Ejector pin alignment device

Abstract

The present application provides a kind of ejector pin calibration device, including ejector pin seat and calibrator;Ejector pin seat includes ejector pin seat base body and is set on the ejector pin clamp of ejector pin seat base body, ejector pin clamp is equipped with the ejector pin cavity for placing ejector pin, and ejector pin cavity is provided with ejector pin position adjusting structure;Calibrator includes calibrator base body, the calibration plate of being set above calibrator base body and the levelness adjusting piece of being set between calibrator base body and calibration plate;Calibrator base body is hollow structure, its internal space is used to accommodate ejector pin seat, and first opening is set on calibrator base body, when calibrator base body is set on ejector pin seat, calibration plate bottom surface and ejector pin cavity are separated by a distance, and first opening at least exposes part of ejector pin clamp.Calibrator can be set on ejector pin seat and carry out horizontal calibration in whole, and ejector pin clamp is locked during calibration, so as to realize machine calibration, reduce the installation error of ejector pin and the assembly error and levelness error of machine itself, and the precision of ejector pin installation is higher.

Description

Technical Field

[0001] This invention relates to the field of semiconductor packaging equipment, and more specifically to a pin calibration device. Background Technology

[0002] In the current wafer loading process in packaging plants, the separation of the chip from the dicing film is a process involving the ejector pins lifting the chip and the suction nozzles picking it up. The ejector pins mainly serve to separate the chip from the dicing film. In the field of semiconductor packaging technology, ejector pins are typically installed in single, double, or quadruple configurations. Ultra-thin and ultra-large chips often use a quadruple ejector pin configuration to ensure uniform force distribution on the chip and reduce the risk of cracking.

[0003] When installing multiple ejector pins, it is necessary to ensure that the tips of the multiple ejector pins are coplanar. In the existing method, after removing the ejector pin clamp, the ejector pin is installed inside it, and independent calibration is performed externally by a calibration device. After calibration, the ejector pin clamp is reinstalled. However, the above calibration steps do not take into account the horizontal error of the machine tool itself and the installation error of the ejector pin clamp head. It often requires multiple disassembly and calibration, and too much time is wasted on meaningless external calibration work, which significantly affects the installation efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a pin calibration device.

[0005] This invention provides a pin calibration device, including a pin seat and a calibrator;

[0006] The ejector pin holder includes an ejector pin holder base and an ejector pin clamp disposed on the ejector pin holder base. The ejector pin clamp has an ejector pin cavity for placing the ejector pin, and the ejector pin cavity is provided with an ejector pin position adjustment structure. The calibrator includes a calibrator base, a calibration plate disposed above the calibrator base, and a leveling adjustment component disposed between the calibrator base and the calibration plate; The calibrator base is a hollow structure, and its internal space is used to accommodate the ejector pin seat. The calibrator base is provided with a first opening. When the calibrator base is fitted onto the ejector pin seat, there is a distance between the bottom surface of the calibration plate and the ejector pin cavity. Furthermore, the first opening exposes at least part of the ejector pin clamp.

[0007] As a further improvement of the present invention, the calibrator further includes a level detection device disposed at the calibration plate.

[0008] As a further improvement of the present invention, the level detection device is a level, which is positioned above the calibration plate.

[0009] As a further improvement of the present invention, the calibrator further includes a sliding sleeve, which is sleeved on the calibrator base and slides up and down along the surface of the calibrator base. The calibration plate is connected to the sliding sleeve through a leveling adjustment member.

[0010] As a further improvement of the present invention, the calibrator also includes a sliding sleeve driving device, which controls the sliding sleeve to move up and down along the surface of the calibrator base.

[0011] As a further improvement of the present invention, the sliding sleeve includes an upper sliding sleeve and a lower sliding sleeve, which are respectively disposed on the upper part and the lower part of the calibrator base. The sliding sleeve driving device controls the lower sliding sleeve to move up and down along the surface of the calibrator base, and the lower sliding sleeve drives the upper sliding sleeve to move up and down.

[0012] As a further improvement of the present invention, the sliding sleeve driving device is a sliding sleeve driving nut, which is disposed below the sliding sleeve. The bottom of the calibrator is provided with a thread that matches the sliding sleeve driving nut. The sliding sleeve driving nut rotates along the thread while driving the sliding sleeve to move up and down.

[0013] As a further improvement of the present invention, a limiting element is also provided between the sliding sleeve and the sliding sleeve driving nut.

[0014] As a further improvement of the present invention, the calibration plate is connected to the top of the upper sliding sleeve via the leveling adjustment member.

[0015] As a further improvement of the present invention, the level adjustment component is an adjustment screw, the upper sliding sleeve is provided with an internal thread that matches the adjustment screw, and a support spring is sleeved on the outside of the adjustment screw, with the upper and lower ends of the support spring abutting against the screw head of the adjustment screw and the top surface of the upper sliding sleeve, respectively.

[0016] As a further improvement of the present invention, the upper sliding sleeve and the lower sliding sleeve are connected by an elastic connector.

[0017] As a further improvement of the present invention, the upper sliding sleeve and the lower sliding sleeve are respectively provided with elastic connecting member adjustment devices. The upper and lower ends of the elastic connecting member are respectively connected to the elastic connecting member adjustment devices at the upper sliding sleeve and the lower sliding sleeve. The elastic connecting member adjustment devices are configured to adjust the elastic force of the elastic connecting member.

[0018] As a further improvement of the present invention, the elastic connector is a sliding sleeve connecting spring, the outer walls of the upper sliding sleeve and the lower sliding sleeve are provided with threads, the elastic connector adjustment device is an upper adjusting nut and a lower adjusting nut respectively sleeved on the upper sliding sleeve and the lower sliding sleeve by threads, and the sliding sleeve connecting spring is respectively connected to the upper adjusting nut and the lower adjusting nut.

[0019] As a further improvement of the present invention, the upper sliding sleeve is provided with a second opening, the second opening being in a position corresponding to the first opening. When the calibrator base is sleeved on the ejector pin seat, the second opening exposes at least a portion of the ejector pin clamp.

[0020] As a further improvement of the present invention, a magnet is provided on the bottom end face of the calibrator base. When the calibrator base is sleeved on the ejector pin seat, the magnet will attract and fix the calibrator to the ejector pin seat.

[0021] As a further improvement of the present invention, the lower surface of the calibration plate is made of high manganese steel.

[0022] The beneficial effects of the present invention are: the ejector calibration device provided by the present invention can be fully fitted on the ejector seat for horizontal calibration, and the ejector clamp is locked during calibration, thereby realizing on-machine calibration, reducing the installation error of the ejector and the assembly error and levelness error of the machine itself, and the ejector installation accuracy is higher. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of an ejector pin seat according to one embodiment of the present invention.

[0024] Figure 2 This is a front view of the calibrator in one embodiment of the present invention (the calibrator is fitted onto the ejector pin seat).

[0025] Figure 3 yes Figure 2 Sectional view at point AA.

[0026] Figure 4 This is a schematic diagram of a pin calibration device according to an embodiment of the present invention (calibration plate not shown). Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0029] For ease of explanation, this document uses terms indicating relative spatial position, such as "above," "below," "behind," and "front," to describe the relationship of one unit or feature shown in the accompanying drawings relative to another unit or feature. Terms indicating relative spatial position can include different orientations of the device during use or operation besides those shown in the figures. For example, if the device in the figures is flipped, a unit described as being "below" or "above" other units or features will be located "below" or "above" other units or features. Therefore, the exemplary term "below" can encompass both "below" and "above" spatial orientations.

[0030] like Figures 1 to 4 As shown, the present invention provides a calibration device for a pin 3, which includes a pin seat 1 and a calibrator 2.

[0031] like Figure 1 and Figure 3 As shown, the ejector seat 1 includes an ejector seat base 11 and an ejector clamp 12 disposed on the ejector seat base 11. The ejector clamp 12 is provided with an ejector cavity 121 for placing the ejector 3. An ejector position adjustment structure 122 is provided in the ejector cavity 121. The ejector position adjustment structure 122 can be an elastic adjustment element disposed at the bottom of the ejector cavity 121, such as a spring or a rubber pad, which controls the up and down movement of the ejector 3 through the elastic adjustment element, or a hydraulic piston disposed at the bottom of the ejector cavity 121, which controls the up and down movement of the ejector 3 through the piston.

[0032] The ejector clamp 12 can loosen or clamp the ejector 3. When the ejector clamp 12 loosens the ejector 3, the calibrator 2 performs horizontal calibration on the ejector 3 installed in the ejector cavity 121. After calibration, the ejector clamp 12 is clamped to fix the ejector 3.

[0033] like Figures 2 to 4 As shown, the calibrator 2 includes a calibrator base 21, a calibration plate 22 disposed above the calibrator base 21, and a level adjustment member 23 disposed between the calibrator base 21 and the calibration plate 22.

[0034] The calibrator base 21 is a hollow structure, and its internal space is used to accommodate the ejector pin seat 1. The calibrator base 21 is provided with a first opening 211. When the calibrator base 21 is fitted onto the ejector pin seat 1, there is a distance between the bottom surface of the calibration plate 22 and the ejector pin cavity 121, and the first opening 211 exposes at least part of the ejector pin clamp 12.

[0035] When calibrating the ejector pin 3, the calibrator 2 is sleeved on the ejector pin seat 1, the lower surface of the calibration plate 22 abuts against the array of ejector pins 3, the level of the calibration plate 22 is adjusted by the level adjustment component 23, the level of the calibration plate 22 is detected by the external or built-in level detection device, after the calibration plate 22 is adjusted to be level, the array of ejector pins 3 abutting against its lower surface is adjusted to be level, and the ejector pin clamp 12 located in the calibrator 2 is locked and fixed through the first opening 211 to fix the ejector pin 3.

[0036] The calibrator 2 also includes a level detection device located on the calibration plate 22, which further facilitates the level calibration operation.

[0037] Specifically, in this embodiment, the level detection device is a level 24 installed above the calibration plate 22. In other embodiments, a level sensor or other level detection device may also be installed, as long as it can detect the levelness of the calibration plate 22.

[0038] Specifically, since the ejector seat 1 is generally in the form of a multi-segment cylindrical structure, the calibrator base 21 is correspondingly a hollow cylindrical shape, and the calibration plate 22 is a circular plate. In this embodiment, the level adjustment component 23 is three adjusting screws evenly distributed around the calibration plate 22. In other embodiments, multiple evenly distributed adjusting screws can also be provided to improve the level adjustment accuracy of the calibration plate 22.

[0039] The calibrator 2 also includes a sliding sleeve 25, which is fitted onto the calibrator base 21 and slides up and down along the surface of the calibrator base 21. The calibration plate 22 is connected to the sliding sleeve 25 via a leveling adjustment component 23. The calibrator 2 also includes a sliding sleeve drive device 26, which controls the sliding sleeve 25 to move up and down along the surface of the calibrator base 21. Thus, after the calibrator base 21 is fitted onto the ejector pin base 11, the height of the calibration plate 22 can be adjusted directly by adjusting the sliding sleeve 25, further improving the ease of operation of the calibrator 2 and making it suitable for more application scenarios.

[0040] Furthermore, the sliding sleeve 25 includes an upper sliding sleeve 251 and a lower sliding sleeve 252, which are respectively located on the upper and lower parts of the calibrator 2 base. The sliding sleeve drive device 26 controls the lower sliding sleeve 252 to move up and down along the surface of the calibrator base 21, and the lower sliding sleeve 252 drives the upper sliding sleeve 251 to move up and down.

[0041] Specifically, the sliding sleeve drive device 26 is a sliding sleeve drive nut 26a, which is located below the sliding sleeve 252. The bottom of the calibrator 2 is provided with a thread that matches the sliding sleeve drive nut 26a. While the sliding sleeve drive nut 26a rotates along the thread, it drives the sliding sleeve 252 to move up and down.

[0042] In some embodiments of the present invention, a limiting member 27 may be provided between the sliding sleeve 252 and the sliding sleeve drive nut 26a as needed. The limiting member 27 is a structural component such as a snap ring arranged around the outer wall of the sliding platform. The limiting member 27 can limit the vertical displacement space of the sliding sleeve drive nut 26a.

[0043] The calibration plate 22 is connected to the top of the upper sliding sleeve 251 via the level adjustment component 23.

[0044] Furthermore, the upper sliding sleeve 251 and the lower sliding sleeve 252 are connected by an elastic connector 253. During use, the lower sliding sleeve 252 moves downward with the sliding sleeve drive device 26, and further drives the upper sliding sleeve 251 downward until the calibration plate 22 set on the top surface of the upper sliding sleeve 251 abuts against the ejector pin 3 array. At this time, when the lower sliding sleeve 252 continues to move downward, the upper sliding sleeve 251 is fixed in position and no longer moves due to the support of the ejector pin 3 array. The lower sliding sleeve 252 separates from the upper sliding sleeve 251, and the elastic connector 253 applies a downward pulling force to the upper sliding sleeve 251 to ensure that the calibration plate 22 can apply sufficient pressure to the ejector pin 3 array to perform horizontal calibration of the ejector pin 3 array.

[0045] Specifically, in this embodiment, the elastic connector 253 consists of two springs respectively disposed on opposite sides of the upper sliding sleeve 251 and the lower sliding sleeve 252. In other embodiments, multiple springs may be evenly arranged to make the tension applied more evenly.

[0046] Specifically, in this embodiment, the leveling adjustment component 23 is an adjusting screw. The upper sliding sleeve 251 has an internal thread that matches the adjusting screw. A support spring 231 is sleeved on the outside of the adjusting screw. The upper and lower ends of the support spring 231 abut against the screw head of the adjusting screw and the top surface of the upper sliding sleeve 251, respectively. By setting the support spring 231, the calibration plate 22 can be elastically supported, and the ejector pin 3 can be protected, preventing the ejector pin 3 from being excessively rigidly pushed by the calibration surface, which would damage the ejector pin 3. Furthermore, the upper sliding sleeve 251 and the lower sliding sleeve 252 are respectively provided with elastic connector adjustment devices 254. The upper and lower ends of the elastic connector 253 are respectively connected to the elastic connector adjustment devices 254 at the upper sliding sleeve 251 and the lower sliding sleeve 252. The elastic connector adjustment devices 254 are configured to adjust the elastic force of the elastic connector 253 so as to adjust the force applied by the elastic connector 253 to the upper sliding sleeve 251 according to different needs. For example, the maximum force applied to the upper sliding sleeve 251 is adjusted according to the different sizes of the ejector seat 1, so as to ensure that the ejector 3 can be fully calibrated while avoiding excessive force on the ejector 3, which would cause wear on both.

[0047] Specifically, in this embodiment, the elastic connector 253 is a spring, the outer walls of the upper sliding sleeve 251 and the lower sliding sleeve 252 are provided with threads, the elastic connector adjustment device 254 is an upper adjusting nut 2541 and a lower adjusting nut 2542 respectively sleeved on the upper sliding sleeve 251 and the lower sliding sleeve 252 by threads, and the sliding sleeve connecting spring is respectively connected to the upper adjusting nut and the lower adjusting nut.

[0048] The upper sliding sleeve 251 is provided with a second opening 2511, which corresponds to the position of the first opening 211. When the calibrator base 21 is fitted onto the ejector seat 1, the second opening 2511 exposes at least part of the ejector clamp 12, thereby facilitating the locking operation of the ejector clamp 12 from the second opening 2511 and the first opening 211.

[0049] In some embodiments of the present invention, a magnet 28 is also provided on the bottom end face of the calibrator base 21. When the calibrator base 21 is sleeved on the ejector pin seat 1, the magnet 28 attracts and fixes the calibrator 2 to the ejector pin seat 1, thereby increasing the connection strength between the calibrator base 21 and the ejector pin seat base 11, which is more conducive to the elastic connector 253 playing its role.

[0050] In some embodiments of the present invention, the lower surface of the calibration plate 22 is made of high manganese steel. Compared with the traditional external aluminum calibration plate 22, high manganese steel has lower surface roughness, higher hardness, and wear resistance, resulting in a longer service life in long-term use.

[0051] Specifically, the material of the lower surface of the calibration plate 22 is high manganese steel ZGMn13.

[0052] The following describes a complete calibration process for ejector pin 3: S1: Loosen the ejector pin clamp 12 and replace the required multiple ejector pins 3 in the ejector pin cavity 121.

[0053] S2: The calibrator 2 is placed on the ejector pin seat 1, and the magnet 28 located at the bottom of the calibrator base 21 attracts and fixes the calibrator 2 to the ejector pin seat 1.

[0054] S3: Rotate the sliding sleeve drive nut 26a downwards, which will drive the upper sliding sleeve 251 and the lower sliding sleeve 252 downwards until the upper sliding sleeve 251 and the lower sliding sleeve 252 separate from each other. The upper sliding sleeve 251 loses the support of the lower sliding sleeve 252, and the calibration plate 22 connected to its top abuts against the pin 3 array.

[0055] S4: Continue to rotate the sliding sleeve drive nut 26a to the bottom of the calibrator 2 base. The elastic connector 253 applies the maximum tension to the upper sliding sleeve 251. The calibration plate 22 applies the force to the pin 3 array to ensure that multiple pins 3 are coplanar.

[0056] S5: Adjust the level adjustment component 23 until the level detection device displays the calibration plate 22 as level.

[0057] S6: The pin clamp 12 located in the calibrator 2 is locked through the second opening 2511 and the first opening 211.

[0058] S7: Rotate the sliding sleeve drive nut 26a upward until the sliding sleeve 252 pushes the upper sliding sleeve 251 upward. At this time, the lower surface of the calibration plate 22 separates from the ejector pin 3.

[0059] S8: Remove calibrator 2 from pin seat 1.

[0060] In summary, the ejector calibration device provided by this invention allows the calibrator to be fully mounted on the ejector seat for horizontal calibration, and locks the ejector clamp during calibration, thereby achieving on-machine calibration. This reduces the installation error of the ejector, as well as the assembly error and levelness error of the machine itself, resulting in higher accuracy of ejector installation.

[0061] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0062] The detailed descriptions listed above are merely specific descriptions of feasible implementations of the present invention and are not intended to limit the scope of protection of the present invention. All equivalent implementations or modifications made without departing from the spirit of the present invention should be included within the scope of protection of the present invention.

Claims

1. A pin calibration device, characterized in that, Includes pin holder and calibrator; The ejector pin holder includes an ejector pin holder base and an ejector pin clamp disposed on the ejector pin holder base. The ejector pin clamp has an ejector pin cavity for placing the ejector pin, and the ejector pin cavity is provided with an ejector pin position adjustment structure. The calibrator includes a calibrator base, a calibration plate disposed above the calibrator base, and a leveling adjustment component disposed between the calibrator base and the calibration plate; The calibrator base is a hollow structure, and its internal space is used to accommodate the ejector pin seat. The calibrator base is provided with a first opening. When the calibrator base is sleeved on the ejector pin seat, there is a distance between the bottom surface of the calibration plate and the ejector pin cavity. Furthermore, the first opening exposes at least part of the ejector pin clamp. The calibrator further includes a sliding sleeve and a sliding sleeve driving device; the sliding sleeve is sleeved on the calibrator base and includes an upper sliding sleeve and a lower sliding sleeve; the upper sliding sleeve and the lower sliding sleeve are respectively disposed on the upper part and the lower part of the calibrator base, and the upper sliding sleeve and the lower sliding sleeve are connected by an elastic connector; the sliding sleeve driving device controls the lower sliding sleeve to move up and down along the surface of the calibrator base, and the lower sliding sleeve drives the upper sliding sleeve to move up and down; the calibration plate is connected to the top of the upper sliding sleeve through the level adjustment device.

2. The pin calibration device according to claim 1, characterized in that, The calibrator also includes a level detection device disposed at the calibration plate.

3. The pin calibration device according to claim 2, characterized in that, The level detection device is a level, which is positioned above the calibration plate.

4. The pin calibration device according to claim 1, characterized in that, The sliding sleeve driving device is a sliding sleeve driving nut, which is located below the sliding sleeve. The bottom of the calibrator is provided with a thread that matches the sliding sleeve driving nut. The sliding sleeve driving nut rotates along the thread while driving the sliding sleeve to move up and down.

5. The pin calibration device according to claim 4, characterized in that, A limiting element is also provided between the sliding sleeve and the sliding sleeve drive nut.

6. The ejector pin calibration device according to claim 4, characterized in that, The leveling adjustment component is an adjusting screw. The upper sliding sleeve has an internal thread that matches the adjusting screw. A support spring is sleeved on the outside of the adjusting screw. The upper and lower ends of the support spring abut against the screw head of the adjusting screw and the top surface of the upper sliding sleeve, respectively.

7. The ejector pin calibration device according to claim 4, characterized in that, The upper sliding sleeve and the lower sliding sleeve are respectively provided with elastic connector adjustment devices. The upper and lower ends of the elastic connector are respectively connected to the elastic connector adjustment devices at the upper sliding sleeve and the lower sliding sleeve. The elastic connector adjustment devices are configured to adjust the elastic force of the elastic connector.

8. The ejector pin calibration device according to claim 7, characterized in that, The elastic connector is a sliding sleeve connecting spring. The outer walls of the upper sliding sleeve and the lower sliding sleeve are provided with threads. The elastic connector adjustment device consists of an upper adjusting nut and a lower adjusting nut respectively threaded onto the upper sliding sleeve and the lower sliding sleeve. The sliding sleeve connecting spring is connected to the upper adjusting nut and the lower adjusting nut respectively.

9. The pin calibration device according to claim 4, characterized in that, The upper sliding sleeve is provided with a second opening, which corresponds to the position of the first opening. When the calibrator base is sleeved on the ejector pin seat, the second opening exposes at least part of the ejector pin clamp.

10. The pin calibration device according to claim 1, characterized in that, A magnet is provided on the bottom surface of the calibrator base. When the calibrator base is fitted onto the ejector pin seat, the magnet attracts and fixes the calibrator to the ejector pin seat.

11. The pin calibration device according to claim 1, characterized in that, The lower surface of the calibration plate is made of high manganese steel.

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