Pressure sensor based on triboelectric nanogenerator and preparation method and application thereof

Abstract

The application discloses a pressure sensor based on a friction nanogenerator and a preparation method and application thereof, and comprises a positive electricity generation end and a negative electricity generation end, wherein the positive electricity generation end comprises a substrate I and a triboelectric positive material layer, the triboelectric positive material layer is attached to the substrate I, the negative electricity generation end comprises a substrate II, a support and a triboelectric negative material film, the plane end of at least one support is fixed on the substrate II, the convex end of the support covers the triboelectric negative material film, the triboelectric negative material film is provided with uniform protrusions, and the protrusions on the highest point of the convex end of the support are in contact with the triboelectric positive material layer. The protrusions prepared on the surface of the triboelectric negative material film can effectively reduce the detection limit of the sensor, improve the detection sensitivity, and expand the detection range.

Description

Technical Field

[0001] This application relates to a pressure sensor based on a triboelectric nanogenerator, its fabrication method, and its application, belonging to the field of novel sensor technology. Background Technology

[0002] In 2012, Wang Zhonglin's team published "Flexible triboelectric generator," primarily focusing on triboelectric nanogenerators based on contact electrification and electrostatic inductive coupling. These generators have achieved widespread application in energy harvesting and sensor design. Most pressure sensors based on triboelectric nanogenerators are suitable for low-pressure ranges (<1 kPa), while those applied to high-pressure ranges (>1 kPa) suffer from high detection limits and poor sensitivity. Furthermore, most of these pressure sensors rely on wired connections, causing inconvenience for users. Summary of the Invention

[0003] To address the aforementioned issues, this application provides a method for fabricating a pressure sensor with low detection limit, high sensitivity, and wide detection range, as well as a wireless sensing array composed of 16 pressure sensors for motion detection.

[0004] According to one aspect of this application, a pressure sensor based on a triboelectric nanogenerator is provided, including a positive charge generation end and a negative charge generation end;

[0005] The positive charge generating end includes a substrate I and a triboelectric positive material layer, wherein the triboelectric positive material layer is attached to the substrate I;

[0006] The negative charge generating end includes a substrate II, a support body, and a triboelectrone material film. At least one planar end of the support body is fixed on the substrate II, and the convex end of the support body covers the triboelectrone material film.

[0007] The triboelectrone material film has uniform protrusions;

[0008] The protrusion at the highest point of the convex end of the support is in contact with the triboelectric positive material layer.

[0009] In a static state, the triboelectric positive material layer and the protrusions have only a very small contact area. Under the action of external force, the triboelectric negative material film deforms and comes into contact with or separates from the triboelectric positive material layer. An electrical signal is generated based on this change in relative area. In this case, the protrusions on the triboelectric negative material film not only reduce the detection limit but also improve the detection sensitivity.

[0010] Optionally, the triboelectrone material film comprises nanoparticles.

[0011] Optionally, the nanoparticles are selected from at least one of barium titanate, carbon nanotubes, zinc stannate, silicon dioxide, titanium dioxide, aluminum oxide, zinc oxide, silicon nitride, and aluminum nitride.

[0012] Optionally, the triboelectric positive material layer is a conductive material.

[0013] Optionally, the material of the triboelectric positive material layer is selected from at least one of gold, silver, copper, iron, nickel, aluminum, carbon fiber, and graphite.

[0014] Optionally, the substrate I is selected from at least one of polymethyl methacrylate, polyimide, polyetherimide, perfluoroethylene propylene copolymer, and polyethylene terephthalate.

[0015] Optionally, the substrate II is selected from at least one of polymethyl methacrylate, polyimide, polyetherimide, perfluoroethylene propylene copolymer, and polyethylene terephthalate.

[0016] Optionally, the protrusion is a micron-sized cylindrical protrusion.

[0017] Optionally, the diameter of the protrusion is 50-300 μm, the height of the protrusion is 150-900 μm, and the interval between adjacent protrusions is 50-500 μm.

[0018] Optionally, the diameter of the protrusion is selected from any value or a range between two values ​​from 50μm, 100μm, 150μm, 200μm, and 300μm.

[0019] Optionally, the height of the protrusion is selected from any value or a range between two values ​​of 150μm, 300μm, 450μm, 600μm, 750μm, and 900μm.

[0020] Optionally, the spacing between adjacent protrusions is selected from any value of 150μm, 300μm, 450μm, 600μm, 750μm, 900μm or a range between two values.

[0021] Optionally, the thickness of the triboelectrone material film is 50–100 μm.

[0022] Optionally, the thickness of the triboelectrone material film is selected from any value or a range between 50 μm, 60 μm, 70 μm, 90 μm, and 100 μm.

[0023] Optionally, the thickness of the triboelectric positive material film is 50–100 μm.

[0024] Optionally, the thickness of the triboelectric positive material film is selected from any value of 50 μm, 65 μm, 80 μm, 100 μm, or a range between two values.

[0025] Optionally, the support body is selected from a semi-cylindrical support body or a hemispherical support body, wherein setting the support body as a semi-cylindrical or hemispherical shape can increase the detection range.

[0026] According to another aspect of this application, a method for manufacturing a pressure sensor is provided, comprising the following steps:

[0027] a) A triboelectric positive material layer is bonded to substrate I to obtain a positively charged terminal;

[0028] b) Pour a mixed solution I containing a triboelectrone polymer, nanoparticles, and solvent I into a mold with grooves, and after curing I, obtain a triboelectrone film.

[0029] c) Pour the mixed solution II containing polymer and solvent II into the support mold, and obtain the support after II is cured;

[0030] d) The planar end and the protruding end of the support are respectively bonded to the substrate II and the triboelectric material film with a fixing adhesive to obtain the negative charge generating end.

[0031] Optionally, in step b), the groove diameter of the mold is 50-300 μm, the groove depth is 150-900 μm, and the interval between adjacent grooves is 50-500 μm.

[0032] Optionally, in step b), the groove diameter of the mold is any value or a range between two values ​​from 50μm, 100μm, 150μm, 200μm, and 300μm.

[0033] Optionally, in step b), the groove depth of the mold is any value or a range between two values ​​from 150μm, 300μm, 450μm, 600μm, 750μm, and 900μm.

[0034] Optionally, in step b), the interval between adjacent molds is any value among 50μm, 100μm, 135μm, 250μm, 400μm, and 500μm, or a range between two values.

[0035] Optionally, the support mold is a semi-cylindrical or hemispherical shape.

[0036] Optionally, in step a), the bonding method between the triboelectric positive material layer and the substrate I is selected from one of vacuum evaporation, sputtering, chemical vapor deposition, and spin coating.

[0037] Optionally, the curing temperature of the first curing step is 50–180°C, and the curing time is 0.5–6 h.

[0038] Optionally, the curing temperature I is selected from any two values ​​or a range between two values ​​from 50℃, 70℃, 100℃, 150℃, and 180℃.

[0039] Optionally, the curing time I is selected from any value of 0.5h, 1h, 2h, 4h, 6h or a range between two values.

[0040] Optionally, the curing temperature of the second stage is 50–180°C, and the curing time is 0.5–6 h.

[0041] Optionally, the curing temperature II is selected from any two values ​​or a range between two values ​​from 50°C, 70°C, 100°C, 150°C, and 180°C.

[0042] Optionally, the curing time II is selected from any value among 0.5h, 1h, 2h, 4h, and 6h, or a range between two values.

[0043] Optionally, the triboelectrone polymer is selected from at least one of polytetrafluoroethylene, polystyrene, polydimethylsiloxane, polyvinyl chloride, polyvinylidene fluoride, polyurethane, polyvinylidene fluoride, polytrifluoroethylene, and polyethersulfone.

[0044] Optionally, in step c), the polymer is selected from at least one of polytetrafluoroethylene, polystyrene, polydimethylsiloxane, polyvinyl chloride, polyvinylidene fluoride, polyurethane, polyvinylidene fluoride, polytrifluoroethylene, and polyethersulfone.

[0045] Optionally, in the mixed solution I, the mass ratio of the triboelectrone polymer to the nanoparticles is 100:(1-50).

[0046] Optionally, in the mixed solution I, the mass ratio of the triboelectrone polymer to the nanoparticles is selected from any ratio or a range between two ratios of 100:1, 100:1.5, 100:3, 100:5, and 100:50.

[0047] Optionally, the concentration of the polymer in the mixed solution II is 3 wt% to 10 wt%.

[0048] Optionally, the concentration of the polymer in the mixed solution II is selected from any value of 3 wt%, 3.8 wt%, 6 wt%, 9 wt%, 10 wt%, or a range between two values.

[0049] Optionally, solvent I is selected from at least one of water, benzene, toluene, xylene, pentane, hexane, octane, chlorobenzene, dichlorobenzene, dichloromethane, trichloromethane, tetrahydrofuran, isopropanol, and hexafluoroisopropanol.

[0050] Optionally, the solvent II is selected from at least one of water, benzene, toluene, xylene, pentane, hexane, octane, chlorobenzene, dichlorobenzene, dichloromethane, trichloromethane, tetrahydrofuran, isopropanol, and hexafluoroisopropanol.

[0051] Optionally, the fixing adhesive is a hot melt adhesive or a pressure-sensitive adhesive.

[0052] As a specific embodiment of this application, the pressure sensor based on a nanogenerator includes the following steps:

[0053] Step 1: Cover the substrate surface with a thin film as a triboelectric positive material.

[0054] Step 2: Add the polymer and nanoparticles used to prepare the triboelectric negative material to the appropriate solvent, and form a single polymer solution or a mixed solution containing two or more polymers by stirring and sonication.

[0055] Step 3: Pour the solution obtained in step 2 into a mold with columnar grooves, and obtain a polymer film by degassing and curing.

[0056] Step 4: Add the polymer used to prepare the semi-cylinder to the appropriate solvent, and form a single polymer solution or a mixed solution containing two or more polymers by stirring and sonication.

[0057] Step 5: Pour the solution obtained in step 4 into the mold, and obtain a semi-cylinder through degassing and solidification.

[0058] Step 6: Use hot melt adhesive or pressure-sensitive adhesive to tightly bond the semi-cylinder and the polymer film together.

[0059] Step 7: Use hot melt adhesive or pressure-sensitive adhesive to firmly bond the semi-cylinder and the substrate together.

[0060] According to another aspect of this application, a motion detection device for a wireless sensor array is provided, including the pressure sensor described above and the pressure sensor prepared by the method described above.

[0061] Optionally, the electrical signal data output by the pressure sensor is wirelessly transmitted to a mobile phone.

[0062] Specifically, by integrating a sensor array onto the surface of the boxing pile, the wireless sensing system can transmit and save the force, location, and frequency of the athlete's strikes to a mobile phone, providing effective data for optimizing the athlete's movements.

[0063] The beneficial effects that this application can produce include:

[0064] 1) The pressure sensor provided in this application can effectively detect changes in external force, has a low detection limit, can detect weak forces, and also has a large detection range, making it applicable to various scenarios.

[0065] 2) The pressure sensor provided in this application, by incorporating nanoparticles, can effectively improve the output performance of the triboelectric nanogenerator and enhance the sensor's sensitivity. Specifically, the optimal addition ratio of barium titanate in polydimethylsiloxane is 100:3, at which point the open-circuit voltage increases by 104%, the short-circuit current increases by 92%, and the short-circuit charge increases by 85%.

[0066] 3) One application of the pressure sensor provided in this application, a motion detection device of a wireless sensor array, has better portability and has a wide range of applications in the field of motion detection. Attached Figure Description

[0067] Figure 1 This is a schematic diagram of the pressure sensor structure based on a triboelectric nanogenerator in this application;

[0068] Figure 2 This is a partial method diagram of the pressure sensor support based on a triboelectric nanogenerator in this application;

[0069] Figure 3 The effect of adding different mass ratios of barium titanate (100:0, 100:1.5, 100:3, 100:5) to polydimethylsiloxane in Comparative Example 1 and Examples 2 to 4 of this application on the open-circuit voltage of triboelectric nanogenerators;

[0070] Figure 4 The effect of adding different mass ratios of barium titanate (100:0, 100:1.5, 100:3, 100:5) to polydimethylsiloxane in Comparative Example 1 and Examples 2 to 4 of this application on the short-circuit current of triboelectric nanogenerators;

[0071] Figure 5 The effect of adding different mass ratios of barium titanate (100:0, 100:1.5, 100:3, 100:5) to polydimethylsiloxane in Comparative Example 1 and Examples 2 to 4 of this application on the short-circuit charge of triboelectric nanogenerators;

[0072] Figure 6 The sensitivity curve of the pressure sensor described in Embodiment 1 of this application;

[0073] Figure 7 A schematic diagram of the sensing application example of this application;

[0074] Figure 8 The working principle of wireless sensing is illustrated in the application example of this application.

[0075] List of components and reference numerals:

[0076] 1. Positive charge generation end, 2. Negative charge generation end, 3. Substrate I, 4. Triboelectric positive material layer, 5. Support body, 51. Planar end, 52. Convex end, 6. Triboelectric negative material film, 61. Protrusion, 7. Substrate II. Detailed Implementation

[0077] The present application is described in detail below with reference to the embodiments, but the present application is not limited to these embodiments.

[0078] Unless otherwise specified, all raw materials used in the embodiments of this application were purchased through commercial channels.

[0079] The analysis method in the embodiments of this application is as follows:

[0080] The open-circuit voltage was analyzed using a Keithley 6514 electrometer and a P01-37X120-C / C1100 linear motor.

[0081] The short-circuit current was analyzed using a Keithley 6514 electrometer and a P01-37X120-C / C1100 linear motor.

[0082] Short-circuit charges were analyzed using a Keithley 6514 electrometer and a P01-37X120-C / C1100 linear motor.

[0083] The sensitivity of the pressure sensor was analyzed using a Keithley 6514 electrometer, a P01-37X120-C / C1100 linear motor, and a JHBS-500N pressure sensor.

[0084] Example 1

[0085] like Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a pressure sensor based on a triboelectric nanogenerator, including a positive charge generation terminal 1 and a negative charge generation terminal 2.

[0086] The positive charge generating end 1 includes a substrate I 3 and a triboelectric positive material layer 4, the triboelectric positive material layer 4 being attached to the substrate I 3;

[0087] The negative charge generating end 2 includes a substrate II 7, a support 5, and a triboelectric material film 6. At least one planar end 51 of the support 5 is fixed on the substrate II 7, and the convex end 52 of the support 5 covers the triboelectric material film 6.

[0088] The triboelectrone material film 6 has uniform protrusions 61.

[0089] The protrusion 61 at the highest point of the convex end 52 of the support 5 is in contact with the triboelectric positive material layer 4.

[0090] In a specific embodiment, the protrusion 61 is a micron-sized cylindrical protrusion with a diameter of 300 μm, a height of 900 μm, and a spacing of 135 μm between adjacent protrusions. By setting multiple protrusions 61 on the triboelectrone material film 6, the detection limit can be reduced and the detection sensitivity can be improved.

[0091] In a specific embodiment, the thickness of the triboelectrone material film 6 is 70 μm;

[0092] The thickness of the triboelectric positive material layer 4 is 80 μm.

[0093] In a specific embodiment, the support 5 is selected from a semi-cylindrical support or a hemispherical support. By setting the support 5 to be semi-cylindrical or hemispherical, the detection range of the pressure sensor can be effectively increased.

[0094] Example 2

[0095] The fabrication method of a pressure sensor based on a triboelectric nanogenerator specifically includes the following steps:

[0096] Step 1: Apply an 80μm thick copper film to a polymethyl methacrylate (PMMA) plate (size: 50mm×50mm×2mm) using magnetron sputtering technology.

[0097] Step 2: Disperse polydimethylsiloxane (10g), crosslinking agent (2g), and barium titanate particles (0.36g, size 100nm) in chloroform (300g) by stirring and ultrasonication to form mixed solution I, wherein the mass ratio of polydimethylsiloxane to nanoparticles in mixed solution I is 100:3.

[0098] Step 3: Then, the mixed solution I obtained in Step 2 is poured into a mold with columnar grooves for degassing and curing. The curing temperature is 70℃, and the curing time is 1 hour. The thickness of the cured film is 70μm, and the diameter of the micrometer-like columns on the surface of the cured film is 300μm, the length is 900μm, and the spacing is 135μm.

[0099] Step 4: Disperse polydimethylsiloxane (2.85g) and crosslinking agent (0.15g) in chloroform (75g) by stirring to prepare mixed solution II.

[0100] Step 5: Pour the mixed solution II obtained in Step 4 into the support mold, and obtain three semi-cylinders through degassing and curing. The height of each semi-cylinder is 40 mm and the radius is 4 mm. The curing temperature is 100℃ and the curing time is 2 hours.

[0101] Step 6: Use pressure-sensitive adhesive to tightly bond the semi-cylinder and the polymer film together.

[0102] Step 7: Use pressure-sensitive adhesive to firmly bond the semi-cylinder and the substrate.

[0103] Example 3

[0104] Example 3 provides a method for preparing a pressure sensor. The preparation steps are the same as in Example 2, except that the mass ratio of polydimethylsiloxane to nanoparticles in the mixed solution I is 100:1.5.

[0105] Example 4

[0106] Example 4 provides a method for preparing a pressure sensor. The preparation steps are the same as in Example 2, except that the mass ratio of polydimethylsiloxane to nanoparticles in the mixed solution I is 100:5.

[0107] Comparative Example 1

[0108] Comparative Example 1 provides a method for preparing a pressure sensor, with the same preparation steps as in Example 2, except that the mixed solution I does not contain nanoparticles.

[0109] The open-circuit voltage, short-circuit current, and short-circuit charge of the triboelectric nanogenerators of Comparative Example 1 and Examples 2 to 4 were measured using an electrometer (Keithley 6514) and a linear motor (P01-37X120-C / C1100), respectively. The effects of different mass ratios of nanoparticles in mixed solution I on the triboelectric nanogenerators are as follows: Figures 3 to 5 As shown, the addition of barium titanate can improve the output performance of the triboelectric nanogenerator and enhance the sensitivity of the sensor. The optimal addition ratio of barium titanate to polydimethylsiloxane is 100:3, at which point the open-circuit voltage increases by 104%, the short-circuit current increases by 92%, and the short-circuit charge increases by 85%.

[0110] The sensitivity of the pressure sensor was tested using a Keithley 6514 electrometer, a P01-37X120-C / C1100 linear motor, and a JHBS-500N pressure sensor. The sensitivity curve of the pressure sensor was obtained, as shown below. Figure 6 As shown, the pressure sensor has a low detection limit, and the voltage and pressure have a good linear relationship in both pressure ranges.

[0111] Application Example 1

[0112] This invention also provides a wireless sensing array consisting of 16 pressure sensors for motion detection. When an external force applies a certain stimulus to the sensors, the mobile phone can display and record the magnitude, location, and frequency of the force.

[0113] The array consists of three parts: data acquisition, data processing, and data display. Using a microcontroller as its core, it acquires signals from the pressure sensor array at an appropriate frequency, and then transmits the sensor signals to a mobile phone via Bluetooth for data display. A schematic diagram of the overall system structure is shown below. Figure 7 As shown.

[0114] The specific working principle is as follows: Figure 8 As shown, when the sensor array is stimulated by an external force, the voltage signal acquisition circuit collects the signal and outputs it to the A / D conversion circuit. The analog signal is converted into a digital signal by the A / D conversion circuit and input to the microcontroller. The microcontroller processes the received digital signal and then transmits it to the mobile phone for real-time display via Bluetooth.

[0115] By integrating a sensor array onto the surface of the boxing pile, the wireless sensing system can transmit and save the force, location, and frequency of an athlete's strikes to their mobile phone during training, providing effective data for optimizing the athlete's movements.

[0116] The above description is merely a few embodiments of this application and is not intended to limit this application in any way. Although this application discloses preferred embodiments as described above, it is not intended to limit this application. Any changes or modifications made by those skilled in the art without departing from the scope of the technical solution of this application using the disclosed technical content are equivalent to equivalent implementation cases and fall within the scope of the technical solution.

Claims

1. A pressure sensor based on a triboelectric nanogenerator, characterized in that, Includes a positive voltage generating terminal and a negative voltage generating terminal; The positive charge generating end includes a substrate I and a triboelectric positive material layer, wherein the triboelectric positive material layer is attached to the substrate I; The substrate I is selected from at least one of polymethyl methacrylate, polyimide, polyetherimide, perfluoroethylene propylene copolymer, and polyethylene terephthalate; The negative charge generating end includes a substrate II, at least one semi-cylindrical or hemispherical support and a triboelectric negative material film. The planar end of the support is fixed on the substrate II, and the convex end of the support is covered with the triboelectric negative material film. The substrate II is selected from at least one of polymethyl methacrylate, polyimide, polyetherimide, perfluoroethylene propylene copolymer, and polyethylene terephthalate; The triboelectrone material film comprises a triboelectrone polymer and nanoparticles, wherein the mass ratio of the triboelectrone polymer to the nanoparticles is 100:(1~5); the triboelectrone polymer is selected from polydimethylsiloxane; and the nanoparticles are selected from barium titanate. The triboelectrone material film has uniform cylindrical micron-sized protrusions; the diameter of the protrusions is 200~300μm, the height of the protrusions is 750~900μm, and the interval between adjacent protrusions is 50~150μm. The protrusion at the highest point of the convex end of the support is in contact with the triboelectric positive material layer; The triboelectric positive material layer is a conductive material.

2. The pressure sensor according to claim 1, characterized in that, The material of the triboelectric positive material layer is selected from at least one of gold, silver, copper, iron, nickel, aluminum, carbon fiber, and graphite.

3. The pressure sensor according to claim 1, characterized in that, The thickness of the triboelectrone material film is 50~100μm.

4. The pressure sensor according to claim 1, characterized in that, The thickness of the triboelectric positive material layer is 50~100μm.

5. The pressure sensor according to claim 1, characterized in that, The mass ratio of the triboelectronegative polymer to the nanoparticles is 100:

3.

6. The pressure sensor according to claim 1, characterized in that, The diameter of the protrusion is 300 μm, the height of the protrusion is 900 μm, and the interval between adjacent protrusions is 135 μm.

7. A method for manufacturing a pressure sensor according to any one of claims 1 to 6, characterized in that, Includes the following steps: a) A triboelectric positive material layer is bonded to substrate I to obtain a positively charged terminal; b) A mixed solution I containing a triboelectrone polymer, nanoparticles, and solvent I is poured into a mold with columnar grooves. After curing I, a triboelectrone material film is obtained. The groove diameter of the mold is 200~300μm, the groove depth is 750~900μm, and the interval between adjacent grooves is 50~150μm. c) Pour the mixed solution II containing polymer and solvent II into a semi-cylindrical or hemispherical support mold, and obtain the support after II is cured; d) The planar end and the protruding end of the support are respectively bonded to the substrate II and the triboelectric material film with a fixing adhesive to obtain the negative charge generating end.

8. The preparation method according to claim 7, characterized in that, In step a), the bonding method between the triboelectric positive material layer and the substrate I is selected from one of vacuum evaporation, sputtering, chemical vapor deposition, and spin coating.

9. The preparation method according to claim 7, characterized in that, The curing temperature of the first stage is 50~180 ℃, and the curing time is 0.5~6h.

10. The preparation method according to claim 7, characterized in that, The curing temperature of the second stage is 50~180 ℃, and the curing time is 0.5~6h.

11. The preparation method according to claim 7, characterized in that, In step c), the polymer is selected from at least one of polytetrafluoroethylene, polystyrene, polydimethylsiloxane, polyvinyl chloride, polyvinylidene fluoride, polyurethane, polyvinylidene fluoride, polytrifluoroethylene, and polyethersulfone.

12. The preparation method according to claim 7, characterized in that, In the mixed solution I, the mass ratio of the triboelectrone polymer to the nanoparticles is 100:(1~5).

13. The preparation method according to claim 7, characterized in that, The concentration of the polymer in the mixed solution II is 3wt%~10wt%.

14. The preparation method according to claim 7, characterized in that, Solvent I is selected from at least one of water, benzene, toluene, xylene, pentane, hexane, octane, chlorobenzene, dichlorobenzene, dichloromethane, trichloromethane, tetrahydrofuran, isopropanol, and hexafluoroisopropanol.

15. The preparation method according to claim 7, characterized in that, Solvent II is selected from at least one of water, benzene, toluene, xylene, pentane, hexane, octane, chlorobenzene, dichlorobenzene, dichloromethane, trichloromethane, tetrahydrofuran, isopropanol, and hexafluoroisopropanol.

16. The preparation method according to claim 7, characterized in that, The fixing adhesive is a hot melt adhesive or a pressure-sensitive adhesive.

17. The preparation method according to claim 7, characterized in that, In the mixed solution I, the mass ratio of the triboelectrone polymer to the nanoparticles is 100:

3.

18. The preparation method according to claim 7, characterized in that, In step b), the groove diameter of the mold is 300 μm, the groove depth is 900 μm, and the interval between adjacent grooves is 135 μm.

19. A motion detection device for a wireless sensor array, characterized in that, The pressure sensor includes any one of claims 1 to 6 or a pressure sensor obtained by the preparation method according to any one of claims 7 to 18.

20. The motion detection device according to claim 19, characterized in that, The electrical signal data output by the pressure sensor is transmitted wirelessly to the mobile phone.

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