Bare chip gripping device and gripping method

Abstract

This invention relates to a bare die gripping device and method. The gripping device includes: a sleeve; a gripping assembly connected to the lower part of the sleeve, the gripping assembly including two opposing forceps arms, the upper outer sides of the two forceps arms being fixed to the inner wall of the sleeve by outer springs, the middle inner sides of the two forceps arms being connected by inner springs, the bottom ends of the two forceps arms extending out of the bottom end of the sleeve, and the bottom ends of the two forceps arms being detachably connected to gripping arms, the two gripping arms extending inward relative to each other to form a gripping space for gripping the bare die; and an opening / closing head, the upper part of which is vertically movably connected to the upper part of the sleeve, the lower part of which is formed into a cone that can be inserted between the two forceps arms, the width of the cone gradually increasing from bottom to top. This invention improves the accuracy of gripping bare dies, reduces the requirements for operators, and improves the yield and efficiency of sample loading.

Description

Technical Field

[0001] This invention relates to the field of chip testing auxiliary equipment, and in particular to a bare chip clamping device and clamping method. Background Technology

[0002] A bare die is a chip produced on a wafer fabrication plant, diced after testing, but not yet packaged. These bare dies cannot be directly used in actual circuits. They are highly susceptible to damage from external environmental factors such as temperature, impurities, and physical forces, leading to failure. Therefore, they must be encapsulated in a sealed space with corresponding pins exposed before they can be used as basic components. Before FIB (Film Injection Board) work, bare dies need to be handled. Because they are unpackaged, they are fragile and extremely vulnerable. Furthermore, their small size makes handling them with conventional tweezers difficult, as it's hard to control the force, easily damaging the surface metal traces or causing chipping and failure. Moreover, this requires highly skilled operators, specifically experienced engineers. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a bare chip gripping device and method, which improves the accuracy of gripping bare chips, reduces the requirements for operators, and increases the yield and efficiency of sample loading.

[0004] This invention is achieved through the following solution: a bare chip gripping device, comprising:

[0005] Sleeve;

[0006] A clamping assembly connected to the lower part of the sleeve includes two opposing tweezer arms. The upper outer sides of the two tweezer arms are respectively fixed to the inner wall of the sleeve by outer springs, and the middle inner sides of the two tweezer arms are connected by inner springs. The bottom ends of the two tweezer arms extend out of the bottom end of the sleeve, and the bottom ends of the two tweezer arms are respectively detachably connected to clamping arms. The two clamping arms extend inward relative to each other and form a clamping space for clamping bare chips.

[0007] The opening and closing head has its upper part movably connected to the upper part of the sleeve along a vertical direction, and its lower part is formed into a cone that can be inserted between the two tweezer arms. The width of the cone gradually increases from bottom to top.

[0008] A further improvement of the bare chip gripping device of the present invention is that each of the two tweezer arms includes an upper tweezer arm and a lower tweezer arm fixed to the bottom end of the upper tweezer arm. The two upper tweezer arms are arranged in parallel and opposite to each other, and the two lower tweezer arms are arranged in a relatively outward tilt. The two outer springs are connected to the opposite outer sides of the two upper tweezer arms, and the inner spring is connected between the upper parts of the two lower tweezer arms. The bottom ends of the two lower tweezer arms extend out of the bottom end of the sleeve and are detachably connected to the two gripping arms respectively.

[0009] A further improvement of the bare chip gripping device of the present invention is that each of the two gripping arms is provided with an anti-static plastic chuck at one end opposite to the other.

[0010] A further improvement of the bare chip gripping device of the present invention is that the gripping arm includes a connecting part and a gripping part connected by an adjusting screw, wherein the end of the connecting part away from the gripping part is the first end of the gripping arm, and the end of the gripping part away from the connecting part is the second end of the gripping arm.

[0011] A further improvement of the bare chip gripping device of the present invention is that the upper part of the sleeve is provided with an internal thread, and the upper part of the opening and closing head is provided with an external thread that is adapted to the internal thread.

[0012] A further improvement of the bare chip gripping device of the present invention is that a handle for screwing the opening and closing head is fixed at the top end of the opening and closing head.

[0013] A further improvement of the bare chip gripping device of the present invention is that the gripping arm and the corresponding tweezer arm are connected by bolts or buckles.

[0014] The present invention also provides a method for gripping a bare chip, comprising the steps of:

[0015] Move the bare chip gripping device described above above the bare chip to be gripped, and move the opening and closing head downward so that the conical part is inserted between the two tweezer arms and abuts against the two tweezer arms and moves outward relative to each other, thereby driving the two gripping arms to move outward relative to each other, so that the gripping space is larger than the size of the bare chip.

[0016] Continue moving the bare chip gripping device so that the bare chip is located within the gripping space;

[0017] Move the opening and closing head upwards to disengage the conical part from between the two tweezer arms. Under the elastic action of the inner spring and the two outer springs, the two tweezer arms move inwards relative to each other, thereby driving the two clamping arms to move inwards relative to each other, so that the two clamping arms clamp the bare chip.

[0018] This invention utilizes a gripping device to grip bare chips, eliminating the uncertainties associated with conventional gripping with tweezers, improving the accuracy of gripping bare chips, reducing the requirements for operators, and increasing the yield and efficiency of sample loading. Attached Figure Description

[0019] Figure 1 A schematic diagram of the overall structure of the bare chip gripping device of the present invention is shown. Detailed Implementation

[0020] Traditional methods of gripping bare chips suffer from problems such as difficulty in controlling accuracy, easy damage to the bare chips, and high skill requirements for operators. This invention provides a bare chip gripping device and method that improves the accuracy of gripping bare chips, reduces the skill requirements for operators, and increases sample loading yield and efficiency.

[0021] The following description, in conjunction with specific embodiments and accompanying drawings, further illustrates a bare chip gripping device and method.

[0022] See Figure 1 As shown, a bare chip gripping device includes: a sleeve 1; a gripping assembly connected to the lower part of the sleeve 1, the gripping assembly including two opposing tweezer arms, the upper outer sides of the two tweezer arms being fixed to the inner wall of the sleeve 1 by outer springs 3, the middle inner sides of the two tweezer arms being connected by inner springs 4, the bottom ends of the two tweezer arms extending out of the bottom end of the sleeve 1, and the bottom ends of the two tweezer arms being detachably connected to gripping arms, the two gripping arms extending inward relative to each other to form a gripping space for gripping the bare chip; an opening and closing head, the upper part of the opening and closing head being vertically movably connected to the upper part of the sleeve, the lower part of the opening and closing head being formed into a cone 62 that can be inserted between the two tweezer arms, the width of the cone 62 gradually increasing from bottom to top.

[0023] Specifically, the clamping arm and the corresponding tweezer arm are detachably connected via bolts or snap-fit ​​connections. The upper part of the sleeve 1 has an internal thread 11. The opening / closing head includes an upper cylinder and a lower cone (i.e., cone 62) integrally formed with the cylinder. The cylinder has an external thread 61 that matches the internal thread 11. The outer diameter of the upper end of the cone 62 is smaller than the outer diameter of the cylinder to prevent the cone 62 from contacting the internal thread 11. Furthermore, the dimensions and positions of the inner spring 4 and the two outer springs 3 must ensure that when the inner spring 4 is in its reset state (i.e., no spring accumulation), the two outer springs 3 are also in their reset state, and the distance between the two tweezer arms is between the upper and lower outer diameters of the cone 62. Preferably, the top of the opening and closing head is fixed with a handle 63 for screwing the opening and closing head. The handle 63 is a cylinder, and the outer diameter of the cylinder is smaller than the inner diameter of the sleeve 1.

[0024] In a preferred embodiment, each of the two tweezer arms includes an upper tweezer arm 21 and a lower tweezer arm 22 fixed to the bottom end of the upper tweezer arm 21 by a connector 23. The two upper tweezer arms 21 are arranged in parallel opposite directions, and the two lower tweezer arms 22 are arranged inclined outward relative to each other. The two outer springs 3 are connected to the opposite outer sides of the two upper tweezer arms 21, and the inner spring 4 is connected between the upper parts of the two lower tweezer arms 22. The bottom ends of the two lower tweezer arms 22 extend out of the bottom end of the sleeve 1 and are detachably connected to the two clamping arms respectively.

[0025] Specifically, the connector 23 is preferably a bolt to facilitate adjustment of the tilt angle of the lower tweezer arm 22, making it more adaptable to different gripping situations. In this embodiment, the distance between the two upper tweezer arms 21 is between the outer diameter of the upper end and the outer diameter of the lower end of the cone 62. By setting the two lower tweezer arms 22 to be tilted outward relative to each other, the two gripping arms can better grip and place the bare chip as the two tweezer arms open and close relative to each other.

[0026] In a preferred embodiment, each of the two clamping arms has an anti-static plastic chuck at one end facing the other. The anti-static plastic chuck contacts the bare chip, preventing static electricity from being generated and damaging the chip during clamping.

[0027] In a preferred embodiment, the clamping arm includes a connecting portion 51 and a clamping portion 52 connected by an adjusting screw 53. The end of the connecting portion 51 away from the clamping portion 52 is the first end of the clamping arm, and the end of the clamping portion 52 away from the connecting portion 51 is the second end of the clamping arm. That is, the connecting portion 51 is detachably connected to the bottom end of the corresponding lower tweezer arm 22, and the inner ends of the clamping portions 52 are provided with anti-static plastic clips for clamping the bare chip. With this configuration, the angle of the two clamping portions 52 relative to the connecting portion 51 can be adjusted using the adjusting screw 53 according to the placement position of the bare chip to be clamped, facilitating better clamping operations. Furthermore, for a tweezer arm structure with an upper tweezer arm 21 and a lower tweezer arm 22, the two connecting portions 51 are also inclined outwards at the same angle as the two lower tweezer arms 22. The two clamping portions 52 are adjusted to a horizontal position using the adjusting screw 53 as the initial state.

[0028] A method for gripping a bare chip includes the following steps:

[0029] 1. Move the bare chip gripping device as described above to above the bare chip to be gripped, and turn the handle 63 clockwise or counterclockwise to make the cone 62 move down and insert between the two upper tweezer arms 21. As the cone 62 moves down, it abuts against the two upper tweezer arms 21 and drives the two lower tweezer arms 22 to move outward relative to each other, thereby driving the two gripping arms to move outward relative to each other, so that the gripping space is larger than the size of the bare chip.

[0030] 2. Continue to move the bare chip gripping device so that the bare chip is located within the gripping space.

[0031] 3. Turn the handle 63 counterclockwise or clockwise to move the cone 62 upward and gradually disengage it from between the two upper tweezer arms 21. As the cone 62 moves upward, the two upper tweezer arms 21 and the two lower tweezer arms 22 move inward relative to each other under the combined action of the inner spring 4, the two outer springs 3 and the connector 23, thereby driving the two clamping arms to move inward relative to each other to reduce the size of the clamping space until the two clamping arms clamp the bare chip.

[0032] This invention utilizes a gripping device to grip bare chips, eliminating the uncertainties associated with conventional gripping with tweezers, improving the accuracy of gripping bare chips, reducing the requirements for operators, and increasing the yield and efficiency of sample loading.

[0033] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A bare chip gripping device characterized by comprising: The device comprises: a sleeve; a clamping assembly connected to the lower part of the sleeve, the clamping assembly comprising two oppositely arranged tweezers arms, the opposite outer sides of the upper parts of the two tweezers arms being respectively fixed to the inner wall of the sleeve by outer springs, the opposite inner sides of the middle parts of the two tweezers arms being connected by an inner spring, the bottom ends of the two tweezers arms extending out of the bottom end of the sleeve, and the bottom ends of the two tweezers arms being respectively detachably connected with clamping arms, the two clamping arms oppositely extending inward and forming a clamping space for clamping a bare chip; an opening and closing head, the upper part of the opening and closing head being vertically movably connected to the upper part of the sleeve, the lower part of the opening and closing head being formed as a tapered body which can be inserted between the two tweezers arms, the width of the tapered body gradually increasing from bottom to top.

2. The bare die gripping device of claim 1, wherein The two tweezers arms each comprise an upper tweezers arm and a lower tweezers arm fixed to the bottom end of the upper tweezers arm, the two upper tweezers arms being arranged in parallel, the two lower tweezers arms being oppositely arranged outwardly inclined, the two outer springs being connected to the opposite outer sides of the two upper tweezers arms, and the inner spring being connected between the upper parts of the two lower tweezers arms.

3. The bare die gripping device of claim 1, wherein The opposite ends of the two clamping arms are each provided with an anti-static plastic chuck.

4. The bare die gripping device of claim 1, wherein The clamping arm comprises a connecting part and a clamping part connected by an adjusting screw, the end of the connecting part away from the clamping part being the first end of the clamping arm, and the end of the clamping part away from the connecting part being the second end of the clamping arm.

5. The bare die gripping device of claim 1, wherein The upper part of the sleeve is provided with an inner thread, and the upper part of the opening and closing head is provided with an outer thread matched with the inner thread.

6. The bare die gripping device of claim 5, wherein The top end of the opening and closing head is fixed with a handle for screwing the opening and closing head.

7. The bare die gripping device of claim 1, wherein The clamping arm and the corresponding tweezers arm are connected by a bolt or a buckle.

8. A bare die pick-up method, characterized by, The device comprises the following steps: moving the bare chip clamping device to above the bare chip to be clamped, moving the opening and closing head downward, inserting the tapered body between the two tweezers arms and abutting against the two tweezers arms to move the two tweezers arms outward, and then driving the two clamping arms to move outward, so that the clamping space is larger than the size of the bare chip; continuing to move the bare chip clamping device, so that the bare chip is located in the clamping space; moving the opening and closing head upward, so that the tapered body is separated from between the two tweezers arms, the two tweezers arms move inward under the elastic action of the inner spring and the two outer springs, and then driving the two clamping arms to move inward, so that the two clamping arms clamp the bare chip.

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