Liquid supply apparatus and liquid supply method

Abstract

This invention provides a liquid supply device and a liquid supply method that reliably connects a plug-side liquid flow path to a socket-side liquid flow path regardless of the orientation of the plug fixed to the opening of a liquid storage container. The liquid supply device includes: a plug having a plug-side liquid flow path; a socket having a socket-side liquid flow path; a robotic arm that holds the socket and positions it in a three-dimensional position within its range of motion; and a camera that identifies the orientation of the plug axis of the plug. The robotic arm holds the socket in a manner that aligns the orientation of the plug axis identified by the camera with the orientation of the socket axis. The socket held by the robotic arm is then inserted into the plug, thereby connecting the socket-side liquid flow path to the plug-side liquid flow path.

Description

Technical Field

[0001] This invention relates to a liquid supply device and a liquid supply method. Background Technology

[0002] Conventional liquid supply devices are known to supply liquid contained in a liquid storage container to multiple supply target devices (see, for example, Patent Document 1). In the liquid supply device disclosed in Patent Document 1, a plug is fixed to the opening of the liquid storage container, and a liquid flow path formed in the plug and a liquid flow path formed in the socket are connected by installing a socket onto the plug. When installing the socket onto the plug, an operator engages the external thread of the mounting nut formed in the socket with the internal thread formed in the plug.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-20793 Summary of the Invention

[0006] In the liquid supply device disclosed in Patent Document 1, when connecting the liquid flow path formed in the plug to the liquid flow path formed in the socket, the operator needs to hold the socket and install it onto the plug. Therefore, there is a possibility that the operator's workload will increase, and the operator will be exposed to danger when handling highly hazardous liquids.

[0007] Therefore, to prevent increased workload for workers or exposure to hazards, it is considered to use a robotic arm to hold the socket, thereby automating the process of installing the socket onto the plug. For example, it is considered to pre-store the plug position disclosed in Patent Document 1 and use a robotic arm to move the socket to the stored position.

[0008] However, since the position or orientation of the opening varies from one liquid storage container to another, the position or orientation of the plug located at the opening also varies from one liquid storage container to another. In addition, when the internal pressure of the liquid storage container changes due to the state of the liquid contained in the liquid storage container or the ambient temperature, the orientation of the opening for fixing the plug changes accordingly.

[0009] In these situations, even if the socket is moved precisely to a pre-set position in three-dimensional space, there is a possibility that the socket cannot be installed according to the position or orientation of the plug. Furthermore, when the socket and plug are connected with inconsistent orientations, there is a possibility that a load is applied to both the socket and plug, and this load accumulates, leading to a malfunction.

[0010] The present invention was made in view of the above circumstances, and its object is to provide a liquid supply device and a liquid supply method that can reliably connect the liquid flow path on the plug side and the liquid flow path on the socket side regardless of the orientation of the plug fixed to the opening of the liquid storage container.

[0011] To solve the above problems, the present invention adopts the following approach.

[0012] One aspect of the present invention relates to a liquid supply device comprising: a first plug fixed to a first opening provided on the upper surface of a liquid receiving container, and having a plug-side liquid flow path extending along the axis of the first plug; a first socket detachably mounted to the first plug, and having a socket-side liquid flow path extending along the axis of the first socket; a gripping mechanism gripping the first socket and positioning the first socket in a three-dimensional position within its range of motion in a predetermined posture; and an identification unit identifying the orientation of the first plug axis of the first plug, wherein the gripping mechanism grips the first socket in such a manner that the orientation of the first plug axis identified by the identification unit coincides with the orientation of the first socket axis, and the first socket held by the gripping mechanism is inserted into the first plug, thereby connecting the socket-side liquid flow path with the plug-side liquid flow path.

[0013] According to one aspect of the liquid supply device of the present invention, an identification unit identifies the orientation of the first plug axis of the first plug, and a gripping mechanism grips the first socket in such a manner that the orientation of the first plug axis aligns with the orientation of the first socket axis. The first socket, gripped by the gripping mechanism, is inserted into the first plug, thereby connecting the socket-side liquid flow path with the plug-side liquid flow path. Since the first socket is gripped by the gripping mechanism in an appropriate orientation relative to the first plug, the plug-side liquid flow path can be reliably connected to the socket-side liquid flow path regardless of the orientation of the first plug, which is fixed to the first opening of the liquid receiving container.

[0014] In a liquid supply device according to one aspect of the present invention, the following structure is preferred: a first groove is formed at the top of the first plug, the first groove extending in an annular shape around the axis of the first plug and having a plug-side fixing portion; a first protrusion is formed at the top of the first socket, the first protrusion extending in an annular shape around the axis of the first socket and having a socket-side fixing portion; the gripping mechanism inserts the first protrusion into the first groove such that the socket-side fixing portion is positioned at a position at a first predetermined distance from the plug-side fixing portion in the direction of the first plug axis identified by the identification portion; the first socket has an adjustment portion that adjusts the position of the socket-side fixing portion relative to the gripping position held by the gripping mechanism on the axis of the first socket, so that the socket-side fixing portion is fixed to the plug-side fixing portion in a fixed state.

[0015] According to the liquid supply device with the above structure, the first protrusion of the first socket can be inserted into the first groove of the first plug by the gripping mechanism, and the socket-side fixing part can be fixed to the plug-side fixing part by the adjustment part of the socket.

[0016] In the liquid supply device with the above structure, it is preferable to release the fixed state by adjusting the position of the socket-side fixing part relative to the gripping position on the axis of the first socket.

[0017] According to the liquid supply device of this method, by adjusting the position of the socket-side fixing part used to fix the socket-side fixing part to the plug-side fixing part, the fixed state in which the socket-side fixing part is fixed to the plug-side fixing part can be released.

[0018] In the liquid supply device described above, it is preferable that the gripping mechanism grips the first socket removed from the first plug, moving the first socket to a cleaning container containing cleaning fluid for cleaning the first socket.

[0019] According to the liquid supply device described above, the first socket, which has been removed from the first plug, can be moved to a cleaning container and the first socket can be cleaned with cleaning fluid.

[0020] In a liquid supply device according to one aspect of the present invention, a preferred structure includes: a first cover portion that seals the liquid flow path on the plug side and has a first insertion portion that is inserted into the first groove portion; and a rotating mechanism having a holding portion that holds the first cover portion and rotates the holding portion about the axis of the first cover portion, a first thread portion being formed in the first insertion portion of the first cover portion, a second thread portion being formed in the first groove portion of the first plug portion that engages with the first thread portion, the gripping mechanism gripping the rotating mechanism in such a way that the orientation of the axis of the first plug portion identified by the identification portion is aligned with the orientation of the axis of the first cover portion, the rotating mechanism rotating the holding portion in a predetermined direction while the first cover portion is held by the holding portion, thereby removing the first cover portion from the first plug portion.

[0021] According to the liquid supply device with the above structure, the identification unit identifies the orientation of the first plug axis of the first plug, and the gripping mechanism grips the rotating mechanism in a manner that aligns the orientation of the first plug axis with the orientation of the first cover axis. By rotating the retaining part of the rotating mechanism held by the gripping mechanism in a predetermined direction, the first cover held by the retaining part is thereby removed from the first plug. Since the rotating mechanism is gripped by the gripping mechanism in an appropriate posture relative to the orientation of the first plug, the first cover can be reliably removed from the first plug regardless of the orientation of the plug fixed to the opening of the liquid storage container.

[0022] In the liquid supply device with the above structure, it is preferable that the rotating mechanism rotates the holding part in the opposite direction of the predetermined direction while the first cover is held by the holding part, thereby installing the first cover onto the first plug.

[0023] According to the liquid supply device of this method, the retaining part can be rotated in the opposite direction of the predetermined direction by a rotating mechanism used to remove the first cover from the first plug, thereby enabling the first cover to be installed on the first plug.

[0024] In a liquid supply device according to one aspect of the present invention, a preferred structure includes: a second plug fixed to a second opening provided on the upper surface of the liquid receiving container, and having a plug-side gas flow path extending along the axis of the second plug; and a second socket detachably mounted to the second plug, and having a socket-side gas flow path extending along the axis of the second socket, wherein the identification portion identifies the orientation of the second plug axis of the second plug, and the gripping mechanism grips the second socket in such a way that the orientation of the second plug axis identified by the identification portion aligns with the orientation of the second socket axis, and the second socket held by the gripping mechanism is inserted into the second plug, thereby connecting the socket-side gas flow path with the plug-side gas flow path.

[0025] According to the liquid supply device of this structure, the identification unit identifies the orientation of the second plug axis of the second plug, and the gripping mechanism grips the second socket in a manner that aligns the orientation of the second plug axis with the orientation of the second socket axis. The second socket, gripped by the gripping mechanism, is inserted into the second plug, thereby connecting the socket-side gas flow path with the plug-side gas flow path. Since the second socket is gripped by the gripping mechanism in an appropriate orientation relative to the second plug, the plug-side gas flow path can be reliably connected to the socket-side gas flow path regardless of the orientation of the second plug fixed to the second opening of the liquid receiving container.

[0026] One aspect of the present invention relates to a liquid supply method for supplying liquid via a liquid supply device, characterized in that the liquid supply device comprises: a first plug fixed to a first opening provided on the upper surface of a liquid receiving container and having a plug-side liquid flow path extending along the axis of the first plug; a first socket detachably mounted to the first plug and having a socket-side liquid flow path extending along the axis of the first socket; and a gripping mechanism that grips the first socket and positions the first socket in a three-dimensional position within a range of motion in a predetermined posture, the liquid supply method comprising: an identification step for identifying the orientation of the first plug axis of the first plug; a gripping step for gripping the first socket by the gripping mechanism in such a manner that the orientation of the first plug axis identified by the identification step coincides with the orientation of the first socket axis; and a connection step for inserting the first socket, gripped by the gripping step, into the first plug, thereby connecting the socket-side liquid flow path with the plug-side liquid flow path.

[0027] According to one aspect of the liquid supply method of the present invention, the orientation of the first plug axis of the first plug is identified in the identification step, and the first socket is held by a holding mechanism in a holding step such that the orientation of the first plug axis is aligned with the orientation of the first socket axis. The first socket held in the holding step is inserted into the first plug, thereby connecting the socket-side liquid flow path with the plug-side liquid flow path. Since the first socket is held by the holding mechanism in an orientation appropriate to the first plug, the plug-side liquid flow path can be reliably connected with the socket-side liquid flow path regardless of the orientation of the first plug fixed to the first opening of the liquid receiving container.

[0028] Invention Effects

[0029] According to the present invention, a liquid supply device and a liquid supply method are provided that can reliably connect the liquid flow path on the plug side to the liquid flow path on the socket side regardless of the orientation of the plug fixed to the opening of the liquid storage container. Attached Figure Description

[0030] Figure 1 This is a side view of the liquid supply device according to the first embodiment of the present invention, showing the state in which the robotic arm holds the socket for transport.

[0031] Figure 2 This is a side view of the liquid supply device according to the first embodiment of the present invention, showing the state in which the robotic arm positions the socket near the plug.

[0032] Figure 3 Viewed from above Figure 1 The top view of the liquid supply device shown illustrates the state of the robotic arm gripping the socket for transport.

[0033] Figure 4 This is a flowchart illustrating the control method of the liquid supply device according to this embodiment, showing the process of installing the socket onto the plug.

[0034] Figure 5 This is a diagram showing the image obtained by the camera capturing the upper surface of the plug.

[0035] Figure 6 This is a partial cross-sectional view showing the state of the cover clamp being moved near the plug.

[0036] Figure 7 It is a partial cross-sectional view showing the state in which the cover is held by the cover clamp.

[0037] Figure 8 This is a partial cross-sectional view showing the state in which the cover is removed from the plug by the cover clamp.

[0038] Figure 9 It is a partial cross-sectional view showing the state of the socket being moved near the plug.

[0039] Figure 10 It is a partial cross-sectional view showing the state of the socket being inserted into the plug.

[0040] Figure 11 It is a partial cross-sectional view showing the state in which the socket is fixed to the plug.

[0041] Figure 12 This is a flowchart illustrating the control method of the liquid supply device according to this embodiment, showing the process of removing the socket from the plug.

[0042] Figure 13 This is a partial cross-sectional view showing the state before the cover is installed on the plug using the cover clamp.

[0043] Figure 14 This is a side view of the liquid supply device according to the second embodiment of the present invention, showing the state in which the robotic arm positions the socket near the plug.

[0044] Figure 15 This is a side view of the liquid supply device according to the third embodiment of the present invention, showing the state in which the robotic arm positions the socket near the plug.

[0045] Explanation of reference numerals in the attached figures

[0046] 10 plugs (plug 1)

[0047] 12a Fixing slot (plug-side fixing part)

[0048] 12b external thread

[0049] 20 sockets

[0050] 22. Protrusion

[0051] 22a Locking ball (receptacle side fixing part)

[0052] 23 Adjustment Department

[0053] 30. Robotic arm (grip mechanism)

[0054] 31. Robotic Arm

[0055] 40. Photography Department (Identification Department)

[0056] 50 cover

[0057] 60. Cover clamp (rotating mechanism)

[0058] 70 Control Department

[0059] 80 plug (plug number 2)

[0060] 90 socket

[0061] 91 Gas flow path on the socket side

[0062] 100, 100A, 100B Liquid Supply Devices

[0063] 200 Liquid Storage Container

[0064] 210 First opening

[0065] 220 Second opening

[0066] GL1, GL2, GL3 Gas Piping

[0067] LL1, LL2 liquid piping

[0068] Zc1 cover axis

[0069] Zp1 plug axis

[0070] Zs1 socket axis Detailed Implementation

[0071] (First Embodiment)

[0072] Hereinafter, the liquid supply device 100 of the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 and Figure 2 This is a side view showing the liquid supply device 100 of this embodiment. Figure 1 This shows the state in which the robotic arm 30 grasps the socket 20 for transport. Figure 2 This shows the state in which the robotic arm 30 positions the socket 20 near the plug 10. Figure 3 Viewed from above Figure 1 The top view of the liquid supply device 100 shown illustrates the state in which the robotic arm 30 grips the socket 20 for transport.

[0073] Figure 1 The liquid supply device 100 shown in this embodiment is a device that supplies liquid contained in a liquid storage container 200 to multiple supply target devices (not shown). Here, the liquid in this embodiment is, for example, pure water or various pharmaceutical solutions used in the semiconductor manufacturing process of a semiconductor manufacturing apparatus.

[0074] like Figures 1 to 3 As shown, the liquid supply device 100 includes: a plug (first plug) 10, a sealing plug 15, a socket (first socket) 20, a robotic arm (gripping mechanism) 30, a camera (recognition unit) 40, a cover (first cover) 50, a cover clamp (rotation mechanism) 60, and a control unit 70. Regarding the liquid supply device 100 of this embodiment, even if the internal space of the liquid storage container 200 is deformed due to pressurization, and the orientation of the plug 10 fixed to the first opening 210 changes, the socket 20 can be appropriately fixed to the plug 10 regardless of the orientation of the plug 10.

[0075] like Figure 1 As shown, the liquid storage container 200 is a cylindrical container formed around an axis Z1 extending in the vertical direction, and a first opening 210 and a second opening 220 are provided on the upper surface (top plate). Internal threads are formed on the inner circumferential surfaces of the first opening 210 and the second opening 220.

[0076] The position or orientation of the first opening 210 of the liquid storage container 200 varies depending on the individual liquid storage container 200, and therefore the position or orientation of the plug 10 provided at the first opening 210 also varies depending on the individual liquid storage container 200. Furthermore, when the internal pressure of the liquid storage container changes due to the state of the liquid contained in the liquid storage container 200 or the ambient temperature, the orientation of the first opening 210 for securing the plug 10 changes accordingly. In this embodiment, the liquid supply device 100 reliably connects the plug 10 to the socket 20 even when the orientation of the first opening 210 changes due to differences in the shape of the individual liquid storage container 200 or the ambient temperature.

[0077] The plug 10 is fixed to the first opening 210 and has a plug-side liquid flow path 11 extending along the plug axis (first plug axis) Zp1. The plug-side liquid flow path 11 extends to the bottom 230 of the liquid receiving container 200. An external thread is formed on the outer peripheral surface of the upper end of the plug 10. The plug 10 is fixed to the first opening 210 by engaging the external thread of the plug 10 with the internal thread of the first opening 210.

[0078] Figure 6 This is a partial cross-sectional view showing the state in which the cover clamp 60 is moved to the vicinity of the plug 10. (Example) Figure 6 As shown, a groove (first groove) 12 extending in a circular shape around the plug axis Zp1 is formed at the top (upper end) of the plug 10. The groove 12 has a fixing groove (plug-side fixing part) 12a for fixing the locking ball 22a of the socket 20. The fixing groove 12a is formed in a circular shape around the plug axis Zp1. An external thread (second threaded part) 12b is formed in the groove 12 of the plug 10 to engage with the internal thread 51a of the cover 50.

[0079] The sealing plug 15 is a component that is fixed to and seals the second opening 220. An external thread is formed on the outer peripheral surface of the sealing plug 15. The sealing plug 15 is fixed to the second opening 220 by engaging the external thread of the sealing plug 15 with the internal thread of the second opening 220.

[0080] The socket 20 is detachably mounted to the plug 10 and has a socket-side liquid flow path 21 extending along the socket axis (first socket axis) Zs1. The socket 20 is connected to a liquid piping LL1 for supplying liquid to the target device and a gas piping GL1 for supplying gas to the liquid collection container 200. The socket 20 is held by the robotic arm 30's robotic hand 31.

[0081] Figure 9 This is a partial cross-sectional view showing the state where the socket 20 is moved to the vicinity of the plug 10. For example... Figure 9As shown, a protrusion (first protrusion) 22 extending in a circular shape around the socket axis Zs1 is formed at the top (bottom) of the socket 20. The protrusion 22 has a plurality of locking balls (socket-side fixing parts) 22a that are fixed in the fixing groove 12a of the plug 10. The locking balls 22a are arranged at multiple intervals around the socket axis Zs1.

[0082] The robotic arm 30 is a mechanism that grips the socket 20 and the cover clamp 60 and positions the socket 20 and the cover clamp 60 in a predetermined posture within its range of motion, defined by the three-dimensional positions of axes X, Y, and Z. The robotic arm 30 is, for example, a 6-axis multi-joint robotic arm. The robotic arm 30 includes a robotic hand 31, a wrist 32, a first arm 33, a second arm 34, a base 35, and a rotating main body 36.

[0083] The rotating main body 36 is supported on the base 35 in a manner that allows it to rotate about the vertical axis Zr1. The first arm 33 is supported on the rotating main body 36 in a manner that allows it to rotate about the horizontal axis Zr2. The second arm 34 is supported on the first arm 33 in a manner that allows it to rotate about the horizontal axis Zr3. One end of the wrist 32 is mounted on the second arm 34, and the other end is mounted on the robotic hand 31.

[0084] By combining the rotation of the main rotating member 36 relative to the base 35, the rotation of the first arm 33 relative to the main rotating member 36, and the rotation of the second arm 34 relative to the first arm 33, the wrist 32 can be positioned at any three-dimensional position within its range of motion. Furthermore, the wrist 32 can rotate on three axes, allowing the robotic hand 31 to be displaced along these three axes to achieve any desired posture.

[0085] The imaging unit 40 is a device that captures images of the upper surface of the plug 10 and identifies the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10. The imaging unit 40 transmits the identification results of the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10 to the control unit 70.

[0086] like Figure 6 As shown, the cover portion (first cover portion) 50 is a component that seals the liquid flow path 11 on the plug side. The cover portion 50 has an insertion portion 51 that is inserted into the groove portion 12 of the plug 10. The insertion portion 51 is formed in a cylindrical shape extending around the cover axis Zc1. An internal thread (first thread portion) 51a is formed on the inner peripheral surface of the insertion portion 51.

[0087] like Figure 6As shown, the cover clamp 60 is a rotating mechanism having a holding portion 61 that holds the cover portion 50 and allows the holding portion 61 to rotate about the cover axis (first cover axis) Zc1. The cover clamp 60 has a transmission portion 64 that transmits the rotational power of the rotating shaft 63 about the cover axis Zc1 to the holding portion 61. The cover clamp 60 transmits the rotational power of the rotating shaft 63 to the holding portion 61, causing the cover portion 50 to rotate about the cover axis Zc1. The holding portion 61 is connected to the cover clamp body 65 via a shaft portion 66. A spring 62 built into the cover clamp body 65 applies a force to the shaft portion 66 in a direction away from the cover clamp body 65.

[0088] Based on the recognition results of the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10 transmitted from the imaging unit 40, the control unit 70 controls the robotic arm 30 to position the socket 20 or cover clamp 60 held by the robotic arm 31 in the desired posture at the desired position.

[0089] Next, refer to Figure 4 The control method of the liquid supply device 100 of this embodiment will be described. Figure 4 This is a flowchart illustrating the control method of the liquid supply device 100 of this embodiment, showing the process of installing the socket 20 onto the plug 10. Figure 4 Each of the processes shown is performed by executing a control program through the control unit 70.

[0090] In step S101, the control unit 70 moves the liquid storage container 200, which contains liquid, from the storage location (not shown) to a predetermined position within the operating range of the robotic arm 30. The control unit 70 can move the liquid storage container 200 to the predetermined position, for example, by moving an unmanned transport vehicle (not shown) carrying the liquid storage container 200. Alternatively, a worker can also use a transport vehicle (not shown) to move the liquid storage container 200.

[0091] A cover 50 is installed on the first opening 210 of the liquid storage container 200 that is moved in during step S101. Additionally, a sealing plug 15 is installed on the second opening 220.

[0092] In step S102 (identification process), the control unit 70 controls the imaging unit 40 to identify the position of the plug 10 and the orientation of the plug axis Zp1. Here, an example of the process by which the imaging unit 40 identifies the position of the plug 10 and the orientation of the plug axis Zp1 will be described.

[0093] Figure 5 This diagram shows the image obtained by the imaging unit 40 capturing the upper surface of the plug 10. For example... Figure 5As shown, circular or approximately circular patterns C1, C2, C3, C4, C5, and C6 are formed on the upper surface of the plug 10. Figure 5 The patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 shown by the dashed lines represent images obtained by the imaging unit 40 when the plug axis Zp1 is aligned with the axis Z1 extending along the vertical direction, and the upper surface of the plug 10 is photographed.

[0094] The center positions of patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6 on the XY plane are Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6, respectively. The imaging unit 40 detects the coordinates of Pr1, Pr2, Pr3, Pr4, Pr5, and Pr6 based on the image of patterns Cr1, Cr2, Cr3, Cr4, Cr5, and Cr6, and stores them in advance in the storage unit (not shown) corresponding to the coordinates Pr (PrX, PrY, PrZ) of a specified portion of the plug 10 in three-dimensional space.

[0095] The imaging unit 40 detects the coordinates of the center positions of the image patterns C1, C2, C3, C4, C5, and C6 in the XY plane, namely P1, P2, P3, P4, P5, and P6, captured in step S102. Then, it compares Pr1 and P1, Pr2 and P2, Pr3 and P3, Pr4 and P4, Pr5 and P5, and Pr6 and P6 respectively to identify the coordinates P (PX, PY, PZ) obtained by correcting the coordinates Pr stored in the storage unit in three-dimensional space. The coordinates P indicate the position of a specified portion of the plug 10 in three-dimensional space as captured by the imaging unit 40. The imaging unit 40 compares Pr1 and P1, Pr2 and P2, Pr3 and P3, Pr4 and P4, Pr5 and P5, and Pr6 and P6 respectively to identify the orientation of the plug axis Zp1.

[0096] In step S103, the control unit 70 controls the robotic arm 30 by gripping the cover clamp 60 set on the setting table TB1. The control unit 70 has pre-stored the position of the cover clamp 60 set on the setting table TB1, and moves the robotic arm 31 to a position near the cover clamp 60 to grip the cover clamp 60.

[0097] In step S104, the control unit 70 controls the robotic arm 30 to move the cover clamp 60 to the vicinity of the plug 10 while the robotic arm 31 is holding the cover clamp 60. The control unit 70 controls the robotic arm 30 to position the holding part 61 at a certain distance from the coordinate P of the plug 10 identified in step S102, along the plug axis Zp1.

[0098] When the cover clamp 60 is positioned near the plug 10, the robotic arm 30 holds the cover clamp 60 in such a way that the orientation of the plug axis Zp1, as identified by the imaging unit 40, is aligned with the orientation of the cover axis Zc1. The alignment of the cover axis Zc1 with the plug axis Zp1 is due to the fact that the orientation of the plug axis Zp1 is not aligned with the orientation of the axis Z1, which extends along the vertical direction.

[0099] like Figure 6 As shown, in the XZ plane, the orientation of the plug axis Zp1 is tilted by an angle θ1 relative to the orientation of the axis Z1 extending in the vertical direction. By aligning the orientation of the cover axis Zc1 with the orientation of the plug axis Zp1, the holding portion 61 of the cover clamp 60 can be moved along the plug axis Zp1 toward the cover portion 50.

[0100] Furthermore, the alignment of the plug axis Zp1 with the cover axis Zc1 does not necessarily mean that the orientations of the plug axis Zp1 and the cover axis Zc1 are the same. For example, even if the orientations of the plug axis Zp1 and the cover axis Zc1 are relative to each other... Figure 6 Even with a sufficiently small angle θ1 as shown, different situations can be considered as the orientation of the plug axis Zp1 being consistent with the orientation of the cover axis Zc1. The same applies in the following explanation.

[0101] In step S105, the control unit 70 controls the robotic arm 30 that holds the cover 50 by means of the cover clamp 60. The robotic arm 30 moves the cover clamp 60 toward the cover 50 along the plug axis Zp1. Figure 6 As shown, the cover clamp 60 has a retaining portion 61 for retaining the cover portion 50.

[0102] like Figure 6 As shown, a locking ball 61a is provided in the retaining part 61 to exert force toward the cover axis Zc1. Additionally, a receiving groove 52 is formed on the upper surface of the cover part 50 to accommodate the retaining part 61. Figure 5 and Figure 6 As shown, a plurality of fixing grooves 52a are formed in the receiving groove 52 for fixing a plurality of locking balls 61a.

[0103] The cover clamp 60 moves toward the cover portion 50 so that the retaining portion 61 is received in the receiving groove 52 and the locking ball 61a is fixed in the fixing groove 52a. When the cover clamp 60 is moved further downward with the locking ball 61a in contact with the central portion 53 of the cover portion 50, the spring 62 contracts and the force of the spring 62 gradually increases.

[0104] When the force of the spring 62 increases and the locking ball 61a moves away from the plug axis Zp1, the locking ball 61a moves to the position of the fixing groove 52a and is fixed in the fixing groove 52a. Thus, the cover 50 is held in place by the holding part 61 of the cover clamp 60.

[0105] Then, when the spring 62, which contracts as the robotic arm 30 moves the cover clamp 60 upward along the plug axis Zp1, reaches its natural length, it becomes... Figure 7 The state shown. (As indicated) Figure 5 As shown, the central portion 53 of the cover portion 50 held by the retaining portion 61, as seen along the plug axis Zp1, is approximately quadrilateral in shape. Furthermore, the retaining portion 61 has a recess that is also approximately quadrilateral in shape as seen along the plug axis Zp1, to accommodate the approximately quadrilateral portion of the cover portion 50. The retaining portion 61 accommodates the central portion 53 in the recess, thereby holding the cover portion 50 in a manner that prevents it from spinning freely.

[0106] In step S106, the control unit 70 rotates the retaining part 61 counterclockwise (in a predetermined direction) while the cover part 50 is held by the retaining part 61, thereby removing the cover part 50 from the plug 10. When the cover part 50 is rotated counterclockwise, the engagement between the external thread 12b of the plug 10 and the internal thread 51a of the cover part 50 is released, becoming... Figure 8 In the state shown, the cover 50 is removed from the plug 10. When the engagement between the external thread 12b of the plug 10 and the internal thread 51a of the cover 50 is released, the retaining part 61 approaches the cover clamp body 65, the spring 62 contracts, and the shaft part 66 is received inside the cover clamp body 65.

[0107] In step S107, the control unit 70 controls the robotic arm 30 to move the cover clamp 60 to the cover standby position while the cover part 50 is held by the holding unit 61. Figure 3 (See the location of reference numeral 50 in the attached drawing). A fixing part (not shown) with an external thread that engages with the internal thread 51a of the cover 50 is provided in the cover standby position.

[0108] The cover clamp 60 transmits the rotational power of the rotating shaft 63 rotating clockwise around the cover axis Zc1 to the holding part 61, causing the cover part 50 to engage with the internal thread of the fixing part, thus fixing the cover part 50 to the fixing part. Then, the control unit 70 controls the robotic arm 30 to move the cover clamp 60, which is not holding the cover part 50, to the cover clamp standby position. Figure 3 (See the location of reference numeral 60 in the attached drawing). Through the above steps S102 to S107, the cover 50 is removed from the plug 10.

[0109] In step S108, the control unit 70 controls the imaging unit 40 to identify the position of the plug 10 and the orientation of the plug axis Zp1. The process in step S108 is the same as that in step S102. The re-identification of the position of the plug 10 and the orientation of the plug axis Zp1 in step S108 is necessary because the position of the plug 10 and the orientation of the plug axis Zp1 may change when the cover 50 is removed.

[0110] In step S109, the control unit 70 controls the robotic arm 30 to grasp the socket 20 provided on the setting table TB2. The control unit 70 has pre-stored the position of the socket 20 provided on the setting table TB2, and moves the robotic arm 31 to a position near the socket 20 to grasp the socket 20.

[0111] In step S110 (gripping process), the control unit 70 controls the robotic arm 30 to move the socket 20 to the vicinity of the plug 10 while the robotic arm 31 is gripping the socket 20. The control unit 70 controls the robotic arm 30 to position the protrusion 22 at a distance from the coordinate P of the plug 10 identified in step S108 along the plug axis Zp1.

[0112] When the socket 20 is positioned near the plug 10, the robotic arm 30 holds the socket 20 in a manner that aligns the orientation of the plug axis Zp1, as identified by the imaging unit 40, with the orientation of the socket axis Zs1. This alignment of the socket axis Zs1 with the plug axis Zp1 is due to the fact that the orientation of the plug axis Zp1 is not aligned with the orientation of the axis Z1, which extends vertically.

[0113] like Figure 9 As shown, in the XZ plane, the orientation of the plug axis Zp1 is tilted by an angle θ2 relative to the orientation of the axis Z1 extending in the vertical direction. By aligning the orientation of the socket axis Zs1 with the orientation of the plug axis Zp1, the protrusion 22 of the socket 20 can be moved toward the plug 10 along the plug axis Zp1.

[0114] In step S111, the control unit 70 controls the robotic arm 30 to insert the socket 20 into the plug 10. The robotic arm 30 moves the robotic hand part 31 along the plug axis Zp1, causing the protrusion 22 to be inserted into the slot 12 of the plug 10. Figure 10 As shown, the robotic arm 30 inserts the protrusion 22 into the groove 12 by positioning the locking ball 22a at a predetermined distance (first predetermined distance) L1 from the fixing groove 12a in the direction of the plug axis Zp1. When the protrusion 22 of the socket 20 is inserted into the groove 12 of the plug 10, it becomes Figure 10 The state shown.

[0115] In step S112 (connection process), the control unit 70 controls the socket 20 to fix the socket 20 to the plug 10. The socket 20 has an adjustment part 23, which moves the protrusion 22 toward the bottom of the groove 12 of the plug 10. The adjustment part 23 adjusts the position of the locking ball 22a relative to the gripping position of the robotic arm 30's robotic hand 31 on the socket axis Zs1, so that the locking ball 22a is positioned in the fixing groove 12a.

[0116] When the locking ball 22a is positioned in the fixing groove 12a, the locking ball 22a is fixed in the fixing groove 12a by the force of the spring 24. Therefore, as long as no upward force that can overcome the force of the spring 24 is applied, the socket 20 can be maintained in the state of being fixed to the plug 10.

[0117] like Figure 10 As shown, when the locking ball 22a is not positioned in the fixing groove 12a, the valve 25 contacts the main body 26, sealing the lower end of the socket-side liquid flow path 21. Conversely, when the locking ball 22a is positioned in the fixing groove 12a, the main body 26 contacts the top of the plug 10, and correspondingly, the valve 25 moves away from the main body 26. Thus, the seal on the socket-side liquid flow path 21 is released, connecting the socket-side liquid flow path 21 to the plug-side liquid flow path 11.

[0118] In step S113, the control unit 70 releases the state of the robotic arm 31 gripping the socket 20 and controls the robotic arm 30 to move the robotic arm 31 to the specified standby position.

[0119] In step S114, the control unit 70 operates the pump (not shown) connected to the liquid piping LL1 to begin supplying the liquid contained in the liquid storage container 200 to the supply target device. The control unit 70 controls the gas supply source (not shown) connected to the gas piping GL1 to supply the liquid storage container 200 with a gas (e.g., air or nitrogen) equivalent to the volume of liquid taken from the liquid storage container 200.

[0120] Gas supplied from gas pipe GL1 to socket 20 flows inside socket 20 and is supplied to the space above liquid collection container 200 via plug-side gas flow path 13. Liquid reaching the upper end of plug-side liquid flow path 11 is guided to liquid pipe LL1 via socket-side liquid flow path 21. Liquid guided to liquid pipe LL1 is supplied to supply target device. Thus, liquid supply to supply target device begins via liquid supply device 100.

[0121] Liquid is supplied to the target device via the liquid supply device 100. This process can continue as long as there is remaining liquid in the liquid collection container 200. However, if there is no liquid in the liquid collection container 200 or the liquid level falls below a predetermined amount, a new liquid collection container 200 needs to be installed. Next, refer to... Figure 12 The procedure for removing the socket 20 from the plug 10 in order to replace the liquid storage container 200 is explained.

[0122] In step S201, the control unit 70 performs the following control: stops the operation of the pump connected to the liquid piping LL1 and the gas supply from the gas supply source connected to the gas piping GL1 to the socket 20. When the pump stops operating, the liquid supply from the liquid collection container 200 to the liquid piping LL1 is also stopped.

[0123] In step S202, the control unit 70 controls the robotic arm 30 as follows: it moves the robotic hand 31 from a predetermined standby position to a position where it can grasp the socket 20, and the robotic hand 31 grasps the socket 20. When the robotic hand 31 grasps the socket 20, it becomes... Figure 11 The state shown.

[0124] In step S203, the control unit 70 controls the socket 20 to release the fixed state in which the socket 20 is fixed to the plug 10. The adjustment unit 23 adjusts the position of the locking ball 22a relative to the gripping position of the robotic arm 30's robotic hand 31 on the socket axis Zs1, so that the locking ball 22a is not disposed in the fixing groove 12a.

[0125] The adjusting part 23 applies an upward force that overcomes the force of the spring 24, causing the spring 24 to contract. When the spring 24 contracts, the locking ball 22a is released from its fixed position in the fixing groove 12a, and the locking ball 22a moves to a position away from the fixing groove 12a, becoming... Figure 10 The state shown is as follows. Then, the control unit 70 controls the robotic arm 30 in a manner that pulls the socket 20 out of the plug 10. The robotic arm 30 moves the robotic hand part 31 along the plug axis Zp1 to pull the protrusion 22 out of the slot 12 of the plug 10.

[0126] In step S204, the control unit 70 controls the robotic arm 30, moving the robotic arm 31 to the cleaning container WC located on the setting table TB2 while the robotic arm 31 is holding the socket 20. The cleaning container WC contains a cleaning solution (e.g., pure water) for cleaning liquids adhering to the socket 20.

[0127] By immersing the socket 20 in the cleaning solution, even if the liquid adhering to the socket 20 is a slurry or similar solution that would solidify upon contact with air, it is possible to prevent the solution from drying and solidifying while still attached to the socket 20. Furthermore, it is desirable to continuously supply fresh cleaning solution to the cleaning container WC to maintain the socket 20 in a state free from contamination.

[0128] In step S205, the control unit 70 controls the robotic arm 30 to separate the robotic arm 31 from the socket 20 after releasing the state in which the robotic hand 31 is holding the socket 20. Then, the control unit 70 controls the robotic arm 30 to move the robotic hand 31 to a predetermined standby position. Thus, the action of removing the socket 20 from the plug 10 is completed.

[0129] In step S206, the control unit 70 controls the imaging unit 40 to identify the position of the plug 10 and the orientation of the plug axis Zp1. The process in step S206 is the same as that in step S102.

[0130] In step S207, the control unit 70 controls the robotic arm 30 to grip the cover clamp 60 mounted on the mounting table TB1. The control unit 70 has pre-stored the cover clamp standby position of the cover clamp 60 mounted on the mounting table TB1. Figure 3 (Referring to the position of reference numeral 60 in the attached drawing), the robotic arm 30 is controlled to move the robotic hand 31 to the cover clamp standby position and grasp the cover clamp 60. Then, the control unit 70 controls the robotic arm 30 to move the cover clamp 60 to the cover standby position (referring to the position of reference numeral 60 in the attached drawing). Figure 3 (as indicated by reference numeral 50 in the attached drawing), the cover portion 50 is held in place by the retaining portion 61.

[0131] In step S208, the control unit 70 controls the robotic arm 30 to move the cover clamp 60 to the vicinity of the plug 10 while the robotic arm 31 is holding the cover clamp 60. The control unit 70 also controls the robotic arm 30 to position the holding part 61 at a certain distance along the plug axis Zp1 relative to the coordinate P of the plug 10 identified in step S206. Figure 13 The state shown.

[0132] When the cover clamp 60 is positioned near the plug 10, the robotic arm 30 holds the cover clamp 60 in such a way that the orientation of the plug axis Zp1, as identified by the imaging unit 40, is aligned with the orientation of the cover axis Zc1. The alignment of the cover axis Zc1 with the plug axis Zp1 is due to the fact that the orientation of the plug axis Zp1 is not aligned with the orientation of the axis Z1, which extends along the vertical direction.

[0133] like Figure 13As shown, in the XZ plane, the orientation of the plug axis Zp1 is tilted at an angle θ3 relative to the orientation of the axis Z1 extending vertically. By aligning the orientation of the cover axis Zc1 with the orientation of the plug axis Zp1, the cover portion 50, held by the holding portion 61 of the cover clamp 60, can move along the plug axis Zp1 toward the plug 10. Figure 13 After the state shown, the control unit 70 controls the robotic arm 30 to move the cover 50 along the plug axis Zp1 toward the plug 10, thus becoming... Figure 8 The state shown.

[0134] In step S209, the control unit 70 controls the robotic arm 30 that holds the cover clamp 60 to mount the cover 50 onto the plug 10. The robotic arm 30 moves the cover clamp 60 along the plug axis Zp1 toward the cover 50, thus... Figure 8 The state shown is as follows. With the cover 50 held by the holding part 61, the control unit 70 rotates the holding part 61 clockwise (opposite to the predetermined direction) via the transmission part 64. As a result, the external thread 12b of the plug 10 engages with the internal thread 51a of the cover 50, and the cover 50 is installed on the plug 10.

[0135] The cover clamp 60 transmits the clockwise rotational power of the rotating shaft 63 to the holding part 61 via the transmission part 64, causing the cover part 50 to rotate clockwise. When the cover part 50 rotates clockwise, the external thread 12b of the plug 10 engages with the internal thread 51a of the cover part 50, becoming... Figure 7 As shown, the cover 50 is installed on the plug 10.

[0136] In step S210, the control unit 70 controls the cover clamp 60 to move the holding part 61 upward along the cover axis Zc1, thus becoming... Figure 6 The cover 50 is shown in the state where it has been removed from the holding part 61. Then, the control unit 70 controls the robotic arm 30 to move the cover clamp 60 to the cover clamp standby position while the robotic arm 31 is holding the cover clamp 60.

[0137] In step S211, the control unit 70 moves the empty liquid storage container 200 to a disposal site (not shown). The control unit 70 can move the liquid storage container 200 to the disposal site, for example, by moving an unmanned transport vehicle (not shown) carrying the empty liquid storage container 200. Alternatively, personnel can also use a transport vehicle (not shown) to move the liquid storage container 200.

[0138] The function and effects of the liquid supply device 100 of this embodiment described above will be explained.

[0139] According to the liquid supply device 100 of this embodiment, the imaging unit 40 identifies the orientation of the plug axis Zp1 of the plug 10, and the robotic arm 30 holds the socket 20 in a manner that aligns the orientation of the plug axis Zp1 with the orientation of the socket axis Zs1. The socket 20, held by the robotic arm 30, is inserted into the plug 10, thereby connecting the socket-side liquid flow path 21 with the plug-side liquid flow path 11. Since the socket 20 is held by the robotic hand 31 of the robotic arm 30 in an appropriate orientation relative to the plug 10, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10, which is fixed to the first opening 210 of the liquid storage container 200.

[0140] Furthermore, according to the liquid supply device 100 of this embodiment, the protrusion 22 of the socket 20 can be inserted into the groove 12 of the plug 10 by the robotic arm 30, thereby fixing the locking ball 22a in the fixing groove 12a by the adjustment part 23 of the socket 20. Additionally, by adjusting the position of the locking ball 22a by the adjustment part 23, the fixed state in which the locking ball 22a is fixed in the fixing groove 12a can be released.

[0141] Furthermore, according to the liquid supply device 100 of this embodiment, the imaging unit 40 identifies the orientation of the plug axis Zp1 of the plug 10, and the robotic arm 30 holds the cover clamp 60 in such a way that the orientation of the plug axis Zp1 is aligned with the orientation of the cover axis Zc1. By rotating the holding portion 61 of the cover clamp 60 held by the robotic arm 31 in a counterclockwise direction, the cover portion 50 held by the holding portion 61 is removed from the plug 10.

[0142] The cap clamp 60 is held by the robotic arm 31 in an appropriate orientation relative to the plug 10, so the cap 50 can be reliably removed from the plug 10 regardless of the orientation of the plug 10, which is fixed to the first opening 210 of the liquid storage container 200. Furthermore, by rotating the retaining part 61 clockwise using the cap clamp 60, the cap 50 can be attached to the plug 10.

[0143] (Second Implementation)

[0144] Next, the liquid supply device 100A according to the second embodiment of the present invention will be described. This embodiment is a variation of the first embodiment, and is the same as the first embodiment except as specifically described below, so the description is omitted hereafter.

[0145] In the liquid supply device 100 of the first embodiment, a socket 20 is installed on a plug 10 that is fixed to the first opening 210 of a liquid storage container 200. Gas is supplied to the liquid storage container 200 via the socket 20, and then liquid is supplied to the supply target device. In contrast, as... Figure 14 As shown, in this embodiment, the liquid supply device 100A has a socket 20 installed on a plug 10 that is fixed to both the first opening 210 and the second opening 220.

[0146] like Figure 14 As shown, the liquid supply device 100A of this embodiment includes: a plug 10, which is fixed to both the first opening 210 and the second opening 220; and a socket 20, which is installed on the plug 10. The structure and function of the plug 10 and the socket 20 are the same as those of the first embodiment.

[0147] The socket 20 of the plug 10, fixed at the first opening 210, is connected to a liquid piping LL1 that supplies liquid to the target device. The socket 20 of the plug 10, fixed at the second opening 220, is connected to a liquid piping LL2 that returns liquid circulating from the target device to the liquid collection container 200. In this embodiment, liquid supplied to the target device via liquid piping LL1 is returned to the liquid collection container 200 via liquid piping LL2, thereby circulating the liquid.

[0148] A cover 50 is pre-installed on both the plug 10 fixed to the first opening 210 and the plug 10 fixed to the second opening 220. In this embodiment, firstly, the liquid storage container 200 with the cover 50 installed on both the first opening 210 and the second opening 220 is moved into a pre-set position within the range of motion of the robotic arm 30.

[0149] Then, the control unit 70 performs an operation on the first opening 210. Figure 4 Steps S102 to S113. Through this action, the socket 20 is placed in the state where the plug 10 is installed in the first opening 210. Then, the control unit 70 performs operations on the second opening 220. Figure 4 Steps S102 to S113. Through this action, the socket 20 is installed with the plug 10 in the second opening 220.

[0150] After the socket 20 is installed on both sides of the plug 10 in the first opening 210 and the plug 10 in the second opening 220, the control unit 70 operates the pump (not shown) connected to the liquid piping LL1. When the pump starts operating, liquid is supplied from the liquid receiving container 200 to the supply target device via the liquid piping LL1, and liquid is returned from the supply target device to the liquid receiving container 200 via the liquid piping LL2. Gas used to displace the volume of liquid supplied from the liquid receiving container 200 to the outside is supplied to the liquid receiving container 200 from both gas piping GL1 and gas piping GL2. Alternatively, only... Figure 14One of the gas piping GL1 and gas piping GL2 shown is connected to socket 20 to supply gas from a single gas piping to liquid collection container 200.

[0151] According to the liquid supply device 100A of this embodiment, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200. Furthermore, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10 fixed to the second opening 220 of the liquid storage container 200.

[0152] (Third Implementation)

[0153] Next, the liquid supply device 100B according to the third embodiment of the present invention will be described. This embodiment is a variation of the first embodiment, and is the same as the first embodiment except as specifically described below, so the description is omitted hereafter.

[0154] In the liquid supply device 100 of the first embodiment, a socket 20 is installed on a plug 10 that is fixed to the first opening 210 of a liquid storage container 200. Gas is supplied to the liquid storage container 200 via the socket 20, and then liquid is supplied to the supply target device. In contrast, as... Figure 15 As shown, in this embodiment, the liquid supply device 100B fixes the plug 80 to the second opening 220 and installs the socket 90.

[0155] The plug (second plug) 80 is fixed to the second opening 220 and has a plug-side gas flow path 81 extending along the plug axis (second plug axis) Zp2. The plug-side gas flow path 81 communicates with the space above the liquid receiving container 200. An external thread is formed on the outer peripheral surface of the upper end of the plug 80. The plug 80 is fixed to the second opening 220 by engaging the external thread of the plug 80 with the internal thread of the second opening 220.

[0156] The socket 90 is detachably mounted to the plug 80 and has a socket-side gas flow path 91 extending along the socket axis (second socket axis) Zs2. The socket 90 is connected to a gas piping GL3 for supplying gas to the liquid storage container 200. The socket 90 is held by the robotic arm 30's robotic hand 31.

[0157] A cover 50 is pre-installed on both the plug 10 fixed to the first opening 210 and the plug 80 fixed to the second opening 220. In this embodiment, firstly, the liquid storage container 200 with the cover 50 installed on both the first opening 210 and the second opening 220 is moved into a pre-set position within the range of motion of the robotic arm 30.

[0158] Then, the control unit 70 performs an operation on the first opening 210. Figure 4 Steps S102 to S113. Through this action, the socket 20 is placed in the state where the plug 10 is installed in the first opening 210. Then, the control unit 70 performs operations on the second opening 220. Figure 4 Steps S102 to S113. Through this action, the socket 90 is inserted into the plug 80 of the second opening 220, and the plug-side gas flow path 81 is connected to the socket-side gas flow path 91.

[0159] After the control unit 70 installs the socket 20 onto the plug 10 of the first opening 210 and the socket 90 onto the plug 80 of the second opening 220, it operates the pump (not shown) connected to the liquid piping LL1. When the pump starts operating, liquid is supplied from the liquid storage container 200 to the supply target device via the liquid piping LL1. Gas, used to displace the volume of liquid supplied from the liquid storage container 200 to the outside, is supplied from the gas piping GL3 to the liquid storage container 200 via the socket 90.

[0160] According to the liquid supply device 100B of this embodiment, the plug-side liquid flow path 11 and the socket-side liquid flow path 21 can be reliably connected regardless of the orientation of the plug 10 fixed to the first opening 210 of the liquid storage container 200. Furthermore, the plug-side gas flow path 81 and the socket-side gas flow path 91 can be reliably connected regardless of the orientation of the plug 80 fixed to the second opening 220 of the liquid storage container 200.

[0161] In this embodiment, the shape of the portion of the plug 10 into which the socket 20 is inserted is different from the shape of the portion of the plug 80 into which the socket 90 is inserted. Furthermore, the shape of the portion of the socket 20 that is inserted into the plug 10 is different from the shape of the portion of the socket 90 that is inserted into the plug 80. Therefore, it is impossible to connect the socket 90 to the plug 10, or the socket 20 to the plug 80. This prevents accidental connection of the socket 90 to the plug 10 and the socket 20 to the plug 80.

[0162] In this embodiment, gas is supplied from gas pipe GL3 via socket 90 to liquid storage container 200 to replace the volume of liquid supplied from liquid storage container 200 to the outside, but other methods can also be used. For example, it can be configured that gas is supplied from gas pipe GL3 via socket 90 to liquid storage container 200 to pressurize the space above liquid storage container 200. In this case, the liquid stored in liquid storage container 200 is supplied from liquid storage container 200 to supply target device via liquid pipe LL1 due to the pressure of the gas supplied from gas pipe GL3.

Claims

1. A liquid supply device characterized by comprising: include: The first plug is fixed to the first opening provided on the upper surface of the liquid receiving container and has a plug-side liquid flow path extending along the axis of the first plug. The first socket is detachably mounted to the first plug and has a socket-side liquid flow path extending along the axis of the first socket. A gripping mechanism that grips the first socket and positions the first socket in a three-dimensional position within its range of motion with a predetermined posture; as well as The identification unit identifies the orientation of the axis of the first plug. The gripping mechanism grips the first socket in such a manner that the orientation of the axis of the first plug, as identified by the recognition unit, is aligned with the orientation of the axis of the first socket. The first socket, held by the gripping mechanism, is inserted into the first plug, thereby connecting the liquid flow path on the socket side with the liquid flow path on the plug side. A first groove is formed at the top of the first plug, the first groove extending in a circular shape around the axis of the first plug and having a plug-side fixing portion. A first protrusion is formed at the top of the first socket, the first protrusion extending in a circular shape around the axis of the first socket and having a socket-side fixing portion. The gripping mechanism inserts the first protrusion into the first groove in such a manner that the socket-side fixing portion is positioned at a first predetermined distance from the plug-side fixing portion in the axial direction of the first plug as identified by the identification portion. The first socket has an adjustment part that adjusts the position of the socket-side fixing part relative to the gripping position held by the gripping mechanism on the axis of the first socket, so that the socket-side fixing part is fixed to the plug-side fixing part in a fixed state.

2. The liquid supply device according to claim 1, characterized in that: The adjustment unit adjusts the position of the socket-side fixing part relative to the gripping position on the axis of the first socket to release the fixing state.

3. The liquid supply device according to claim 2, characterized in that: The gripping mechanism grips the first socket detached from the first plug, moving the first socket to a cleaning container containing cleaning fluid for cleaning the first socket.

4. The liquid supply apparatus according to any one of claims 1 to 3, characterized in that, include: The first cover seals the liquid flow path on the plug side and has a first insertion part that is inserted into the first groove. as well as A rotating mechanism having a retaining portion for holding the first cover and for rotating the retaining portion about the axis of the first cover. A first threaded portion is formed in the first insertion portion of the first cover portion. A second threaded portion is formed in the first groove of the first plug, which engages with the first threaded portion. The gripping mechanism grips the rotating mechanism in such a way that the orientation of the axis of the first plug, as identified by the identification unit, is aligned with the orientation of the axis of the first cover. The rotating mechanism rotates the retaining part in a predetermined direction while the first cover is held by the retaining part, thereby removing the first cover from the first plug.

5. The liquid supply device according to claim 4, characterized in that: The rotating mechanism rotates the retaining part in the opposite direction of the predetermined direction while the first cover is held by the retaining part, thereby installing the first cover onto the first plug.

6. The liquid supply apparatus according to any one of claims 1 to 3, wherein include: The second plug is fixed to the second opening provided on the upper surface of the liquid collection container and has a plug-side gas flow path extending along the axis of the second plug. as well as The second socket is detachably mounted to the second plug and has a socket-side gas flow path extending along the axis of the second socket. The identification unit identifies the orientation of the axis of the second plug. The gripping mechanism grips the second socket in such a manner that the orientation of the axis of the second plug, as identified by the recognition unit, is aligned with the orientation of the axis of the second socket. The second socket, held by the gripping mechanism, is inserted into the second plug, thereby connecting the gas flow path on the socket side with the gas flow path on the plug side.

7. A liquid supply method using a liquid supply device, characterized in that, The liquid supply device includes: The first plug is fixed to the first opening provided on the upper surface of the liquid receiving container and has a plug-side liquid flow path extending along the axis of the first plug. A first socket, which is detachably mounted to the first plug, and has a socket-side liquid flow path extending along the axis of the first socket; and A gripping mechanism that grips the first socket and positions the first socket in a predetermined posture within a three-dimensional position of its range of motion. A first groove is formed at the top of the first plug, the first groove extending in a circular shape around the axis of the first plug and having a plug-side fixing portion. A first protrusion is formed at the top of the first socket, the first protrusion extending in a circular shape around the axis of the first socket and having a socket-side fixing portion. The liquid supply method includes: The identification process identifies the orientation of the axis of the first plug. The gripping process involves the gripping mechanism gripping the first socket in such a manner that the orientation of the first plug axis, as identified by the identification process, aligns with the orientation of the first socket axis; and In the connection process, the first socket, held in the gripping process, is inserted into the first plug, thereby connecting the liquid flow path on the socket side with the liquid flow path on the plug side. The connection process inserts the first protrusion into the first groove in such a way that the socket-side fixing part is positioned at a first predetermined distance from the plug-side fixing part in the direction of the first plug axis identified by the identification process, and adjusts the position of the socket-side fixing part relative to the gripping position held by the gripping mechanism on the first socket axis, so that the socket-side fixing part is fixed to the plug-side fixing part in a fixed state.

Images