Control methods for the environment forming device, storage medium, and air supply fan

Abstract

This invention provides an environmental testing apparatus, a storage medium, and a control method for air supply fans. The environmental testing apparatus includes: multiple air supply fans that circulate conditioned air between an air-conditioned room and a test chamber; multiple temperature sensors that measure the temperature of multiple locations within the test chamber and output their temperature data; and a control unit capable of individually setting the rotational speed of each air supply fan. During a setting period prior to the test, the control unit performs a setting process for setting the rotational speed of each air supply fan during the test. In this setting process, the control unit repeatedly changes the rotational speed of the multiple air supply fans and acquires multiple temperature data points from the multiple temperature sensors after each change. This can eliminate or reduce the non-uniformity of environmental elements within the environmental formation chamber.

Description

Technical Field

[0001] The present invention relates to an environment forming apparatus, a computer-readable storage medium storing a program that enables a computer controlling the environment forming apparatus to function as a setting unit, and a method for controlling a blower fan. Background Technology

[0002] Environmental testing is known as a test used to evaluate the performance of test objects such as electronic components. In environmental testing, the performance of the test object is evaluated by applying environmental pressure, such as temperature, to the test object housed in a test chamber. Furthermore, environmental testing apparatus is known as a device for conducting environmental tests. For example, as shown in Japanese Patent Publication No. 2014-115205, the environmental testing apparatus according to the background art includes: a test chamber surrounded by an insulating shell; an air-conditioned room communicating with the test chamber; an air conditioning unit such as a heater and cooler disposed in the air-conditioned room; and a blower that delivers air-conditioned air generated by the air conditioning unit from the air-conditioned room to the test chamber. As the blower, a single blower fan is disposed on one side wall of the test chamber.

[0003] In the environmental testing apparatus described in the background art, a blower fan is positioned approximately at the center of the side wall. In this type of apparatus, the airflow directed towards the periphery of the test chamber is relatively less than the airflow directed towards the center. Therefore, a temperature difference sometimes occurs between the periphery and the center of the test chamber. Furthermore, when multiple test subjects are arranged and housed within the test chamber, the conditioned air delivered from the blower may sometimes be blocked by upstream test subjects, making it difficult to reach downstream test subjects. This can also cause a temperature difference between the upstream and downstream sides of the airflow path within the test chamber. As described above, in the environmental testing apparatus described in the background art, the temperature distribution within the test chamber can sometimes become unexpectedly uneven due to various reasons. Summary of the Invention

[0004] The purpose of this invention is to provide an environment-forming device, a storage medium, and a method for controlling a blower fan that can eliminate or reduce uneven environmental elements in an environment-forming room.

[0005] One aspect of the present invention relates to an environment forming apparatus, comprising: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of air supply fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; a plurality of measuring units for measuring the environmental elements at a plurality of locations within the environment forming chamber and outputting a plurality of measurement values; and a setting unit capable of individually setting the rotational speed of each of the plurality of air supply fans, wherein the setting unit performs a setting process during a setting period prior to the processing period of the processing, namely, changing the rotational speed of the plurality of air supply fans multiple times and acquiring the plurality of measurement values ​​after each change, and setting the rotational speed of each air supply fan during the processing period based on the plurality of measurement values.

[0006] Another aspect of the present invention relates to a storage medium, a computer-readable storage medium, for storing a program that enables a computer controlling an environment forming apparatus to function as a setting unit, wherein the environment forming apparatus includes: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of air supply fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; and a plurality of measuring units for measuring the environmental elements at a plurality of locations within the environment forming chamber and outputting a plurality of measurement values, wherein the setting unit is capable of: individually setting the rotational speed of each of the plurality of air supply fans; and performing a setting process during a setting period prior to the processing of the process, namely, changing the rotational speed of the plurality of air supply fans multiple times and acquiring the plurality of measurement values ​​after each change, and setting the rotational speed of each air supply fan during the processing period based on the acquired plurality of measurement values.

[0007] Another aspect of the present invention relates to a method for controlling a blower fan, which is a method for controlling a blower fan of an environment forming apparatus. The environment forming apparatus includes: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of blower fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; a plurality of measuring units for measuring the environmental elements at multiple locations within the environment forming chamber and outputting multiple measurement values; and a setting unit capable of individually setting the rotational speed of each of the plurality of blower fans. The setting unit performs a setting process during a setting period prior to the processing period in which the processing is performed, namely, changing the rotational speed of the plurality of blower fans multiple times and acquiring the multiple measurement values ​​after each change, and setting the rotational speed of each blower fan during the processing period based on the acquired multiple measurement values.

[0008] According to the present invention, the unevenness of environmental elements in an indoor environment can be eliminated or reduced. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the structure of the environment forming apparatus according to an embodiment of the present invention.

[0010] Figure 2 This is a schematic diagram of the configuration layout of multiple air supply fans.

[0011] Figure 3 This is a schematic diagram of the configuration layout of multiple DC motors.

[0012] Figure 4 This is a schematic diagram of the configuration layout of multiple temperature sensors.

[0013] Figure 5 This is a schematic diagram of the configuration layout of multiple temperature sensors.

[0014] Figure 6 This diagram shows the control and storage units of an environmental testing device.

[0015] Figure 7 It is a timeline diagram that simplifies the process of environmental testing conducted by an environmental testing facility.

[0016] Figure 8 It is a flowchart representing the setting process executed by the control unit.

[0017] Figure 9 This is a schematic diagram of the structure of the environment-forming device involved in the modified example.

[0018] Figure 10This is a schematic diagram of the structure of the environment-forming device involved in the modified example.

[0019] Figure 11 This is a schematic diagram of the structure of the environment-forming device involved in the modified example.

[0020] Figure 12 This is a schematic diagram of the structure of the environment-forming device involved in the modified example. Detailed Implementation

[0021] In the following detailed description, several specific embodiments are illustrated for ease of explanation. However, the present invention is not limited to these embodiments. Furthermore, for the sake of simplicity, well-known structures and apparatuses are schematically shown.

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Elements marked with the same reference numerals in the drawings denote identical or corresponding elements.

[0023] Structure of the device

[0024] Figure 1 This is a schematic diagram of the structure of an environment forming apparatus according to an embodiment of the present invention. In this embodiment, the environment forming apparatus is configured as an environmental testing apparatus 1, used to evaluate the performance of the test object 6 by applying a predetermined temperature and pressure stress to the test object 6. However, the environmental testing apparatus 1 can also be configured as a temperature and humidity testing apparatus that applies a predetermined temperature and humidity stress stress to the test object 6 by adding a humidifier. Furthermore, the environmental testing apparatus 1 can also be configured as an aging test apparatus for screening out initially defective products by applying a predetermined temperature and voltage stress stress to the test object 6. The test object 6 is, for example, an electronic component such as a circuit board. In addition, in the following description, as Figure 1 As shown, the direction is defined using an orthogonal coordinate system with an X-axis extending horizontally, a Y-axis extending vertically, and a Z-axis perpendicular to both the X-axis and the Y-axis. Figure 1 In the orthogonal coordinate system shown, the W-axis extends in the opposite direction to the X-axis.

[0025] The environmental testing apparatus 1 includes a test chamber 3 (environmental formation chamber) surrounded by an insulated shell 2 and an air-conditioning chamber 4. The test chamber 3 has a first wall 7 and a second wall 9 facing each other. The air-conditioning chamber 4 has: a first space 41 defined by the first wall 7 and the inner surface 2A of the shell 2; a second space 42 defined by the second wall 9 and the inner surface 2B of the shell 2; and a connecting space 43 connecting the first space 41 and the second space 42. A plurality of vents 8 are formed on the first wall 7, and a plurality of vents 10 are formed on the second wall 9. The test chamber 3 and the air-conditioning chamber 4 are interconnected through these plurality of vents 8 and 10. Alternatively, the first wall 7 with the plurality of vents 8 can be omitted, in which case the inner surface 2A of the shell 2 becomes the first wall of the test chamber 3. Furthermore, the first wall 7 or the inner surface 2A can be the inner surface of a door that contacts the test chamber 3 from the outside, in which case the inner surface of the door becomes the first wall of the test chamber 3.

[0026] A shelf 5 is installed inside the test chamber 3. The shelf 5 has a grid-like appearance formed by multiple intersecting rod-shaped components. The test object 6 is placed on the shelf 5. Figure 1 In the example shown, the test chamber 3 has multiple shelves 5, and multiple test subjects 6 are arranged on each shelf 5, thereby housing the multiple test subjects 6 in the central part of the interior space of the test chamber 3. However, it is sufficient that the number of shelves 5 in the test chamber 3 is one or more, and that the number of test subjects 6 placed on each shelf 5 is one or more. Alternatively, the test subjects 6 may be placed directly on the floor of the test chamber 3 without shelves 5.

[0027] A cooler 11, serving as a cooling device, and a heater 12, serving as a heating device, are disposed within the connecting space 43 of the air-conditioned room 4. The cooler 11 and heater 12 function as an air conditioning unit, generating air-conditioned air at the desired temperature by cooling or heating the air flowing into the air-conditioned room 4 from the test chamber 3 through the ventilation opening 8 of the first wall 7. The air-conditioned temperature of the cooler 11 and heater 12 is controlled by the control unit 30, described later.

[0028] In addition, multiple temperature sensors 17 and 18, described later, are installed in the test chamber 3.

[0029] Multiple air supply fans 13 are arranged on the second wall 9 side of the test chamber 3. Each air supply fan 13 is configured as an axial flow fan having a DC motor 14 and multiple blades fixed to the distal end of a rotating shaft 15 of the DC motor 14. The DC motor 14 is located outside the housing 2. The rotating shaft 15 penetrates the outer wall of the housing 2 and extends in the W direction towards the test chamber 3 within the air-conditioned chamber 4. The distal end of the rotating shaft 15 is positioned concentrically with the center of the vent 10 on the second wall 9. The blades of the air supply fans 13 are arranged in the same plane as the vent 10. When the DC motor 14 is driven and the air supply fans 13 rotate, air-conditioned air is delivered from the air-conditioned chamber 4 through the vent 10 into the test chamber 3. Since the blades of the air supply fans 13 rotate in the YZ plane, the air-conditioned air delivered into the test chamber 3 by the air supply fans 13... Figure 1 The thick straight arrow in the middle indicates that it moves roughly in the W direction and is discharged from the vent 8 of the first wall 7 toward the air-conditioned room 4 after passing through the test chamber 3.

[0030] Figure 2 This is a schematic diagram of the configuration layout of multiple air supply fans 13, equivalent to viewing along the X direction. Figure 1 The view shows the position of line II-II. In this embodiment, the environmental testing apparatus 1 includes four fans 131-134, arranged in a matrix of 2 rows x 2 columns, with two fans 13 spaced apart from each other in both the Y and Z directions. The fans 131-134 are distributed throughout the entire area of ​​the second wall 9. The rotational speed of each fan 131-134 is individually controlled by the control unit 30, which will be described later.

[0031] Furthermore, on the second wall surface 9, a plurality of vents 10 are formed in the same number and layout as the plurality of air supply fans 13. In this embodiment, a total of four circular vents 101 to 104 are formed in a matrix of 2 rows x 2 columns. Each vent 101 to 104 is formed at the center of its circle, concentric with the rotation axis 15 of each air supply fan 131 to 134.

[0032] Figure 3 This is a schematic diagram of the configuration layout of multiple DC motors 14, equivalent to viewing along the X direction. Figure 1 A view showing the position of line III-III. In this embodiment, a total of four DC motors 141 to 144 are arranged in a matrix of 2 rows x 2 columns.

[0033] like Figure 1As shown, multiple temperature sensors 17 are arranged close to the first wall 7 of the test chamber 3. Since the first wall 7 is located at the downstream end of the air supply path of the air-conditioned air delivered by the air supply fan 13, the temperature of the air (environmental factor) in the downstream test chamber 3 is measured using the temperature sensors 17.

[0034] Figure 4 This is a schematic diagram of the configuration layout of multiple temperature sensors 17, equivalent to observing along the W direction. Figure 1 A view showing the position of line IV-IV. Multiple temperature sensors 17 are arranged in the same number and layout as the multiple air supply fans 13. In this embodiment, a total of four temperature sensors 171-174 are arranged in a 2x2 matrix. Temperature data representing temperature measurements output from each temperature sensor 171-174 are input to the control unit 30, described later. Temperature sensors 171-174 are positioned at the intersections of a grid-like frame 20 with multiple intersecting rod-shaped members. This frame 20 is fixed to the inner wall of the test chamber 3 near the first wall 7. Furthermore, as... Figure 1 As shown, each temperature sensor 171 to 174 is configured on the extension line of the rotation shaft 15 of the corresponding air supply fan 131 to 134.

[0035] In addition, such as Figure 1 As shown, multiple temperature sensors 18 are configured near the second wall 9 of the test chamber 3. The temperature sensors 18 are also configured near the air supply fan 13. Since the second wall 9 is located at the upstream end of the air supply path of the air-conditioned air delivered by the air supply fan 13, the temperature of the air in the upstream test chamber 3 is measured using the temperature sensors 18.

[0036] Figure 5 This is a schematic diagram of the configuration layout of multiple temperature sensors 18, equivalent to observing along the X direction. Figure 1 A view showing the position of line VV. Multiple temperature sensors 18 are arranged in the same number and layout as the multiple air supply fans 13. In this embodiment, a total of four temperature sensors 181-184 are arranged in a 2x2 matrix. Temperature data representing temperature measurements output from each temperature sensor 181-184 are input to the control unit 30, described later. Temperature sensors 181-184 are positioned at the intersections of a grid-like frame 21 in which multiple rod-shaped members are intersected. This frame 21 is fixed to the inner wall of the test chamber 3 near the second wall surface 9. Furthermore, as... Figure 1 As shown, each temperature sensor 181 to 184 is configured on the extension line of the rotation shaft 15 of the corresponding air supply fan 131 to 134.

[0037] Figure 6This diagram shows the control unit 30 and storage unit 31 of the environmental testing apparatus 1. The control unit 30 includes a CPU, etc., and the storage unit 31 includes an HDD, SSD, or semiconductor memory, etc. The storage unit 31 stores a predetermined program 32 for enabling the CPU, which serves as the computer controlling the environmental testing apparatus 1, to function as the control unit 30 (setting unit). The control unit 30 and storage unit 31 can be installed inside the environmental testing apparatus 1 or connected externally to the environmental testing apparatus 1. Temperature data S11 to S14 are input to the control unit 30 from temperature sensors 171 to 174, respectively. In addition, temperature data S21 to S24 are input to the control unit 30 from temperature sensors 181 to 184, respectively. The control unit 30 controls the operation of the cooler 11 via drive signal S3. The control unit 30 controls the operation of the heater 12 via drive signal S4. The control unit 30 controls the output of the DC motors 141 to 144 individually via drive signals S51 to S54, thereby controlling the rotation speed of the blower fans 131 to 134 individually.

[0038] The operation of the device

[0039] Figure 7 This is a simplified timing diagram illustrating the process of environmental testing performed by the environmental testing apparatus 1. At time T0, the operator places the test object 6 into the test chamber 3, and then, at time T1, starts the environmental testing apparatus 1 by pressing a button or similar means. During the setting period P1 (times T1 to T2) before the test period P2 (times T2 to T3) of the environmental test, the control unit 30 performs setting processing to set the rotational speeds of each of the air supply fans 131 to 134 during the test period P2. As an example, the environmental test is a constant-temperature test with a constant set temperature within the test chamber 3, the test period P2 is tens to thousands of hours, and the upper limit of the setting period P1 is tens of minutes to several hours. However, the lengths of the test period P2 and the setting period P1 are not limited to the example described above. Furthermore, the environmental test is not limited to a constant-temperature test with a constant set temperature; it can also be a test involving multiple set temperatures, or a cyclical test with alternating high-temperature and low-temperature periods.

[0040] Figure 8 This is a flowchart illustrating the setting process executed by the control unit 30. In the initial state, the air conditioning unit (cooler 11 and heater 12) and the air supply fan 13 are both stopped.

[0041] If the start command for the operation of the environmental test apparatus 1 is input at time T1, the control unit 30 acquires various parameters in step SP101. These parameters include the target set temperature of the test chamber 3, the allowable temperature range (upper and lower limits) relative to the target set temperature, the upper limit time of the setting period P1, and the upper and lower limits of the rotational speed of the air supply fans 131-134. The upper and lower limits of the rotational speed are set based on the necessary amount or necessary efficiency of heat exchange in the aforementioned air conditioning unit. These parameters are pre-input, and their setting information is stored in the storage unit 31.

[0042] Next, in step SP102, the control unit 30 drives the DC motors 141 to 144 via drive signals S51 to S54, thereby starting the drive of the blower fans 131 to 134 at an initial rotational speed. The initial rotational speed is preset for each blower fan 131 to 134, and the setting information is stored in the storage unit 31.

[0043] Next, in step SP103, the control unit 30 starts driving the cooler 11 or heater 12 based on the target set temperature by using drive signals S3 and S4.

[0044] After a specified time (e.g., tens of seconds to several minutes) for the standby to stabilize the temperature in the test chamber 3, in step SP104, the control unit 30 acquires temperature data S11 to S14 and S21 to S24 from temperature sensors 171 to 174 and 181 to 184.

[0045] Next, in step SP105, the control unit 30 determines whether there is any data in the temperature data S11~S14 and S21~S24 obtained in step SP104 that deviates from the allowable temperature range relative to the target set temperature.

[0046] If all temperature data S11~S14 and S21~S24 converge within the allowable temperature range (step SP105: No), the control unit 30 sets the above-mentioned initial value of the rotation speed of each air supply fan 131~134 to the rotation speed of each air supply fan 131~134 during the test period P2, and ends the setting process.

[0047] If at least one of the temperature data S11-S14 and S21-S24 deviates from the allowable temperature range (step SP105: Yes), then in step SP106, the control unit 30 calculates a predetermined evaluation value based on the temperature data S11-S14 and S21-S24 obtained in step SP104. This evaluation value is an error index where the larger the error between the target set temperature and the multiple temperature data S11-S14 and S21-S24, the larger its value. For example, the evaluation value can be the difference between the target value and the representative value (maximum or minimum value) of the multiple measured data, the difference between the target value and the average value of the multiple measured data, the sum of absolute differences, the sum of squared errors, or the mean square error. Furthermore, as the evaluation value, an index representing the non-uniformity of the multiple measured data can also be used, namely the difference between the maximum and minimum values, the difference between the average value and the representative value (maximum or minimum value), the sum of absolute differences, dispersion, or standard deviation.

[0048] Next, in step SP107, the control unit 30 changes the rotational speed of the air blowers 131 to 134 within a range above the lower limit and below the upper limit of the rotational speed. The control unit 30 uses the current rotational speed (rotational speed before change) of each air blower 131 to 134 as a reference value, and sets the changed rotational speed for each air blower 131 to 134 by adding or subtracting random change values ​​from each reference value. The change value is, for example, a random value selected from a range of ± several hundred (rpm).

[0049] After the specified time for stabilizing the temperature in the test chamber 3, in step SP108, the control unit 30 acquires temperature data S11-S14 and S21-S24 from temperature sensors 171-174 and 181-184.

[0050] Next, in step SP109, the control unit 30 determines whether there is any data in the temperature data S11~S14 and S21~S24 obtained in step SP108 that deviates from the allowable temperature range relative to the target set temperature.

[0051] If all temperature data S11~S14 and S21~S24 converge within the allowable temperature range (step SP109: No), the control unit 30 sets the modified rotation speed set in step SP107 to the rotation speed of the air supply fans 131~134 in P2 during the test, and ends the setting process.

[0052] If at least one of the temperature data S11~S14, S21~S24 deviates from the allowable temperature range (step SP109: Yes), then in step SP110, the control unit 30 calculates the same evaluation value as above based on the temperature data S11~S14, S21~S24 obtained in step SP108.

[0053] Next, in step SP111, the control unit 30 compares the evaluation value calculated in step SP106 (the evaluation value before the change) with the evaluation value calculated in step SP110 (the evaluation value after the change) to determine whether the temperature unevenness in the test chamber 3 has been improved.

[0054] If the revised evaluation value is higher than the original evaluation value (step SP111: No), the temperature unevenness in the test chamber 3 is not improved even if the rotation speed of the air supply fans 131-134 is changed. In this case, in step SP112, the control unit 30 does not use the rotation speed changed in step SP107, thereby restoring the rotation speed of each air supply fan 131-134 to the original value.

[0055] On the other hand, if the revised evaluation value is lower than the original evaluation value (step SP111; Yes), the temperature unevenness in the test chamber 3 is improved by changing the rotation speed of the air supply fans 131 to 134. In this case, the control unit 30 maintains the revised value as the rotation speed of each air supply fan 131 to 134 by adopting the rotation speed changed in step SP107.

[0056] Next, in step SP113, the control unit 30 determines whether the elapsed time since the start of the setting process (time T1) has reached the upper limit of the setting period P1.

[0057] If the time limit has not been reached (step SP113: No), the control unit 30 repeatedly executes the processing after step SP107. In the subsequent step SP111, the control unit 30 compares the evaluation value calculated in the previous step SP110 (the evaluation value before the change) with the evaluation value calculated in the current step SP110 after the change (the evaluation value after the change) to determine whether the temperature unevenness in the test chamber 3 has been improved.

[0058] If the time limit is reached (step SP113: Yes), the control unit 30 sets the rotational speed of each blower fan 131 to 134 currently set (that is, the rotational speed that was finally set during the setting period P1) to the rotational speed of each blower fan 131 to 134 during the test period P2, and ends the setting process.

[0059] Furthermore, as an evaluation value, a smaller value can be used if the error is larger. In this case, if the changed evaluation value is lower than the original evaluation value (equivalent to step SP111: No), the temperature unevenness within the test chamber 3 is not improved even if the rotation speeds of the air supply fans 131-134 are changed. In this case, in step SP112, the control unit 30 restores the rotation speeds of each air supply fan 131-134 to their original values ​​by not adopting the rotation speed changed in step SP107. On the other hand, if the changed evaluation value exceeds the original evaluation value (equivalent to step SP111: Yes), the temperature unevenness within the test chamber 3 is improved by changing the rotation speeds of the air supply fans 131-134. In this case, the control unit 30 maintains the changed value as the rotation speed of each air supply fan 131-134 by adopting the rotation speed changed in step SP107.

[0060] Alternatively, the following configuration can be used: Temperature data before and after the rotation speed change are temporarily stored in any storage unit; the control unit 30 retrieves the temperature data before and after the change from this storage unit, compares the two, and selects the rotation speed that yields the best evaluation value. Alternatively, the following configuration can be used: Temperature data measured each time the rotation speed is changed is temporarily stored in any storage unit; the control unit 30 retrieves three or more temperature data points sequentially from this storage unit, compares them, and selects the rotation speed that yields the best evaluation value.

[0061] Effects

[0062] According to the environmental testing apparatus 1 of this embodiment, during the setting process, the control unit 30 (setting unit) repeatedly changes the rotation speed of multiple air supply fans 131-134, and acquires multiple temperature data S11-S14, S21-S24 (measured values) after each change from multiple temperature sensors 171-174, 181-184 (measuring units). Based on this, by appropriately setting the rotation speed of each air supply fan 131-134 in P2 during the test period by the control unit 30, the temperature (environmental element) non-uniformity in the test chamber 3 (environmental formation chamber) can be eliminated or reduced.

[0063] Furthermore, according to the environmental testing apparatus 1 of this embodiment, by having the control unit 30 randomly determine the change value of the rotation speed when changing the rotation speed of the plurality of air supply fans 131 to 134, the global optimal solution for the rotation speed of each air supply fan 131 to 134 can be obtained by a simple algorithm.

[0064] Furthermore, according to the environmental testing apparatus 1 of this embodiment, the control unit 30 repeatedly executes a setting process. That is, if the evaluation value decreases by changing the rotation speed, the change is adopted; if the evaluation value does not decrease by changing the speed, the change is not adopted. As the setting process progresses, the rotation speed of each air supply fan is gradually changed towards its optimal value. As a result, the possibility of discovering the optimal value of the rotation speed of each air supply fan at an early stage is increased.

[0065] Furthermore, according to the environmental testing apparatus 1 of this embodiment, the control unit 30 repeatedly executes a setting process that uses the current rotational speed as a reference value and increases or decreases the change value from that reference value. As the setting process progresses, the rotational speed of each air supply fan 131 to 134 is gradually changed towards its optimal value. As a result, the possibility of discovering the optimal value of the rotational speed of each air supply fan 131 to 134 at an earlier stage is increased.

[0066] Furthermore, according to the environmental testing apparatus 1 of this embodiment, if all multiple temperature data S11 to S14 and S21 to S24 converge within the target range, the control unit 30 ends the setting process, thereby enabling the test period P2 to begin earlier.

[0067] Furthermore, according to the environmental testing apparatus 1 of this embodiment, if the elapsed time of the setting period P1 reaches the upper limit time, the control unit 30 ends the setting process, thereby avoiding the situation where the start of P2 during the test is excessively delayed.

[0068] The following describes various modifications to the above-described embodiments. These modifications can be appropriately combined and applied.

[0069] First variation

[0070] In the above embodiment, if the evaluation value after changing the rotation speed is less than the evaluation value before the change, the control unit 30 adopts the change; if the evaluation value after the change is greater than the evaluation value before the change, the change is not adopted. The rotation speed that is finally set during the setting period P1 is set to the rotation speed of each air supply fan 131 to 134 during the test period P2.

[0071] Not limited to this example, the control unit 30 may also change the rotation speed of the air supply fans 131 to 134 multiple times, store the evaluation value calculated after each change in the storage unit 31 (or the internal memory of the control unit 30), and set the rotation speed of each air supply fan 131 to 134 that obtains the smallest evaluation value among the stored evaluation values ​​as the rotation speed of each air supply fan 131 to 134 during the test period P2.

[0072] According to this modified example, by having the control unit 30 perform multiple changes to the rotational speeds of the air supply fans 131-134 and store the evaluation values ​​after each change, the setting process can avoid getting stuck in finding a local optimum. As a result, the probability of finding a global optimum for the rotational speeds of each air supply fan 131-134 is increased.

[0073] Second variation

[0074] In the above embodiment, the control unit 30 adopted the modified rotation speed to improve the temperature unevenness in the test chamber 3 by changing the rotation speed of the air supply fans 131 to 134.

[0075] In addition, the control unit 30 can also use the changed rotation speed as an additional condition, provided that the operating state of the environmental test device 1 after changing its rotation speed meets a prescribed safety standard. For example, regarding the temperature and pressure of the nozzle of the refrigeration circuit of the air conditioning unit, a safety standard value that is slightly more lenient than the limit value for forcibly stopping the operation of the environmental test device 1 is preset, and the setting information is stored in the storage unit 31. The control unit 30 uses the changed rotation speed as an additional condition, provided that the temperature and pressure values ​​of the nozzle measured after changing the rotation speed of the air supply fans 131 to 134 meet this safety standard value.

[0076] According to this modified example, even if the rotational speed of the modified air supply fans 131 to 134 is good from the viewpoint of reducing temperature unevenness, the modification is not adopted if the operating parameters do not meet the relevant safety standards, etc., thereby avoiding situations such as the forced shutdown of the operation of the environmental test device 1.

[0077] Third variation

[0078] In the above embodiment, the control unit 30 ends the setting process when the elapsed time from the start of the setting process reaches a predetermined upper limit time. Not limited to this example, the control unit 30 may also end the setting process when the number of rotation speed changes (the number of times step SP107 is executed) from the start of the setting process reaches a predetermined upper limit number. The upper limit number is, for example, set to tens to hundreds of times, and the setting information is stored in the storage unit 31.

[0079] In the above embodiment, the control unit 30 uses temperature as an environmental factor. However, it is not limited to this example; the control unit 30 may also use other environmental factors such as humidity or wind speed.

[0080] In the above embodiment, the control unit 30 terminates the setting process when all temperature data S11-S14 and S21-S24 acquired after changing the rotation speed converge within the allowable temperature range. However, this is not limited to this example; the control unit 30 may also terminate the setting process when the evaluation value calculated after changing the rotation speed is below a predetermined threshold.

[0081] In the above embodiment, an initial value for the rotational speed was set individually for each of the air supply fans 131 to 134. However, this is not a limited example; the same initial value could be set for all the air supply fans 131 to 134.

[0082] In the above embodiment, the control unit 30 uses the current rotational speed of each of the blower fans 131 to 134 as a reference value. However, the control unit 30 is not limited to this example; it may also use the initial value of the rotational speed of each of the blower fans 131 to 134 as a reference value.

[0083] In the above embodiment, the control unit 30 sets the value obtained by adding or subtracting the change value from the reference value as the changed rotation speed. Not limited to this example, the control unit 30 may also set a rotation speed randomly selected from a range above the lower limit and below the upper limit of the rotation speed as the changed rotation speed.

[0084] As another variation, only one of temperature sensor 17 and temperature sensor 18 may be disposed within the test chamber 3. Furthermore, in addition to temperature sensors 17 and 18, other temperature sensors may be disposed at predetermined locations within the test chamber 3 (e.g., the center of the test chamber 3). Alternatively, temperature sensors 17 and 18 may be disposed at a position offset from the extension line of the rotation axis 15 of their respective air supply fans 13. Furthermore, the air conditioning chamber 4 may be disposed in a location not adjacent to the test chamber 3, with the two interconnected via piping or the like. Moreover, instead of the air supply fan 13 blowing air-conditioned air from the air conditioning chamber 4 towards the test chamber 3, the air supply fan 13 may also draw air-conditioned air from the test chamber 3 into the air conditioning chamber 4.

[0085] According to this variation, the same effect as the above-described embodiment can also be obtained.

[0086] Fourth variation

[0087] In the above embodiment, the environmental testing apparatus 1 includes a total of four air supply fans 131 to 134 arranged in a matrix of 2 rows x 2 columns. However, the configuration of the multiple air supply fans 13 is not limited to this example. The environmental testing apparatus 1 only needs to have at least two or more air supply fans 13. For example, it can have a total of nine air supply fans 13 arranged in a matrix of 3 rows x 3 columns, or it can have a total of 16 air supply fans 13 arranged in a matrix of 4 rows x 4 columns. Furthermore, the number of multiple air supply fans 13 belonging to each row can be different from the number of multiple air supply fans 13 belonging to each column. In addition, the multiple air supply fans 13 do not necessarily need to be arranged in a matrix, and the size of the multiple air supply fans 13 does not need to be all the same. According to this modified example, the same effect as the above embodiment can also be obtained.

[0088] Fifth variation

[0089] In the above embodiments, an example of an environment-forming apparatus being configured as an environmental testing apparatus 1 has been described, but the invention is not limited to this example. The environment-forming apparatus can also be configured as a heat treatment apparatus for creating a prescribed high-temperature environment for heat treatment of an object, i.e., a workpiece. Furthermore, the environment-forming apparatus can also be configured as a cooking apparatus for heating an object, i.e., food, to create a prescribed high-temperature environment. According to this modified example, the same effects as in the above embodiments can be obtained.

[0090] Sixth variation

[0091] Figure 9 , Figure 10 This is a schematic diagram of the structure of the environment-forming device involved in the sixth variation. For example... Figure 9 As shown, the blades of the air supply fan 13 can also be arranged in the X direction (on the side of the second space 42) relative to the vent 10. Furthermore, as... Figure 10 As shown, the blades of the air supply fan 13 can also be arranged in the W direction (towards the test chamber 3) relative to the vent 10. According to this modified example, the same effect as the above-described embodiment can also be obtained.

[0092] Seventh variation

[0093] Figure 11 , Figure 12 This is a schematic diagram of the structure of the environment-forming device involved in the seventh modification. For example... Figure 11 As shown, the test chamber 3 may not have a first wall 7, the air-conditioned chamber 4 may not have a first space 41 and a connecting space 43, and a vent 8A may be formed in the lower part of the second wall 9. The cooler 11 and heater 12 may be arranged in the lower part of the air-conditioned chamber 4. Furthermore, as... Figure 12As shown, the test chamber 3 may not have a first wall 7, and the air-conditioned chamber 4 may not have a first space 41 and a connecting space 43. Ventilation openings 8B and 8C may be formed on the upper and lower parts of the second wall 9, respectively, and the cooler 11 and heater 12 may be arranged on the upper and lower parts of the air-conditioned chamber 4, respectively. According to this modified example, the same effect as the above-described embodiment can also be obtained.

[0094] Eighth variation

[0095] An air conditioning unit including a cooler 11 and a heater 12, and an air supply unit including a blower fan 13, can also be configured as an environment-forming component installed after the test chamber 3.

[0096] At this time, the environment forming component is an environment forming chamber connected to the object being processed, which contains the object being processed. It includes: an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber that generates air-conditioned air by adjusting environmental elements of the air; a plurality of air supply fans that circulate the air-conditioned air between the air conditioning chamber and the environment forming chamber; and a setting unit that can individually set the rotational speed of each of the plurality of air supply fans. The setting unit performs a setting process for setting the rotational speed of each of the air supply fans during the processing period before the processing period of the processing is performed. In the setting process, the setting unit changes the rotational speed of the plurality of air supply fans multiple times, and after each change, obtains multiple measurement values ​​from multiple measurement units that measure the environmental elements at multiple locations within the environment forming chamber.

[0097] According to this variation, the same effect as the above-described embodiment can also be obtained.

[0098] Ninth variation

[0099] In the above embodiment, a configuration for setting the rotational speed of each air supply fan 131 to 134 is described when the environmental test apparatus 1 is started to operate, but it is not limited to this.

[0100] The setup process can also be performed when the environment of the test chamber 3 changes during the test, such as when the door of the test chamber 3 is opened to insert or remove the test subject 6, and the environment of the test chamber 3 is restored. In this case, the period during which the environment is restored and the test is performed is called the test period P2, and the setup process period before the test period P2 is called the setup period P1. According to this modified example, the same effect as the above-described embodiment can also be obtained.

[0101] One aspect of the present invention relates to an environment forming apparatus, comprising: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of air supply fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; a plurality of measuring units for measuring the environmental elements at a plurality of locations within the environment forming chamber and outputting a plurality of measurement values; and a setting unit capable of individually setting the rotational speed of each of the plurality of air supply fans, wherein the setting unit performs a setting process during a setting period prior to the processing period of the processing, namely, changing the rotational speed of the plurality of air supply fans multiple times and acquiring the plurality of measurement values ​​after each change, and setting the rotational speed of each air supply fan during the processing period based on the plurality of measurement values.

[0102] According to this configuration, during the setting process, the setting unit repeatedly changes the rotation speed of multiple air supply fans and obtains multiple measurement values ​​after each change from multiple measurement units. Based on this result, the setting unit appropriately sets the rotation speed of each air supply fan during the process, thereby eliminating or reducing the unevenness of environmental elements forming the indoor environment.

[0103] In the above configuration, the setting unit randomly determines the change value of the rotation speed when changing the rotation speed of the plurality of air supply fans.

[0104] According to this configuration, by having the setting unit randomly determine the change value of the rotation speed when changing the rotation speed of multiple air supply fans, a global optimal solution for the rotation speed of each air supply fan can be obtained through a simple algorithm.

[0105] In the above configuration, the setting unit: calculates an evaluation value that varies based on the error or deviation between the target value of the environmental element and the plurality of measured values; if the evaluation value after the change in the rotation speed of the plurality of air blowers is a value where the error or deviation is smaller compared to the evaluation value before the change, then the change is adopted; if the evaluation value after the change is the same as the evaluation value before the change or a value where the error or deviation is larger, then the change is not adopted; and sets the rotation speed of each air blower that is finally set during the setting period to the rotation speed of each air blower during the processing period.

[0106] According to this configuration, the setting unit repeatedly performs setting processing; that is, if the error or unevenness decreases by changing the rotation speed, the change is adopted; if the error or unevenness does not decrease by changing the speed, the change is not adopted. As the setting processing progresses, the rotation speed of each air supply fan is gradually changed towards its optimal value. As a result, the possibility of discovering the optimal value of the rotation speed of each air supply fan at an early stage is increased.

[0107] In the above configuration, the setting unit: calculates an evaluation value that varies based on the error or deviation between the target value of the environmental element and the plurality of measured values; changes the rotation speed of the plurality of air supply fans multiple times and stores the evaluation value after each change; and sets the rotation speed of each air supply fan that yields the evaluation value with the smallest error or deviation among the stored evaluation values ​​as the rotation speed of each air supply fan during the processing.

[0108] According to this configuration, by performing multiple changes to the rotational speeds of multiple air supply fans through a setting unit and storing the evaluation values ​​after each change, the setting process can avoid getting stuck in finding a local optimum. As a result, the possibility of discovering the global optimum for the rotational speeds of each air supply fan at an earlier stage is increased.

[0109] In the above configuration, the setting unit determines whether to adopt the change based on the predetermined operating parameters of the environment forming device after the rotation speed of the plurality of air supply fans is changed and the predetermined reference value of the operating parameters.

[0110] According to this configuration, even if the rotational speed of the modified air supply fan is good from the viewpoint of reducing the unevenness of environmental factors, the modification is not adopted if the reference values ​​of the operating parameters specified in the relevant regulations are not met, thereby avoiding situations such as the forced shutdown of the operation of the environmental forming device.

[0111] In the above configuration, the setting unit uses the current rotational speed of each air blower as a reference value, and sets the value after increasing or decreasing the rotational speed by a change value from the reference value as the next rotational speed of each air blower.

[0112] According to this configuration, by repeatedly executing a setting process using the current rotational speed as a reference value and adding or subtracting a change value from that reference value by the setting unit, the rotational speed of each air supply fan is gradually changed towards its optimal value as the setting process progresses. As a result, the possibility of discovering the optimal value of the rotational speed of each air supply fan at an earlier stage is increased.

[0113] In the above configuration, the setting unit terminates the setting process if all of the plurality of measured values ​​converge within the specified target range of the environmental element.

[0114] According to this configuration, if all the multiple measured values ​​converge within the target range, the setting unit ends the setting process, thereby allowing the processing period to begin earlier.

[0115] In the above configuration, the setting unit terminates the setting process if the elapsed time or the number of changes in rotation speed since the start of the setting process reaches a predetermined upper limit.

[0116] According to this configuration, if the number of changes in time or rotation speed reaches the upper limit, the setting unit ends the setting process, thereby avoiding excessive delay in the start of the process.

[0117] In the above configuration, the lower limit and upper limit of the rotation speed of the plurality of air supply fans are preset, and the setting unit changes the rotation speed of the plurality of air supply fans within the range of the lower limit and the upper limit.

[0118] According to this configuration, by setting the unit to change the rotation speed within a range above the lower limit and below the upper limit during the setting process, situations such as the rotation speed being set to be too low or too high can be avoided.

[0119] Another aspect of the present invention relates to a storage medium, a computer-readable storage medium, for storing a program that enables a computer controlling an environment forming apparatus to function as a setting unit, wherein the environment forming apparatus includes: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of air supply fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; and a plurality of measuring units for measuring the environmental elements at a plurality of locations within the environment forming chamber and outputting a plurality of measurement values, wherein the setting unit is capable of: individually setting the rotational speed of each of the plurality of air supply fans; and performing a setting process during a setting period prior to the processing of the process, namely, changing the rotational speed of the plurality of air supply fans multiple times and acquiring the plurality of measurement values ​​after each change, and setting the rotational speed of each air supply fan during the processing period based on the acquired plurality of measurement values.

[0120] According to this procedure, during the setting process, the setting unit repeatedly changes the rotation speed of multiple air supply fans and obtains multiple measurement values ​​after each change from multiple measurement units. Based on the results, the setting unit appropriately sets the rotation speed of each air supply fan during the process, thereby eliminating or reducing the unevenness of environmental factors forming the indoor environment.

[0121] Another aspect of the present invention relates to a method for controlling a blower fan, which is a method for controlling a blower fan of an environment forming apparatus. The environment forming apparatus includes: an environment forming chamber for containing an object to be processed; an air conditioning chamber communicating with the environment forming chamber; an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air; a plurality of blower fans for circulating the air-conditioned air between the air conditioning chamber and the environment forming chamber; a plurality of measuring units for measuring the environmental elements at multiple locations within the environment forming chamber and outputting multiple measurement values; and a setting unit capable of individually setting the rotational speed of each of the plurality of blower fans. The setting unit performs a setting process during a setting period prior to the processing period in which the processing is performed, namely, changing the rotational speed of the plurality of blower fans multiple times and acquiring the multiple measurement values ​​after each change, and setting the rotational speed of each blower fan during the processing period based on the acquired multiple measurement values.

[0122] According to this method, during the setting process, the setting unit repeatedly changes the rotation speed of multiple air supply fans and obtains multiple measurement values ​​after each change from multiple measurement units. Based on the results, the setting unit appropriately sets the rotation speed of each air supply fan during the process, thereby eliminating or reducing the unevenness of environmental factors forming the indoor environment.

[0123] This application is based on Japanese Patent Application No. 2021-081496, filed on May 13, 2021, the contents of which are incorporated herein by reference.

[0124] To illustrate the invention, the invention has been appropriately and sufficiently described above with reference to specific examples and other embodiments. However, it should be understood that modifications and / or improvements to the described embodiments can be readily made by those skilled in the art. Therefore, any modified or improved embodiments implemented by those skilled in the art that do not depart from the scope of protection of the claims set forth in the claims are to be interpreted as being included within the scope of protection of those claims.

Claims

1. An environment-forming device, characterized in that... include: An environment-forming chamber is used to contain and process objects. An air-conditioned room is connected to the aforementioned environment forming a room; An air conditioning unit is configured in the air-conditioned room to generate air-conditioned air by adjusting environmental factors of the air. Multiple air supply fans circulate the conditioned air between the conditioned room and the environment forming room; Multiple measurement units measure environmental elements at multiple locations within the environment-forming room and output multiple measurement values; and, The setting unit can individually set the rotational speed of each of the plurality of air supply fans, wherein, The setting unit performs the following setting process during the setting period after the operation of the environment forming apparatus begins and before the processing period of the process, while the object to be processed is housed in the environment forming chamber: that is, it changes the rotation speed of the plurality of air supply fans multiple times, obtains the plurality of measurement values ​​after each change, and sets the rotation speed of each air supply fan during the processing period based on the plurality of measurement values.

2. The environment forming apparatus according to claim 1, characterized in that: The setting unit randomly determines the change value of the rotation speed when changing the rotation speed of the plurality of air supply fans.

3. The environment forming apparatus according to claim 1 or 2, characterized in that, The setting unit: Calculate the evaluation value that varies based on the error or deviation between the target value of the environmental element and the plurality of measured values; If the evaluation value after the change of the rotation speed of the plurality of air supply fans is a smaller value than the evaluation value before the change, then the change is adopted; if the evaluation value after the change is the same as the evaluation value before the change or the error or deviation is larger, then the change is not adopted. The rotational speed of each air supply fan that is ultimately set during the setting period is set to the rotational speed of each air supply fan during the processing period.

4. The environment forming apparatus according to claim 1 or 2, characterized in that, The setting unit: Calculate the evaluation value that varies based on the error or deviation between the target value of the environmental element and the plurality of measured values; The rotation speed of the multiple air supply fans is changed multiple times, and the evaluation value after each change is stored; The rotational speed of each air supply fan is set to the rotational speed of each air supply fan during the processing, based on the evaluation value that yields the smallest error or deviation among the stored evaluation values.

5. The environment forming apparatus according to claim 1, characterized in that, The setting unit determines whether to adopt the change based on the predetermined operating parameters of the environment forming device after the rotation speed of the plurality of air supply fans has been changed and the predetermined reference value of the operating parameters.

6. The environment forming apparatus according to claim 1, characterized in that, The setting unit uses the current rotational speed of each air blower as a reference value, and sets the value obtained by adding or subtracting the change value of the rotational speed from the reference value as the next rotational speed of each air blower.

7. The environment forming apparatus according to claim 1, characterized in that, The setting unit terminates the setting process if all of the multiple measured values ​​converge within the specified target range of the environmental element.

8. The environment forming apparatus according to claim 1, characterized in that, If the setting unit terminates the setting process if the elapsed time or the number of changes in rotation speed since the start of the setting process reaches a predetermined upper limit, the setting unit will terminate the setting process.

9. The environment forming apparatus according to claim 1, characterized in that, The lower and upper limits of the rotational speeds of the plurality of air supply fans are preset. The setting unit changes the rotation speed of the plurality of air supply fans within the range of the lower limit and the upper limit.

10. A storage medium, a computer-readable storage medium, for storing a program that enables a computer of a control environment forming device to function as a setting unit, wherein, The environment forming apparatus includes: an environment forming chamber for containing the object to be processed; an air conditioning chamber connected to the environment forming chamber; and an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air. Multiple air supply fans circulate the conditioned air between the air-conditioned room and the environment-forming room; and multiple measurement units measure the environmental elements at multiple locations within the environment-forming room and output multiple measurement values. The setting unit is characterized in that: The rotational speed of each of the plurality of air supply fans can be set individually; and, During the setting period after the operation of the environment forming apparatus begins and before the processing period of the process is executed, while the object to be processed is contained in the environment forming chamber, the setting process is performed as follows: the rotation speed of the plurality of air supply fans is changed multiple times, and the plurality of measurement values ​​after each change are obtained. Based on the obtained plurality of measurement values, the rotation speed of each air supply fan during the processing period is set.

11. A method for controlling a blower fan, which is a method for controlling a blower fan of an environment forming device, the environment forming device comprising: an environment forming chamber for containing an object to be processed; an air conditioning chamber connected to the environment forming chamber; and an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air. Multiple air supply fans circulate the conditioned air between the conditioned room and the environment forming room; Multiple measurement units measure environmental elements at multiple locations within the environment-forming room and output multiple measurement values; and a setting unit can individually set the rotational speed of each of the multiple air supply fans, characterized in that... The setting unit performs the following setting process during the setting period after the operation of the environment forming apparatus begins and before the processing period of the process, while the object to be processed is housed in the environment forming chamber: that is, it changes the rotation speed of the plurality of air supply fans multiple times, obtains the plurality of measurement values ​​after each change, and sets the rotation speed of each air supply fan during the processing period based on the obtained plurality of measurement values.

12. A storage medium, a computer-readable storage medium, for storing a program that enables a computer of a control environment forming device to function as a setting unit, wherein, The environment forming apparatus includes: an environment forming chamber for containing the object to be processed; an air conditioning chamber connected to the environment forming chamber; and an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air. Multiple air supply fans circulate the conditioned air between the air-conditioned room and the environment-forming room; and multiple measurement units measure the environmental elements at multiple locations within the environment-forming room and output multiple measurement values. Its features are, The setting unit can individually set the rotation speed of each of the plurality of air supply fans. The setting unit performs the following setting process during the setting period after the environment forming apparatus starts operating and before the processing period, while the object to be processed is housed in the environment forming chamber: it repeatedly changes the rotation speed of the plurality of air supply fans, acquires the plurality of measurement values ​​after each change, and sets the rotation speed of each air supply fan during the processing period based on the acquired plurality of measurement values. The setting unit randomly determines the change value of the rotation speed when changing the rotation speed of the plurality of air supply fans.

13. A method for controlling a blower fan, which is a method for controlling a blower fan of an environment forming device, the environment forming device comprising: an environment forming chamber for containing an object to be processed; an air conditioning chamber connected to the environment forming chamber; and an air conditioning unit disposed in the air conditioning chamber for generating air-conditioned air by adjusting environmental elements of the air. Multiple air supply fans circulate the conditioned air between the conditioned room and the environment forming room; Multiple measurement units measure environmental elements at multiple locations within the environment-forming room and output multiple measurement values; and a setting unit can individually set the rotational speed of each of the multiple air supply fans, characterized in that... The setting unit performs the following setting process during the setting period after the environment forming apparatus starts operating and before the processing period, while the object to be processed is housed in the environment forming chamber: it repeatedly changes the rotation speed of the plurality of air supply fans, acquires the plurality of measurement values ​​after each change, and sets the rotation speed of each air supply fan during the processing period based on the acquired plurality of measurement values. The setting unit randomly determines the change value of the rotation speed when changing the rotation speed of the plurality of air supply fans.

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