Laser Etching of Perovskite Detector Array with Metal Electrode Protective Layer and Fabrication Method

Abstract

This invention discloses a laser-etched perovskite detector array with a metal electrode protective layer and its fabrication method, relating to the field of semiconductor device technology. The array includes: a substrate; metal electrodes located on one side of the substrate and arranged in an array; metal traces located on one side of the substrate, in the same layer as the metal electrodes, and electrically connected to the metal electrodes via the metal traces; a protective layer located on the side of the metal electrodes and metal traces facing away from the substrate; the protective layer protects the metal electrodes and metal traces during laser etching; and a light-absorbing layer located on the side of the protective layer facing away from the substrate. This application enables protection of the metal electrodes and metal traces during laser etching, broadens the process window of the laser etching array, and improves the detection accuracy of the photodetector array.

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