控制方法和控制装置
By installing a temperature sensor in the film-forming device and using a predictive model to adjust the heater power, the problem of temperature control delay caused by heat transfer was solved, achieving rapid and effective temperature control, avoiding overheating, and improving productivity.
CN115505909BActive Publication Date: 2026-07-17TOKYO ELECTRON LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2022-05-31
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In film-forming equipment, the time consumed by heat transfer leads to a delay in temperature control, resulting in overheating inside the processing container and affecting productivity.
Method used
By installing a temperature sensor in the film-forming device to obtain internal and external temperatures, using a predictive model to predict future temperatures, and adjusting the heater power to avoid overheating, rapid temperature control can be achieved.
Benefits of technology
This effectively avoids overheating within the processing container, improves productivity, and reduces temperature control delays.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN115505909B_ABST
Abstract
本发明提供能避免成膜装置的处理容器内的过升温的控制方法和控制装置。能在被收纳在管状部件内的基片上形成膜的成膜装置中的控制方法包括下述步骤：获取管状部件内的第1温度传感器测量的第1温度；基于获取的第1温度计算向配置在处理容器内的加热部输出的使得第1温度接近目标温度的第1功率；获取管状部件外且处理容器内的第2温度传感器测量的第2温度；基于获取的第2温度计算向加热部输出的使得第2温度接近温度上限值的第2功率；基于至少能预测第2温度的预测模型，根据获取的第2温度计算规定时间后的第2温度的预测值；与计算出的第2温度的预测值相应地向加热部输出第1功率和第2功率中的任一者；以规定周期反复进行上述各步骤。
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