)。Regarding the latter design, in this case it can be stipulated that in the second operating mode, these three-phase systems 150 are to be energized synchronously with each other and the current regulation of the three-phase systems 150 involved is to be affected by activating one or more influencing devices 175 such that amplified ripple currents flow in the three-phase systems 150.

[0206] The following discusses further possible details that can be considered regarding the rotor 200 and at least one rotor coil 240 of the rotor 200 for inductively transmitting energy.

[0207] As explained above based on ​ the rotor 200 can have a first printed circuit board 230 with at least one rotor coil 240, which is arranged in the region surrounded by the rotor magnets 216 of the magnet device 201 of the rotor 200. In this way, the first printed circuit board 230 can be integrated into the rotor 200 relatively simply. To further illustrate this design, ​ a perspective view of the stator module 10 of the stator 5 and the rotor 200 is shown, wherein the rotor 200 is shown in a partial cross-section. Based on this illustration, the possible size and position of the first printed circuit board 230 of the rotor 200 become clear. In the present case, the first printed circuit board 230 has a rectangular or square contour. Also for illustration, ​ a top view of the stator module 10 and the rotor 200 is shown, wherein the magnet device 201 and the contour of the first printed circuit board 230 are shown in the rotor 200, and the rotor coil 240 is shown.

[0208] ​ 、 ​ and ​ the first printed circuit board 230 shown in can have a thickness of, for example, 1 mm. In addition, the first printed circuit board 230 can be implemented as multi-layered and have a plurality of rotor coils 240 stacked on top of each other and electrically connected to each other. Thereby, effective inductive energy transfer from the stator 5 to the rotor 200 can be achieved. The rotor coils 240 can be realized by mutually connected spiral printed conductors of the multi-layered first printed circuit board 230.

[0209] To illustrate this design, ​ an exploded view of the components of the first printed circuit board 230 is shown. The first printed circuit board 230 includes a plurality of spiral metal first printed conductors 241 arranged in different layers of the first printed circuit board 230, and each first printed conductor forms a rotor coil 240. The first printed conductors 241 can be serially electrically connected via an unshown electrical vertical connection structure of the first printed circuit board 230.

[0210] ​A top view of the spiral-shaped first printed conductor 241 of the first printed circuit board 230 is shown, and the first printed conductor serves as the mover coil 240. The shown structure can be applied to all the first printed conductors 241 of the first printed circuit board 230. The first printed conductor 241 has a substantially rectangular or square outer contour and encloses a substantially rectangular or square inner region. The first printed conductor 241 also has a relatively high number of windings. In addition, in ​ the outer width 251 related to the outer contour and the inner width 252 related to the inner contour of the first printed conductor 241 are shown. In this case, the outer width 251 can be, for example, 0.85L, and the inner width 252 can be, for example, 0.4L. As described above, the variable L can be the width of the three-phase system 150 or the stator segments 120, 121, and can correspond to ​ and ​ the segment width 127 shown therein.

[0211] Regarding the utilization of the alternating voltage induced in at least one mover coil 240, the mover 200 can also have a rectifier 260, as ​ shown. By means of the rectifier 260 electrically connected to one or more mover coils 240 in an appropriate manner, the induced alternating voltage can be converted into a direct current voltage. The rectifier 260 can be, for example, a bridge rectifier or a synchronous rectifier. In addition, the rectifier 260 can be implemented as a voltage amplifier or a voltage multiplier, for example.

[0212] The direct current voltage provided by the rectifier 260 can be used to supply electrical energy to at least one additional device 261. As ​ shown, the additional device 261 can be a component of the mover 200 and / or can be arranged on the mover 200. The additional device 261 is also electrically connected to the rectifier 260 in an appropriate manner. For example, the additional device 261 can be an electronic device. There is also a possibility that the direct current voltage provided by the rectifier 260 can be used to supply power to a plurality of additional devices, which can be components of the mover 200 and / or arranged on the mover 200 (not shown).

[0213] The design of the mover 200 having a rectifier 260 for powering at least one additional device 261 can be considered correspondingly with respect to the design explained below based on ​ the following.

[0214] ​ Another design that can be provided for the mover 200 is shown in a perspective view from below. In this case, the mover 200 has a second printed circuit board 231 with a plurality of mover coils 240, and the second printed circuit board 231 is arranged on the lower side and is located ​Below the magnet device 201 not shown in the figure. The second printed circuit board 231 extends substantially over the entire surface of the mover 200. In this way, a relatively large coil area can be provided, which promotes the effective energy transfer from the stator 5 to the mover 200. The second printed circuit board 231 can likewise be implemented as multilayered.

[0215] In ​ the design shown, the flying height of the mover 200 can be reduced by the thickness of the second printed circuit board 231. It is thus conceivable that a second printed circuit board 231 with a smaller thickness and fewer layers is realized compared to ​ , ​ and ​ the first printed circuit board 230 shown. For example, a design of the second printed circuit board 231 with a thickness of 0.3 mm and two layers as shown in the exploded view in ​ is possible. According to ​ , the second printed circuit board 231 has four spiral-shaped metallic second printed conductors 245 arranged side by side in each of the two layers, and each second printed conductor forms a mover coil 240. The second printed conductors 245 can have fewer turns than the first printed conductors 241 (see ​ ), and can be connected to each other via a suitable electrical connection structure.

[0216] ​ Another design that can be applied to the mover 200 is shown. In this case, the mover 200 has a plurality of or four third printed circuit boards 232, which are arranged in the lateral outer regions of the mover 200. The third printed circuit boards 232 can be multilayer printed circuit boards and have a thickness of, for example, 1 mm. In addition, the third printed circuit boards 232 can have a plurality of spiral printed conductors (not shown) stacked on top of each other and serving as mover coils 240. The number of layers can, for example, correspond to ​ the first printed circuit board 230 shown in. In addition, the third printed circuit boards 232 can be integrated in the spacers 204 of the mover 200, and the spacers 204 can be present in the lateral outer regions of the mover 200.

[0217] Another design of the mover 200 not shown is, for example, the following modification of the design shown in ​ , namely that the mover 200 has only two third printed circuit boards 232 instead of four third printed circuit boards 232, which are arranged in the lateral outer regions of the mover 200 or integrated in the spacers 204 of the mover 200. In this case, the two third printed circuit boards 232 can extend in different lateral directions. Referring to ​ , for example, it can be provided only in ​Two printed circuit boards 232 arranged in the upper and left sides in the illustration.

[0218] ​ The perspective view and the view observed from below show another design that can be considered for the mover 200. In this case, the mover 200 has a mover coil 240, which is configured in the form of a metal wire 270 wound once or multiple times. In this design, the mover coil 240 has a plurality of surrounding wire windings (not shown). The mover coil 240 is also arranged in the lateral outer region of the mover 200, and the mover coil 240 surrounds or encloses the magnet device 201 of the mover 200. In this way, energy can be inductively transferred from the stator 5 to the mover 200 with high efficiency, and a relatively large amount of electric power can be transferred.

[0219] According to ​ the design shown, the mover 200 also has a peripheral spacer structure 205 and a fourth printed circuit board 233. The spacer structure 205 can be made of an elastically deformable material or plastic or formed by an elastically deformable material or plastic. The mover coil 240 is integrated in the spacer structure 205, as can be seen from ​ and ​ . For the sake of illustration of this design, ​ the spacer structure 205 is omitted. For further illustration, ​ only the mover coil 240, the magnet device 201 and the fourth printed circuit board 233 of the mover 200 are shown.

[0220] The fourth printed circuit board 233 of the mover 200 is also integrated in the spacer structure 205 (see ​ ). The fourth printed circuit board 233 can have the components described above based on ​ , such as a rectifier 260 electrically connected to the mover coil 240. By means of this rectifier 260, the alternating voltage induced in the mover coil 240 can be converted into a direct current voltage. In this way, as also explained above based on ​ , at least one other mover 261 can be powered by the direct current voltage provided by the rectifier 260. The other device 261 can also be integrated on the fourth printed circuit board 233.

[0221] ​ The wire connection ends 271 of the mover coil 240 in the form of the winding wire 270 are also illustrated. The mover coil 240 can be contacted through the wire connection ends 271 and electrically connected to the fourth printed circuit board 233. According to ​In the design shown, the mover coil 240 has three wire connection ends 271, and one of the wire connection ends 271 can be used as a center tap. In this case, the mover coil 240 can have, for example, seventy wire windings, and through the center tap, a division into sixty wire windings and ten wire windings can be achieved. Thus, ten wire windings of the mover coil 240 can be short-circuited within the scope of load modulation, which is not further described here. For energy transmission, all seventy wire windings or sixty wire windings of the mover coil 240 can be used. If load modulation is not used, the mover coil 240 can also have only two wire connection ends 271 and no center tap (not shown). In addition, it should be noted that, different from the illustrations in ​ and 29 , the wire connection ends 271 cannot protrude from the side of the mover 200 or from the spacer structure 205.

[0222] Through the described method and the planar drive system 1, electric power of, for example, up to 10 W, for example, up to 1 W, or for example, up to 100 mW can be transmitted from the stator 5 to the mover 200. However, other or greater power values are also possible.

[0223] The transmitted electrical energy can be used for different applications. A series of non-exhaustive applications are described below. The transmitted energy can also be used simultaneously for combinations of the following applications.

[0224] To provide more power on the mover 200 than the electric power inductively transmitted from the stator 5 to the mover 200, the mover 200 can include a charging circuit and an energy storage device (such as a battery or a capacitor) for charging the energy storage device. Via the connection between the mover coil 240 and the charging circuit, the inductively transmitted power can be used to charge the energy storage device. The charged energy storage device can then output the stored energy to the electronic components on the mover 200 again.

[0225] The electric motor on the mover 200 can be driven by the electric power available on the mover 200. This motor can be used to grasp or fix or rotate or lift an object on the mover 200, or to move other mechanical components or work chains, such as a robot.

[0226] In addition, a communication device, especially a communication device for wireless communication, can be operated on the mover 200. This communication device can be used to exchange data between the mover 200 and the stator 5 or the planar drive system 1 or other communication partners.

[0227] Using the electric power available on the mover 200, a sensor can also be operated on the mover 200, which can, for example, measure temperature or the distance to surrounding objects.

[0228] The mover 200 may also include a lighting device that can operate using the transmitted or stored energy. The light generated can be used, for example, to illuminate a building, and for effective indoor lighting, such a mover 200 with a corresponding sensor system can follow a person moving through the building to achieve targeted indoor lighting at the person's stopping locations. Additionally, the light generated can be, for example, in the infrared spectrum and can also be used for communication or to trigger a signal in a corresponding sensor to, for example, open a lock separating the separate working areas of the planar drive system 1.

[0229] The electrical energy transmitted on the mover 200 can also operate a compressor for gases such as indoor air or a vacuum pump on the mover 200. The gas, gas mixture, or indoor gas generated in this way with overpressure or underpressure compared to the atmosphere can be used, for example, to manipulate a product transported on the mover 200. For example, the packaging of a product can be inflated or kept open under overpressure, or the air can be sucked out of the packaging under negative pressure before sealing, especially for food packaging. Additionally, the product can be adsorbed or held on the mover 200 by means of underpressure.

[0230] The electrical energy on the mover 200 can also operate a Peltier element representing an electrothermal converter. The Peltier element on the mover can be used both for cooling and for heating a product transported on the mover 200. Thus, for example, food can be cooled during transportation with the planar drive system 1 so that the food deteriorates more slowly. Additionally, a product to which solder has been applied can be heated purposefully so that the solder remains liquid until a subsequent processing step.

[0231] Although the present invention has been illustrated and described in detail by preferred embodiments, the present invention is not limited by the disclosed examples, and those skilled in the art can derive other variations therefrom without departing from the scope of protection of the present invention.

[0232] List of reference numerals

[0233] 1 Planar drive system

[0234] 5 Stator

[0235] 10 Stator module

[0236] 11 Stator surface

[0237] 12 First direction

[0238] 14 Second direction

[0239] 15 Third direction

[0240] 16 Connection line

[0241] 18 Module housing

[0242] 21 Outer edge

[0243] 32 Lower side

[0244] 33 Side surface

[0245] 100 Stator unit

[0246] 104 First stator layer

[0247] 106 Second stator layer

[0248] 108 Additional stator layer

[0249] 110 First stator sector

[0250] 112 Second stator sector

[0251] 113 Third stator sector

[0252] 114 Fourth stator sector

[0253] 120 First stator section

[0254] 121 Second stator section

[0255] 125 Stator conductor

[0256] 127 Section width

[0257] 131 First positive conductor

[0258] 132 First return conductor

[0259] 141 Second positive conductor

[0260] 142 Second return conductor

[0261] 146 Third positive conductor

[0262] 147 Third return conductor

[0263] 150 Three-phase system

[0264] 151 First three-phase system

[0265] 152 Second three-phase system

[0266] 154 First connection point

[0267] 155 Second connection point

[0268] 156 Third connection point

[0269] 157 Star point

[0270] 165 First coil

[0271] 166 Second coil

[0272] 167 Third coil

[0273] 170 Current regulator

[0274] 171 PWM signal generation device

[0275] 172 Current measurement device

[0276] 173 Processing device

[0277] 175 Influence device

[0278] 180 Output stage device

[0279] 181 First switch

[0280] 182 Second switch

[0281] 183 Third switch

[0282] 184 Fourth switch

[0283] 185 Fifth switch

[0284] 186 Sixth switch

[0285] 190 Module control device

[0286] 200 Rotor

[0287] 201 Magnet device

[0288] 204 Spacer

[0289] 205 Spacer structure

[0290] 206 First rotor direction

[0291] 208 Second rotor direction

[0292] 210 First magnet unit

[0293] 212 Second magnet unit

[0294] 213 Third magnet unit

[0295] 214 Fourth magnet unit

[0296] 216 Rotor magnet

[0297] 230 First printed circuit board

[0298] 231 Second printed circuit board

[0299] 232 Third printed circuit board

[0300] 233 Fourth printed circuit board

[0301] 240 Rotor coil

[0302] 241 First printed wire

[0303] 245 Second printed wire

[0304] 251 Outer width

[0305] 252 Inner width

[0306] 260 Rectifier

[0307] 261 Another device

[0308] 270 Wire

[0309] 271 Wire connection terminal

[0310] 300 Rated current value

[0311] 301 Control signal

[0312] 302 Affected control signal

[0313] 303 Pulse-width modulated control signal

[0314] 304 Actual current value

[0315] 305 Processed actual current value

[0316] 307 Influence signal

[0317] 410 First voltage pulse

[0318] 411 Fifth voltage pulse

[0319] 412 Sixth voltage pulse

[0320] 413 Seventh voltage pulse

[0321] 415 Eighth voltage pulse

[0322] 416 Ninth voltage pulse

[0323] 421 Second voltage pulse

[0324] 422 Third voltage pulse

[0325] 423 Fourth voltage pulse

[0326] 430 First current change curve

[0327] 431 Third current change curve

[0328] 432 Fourth current change curve

[0329] 433 Fifth current change curve

[0330] 435 Second current change curve

[0331] 437 Third current change curve

[0332] 439 Average current

[0333] 441 First time range

[0334] 442 Second time range

[0335] 451 First change curve of virtual total current

[0336] 452 Second change curve of virtual total current

[0337] 461 First change curve of magnetic field intensity change

[0338] 462 Second change curve of magnetic field intensity change

[0339] 465 Second change curve of magnetic field intensity

[0340] 466 First change curve of magnetic field intensity

[0341] 467 Third change curve of magnetic field intensity

[0342] 469 Bend

[0343] 470 Current measurement moment

[0344] 480 Time offset

[0345] 490 Grid line

[0346] 500 Main control device

[0347] 601 First side

[0348] 602 Second side

[0349] i1 First current

[0350] i2 Second current

[0351] s1 First control voltage

[0352] s2 Second control voltage

[0353] t Time

[0354] Ton pulse duration

[0355] Toff rest duration

[0356] Ts cycle duration

[0357] x distance

[0358] Ud intermediate circuit voltage

[0359] U first phase

[0360] V Second phase

[0361] W third phase

Claims

1. A planar drive system (1) having a stator (5) and a mover (200), wherein the stator (5) has a plurality of stator conductors (125), wherein the mover (200) has a magnet arrangement (201) with at least one mover magnet (216), wherein the mover (200) has at least one mover coil (240), wherein the stator (5) is configured to energize the stator conductors (125), wherein a magnetic interaction can be induced between the energized stator conductors (125) of the stator (5) and the magnet arrangement (201) of the mover (200) to drive the mover (200), wherein the stator (5) is configured to energize the stator conductors (125) by current regulation based on pulse width modulation to drive the mover (200), such that a clock-controlled voltage is applied to the stator conductors (125) to be energized by means of pulse width modulation and thus a periodically voltage pulse subjected to pulse width modulation is applied, wherein due to the current regulation based on the pulse width modulation, a ripple current can be generated in the energized stator conductors (125) of the stator (5) and thus an alternating magnetic field is generated, wherein due to the alternating magnetic field, an alternating voltage can be induced in at least one mover coil (240) of the mover (200), wherein the stator (5) has an optional activatable influencing device (175) configured to influence the current regulation such that an amplified ripple current can be generated in the energized stator conductors (125) of the stator (5) and thus an amplified alternating magnetic field can be generated, and wherein the amplified ripple current and the amplified alternating magnetic field have a greater oscillation width compared to the ripple current and the alternating magnetic field in a state where the current regulation is not influenced by the influencing device (175).

2. The planar drive system according to claim 1, wherein, The mover (200) has a rectifier (260) for converting the induced alternating voltage into a direct voltage.

3. The planar drive system according to any one of the preceding claims, wherein the magnet arrangement (201) of the mover (200) has a plurality of mover magnets (216) surrounding a region, and wherein at least one mover coil (240) of the mover (200) is arranged in the region surrounded by the mover magnets (216), and / or wherein the mover (200) has a plurality of mover coils (240) arranged in a region below the magnet arrangement (201) of the mover (200), and / or wherein the mover (200) has a plurality of mover coils (240) arranged in a lateral outer region of the mover (200).

4. The planar drive system according to any one of the preceding claims, wherein, At least one mover coil (240) of the mover (200) is configured in the form of a winding (270) and surrounds the magnet arrangement (201) of the mover (200).

5. The planar drive system according to any one of the preceding claims, wherein the stator conductors (125) of the stator (5) are interconnected to form a multiphase system (150) that can be energized independently of each other, wherein the stator (5) is configured to perform separate current regulation for each multiphase system (150), wherein the stator (5) has a plurality of current measuring devices (172) for performing current regulation, wherein these current measuring devices (172) are respectively connected to a group composed of a plurality of multiphase systems (150), and wherein the current measuring devices (172) are configured to sample the current flowing in the multiphase systems (150) of each associated group and perform current sampling only simultaneously with respect to one of the multiphase systems (150).

6. The planar drive system according to claim 5, wherein the stator (5) is configured to sample the current of the multiphase systems (150) in the group by means of the associated current measuring devices (172) in time coordination with the pulse-width modulated energization time of the multiphase systems (150) in the group, wherein the stator (5) is further configured to perform pulse-width modulated energization of the multiphase systems (150) in the group with a time offset from each other and sampling coordinated with this energization, and wherein the time offset corresponds to the sampling duration of the current measuring devices (172).

7. The planar drive system according to claim 5, wherein the stator (5) is configured to sample the current of the multiphase systems (150) in the group by means of the associated current measuring devices (172) in time coordination with the pulse-width modulated energization time of the multiphase systems (150) in the group in a first operating mode, and the pulse-width modulated energization of the multiphase systems (150) in the group and the sampling coordinated therewith are performed with a time offset from each other, and wherein the stator (5) is further configured to perform pulse-width modulated energization of the multiphase systems (150) in the group synchronously with each other in a second operating mode, and sample the current flowing in the multiphase systems (150) in the group with a time offset from each other by means of the associated current measuring devices (172).

8. The planar drive system according to any one of the preceding claims, Among them, wherein the influence on the current regulation by the influencing means (175) is carried out in such a way that the average value of the current flowing in the energized stator conductors (125) remains constant.

9. The planar drive system according to any one of the preceding claims, wherein the stator (5) has a plurality of current regulators (170), PWM signal generating means (171), output stage means (180) connected to the stator conductors (125), and current measuring devices (172) for performing current regulation, wherein the current regulators (170) are configured to generate a control signal (301), and the control signal (301) is transmitted to the PWM signal generating means (171), wherein the PWM signal generating means (171) is configured to generate a pulse-width modulated control signal (303) applied to the output stage means (180), wherein the output stage device (180) is configured to apply voltage pulses to the stator conductors (125) based on a pulse-width modulated control signal (303), and wherein the influencing device (175) is configured to generate an influencing signal (307), which is added to the control signal (301) generated by one or more current regulators (170) or to the pulse-width modulated control signal (303) generated by one or more PWM signal generating devices (171).

10. The planar drive system according to claim 9, wherein due to the influencing signal, voltage pulses having different pulse durations and / or opposite polarities to each other are applied to the stator conductors (125).

11. A method for operating a planar drive system (1), wherein the planar drive system (1) has a stator (5) and a mover (200), wherein the stator (5) has a plurality of stator conductors (125), wherein the mover (200) has a magnet arrangement (201) with at least one mover magnet (216), wherein the mover (200) has at least one mover coil (240), wherein by energizing the stator conductors (125) of the stator (5), a magnetic interaction is induced between the energized stator conductors (125) and the magnet arrangement (201) of the mover (200) to drive the mover (200), wherein the stator conductors (125) are energized by current regulation based on pulse-width modulation to drive the mover (200) such that a clock-controlled voltage is applied to the stator conductors (125) to be energized by means of pulse-width modulation and thus periodic voltage pulses modulated by pulse-width are applied, wherein due to the current regulation based on the pulse-width modulation, a ripple current is generated in the energized stator conductors (125) of the stator (5) and thus an alternating magnetic field is generated, wherein an alternating voltage is induced in the mover coils (240) of the mover due to the alternating magnetic field, wherein the current regulation is influenced by means of an optional activatable influencing device (175) of the stator (5) such that an amplified ripple current is generated in the energized stator conductors (125) of the stator (5) and thus an amplified alternating magnetic field is generated, and wherein the amplified ripple current and the amplified alternating magnetic field have a greater oscillation width than the ripple current and the alternating magnetic field in a state where the current regulation is not influenced by the influencing device (175).

12. The method according to claim 11, wherein the stator conductors (125) of the stator (5) are interconnected to form a polyphase system (150) that can be energized independently of each other, wherein its own current regulation is performed for each energized polyphase system (150), wherein the stator (5) has a plurality of current measuring devices (172) for performing current regulation, wherein these current measuring devices (172) are respectively connected to a group formed by a plurality of polyphase systems (150), and wherein the current flowing in the energized multiphase system (150) of each associated group is sampled by means of the current measuring device (172), and the current sampling is carried out simultaneously only with respect to one of the multiphase systems (150).

13. The method according to claim 12, wherein the current of the multiphase system (150) in the group is sampled by means of the associated current measuring device (172) in time coordination with the pulse-width modulated energization time of the multiphase system (150) in the group, wherein the multiphase systems (150) in the group are pulse-width modulated and energized and sampled in time coordination with the energization with a time offset from each other, and wherein the time offset corresponds to the sampling duration of the current measuring device (172).

14. The method according to claim 12, wherein in a first operating mode, the current of the multiphase system (150) in the group is sampled by means of the associated current measuring device (172) in time coordination with the pulse-width modulated energization time of the multiphase system (150) in the group, and the pulse-width modulated energization of the multiphase system (150) in the group and the sampling coordinated therewith are carried out with a time offset from each other, and wherein in a second operating mode, the multiphase systems (150) in the group are pulse-width modulated and energized in time synchronization with each other, and the current flowing in the multiphase systems (150) in the group is sampled by means of the associated current measuring device (172) with a time offset from each other.

15. A stator (5) for a planar drive system (1) for driving a mover (200), wherein the mover (200) has a magnet arrangement (201) with at least one mover magnet (216) and at least one mover coil (240), wherein the stator (5) has a plurality of stator conductors (125), wherein the stator (5) is configured to energize the stator conductors (125) such that a magnetic interaction can be induced between the energized stator conductors (125) of the stator (5) and the magnet arrangement (201) of the mover (200) to drive the mover (200), wherein the stator (5) is configured to carry out the energization of the stator conductors (125) by means of pulse-width modulation-based current regulation to drive the mover (200), such that a clock-controlled voltage is applied to the stator conductors (125) to be energized by means of pulse-width modulation and thus a periodically voltage pulse subjected to pulse-width modulation is applied, wherein due to the pulse-width modulation-based current regulation, a ripple current can be generated in the energized stator conductors (125) of the stator (5) and thus an alternating magnetic field can be generated, and an alternating voltage can be induced in at least one mover coil (240) of the mover (200) by means of the alternating magnetic field, wherein the stator (5) has an optional activatable influencing device (175) which is configured to influence the current regulation such that an amplified ripple current is generated in the energized stator conductors (125) of the stator (5) and thus an amplified alternating magnetic field is generated. and the amplified ripple current and amplified alternating magnetic field therein have a greater oscillation width than the ripple current and the alternating magnetic field in a state where the current regulation is not affected by the influence device (175).

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