Thermoelectric element, heat conducting device, semiconductor manufacturing device, and control method for thermoelectric element

Abstract

A thermal element has a container including a first wall portion and a second wall portion opposite the first wall portion, an ionic liquid housed in the container, a first electrode provided on an outer surface of the first wall portion, and a movable electrode provided in the ionic liquid in a movable manner.

Description

Technical Field

[0001] This invention relates to thermal effect elements, heat conduction devices, semiconductor manufacturing apparatus, and control methods for thermal effect elements. Background Technology

[0002] As a cooling device, a thermal effect element using a strong dielectric material has been proposed (Non-Patent Document 1).

[0003] <Prior art documents>

[0004] <Non-Patent Literature>

[0005] Non-patent literature 1: Ma et al., Science 357, 1130-1134 (2017) Summary of the Invention

[0006] <Problem to be solved by this invention>

[0007] This invention provides a thermal effect element, a heat conduction device, a semiconductor manufacturing apparatus, and a control method for the thermal effect element that can improve the efficiency of heat conduction.

[0008] <Methods for solving problems>

[0009] One aspect of the present invention provides a thermal effect element comprising: a container including a first wall; an ionic liquid contained within the container; a first electrode disposed on the outer surface of the first wall; and a movable electrode disposed in the ionic liquid in a movable manner.

[0010] <The Effects of the Invention>

[0011] According to the present invention, the efficiency of heat conduction can be improved. Attached Figure Description

[0012] Figure 1 This is a schematic diagram showing the thermal effect element of the first embodiment.

[0013] Figure 2 This is a cross-sectional view showing the movable electrode.

[0014] Figure 3 This is a diagram illustrating the thermodynamic cycle of an ionic liquid.

[0015] Figure 4 This is a diagram (Figure 1) showing the operation of the heat-effect element during cooling in the first embodiment.

[0016] Figure 5 This is a diagram (Figure 2) showing the operation of the heat-effect element during cooling in the first embodiment.

[0017] Figure 6This is a diagram (3) showing the operation of the heat-effect element during cooling in the first embodiment.

[0018] Figure 7 This is a diagram (4) showing the operation of the heat-effect element during cooling in the first embodiment.

[0019] Figure 8 This is a diagram (5) showing the operation of the heat-effect element during cooling in the first embodiment.

[0020] Figure 9 This is a diagram (6) showing the operation of the heat-effect element during cooling in the first embodiment.

[0021] Figure 10 This is a diagram (7) showing the operation of the heat-effect element during cooling in the first embodiment.

[0022] Figure 11 This is a diagram (Figure 1) showing the operation of the heat-effect element during temperature regulation in the first embodiment.

[0023] Figure 12 This is a diagram (Figure 2) showing the operation of the heat-effect element during temperature regulation in the first embodiment.

[0024] Figure 13 This is a diagram (Figure 1) showing the operation of the heating element in the second embodiment during heating.

[0025] Figure 14 This is a diagram (Figure 2) showing the operation of the heating element in the second embodiment during heating.

[0026] Figure 15 This is a diagram (3) showing the operation of the heating element in the second embodiment during heating.

[0027] Figure 16 This is a diagram (4) showing the operation of the heating element in the second embodiment during heating.

[0028] Figure 17 This is a diagram (5) showing the operation of the heating element in the second embodiment during heating.

[0029] Figure 18 This is a diagram (6) showing the operation of the heating element in the second embodiment during heating.

[0030] Figure 19 This is a diagram (7) showing the operation of the heating element in the second embodiment during heating.

[0031] Figure 20 This is a diagram (Figure 1) showing the operation of the heat-effect element during temperature regulation in the second embodiment.

[0032] Figure 21 This is a diagram (Figure 2) showing the operation of the heat-effect element during temperature regulation in the second embodiment.

[0033] Figure 22 This is a diagram illustrating an example of how a thermal effect element is used. Detailed Implementation

[0034] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings. It should be noted that in this specification and the accompanying drawings, for constituent elements that have substantially the same functional configuration, repeated descriptions are sometimes omitted by using the same reference numerals.

[0035] (First Implementation)

[0036] The first embodiment relates to a thermal effect element suitable for cooling. Figure 1 This is a schematic diagram showing the thermal effect element of the first embodiment.

[0037] like Figure 1 As shown, the thermal effect element 1 of the first embodiment includes a container 10, a first electrode 21, a second electrode 22, a first insulating film 23, a second insulating film 24, an ionic liquid 50, a movable electrode 40, a first insulating member 31, and a second insulating member 32.

[0038] Container 10 includes a first wall portion 11 and a second wall portion 12 opposite to the first wall portion 11. Container 10 is, for example, an insulating container. Preferably, container 10 is flexible. The shape of container 10 is not limited, for example, it can be plate-shaped or membrane-shaped. That is, the area of ​​the first wall portion 11 and the second wall portion 12 is significantly larger than the distance between the first wall portion 11 and the second wall portion 12.

[0039] A first electrode 21 is disposed on the outer surface of the first wall portion 11. A second electrode 22 is disposed on the outer surface of the second wall portion 12. The first electrode 21 and the second electrode 22 are, for example, conductive oxides such as indium tin oxide (ITO). The first electrode 21 and the second electrode 22 are arranged in parallel to each other. The distance between the first electrode 21 and the second electrode 22 is, for example, 100 μm or less.

[0040] A first insulating film 23 is disposed between the first wall portion 11 and the first electrode 21. A second insulating film 24 is disposed between the second wall portion 12 and the second electrode 22. The first insulating film 23 and the second insulating film 24 may include, for example, silicon oxide (SiO2), aluminum oxide (Al2O3), silicon nitride (SiN), zirconium oxide (ZrO2), hafnium oxide (HfO2), titanium oxide (TiO2), strontium titanate (STO), barium titanate (BTO), lead zirconate titanate (PZT), or calcium copper titanate (CCTO).

[0041] Ionic liquid 50 is contained in container 10. Ionic liquid 50 is a liquid composed of cations and anions, including cation-anion pairs. When no electric field is applied between the first electrode 21 and the second electrode 22, the cation-anion pairs are randomly oriented; when an electric field is applied between the first electrode 21 and the second electrode 22, they are oriented in a direction corresponding to the direction of the electric field. The entropy when the orientation is disordered is greater than that when the orientation is uniform, and the temperature when the orientation is disordered is lower than that when the orientation is uniform. Therefore, ionic liquid 50 exhibits a thermal effect similar to that of a strong dielectric.

[0042] The movable electrode 40 is movably disposed in the ionic liquid 50. The movable electrode 40 is a plate-shaped electrode disposed in the ionic liquid 50 parallel to the first electrode 21 and the second electrode 22. Figure 2 This is a cross-sectional view showing the movable electrode. (Example) Figure 2 As shown, the movable electrode 40 includes a conductive substrate 41. The substrate 41 is plate-shaped. A plurality of openings 41A are formed in the substrate 41. An insulating film 42 is formed covering the surface of the substrate 41. The insulating film 42 also covers the inner wall surface of the openings 41A. The movable electrode 40 has an opening 40A, which has the insulating film 42 as a sidewall inside the opening 41A. The insulating film 42 includes, for example, silicon oxide, aluminum oxide, silicon nitride, zirconium oxide, hafnium oxide, titanium oxide, strontium titanate, barium titanate, lead zirconate titanate, or calcium copper titanate.

[0043] A first isolator 31 is disposed on the inner surface of the first wall portion 11, which prevents the movable electrode 40 from contacting the first wall portion 11. A second isolator 32 is disposed on the inner surface of the second wall portion 12, which prevents the movable electrode 40 from contacting the second wall portion 12. The first isolator 31 and the second isolator 32 are, for example, made of an insulator. In the first embodiment, the first isolator 31 is higher than the second isolator 32.

[0044] like Figure 1 As shown, the thermal effect element 1 is used in conjunction with a DC power supply 60. The negative terminal of the power supply 60 is connected to the ground terminal GND via a switch SW1. A node is provided between the negative terminal of the power supply 60 and the switch SW1, and a switch SW2 is provided to switch the connection of this node between the first electrode 21 and the second electrode 22. The positive terminal of the power supply 60 is connected to the substrate 41 of the movable electrode 40. The positive terminal of the power supply 60 is connected to the first electrode 21 via a switch SW3 and to the second electrode 22 via a switch SW4.

[0045] Here, the characteristics of ionic liquid 50 will be explained. Figure 3 This is a diagram illustrating the thermodynamic cycle of ionic liquid 50. In Figure 3 The left side of the diagram shows the relationship between entropy S and temperature T, while the right side shows the relationship between electric field strength E and temperature T.

[0046] In the first state 101, no electric field is applied, the electric field strength E is set to 0, and the entropy S is S. 1, The temperature T is T1. In the first state 101, the orientation of the cation-anion pairs is disordered.

[0047] Subsequently, if an electric field with an intensity of E1 is applied, the system transitions to the second state 102. If the electric field intensity E becomes E1, the temperature T rapidly rises to temperature T2, the orientation of the cation-anion pairs remains disordered, and the entropy S remains at S1.

[0048] If an electric field of strength E1 is maintained, the orientation of the cation-anion pair changes over time in a manner consistent with the orientation of the electric field of strength E1, transitioning to the third state 103. During the transition from the second state 102 to the third state 103, the entropy S decreases from S1 to S3, and the temperature T decreases from T2 to T3. The decrease in temperature of the ionic liquid 50 indicates that the heat held in the ionic liquid 50 is released.

[0049] Then, if the electric field is stopped, it transitions to the fourth state 104. If the electric field strength E becomes 0, the temperature T rapidly decreases to temperature T4, but the orientation of the cation-anion pairs remains consistent, and the entropy S remains at S3.

[0050] If the application of the electric field is stopped, the orientation of the cation-anion pairs becomes disordered over time, transitioning to the first state 101. During the transition from the fourth state 104 to the first state 101, the entropy S increases from S3 to S1, and the temperature T increases from T4 to T1. The increase in temperature of the ionic liquid 50 indicates that external heat is absorbed by the ionic liquid 50.

[0051] Ionic liquid 50 has these properties.

[0052] Furthermore, the heat-effect element 1 of the first embodiment operates as follows, taking advantage of such characteristics. Figures 4 to 10 This diagram illustrates the operation of the heat-effect element 1 during cooling according to the first embodiment. This operation is achieved, for example, by executing a control program through a control mechanism such as a computer. Figures 4 to 10 In the diagram, the arrows in ionic liquid 50 indicate the orientation of the cation-anion pair. For example... Figures 4 to 10 As shown, a heat source 72 for cooling the object is provided on the side of the second electrode 22, and a heat sink 71 is provided on the side of the first electrode 21.

[0053] First, such as Figure 4As shown, switches SW1 and SW3 are turned on, and switches SW2 and SW4 are turned off. Since the same potential is applied to the first electrode 21 and the movable electrode 40, the electric field strength E between the first electrode 21 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the first electrode 21 and the movable electrode 40, causing the movable electrode 40 to approach the second electrode 22, where it comes into contact with the second isolator 32 and stops. The potential of the second electrode 22 is floating, and no electric field is applied between the second electrode 22 and the movable electrode 40. Figure 4 In the middle, the ionic liquid 50 is in the first state 101. That is, the entropy S is S1 and the temperature T is T1.

[0054] After that, as Figure 5 As shown, switches SW1, SW3, and SW4 are open, and switch SW2 is connected to the first electrode 21 side. Since a voltage from power supply 60 is applied between the first electrode 21 and the movable electrode 40, an electric field with intensity E of E1 is applied between them. Additionally, attraction acts between the first electrode 21 and the movable electrode 40, causing the movable electrode 40 to approach the first electrode 21 and stop upon contact with the first isolator 31. At this time, the ionic liquid 50 is stirred through opening 40A. Therefore, heat is transferred from the heat source 72 to the ionic liquid 50, then from the ionic liquid 50 to the heat sink 71, and released from the heat sink 71 to the outside. The first portion 51 between the movable electrode 40 and the first electrode 21 of the ionic liquid 50 is in the second state 102. That is, the entropy S remains at S1, and the temperature T rises to T2. On the other hand, the second portion 52 between the movable electrode 40 and the second electrode 22 of the ionic liquid 50 remains in the first state 101.

[0055] If maintained Figure 5 The states of switches SW1 to SW4 shown are as follows: Figure 6 As shown, over time, in the first part 51, the orientation of the cation-anion pair changes to align with the orientation of the electric field with an electric field strength of E1. That is, the first part 51 changes from the second state 102 to the third state 103. At this time, the entropy S decreases from S1 to S3, and the temperature T decreases from T2 to T3. Therefore, heat is released from the first part 51 to the heat sink 71. In addition, although the second part 52 remains in the first state 101, as the temperature of the first part 51 decreases, the temperature difference between the first part 51 and the heat source 72 increases, and the heat from the heat source 72 is transferred to the first part 51 through the second part 52.

[0056] If time continues to pass, then as Figure 7As shown, in the first part 51, the orientation of the cation-anion pairs is consistent in one direction, and the first part 51 reaches the third state 103. In the first part 51, the entropy S reaches S3, and the temperature T reaches T3. Although the second part 52 remains in the first state 101, as the temperature of the first part 51 decreases, the temperature difference between the first part 51 and the heat source 72 increases, and the heat from the heat source 72 is transferred to the first part 51 through the second part 52.

[0057] After that, as Figure 8 As shown, switch SW1 is turned on, and switches SW2, SW3, and SW4 are turned off. Since the potentials of the first electrode 21, the second electrode 22, and the movable electrode 40 become floating, the electric field strength E between the first electrode 21 and the movable electrode 40, and between the second electrode 22 and the movable electrode 40, are 0. The first part 51 is in the fourth state 104. That is, the entropy S remains at S3, and the temperature T decreases to T4. The second part 52 remains in the first state 101, but the heat from the heat source 72 is transferred to the first part 51 through the second part 52.

[0058] If maintained Figure 8 The states of switches SW1 to SW4 shown are as follows: Figure 9 As shown, over time, the first part 51 absorbs heat from the second part 52. In the first part 51, the orientation of the cation-anion pairs changes randomly. That is, the first part 51 changes from the fourth state 104 to the first state 101. At this time, the entropy S increases from S3 to S1, and the temperature T increases from T4 to T1. Although the second part 52 remains in the first state 101, it absorbs heat from the heat source 72 because the heat is absorbed by the first part 51.

[0059] If time continues to pass, the orientation of the cation-anion pairs in the first part 51 becomes disordered, and the first part 51 reaches the first state 101. In the first part 51, the entropy S reaches S1, and the temperature T reaches T1. Although the second part 52 remains in the first state 101, the heat from the heat source 72 is transferred to the first part 51 through the second part 52.

[0060] After that, as Figure 10As shown, switches SW1 and SW3 are turned on, and switches SW2 and SW4 are turned off. Since the same potential is applied to the first electrode 21 and the movable electrode 40, the electric field strength E between the first electrode 21 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the first electrode 21 and the movable electrode 40, causing the movable electrode 40 to approach the second electrode 22 and stop upon contact with the second isolator 32. At this time, the ionic liquid 50 is stirred through the opening 40A. Therefore, the heat transferred from the heat source 72 to the ionic liquid 50 is transferred from the ionic liquid 50 to the heat sink 71 and released from the heat sink 71 to the outside. Thus, returning... Figure 4 The state shown.

[0061] Furthermore, by repeating these cycles, the heat generated in the heat source 72 is transferred to the heat sink 71 through the heat effect element 1.

[0062] According to the first embodiment, since the specific heat of the ionic liquid 50 is smaller than that of the strong dielectric, heat is transferred through the ionic liquid 50 itself in addition to the thermal effect. Therefore, heat can be transferred with high efficiency, thereby enabling efficient cooling of the heat source 72.

[0063] Furthermore, if the movable electrode can move within the fluid ionic liquid 50, heat transfer can occur without deformation of the movable electrode 40. Therefore, even with a complex shape for the heat-effect element 1, excellent heat conduction efficiency can be easily achieved. Additionally, the size of the heat-effect element 1 can be varied. For example, it can be sized to suit the cooling of a smartphone or the heating / cooling system of a building.

[0064] Furthermore, by making the heat-effect element 1 flexible, it can be easily attached to the heat source 72, thereby enabling heat transfer with high efficiency.

[0065] It should be noted that the thermal effect element 1 can be used not only for simple cooling, but also for cooling while regulating the temperature. Figures 11-12 This diagram illustrates the operation of the heating element 1 in the first embodiment during temperature adjustment. This operation is also achieved, for example, by executing a control program through a control mechanism such as a computer. Figures 11-12 In the text, the arrows in ionic liquid 50 indicate the orientation of the cation-anion pair.

[0066] First, such as Figure 11As shown, switch SW1 is turned on, switches SW3 and SW4 are turned off, and switch SW2 is connected to the second electrode 22. Since a voltage from power supply 60 is applied between the second electrode 22 and the movable electrode 40, an electric field with intensity E of E1 is applied between them. In the second part 52, the temperature T rises to T2. Furthermore, attraction acts between the second electrode 22 and the movable electrode 40, causing the movable electrode 40 to approach the second electrode 22 and stop upon contact with the second isolator 32. If maintained... Figure 11 As shown in the states of switches SW1 to SW4, in the second part 52, the orientation of the cation-anion pairs changes in a manner consistent with the orientation of the electric field with electric field strength E of E1 as time passes.

[0067] After that, as Figure 12 As shown, switches SW1 and SW4 are turned on, and switches SW2 and SW3 are turned off. Since the second electrode 22 and the movable electrode 40 are applied with the same potential, the electric field strength E between the second electrode 22 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the second electrode 22 and the movable electrode 40, causing the movable electrode 40 to approach the first electrode 21 and stop in contact with the first isolator 31. At this time, the ionic liquid 50 is stirred through the opening 40A.

[0068] In this way, temperature regulation can be achieved using the thermal effect element 1.

[0069] (Second Implementation)

[0070] The second embodiment relates to a thermal effect element suitable for heating. Figures 13-19 This diagram illustrates the operation of the heating element 2 according to the second embodiment during heating. This operation is also achieved by executing a control program via a control mechanism such as a computer. Figures 13-19 In the diagram, the arrows in ionic liquid 50 indicate the orientation of the cation-anion pairs. For example... Figures 13-19 As shown, a heat sink 71 for the object to be heated is provided on the side of the second electrode 22, and a heat source 72 is provided on the side of the first electrode 21. It should be noted that in the heat-effect element 2 of the second embodiment, the second insulating member 32 is higher than the first insulating member 31. Other configurations are the same as those of the heat-effect element 1 of the first embodiment.

[0071] First, such as Figure 13As shown, switches SW1 and SW4 are turned on, and switches SW2 and SW3 are turned off. Since the same potential is applied to the second electrode 22 and the movable electrode 40, the electric field strength E between the second electrode 22 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the second electrode 22 and the movable electrode 40, causing the movable electrode 40 to approach the first electrode 21 and stop upon contact with the first isolator 31. The potential of the first electrode 21 is floating, and no electric field is applied between the first electrode 21 and the movable electrode 40. Figure 13 In the above, the ionic liquid 50 is in the first state 101. That is, the entropy S is S1 and the temperature T is T1.

[0072] After that, as Figure 14 As shown, switches SW1, SW3, and SW4 are open, and switch SW2 is connected to the second electrode 22. Since a voltage from power supply 60 is applied between the second electrode 22 and the movable electrode 40, an electric field with an intensity E of E1 is applied between them. Additionally, attraction acts between the second electrode 22 and the movable electrode 40, causing the movable electrode 40 to approach the second electrode 22 and stop in contact with the second isolator 32. At this time, the ionic liquid 50 is stirred through opening 40A. Therefore, heat transferred from the heat source 72 to the ionic liquid 50 is transferred from the ionic liquid 50 to the heat sink 71 and supplied to the heat sink 71. The second portion 52 between the movable electrode 40 and the second electrode 22 of the ionic liquid 50 is in a second state 102. That is, the entropy S remains at S1, and the temperature T rises to T2. On the other hand, the first portion 51 between the movable electrode 40 and the first electrode 21 of the ionic liquid 50 remains in a first state 101.

[0073] If maintained Figure 14 The states of switches SW1 to SW4 shown are as follows: Figure 15 As shown, over time, in the second part 52, the orientation of the cation-anion pairs changes in a manner consistent with the orientation of the electric field with electric field strength E of E1. That is, the second part 52 changes from the second state 102 to the third state 103. At this time, the entropy S decreases from S1 to S3, and the temperature T decreases from T2 to T3. Therefore, heat is supplied from the second part 52 to the heat sink 71. In addition, although the first part 51 remains in the first state 101, as the temperature of the second part 52 decreases, the temperature difference between the second part 52 and the heat source 72 increases, and the heat from the heat source 72 is transferred to the second part 52 through the first part 51.

[0074] If further time passes, such as Figure 16As shown, in the second part 52, the orientation of the cation-anion pairs is consistent in one direction, and the second part 52 transitions to the fourth state 104. In the second part 52, the entropy S reaches S3, and the temperature T reaches T3. Although the first part 51 remains in the first state 101, as the temperature of the second part 52 decreases, the temperature difference between the second part 52 and the heat source 72 increases, and the heat from the heat source 72 is transferred to the second part 52 through the first part 51.

[0075] After that, as Figure 17 As shown, switch SW1 is turned on, and switches SW2, SW3, and SW4 are turned off. Since the potentials of the first electrode 21, the second electrode 22, and the movable electrode 40 are floating, the electric field strength E between the first electrode 21 and the movable electrode 40, and between the second electrode 22 and the movable electrode 40, are both 0. The second part 52 is in the fourth state 104. That is, the entropy S remains at S3, and the temperature T decreases to T4. The first part 51 remains in the first state 101, and the heat from the heat source 72 is transferred to the second part 52 through the first part 51.

[0076] If maintained Figure 17 The states of switches SW1 to SW4 shown are as follows: Figure 18 As shown, over time, the second part 52 absorbs heat from the first part 51. In the second part 52, the orientation of the cation-anion pairs changes randomly. That is, the second part 52 changes from the fourth state 104 to the first state 101. At this time, the entropy S increases from S3 to S1, and the temperature T increases from T4 to T1. Although the first part 51 remains in the first state 101, heat is absorbed from the heat source 72 because heat is absorbed in the second part 52.

[0077] If time continues to pass, the orientation of the cation-anion pairs in the second part 52 becomes disordered, and the second part 52 transitions to the first state 101. In the second part 52, the entropy S reaches S1, and the temperature T reaches T1. Although the first part 51 remains in the first state 101, the heat from the heat source 72 is transferred to the second part 52 through the first part 51.

[0078] After that, as Figure 19 As shown, switches SW1 and SW4 are turned on, and switches SW2 and SW3 are turned off. Since the same potential is applied to the second electrode 22 and the movable electrode 40, the electric field strength E between the second electrode 22 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the second electrode 22 and the movable electrode 40, causing the movable electrode 40 to approach the first electrode 21 and stop upon contact with the first isolator 31. At this time, the ionic liquid 50 is stirred by 40A. Therefore, heat transferred from the heat source 72 to the ionic liquid 50 is transferred from the ionic liquid 50 to the heat sink 71. Thus, returning... Figure 13 The state shown.

[0079] Furthermore, by repeating these cycles, the heat absorbed by the heat source 72 is supplied to the heat sink 71 through the heat effect element 1.

[0080] According to the second embodiment, the radiator 71 can be heated efficiently.

[0081] It should be noted that the thermal effect element 2 can be used not only for simple heating, but also for heating while regulating the temperature. Figures 20-21 This diagram illustrates the operation of the heating element 2 in the second embodiment during temperature adjustment. This operation is also achieved, for example, by executing a control program through a control mechanism such as a computer. Figures 20-21 In the text, the arrows in ionic liquid 50 indicate the orientation of the cation-anion pair.

[0082] First, such as Figure 20 As shown, switch SW1 is turned on, switches SW3 and SW4 are turned off, and switch SW2 is connected to the first electrode 21 side. Since a voltage from power supply 60 is applied between the first electrode 21 and the movable electrode 40, an electric field with intensity E of E1 is applied between them, causing the temperature T to rise to T2 in the first part 51. Additionally, attraction acts between the first electrode 21 and the movable electrode 40, causing the movable electrode 40 to approach the first electrode 21 and come into contact with the first isolator 31, thus stopping. If maintained... Figure 20 As shown in the states of switches SW1 to SW4, the orientation of the cation-anion pairs changes in the first part 51 in a manner consistent with the orientation of the electric field with electric field strength E of E1 as time passes.

[0083] After that, as Figure 21 As shown, switches SW1 and SW3 are turned on, and switches SW2 and SW4 are turned off. Since the same potential is applied to the first electrode 21 and the movable electrode 40, the electric field strength E between the first electrode 21 and the movable electrode 40 is 0. Furthermore, a repulsive force acts between the first electrode 21 and the movable electrode 40, causing the movable electrode 40 to approach the second electrode 22 and stop upon contact with the second isolator 32. At this time, the ionic liquid 50 is stirred through the opening 40A.

[0084] Thus, the temperature can be regulated using the thermal effect element 2.

[0085] It should be noted that, as Figure 22As shown, two heat-effect elements 1 can be connected in series between the radiator 71 and the heat source 72. That is, a heat-conducting device can be configured with two heat-effect elements 1 stacked on top of each other. In this heat-conducting device, between two heat-effect elements 1 that are adjacent in the stacking direction, the first wall portion 11 of one container 10 is opposite to the second wall portion 12 of the other container 10. In this case, by staggering the operating cycle by half a cycle between the two heat-effect elements 1, the efficiency of heat conduction can be further improved. Three or more heat-effect elements 1 can be connected in series between the radiator 71 and the heat source 72. Similarly, two or more heat-effect elements 2 can be connected in series between the radiator 71 and the heat source 72.

[0086] Alternatively, multiple heat-effect elements 1 or 2 can be provided between the heat sink 71 and the heat source 72. In this case, by synchronizing the operation cycles of each heat-effect element 1 or 2, heat conduction can be carried out over a wide range.

[0087] In this invention, the shapes of the first electrode and the second electrode are not limited. For example, the first electrode and the second electrode may have a tubular shape. In this case, for example, one may be configured as an outer tube and the other as an inner tube, and the heat exchange fluid may flow within the inner tube.

[0088] The thermal effect element of this invention can be used in semiconductor manufacturing apparatuses. For example, a thermal effect element can be provided on a wafer chuck in a semiconductor manufacturing apparatus to adjust the temperature of the wafer held on the chuck. It can also be used to adjust the temperature of a wafer transport device. It can also be applied to adjust the temperature of solutions used in etching. It can also be used to adjust the temperature of gases used in wafer processing.

[0089] The thermal effect element of this invention can be used for cooling electronic devices such as smartphones and tablets. It can also be used for air conditioning and heating in residences and buildings.

[0090] While the preferred embodiments have been described in detail above, they are not limited to the embodiments described above. Various modifications and substitutions can be made to the embodiments described above without departing from the scope of the claims.

[0091] This application claims priority based on basic application No. 2020-142661 filed with the Japan Patent Office on August 26, 2020, the entire contents of which are incorporated herein by reference.

[0092] Explanation of reference numerals in the attached figures

[0093] 1, 2 Thermal effect elements

[0094] 10 containers

[0095] 11, 12 Wall sections

[0096] Electrodes 21 and 22

[0097] 23, 24 Insulating film

[0098] 31, 32 Isolation components

[0099] 40 Movable Electrode

[0100] 40A Opening

[0101] 41 Substrate

[0102] 41A Opening

[0103] 42 Insulating film

[0104] 50 Ionic Liquids

[0105] 71 Radiator

[0106] 72 Heat Source

Claims

1. A thermal effect element, comprising: A container, comprising a first wall portion and a second wall portion opposite to the first wall portion; An ionic liquid, contained in the aforementioned container; The first electrode is disposed on the outer surface of the first wall portion; The second electrode is disposed on the outer surface of the aforementioned second wall portion; A movable electrode is disposed in the aforementioned ionic liquid in a movable manner and includes a conductive substrate having a plurality of openings formed thereon. The first spacer is disposed on the inner surface of the aforementioned first wall portion; and The second isolation element is located on the inner surface of the aforementioned second wall portion.

2. The thermal effect element according to claim 1, wherein, have: The first switch has one end connected to the reference potential; The second switch has one end connected to the other end of the first switch, and the other end is connected to the first electrode, the second electrode, and the floating object. A power source, one end of which is connected to the other end of the first switch and one end of the second switch, and the other end of which is connected to the movable electrode. A third switch is connected between the other end of the power supply and the first electrode. A fourth switch, which is connected between the other end of the power supply and the second electrode; and The control mechanism sets the third switch to open when the other end of the second switch is connected to the first electrode, and sets the fourth switch to open when the other end of the second switch is connected to the second electrode.

3. The thermal effect element according to claim 1, wherein, The container described above is an insulated container.

4. The thermal effect element according to any one of claims 1 to 3, wherein, The first electrode described above comprises a conductive oxide.

5. The thermal effect element according to any one of claims 1 to 3, wherein, It has a first insulating film disposed between the first wall portion and the first electrode.

6. The thermal effect element according to claim 5, wherein, The aforementioned first insulating film includes silicon oxide, aluminum oxide, silicon nitride, zirconium oxide, hafnium oxide, titanium oxide, strontium titanate, barium titanate, lead zirconate titanate, or calcium copper titanate.

7. The thermal effect element according to any one of claims 1 to 3, wherein, The movable electrode is arranged in parallel with the first electrode.

8. The thermal effect element according to any one of claims 1 to 3, wherein, The second electrode described above comprises a conductive oxide.

9. The thermal effect element according to any one of claims 1 to 3, wherein, It has a second insulating film disposed between the second wall portion and the second electrode.

10. The thermal effect element according to claim 9, wherein, The aforementioned second insulating film includes silicon oxide, aluminum oxide, silicon nitride, zirconium oxide, hafnium oxide, titanium oxide, strontium titanate, barium titanate, lead zirconate titanate, or calcium copper titanate.

11. The thermal effect element according to any one of claims 1 to 3, wherein, The second electrode is arranged in parallel with the first electrode.

12. The thermal effect element according to any one of claims 1 to 3, wherein, The distance between the first electrode and the second electrode is less than 100 μm.

13. A heat-conducting device comprising a plurality of heat-effect elements as described in any one of claims 1 to 12, stacked on top of each other. Between the aforementioned thermal effect elements that are adjacent in the stacking direction, the first wall of one of the containers is opposite to the second wall of the other container.

14. A semiconductor manufacturing apparatus comprising a thermal effect element according to any one of claims 1 to 12 or a heat-conducting device according to claim 13.

15. A method for controlling a thermal effect element, the thermal effect element comprising: A container, comprising a first wall portion and a second wall portion opposite to the first wall portion; An ionic liquid, contained in the aforementioned container; The first electrode is disposed on the outer surface of the first wall portion; The second electrode is disposed on the outer surface of the aforementioned second wall portion; A movable electrode is disposed in the aforementioned ionic liquid in a movable manner and includes a conductive substrate having a plurality of openings formed thereon. The first isolation element is disposed on the inner surface of the aforementioned first wall portion; The second spacer is disposed on the inner surface of the aforementioned second wall portion; The first switch has one end connected to the reference potential; The second switch has one end connected to the other end of the first switch, and the other end is connected to the first electrode, the second electrode, and the floating object. A power source, one end of which is connected to the other end of the first switch and one end of the second switch, and the other end of which is connected to the movable electrode. A third switch is connected between the other end of the power supply and the first electrode. as well as A fourth switch is connected between the other end of the power supply and the second electrode. The control method for the thermal effect element sets the first wall side to a lower temperature than the second wall side, and the control method for the thermal effect element has the following characteristics: The process of setting the temperature of the ionic liquid to a first temperature, setting the first and third switches to be on, setting the second switch to be floating, and setting the fourth switch to be off; The process of setting the first switch, the third switch and the fourth switch to be off, and setting the connection object of the other end of the second switch to the first electrode. The process of maintaining the first switch, the third switch and the fourth switch in the off state, and the connection object of the other end of the second switch to the first electrode. The process of setting the first switch to ON, setting the second switch to Float, and setting the third and fourth switches to OFF; and The process of maintaining the first switch in the ON state, the second switch in the Float state, and the third and fourth switches in the OFF state.

16. A method for controlling a thermal effect element, the thermal effect element comprising: A container, comprising a first wall portion and a second wall portion opposite to the first wall portion; An ionic liquid, contained in the aforementioned container; The first electrode is disposed on the outer surface of the first wall portion; The second electrode is disposed on the outer surface of the aforementioned second wall portion; A movable electrode is disposed in the aforementioned ionic liquid in a movable manner and includes a conductive substrate having a plurality of openings formed thereon. The first isolation element is disposed on the inner surface of the aforementioned first wall portion; as well as The second spacer is disposed on the inner surface of the aforementioned second wall portion; The first switch has one end connected to the reference potential; The second switch has one end connected to the other end of the first switch, and the other end is connected to the first electrode, the second electrode, and the floating object. A power source, one end of which is connected to the other end of the first switch and one end of the second switch, and the other end of which is connected to the movable electrode. A third switch is connected between the other end of the power supply and the first electrode. as well as A fourth switch is connected between the other end of the power supply and the second electrode. The control method for the thermal effect element sets the first wall side to a higher temperature than the second wall side, and the control method for the thermal effect element has the following characteristics: The process of setting the temperature of the ionic liquid to a first temperature, setting the first switch and the fourth switch to be on, setting the second switch to be floating, and setting the third switch to be off; The process of setting the first switch, the third switch and the fourth switch to be off, and setting the connection object of the other end of the second switch to the second electrode. The process of maintaining the first switch, the third switch and the fourth switch in the off state, and the connection object of the other end of the second switch to the second electrode. The process of setting the first switch to ON, setting the second switch to Float, and setting the third and fourth switches to OFF; and The process of maintaining the first switch as closed, the second switch as floating, and the third and fourth switches as open.

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