A single crystal furnace crystal rod turnover vehicle

Abstract

The embodiment of the application provides a single crystal furnace crystal rod turnover vehicle, and belongs to the technical field of crystal rods, and acts on the crystal rod. The turnover vehicle comprises a turnover vehicle body, a clamping mechanism, a bearing mechanism and a line cutting mechanism. The clamping mechanism is connected with the upper surface of the turnover vehicle body and can rotate. The clamping mechanism is used for clamping and rotating the crystal rod. The bearing mechanism is connected with the upper surface of the turnover vehicle body and is located on the side of the clamping mechanism, so that the bearing mechanism can support the crystal rod separated from the clamping mechanism. The line cutting mechanism is connected with the upper surface of the turnover vehicle body and is located on the side of the bearing mechanism. The line cutting mechanism is used for cutting the crystal rod in the bearing mechanism at the head and tail. The technical effect of shortening the process flow during crystal rod processing is achieved.

Description

Technical Field

[0001] This invention relates to the field of crystal rod technology, and in particular to a single crystal furnace crystal rod turnover cart. Background Technology

[0002] The Czochralski (CZ) single-crystal silicon growth furnace is the main equipment for preparing single-crystal silicon materials, also known as a single-crystal silicon growth furnace or single-crystal furnace. The equipment melts high-purity polycrystalline silicon raw materials in a quartz crucible through graphite heating. Under continuous low-pressure argon protection, the silicon crystal gradually crystallizes into a single crystal on a thin seed crystal at a suitable temperature and growth rate.

[0003] In existing technologies, traditional Czochralski hard-axis monocrystalline silicon growth furnaces typically use a robotic arm to remove the monocrystalline silicon rod from the auxiliary furnace chamber. Then, a manually operated crystal removal cart removes the rod from the robotic arm and transports it to the next process step. In the next process step, the rod must first be cut off at both ends before subsequent operations can be performed.

[0004] Therefore, the technical problem with existing technologies is that the process flow for crystal rod processing is long. Summary of the Invention

[0005] This application provides a single crystal furnace ingot turnover cart, which solves the technical problem of long process flow in ingot processing in the prior art; and achieves the technical effect of shortening the process flow in ingot processing.

[0006] This application provides a single crystal furnace ingot turnover cart, which acts on the ingot. The turnover cart includes: a turnover cart body; a clamping mechanism connected to the upper surface of the turnover cart body, the clamping mechanism itself being rotatable, the clamping mechanism being used to clamp the ingot and drive the ingot to rotate; a carrying mechanism connected to the upper surface of the turnover cart body, and the carrying mechanism being located on the side of the clamping mechanism, so that the carrying mechanism can receive the ingot that has detached from the clamping mechanism; and a wire cutting mechanism connected to the upper surface of the turnover cart body, and the wire cutting mechanism being located on the side of the carrying mechanism, the wire cutting mechanism being used to cut off the ingot at both ends in the carrying mechanism.

[0007] Preferably, the turnover cart further includes a conversion mechanism located on the side of the clamping mechanism, the conversion mechanism being connected to the upper surface of the turnover cart body, and the conversion mechanism being rotatably connected to the clamping mechanism, the conversion mechanism being used to drive the clamping mechanism to rotate.

[0008] Preferably, the clamping mechanism includes: a connecting plate connected to the upper surface of the turnover cart body and rotatably connected to the conversion mechanism, the connecting plate being rotatable under the action of the conversion mechanism; a clamping assembly located on the side of the connecting plate and connected to the connecting plate, the clamping assembly being used to clamp the crystal rod; and a supporting assembly located below the clamping mechanism, the supporting assembly and the clamping assembly both located on the same side of the connecting plate, the supporting assembly being connected to the connecting plate, the supporting assembly being used to support the crystal rod.

[0009] Preferably, the conversion mechanism includes: a rotating shaft that can be connected to a drive source; and a timing belt that is sleeved on the connecting plate and the rotating shaft, thereby driving the clamping mechanism to rotate.

[0010] Preferably, the supporting mechanism includes: a supporting base for supporting the crystal rod; a lifting mechanism that acts on the supporting base to move the supporting base up and down; and a rotating mechanism that acts on the supporting base and is connected to the lifting mechanism to rotate the supporting base.

[0011] Preferably, the lifting mechanism includes: a moving component; a linkage assembly comprising multiple connecting rods arranged in a cross configuration, connected at the intersections by external hinges, the bottom end of the linkage assembly being connected to the moving component, thereby making the height of the linkage assembly adjustable under the movement of the moving component; and a top plate located above the linkage assembly, the first end face of the top plate being connected to the upper end of the linkage assembly, and the second end face of the top plate being connected to the support seat.

[0012] Preferably, the rotating mechanism includes: a rotating platform, a power source connected to the side of the rotating platform, the rotating platform being connected to the support seat, and the rotating platform driving the support seat to rotate.

[0013] Preferably, the moving component includes: a lead screw and nut assembly connected to the trolley body; and a linear guide rail assembly connected to the connecting rod assembly, wherein the linear guide rail assembly drives the connecting rod assembly to rise and fall under the action of the lead screw and nut assembly.

[0014] Preferably, the wire cutting mechanism includes: a moving stage; and a wire cutting power assembly, which is mounted on the moving stage and moves under the power of the moving stage to cut the crystal rod at both ends.

[0015] Preferably, the moving stage includes: a first moving stage, which can be connected to a power source to drive the first moving stage to move; a second moving stage, the moving direction of the second moving stage being perpendicular to the moving direction of the first moving stage, the second moving stage being connected to the first moving stage, the second moving stage being connected to a power source to drive the second moving stage to move, the second moving stage being connected to the wire-cutting power assembly, and the second moving stage driving the wire-cutting power assembly to move thereby cutting off the ends of the crystal rod.

[0016] The above-described one or more technical solutions in the embodiments of this application have at least one or more of the following technical effects:

[0017] 1. In the embodiments of this application, the crystal rod comes out of the hard-shaft single crystal furnace, is clamped by the clamping mechanism in the turnover cart and carried by the carrying mechanism, and finally the crystal rod is cut off at both ends by the wire cutting mechanism. This avoids the need to cut off the head and tail of the crystal rod before sending it to the next processing point after taking it out of the single crystal furnace. This solves the technical problem of long process flow in crystal rod processing in the prior art and achieves the technical effect of shortening the process flow in crystal rod processing.

[0018] 2. In this embodiment of the application, the crystal rod is taken out by a turnover vehicle. This can avoid the difference in skill level of manual crystal taking, which can cause the crystal rod to collide and affect the quality of the crystal rod. This is beneficial to the operation of the crystal rod in the next process.

[0019] 3. In the embodiments of this application, the dust or powder generated when the crystal rod is cut off at both ends during the transfer process is covered by a casing. In addition, the cut ends of the crystal rod are collected by a collection tank, which is beneficial to the cleanliness of the surrounding environment. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a single crystal furnace rod turnover cart in an embodiment of this application;

[0021] Figure 2 for Figure 1 A structural diagram from another perspective;

[0022] Figure 3 for Figure 1 Top view;

[0023] Figure 4 for Figure 3 A cross-sectional view after the casing has been removed;

[0024] Figure 5 for Figure 4 Enlarged view at point B in the middle;

[0025] Figure 6 for Figure 1 Left view after removing the cover;

[0026] Figure 7 for Figure 3 Sectional view of AA;

[0027] Figure 8 This is a schematic diagram of a structure connecting a support and a crystal rod;

[0028] Figure 9 This is a schematic diagram of another structure connecting a support and a crystal rod.

[0029] Figure label:

[0030] 100. Turnover cart body; 110. Collection trough; 200. Conversion mechanism; 210. Rotating shaft; 220. Synchronous belt; 300. Clamping mechanism; 310. Support assembly; 320. Clamping assembly; 330. Connecting plate; 331. First connecting plate; 332. Second connecting plate; 3321. Connecting piece; 400. Bearing mechanism; 410. Lifting mechanism; 411. Moving assembly; 4111. Screw and nut assembly; 41111. Screw; 41112. Nut; 4112. Linear guide. Rail assembly; 41121, slider; 41122, guide rail; 412, linkage assembly; 4121, linkage; 413, top plate; 420, rotating mechanism; 421, rotary table; 430, bearing seat; 431, V-shape; 432, crystal holder; 500, wire cutting mechanism; 510, moving stage; 511, first moving stage; 512, second moving stage; 520, wire cutting power assembly; 521, driving wheel; 522, driven wheel; 523, cutting wire; 600, crystal rod; 700, cover. Detailed Implementation

[0031] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0032] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0033] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0034] To address the technical problem of long process flows in existing crystal rod processing technologies, embodiments of this application provide a single crystal furnace crystal rod turnover cart. (See attached...) Figure 1-6As shown, a single-crystal furnace ingot turnover cart operates on ingots 600. The turnover cart includes a turnover cart body 100, a conversion mechanism 200, a clamping mechanism 300, a carrying mechanism 400, and a wire-cutting mechanism 500. The turnover cart body 100 carries the conversion mechanism 200, the clamping mechanism 300, the carrying mechanism 400, and the wire-cutting mechanism 500. The conversion mechanism 200 drives the clamping mechanism 300 to rotate. The clamping mechanism 300 can clamp the ingot 600. The carrying mechanism 400 can receive the ingot 600 that has detached from the clamping mechanism 300. The wire-cutting mechanism 500 is used to cut the ingot 600 at both ends in the carrying mechanism 400. The conversion mechanism 200 is located on the side of the clamping mechanism 300, connected to the upper surface of the turnover cart body 100, and rotatably connected to the clamping mechanism 300. The conversion mechanism 200 is used to drive the clamping mechanism 300 to rotate. The clamping mechanism 300 is connected to the upper surface of the turnover cart body 100, and is rotatable. The clamping mechanism 300 is used to clamp the crystal rod 600 and drive the crystal rod 600 to rotate. The carrying mechanism 400 is connected to the upper surface of the turnover cart body 100, and is located on the side of the clamping mechanism 300, so that the carrying mechanism 400 can receive the crystal rod 600 that has been detached from the clamping mechanism 300. The wire cutting mechanism 500 is connected to the upper surface of the turnover cart body 100, and is located on the side of the carrying mechanism 400. The wire cutting mechanism 500 is used to cut off the crystal rod 600 at both ends in the carrying mechanism 400. Preferably, the centers of the wire cutting mechanism 500, the carrying mechanism 400, and the clamping mechanism 300 are aligned on the same straight line in a front-to-back order. Thus, after passing through the conversion mechanism 200, clamping mechanism 300, carrying mechanism 400, and wire cutting mechanism 500 on the transfer cart body 100, the crystal ingot 600 can quickly enter the next process, allowing it to be rapidly removed from the single crystal furnace. This results in a high degree of automation and high operational efficiency in crystal removal.

[0035] It should be noted that the trolley body 100 has the functions of conventional AGV laser guidance and automatic charging, enabling unattended operation. Specifically, the trolley has a self-positioning function and can dock with the robotic arm of the hard-shaft single crystal furnace (not shown in the figure). In other words, the trolley body 100 can use 3D laser sensors around its body to scan the surrounding environment, generate a map for navigation, and illuminate the object with laser sensors before approaching the robotic arm connected to the single crystal furnace to measure the distance to the object. The trolley body 100 is equipped with transceivers (not shown in the figure), each of which rapidly emits pulse light and measures the reflected pulse to determine the distance between the robotic arm and the trolley body 100. This allows for real-time adjustment of the trolley body 100's position, enabling the trolley to smoothly remove the crystal ingot 600 from the robotic arm of the hard-shaft single crystal furnace. This facilitates the entry of the crystal ingot 600 into the next process, resulting in high crystal removal efficiency, a high degree of automation, and avoiding the risks of breaking or bumping the crystal ingot 600 during manual crystal removal, as well as the drawbacks of high operational difficulty.

[0036] Conversion mechanism 200, as attached Figure 1-3 As shown, the conversion mechanism 200 is used to drive the clamping mechanism 300 to rotate, providing power for the rotation of the clamping mechanism 300. The conversion mechanism 200 is located on the side of the clamping mechanism 300, and is connected to the upper surface of the turnover cart body 100. The conversion mechanism 200 and the clamping mechanism 300 are rotatably connected. The conversion mechanism 200 is used to drive the clamping mechanism 300 to rotate, thereby converting the crystal rod 600 from a vertical state to a horizontal state. In one embodiment, the conversion mechanism 200 includes a rotating shaft 210 and a synchronous belt 220. The rotating shaft 210 can be connected to a drive source. The synchronous belt 220 is sleeved on the connecting plate 330 and is also sleeved on the rotating shaft 210, driving the clamping mechanism 300 to rotate via the synchronous belt 220. The rotating shaft 210 can be connected to a drive source, thereby driving the rotating shaft 210 to rotate under the action of the drive source. Specifically, the drive source can be a servo motor driving a reducer to rotate. The rotating shaft 210 is connected to the reducer, so the drive source can drive the rotating shaft 210 to rotate. Therefore, through the action of the synchronous belt 220 and the rotating shaft 210, the conversion mechanism 200 can drive the clamping mechanism 300 to rotate. It should be noted that the structure of the conversion mechanism 200 can have various forms, as long as the conversion mechanism 200 can drive the clamping mechanism 300 to rotate, so that the crystal rod 600 changes from a vertical state to a horizontal state and falls onto the bearing mechanism 400, there are no other restrictions on the conversion mechanism 200. In addition, the synchronous belt 220 can also be replaced by a belt or chain. Since the synchronous belt 220 combines the advantages of belt drive and chain drive, the synchronous belt 220 is preferred.

[0037] Clamping mechanism 300, as attached Figure 1-4As shown, the clamping mechanism 300 can clamp the crystal ingot 600 emerging from the single crystal furnace robotic arm. In one embodiment, the clamping mechanism 300 includes a support component 310, a clamping component 320, and a connecting plate 330. The connecting plate 330 is connected to the upper surface of the transfer cart body 100, and is rotatably connected to the conversion mechanism 200, allowing the connecting plate 330 to rotate under the action of the conversion mechanism 200. The clamping component 320 is located on the side of the connecting plate 330 and is connected to the connecting plate 330, serving to clamp the crystal ingot 600. The support component 310 is located below the clamping component 320, and both the support component 310 and the clamping component 320 are located on the same side of the connecting plate 330, and are connected to the connecting plate 330, serving to support the crystal ingot 600. It should be noted that before the clamping component 320 on the transfer cart touches the crystal ingot 600 on the rigid-axis single-crystal furnace robotic arm, both the clamping component 320 and the supporting component 310 are open. After the transfer cart reaches the final docking position, the rigid-axis single-crystal furnace robotic arm moves the crystal ingot 600 downwards. After the crystal ingot 600 lands on the supporting component 310, the clamping component 320 located above the supporting component 310 clamps the crystal ingot 600. At the same time, the corresponding gripper (not shown in the figure) on the rigid-axis single-crystal furnace robotic arm releases, and the transfer cart moves a certain distance to complete the unloading process of the crystal ingot 600 from the rigid-axis single-crystal furnace robotic arm.

[0038] It is worth explaining, as shown in the appendix Figure 1 , 2 As shown in Figure 4, the connecting plate 330 includes a first connecting plate 331 and a second connecting plate 332. A connector 3321 is provided on the side of the second connecting plate 332. The first connecting plate 331 is located above the second connecting plate 332, and is connected to both the clamping assembly 320 and the supporting assembly 310. The side of the first connecting plate 331 is connected to the conversion mechanism 200. When the transmission in the conversion mechanism 200 is driven by the synchronous belt 220, the connector 3321 and the synchronous belt 220 are sleeved together, thereby causing the first connecting plate 331 to rotate around the second connecting plate 332 under the action of the synchronous belt 220 and the rotating shaft 210, so that the crystal rod 600 is converted from a vertical state to a horizontal state and then carried by the bearing mechanism 400. Furthermore, the first ends of the first connecting plate 331 and the second connecting plate 332 are rotatably connected, and the second end of the second connecting plate 332 is connected to the surface of the turnover cart body 100. The first connecting plate 331 and the second connecting plate 332 can be connected by a pivot or by a hinge. As long as the first connecting plate 331 can rotate around the second connecting plate 332, and the crystal rod 600 held by the clamping assembly 320 can be changed from a vertical state to a horizontal state and then carried by the bearing mechanism 400, it is acceptable.

[0039] Supporting mechanism 400, as attached Figure 1 , 3 As shown in Figure 4, the supporting mechanism 400 can receive the crystal ingot 600 that has been released from the clamping mechanism 300. In one embodiment, the supporting mechanism 400 includes a lifting mechanism 410, a rotating mechanism 420, and a supporting base 430. The supporting base 430 is used to support the crystal ingot 600. The lifting mechanism 410 acts on the supporting base 430, causing the lifting mechanism 410 to lift the supporting base 430. The rotating mechanism 420 acts on the supporting base 430, and the rotating mechanism 420 is connected to the lifting mechanism 410, causing the rotating mechanism 420 to rotate the supporting base 430. It should be noted that the positional relationship between the lifting mechanism 410 and the rotating mechanism 420 can be that the lifting mechanism 410 is below the rotating mechanism 420, or the lifting mechanism 410 is above the rotating mechanism 420. When the crystal ingot 600 is driven by the conversion mechanism 200 to change from a vertical state to a horizontal state, the lifting mechanism 410 moves upward to support the horizontally lying crystal ingot 600. Then, through the rotation of the rotating mechanism 420, the beginning and end of the crystal ingot 600 can be cut off by the wire cutting mechanism 500. The transfer cart body 100 is equipped with a collection trough 110, located below the wire cutting mechanism 500. Thus, after the beginning and end of the crystal ingot 600 are cut off by the wire cutting mechanism 500, the cut ends of the crystal ingot 600 enter the collection trough 110 and are then uniformly sent to the processing point for processing.

[0040] Furthermore, as shown in the appendix Figure 4 , 5As shown, the lifting mechanism 410 includes a moving component 411, a connecting rod assembly 412, and a top plate 413. The connecting rod assembly 412 includes multiple connecting rods 4121 arranged in a cross configuration. The connecting rods 4121 are connected at their intersections by external hinges. The bottom end of the connecting rod assembly 412 is connected to the moving component 411, making the height of the connecting rod assembly 412 adjustable by the movement of the moving component 411. The top plate 413 is located above the connecting rod assembly 412. The first end face of the top plate 413 is connected to the upper end of the connecting rod assembly 412, and the second end face of the top plate 413 is connected to the support seat 430. It should be noted that in one embodiment, the lifting mechanism 410 is located below the rotating mechanism 420. The moving component 411 includes a lead screw and nut assembly 4111 and a linear guide rail assembly 4112. The lead screw and nut assembly 4111 is connected to the turnover cart body 100. The linear guide assembly 4112 is connected to the connecting rod assembly 412. The linear guide assembly 4112, under the action of the lead screw and nut assembly 4111, drives the connecting rod assembly 412 to rise and fall. It should be explained that the lead screw and nut assembly 4111 includes a lead screw 41111 and a nut 41112. The nut 41112 is threaded onto the lead screw 41111 and is connected to the linear guide assembly 4112 via a connector. There are at least two linear guide assemblies 4112, symmetrically distributed on both sides of the connecting rod assembly 412. The linear guide assembly 4112 includes a slider 41121 and a guide rail 41122. One end face of the slider 41121 is connected to the connecting rod assembly 412, and the corresponding other end face of the slider 41121 is connected to the end face of the top plate 413 via the guide rail 41122, or the corresponding other end face of the slider 41121 is connected to the turnover cart body 100 via the guide rail 41122. It should be noted that there are at least two sets of connecting rods 4121, and the two sets of connecting rods 4121 are symmetrically distributed on both sides of the moving assembly 411. Each set of connecting rods 4121 has two rods, which are arranged vertically and cross each other. The two connecting rods 4121 are hinged at the intersection of the two connecting rods 4121 by an external hinge. The first end of one connecting rod 4121 is connected to the slider 41121, and the second end of one connecting rod 4121 is hinged to the end face of the top plate 413. The first end of the other connecting rod 4121 is connected to the slider 41121, and the second end of the other connecting rod 4121 is hinged to the turnover cart body 100. Thus, when the nut 41112 in the lead screw and nut assembly 4111 moves along the lead screw 41111, it drives the slider 41121 to slide along the guide rail 41122, making the height of the connecting rod 4121 adjustable. This makes the height of the top plate 413 adjustable, which is beneficial for the crystal rod 600 to be supported by the bearing mechanism 400 after being flipped by the conversion mechanism 200.

[0041] Furthermore, as shown in the appendix Figure 4 , 6As shown, the rotating mechanism 420 includes a rotating platform 421. A power source is connected to the side of the rotating platform 421. The rotating platform 421 is connected to the support base 430, and the rotating platform 421 drives the support base 430 to rotate. Thus, when the crystal ingot 600 is flipped into place from the conversion mechanism 200, the lifting mechanism 410 in the support mechanism 400 causes the support base 430 to rise or fall, so that the support base 430 can support the crystal ingot 600. Then, the rotating mechanism 420 drives the crystal ingot 600 to rotate. When the wire cutting mechanism 500 cuts the crystal ingot 600, an external force is applied to press the crystal ingot 600 to prevent the crystal ingot 600 from rotating when the wire cutting mechanism 500 cuts the crystal ingot at both ends, thus affecting the cutting of the crystal ingot 600 at both ends.

[0042] It should be noted that when the lifting mechanism 410 is located below the rotating mechanism 420, the rotating platform 421 is located on the upper end face of the top plate 413, and the rotating platform 421 and the upper end face of the top plate 413 are in contact. The end face of the support 430 is V-shaped 431, and the V-shaped 431 contacts the crystal rod 600, which helps the crystal rod 600 to be stably supported by the support 430. In addition, in order to prevent the crystal rod from rotating and affecting the cutting of the crystal rod 600 when the wire cutting mechanism 500 cuts off the beginning and end of the crystal rod 600, a specific method can be adopted, as shown in the attached figure, in one embodiment. Figure 8 As shown, a crystal holder 432 is disposed above the support 430. The crystal holder 432 is connected to the V-shaped 431 on the support 430, and the crystal holder 432 is coated with adhesive, so that after the crystal ingot 600 is placed on the crystal holder 432, the crystal holder 432 and the crystal ingot 600 are bonded together, and the crystal ingot 600 is not easy to wobble, which is beneficial to the wire cutting mechanism 500 in cutting off the beginning and end of the crystal ingot 600. In another embodiment, as shown in the attached... Figure 9As shown, a retainer is provided above the support base 430, corresponding to the support base 430. This allows the crystal ingot 600 to contact the V-shaped support 431 on the support base 430 and be supported by it. The retainer above the support base 430, together with the support base 430, prevents the crystal ingot 600 from shaking, thus facilitating the wire cutting mechanism 500 to cut off the beginning and end of the crystal ingot 600. This saves time in transferring the crystal ingot 600 to the next process. It is worth noting that the crystal ingot 600 comes in 6-inch, 8-inch, and 12-inch sizes. The 6-inch and 8-inch crystal ingots 600 are elongated. When the crystal ingot 600 is placed on the support base 430, both the crystal support 430 and the retainer can be used to fix the crystal ingot 600 and prevent it from shaking during the cutting process. The 12-inch crystal ingot 600 has a short and stout shape. Its relatively heavy weight makes its center of gravity more stable when placed on the support 430. Even without a crystal holder 431 or a corresponding retainer on the support 430, the crystal ingot 600 is less prone to wobbling on the support 430, which facilitates the wire cutting mechanism 500 in cutting off both ends of the crystal ingot 600. This saves time during the transfer of the crystal ingot 600 and shortens the processing flow during crystal ingot processing.

[0043] Regarding the positional relationship between the lifting mechanism 410 and the rotating mechanism 420, in another embodiment, when the lifting mechanism 410 is located above the rotating mechanism 420, the first end face of the rotating platform 421 in the rotating mechanism 420 is connected to the turnover cart body 100, the second end face of the rotating platform 421 is connected to the lifting mechanism 410, the first end face of the bearing seat 430 is connected to the lifting mechanism 410, and the second end face of the bearing seat 430 is connected to the crystal rod 600. This also achieves the purpose of the bearing mechanism 400 being able to both lift and rotate. The lifting mechanism 410 can also take various forms, which will not be illustrated here. Furthermore, to avoid the connecting rod assembly 412 being too long and hindering the lifting function of the bearing mechanism 400, a frame can be provided inside the turnover cart body 100, so that both the lifting mechanism 410 and the rotating mechanism 420 lift and lower along the vertical central axis of the frame.

[0044] Wire cutting mechanism 500, as attached Figure 2 , 3As shown in Figure 7, the wire cutting mechanism 500 is used to cut the crystal ingot 600 in the carrying mechanism 400 at both ends. In one embodiment, the wire cutting mechanism 500 includes a moving stage 510 and a wire cutting power assembly 520. The wire cutting power assembly 520 is mounted on the moving stage 510 and moves under the power of the moving stage 510, thereby cutting the crystal ingot 600 at both ends. It should be noted that during the process of the turnover cart moving the crystal ingot 600 forward, the direction of forward movement is the attached direction. Figure 7 The arrow points in the image. Furthermore, when the wire-cutting mechanism 500 in the transfer cart cuts off the ends of the crystal rod 600, it generates dust or powder. As the transfer cart body 100 moves the crystal rod 600 forward, the wind, under the influence of the wind, will blow towards and attach to the crystal rod. Figure 7 The wind blows in the opposite direction of the arrow, thus dispersing the dust or powder generated during the cutting of the crystal rod 600. This dispersed dust or powder can easily enter the working environment, causing dust or powder to accumulate and affect the surrounding environment. Therefore, to ensure the cleanliness of the external environment, a cover 700 can be installed on the outside of the wire cutting mechanism 500. Under the action of the wind, the cover 700 can collect the dust or powder, and together with the receiving trough 110 on the transfer cart, it can collect the beginning and end of the cut crystal rod 600, thereby contributing to the cleanliness of the surrounding environment.

[0045] Further details are attached. Figure 3As shown, the moving platform 510 includes a first moving platform 511 and a second moving platform 512. The first moving platform 511 can be connected to a power source, which drives the first moving platform 511 to move. The moving direction of the second moving platform 512 is perpendicular to the moving direction of the first moving platform 511. The second moving platform 512 is connected to the first moving platform 511. The second moving platform 512 can be connected to a power source, which drives the second moving platform 512 to move. The second moving platform 512 is connected to the wire cutting power assembly 520, which drives the wire cutting power assembly 520 to move, thereby cutting the crystal ingot 600 at both ends. It should be noted that when the first moving platform 511 moves on the turnover cart body 100, it helps to prevent the crystal ingot 600 from being hit by the wire cutting mechanism 500 under the rotation of the rotating mechanism 420 in the carrying mechanism 400. The movement of the second moving platform 512 facilitates the wire cutting power assembly 520 in cutting the crystal ingot 600. The power source connected to the second moving stage 512 can be a linear module. The linear module is mounted on the first moving stage 511 and connected to the second moving stage 512, thereby driving the second moving stage 512 to move. The wire cutting power assembly 520 includes a driving wheel 521, a driven wheel 522, and a cutting wire 523. The driving wheel 521 rotates under the action of a power source, driving the driven wheel 522 to rotate. The cutting wire 523 is wound around the driving wheel 521 and the driven wheel 522, thereby cutting the crystal ingot 600 end to end under the movement of the wire cutting power assembly 520.

[0046] Working principle / steps:

[0047] As attached Figure 1-7 As shown, after the crystal rod 600 detaches from the robotic arm of the hard-shaft single crystal furnace, it is clamped by the clamping assembly 320. Under the action of the conversion mechanism 200, the crystal rod 600 is changed from a vertical state to a horizontal state and then supported by the bearing mechanism 400. Under the action of the rotating mechanism 420 in the bearing mechanism 400, the crystal rod 600 is driven to rotate, so that the wire cutting mechanism 500 can cut off the beginning and end of the crystal rod 600. The cut-off beginning and end materials are collected through the collection tank 110, and the cover 700 can collect the powder or dust generated when cutting off the beginning and end of the crystal rod 600.

[0048] Technical effects:

[0049] 1. In this embodiment, the crystal ingot 600 comes out of the hard-shaft single crystal furnace, is clamped by the clamping mechanism 300 in the transfer cart, and carried by the carrying mechanism 400. Finally, the crystal ingot 600 is cut off at both ends by the wire cutting mechanism 500. This avoids the need to cut off the head and tail of the crystal ingot 600 before sending it to the next processing point after taking it out of the single crystal furnace. This solves the technical problem of long process flow in the prior art for processing crystal ingot 600 and achieves the technical effect of shortening the process flow when processing crystal ingot 600.

[0050] 2. In this embodiment of the application, the crystal rod 600 is taken out by a turnover vehicle. This can avoid the difference in skill level of manual crystal taking, which may cause the crystal rod 600 to collide during manual crystal taking, affecting the quality of the crystal rod 600. This is beneficial for the crystal rod 600 to enter the next process.

[0051] 3. In this embodiment of the application, the dust or powder generated when the crystal rod 600 is cut off at both ends during the transfer process is covered by the cover 700. In addition, the cut ends of the crystal rod 600 are collected by the collection tank 110, which is conducive to the cleanliness of the surrounding environment.

[0052] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0053] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A single-crystal furnace ingot turnover cart, used for handling ingots, characterized in that, The turnover vehicle includes: The main body of the turnover vehicle; A clamping mechanism is connected to the upper surface of the turnover cart body. The clamping mechanism itself is rotatable and is used to clamp the crystal rod and drive the crystal rod to rotate. A supporting mechanism is connected to the upper surface of the turnover cart body, and the supporting mechanism is located on the side of the clamping mechanism, so that the supporting mechanism can receive the crystal rod that is released from the clamping mechanism; and A wire cutting mechanism is connected to the upper surface of the turnover vehicle body and is located on the side of the carrying mechanism. The wire cutting mechanism is used to cut off the crystal rods in the carrying mechanism at both ends.

2. The single crystal furnace ingot turnover cart as described in claim 1, characterized in that, The turnover vehicle also includes: A conversion mechanism is located on the side of the clamping mechanism. The conversion mechanism is connected to the upper surface of the turnover cart body and is rotatably connected to the clamping mechanism. The conversion mechanism is used to drive the clamping mechanism to rotate.

3. A single crystal furnace ingot turnover cart as described in claim 2, characterized in that, The clamping mechanism includes: A connecting plate is connected to the upper surface of the turnover vehicle body, and the connecting plate is rotatably connected to the conversion mechanism. The connecting plate can rotate under the action of the conversion mechanism. A clamping assembly, located on the side of the connecting plate and connected to the connecting plate, the clamping assembly being used to clamp a crystal ingot; and A support assembly is located below the clamping mechanism, and both the support assembly and the clamping assembly are located on the same side of the connecting plate. The support assembly is connected to the connecting plate and is used to support the crystal rod.

4. A single crystal furnace ingot turnover cart as described in claim 3, characterized in that, The conversion mechanism includes: A rotating shaft, which can be connected to a drive source; A timing belt is fitted onto the connecting plate and the rotating shaft, and the timing belt drives the clamping mechanism to rotate.

5. A single crystal furnace ingot turnover cart as described in claim 1, characterized in that, The bearing mechanism includes: Support base, the support base being used to support the crystal rod; A lifting mechanism, which acts on a support seat, causing the support seat to move up and down; and A rotating mechanism acts on a support seat and is connected to a lifting mechanism, causing the rotating mechanism to drive the support seat to rotate.

6. A single crystal furnace ingot turnover cart as described in claim 5, characterized in that, The lifting mechanism includes: Mobile components; A linkage assembly comprising multiple connecting rods arranged in a cross configuration, connected at their intersections by external hinges. The bottom end of the linkage assembly is connected to a movable component, allowing the height of the linkage assembly to be adjusted by the movement of the movable component. A top plate is located above the connecting rod assembly. The first end face of the top plate is connected to the upper end of the connecting rod assembly, and the second end face of the top plate is connected to the bearing seat.

7. A single crystal furnace ingot turnover cart as described in claim 5, characterized in that, The rotating mechanism includes: A rotating platform is provided, with a power source connected to its side. The rotating platform is connected to the support base, and the rotating platform drives the support base to rotate.

8. A single crystal furnace ingot turnover cart as described in claim 6, characterized in that, The moving component includes: A lead screw and nut assembly, which is connected to the main body of the turnover cart; A linear guide assembly is provided, which is connected to the connecting rod assembly. The linear guide assembly drives the connecting rod assembly to rise and fall under the action of the lead screw and nut assembly.

9. A single crystal furnace ingot turnover cart as described in claim 1, characterized in that, The wire cutting mechanism includes: Mobile station; A wire-cutting power assembly is mounted on the moving platform. The wire-cutting power assembly moves under the power of the moving platform, thereby cutting off the crystal rod from both ends.

10. A single crystal furnace ingot turnover cart as described in claim 9, characterized in that, The mobile station includes: A first mobile station, which can be connected to a power source to drive the first mobile station to move; The second moving stage moves in a direction perpendicular to that of the first moving stage. The second moving stage is connected to the first moving stage and can be connected to a power source to drive its movement. The second moving stage is also connected to the wire-cutting power assembly, which moves to cut the crystal rod at both ends.

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