A positioning device and method

Abstract

This invention relates to the field of wafer positioning technology, specifically to a positioning device and method. The positioning device includes a rotating stage, an image positioning component, a reflective light-emitting element, and a detection positioning element. The rotating stage is used to place the object under test (DUT) and can adjust the orientation of the DUT, with the outer edge of the rotating stage located inside the outer edge of the DUT. The image positioning component is used to acquire an image of the DUT from the side away from the rotating stage after placement and to perform positioning detection. The reflective light-emitting element is located on the other side of the DUT extending beyond the rotating stage, providing illumination to the DUT and reflecting the DUT to a set orientation. The detection positioning element is located in the reflection light path of the reflective light-emitting element and is used to acquire an image of the DUT through the reflective light-emitting element and to perform positioning detection. This solution solves the problem of low adaptability in existing positioning devices, making positioning difficult when the back of the DUT, which is opaque, faces the positioning device.

Description

Technical Field

[0001] This invention relates to the field of wafer positioning technology, and specifically to a positioning device and method. Background Technology

[0002] With the development of semiconductor technology, semiconductor processing involves a variety of processes, each of which requires different equipment. Many processes require obtaining the accurate position of the wafer in advance. In the existing technology, wafer alignment device is one of the key components of semiconductor equipment.

[0003] Existing technologies typically employ laser positioning or image positioning combined with turntable rotation to obtain wafer position information and achieve wafer alignment.

[0004] However, while existing laser positioning systems have a simple structure, they are costly, have low accuracy, and a low positioning success rate, gradually failing to meet actual industrial needs. Image-based positioning methods are adaptable to a limited number of wafer types; for example, if the object under test has an opaque back, the positioning device cannot locate it when the back is facing away from the device. Adding a positioning device also presents the problem of insufficient installation space. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a positioning device and method that can solve the problem of low adaptability of the positioning device in the prior art, and the difficulty in positioning when the back of the object to be measured, which is opaque, faces the positioning device.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] On one hand, the present invention provides a positioning device, comprising:

[0008] A rotating stage is used to place the object to be tested and the orientation of the object to be tested can be adjusted, and the outer edge of the rotating stage is located inside the outer edge of the object to be tested.

[0009] An image positioning component is used to acquire an image of the object to be tested from the side away from the rotating stage after the object to be tested is placed, and to determine the orientation of the object to be tested based on the coordinates of the points marked on the image corresponding to the object to be tested.

[0010] A reflective light-emitting element is disposed on the other side of the part of the object under test that extends out of the rotating stage, for providing illumination to the object under test and reflecting the object under test to a set position;

[0011] A detection positioning element is disposed in the reflected light path of the reflective light-emitting element, and is used to acquire an image of the object under test through the reflective light-emitting element, and determine the orientation of the object under test according to the coordinates of the marked point corresponding to the object under test in the image.

[0012] In some alternative solutions, the image positioning component includes at least one of a first image positioning mechanism and a second image positioning mechanism. The first image positioning mechanism is located in the middle of the object under test and is used to acquire a global image of the object under test and perform positioning detection. The second image positioning mechanism is located in the part of the object under test that extends out of the rotating platform and is used to acquire a local image of the object under test and perform positioning detection.

[0013] In some alternative solutions, the first image positioning mechanism includes:

[0014] A first light source is located on the side away from the rotating stage after the object to be tested is placed, and is used to provide illumination for the object to be tested;

[0015] The first image positioning component is located on the side away from the rotating stage after the object to be tested is placed, and is used to acquire a global image of the object to be tested and perform positioning detection.

[0016] In some alternative solutions, the first light source includes two line light sources located on either side of the optical path for image acquisition by the first image positioning element.

[0017] In some alternative solutions, the first image positioning mechanism further includes an aperture light source, which is fitted onto the outside of the rotating stage.

[0018] In some alternative embodiments, the second image positioning mechanism includes:

[0019] The second light source is located on the side away from the rotating stage after the object to be tested is placed, and is used to provide illumination for the object to be tested;

[0020] The second image positioning component is located on the side away from the rotating stage after the object to be tested is placed, and is used to acquire a local image of the object to be tested and perform positioning detection.

[0021] In some alternative solutions, the first image positioning device, the second image positioning device, and the detection positioning device all include a camera and a positioning detection module. The camera is used to acquire an image of the object under test, and the positioning detection module is used to acquire the coordinates of the marked points of the object under test in the image, and determine the orientation of the object under test based on the position of the marked points in the image.

[0022] In some alternative solutions, the second light source is an external coaxial light source.

[0023] In some alternative solutions, the reflective light-emitting element is a corner coaxial light source with a reflection angle of degrees.

[0024] On the other hand, the present invention also provides a positioning method, implemented using the above-mentioned positioning device, comprising the following steps:

[0025] When the back of the object under test, which is opaque, faces the rotating stage, an image positioning component is used to acquire an image of the object under test, and the orientation of the object under test is determined according to the coordinates of the points marked on the image corresponding to the object under test.

[0026] When the back of the object under test, which is opaque, faces away from the rotating stage, the side of the object facing the rotating stage is illuminated by a reflective light-emitting element. An image of the object is acquired using a light path detection and positioning element provided on the reflective light-emitting element, and the orientation of the object is determined according to the coordinates of the points marked on the image corresponding to the object under test.

[0027] Compared with existing technologies, the advantages of this invention are as follows: When the back of the object under test (OPT) is opaque and faces the rotating stage, an image positioning component is used to acquire an image of the object, and the orientation of the object is determined based on the coordinates of the corresponding marked points in the image. When the back of the object is opaque and faces away from the rotating stage, a reflective light-emitting element provides illumination to the object, and a detection positioning element positioned on the reflected light path of the reflective light-emitting element acquires an image of the object, determining its orientation based on the coordinates of the corresponding marked points in the image. For objects with a translucent back, both the image positioning component and the combination of the reflective light-emitting element and the detection positioning element can be used to acquire an image of the object for positioning detection. When the orientation of the marked points in the object does not meet the set orientation requirements, the orientation of the object can be adjusted by rotating the stage to make the coordinates of the marked points meet the requirements.

[0028] This solution utilizes reflective light-emitting components, allowing the detection positioning component to be repositioned, reducing the possibility of installation conflicts and interference with other parts, and improving space utilization. It also solves the problem of being unable to photograph objects with opaque backs due to insufficient space, providing a solution for detection methods in limited spaces. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the positioning device in an embodiment of the present invention.

[0031] In the figure: 1. Rotating stage; 2. Object to be tested; 3. Image positioning component; 31. First image positioning mechanism; 311. First light source; 312. First image positioning element; 313. Opening light source; 32. Second image positioning mechanism; 321. Second light source; 322. Second image positioning element; 4. Reflective light-emitting element; 5. Detection positioning element; 6. Driving mechanism. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0034] like Figure 1 As shown, the present invention provides a positioning device, including: a rotating stage 1, an image positioning component 3, a reflective light-emitting component 4, and a detection positioning component 5.

[0035] The rotating stage 1 is used to place the object to be tested 2 and can adjust the orientation of the object to be tested 2. The outer edge of the rotating stage 1 is located inside the outer edge of the object to be tested 2. The image positioning component 3 is used to acquire an image of the object to be tested 2 from the side away from the rotating stage 1 after the object to be tested 2 is placed, and to determine the orientation of the object to be tested 2 according to the coordinates of the marked point of the object to be tested 2 in the image. The reflective light-emitting component 4 is located on the other side of the part of the object to be tested 2 that extends out of the rotating stage 1, and is used to provide illumination for the object to be tested 2 and reflect the object to be tested 2 to the set orientation. The detection positioning component 5 is located in the reflected light path of the reflective light-emitting component 4, and is used to acquire an image of the object to be tested 2 through the reflective light-emitting component 4, and to determine the orientation of the object to be tested 2 according to the coordinates of the marked point of the object to be tested 2 in the image.

[0036] When using this positioning device, the object to be tested 2 is placed on the rotating stage 1. When the back of the object to be tested, which is opaque, faces the rotating stage 1, the image positioning component 3 is used to acquire an image of the object to be tested 2, and the orientation of the object to be tested 2 is determined according to the coordinates of the marked points in the image. When the back of the object to be tested 2, which is opaque, faces away from the rotating stage 1, the reflective light-emitting element 4 is used to provide illumination for the object to be tested 2. The detection positioning element 5, which is set on the reflected light path of the reflective light-emitting element 4, is used to acquire an image of the object to be tested 2, and the orientation of the object to be tested 2 is determined according to the coordinates of the marked points in the image.

[0037] By using the reflective light-emitting element 4, the setting position of the detection positioning element 5 can be changed, reducing the possibility of installation conflicts and interference with other components and improving space utilization.

[0038] For the test object 2 that is transparent from the back, the image can be acquired by the image positioning component 3 and the positioning detection can be performed, or the image can be acquired by the combination of the reflective light-emitting component 4 and the detection positioning component 5 and the positioning detection can also be performed.

[0039] When the coordinates of the corresponding marker point in the object under test 2 on the image do not meet the corresponding set coordinate requirements, that is, the orientation of the marker point does not meet the set orientation requirements, the orientation of the object under test 2 can be adjusted by rotating the stage 1 so that the position of the object under test 2 meets the requirements.

[0040] In this example, a control module is also included to determine whether the orientation of the coordinates of the marked point in the test object 2 meets the set orientation requirements. When the set orientation requirements are not met, the orientation of the test object 2 is adjusted by rotating the stage 1 so that the position of the test object 2 meets the requirements.

[0041] In this example, the test object 2 is a wafer, but it could also be a similar device.

[0042] In some optional embodiments, the reflective light-emitting element 4 adopts a corner coaxial light source, which is located on the outer edge of the object under test 2 extending from the rotating stage 1, and works with the image of the other side of the object under test 2 obtained by the detection positioning element 5 to provide a light source for the object under test 2.

[0043] When the rotating stage 1 is placed vertically and the object under test 2 is placed horizontally, the image positioning component 3 is used to acquire an image of the upper side of the object under test 2, and to locate the position of the object under test 2 based on the marked points on the object under test 2 in the image. The reflective light-emitting element 4 is located below the object under test 2 and at the position of the portion of the object under test 2 extending out of the rotating stage 1, which can provide illumination to the lower side of the object under test 2. The reflective light-emitting element 4 can also reflect the image under the object under test 2 to a set position.

[0044] In some optional embodiments, the reflection angle of the reflective light-emitting element 4 is 90 degrees.

[0045] In this example, the reflection angle of the reflective light-emitting element 4 is 90 degrees. When the object under test 2 is placed horizontally, the reflection function of the reflective light-emitting element 4 can rotate the light path by 90 degrees, thereby allowing the detection positioning element 5 to be placed on the side. The working distance obtained at this time is the distance of the object under test to the reflective light-emitting element 4, plus the distance from the reflective light-emitting element 4 to the detection positioning element 5. This converts the light path in the z-axis direction into light paths in both the z-axis and x-axis directions, thus greatly saving installation space. At the same time, the reflective light-emitting element 4 can irradiate diffused light onto the object under test 2, providing an illumination effect. By setting the detection positioning element 5 in a horizontal position, that is, on the reflected light path of the reflective light-emitting element 4, an image under the object under test 2 can be obtained. The object under test 2 is positioned by the marked points on the object under test in the image. If the object under test 2 does not meet the requirements, the orientation of the object under test 2 can be adjusted by rotating the stage 1 to make the position of the object under test 2 meet the requirements.

[0046] In addition, the marking points on the test object 2 can be notches on the outer edge or patterns on the test object 2, with the patterns being small squares or small stars.

[0047] Therefore, this solution can be applied to test objects 2 with various marking points, and it can be applied to test objects 2 with transparent backs as well as those with opaque backs. This positioning device can meet the positioning and detection needs of different test objects 2, and has stronger adaptability.

[0048] In this example, the positioning device also includes a drive mechanism 6, which uses a drive motor to drive the rotating platform 1 to rotate, thereby adjusting the orientation of the object under test 2. A control module can also be provided, connected to the drive mechanism 6, the image positioning component 3, and the detection positioning element 5. By acquiring the positioning detection results of the image positioning component 3 and the detection positioning element 5, the module determines whether the position of the object under test 2 meets the requirements. When the position of the object under test 2 does not meet the requirements, the rotating platform 1 is controlled to rotate to adjust the orientation of the object under test 2.

[0049] In some alternative solutions, the image positioning component 3 includes at least one of a first image positioning mechanism 31 and a second image positioning mechanism 32. The first image positioning mechanism 31 is located in the middle of the object under test 2 and is used to acquire a global image of the object under test 2 and perform positioning detection. The second image positioning mechanism 32 is located in the part of the object under test 2 that extends out of the rotating stage 1 and is used to acquire a local image of the object under test 2 and perform positioning detection.

[0050] In this embodiment, the first image positioning mechanism 31 and the second image positioning mechanism 32 can acquire images of the object under test 2 from the side away from the rotating stage 1 after the object under test 2 is placed and perform positioning detection. The first image positioning mechanism 31 is located in the middle of the object under test 2 and is used to acquire a global image of the object under test 2 and perform positioning detection, which can perform coarse positioning of the object under test 2. The second image positioning mechanism 32 is used to acquire a local image of the object under test 2 and perform positioning detection, which can perform fine positioning of the object under test 2.

[0051] If the image positioning component 3 includes a first image positioning mechanism 31 and a second image positioning mechanism 32, in specific use, the first image positioning mechanism 31 or the second image positioning mechanism 32 can be selected according to actual needs, or the first image positioning mechanism 31 can be used for coarse positioning first, followed by the second image positioning mechanism 32 for fine positioning. For example, when the positioning requirements of the object under test 2 are not high, positioning can be performed directly. When the positioning requirements of the object under test 2 are high, the second image positioning mechanism 32 can be used, or the first image positioning mechanism 31 can be used for coarse positioning first, followed by the second image positioning mechanism 32 for fine positioning. This cooperative approach of using the first image positioning mechanism 31 for coarse positioning first and then the second image positioning mechanism 32 for fine positioning can reduce the detection and positioning time and improve production efficiency.

[0052] In some alternative embodiments, the first image positioning mechanism 31 includes a first light source 311 and a first image positioning element 312.

[0053] The first light source 311 is located on the side away from the rotating stage 1 after the object under test 2 is placed, and is used to provide illumination for the object under test 2; the first image positioning component 312 is located on the side away from the rotating stage 1 after the object under test 2 is placed, and is used to acquire a global image of the object under test 2 and perform positioning detection.

[0054] In this embodiment, the first image positioning element 312 is located on the side away from the rotating stage 1 after the object under test 2 is placed. When the object under test 2 is an element with an opaque back and the back faces the rotating stage 1, when acquiring an image of the object under test 2, the first light source 311, which is located on the same side as the first image positioning element 312, provides illumination to the object under test 2. The reflected light enters the first image positioning element 312, which can make the acquired image clearer.

[0055] When the object under test 2 is a component that is transparent from the back, the object under test 2 can also be positioned in the same way.

[0056] In some alternative embodiments, the first light source 311 includes two line light sources located on both sides of the image acquisition optical path of the first image positioning element 312.

[0057] In this embodiment, in order for the first light source 311 to have a better illumination effect on the object under test 2, two line light sources are used, which are respectively located on both sides of the image acquisition optical path of the first image positioning member 312, and the line light sources are facing the object under test 2. This can give the object under test 2 a better illumination effect and enable the first image positioning member 312 to acquire a clearer image.

[0058] In some alternative embodiments, the first image positioning mechanism 31 further includes an aperture light source 313, which is sleeved on the outside of the rotating stage 1.

[0059] In this embodiment, when the object under test 2 is a back-transmitting element, in order to obtain a clearer image for the first image positioning member 312, using front illumination due to the back-transmitting nature of the object under test 2 might make it difficult to clearly display the markings on the object under test 2 in the image acquired by the first image positioning member 312. In this case, an open-aperture light source 313 is fitted onto the outside of the rotating stage 1, located on the other side of the object under test 2 relative to the first light source 311. When the object under test 2 is a back-transmitting element, illuminating the object under test 2 with the open-aperture light source 313 allows the first image positioning member 312 to obtain a clearer image. Furthermore, in this example, the open-aperture light source 313 is a surface light source, which can provide the first image positioning member 312 with better image quality.

[0060] In some optional embodiments, the second image positioning mechanism 32 includes: a second light source 321 and a second image positioning element 322. The second light source 321 is located on the side away from the rotating stage 1 after the object to be tested 2 is placed, and is used to provide illumination for the object to be tested 2. The second image positioning element 322 is located on the side away from the rotating stage 1 after the object to be tested 2 is placed, and is used to acquire a local image of the object to be tested 2 and perform positioning detection.

[0061] In this embodiment, the second light source 321 and the second image positioning element 322 are located at the outer edge of the object under test 2 extending from the rotating stage 1. When the object under test 2 is an opaque element with its back side facing the rotating stage 1, when acquiring an image of the object under test 2, the second light source 321, which is located on the same side as the second image positioning element 322, provides illumination to the object under test 2. The reflected light enters the second image positioning element 322, which can make the acquired image clearer.

[0062] In addition, in this example, the second image positioning mechanism 32 and the reflective light-emitting element 4 are located on both sides of the object under test 2. When the object under test 2 is a component that transmits light from the back, the reflective light-emitting element 4 can also be used to provide illumination for the object under test 2, so that the second image positioning mechanism 322 can obtain a clearer image of the object under test 2 and more accurately obtain the position of the object under test 2 based on the marked points of the object under test 2 in the image.

[0063] In some optional embodiments, the first image positioning element 312, the second image positioning element 322, and the detection positioning element 5 all include a camera and a positioning detection module. The camera is used to acquire an image of the object to be tested 2, and the positioning detection module is used to acquire the coordinates of the marked points of the object to be tested 2 in the image, and determine the orientation of the object to be tested 2 based on the coordinates of the marked points in the image.

[0064] In this example, the object under test 2 has marker points, and corresponding marker points will also appear in the image. The position of the positioning detection module and its distance from the object under test 2 are determined. A coordinate system can be established in the obtained image to obtain the coordinates of the marker points, thus determining the orientation of the object under test 2. The resolution of the camera of the second image positioning component 322 is greater than that of the camera of the first image positioning component 312. When coarse positioning is performed using the first image positioning mechanism 31, followed by fine positioning using the second image positioning mechanism 32, the higher resolution of the camera of the second image positioning component 322 allows for a clearer image. Therefore, the positioning detection accuracy of the second image positioning component 322 is greater than that of the first image positioning component 312.

[0065] In some alternative embodiments, the second light source 321 is an external coaxial light source.

[0066] In this embodiment, the external coaxial light source is fitted outside the camera lens, which provides better illumination for the object under test 2, allowing the camera of the second image positioning mechanism 32 to acquire a clearer image. Additionally, when the object under test 2 is a back-transparent component, the external coaxial light source can also be used to illuminate it, enabling the camera of the detection positioning component 5 to obtain a clearer image of the object under test 2. This allows the detection module of the detection positioning component 5 to more accurately determine the position of the object under test 2 based on the marked points in the image.

[0067] This invention provides a positioning method, implemented using the aforementioned positioning device, comprising the following steps:

[0068] When the back of the object under test 2, which is opaque, faces the rotating stage 1, the image positioning component 3 acquires an image of the object under test 2, and the orientation of the object under test 2 is determined according to the coordinates of the marked points in the image corresponding to the object under test 2.

[0069] When the back of the object under test 2, which is opaque, faces away from the rotating stage 1, the reflective light-emitting element 4 provides illumination to the side of the object under test facing the rotating stage 1. The image of the object under test is acquired by the light path detection and positioning element 5 set in the reflective light-emitting element 4, and the orientation of the object under test 2 is determined according to the coordinates of the marked point in the image.

[0070] In summary, when the object under test 2 is placed on the rotating stage 1, and its back is opaque (facing away from the rotating stage 1), the image positioning component 3 acquires an image of the object under test 2 and performs positioning detection. When the back of the object is opaque (facing away from the rotating stage 1), the reflective light-emitting element 4 provides illumination for the object under test 2, and the detection positioning element 5, positioned on the reflected light path of the reflective light-emitting element 4, acquires an image of the object under test 2 and performs positioning detection. For the object under test 2 that is translucent (facing away from the rotating stage 1), the image positioning component 3 can also perform positioning detection, and the combination of the reflective light-emitting element 4 and the detection positioning element 5 can also perform positioning detection. When the object under test 2 is found to be unsuitable, its position can be adjusted by rotating the stage 1 to ensure that its position meets the requirements.

[0071] Furthermore, this positioning device can simultaneously incorporate three different image positioning mechanisms to meet diverse detection needs, and can simultaneously incorporate four different light sources to meet the lighting requirements of various types of test objects. Utilizing the reflection and lighting functions of the reflective light-emitting element 4, the position of the detection positioning element 5 can be set relatively flexibly, reducing interference with other components, saving installation space, and significantly improving space utilization. The positioning device simultaneously incorporates a first image positioning mechanism 31 and a second image positioning mechanism 32. These two different detection positioning mechanisms can first perform coarse positioning through a global view, and then perform high-precision positioning through a local view, saving time and achieving high accuracy. The reflective light-emitting element 4 and the detection positioning element 5 solve the problem of not being able to photograph opaque test objects due to insufficient space, providing a solution for detection methods in limited spaces.

[0072] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0073] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0074] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A positioning device, characterized in that, include: A rotating stage (1) is used to place the object to be tested (2) and can adjust the orientation of the object to be tested (2), and the outer edge of the rotating stage (1) is located inside the outer edge of the object to be tested (2); Image positioning component (3) is used to acquire an image of the object to be tested (2) from the side away from the rotating stage (1) after the object to be tested (2) is placed, and to determine the orientation of the object to be tested (2) according to the coordinates of the marked point in the image corresponding to the object to be tested (2); A reflective light-emitting element (4) is disposed on the other side of the part of the object under test (2) that extends out of the rotating stage (1) and is located below the object under test (2). It is used to provide illumination for the object under test (2) and reflect the object under test (2) to a set position. The detection positioning element (5) is located in the reflected light path of the reflective light-emitting element (4) and is used to obtain an image of the object to be tested (2) through the reflective light-emitting element (4). The orientation of the object to be tested (2) is determined according to the coordinates of the marked point in the image corresponding to the object to be tested (2).

2. The positioning device as described in claim 1, characterized in that, The image positioning component (3) includes at least one of a first image positioning mechanism (31) and a second image positioning mechanism (32). The first image positioning mechanism (31) is located in the middle of the object under test (2) and is used to acquire a global image of the object under test (2) and perform positioning detection. The second image positioning mechanism (32) is located in the part of the object under test (2) that extends out of the rotating stage (1) and is used to acquire a local image of the object under test (2) and perform positioning detection.

3. The positioning device as described in claim 2, characterized in that, The first image positioning mechanism (31) includes: A first light source (311) is located on the side away from the rotating stage (1) after the object to be tested (2) is placed, and is used to provide illumination for the object to be tested (2); The first image positioning component (312) is located on the side away from the rotating stage (1) after the object to be tested (2) is placed, and is used to acquire a global image of the object to be tested (2) and perform positioning detection.

4. The positioning device as described in claim 3, characterized in that, The first light source (311) includes two line light sources located on both sides of the image acquisition optical path of the first image positioning element (312).

5. The positioning device as described in claim 3 or 4, characterized in that, The first image positioning mechanism (31) also includes an aperture light source (313), which is sleeved on the outside of the rotating stage (1).

6. The positioning device as described in claim 3, characterized in that, The second image positioning mechanism (32) includes: The second light source (321) is located on the side away from the rotating stage (1) after the object to be tested (2) is placed, and is used to provide illumination for the object to be tested (2); The second image positioning component (322) is located on the side away from the rotating stage (1) after the object to be tested (2) is placed, and is used to acquire a local image of the object to be tested (2) and perform positioning detection.

7. The positioning device as described in claim 6, characterized in that, The first image positioning component (312), the second image positioning component (322), and the detection positioning component (5) all include a camera and a positioning detection module. The camera is used to acquire an image of the object to be tested (2), and the positioning detection module is used to acquire the coordinates of the marked point of the object to be tested (2) in the image, and determine the orientation of the object to be tested (2) based on the position of the marked point in the image.

8. The positioning device as described in claim 6 or 7, characterized in that, The second light source (321) is an external coaxial light source.

9. The positioning device as described in claim 1, characterized in that, The reflective light-emitting element (4) is a corner coaxial light source with a reflection angle of 90 degrees.

10. A positioning method, characterized in that, The positioning device as described in claim 1 is used to achieve the following steps: When the back of the object to be tested (2) which is opaque is facing the rotating stage (1), the image positioning component (3) is used to acquire an image of the object to be tested (2), and the orientation of the object to be tested (2) is determined according to the coordinates of the marked point in the image corresponding to the object to be tested (2). When the back of the object under test (2) which is opaque is facing away from the rotating stage (1), the side of the object under test (2) facing the rotating stage (1) is illuminated by the reflective light-emitting element (4). The image of the object under test is obtained by the reflective light path detection and positioning element (5) set on the reflective light-emitting element (4), and the orientation of the object under test (2) is determined according to the coordinates of the marked point of the object under test (2) in the image.

Images