Inkjet printing device

CN115447280BActive Publication Date: 2026-08-07SAMSUNG DISPLAY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SAMSUNG DISPLAY CO LTD
Filing Date
2022-06-07
Publication Date
2026-08-07

AI Technical Summary

Benefits of technology

[0031] The effects of this disclosure are not limited to those described above, and various other effects are included in the specification.

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Abstract

The present disclosure relates to an inkjet printing device comprising an inkjet head arranged above a table portion and comprising nozzles through which ink comprising bipolar elements is ejected, the bipolar elements each having a region partially doped with a different polarity. At least a portion of the nozzles are deflected from a direction in the case that the nozzles are in a deflected state.
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Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2021-0074253, filed on June 8, 2021, with the Korean Intellectual Property Office, the contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to inkjet printing apparatus. Background Technology

[0004] With the development of multimedia technology, the importance of display devices has steadily increased. In response, various types of display devices have been used, such as organic light-emitting displays and liquid crystal displays (LCDs).

[0005] A display device is a means for displaying images and includes a display panel, such as an organic light-emitting display panel or a liquid crystal display panel. The light-emitting display panel may include light-emitting elements such as light-emitting diodes (LEDs). Examples of light-emitting diodes include organic light-emitting diodes (OLEDs) that use organic materials as fluorescent materials and inorganic light-emitting diodes that use inorganic materials as fluorescent materials.

[0006] Inorganic light-emitting diodes (LEDs) using inorganic semiconductor materials as fluorescent materials are durable even in high-temperature environments and exhibit higher efficiency for blue light compared to organic LEDs. In the manufacturing process, a transfer method using dielectric electrophoresis (DEP) has been developed. This method has overcome the shortcomings of conventional inorganic LEDs. Therefore, ongoing research is being conducted on inorganic LEDs that offer superior durability and efficiency compared to organic LEDs.

[0007] Inkjet printing apparatuses can be used to transfer inorganic light-emitting diodes (LEDs) or form organic material layers included in display devices using dielectric electrophoresis. After ink or solution is inkjet printed, post-processing processes can be performed to transfer the inorganic LED element or form the organic material layer. Inkjet printing apparatuses can perform processes of supplying selected ink or solution to an inkjet head and using the inkjet head to jet the ink or solution onto a selected substrate.

[0008] It will be understood that the background section of this technical section is partly intended to provide useful context for understanding the technology. However, the background section may also include ideas, concepts, or knowledge that were not known or understood by a person skilled in the art prior to the relevant valid application date of the subject matter disclosed herein. Summary of the Invention

[0009] This disclosure provides an inkjet printing apparatus capable of changing the jet spacing.

[0010] However, the aspects of this disclosure are not limited to those set forth herein. These and other aspects of this disclosure will become more apparent to those skilled in the art upon reference to the following detailed description of the disclosure.

[0011] According to one embodiment, an inkjet printing apparatus may include an inkjet head disposed above a stage and including nozzles, through which ink, including bipolar elements, is discharged. Each bipolar element may have regions partially doped with different polarities. When the nozzle is in a deflected state, at least a portion of the nozzle can be deflected in one direction.

[0012] In one embodiment, the inkjet head may include a base portion and an inner tube disposed within the base portion and supplied with ink. A nozzle may be located at the lower end of the inner tube. The inkjet head allows ink to flow through the inner tube and exit through the nozzle.

[0013] In one embodiment, each of the nozzles may include an inlet connected to an inner tube and an outlet through which ink is discharged.

[0014] In one embodiment, each of the nozzles may further include an actuator disposed between the inlet and the outlet.

[0015] In one implementation, the actuator can control the amount of ink droplets ejected from each nozzle.

[0016] In one implementation, the actuator may be attached to the inner tube.

[0017] In one embodiment, each of the nozzles may also include a flexible tube disposed between the actuator and the outlet.

[0018] In one embodiment, each of the nozzles may also include a microelectronic controller disposed between the flexible tube and the outlet.

[0019] In one implementation, the microelectronic controller may be connected to at least one microelectronic control line attached to the microelectronic controller.

[0020] In one implementation, the flexible tube can bend along the direction of movement of the microelectronic controller as the microelectronic controller moves.

[0021] In one embodiment, at least one microelectronic control line may include multiple microelectronic control lines. The multiple microelectronic control lines may include a first microelectronic control line connected to one end of the microelectronic controller in a first direction, and a second microelectronic control line connected to the other end of the microelectronic controller in the first direction.

[0022] In an embodiment, the plurality of microelectronic control lines may further include a third microelectronic control line connected to one end of the microelectronic controller in a second direction intersecting the first direction, and a fourth microelectronic control line connected to the other end of the microelectronic controller in the second direction.

[0023] According to an embodiment, an inkjet printing apparatus may include: a stage; and an inkjet head, disposed above the stage and including nozzles, through which ink, including bipolar elements, is discharged. Each bipolar element may have a region partially doped with a different polarity. When the nozzle is in a non-deflected state, the ejected ink droplets may have a first spacing. When the nozzle is in a deflected state in which at least a portion of the nozzle is deflected in one direction, the ejected ink droplets may have a second spacing different from the first spacing.

[0024] In one embodiment, the nozzle may have a first spacing in the non-deflected state. The nozzle may have a second spacing in the deflected state.

[0025] In one embodiment, the at least portion of the nozzle may include a microelectronic controller that causes the at least portion of the nozzle to deflect from the direction.

[0026] In one implementation, the microelectronic controller may be connected to at least one microelectronic control line attached to the microelectronic controller.

[0027] In this implementation, the inkjet head can be moved in both the upward and downward directions.

[0028] In one embodiment, the inkjet head can be moved in the upward and downward directions to adjust the spacing between the inks ejected from the nozzles on the stage.

[0029] In one embodiment, the nozzle can be tilted relative to the stage. The nozzle can be tilted to adjust the spacing on the stage between the inks ejected from the nozzle.

[0030] According to one embodiment, the inkjet head may include a base portion and an inner tube disposed within the base portion and supplied with ink. A nozzle may be disposed at the lower end of the inner tube. The inkjet head allows ink to flow through the inner tube and exit through the nozzle.

[0031] The effects of this disclosure are not limited to those described above, and various other effects are included in the specification. Attached Figure Description

[0032] The above and other aspects and features of this disclosure will become more apparent from the detailed description of embodiments thereof with reference to the accompanying drawings, in which:

[0033] Figure 1 This is a schematic perspective view of an inkjet printing apparatus according to an embodiment;

[0034] Figure 2 This is a schematic plan view of the printhead unit according to the embodiment;

[0035] Figure 3 This is a schematic diagram illustrating the operation of the printhead unit according to an embodiment;

[0036] Figure 4 This is a schematic plan view of the probe device according to the embodiment;

[0037] Figure 5 and Figure 6 This is a schematic diagram illustrating the operation of the probe unit according to an embodiment;

[0038] Figure 7 This is a schematic diagram illustrating the electric field generated on the target substrate by the probe device according to an embodiment;

[0039] Figure 8 This is a schematic cross-sectional view of an inkjet head according to an embodiment;

[0040] Figure 9 yes Figure 8 An enlarged schematic cross-sectional view of region A;

[0041] Figure 10 It is shown Figure 9 A schematic plan view of the inner tube and nozzle;

[0042] Figure 11 It is shown Figure 9 A schematic plan view of the microelectronic controller and the microelectronic control lines connected to the microelectronic controller;

[0043] Figure 12 This is a schematic perspective view illustrating the operation of the nozzle according to an embodiment; and

[0044] Figure 13 This is a schematic cross-sectional view showing the nozzle being deflected according to the embodiment. Detailed Implementation

[0045] The structural and functional descriptions of embodiments are disclosed herein with reference to the accompanying drawings. This disclosure may be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of this disclosure to those skilled in the art. Therefore, the embodiments are disclosed for illustrative purposes only and should not be construed as limiting this disclosure. Thus, the scope of this disclosure is defined by the claims.

[0046] It will be understood that when an element is referred to as being associated with another element, such as by being “connected” or “attached” to another element, it can be directly connected to or attached to said other element, or there may be an intermediary element between them. Conversely, it should be understood that when an element is referred to as being associated with another element, such as by being “directly connected” or “directly attached” to another element, there is no intermediary element. Other expressions describing relationships between elements, such as “between,” “directly between,” “adjacent,” or “directly adjacent,” should be interpreted in the same manner.

[0047] Throughout the instruction manual, the same reference numerals will denote the same or similar parts.

[0048] It will be understood that although the terms “first,” “second,” “third,” etc., may be used in this document to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or part from another. Therefore, “first element,” “first component,” “first region,” “first layer,” or “first part” discussed below may be referred to as a second element, second component, second region, second layer, or second part without departing from the teachings of this document.

[0049] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, “a,” “an,” “the,” and “at least one” do not indicate a limitation of quantity and are intended to include both the singular and the plural unless the context clearly indicates otherwise. For example, “element” has the same meaning as “at least one element” unless the context clearly indicates otherwise. “At least one” should not be construed as limiting “a” or “an.” “Or” means “and / or.” As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. It will also be understood that, when used in this specification, the terms “comprising” and / or “including” or “containing” and / or “comprising” specify the presence of the stated features, areas, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, areas, integrals, steps, operations, elements, components, and / or groups thereof.

[0050] In the specification and claims, the phrase “at least one of…” is intended to include the meaning of “at least one selected from the group consisting of…” for purposes of meaning and interpretation. For example, “at least one of A and B” can be understood to mean “A, B, or A and B”.

[0051] Furthermore, relative terms such as “below” or “bottom” and “above” or “top” may be used herein to describe the relationship between one element and another, as shown in the accompanying drawings. It will be understood that, in addition to the orientations shown in the drawings, the relative terms are intended to also include different orientations of the device. For example, if a device in one of the drawings is flipped, an element described as being “below” the other element will subsequently be oriented “above” the other element. Thus, the term “below” can include both “below” and “above” orientations, depending on the specific orientation of the drawing. Similarly, if a device in one of the drawings is flipped, an element described as being “below” or “under” the other element will subsequently be oriented “above” the other element. Thus, the term “below” or “under” can include both “below” and “above” orientations.

[0052] As used herein, “about” or “approximately” includes the value and the average of the specific value within an acceptable range of deviations from the value as determined by a person of ordinary skill in the art when considering the measurement in question and the errors associated with the measurement of the specific quantity (i.e., limitations of the measurement system). For example, “about” may mean within one or more standard deviations, or within ±30%, ±20%, ±10%, or ±5% of the value.

[0053] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. It will also be understood that terms (such as those defined in commonly used dictionaries) shall be interpreted as having the same meaning as they have in the context of the relevant art and of this disclosure, and shall not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0054] Embodiments are described herein with reference to cross-sectional views, which are schematic diagrams of idealized embodiments. Thus, variations in shape from the illustrations can be anticipated due to factors such as manufacturing techniques and / or tolerances. Therefore, the embodiments described herein should not be construed as limited to the specific shapes of the regions shown herein, but should include, for example, deviations in shape caused by manufacturing processes. For instance, regions shown or described as flat may generally have rough and / or non-linear characteristics. Furthermore, sharp corners shown may be rounded. Therefore, the regions shown in the figures are schematic in nature and are not intended to show the precise shapes of the regions, nor are they intended to limit the scope of the claims.

[0055] In the following description, embodiments will be described with reference to the accompanying drawings.

[0056] Figure 1 This is a schematic perspective view of an inkjet printing apparatus according to an embodiment. Figure 2This is a schematic plan view of the printhead unit according to the embodiment. Figure 3 This is a schematic diagram illustrating the operation of the printhead unit according to an embodiment.

[0057] refer to Figures 1 to 3 The inkjet printing apparatus 1000 according to the embodiment may include a printhead unit 100 having an inkjet head 300. The inkjet printing apparatus 1000 may also include a stage STA, a probe device 700, and a base frame 600.

[0058] like Figure 1 The diagram defines a first direction DR1, a second direction DR2, and a third direction DR3. The first direction DR1 and the second direction DR2 lie in the same plane and are orthogonal to each other, and the third direction DR3 is a direction perpendicular to both the first direction DR1 and the second direction DR2. It is understood that the first direction DR1 refers to the horizontal direction in the diagram, the second direction DR2 refers to the vertical direction in the diagram, and the third direction DR3 refers to the upward and downward directions in the diagram.

[0059] The inkjet printing apparatus 1000 can use the printhead unit 100 to jet selected ink 90 onto a target substrate SUB. An electric field can be generated on the target substrate SUB on which the ink 90 has been jetted by the probe device 700, and particles such as bipolar elements included in the ink 90 can be aligned on the target substrate SUB.

[0060] A target substrate SUB can be disposed on a probe device 700, which can form an electric field on the target substrate SUB, and the electric field can be transmitted to the ink 90 sprayed onto the target substrate SUB. Including in the ink 90 are elements such as bipolar elements 95 (see...). Figure 7 The particles can have a shape that extends in one direction, and the extension direction can be oriented in one direction by alignment with an electric field.

[0061] The inkjet printing apparatus 1000 according to the embodiment may include an inkjet head 300. The inkjet head 300 may jet, discharge, or print ink 90, including bipolar elements 95, onto a target substrate SUB, and the stage STA may provide an area where a probe device 700 is provided.

[0062] The inkjet printing apparatus 1000 includes a first track RL1 and a second track RL2 extending in a second direction DR2, and a stage STA is disposed on the first track RL1 and the second track RL2. The stage STA can move in the second direction DR2 via separate moving members on the first track RL1 and the second track RL2. A probe device 700 can move together with the stage STA in the second direction DR2, and ink 90 can be ejected onto the probe device 700 as it passes the printhead unit 100. However, this disclosure is not limited thereto. Although Figure 1 The diagram shows a structure in which the stage STA moves; however, in some embodiments, the stage STA may be fixed, and the printhead unit 100 may be movable. The printhead unit 100 may be mounted on a frame disposed on the first track RL1 and the second track RL2.

[0063] The printhead unit 100 can be disposed in the base frame 600 including the inkjet head 300. The printhead unit 100 can spray selected ink 90 onto the target substrate SUB disposed in the probe device 700 by using the inkjet head 300 connected to a separate ink reservoir.

[0064] The base frame 600 may include a support unit 610 and a moving unit 630. The support unit 610 may include a first support portion 611 extending in a first direction DR1, which is a horizontal direction, and a second support portion 612 connected to the first support portion 611 and extending in a third direction DR3, which is an upward and downward direction. The extending direction of the first support portion 611 may be the same as the first direction DR1, which is the long side direction of the probe device 700. The printhead unit 100 may be mounted on the moving unit 630, which is mounted on the first support portion 611.

[0065] The moving unit 630 may include a moving part 631 mounted on the first support portion 611 and movable in one direction, and a fixing part 632 disposed on the bottom surface of the moving part 631 for placing the print head unit 100. The moving part 631 may move on the first support portion 611 in a first direction DR1, and the print head unit 100 may be fixed on the fixing part 632 to move together with the moving part 631 in the first direction DR1.

[0066] The printhead unit 100 can be mounted on the base frame 600 and sprays ink 90 supplied from the ink reservoir onto the target substrate SUB via the inkjet head 300. The printhead unit 100 can be spaced apart from the stage STA located below the base frame 600 by a selected distance. The distance between the printhead unit 100 and the stage STA can be adjusted by the height of the second support portion 612 of the base frame 600. When the probe device 700 and the target substrate SUB are mounted on the stage STA, the separation distance between the printhead unit 100 and the stage STA can be adjusted within a range that ensures the space required for the printing process due to the certain distance between them.

[0067] According to an embodiment, the printhead unit 100 may include a nozzle 350 (see [link]). Figure 8 The inkjet head 300 can be disposed on the bottom surface of the printhead unit 100. The inkjet head 300 can be disposed above the stage STA.

[0068] The inkjet heads 300 can be configured to be spaced apart from each other in one direction and can be arranged in a single line or multiple lines. Figure 2 and Figure 3 The illustration shows a configuration in which the inkjet heads 300 are arranged in two rows, with the inkjet heads 300 in each row arranged alternately. However, this disclosure is not limited to this, and the inkjet heads 300 can be arranged in a greater number of rows, and can be arranged to overlap each other without intersecting each other. The shape of the inkjet heads 300 is not particularly limited, but for example, the inkjet heads 300 can have a quadrilateral shape.

[0069] At least one inkjet head 300 (e.g., two inkjet heads 300) can be arranged adjacent to each other to form a single group. However, the number of inkjet heads 300 included in a single group is not limited to this, and for example, the number of inkjet heads 300 included in a single group can range from 1 to 5. Furthermore, although Figure 2 Six inkjet heads 300 disposed in the printhead unit 100 are shown, but this is for illustrative purposes only, and the number of inkjet heads 300 is not limited thereto.

[0070] The inkjet head 300 disposed in the printhead unit 100 can spray ink 90 onto the target substrate SUB disposed above the stage STA. According to an embodiment, the printhead unit 100 can move in one direction on the first support portion 611, and the inkjet head 300 can move in that one direction to spray ink 90 onto the target substrate SUB.

[0071] The printhead unit 100 can move along the first direction DR1 of the first support portion 611, and the inkjet head 300 can move along the first direction DR1 to spray ink 90 onto the target substrate SUB.

[0072] In an embodiment, ink 90 may include solvent 91 (see [link to embodiment]). Figure 7 The ink 90 includes a bipolar element 95 contained in a solvent 91. In embodiments, the ink 90 may be in a solution or colloidal state. For example, the solvent 91 may be acetone, water, ethanol, toluene, propylene glycol (PG), propylene glycol methyl acetate (PGMA), etc., but is not limited thereto. The bipolar element 95 may be included in the solvent 91 in a dispersed state and may be supplied to the printhead unit 100 for discharge.

[0073] In some embodiments, the width of the target substrate SUB measured in the first direction DR1 may be greater than the width of the printhead unit 100. The printhead unit 100 may move in the first direction DR1 and spray ink 90 onto the entire surface of the target substrate SUB. If the target substrate SUB is positioned on the probe device 700, the printhead unit 100 may spray ink 90 onto each of the target substrates SUB while moving in the first direction DR1.

[0074] However, this disclosure is not limited to this, and the printhead unit 100 can be positioned (or arranged) outside the first track RL1 and the second track RL2, and then moved in the first direction DR1 to eject ink 90 onto the upper part of the target substrate SUB. When the stage STA moves in the second direction DR2 and is located below the base frame 600, the printhead unit 100 can move between the first track RL1 and the second track RL2 to eject ink 90 through the inkjet head 300. The operation of the inkjet head 300 is not limited to this, and can be modified in various ways within the scope where similar processes can be implemented.

[0075] Figure 4 This is a schematic plan view of the probe device according to an embodiment.

[0076] refer to Figures 1 to 4 The probe device 700 may include a stage 710, a probe support 730, a probe unit 750, and an aligner 780.

[0077] The probe device 700 can be mounted on the stage STA and move together with the stage STA in the second direction DR2. The probe device 700, on which the target substrate SUB is mounted, can move along the stage STA, and ink 90 can be sprayed onto it. When the ink 90 is sprayed, the probe device 700 can generate an electric field on the target substrate SUB. However, this disclosure is not limited thereto. In some embodiments, the stage STA may remain stationary, and the printhead unit 100 may move along the second direction DR2 to spray ink 90 onto the stage STA.

[0078] The sub-stage portion 710 provides space for mounting the target substrate SUB. A probe support 730, a probe unit 750, and an aligner 780 can be disposed on the sub-stage portion 710. The shape of the sub-stage portion 710 is not particularly limited, but for example, as shown in the figures, the sub-stage portion 710 can have a quadrilateral shape, with both sides extending in a first direction DR1 and a second direction DR2. The sub-stage portion 710 may include a long side extending in the first direction DR1 and a short side extending in the second direction DR2. However, the overall planar shape of the sub-stage portion 710 can vary depending on the planar shape of the target substrate SUB. For example, when the target substrate SUB is rectangular in the planar view, the shape of the sub-stage portion 710 can be rectangular as shown in the figures, and when the target substrate SUB has a circular planar shape, the sub-stage portion 710 can also have a circular shape in the planar view.

[0079] At least one aligner 780 may be disposed on the sub-stage portion 710. The aligners 780 may be disposed on each side of the sub-stage portion 710, and the area surrounded by the aligners 780 may be the area in which the target substrate SUB is disposed. In the figures, two aligners 780 are spaced apart on each side of the sub-stage portion 710, and eight aligners 780 are disposed on the sub-stage portion 710. However, this disclosure is not limited thereto, and the number and arrangement of the aligners 780 may vary depending on the shape or type of the target substrate SUB.

[0080] A probe support 730 and a probe unit 750 are arranged on the sub-stage 710. The probe support 730 provides space for the probe unit 750 to be disposed on the sub-stage 710. The probe support 730 may be disposed on at least one side of the sub-stage 710 and extend along said side in a direction extending therefrom. For example, as Figure 1 As shown, the probe support 730 may be configured to extend in the second direction DR2 on the left and right sides of the sub-stage 710. However, this disclosure is not limited thereto, and the probe support 730 may include a greater number, and in some cases may also be provided on the upper and lower sides of the sub-stage 710. The structure of the probe support 730 may vary depending on the number, arrangement, or structure of the probe units 750 included in the probe device 700.

[0081] The probe unit 750 can be disposed on the probe support 730 to form an electric field on the target substrate SUB fabricated on the sub-stage portion 710. Like the probe support 730, the probe unit 750 can extend in one direction, for example, in a second direction DR2, and the extension length can cover the entire target substrate SUB. The size and shape of the probe support 730 and the probe unit 750 can vary depending on the target substrate SUB.

[0082] In an embodiment, the probe unit 750 may include a probe driver 753 disposed on the probe support 730, a probe holder 751 disposed on the probe driver 753 to receive electrical signals, and a probe pad 758 connected to the probe holder 751 to transmit electrical signals to the target substrate SUB.

[0083] A probe driver 753 may be disposed on a probe support 730 to move the probe holder 751 and the probe pad 758. In an embodiment, the probe driver 753 may move the probe holder 751 in a horizontal direction and in upward and downward directions (e.g., a first direction DR1 as the horizontal direction and a third direction DR3 as the upward and downward directions). The probe pad 758 may be connected to or disconnected from the target substrate SUB by driving the probe driver 753. During the process of using the inkjet printing apparatus 1000, in the step of forming an electric field on the target substrate SUB, the probe driver 753 may be driven to connect the probe pad 758 to the target substrate SUB, and in other steps, the probe driver 753 may be driven again to disconnect the probe pad 758 from the target substrate SUB. This will be described in detail later with reference to other accompanying drawings.

[0084] The probe pad 758 can form an electric field on the target substrate SUB by transmitting an electrical signal from the probe holder 751. The probe pad 758 can be connected to the target substrate SUB and transmit an electrical signal to form an electric field on the target substrate SUB. For example, the probe pad 758 can contact an electrode or power pad of the target substrate SUB, and the electrical signal from the probe holder 751 can be transmitted to that electrode or power pad. The electrical signal transmitted to the target substrate SUB can form an electric field on the target substrate SUB.

[0085] However, this disclosure is not limited thereto. The probe pad 758 may be a component that forms an electric field by an electrical signal transmitted from the probe holder 751. When an electric field is formed by receiving an electrical signal from the probe pad 758, the probe pad 758 may not be connected to the target substrate SUB.

[0086] The shape of the probe pad 758 is not particularly limited, but in an embodiment, the probe pad 758 may have a shape that extends in one direction and may cover the entire target substrate SUB.

[0087] The probe fixture 751 can be connected to the probe pad 758 and to a separate voltage application device. The probe fixture 751 can transmit an electrical signal from the voltage application device to the probe pad 758 to form an electric field on the target substrate SUB. The electrical signal transmitted to the probe fixture 751 can be a voltage used to form the electric field, such as an alternating current voltage.

[0088] The probe unit 750 may include probe holders 751, and their number is not particularly limited thereto. Although the figures show three probe holders 751 and three probe drivers 753, the probe unit 750 may include more probe holders 751 and probe drivers 753 to form an electric field with a higher density on the target substrate SUB.

[0089] The probe unit 750 according to the embodiment is not limited thereto. Although the probe unit 750 is shown in the drawings disposed on the probe support 730 of the probe device 700, in other examples, the probe unit 750 may be configured as a separate device. There are no limitations on its structure or arrangement as long as the probe device 700 includes means capable of forming an electric field to form an electric field on the target substrate SUB.

[0090] Figure 5 and Figure 6 This is a schematic diagram illustrating the operation of the probe unit according to an embodiment.

[0091] As described above, the probe driver 753 of the probe unit 750 can operate according to the process steps of the inkjet printing apparatus 1000. (See reference...) Figure 5 and Figure 6 In the first state in which no electric field is formed in the probe device 700, the probe unit 750 can be disposed on the probe support 730 to be spaced apart from the target substrate SUB. The probe driver 753 of the probe unit 750 can separate the probe pad 758 from the target substrate SUB by driving it in a first direction DR1 as the horizontal direction and a third direction DR3 as the upward and downward directions.

[0092] In the second state, where an electric field is formed on the target substrate SUB, the probe driver 753 of the probe unit 750 can be driven to connect the probe pad 758 to the target substrate SUB. The probe driver 753 can be driven in a third direction DR3 (up and down) and a first direction DR1 (horizontal), allowing the probe pad 758 to contact the target substrate SUB. The probe holder 751 of the probe unit 750 can transmit electrical signals to the probe pad 758, and an electric field IEL can be formed on the target substrate SUB.

[0093] The accompanying drawings show probe units 750 disposed on each side of the probe assembly 700, with both probe units 750 simultaneously connected to the target substrate SUB. However, this disclosure is not limited thereto, and each of the probe units 750 can be driven individually. For example, when the target substrate SUB is prepared on the sub-stage 710 and ink 90 is sprayed onto it, any first probe unit 750 can first form an electric field on the target substrate SUB, and the second probe unit 750 may not be connected to the target substrate SUB. Subsequently, the first probe unit 750 can be separated from the target substrate SUB, and the second probe unit 750 can be connected to the target substrate SUB to form an electric field. The probe units 750 can be driven simultaneously to form an electric field, or driven sequentially to form electric fields sequentially.

[0094] Figure 7 This is a schematic diagram illustrating the electric field generated on the target substrate by the probe device according to an embodiment.

[0095] refer to Figure 7 As described above, the bipolar element 95 may include a first end and a second end having polarity, and when placed in an electric field IEL, it can be subjected to dielectric force, allowing its position or orientation to be changed. The bipolar element 95 in the ink 90 sprayed onto the target substrate SUB can be mounted on the target substrate SUB when its position and orientation are changed due to the electric field IEL generated by the probe device 700.

[0096] The probe device 700 can generate an electric field IEL above the target substrate SUB, and the ink 90 discharged from the nozzle 350 of the inkjet head 300 can pass through the electric field IEL to be sprayed onto the target substrate SUB. The bipolar element 95 can withstand the dielectric force from the electric field IEL until the ink 90 reaches the target substrate SUB or after the ink 90 reaches the target substrate SUB. According to an embodiment, after being discharged from the inkjet head 300, the orientation and position of the bipolar element 95 can be changed due to the electric field IEL generated by the probe device 700.

[0097] The electric field IEL generated by the probe device 700 can be formed in a direction parallel to the top surface of the target substrate SUB. The bipolar element 95 sprayed onto the target substrate SUB can be oriented by the electric field IEL such that the extension direction of its long axis is parallel to the top surface of the target substrate SUB. Furthermore, the bipolar element 95 can be mounted on the target substrate SUB, wherein the first end has a polarity oriented in a specific direction.

[0098] When a bipolar element 95 is mounted on a target substrate SUB, the degree of alignment can be measured by the deviation in the orientation direction of the bipolar element 95 or the deviation in its mounting position on the target substrate SUB. Among the bipolar elements 95 mounted on the target substrate SUB, the degree of alignment of the bipolar element 95 can be measured by measuring the deviations in mounting position and orientation direction of other bipolar elements 95 relative to the selected bipolar element 95. The “degree of alignment” of a bipolar element 95 can refer to the deviation in orientation direction and mounting position of the bipolar element 95 aligned on the target substrate SUB. For example, a low degree of alignment of a bipolar element 95 can refer to a bipolar element 95 with large deviations in both orientation direction and mounting position. A high or improved degree of alignment of a bipolar element 95 can refer to a bipolar element 95 with small deviations in both orientation direction and mounting position.

[0099] The timing of the generation of the electric field IEL by the probe unit 700 above the target substrate SUB is not particularly limited. The accompanying drawings illustrate a case where the electric field IEL is generated in the probe unit 750 simultaneously with the ink 90 being ejected from the nozzle 350 to reach the target substrate SUB. Therefore, the bipolar element 95 can withstand dielectric forces due to the electric field IEL until the ink 90 is ejected from the nozzle 350 to reach the target substrate SUB. However, this disclosure is not limited to this, and in other examples, the probe unit 750 may generate the electric field IEL after the ink 90 has reached the target substrate SUB. The probe unit 700 may generate the electric field IEL when or after the ink 90 is ejected from the inkjet head 300.

[0100] Although not shown in the accompanying drawings, in some embodiments, an electric field generating member may also be disposed on the sub-stage 710. Similar to the probe unit 750, which will be described later, the electric field generating member can generate an electric field in the upward direction (i.e., the third direction DR3) or over the target substrate SUB. In embodiments, an antenna unit or a device including electrodes may be used as the electric field generating member.

[0101] Although not shown in the accompanying drawings, the inkjet printing apparatus 1000 according to an embodiment may further include a heat treatment unit that evaporates the ink 90 ejected onto the target substrate SUB. The heat treatment unit radiates heat onto the ink 90 ejected onto the target substrate SUB, causing the solvent 91 of the ink 90 to evaporate and be removed, and a bipolar element 95 may be disposed on the target substrate SUB. The process of removing the solvent 91 by radiating heat onto the ink 90 can be performed using a heat treatment unit.

[0102] Figure 8 This is a schematic cross-sectional view of an inkjet head according to an embodiment. Figure 8 The nozzle 350 is shown in its undeflected state (in a non-deflected state).

[0103] refer to Figure 8 The inkjet head 300 may include a nozzle 350 for discharging ink 90 through the nozzle 350. The ink 90 discharged from the nozzle 350 may be sprayed onto a target substrate SUB disposed on the stage STA or probe device 700. The nozzle 350 may be located on the bottom surface of the inkjet head 300 and may be arranged along the direction in which the inkjet head 300 extends.

[0104] The inkjet head 300 may include a base part 310, an inner tube 330, and a nozzle 350.

[0105] The base portion 310 can form the main body of the inkjet head 300. The base portion 310 can be attached to the printhead unit 100. (See above for reference.) Figure 2 The base portion 310 may have a shape extending in the first direction DR1 and the second direction DR2. However, this disclosure is not limited thereto, and the base portion 310 may have a circular shape.

[0106] The inner tube 330 can be disposed in the base section 310 to connect to the internal flow path of the printhead unit 100, and ink 90 can be supplied from the ink circulation unit.

[0107] The inkjet head 300 may include a filter F disposed in the inner tube 330. When ink 90 flowing along the inner tube 330 enters the nozzle 350, the filter F can prevent materials other than the bipolar element 95 from entering the nozzle 350. Therefore, the filter F can prevent the nozzle 350 from being blocked by foreign objects, or can prevent foreign objects from mixing with the ink 90 discharged from the nozzle 350.

[0108] The base portion 310 may have a shape extending in one direction, and the inner tube 330 may be formed along the extending direction of the base portion 310. The inner tube 330 may be located within the base portion 310 in a cross-sectional view. Ink 90 supplied by the printhead unit 100 may flow through the inner tube 330 and be discharged through the nozzle 350 of the inkjet head 300. The inkjet head 300 may cause the ink 90 to flow through the inner tube 330 and be discharged through the nozzle 350.

[0109] Nozzle 350 can be connected to inner tube 330. Nozzle 350 can be connected to the lower end of inner tube 330. Nozzle 350 can be arranged along a first direction DR1. Although not shown in the accompanying drawings, nozzle 350 can be arranged in a single row or multiple rows. Figure 8 Eight nozzles 350 formed in an inkjet head 300 are shown, but this disclosure is not limited thereto. In some embodiments, the number of nozzles 350 included in the inkjet head 300 may range from 128 to 1800. The nozzles 350 may discharge ink 90 introduced along the inner tube 330. The amount of ink 90 ejected through the nozzles 350 may be adjusted according to the voltage applied to each nozzle 350. In embodiments, the amount of ink 90 ejected from each nozzle 350 at one time may range from about 1 to about 50 picoliters (pL), but this disclosure is not limited thereto.

[0110] The nozzles 350 may have a selected spacing along the first direction DR1. For example, the nozzles 350 may be arranged to have a first spacing P1 along the first direction DR1. For example, all nozzles 350 may be arranged to have the first spacing P1. Ink 90 discharged from the nozzles 350, all arranged to have the first spacing P1, can be sprayed onto... Figure 1 The nozzle 350 is positioned on the target substrate SUB to have a first target spacing. The first target spacing can vary depending on the separation distance between the nozzle 350 and the target substrate SUB, as well as the deflection angle (tilt) of the nozzle 350. For example, according to the embodiment, the nozzle 350 can deflect simultaneously in one direction. The nozzle 350 can deflect simultaneously in one direction, thereby adjusting the first target spacing. As the separation distance between the nozzle 350 and the target substrate SUB increases, the first target spacing can decrease or increase depending on the deflection angle. As the separation distance between the nozzle 350 and the target substrate SUB decreases, the first target spacing can increase or decrease depending on the deflection angle. According to the embodiment, the nozzle 350 can deflect simultaneously in one direction. The nozzle 350 can deflect simultaneously in one direction, thereby adjusting the first target spacing.

[0111] The ink 90 discharged through the nozzle 350 may include a solvent 91 and a bipolar element 95 dispersed in the solvent 91. According to an embodiment, the bipolar element 95 may have a shape extending in one direction. The bipolar element 95 may be randomly dispersed in the ink 90, flow along the inner tube 330, and then be supplied to the nozzle 350. Because the bipolar element 95 has a shape extending in one direction, it can be oriented in the direction pointed to by its long axis. Furthermore, the bipolar element 95 may include portions having partially different polarities. For example, the bipolar element 95 may include a first end having a first polarity and a second end having a second polarity. The first and second ends may be the two ends of the bipolar element 95 in the long axis direction. The orientation of the bipolar element 95 extending in one direction may be defined based on the direction facing the first end. The bipolar element 95 flowing in the inner tube 330 and nozzle 350 of the inkjet head 300 may not be oriented in a constant direction and may be dispersed in a random direction. However, this disclosure is not limited thereto, and the bipolar element 95 can flow in the inner tube 330 and the nozzle 350 while having a selected orientation.

[0112] Figure 9 yes Figure 8 An enlarged schematic cross-sectional view of region A.

[0113] refer to Figure 8 and Figure 9 The nozzle 350 may include an inlet 351 connected to the inner tube 330 and an outlet 352 through which ink 90 is discharged. The inlet 351 may be directly connected to the inner tube 330. The ink 90 may be directly discharged through the outlet 352.

[0114] The nozzle 350 may also include an actuator 353 disposed between the inlet 351 and the outlet 352. The actuator 353 can control the amount of ink 90 droplets discharged from the nozzle 350. The actuator 353 may be fixed to the inner tube 330.

[0115] The actuator 353 can apply hydraulic pressure to the ink 90 introduced into the nozzle 350 to allow the ink 90 to be smoothly discharged through the nozzle 350.

[0116] According to an embodiment, the actuator 353 can control the amount of ink 90 discharged through the nozzle 350. During the printing process of the inkjet printing apparatus 1000, the actuator 353 can adjust the hydraulic pressure applied to the ink 90 and control the amount of ink 90 droplets discharged per unit space. For example, the amount of ink 90 discharged from the nozzle 350 at one time can be in the range of about 1 to about 50 pL, and the amount of ink 90 discharged per unit space necessary in a single printing process can be about 50 pL or more. The actuator 353 can adjust the intensity or frequency of the hydraulic pressure to control the amount of ink 90 droplets discharged from the nozzle 350 to be different in a single printing process.

[0117] The nozzle 350 may also include a flexible tube 354 disposed between the actuator 353 and the outlet 352. The flexible tube 354 may bend when the nozzle 350 deflects.

[0118] When the nozzle 350 is not deflected, the flexible tube 354 can be as follows: Figure 9 Extending in the thickness direction (third direction DR3) shown, the flexible tube 354 can bend in one direction when the nozzle 350 is deflected. As described later, the deflection of the nozzle 350 can be achieved by a microelectronic controller 355 configured in the nozzle 350. When the microelectronic controller 355 moves finely, the flexible tube 354 can bend in the direction of fine movement of the microelectronic controller 355. When the nozzle 350 is deflected, the flexible tube 354 may include a flexible material for bending.

[0119] The nozzle 350 may also include a microelectronic controller 355 disposed between the flexible tube 354 and the outlet 352. As described later, the microelectronic controller 355 may be connected to at least one microelectronic control line for fine movement of the microelectronic controller 355.

[0120] Figure 10 It is shown Figure 9 A schematic plan view of the inner tube and nozzle.

[0121] refer to Figures 8 to 10 , already referenced Figure 2 The planar shape of the inner tube 330 is described, and redundant descriptions will not be repeated. In the plan view, nozzles 350 can be disposed within the inner tube 330. Nozzles 350 can be arranged along a first direction DR1. Although not shown in the figures, nozzles 350 can be arranged in a single row or multiple rows (along a second direction DR2). Figure 8 Eight nozzles 350 formed in the inkjet head 300 are shown, but this disclosure is not limited thereto.

[0122] Figure 11 It is shown Figure 9A schematic plan view of the microelectronic controller and the microelectronic control lines connected (or attached) to the microelectronic controller. Figure 11 yes Figure 10 An enlarged schematic diagram of region B.

[0123] refer to Figure 11 The microelectronic controller 355 can be connected (or attached) to a moving part of the microelectronic controller 355 for fine movement. The moving part can be a microelectronic control line, but this disclosure is not limited thereto. The moving part is not limited, as long as a movement signal is input to the microelectronic controller 355, and the microelectronic controller 355 can move finely based on the movement signal input.

[0124] In one embodiment, the microelectronic controller 355 is connected (or attached) to a movable portion of the microelectronic controller 355 for precise movement. Therefore, the microelectronic controller 355 can be connected (or attached) to at least one microelectronic control line for precise movement of the microelectronic controller 355. For example... Figure 11 As shown, fine movement can occur in the first direction DR1, the second direction DR2, or both the first direction DR1 and the second direction DR2. To finely move the microelectronic controller 355 via a microelectronic control line in the first direction DR1, the second direction DR2, or both the first direction DR1 and the second direction DR2, at least one microelectronic control line may include a first-direction microelectronic control line extending along the first direction DR1 and a second-direction microelectronic control line extending along the second direction DR2.

[0125] The first direction microelectronic control line can be connected (or attached) to one side (or one end) of the microelectronic controller 355 on the first direction DR1 or the other side (or the other end) of the microelectronic controller 355 on the first direction DR1. The second direction microelectronic control line can be connected (or attached) to one side of the microelectronic controller 355 on the second direction DR2 or the other side of the microelectronic controller 355 on the second direction DR2.

[0126] The first direction microelectronic control line may include a first microelectronic control line 355a connected (or attached) to one side of the microelectronic controller 355 on the first direction DR1, and a second microelectronic control line 355b connected (or attached) to the other side of the microelectronic controller 355 on the first direction DR1.

[0127] The second-direction microelectronic control line may include a third microelectronic control line 355d connected (or attached) to one side of the microelectronic controller 355 on the second direction DR2, and a fourth microelectronic control line 355c connected (or attached) to the other side of the microelectronic controller 355 on the second direction DR2.

[0128] Figure 12 This is a schematic perspective view showing the operation of the nozzle according to an embodiment.

[0129] Figure 12 At least a portion of the nozzle 350 deflected in the first direction DR1 is shown. Figure 13 This is a schematic cross-sectional view showing the nozzle being deflected according to the embodiment.

[0130] like Figure 9 , Figure 12 and Figure 13 As shown, in Figure 12 The bisector CL is defined as extending on the third direction DR3 and dividing the nozzles 350 arranged in a single row.

[0131] At least a portion of the nozzle 350 located on the other side of the bisector CL in the first direction DR1 relative to the bisector CL can be considered deflected to one side of the first direction DR1, and at least a portion of the nozzle 350 located on the other side of the bisector CL in the first direction DR1 relative to the bisector CL can be considered deflected to the other side of the first direction DR1. The deflected nozzles 350 may have a second spacing. The second spacing between the deflected nozzles 350 may all be the same. The second spacing may differ from the first spacing P1 between the non-deflected nozzles 350. The second spacing may be smaller than the first spacing P1 between the non-deflected nozzles 350.

[0132] The outlet 352 of the nozzle 350 located on the other side of the bisector CL in the first direction DR1 relative to the bisector CL can be tilted entirely toward the bisector CL.

[0133] The angle between the extension direction of the lower end of the flexible tube 354 of the nozzle 350 located on the other side of the first direction DR1 relative to the bisector CL and the extension direction of the actuator 353 can become smaller as it gets closer to the bisector CL (this angle can become smaller from θ1>θ2>θ3).

[0134] According to the embodiment, since each of the nozzles 350, which also includes a microelectronic controller 355 capable of moving along a selected direction, deflects along the selected direction, the spacing between the nozzles 350 fixed to the first spacing P1 in the non-deflected state can be easily or flexibly changed to a second spacing different from the first spacing P1, which is advantageous in terms of being able to easily adapt to variable display resolutions.

[0135] In some implementations, such as reference Figure 1As described, since the inkjet head 300 connected to the base frame 600 is movable up and down along with the base frame 600 including a movable unit 630, the target spacing on the target substrate SUB can be adjusted not only by combining the deflection of the nozzle 350 by the microelectronic controller 355 but also by combining the up and down movement of the inkjet head 300.

[0136] In some other embodiments, the printhead unit 100, which is attached to the bottom of the moving unit 630, can be rotatable in the third direction DR3 as a rotation axis without being fixed by the fixing part 632. The rotation angle of the printhead unit 100 in the third direction DR3 can be combined with the deflection of the nozzle 350 to adjust the target spacing on the target substrate SUB.

[0137] Although embodiments have been disclosed for illustrative purposes, those skilled in the art will understand that various modifications, additions, and substitutions are possible without departing from the scope and spirit of this disclosure as disclosed in the appended claims.

Claims

1. An inkjet printing apparatus, comprising: An inkjet head, positioned above the stage, includes nozzles through which ink, including bipolar elements, is discharged. Each bipolar element has a first end and a second end doped with different polarities. Wherein, when the nozzle is in a deflected state, a portion of the nozzle in the deflected state deflects in one direction, and Wherein, when the nozzle is in the deflected state, another part of the nozzle in the deflected state does not deflect from the one direction.

2. The inkjet printing apparatus according to claim 1, wherein, The inkjet head includes: Basic parts; and An inner tube, disposed within the base portion, is supplied with the ink. The nozzle is located at the lower end of the inner tube, and The inkjet head causes the ink to flow through the inner tube and exit through the nozzle.

3. The inkjet printing apparatus according to claim 2, wherein, Each of the nozzles includes: Inlet, connected to the inner tube; and The ink is discharged through the outlet.

4. The inkjet printing apparatus according to claim 3, wherein, Each of the nozzles also includes an actuator disposed between the inlet and the outlet.

5. The inkjet printing apparatus according to claim 4, wherein, The actuator controls the amount of ink droplets ejected from each of the nozzles.

6. The inkjet printing apparatus according to claim 4, wherein, The actuator is attached to the inner tube.

7. The inkjet printing apparatus according to claim 6, wherein, Each of the nozzles also includes a flexible tube disposed between the actuator and the outlet.

8. The inkjet printing apparatus according to claim 7, wherein, Each of the nozzles also includes a microelectronic controller disposed between the flexible tube and the outlet.

9. An inkjet printing apparatus, comprising: Taiwan; as well as An inkjet head, disposed above the stage and including nozzles, through which ink comprising bipolar elements is discharged, each of the bipolar elements having a first end and a second end doped with different polarities, wherein... When the nozzle is in a non-deflected state, the ink droplets have a first spacing, and When the nozzle is in a deflected state, the ejected droplets of ink have a second spacing different from the first spacing, wherein a portion of the nozzle in the deflected state is deflected in one direction and another portion of the nozzle in the deflected state is not deflected in the first direction.

10. The inkjet printing apparatus according to claim 9, wherein, The nozzle has the first spacing in the non-deflection state, and The nozzle has the second spacing in the deflection state.

Citation Information

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