Sheet resistance meter

Abstract

A sheet resistance measuring device suppresses generation of wrinkles of a sheet compared with a case where only electrodes are used to contact the sheet. The sheet resistance measuring device includes a pair of frame bodies sandwiching a sheet from both surfaces, a pair of electrodes provided in one of the frame bodies to sandwich the sheet between the frame body and the other frame body to measure resistance of the sheet, and a contact member provided between the pair of electrodes in one of the frame bodies to contact the sheet.

Description

Technical Field

[0001] This disclosure relates to a sheet resistance measuring device. Background Technology

[0002] Japanese Patent Application Publication No. 2011-137774 discloses a technique related to measuring terminals and measuring leads used in measuring the sheet resistance of thin films using a four-terminal method. In this prior art, the four measuring terminals are fixed in position such that the value obtained by dividing the measured voltage value by the current value becomes equal to the sheet resistance value of the thin film. Summary of the Invention

[0003] When measuring resistance by clamping a sheet between two electrodes and a frame, the accuracy of the resistance measurement may decrease if the sheet wrinkles or breaks during the setting of the sheet or when the electrodes come into contact with the sheet.

[0004] The object of the present invention is to suppress the formation of wrinkles in the sheet compared to the case where only electrodes are used to contact the sheet.

[0005] According to a first aspect of this disclosure, a sheet resistance measuring device is provided, comprising: a pair of frames sandwiching a sheet from both sides; a pair of electrodes disposed in one of the frames to sandwich the sheet between the other frame and to measure the resistance of the sheet; and a contact member disposed between the pair of electrodes in one of the frames and in contact with the sheet.

[0006] According to a second aspect of this disclosure, the contact member comprises an elastomer or is mounted to one of the frames via an elastomer, and protrudes further toward the other frame than the electrode before contacting the sheet.

[0007] According to a third aspect of this disclosure, the contact member protrudes further toward the other frame than the electrode, and in the other frame, a recess is formed at a location corresponding to the contact member.

[0008] According to a fourth aspect of this disclosure, the sheet resistance measuring device has an isolation mechanism that isolates the contact member from the sheet during the process of measuring resistance using the electrodes.

[0009] According to a fifth aspect of this disclosure, the sheet is placed on the upper surface of another frame, and the sheet resistance meter has a moving mechanism that moves one of the frames from top to bottom relative to the upper surface of the other frame.

[0010] According to a sixth aspect of this disclosure, the moving mechanism has a guiding mechanism that causes one of the frames to move in a vertical direction relative to the upper surface of the other frame.

[0011] According to the seventh aspect of this disclosure, the moving mechanism has a rotating mechanism that causes one end of the frame to rotate about a rotation axis located at the end of the other frame.

[0012] (Effect)

[0013] According to the first scheme, compared with the case where only electrodes are used to contact the sheet, the generation of wrinkles in the sheet can be suppressed.

[0014] According to the second scheme, compared with the case where the contact member is flush with the electrode, the generation of wrinkles in the sheet can be suppressed.

[0015] According to the third scheme, compared with the case where the contact member is flush with the electrode, the generation of wrinkles in the sheet can be suppressed.

[0016] According to the fourth scheme, compared with the case where the contact member contacts the sheet during the process of using electrodes to measure resistance, the range of materials that can be selected to constitute the contact member is wider.

[0017] According to the fifth solution, compared with the case where one frame moves laterally relative to the other frame, the generation of wrinkles in the sheet can be suppressed.

[0018] According to the sixth solution, compared with the case where one of the frames is moved at an angle relative to the upper surface of the other frame, the generation of wrinkles in the sheet can be suppressed.

[0019] According to the seventh embodiment, the mechanism becomes simpler compared to the case where one frame moves vertically relative to the upper surface of the other frame. Attached Figure Description

[0020] Figure 1 This is a perspective view of the sheet resistance measuring device according to the first embodiment.

[0021] Figure 2 This is a plan view of the sheet resistance measuring device of the first embodiment viewed from above.

[0022] Figure 3 This is a side view of the sheet resistance measuring device of the first embodiment, viewed from the Y direction. Figure 3 (A) is a diagram showing the state where the first frame is separated from the second frame. Figure 3 (B) is a diagram showing the state in which the resistance of the sheet is measured when the first frame is close to the second frame.

[0023] Figure 4 This is a block diagram of the sheet resistance measuring device according to the first embodiment.

[0024] Figure 5 This is a side view of the sheet resistance measuring device of the second embodiment, viewed from the Y direction. Figure 5 (A) is a diagram showing the state where the first frame is separated from the second frame. Figure 5 (B) is a diagram showing the state of the first frame approaching the second frame. Figure 5 (C) is a diagram showing the state in which the resistance of the sheet is measured after the contact member leaves the sheet.

[0025] Figure 6 This is a block diagram of the sheet resistance measuring device according to the second embodiment.

[0026] Figure 7 This is a side view of the sheet resistance measuring device of the third embodiment, viewed from the Y direction. Figure 7 (A) is a diagram showing the state where the first frame is separated from the second frame. Figure 7 (B) is a diagram showing the state in which the resistance of the sheet is measured when the first frame is close to the second frame.

[0027] Figure 8 This is a block diagram of the sheet resistance measuring device according to the third embodiment.

[0028] Figure 9 This is a side view of the sheet resistance measuring device of the fourth embodiment, viewed from the Y direction. Figure 9 (A) is a diagram showing the state where the first frame is separated from the second frame. Figure 9 (B) is a diagram showing the state in which the resistance of the sheet is measured when the first frame is close to the second frame.

[0029] Figure 10 This is a block diagram of the sheet resistance measuring device according to the fourth embodiment. Detailed Implementation

[0030] <First Implementation>

[0031] The sheet resistance measuring device according to the first embodiment of this disclosure will be described. Furthermore, the two orthogonal directions in the horizontal direction in each figure are designated as the X direction and the Y direction, respectively represented by arrows X and Y. Moreover, the vertical direction orthogonal to the X and Y directions is designated as the Z direction, represented by arrow Z.

[0032] [structure]

[0033] The structure of the sheet resistance meter is described.

[0034] Figure 1The sheet resistance meter 10 shown is a measuring instrument for measuring the resistance of sheet materials P such as paper. The sheet resistance meter 10 has a frame 12 with a gap 14 forming a space between the sheet material P and the frame 12. The frame 12 is composed of a first frame 20 and a second frame 22. A protrusion 21 is provided at the X-direction end of the second frame 22. In this embodiment, the sheet resistance meter 10 is used on a worktable or the like (not shown) with the second frame 22 facing downwards.

[0035] like Figure 3 (A) and Figure 3 As shown in (B), the sheet resistance meter 10 has a moving mechanism 100 that allows the first frame 20 to move vertically relative to the second frame 22. Through the moving mechanism 100, the sheet resistance meter 10 is configured such that the first frame 20 approaches (see reference 22) the second frame 22. Figure 3 (B) and isolation (refer to) Figure 3 (A)). The moving mechanism 100 is configured with a guide mechanism 108 and a helical spring 116. The guide mechanism 108 is configured with a rod-shaped guide 110 and a through hole 120.

[0036] like Figure 1 , Figure 3 (A) and Figure 3 As shown in (B), the second frame 22 is provided with multiple rod-shaped guides 110 protruding from the upper surface 22A, which are four in this embodiment. The first frame 20 is formed with multiple insertion holes 120 for inserting the rod-shaped guides 110 (see reference). Figure 3 (A) and Figure 3 (B)). At the front end of the guide 110, there is a through hole 120 (see reference). Figure 3 (A) and Figure 3 (B)) Large head 112. Furthermore, a rod-shaped guide 110 is inserted into the coil spring 116 (see reference). Figure 3 (A) and Figure 3 (B)

[0037] With this structure, the first frame 20 is pressed upwards in a direction isolated from the second frame 22 (see reference). Figure 3 (A)), but as arrow F indicates, when the measurer S (refer to) Figure 1 When the first frame 20 is pressed towards the second frame 22, that is, when the first frame 20 is pressed downwards, the first frame 20 moves vertically downwards along the guide 110, thereby approaching the second frame 22 (see reference). Figure 1 as well as Figure 3 (B)

[0038] like Figure 3 (A) and Figure 3 As shown in (B), a switch 130 with an operating lever 132 is provided at the end 20B of the first frame 20. Figure 3 As shown in (A), when the first frame 20 is isolated relative to the second frame 22, the switch 130 is open. However, as Figure 3 As shown in (B), when the measurer S (reference) Figure 1 When the first frame 20 is pressed towards the second frame 22 and the first frame 20 moves downward in the vertical direction to approach the second frame 22, the operating lever 132 of the switch 130 touches the protrusion 21, and the switch 130 becomes on.

[0039] like Figure 3 (A) and Figure 3 As shown in (B), the upper surface 22A of the second frame 22 becomes the mounting surface for the sheet P (see also...). Figure 1 In the first frame 20, electrodes 50 are provided at intervals along the X direction, protruding from the lower surface 20A toward the second frame 22 (see also...). Figure 2 A contact member 150 is provided between the two electrodes 50 (see also...). Figure 2 The contact member 150 comprises an insulating and elastically deformable material; in this embodiment, it comprises an insulating rubber material. Furthermore, "insulating" refers to the property that makes it difficult for electricity to pass through, indicating a volume resistivity of approximately 1 × 10⁻⁶. 6 The range above Ωcm.

[0040] like Figure 3 As shown in (A), with the first frame 20 isolated from the second frame 22, the contact member 150 protrudes further toward the second frame 22 than the electrode 50. That is, the lower surface 150A of the contact member 150 is located further below the lower surface 50A of the electrode 50.

[0041] like Figure 4 As shown, the sheet resistance meter 10 has a control device 190. A switch 130 (see reference 190) is electrically connected to the control device 190. Figure 3 (A) and Figure 3 (B) and electrode 50 (refer to) Figure 2 , Figure 3 (A) and Figure 3 (B)). The control device 190 has the function of measuring the resistance of the sheet P between the two electrodes 50.

[0042] The hardware structure of the control device 190 includes a computer, which includes a central processing unit (CPU) (not shown), a read-only memory (ROM) storing programs for implementing various processing routines, a random access memory (RAM) for temporarily storing data, a hard disk drive (HDD), and a network interface, etc.

[0043] [Measurement of the resistance of sheet materials]

[0044] The following section explains the measurement of the resistance of sheet P.

[0045] like Figure 1 as well as Figure 3 As shown in (A), the measurer S (reference) Figure 1 The sheet P is placed on the upper surface 22A of the second frame 22 of the sheet resistance measuring device 10. At this time, the front end PA of the sheet P is positioned against the side of the protrusion 21.

[0046] like Figure 3 As shown in (B), the measurer S (reference) Figure 1 The first frame 20 is pressed from above, causing the electrode 50 to contact the upper surface of the sheet P. Additionally, the contact member 150, which protrudes further downwards than the electrode 50, contacts the sheet P first. Since the contact member 150 is made of rubber, it undergoes elastic deformation and compression upon contact, allowing the electrode 50 to contact the sheet P. That is, the sheet P is sandwiched between the lower surface 50A of the electrode 50, the lower surface 150A of the contact member 150, and the upper surface 22A of the second frame 22. Furthermore, the switch 130 is turned on.

[0047] Control device 190 (reference) Figure 4 After a preset time has elapsed since switch 130 is turned on, the resistance between the two electrodes 50 in contact with sheet P is measured. Additionally, in this embodiment, the surface resistance of sheet P between the two electrodes 50 is measured. The measured resistance of sheet P is displayed on a display unit (not shown).

[0048] [effect]

[0049] The function of this implementation method will be explained next.

[0050] In the sheet resistance measuring device 10 of this embodiment, before the electrode 50 contacts the upper surface of the sheet P, the contact member 150 provided between the electrodes 50 first contacts the sheet P. After contact, the contact member 150 undergoes elastic deformation and is compressed, thereby bringing the electrode 50 into contact with the sheet P.

[0051] In the case of the sheet resistance measuring instrument of the comparative example without the contact member 150, when the sheet P is placed on the upper surface 22A of the second frame 22 or when the electrode contacts the sheet P, the sheet P may wrinkle, which will lead to a decrease in the accuracy of the resistance measurement.

[0052] In contrast, in the sheet resistance measuring device 10 of this embodiment, a contact member 150 located between the two electrodes 50 contacts the sheet P, thereby suppressing the formation of wrinkles in the sheet P. Therefore, compared to the case where only the electrodes 50 are used to contact the sheet P, the formation of wrinkles in the sheet P can be suppressed.

[0053] Furthermore, in the sheet resistance measuring device 10 of this embodiment, the contact member 150 located between the two electrodes 50 protrudes further downward than the electrodes 50. Therefore, the contact member 150 contacts the sheet P first, suppressing the formation of wrinkles in the sheet P, and then the electrodes 50 contact the sheet P. Thus, compared to the case where the contact member 150 and the electrodes 50 are flush, i.e., the contact member 150 and the electrodes 50 contact the sheet P simultaneously, the formation of wrinkles in the sheet P can be suppressed.

[0054] Furthermore, in the sheet resistance measuring device 10 of this embodiment, the second frame 22 is disposed on the lower side of a worktable or similar surface (not shown), and the sheet P is placed on the upper surface 22A of the second frame 22. The moving mechanism 100 moves the upper first frame 20 downwards relative to the upper surface 22A of the second frame 22, thereby bringing the electrode 50 and the contact member 150 into contact with the sheet P. Therefore, compared to the case where the first frame 20 moves laterally relative to the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0055] Furthermore, in the sheet resistance measuring device 10 of this embodiment, the first frame 20 moves vertically relative to the upper surface 22A of the second frame 22 via the guide mechanism 108. Therefore, compared to the case where the first frame 20 moves at an angle relative to the upper surface 22A of the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0056] In this way, the formation of wrinkles in sheet P is suppressed, and therefore the decrease in the accuracy of resistance measurement caused by wrinkles in sheet P is suppressed.

[0057] <Second Implementation>

[0058] The sheet resistance measuring device according to the second embodiment of this disclosure will be described. Furthermore, components identical to those in the first embodiment will be labeled with the same symbols, and repeated descriptions will be omitted or simplified.

[0059] [structure]

[0060] The structure of the sheet resistance meter is described.

[0061] Figure 5 (A) Figure 5 (B) and Figure 5 The sheet resistance measuring device 11 shown in (C) is a measuring device for measuring the resistance of sheet materials P such as paper.

[0062] The upper surface 22A of the second frame 22 serves as the mounting surface for the sheet P. In the first frame 20, electrodes 50 are provided at intervals along the X direction, protruding from the lower surface 20A toward the second frame 22. A contact member 155 is provided between the two electrodes 50. The contact member 155 is made of a conductive material, and in this embodiment, it is made of metal. Furthermore, the contact member 155 is electrically grounded. Moreover, "conductivity" refers to the property that allows electricity to pass through easily, expressed as approximately 1 × 10⁻⁶ in terms of volume resistivity. -3 The range is less than cm.

[0063] like Figure 5 As shown in (A), with the first frame 20 isolated from the second frame 22, the lower surface 155A of the contact member 155 becomes flush with the lower surface 50A of the electrode 50.

[0064] like Figure 5 As shown in (C), the contact member 155 is configured such that it is connected to the isolation mechanism 154 (see reference). Figure 6 The contact member 155 moves upwards and is stored in the first frame 20 at the top. Any type of isolation mechanism 154 may be used, but in this embodiment, a mechanism that moves the contact member 155 up and down via a solenoid is employed.

[0065] like Figure 6 As shown, the sheet resistance meter 11 has a control device 190. A switch 130 (see reference 190) is electrically connected to the control device 190. Figure 5 (A) Figure 5 (B) and Figure 5 (C)), Electrode 50 (refer to) Figure 5 (A) Figure 5 (B) and Figure 5 (C) and 154 isolation facilities.

[0066] [Measurement of the resistance of sheet materials]

[0067] The following section explains the measurement of the resistance of sheet P.

[0068] like Figure 5 As shown in (A), a sheet P is disposed on the upper surface 22A of the second frame 22 of the sheet resistance meter 11. At this time, the front end PA of the sheet P is positioned by pressing against the side of the protrusion 21.

[0069] like Figure 5 As shown in (B), the measurer S (reference) Figure 1 Pressing the first frame 20 from above causes the electrode 50 and the contact member 155 to contact the upper surface of the sheet P. That is, the sheet P is sandwiched between the lower surface 50A of the electrode 50 and the lower surface 155A of the contact member 155, and the upper surface 22A of the second frame 22. Moreover, the switch 130 is turned on.

[0070] Control device 190 (reference) Figure 4 When switch 130 turns on and a preset time has elapsed, such as Figure 5 As shown in (C), the isolation mechanism 154 is first controlled to move the contact member 155 upward away from the sheet P, so that the upper side is retained in the first frame 20.

[0071] After the contact member 155 moves upward, the control device 190 measures the resistance between the two electrodes 50 in contact with the sheet P. In this embodiment, the surface resistance of the sheet P between the two electrodes 50 is also measured. The measured resistance of the sheet P is displayed on a display section (not shown).

[0072] Additionally, after the measurement, when the first frame 20 moves upward and the switch 130 becomes open, the control device 190 controls the isolation mechanism 154 to return the contact member 155. Figure 5 The position of (A).

[0073] [effect]

[0074] The function of this implementation method will be explained next.

[0075] In the sheet resistance measuring device 11 of this embodiment, the electrode 50 contacts the upper surface of the sheet P, and the contact member 155 provided between the electrodes 50 contacts the sheet P. Thus, by having the contact member 155 between the two electrodes 50 contact the sheet P, the generation of wrinkles in the sheet P is suppressed. Therefore, compared to the case where only the electrodes 50 are used to contact the sheet P, the generation of wrinkles in the sheet P can be suppressed.

[0076] Furthermore, in this embodiment, the sheet resistance meter 11 is installed on a workbench or similar surface (not shown), with the second frame 22 positioned downwards, and the sheet P is placed on the upper surface 22A of the second frame 22. The moving mechanism 100 moves the upper first frame 20 downwards relative to the upper surface 22A of the second frame 22, causing the electrode 50 and the contact member 155 to contact the sheet P. Therefore, compared to the case where the first frame 20 moves laterally relative to the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0077] Furthermore, in the sheet resistance measuring device 11 of this embodiment, the first frame 20 moves vertically relative to the upper surface 22A of the second frame 22 via the guide mechanism 108. Therefore, compared to the case where the first frame 20 moves at an angle relative to the upper surface 22A of the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0078] In this way, the formation of wrinkles in sheet P is suppressed, and therefore the decrease in the accuracy of resistance measurement caused by wrinkles in sheet P is suppressed.

[0079] Furthermore, in the sheet resistance measuring device 11 of this embodiment, the contact member 155 provided between the two electrodes 50 leaves the sheet P during the process of measuring the resistance of the sheet P by the electrodes 50.

[0080] Therefore, compared to the case where the contact member 155 contacts the sheet P during the resistance measurement process using electrode 50, the range of materials that can be selected for the contact member 155 is wider. For example, as in this embodiment, the contact member 155 can be made of a conductive metal. In addition, by making the contact member 155 conductive and electrically grounding it, static electricity can be eliminated from the surface of the sheet P, thereby improving the accuracy of the resistance measurement.

[0081] <Third Implementation Method>

[0082] The sheet resistance measuring device according to the third embodiment of this disclosure will be described. Furthermore, components identical to those in the first and second embodiments will be labeled with the same symbols, and repeated descriptions will be omitted or simplified.

[0083] [structure]

[0084] The structure of the sheet resistance meter is described.

[0085] Figure 7 (A) and Figure 5 The sheet resistance measuring device 13 shown in (B) is a measuring device for measuring the resistance of sheet materials P such as paper.

[0086] In the first frame 20, electrodes 50 are provided at intervals along the X direction, protruding from the lower surface 20A toward the second frame 22. A contact member 250 is provided between the two electrodes 50. The contact member 250 comprises an insulating material, in this embodiment, a synthetic resin.

[0087] The contact member 250 protrudes further toward the second frame 22 than the electrode 50. That is, the lower surface 250A of the contact member 250 is located further below the lower surface 50A of the electrode 50.

[0088] The upper surface 22A of the second frame 22 serves as the mounting surface for the sheet P. A recess 200 is formed in the upper surface 22A of the second frame 22 at the location corresponding to the contact member 250.

[0089] like Figure 8 As shown, the sheet resistance meter 13 has a control device 190. A switch 130 (see reference 190) is electrically connected to the control device 190. Figure 7 (A) and Figure 7 (B) and electrode 50 (refer to) Figure 7 (A) and Figure 7 (B)

[0090] [Measurement of the resistance of sheet materials]

[0091] The following section explains the measurement of the resistance of sheet P.

[0092] like Figure 7 As shown in (A), a sheet P is disposed on the upper surface 22A of the second frame 22 of the sheet resistance meter 13. At this time, the front end PA of the sheet P is positioned by pressing against the side of the protrusion 21.

[0093] like Figure 7 As shown in (B), the measurer S (reference) Figure 1 The first frame 20 is pressed from above, causing the electrode 50 to contact the upper surface of the sheet P. At this time, the contact member 250, which protrudes further downward than the electrode 50, contacts the sheet P first. The sheet P is bent by the pressure of the contact member 250, and the bent portion PB enters the recess 200 of the upper surface 22A of the second frame 22. The sheet P is sandwiched between the lower surface 50A of the electrode 50 and the lower surface 250A of the contact member 250 and the upper surface 22A of the second frame 22. Moreover, the switch 130 is turned on.

[0094] Control device 190 (reference) Figure 8 After a preset time has elapsed since switch 130 is turned on, the resistance between the two electrodes 50 in contact with sheet P is measured. Additionally, in this embodiment, the surface resistance of sheet P between the two electrodes 50 is measured. The measured resistance of sheet P is displayed on a display unit (not shown).

[0095] [effect]

[0096] The function of this implementation method will be explained next.

[0097] In the sheet resistance measuring device 13 of this embodiment, before the electrodes 50 contact the upper surface of the sheet P, the contact member 250 provided between the electrodes 50 first contacts the sheet P. The sheet P is pressed and bent by the contact member 250, and the bent portion PB enters the recess 200 of the upper surface 22A of the second frame 22.

[0098] Thus, the contact member 250 located between the two electrodes 50 contacts the sheet P, suppressing the formation of wrinkles in the sheet P. Therefore, compared to the case where only the electrodes 50 are used to contact the sheet P, the formation of wrinkles in the sheet P can be suppressed.

[0099] Furthermore, in the sheet resistance measuring device 13 of this embodiment, the contact member 250 located between the two electrodes 50 protrudes further downward than the electrodes 50. Therefore, the contact member 250 contacts the sheet P first, suppressing the formation of wrinkles in the sheet P, and then the electrodes 50 contact the sheet P. Thus, compared to the case where the contact member 150 is flush with the electrodes 50, i.e., the contact member 150 and the electrodes 50 contact the sheet P simultaneously, the formation of wrinkles in the sheet P can be suppressed.

[0100] In this embodiment, the sheet P is bent by the contact member 250, and the bent portion PB enters the recess 200 in the upper surface 22A of the second frame 22. By bending the sheet P by the contact member 250 in this way, the formation of wrinkles in the sheet P is effectively suppressed.

[0101] Furthermore, in this embodiment, the sheet resistance meter 13 is installed on a workbench or similar surface (not shown), with the second frame 22 positioned downwards, and the sheet P is placed on the upper surface 22A of the second frame 22. The moving mechanism 100 moves the upper first frame 20 downwards relative to the upper surface 22A of the second frame 22, thereby bringing the electrode 50 and the contact member 250 into contact with the sheet P. Therefore, compared to the case where the first frame 20 moves laterally relative to the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0102] Furthermore, in the sheet resistance measuring device 13 of this embodiment, the first frame 20 moves vertically relative to the upper surface 22A of the second frame 22 via the guide mechanism 108. Therefore, compared to the case where the first frame 20 moves at an angle relative to the upper surface 22A of the second frame 22, the generation of wrinkles in the sheet P can be suppressed.

[0103] In this way, the formation of wrinkles in sheet P is suppressed, and therefore the decrease in resistance measurement accuracy caused by wrinkles in sheet P is suppressed. Furthermore, in this embodiment, a bend PB is formed in sheet P. However, the shape of the bend PB is fixed or substantially fixed, so the formation of the bend PB will not affect the measurement accuracy, or if there is any effect, it will be negligible.

[0104] <Fourth Implementation>

[0105] The sheet resistance measuring device according to the fourth embodiment of this disclosure will be described. Furthermore, components identical to those in the first, second, and third embodiments will be labeled with the same symbols, and repeated descriptions will be omitted or simplified.

[0106] [structure]

[0107] The structure of the sheet resistance meter is described.

[0108] Figure 9 (A) and Figure 9 The sheet resistance meter 15 shown in (B) is a measuring instrument for measuring the resistance of a sheet P such as paper. The sheet resistance meter 15 has a frame 312 with a gap 314 formed to hold the sheet P. The frame 312 is composed of a first frame 320 and a second frame 322. A protrusion 321 is provided at the end of the first frame 320 in the X direction. In this embodiment, the sheet resistance meter 15 is used on a worktable or the like (not shown) with the second frame 322 facing downwards.

[0109] The sheet resistance meter 15 has a rotating mechanism 300, which causes the protrusion 321 at the end of the first frame 320 to rotate about the axis 350 relative to the end 322B of the second frame 322, so as to open and close the first frame 320.

[0110] At the end 322B of the second frame 322, there is a switch 130 with an operating lever 132. Figure 9 As shown in (A), when the first frame 320 is open relative to the second frame 322, the switch 130 becomes open. However, as Figure 9 As shown in (B), when the measurer S (reference) Figure 1 When the first frame 320 is pressed toward the second frame 322 to close it, the operating lever 132 of the switch 130 touches the side 321A of the protrusion 321, and the switch 130 becomes on.

[0111] like Figure 9 (A) and Figure 9 As shown in (B), the upper surface 322A of the second frame 322 becomes the mounting surface for the sheet P.

[0112] Furthermore, electrodes 50 are provided in the first frame 320 at intervals along the X direction, protruding from the lower surface 20A toward the second frame 322. A contact member 150 is provided between the two electrodes 50, similar to that in the first embodiment.

[0113] like Figure 10 As shown, the sheet resistance meter 15 has a control device 190. A switch 130 (see reference 190) is electrically connected to the control device 190. Figure 9 (A) and Figure 9 (B) and electrode 50 (refer to) Figure 9 (A) and Figure 9 (B)

[0114] [Measurement of the resistance of sheet materials]

[0115] The following section explains the measurement of the resistance of sheet P.

[0116] like Figure 9 As shown in (A), a sheet P is disposed on the upper surface 322A of the second frame 322 of the sheet resistance measuring device 15.

[0117] like Figure 9 As shown in (B), the measurer S (reference) Figure 1 The first frame 320 is closed, causing the electrode 50 to contact the upper surface of the sheet P. At this time, the contact member 150, which protrudes further downward than the electrode 50, contacts the sheet P first. Since the contact member 150 is made of rubber, it undergoes elastic deformation and compression upon contact, allowing the electrode 50 to contact the sheet P. That is, the sheet P is sandwiched between the lower surface 50A of the electrode 50, the lower surface 150A of the contact member 150, and the upper surface 322A of the second frame 322. Furthermore, the switch 130 is turned on.

[0118] Control device 190 (reference) Figure 10 After a preset time has elapsed since switch 130 is turned on, the resistance between the two electrodes 50 in contact with sheet P is measured. Additionally, in this embodiment, the surface resistance of sheet P between the two electrodes 50 is measured. The measured resistance of sheet P is displayed on a display unit (not shown).

[0119] [effect]

[0120] The function of this implementation method will be explained next.

[0121] In the sheet resistance measuring device 15 of this embodiment, before the electrodes 50 contact the upper surface of the sheet P, the contact member 150 provided between the electrodes 50 first contacts the sheet P. Upon contact, the contact member 150 undergoes elastic deformation and is compressed, thereby bringing the electrodes 50 into contact with the sheet P. In this way, the contact member 150 provided between the two electrodes 50 contacts the sheet P, thereby suppressing the formation of wrinkles in the sheet P. Therefore, compared to the case where only the electrodes 50 are used to contact the sheet P, the formation of wrinkles in the sheet P can be suppressed.

[0122] Furthermore, in the sheet resistance measuring device 15 of this embodiment, the contact member 150 located between the two electrodes 50 protrudes further downward than the electrodes 50. Therefore, the contact member 150 contacts the sheet P first, suppressing the formation of wrinkles in the sheet P, before the electrodes 50 contact the sheet P. Thus, compared to the case where the contact member 150 and the electrodes 50 are flush, i.e., the contact member 150 and the electrodes 50 contact the sheet P simultaneously, the formation of wrinkles in the sheet P can be suppressed.

[0123] Furthermore, in this embodiment, the sheet resistance meter 15 is installed on a workbench or similar surface (not shown), with the second frame 322 positioned downwards, and the sheet P is placed on the upper surface 322A of the second frame 322. The rotation mechanism 300 moves the upper first frame 320 downwards relative to the upper surface 322A of the second frame 322, causing the electrode 50 and the contact member 150 to contact the sheet P. Therefore, compared to the case where the first frame 320 moves laterally relative to the second frame 322, the generation of wrinkles in the sheet P can be suppressed.

[0124] In this way, the formation of wrinkles in sheet P is suppressed, and therefore the decrease in the accuracy of resistance measurement caused by wrinkles in sheet P is suppressed.

[0125] Furthermore, in the sheet resistance measuring device 15, the protrusion 321 at the end of the first frame 320 rotates about the rotation axis 350 relative to the end 322B of the second frame 322, thereby bringing the first frame 320 closer to the upper surface 322A of the second frame 322. Therefore, for example, the mechanism is simpler compared to the case where the first frame 320 moves vertically relative to the upper surface 322A of the second frame 322.

[0126] <Other>

[0127] Furthermore, this disclosure is not limited to the described embodiments.

[0128] For example, in the described embodiment, the two electrodes 50 are spaced apart along the X direction, but this is not a limitation. For example, the two electrodes 50 may also be spaced apart along the Y direction.

[0129] For example, as in the first, third, and fourth embodiments, when the contact members 150 and 250 are insulated, the contact members 150 and 250 can also contact the sides of the electrode 50. Furthermore, the length in the X direction, the length in the Y direction, and the planar shape of the contact members can be appropriately set. Moreover, multiple contact members can be provided between the two electrodes 50.

[0130] Furthermore, in the first and fourth embodiments, for example, the contact member 150 includes an elastomer, but is not limited thereto. Non-elastic contact members may also be mounted to the first frame 20 and the first frame 320 via elastomers such as rubber, springs, and air cushions.

[0131] Furthermore, the structure is not limited to the described embodiment; various structures can be employed. Moreover, it can be implemented in various ways without departing from the spirit of this disclosure.

Claims

1. A sheet resistance measuring instrument, comprising: A pair of frames, sandwiching the sheet from both sides; A pair of electrodes are disposed in one of the frames, and the sheet is sandwiched between the other frame to measure the resistance of the sheet; as well as A contact member, disposed between a pair of electrodes in one of the frames, contacts the sheet. The contact component is insulating.

2. The sheet resistance measuring device according to claim 1, wherein... The contact member comprises or is mounted on one of the frames via an elastomer and protrudes further toward the other frame than the electrode before contacting the sheet.

3. The sheet resistance measuring device according to claim 1, wherein... The contact member protrudes further toward the other side of the frame than the electrode. In another of the frames, a recess is formed at the location corresponding to the contact member.

4. The sheet resistance measuring device according to claim 1 or 2, comprising: An isolation mechanism that isolates the contact member from the sheet during the process of measuring resistance using the electrodes.

5. The sheet resistance measuring device according to claim 1, wherein... Another of the frames has the sheet placed on its upper surface. The sheet resistance meter has a moving mechanism that moves one of the frames from top to bottom relative to the upper surface of the other frame.

6. The sheet resistance measuring device according to claim 5, wherein... The moving mechanism has a guiding mechanism that causes one of the frames to move vertically relative to the upper surface of the other frame.

7. The sheet resistance measuring device according to claim 5, wherein... The moving mechanism has a rotating mechanism that allows one end of the frame to rotate about a rotation axis located at the end of the other frame.

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