Adjusting disc replacement apparatus and method

Abstract

Disclosed are adjusting disc replacement apparatuses and methods. The adjusting disc replacement apparatus includes a disassembler configured to separate an adjusting disc from a holder, a conveyer configured to convey the adjusting disc, and a container configured to store the adjusting disc. The disassembler includes a disassembly body and a rotation portion coupled to the disassembly body, the rotation portion including a key protruding outward from the rotation portion in a first horizontal direction, and the rotation portion is configured to rotate about a shaft extending in the first horizontal direction.

Description

[0001] This application claims priority to Korean Patent Application No. 10-2021-0068620, filed on May 27, 2021, with the Korean Intellectual Property Office, the entire subject matter of which is incorporated herein by reference. Technical Field

[0002] The inventive concept generally relates to a device and method for changing adjustment discs. More specifically, the inventive concept relates to a device for changing adjustment discs that can automatically change the adjustment discs and a method for using the device for changing adjustment discs. Background Technology

[0003] Various processes (e.g., photolithography, etching, deposition, and cleaning) are performed to manufacture semiconductor devices. Semiconductor devices are fabricated on a material substrate commonly referred to as a wafer. In one or more steps during the fabrication of a semiconductor device, the surface of the wafer must be planarized before one or more subsequent processes can be performed.

[0004] Wafer planarization can be achieved using one or more polishing processes. Chemical mechanical polishing (CMP) is a type of wafer polishing used to planarize the wafer surface. During the CMP process, a conditioning disk (or dressing disk) is used to planarize the wafer surface. That is, when the conditioning disk, acting as an abrasive, comes into contact with the rotating wafer, the wafer surface is selectively abraded by the applied motion of the conditioning disk.

[0005] However, such polishing tends to damage the adjusting disc over time. Therefore, the adjusting disc must be replaced periodically. Summary of the Invention

[0006] Embodiments of the inventive concept provide an adjustment disc replacement device capable of quickly and accurately replacing the adjustment disc, and an adjustment disc replacement method using the adjustment disc replacement device.

[0007] Embodiments of the inventive concept provide an adjustment disc replacement device capable of automatically replacing the adjustment disc, and an adjustment disc replacement method using the adjustment disc replacement device.

[0008] Embodiments of the inventive concept provide an adjustment disc replacement device with a relatively simple structure that improves the accuracy and reliability of the adjustment disc replacement method.

[0009] According to the appendix Figure 1 Other advantages, objectives, and features of the inventive concept, as well as its manufacture and use, can be understood by considering the following specific embodiments.

[0010] According to an embodiment of the inventive concept, an adjustment disc replacement device may include: a disassembler configured to separate the adjustment disc from a retainer; a conveying section configured to convey the adjustment disc; and a container configured to store the adjustment disc. The disassembler may include: a disassembler body and a rotating section coupled to the disassembler body, the rotating section including a key projecting outward from the rotating section in a first horizontal direction, and the rotating section being configured to rotate about an axis extending in the first horizontal direction.

[0011] According to an embodiment of the inventive concept, a method for replacing an adjustment disc may include: inserting a key of a disassembler into a groove between a retainer and an old adjustment disc, the old adjustment disc being attached to the lower surface of the retainer; and rotating the key to press the upper surface of the key onto a portion of the lower surface of the retainer and the lower surface of the key onto a portion of the upper surface of the old adjustment disc, thereby separating the old adjustment disc from the retainer.

[0012] According to an embodiment of the inventive concept, an adjustment disc replacement device may include: a disassembler configured to separate the adjustment disc from the holder of a chemical mechanical polishing device, wherein the disassembler includes a disassembler body and a rotating portion coupled to the disassembler body, the rotating portion including a key that protrudes from the disassembler body in a first horizontal direction and extends in a second horizontal direction, and the rotating body is configured to rotate about an axis extending in the first horizontal direction. Attached Figure Description

[0013] Figure 1 This is a perspective view showing a chemical mechanical polishing (CMP) apparatus and a regulating disc replacement apparatus according to an embodiment of the inventive concept.

[0014] Figure 2 and Figure 3 This is a corresponding view showing the disassembler of the adjustment disc replacement device according to an embodiment of the inventive concept.

[0015] Figure 4 This is a cross-sectional view showing an adjustment disc integrated into a retainer of a CMP device according to an embodiment of the inventive concept.

[0016] Figure 5 This is a cross-sectional view showing a container for a change plate device according to an embodiment of the inventive concept.

[0017] Figure 6 This is a flowchart illustrating a method for replacing the adjustment disc according to an embodiment of the inventive concept.

[0018] Figure 7 and Figure 8 It is to further demonstrate Figure 6 The corresponding sectional view of one or more steps of the adjustment disc replacement method.

[0019] Figure 9 This is the front view. Figure 10 It is a sectional view; the front view and the sectional view together further show... Figure 6 One or more steps of the adjustment disc replacement method.

[0020] Figure 11 and Figure 12 It is to further demonstrate Figure 6 The corresponding sectional view of one or more steps of the adjustment disc replacement method. Detailed Implementation

[0021] Throughout the written description and accompanying drawings, the same reference numerals and labels are used to denote the same or similar elements and / or features. Throughout the written description, specific geometric terms may be used to highlight the relative relationships between elements, components, and / or features of a particular embodiment of the inventive concept. Those skilled in the art will recognize that such geometric terms are inherently relative, arbitrary in one or more descriptive relationships, and / or refer to one or more aspects of the illustrated embodiment. Geometric terms may include, for example: height / width; vertical / horizontal; top / bottom; higher / lower; closer / farther; thicker / thinner; near / far; above / below; below / above; above / below; center / side; around; cover / padded; etc.

[0022] Figure 1 is a perspective view showing a chemical mechanical polishing (CMP) apparatus (PA) and a regulating disc replacement apparatus (EA) according to an embodiment of the inventive concept.

[0023] CMP equipment PA can be an apparatus configurable to polish wafer surfaces in various ways. For example, CMP equipment PA can be an apparatus capable of performing CMP processes on semiconductor wafers. CMP equipment PA may include a stage ST, a holder H, a holder support member SB, a connector SP, a holder rotation part RP, and a holder observation part DP. The stage ST provides a stabilizing plane on which the wafer can be mounted for polishing. In some embodiments, the wafer may be rested on the upper surface of the stage ST.

[0024] The retainer H may be perpendicularly separated from the machine tool ST (e.g., spaced apart) and may be configured to fix the positioning of the adjustment disc CD. In some embodiments, the retainer H may have a cylindrical shape. The retainer H and the adjustment disc CD may be arranged differently. For example, as Figure 1 As shown, the lower surface Hb of the retainer H and the upper surface of the adjustment disk CD can be joined together. Here, the joining of the retainer H and the adjustment disk CD can be achieved magnetically and / or mechanically.

[0025] The retainer support member SB can be used to connect the retainer H to the connecting part SP, so that the connecting part SP allows the retainer H to move across (or "migrate") different over the machine tool ST.

[0026] Therefore, in some embodiments, the retainer rotating part RP can be rotatable and can be used in conjunction with the connecting part SP to allow the retainer H to move stably above the surface of the machine tool ST. For example, rotation of the retainer rotating part RP can cause the retainer H to move in an arc above the upper surface of the machine tool ST.

[0027] The retainer observation unit DP can be used to observe the state of the retainer H in various ways. For example, the retainer observation unit DP can capture the state of the retainer H and generate corresponding state information indicating whether the adjustment disc CD is correctly engaged with the retainer H. Optionally or additionally, the retainer observation unit DP can capture the state of the exposed (e.g., bottom) surface of the adjustment disc CD and generate corresponding state information. For example, the retainer observation unit DP can visually image the exposed surface of the adjustment disc CD to collect state information indicating the current grinding state of the adjustment disc CD.

[0028] In this regard, the retainer observation unit DP may include one or more components capable of capturing various status information about the adjustment disc CD and transmitting data corresponding to the status information to external circuitry (e.g., a controller). For example, in some embodiments, the retainer observation unit DP may include an optical sensor, a camera, a data transceiver, a communication device, etc. In some embodiments, the retainer observation unit DP may be configured differently to allow the capture of desired status information. For example, the retainer observation unit DP may be (e.g., in a connectable / non-connectable manner) integrated with the connection unit SP.

[0029] The disc changer EA can be a device capable of automatically changing a disc CD. In this context, the term "automatically" refers to the conventional mechanical capability to change the disc without human intervention. For example, the disc changer EA can be a device configurable to separate a used disc CD from a retainer H and then combine a different (e.g., new or readjusted) disc CD into the retainer H.

[0030] exist Figure 1 In the example shown, the adjustment plate replacement device EA includes a disassembler 1, a conveyor 3, a container 5, a disassembly drive A1, a first drive A2, and a second drive A3.

[0031] The disassembly device 1 can be used to separate the adjustment disc CD from the retainer H, wherein the disassembly drive unit A1 can be used to operate (or "drive") the disassembly device 1. Referring below... Figure 2 and Figure 3 A more specific example of the disassembler 1 is described with some additional details.

[0032] The transfer unit 3 can be used to transfer adjustment discs (CDs). For example, the transfer unit 3 can transfer used adjustment discs (CDs) from the holder H to the container 5 and / or transfer new adjustment discs (CDs) from the container 5 to the holder H.

[0033] In some embodiments, the conveying unit 3 may include a base plate 31, a pressing part 33, a conveying rotating part 37, and a connecting member 35. In some embodiments, the base plate 31 may have a disc shape and be configured to support the adjustment disc CD during conveying. That is, the base plate 31 may have a diameter substantially the same as the diameter of the adjustment disc CD.

[0034] The pressing part 33 may be disposed on the upper surface and / or lower surface of the base plate 31. The pressing part 33 can press and fix the adjustment disc CD disposed on the base plate 31. The pressing part 33 may include a mechanical device for pressing and fixing the adjustment disc CD. For example, the pressing part 33 may include a pair of gripping claws, wherein the pair of gripping claws can rotate on the base plate 31 and press and fix the opposite side of the adjustment disc CD to the base plate 31.

[0035] The transfer rotating part 37 can be used to rotate the base plate 31. That is, the connecting member 35 can connect the transfer rotating part 37 and the base plate 31, so that the transfer rotating part 37 and the connecting member 35 enable the base plate 31 to rotate along the transfer path (e.g., an arc).

[0036] Container 5 can be used to store adjustment discs (CDs). See below for details. Figure 5 An example of container 5 is described with some additional details.

[0037] The disassembly drive unit A1 can be used to move and position the disassembler 1. For example, the disassembly drive unit A1 can drive the disassembler 1 laterally (e.g., on at least one of a first horizontal direction D1 and a second horizontal direction D2 intersecting the first horizontal direction) and / or vertically (e.g., on a vertical direction D3 substantially orthogonal to the first horizontal direction and the second horizontal direction).

[0038] The first drive unit A2 can be used to move and position the conveyor unit 3. For example, the first drive unit A2 can drive the conveyor unit 3 laterally and / or vertically.

[0039] The second drive unit A3 can be used to move and position the container 5. For example, the second drive unit A3 can drive the container 5 laterally and / or vertically.

[0040] In this regard, disassembling one or more of the drive unit A1, the first drive unit A2, and the second drive unit A3 may include an actuator (e.g., a linear motor, a rotary motor, and / or a hydraulic motor).

[0041] In some embodiments, each of the disassembly drive unit A1, the first drive unit A2, and the second drive unit A3 may have a similar construction. Alternatively, one or more of the disassembly drive unit A1, the first drive unit A2, and the second drive unit A3 may have different constructions.

[0042] Figure 2 This is a perspective view showing the disassembly device 1 of the adjustment disc replacement device EA according to an embodiment of the inventive concept. Figure 3 This is a front view of the remover 1 of the adjustment disc replacement device EA according to an embodiment of the inventive concept.

[0043] Reference Figure 2 The disassembly device 1 may include a disassembly body 13, a rotating part 11, and a moving part 15, wherein the disassembly body 13 can be used to rotate the rotating part 11, and the moving part 15 can be used to move the disassembly body 13.

[0044] The rotating part 11 can be coupled to the front side of the disassembly body 13. The rotating part 11 is rotatable about an axis extending in a first horizontal direction D1. The rotating part 11 may include a rotating body 111 and a key 113. In some embodiments, the rotating body 111 may have a disc-shaped shape. The rotating body 111 can be coupled to the disassembly body 13. The rotating body 111 may project outward from the front side of the disassembly body 13 in the first horizontal direction D1. The key 113 can be coupled to the rotating body 111 and may project outward from the front side of the rotating body 111 in the first horizontal direction D1.

[0045] Reference Figure 3 The key 113 may also extend for a specific length in the second horizontal direction D2. The key 113 may also include a variable thickness segment (e.g., a segment having a thickness that varies (e.g., increases or decreases) in the vertical direction D3 along its length in the second horizontal direction D2). For example, the first end of the key 113 (e.g., Figure 3 The right end of the key 113 may have a first thickness d1, and the opposite second end of the key 113 (e.g., Figure 3 The left end of the middle part may have a second thickness d2 that is less than the first thickness d1.

[0046] In some embodiments, the variable thickness segment of key 113 may have a thickness that gradually decreases in the second horizontal direction D2. For example, within the variable thickness segment of key 113, the thickness of key 113 may decrease linearly in the second horizontal direction D2. In some embodiments, the ratio between the thickness of the thickest portion of key 113 (e.g., measured in the vertical direction D3) and the total length of key 113 (e.g., measured in the first horizontal direction D1) may range from about 1:1 to about 1:20. However, in this respect, the ratio between the thickness of the thickest portion of key 113 and the total length of key 113 may be appropriately selected with consideration of adjusting the diameter and / or thickness of the disc CD.

[0047] Figure 4 This is a cross-sectional view showing the adjustment disk CD of the holder H incorporated into a chemical mechanical polishing (CMP) apparatus according to an embodiment of the inventive concept.

[0048] Reference Figure 4 Assuming the retainer H includes an embedded retainer magnet M1, the inventive concept is not limited thereto. At least a portion of the retainer magnet M1 may be exposed through the lower surface of the retainer H. In some embodiments, the retainer magnet M1 may include a plurality of magnetic portions spaced laterally along at least one of a first horizontal direction D1 and a second horizontal direction D2 along the lower surface of the retainer H. In this way, the retainer magnet M1 can provide sufficient magnetic force to engage the retainer H with a magnetically attracted adjustment disc CD.

[0049] In this respect, the adjustment disc CD may include one or more metallic materials, such that the magnetic connection between the retainer magnet M1 and the adjustment disc CD effectively binds the retainer H to the adjustment disc CD.

[0050] In some embodiments, the retainer H may include a groove R. Here, the groove R may be a recessed surface Hr formed when a portion of the lower surface of the retainer H is recessed upwards. Thus, the groove R may extend partially between the adjustment disc CD and the retainer H and is located at the outer edge of the retainer H. For example, the recessed surface Hr may extend inwards from the outer edge of the lower surface of the retainer H.

[0051] Figure 5 A cross-sectional view of the container 5 of the adjustment disc replacement device according to an embodiment of the inventive concept is further shown in one embodiment.

[0052] Reference Figure 5 The container 5 may include one or more cantilever members 51 extending from and supported by the support column 59, wherein each of the one or more cantilever members 51 may include a magnet M2 and one or more guide pins 55, and may be associated with a storage observation section 53 connected to the support column 59.

[0053] For example, each cantilever member 51 may extend horizontally from a vertically positioned support column 59, such that two or more of the cantilever members 51 are vertically separated (e.g., spaced apart in the vertical direction D3). With this configuration, each cantilever member 51 can selectively engage and / or disengage (hereinafter, "couple / decouple") a corresponding adjustment disc CD. In this way, one or more adjustment disc CDs can be correspondingly engaged with and supported by a corresponding cantilever member 51 of one or more cantilever members 51. In practice, multiple adjustment disc CDs can be stacked vertically to save floor space in the manufacturing facility.

[0054] As described above, each of the one or more cantilever members 51 may include a coupling magnet M2 capable of magnetically gripping (or being coupled to) the adjustment disc CD. Here, the magnitude of the magnetic force applied to the adjustment disc CD by the coupling magnet M2 may be less than the magnetic force applied to the adjustment disc CD by the retainer magnet M1.

[0055] One or more guide pins 55 may be used to position and engage the adjustment disc CD relative to the lower surface 51b of the cantilever member 51. In some embodiments, double guide pins 55 may be provided at each lateral end of the adjustment disc CD. For example, a first guide pin 551 may indicate a first (or front) edge of the adjustment disc CD, and a second guide pin 553 may indicate a second (or rear) edge of the adjustment disc CD. Between the first guide pin 551 and the second guide pin 553, the adjustment disc CD may be engaged to the lower surface 51b of the cantilever member 51.

[0056] Each storage observation unit 53 can be used to observe the positioning state of the adjustment disc CD relative to the lower surface 51b of the cantilever member 51. For example, the storage observation unit 53 can observe the positioning state of the adjustment disc CD regarding the engagement state between the lower surface 51b of the cantilever member 51 and the adjustment disc CD. Furthermore, in this respect, the storage observation unit 53 captures relevant information and generates corresponding data. In some embodiments, each storage observation unit 53 may include an optical sensor, a data transceiver, a camera, a communication device, etc.

[0057] Figure 6 This is a flowchart illustrating, in one embodiment, a method "S" for changing the adjustment disc according to an embodiment of the inventive concept.

[0058] Reference Figure 1 and Figure 6 The adjustment disc replacement method "S" can be performed by the adjustment disc replacement device EA to replace the adjustment disc CD from the retainer H.

[0059] In this regard, the adjustment disc replacement method "S" may include: moving the conveyor to place the base plate (e.g., a support) below the retainer (S1), inserting a key into the slot between the adjustment disc and the retainer (S2), rotating the key (S3), separating the adjustment disc from the retainer and allowing the adjustment disc to fall onto the base plate (S4), allowing the conveyor to insert the adjustment disc into the container (S5), and allowing the conveyor to attach a new adjustment disc to the retainer (S6). Here, the base plate placement step S1 may include moving the conveyor 3 to allow the base plate 31 to stop at a position perpendicularly spaced from the adjustment disc CD attached to the retainer H. For example, the conveyor rotation unit 37 and the first drive unit A2 are operable to drive the base plate 31 to be positioned below the retainer H.

[0060] Furthermore, in this regard, Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 , Figure 12 And Figure 13 further shows Figure 6 The method for replacing the adjustment disc "S" covers various aspects.

[0061] Figure 7 and Figure 8 It is to further demonstrate Figure 6 The corresponding sectional view of one or more steps of the adjustment disc replacement method.

[0062] Reference Figure 6 , Figure 7 and Figure 8 The key insertion step S2 may include allowing key 113 to be inserted into slot R. For example, disassembling the drive unit (see...). Figure 2 A1) and moving part ( Figure 2 15) The drive rotating part 11 can be translated so that the key 113 can be inserted into the slot R. In some embodiments, the relatively thin portion of the key 113 may be inserted into the slot R first. For example, as per [reference to...] Figure 3 The groove R can initially accommodate either a portion having a second thickness d2 or a relatively thin portion of the key 113. In this case, a portion of the variable thickness segment can be inserted into the groove R first. Therefore, due to the difference between the thickness of the key 113 and the groove R, the thicker portion of the key 113 can be inserted into the groove R later. With the relatively thinner portion of the key 113 inserted into the groove R, the upper surface of the key 113 can be spaced downwards from the recessed surface Hr. Additionally, the lower surface of the key 113 can be spaced upwards from the upper surface CDU of the adjustment disc CD. Immediately after the thicker portion of the key 113 is inserted into the groove R, the upper surface of the key 113 can contact the recessed surface Hr, and / or the lower surface of the key 113 can contact the upper surface CDU of the adjustment disc CD.

[0063] Figure 9 This is the front view. Figure 10 It is a sectional view; the front view and the sectional view together further show... Figure 6 One or more steps of the adjustment disc replacement method.

[0064] Reference Figure 6 and Figure 9 The key rotation step S3 may include allowing the rotating part 11 to rotate about an axis extending in the first horizontal direction D1. For example, power provided from the disassembly body 13 may allow the rotating part 11 to rotate about an axis parallel to the first horizontal direction D1. Figure 9 As shown, the rotating part 11 can rotate counterclockwise around the central CP axis, thereby rotating the key 113 counterclockwise.

[0065] Reference Figure 10 When viewed in cross-section, key 113 is rotatable and has an increased vertical thickness. Therefore, a portion of the upper surface of key 113 can push the recessed surface Hr upwards. Additionally, a portion of the lower surface of key 113 can push the upper surface CDu of the adjustment disk CD downwards. Key 113 can cause the adjustment disk CD to retract from the holder H. For example, the distance between the adjustment disk CD and the holder H can be increased on the side where the groove R is formed. The adjustment disk CD and the holder H can be magnetically engaged with each other on the other side where the groove R is not formed. Therefore, the adjustment disk CD can be tilted to one side.

[0066] Figure 11 and Figure 12 It is to further demonstrate Figure 6 The corresponding sectional view of one or more steps of the adjustment disc replacement method.

[0067] Reference Figure 6 , Figure 11 and Figure 12 The adjustment disc dropping step S4 may include allowing key 113 to rotate continuously to further press the recessed surface Hr and / or the upper surface CDu of the adjustment disc CD. Key 113 may rotate at a specific angle or greater, thus increasing the distance between the adjustment disc CD and the retainer H at the portion forming the groove R. As the rotation of key 113 is performed continuously, the magnetic bonding force between the adjustment disc CD and the retainer H may decrease. When the distance between the adjustment disc CD and the retainer H at the groove R is greater than a specific value, the gravity acting on the adjustment disc CD may be greater than the magnetic bonding force between the adjustment disc CD and the retainer H. Therefore, the adjustment disc CD may separate from the retainer H and then drop. The dropped adjustment disc CD may rest on the upper surface 31u of the base plate 31 prepared below the retainer H.

[0068] Holder observation section (see) Figure 1The DP (Portable Observation Unit) can observe whether the adjustment disc CD has been successfully separated from the retainer H. For example, the retainer observation unit DP can capture an image of the lower surface of the retainer H to determine whether the adjustment disc CD has been separated from the retainer H. When the retainer observation unit DP confirms that the adjustment disc CD has been separated, the transport unit 3 can start moving.

[0069] Reference Figure 1 and Figure 6 The adjustment disc insertion step S5 may include a base plate 31 on which the container 5 has a dropped adjustment disc CD mounted. For example, one or more cantilever members in the container 5 (see...) Figure 5 One of the cantilever members 51) can be identified as empty (e.g., lacking an adjustment disc CD), and the base plate 31 can be moved downwards toward the empty cantilever member 51. When the base plate 31 is properly positioned below the empty cantilever member 51, the magnetic force of the coupling magnet M2 can be used to engage the adjustment disc CD on the base plate 31. For example, the adjustment disc CD can be separated from the base plate 31 and engaged to the lower surface 51b of the cantilever member 51. When the guide pin 55 is present on the lower surface 51b of the cantilever member 51, the adjustment disc CD can be engaged to a specific position on the lower surface 51b of the cantilever member 51 via the guide pin 55. For example, the guide pin 55 can guide the engagement position of the adjustment disc CD. The storage observation unit 53 can determine whether the adjustment disc CD is properly engaged to the cantilever member 51. When the storage observation unit 53 confirms the engagement of the adjustment disc CD, the base plate 31 can be moved.

[0070] Reference Figure 5 and Figure 6 The new joining step S6 may include allowing the base plate 31 to be positioned below the cantilever member 51 where the new adjustment disc CD is located. (See also: Pressing part) Figure 1 The pressing part 33 can press the new adjustment disc CD attached to the lower surface 51b of the cantilever member 51. The transfer part 3 can move while the pressing part 33 is pressing the new adjustment disc CD. Because of the bonding force between the cantilever member 51 and the new adjustment disc CD caused by the bonding magnet M2, the pressing part 33 can separate the new adjustment disc CD from the cantilever member 51. The storage observation part 53 can determine whether the new adjustment disc CD is properly separated from the cantilever member 51. When the storage observation part 53 confirms that the new adjustment disc CD is separated, the base plate 31 can move. The base plate 31 can move toward the underside of the retainer H. When the base plate 31 approaches the vicinity of the retainer H, the retainer magnet (see Figure 4 M1) can attach the new adjustment disc CD on the base plate 31 to the retainer H. The retainer observation section DP can determine whether the new adjustment disc CD is properly attached to the lower surface of the retainer H.

[0071] According to embodiments consistent with the inventive concept, the adjustment disc replacement device and method can automatically separate from and attach to a retainer used in chemical mechanical polishing (CMP) equipment. For example, the adjustment disc replacement operation can be performed automatically within a CMP device. Therefore, the time required to perform the replacement operation can be reduced.

[0072] According to the embodiments of the inventive concept, the adjustment disc replacement device and adjustment disc replacement method are consistent with those of the present invention. Because the adjustment disc is separated from the retainer by using a key rotation method, the separation method is relatively simple, thereby improving reliability.

[0073] According to the embodiments of the inventive concept, the adjustment disc can be replaced quickly and accurately.

[0074] According to the embodiments of the inventive concept, the adjustment disc can be automatically replaced using an adjustment disc replacement device and adjustment disc replacement method consistent with the inventive concept.

[0075] According to the embodiments of the inventive concept, the reliability of adjusting disc replacement can be improved using simple structural and operational principles.

[0076] Specific embodiments of the inventive concept have been described in conjunction with the accompanying drawings. However, those skilled in the art will understand that various changes and modifications may be made to such illustrative embodiments without departing from the scope of the inventive concept as defined by the appended claims.

Claims

1. A regulating disc replacement device, comprising: A disassembly tool is configured to separate the adjustment disc from the retainer; The conveyor section is configured as a conveyor regulating panel; as well as The container is configured to store the regulating tray. The disassembly device includes a disassembly body and a rotating part connected to the disassembly body. The rotating part includes a key that protrudes outward from the rotating part in a first horizontal direction. The rotating part is configured to cause the key to rotate about an axis extending in a first horizontal direction, and The key is rotated and has an increased vertical thickness when viewed in cross-section. A portion of the upper surface of the key pushes upward against the recessed surface, and a portion of the lower surface of the key pushes downward against the upper surface of the adjusting disk. The key causes the adjusting disk to retract from the retainer.

2. The adjusting disc replacement device according to claim 1, wherein, The key extends a specific length in the second horizontal direction.

3. The adjusting disc replacement device according to claim 2, wherein, The key includes a variable thickness segment with a thickness that decreases in the second horizontal direction.

4. The adjusting disc replacement device according to claim 3, wherein, The ratio between the thickest part of the variable thickness segment and the length of the bond ranges from 1:1 to 1:

20.

5. The adjusting disc replacement device according to any one of claims 1 to 4, wherein, The container includes multiple cantilever components. Two or more of the plurality of cantilever components are perpendicularly separated, and Each of the plurality of cantilever components includes a coupling magnet and at least one guide pin, the at least one guide pin being coupled to the lower surface of the corresponding cantilever component.

6. The adjusting disc replacement device according to any one of claims 1 to 4, wherein, The conveying unit includes a base plate, a pressing part on the base plate, and a conveying rotating part configured to rotate the base plate. The pressing part includes a pair of clamps that rotate on the base plate and are configured to fix the adjustment plate to the base plate.

7. A method for replacing an adjustment disc, comprising: Insert the key of the disassembly tool into the slot between the retainer and the old adjustment plate, and the old adjustment plate is attached to the lower surface of the retainer; as well as Rotate the key to press its upper surface against a portion of the lower surface of the retainer and press the lower surface of the key against a portion of the upper surface of the old adjustment disc, thereby separating the old adjustment disc from the retainer. The steps for rotating the key include: the key having an increased vertical thickness when viewed in cross-section; a portion of the upper surface of the key pushing upwards onto the recessed surface; and a portion of the lower surface of the key pushing downwards onto the upper surface of the adjusting disk.

8. The method for replacing the adjusting disc according to claim 7 further includes: Before rotating the key, move the conveyor to position the base plate below the retainer; as well as After the old adjustment disc separates from the retainer, the old adjustment disc falls to the bottom plate.

9. The method for replacing the adjusting disc according to claim 8 further includes: The old adjustment plate is inserted into a container containing multiple cantilever components using a conveyor. as well as The old adjustment disc is magnetically attached to the lower surface of one of the plurality of cantilever components to release the old adjustment disc from the transfer section.

10. The method for replacing the adjustment disc according to claim 9 further includes: The clamps of the conveyor are used to magnetically separate the new adjustment disc from another cantilever component among the plurality of cantilever components. The new adjustment disc is conveyed to the lower surface of the retainer using the transfer unit; and The new adjustment disc is magnetically attached to the lower surface of the retainer.

11. The method for replacing the adjustment disc according to any one of claims 7 to 10, wherein, The disassembly device includes a disassembly body and a rotating part connected to the disassembly body. The rotating part includes a key that protrudes outward from the rotating part in a first horizontal direction, and The rotating part is configured to rotate about an axis extending in a first horizontal direction.

12. The method for replacing the adjusting disc according to claim 11, wherein, The bond extends in the second horizontal direction, and The key includes a variable thickness segment with a thickness that decreases in the second horizontal direction.

13. A regulating disc replacement device, comprising: The disassembly device is configured to separate the adjusting disc from the retainer of the chemical mechanical polishing equipment. The disassembly device includes a disassembly body and a rotating part connected to the disassembly body. The rotating part includes a key that protrudes from the disassembly body in a first horizontal direction and extends in a second horizontal direction. The rotating body is configured to cause the key to rotate about an axis extending in a first horizontal direction, and The key is rotated and has an increased vertical thickness when viewed in cross-section. A portion of the upper surface of the key pushes upward against the recessed surface, and a portion of the lower surface of the key pushes downward against the upper surface of the adjusting disk. The key causes the adjusting disk to retract from the retainer.

14. The adjusting disc replacement device according to claim 13, wherein, The key includes a variable thickness segment with a thickness that decreases in the second horizontal direction.

15. The adjusting disc replacement device according to claim 13, further comprising: The conveying unit is configured as a conveying adjustment plate and includes a base plate, a pressing part on the base plate, and a conveying rotating part configured to rotate the base plate.

16. The adjusting disc replacement device according to claim 15, wherein, The pressing part includes a pair of clamps configured to rotate on the base plate, and The pressing part is configured to fix the adjustment plate to the base plate.

17. The adjustment disc replacement device according to any one of claims 13 to 16, further comprising: A container includes a plurality of cantilever members and is configured to use one of the plurality of cantilever members to store an adjustment disc, wherein two or more of the plurality of cantilever members are vertically separated.

18. The adjusting disc replacement device according to claim 17, wherein, Each of the plurality of cantilever components includes a coupling magnet and at least one guide pin, the at least one guide pin being coupled to the lower surface of the corresponding cantilever component.

19. The adjustment disc replacement device according to any one of claims 13 to 16, further comprising: The disassembly drive unit is configured to move the disassembler laterally and vertically.

20. The adjustment disc replacement device according to any one of claims 13 to 16, wherein, The rotating part also includes a rotating body that is coupled to the disassembly body, and the key protrudes outward from the rotating body in a first horizontal direction.

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