An electrochemical deposition integrated device for preparing a mask based on fused deposition

Abstract

The application discloses an electrochemical deposition integrated device for preparing a mask based on fused deposition, which comprises two support frames arranged in parallel with each other, a first driving mechanism fixedly arranged at the top of one support frame, and a second driving mechanism fixedly arranged at the top of the other support frame, wherein a cantilever system is threadedly connected between the first driving mechanism and the second driving mechanism, a workbench is arranged below the cantilever system, and a base body is arranged at the top of the workbench. The application can realize the layered printing deposition of various models, and can also ensure the uniformity and the compactness of the overall structure of the deposited model by adjusting the electrochemical deposition parameters. Meanwhile, the deposition is carried out in the form of super-discrete fine flow, the efficiency is relatively high, and the overall structure and the technological process are simple, so that the operation is simplified and the cost is reduced.

Description

Technical Field

[0001] This invention belongs to the field of electrochemical additive manufacturing technology, and in particular relates to an integrated electrochemical deposition device based on fused deposition to prepare a mask. Background Technology

[0002] Electrochemical deposition has a long history of research, and its theory forms the basis of traditional industrial processes such as metal electrolytic smelting, electroplating, and electroforming. Today, it also has significant applications in guiding the fabrication of nanoelectronic devices and the development of novel materials with unconventional properties. In recent years, with the continuous deepening of related theoretical and experimental research, electrochemical deposition technology has made great progress, and the deposition methods have become increasingly diverse, mainly including direct current electrodeposition, pulsed electrodeposition, jet electrodeposition, and composite electrodeposition.

[0003] The main principle of electrochemical deposition is to use a conductive metal material as the cathode, with a solution of the material to be deposited (which can be a single metal ion solution or a mixed solution of multiple metal ions) containing a certain concentration on its surface. The solution contacts the anode to form a circuit. By controlling the temperature, pH of the deposition solution, deposition current, and potential, the metal ions in the deposition solution are reduced to atoms on the cathode surface and deposited onto it to prepare the desired thin film or coating of a certain thickness. Using electrochemical deposition to prepare thin films or coatings has the following advantages: it can deposit uniform thin films or coatings on various complex substrates, and can usually be carried out at room temperature or slightly above room temperature; the amount of deposited material is controlled by Faraday's law, and the thickness, chemical composition, and structure of the deposited layer can be precisely controlled by controlling the process conditions; it requires less equipment investment, has a simple process, is easy to operate, is environmentally safe, and offers flexible production methods, making it a highly efficient and economical additive manufacturing method.

[0004] Fused deposition modeling (FDM) technology first uses CAD modeling software to construct a three-dimensional model, then uses a computer to slice and process it into corresponding geometric data. Various thermoplastic filament materials are used as the processing material, which are fed to the nozzle through a filament feeding device. The nozzle is heated to high temperature to melt the filament material, and then ejected from the end nozzle. The computer controls the movement of the nozzle based on the converted geometric data to print the desired shape.

[0005] Spray electrochemical deposition primarily involves applying a certain voltage between the substrate (cathode) and the nozzle (anode), while simultaneously spraying the deposition solution at high speed onto the substrate surface. Within the sprayed area, the anode and cathode form a circuit through the deposition solution, thereby causing electrochemical deposition on the substrate surface. During spray electrodeposition, the electrodeposition solution is sprayed at high speed from the anode nozzle onto the cathode workpiece surface at a certain flow rate and pressure, which not only mechanically activates the coating but also effectively reduces the thickness of the diffusion layer.

[0006] Chinese patent application number 201910643332.4 discloses an electrochemical 3D printing device and method for metal matrix composite parts. This method involves drawing metal filaments through a nozzle, dissolving and depositing them simultaneously in an electroplating solution to print the desired solid layer by layer. This method improves many properties of single metal materials and reduces the production cost of metal composite parts. However, the sharpened metal filaments used in this method are relatively difficult to manufacture, and the moving speed is difficult to control during the simultaneous dissolution and deposition process.

[0007] Chinese patent application number 201710021228.2 discloses a method for manufacturing an integrated structural circuit component based on fused deposition modeling (FDM) technology. This method involves creating a three-dimensional model, reserving positions for conductive channels, and then using a dual-nozzle FDM machine to print layer-by-layer to form the component. Finally, the component is immersed in a copper plating solution for electroplating, filling the reserved channels with metallic copper. This method can achieve integrated printing of complex three-dimensional circuits within structural components, and the process is simple. However, this method can only electroplat smaller conductive channels within the component, and immersing the entire component in the plating solution makes it difficult to control the plating morphology and quality, resulting in relatively low efficiency.

[0008] Chinese Patent Application No. 201910160455.2 discloses a jet electrodeposition 3D micro-metal additive manufacturing apparatus. This method uses a micro-anode platinum electrode to guide the electrodeposition position and control the flow rate of the plating bath, enabling metal ions to be deposited layer by layer on the substrate. The micro-anode platinum electrode in this apparatus can generate locally high current densities, accelerating the additive manufacturing speed of micro-three-dimensional components and also enabling variations in the constructed structure. However, this apparatus can only process micro-three-dimensional components and cannot process structures with larger morphologies. Summary of the Invention

[0009] The purpose of this invention is to provide an integrated electrochemical deposition device based on fused deposition to prepare a mask. The device uses fused deposition to prepare a model mask in layers, and then performs electrochemical deposition in layers to prepare a complete model. This method can prepare three-dimensional models with various morphologies, and can also make the model structure after deposition uniform, neat and dense with good density. It is highly efficient and can also realize the layered deposition of various single metals and alloys.

[0010] To achieve the above objectives, the present invention provides the following solution: an integrated electrochemical deposition device for preparing masks based on fused deposition, comprising two parallel support frames, a first driving mechanism fixedly mounted on the top of one support frame, and a second driving mechanism fixedly mounted on the top of the other support frame, wherein the first driving mechanism and the second driving mechanism are connected by a common threaded cantilever system, a worktable is provided below the cantilever system, and a substrate is provided on the top of the worktable;

[0011] The cantilever system includes a first cantilever and a second cantilever that are parallel to each other. The two ends of the first cantilever and the second cantilever are threadedly connected to the first drive mechanism and the second drive mechanism, respectively. The top end of the first cantilever is movably connected to a fused deposition nozzle through a first translation and lifting mechanism. The top end of the second cantilever is movably connected to an electrochemical deposition nozzle through a second translation and lifting mechanism. The first translation and lifting mechanism and the second translation and lifting mechanism have the same structure.

[0012] The first drive mechanism, the second drive mechanism, the first translation and lifting mechanism, the second translation and lifting mechanism, the electrochemical deposition nozzle, and the molten deposition nozzle are electrically connected to a controller.

[0013] Preferably, the first drive mechanism includes a first lead screw and a second lead screw that are parallel to each other. The two ends of the first lead screw and the second lead screw are respectively rotatably connected to a first fixed bracket. The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. One end of the first lead screw is fixedly connected to the output shaft of a first motor. The end of the second lead screw away from the first motor is fixedly connected to the output shaft of a second motor. The first motor, the second motor and the controller are electrically connected.

[0014] Preferably, the second drive mechanism includes a third lead screw and a fourth lead screw that are parallel to each other. The first fixed bracket is rotatably connected to both ends of the third lead screw and the fourth lead screw. The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. The output shaft of the third motor is fixedly connected to one end of the third lead screw. The output shaft of the fourth motor is fixedly connected to the end of the fourth lead screw away from the third motor. The third motor and the fourth motor are electrically connected to the controller.

[0015] Preferably, the second lead screw and the third lead screw are arranged close to each other, the first lead screw is located on the side of the second lead screw away from the third lead screw, the fourth lead screw is located on the side of the third lead screw away from the second lead screw, the two ends of the first cantilever are threadedly connected to the second lead screw and the third lead screw respectively, and the two ends of the second cantilever are threadedly connected to the first lead screw and the fourth lead screw respectively.

[0016] Preferably, the first translational lifting mechanism includes a horizontal moving part, which is fixedly mounted on the top of the first cantilever, and a vertical lifting part is fixedly connected to the horizontal moving part. The molten deposition nozzle is fixedly connected to the bottom end of the vertical lifting part.

[0017] Preferably, the horizontal moving part includes a fifth lead screw, with second fixed brackets rotatably connected to both ends of the fifth lead screw. The bottom end of the second fixed bracket is fixedly connected to the top end of the first cantilever. The output shaft of a fifth motor is fixedly connected to one end of the fifth lead screw. A first slider is threaded onto the fifth lead screw. The vertical lifting part is fixedly connected to the first slider. A first slide rail is fixedly connected to the top end of the first cantilever. The first slide rail is located between the two second fixed brackets. A first slide groove adapted to the first slide rail is opened at the bottom end of the first slider. The first slider slides in contact with the first slide rail. The fifth motor is electrically connected to the controller.

[0018] Preferably, the vertical lifting part includes a U-shaped connecting plate, the outer wall of the U-shaped connecting plate is fixedly connected to the first slider, a sixth lead screw is rotatably connected between the top and bottom walls of the U-shaped connecting plate, the top of the sixth lead screw is fixedly connected to the output shaft of a sixth motor, a second slider is threaded onto the sixth lead screw, the second slider is fixedly connected to the molten deposition nozzle, a second slide rail is fixedly connected to the inner wall of the U-shaped connecting plate, a second slide groove adapted to the second slide rail is opened on the side wall of the second slider, the second slider slides in contact with the second slide rail, and the sixth motor is electrically connected to the controller.

[0019] Preferably, the fused deposition nozzle is connected to a wire feeding mechanism, which is electrically connected to the controller.

[0020] Preferably, the electrochemical deposition nozzle is connected to an electrodeposition solution supply system, the electrochemical deposition nozzle is electrically connected to a deposition power source, and the deposition power source is electrically connected to the controller.

[0021] The present invention has the following technical effects:

[0022] 1. The mask preparation method using fused deposition modeling allows for the layered fabrication of various models as needed. The ultradiscrete fine jet deposition technique ensures a uniform and dense overall deposition model with high deposition efficiency.

[0023] 2. By changing the electrodeposition solution, single-metal multilayer composite deposition or metal alloy deposition can be achieved in the model. Furthermore, the structural morphology and surface quality of the deposition model can be precisely controlled by adjusting the electrochemical deposition parameters.

[0024] 3. By controlling the movement of the electrochemical deposition nozzle and the molten deposition nozzle through the first drive mechanism, the second drive mechanism, the first translation and lifting mechanism, and the second translation and lifting mechanism, the model can be precisely manufactured, the model processing requirements can be met, and the stability of the manufacturing process can be improved.

[0025] 4. The electrodeposition experimental environment is relatively mild, does not require high temperature, high pressure or vacuum conditions, and the experimental equipment is relatively inexpensive. The raw material utilization rate is high and the process is simple, so it has great application prospects in the field of additive manufacturing. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the overall structure of the device of the present invention;

[0028] Figure 2 This is a schematic diagram showing the connection of the first driving mechanism, the second driving mechanism, the first translational lifting mechanism, and the second translational lifting mechanism of the present invention.

[0029] Figure 3 This is a schematic diagram of the first translational lifting mechanism of the present invention;

[0030] Figure 4 This is a schematic diagram of the vertical lifting part of the present invention;

[0031] Figure 5 This is a schematic diagram of the molten deposition process of the present invention;

[0032] Figure 6 This is a schematic diagram of the electrochemical deposition process of the present invention;

[0033] Figure 7 This is a schematic diagram of the internal structure of the electrochemical deposition nozzle of the present invention;

[0034] Figure 8 This is a cross-sectional view of the processing model of the device of the present invention.

[0035] The components include: 1. Worktable; 2. Substrate; 3. Electrochemical deposition nozzle; 4. Fused deposition nozzle; 5. Cantilever system; 7. Controller; 8. Wire feeding mechanism; 9. Deposition power supply; 10. Electrodeposition solution supply system; 201. First lead screw; 202. Second lead screw; 203. First motor; 204. First cantilever; 205. Third motor; 206. Third lead screw; 207. Second cantilever; 208. Fourth lead screw; 209. Fourth motor; 210. Second motor; 301. Fifth motor; 302. Fifth lead screw; 303. First slider; 401. Second slider; 402. Sixth lead screw; 403. Sixth motor. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] Reference Figure 1-8 This invention discloses an integrated electrochemical deposition device for preparing masks based on fused deposition, comprising two parallel support frames, a first driving mechanism fixedly mounted on the top of one support frame, and a second driving mechanism fixedly mounted on the top of the other support frame. The first driving mechanism and the second driving mechanism are connected by a cantilever system 5 through a common thread. A worktable 1 is arranged below the cantilever system 5, and a substrate 2 is arranged on the top of the worktable 1.

[0039] The cantilever system 5 includes a first cantilever 204 and a second cantilever 207 that are parallel to each other. The two ends of the first cantilever 204 and the second cantilever 207 are threadedly connected to the first drive mechanism and the second drive mechanism, respectively. The top end of the first cantilever 204 is movably connected to the fused deposition nozzle 4 through the first translation and lifting mechanism. The top end of the second cantilever 207 is movably connected to the electrochemical deposition nozzle 3 through the second translation and lifting mechanism. The first translation and lifting mechanism and the second translation and lifting mechanism have the same structure.

[0040] The first drive mechanism, the second drive mechanism, the first translation and lifting mechanism, the second translation and lifting mechanism, the electrochemical deposition nozzle 3, and the molten deposition nozzle 4 are electrically connected to the controller 7.

[0041] The controller 7 is connected to an external computer. Using computer 3D modeling software, a mold model of the component to be manufactured by electrochemical deposition is created. Then, slicing software is used to slice the model horizontally, and the corresponding scanned slice data is input into the controller 7. The controller 7 converts the data information into current signals and inputs them to the first drive mechanism and the second drive mechanism, thereby driving the cantilever system 5 to move, thus controlling the movement of the electrochemical deposition nozzle 3 and the molten deposition nozzle 4 in the X, Y, and Z directions.

[0042] In a further optimized scheme, the first drive mechanism includes a first lead screw 201 and a second lead screw 202 that are parallel to each other. The two ends of the first lead screw 201 and the second lead screw 202 are respectively rotatably connected to a first fixed bracket. The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. One end of the first lead screw 201 is fixedly connected to the output shaft of the first motor 203. The end of the second lead screw 202 away from the first motor 203 is fixedly connected to the output shaft of the second motor 210. The first motor 203 and the second motor 210 are electrically connected to the controller 7.

[0043] In a further optimized design, the second drive mechanism includes a third lead screw 206 and a fourth lead screw 208 that are parallel to each other. The two ends of the third lead screw 206 and the fourth lead screw 208 are rotatably connected to a first fixed bracket. The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. One end of the third lead screw 206 is fixedly connected to the output shaft of the third motor 205. The end of the fourth lead screw 208 away from the third motor 205 is fixedly connected to the output shaft of the fourth motor 209. The third motor 205 and the fourth motor 209 are electrically connected to the controller 7.

[0044] In a further optimized design, the second lead screw 202 and the third lead screw 206 are positioned close to each other, the first lead screw 201 is located on the side of the second lead screw 202 away from the third lead screw 206, the fourth lead screw 208 is located on the side of the third lead screw 206 away from the second lead screw 202, the two ends of the first cantilever 204 are threadedly connected to the second lead screw 202 and the third lead screw 206 respectively, and the two ends of the second cantilever 207 are threadedly connected to the first lead screw 201 and the fourth lead screw 208 respectively.

[0045] The second motor 210 and the third motor 205 rotate at the same speed, and the first motor 203 and the fourth motor 209 rotate at the same speed, so that the two ends of the first cantilever 204 and the second cantilever 207 move synchronously at the same speed. This makes the two ends of the first cantilever 204 and the second cantilever 207 evenly stressed and does not produce lateral bending moment, thus making the electrochemical deposition nozzle 3 and the molten deposition nozzle 4 move more smoothly and accurately.

[0046] The scheme is further optimized. The first translation and lifting mechanism includes a horizontal moving part, which is fixedly installed at the top of the first cantilever 204. A vertical lifting part is fixedly connected to the horizontal moving part, and the molten deposition nozzle 4 is fixedly connected to the bottom end of the vertical lifting part.

[0047] The scheme is further optimized. The horizontal moving part includes a fifth lead screw 302. The two ends of the fifth lead screw 302 are rotatably connected to second fixed brackets. The bottom end of the second fixed bracket is fixedly connected to the top end of the first cantilever 204. One end of the fifth lead screw 302 is fixedly connected to the output shaft of the fifth motor 301. The fifth lead screw 302 is threadedly connected to a first slider 303. The vertical lifting part is fixedly connected to the first slider 303. The top end of the first cantilever 204 is fixedly connected to a first slide rail. The first slide rail is located between the two second fixed brackets. The bottom end of the first slider 303 has a first slide groove that matches the first slide rail. The first slider 303 slides in contact with the first slide rail. The fifth motor 301 is electrically connected to the controller 7.

[0048] The scheme is further optimized. The vertical lifting part includes a U-shaped connecting plate. The outer wall of the U-shaped connecting plate is fixedly connected to the first slider 303. The top and bottom walls of the U-shaped connecting plate are rotatably connected to a sixth lead screw 402. The top of the sixth lead screw 402 is fixedly connected to the output shaft of the sixth motor 403. The sixth lead screw 402 is threadedly connected to a second slider 401. The second slider 401 is fixedly connected to the molten deposition nozzle 4. The inner wall of the U-shaped connecting plate is fixedly connected to a second slide rail. The side wall of the second slider 401 is provided with a second slide groove that matches the second slide rail. The second slider 401 slides in contact with the second slide rail. The sixth motor 403 is electrically connected to the controller 7.

[0049] The scheme is further optimized so that the molten deposition nozzle 4 is connected to the wire feeding mechanism 8, and the wire feeding mechanism 8 is electrically connected to the controller 7.

[0050] The filament feeding mechanism 8 provides fused deposition filaments made of PLA (polylactic acid). PLA is a novel biodegradable material made from starch derived from renewable plant resources. It not only possesses excellent mechanical and physical properties but also exhibits good biodegradability, being completely degraded by microorganisms in nature after use, ultimately producing carbon dioxide and water without polluting the environment.

[0051] Polylactic acid has a melting point of 176℃, while the typical heat treatment temperature for metals is between 780-820℃. This allows the demolding and heat treatment processes after deposition to be carried out simultaneously.

[0052] The PLA wire is introduced into the fused deposition nozzle 4 through the wire feeding mechanism 8 and the wire feeding guide roller, and then a workpiece outer contour mask is deposited on the substrate 2.

[0053] The scheme is further optimized so that the electrochemical deposition nozzle 3 is connected to the electrodeposition liquid supply system 10, the electrochemical deposition nozzle 3 is electrically connected to the deposition power supply 9, and the deposition power supply 9 is electrically connected to the controller 7.

[0054] The positive electrode of the deposition power source 9 is connected to the electrochemical deposition nozzle 3, and the negative electrode is connected to the substrate 2. Then, the deposition liquid is input to the electrochemical deposition nozzle 3 by the electrodeposition liquid supply system 10. After being transformed into a superdiscrete fine stream, electrochemical deposition is carried out inside the molten deposition mask to prepare the solid of the workpiece.

[0055] After passing through the electrochemical deposition nozzle 3, the electrodeposition solution is processed into a hyperdiscrete fine stream, which is then sprayed into the prepared mask for deposition. The hyperdiscrete fine stream allows the deposited model to have better uniformity and density. At the same time, it can also greatly improve the efficiency of electrochemical deposition.

[0056] The generation of ultradiscrete fine streams by the electrochemical deposition nozzle 3 is achieved through layer-by-layer averaging of water flow pressure within the nozzle. The electrochemical deposition nozzle 3 has four layers of thin-walled structures filled with micropores. The micropores in the top three layers are initially small, gradually increasing in size outwards along the radial direction, thus ensuring uniform pressure of the electrodeposition solution along the flow direction. Through the combined action of these three layers of micropores, the pressure distribution of the electrodeposition solution along the flow surface is made uniform when it enters the final layer. A series of micropores are uniformly distributed on the surface of the final thin-walled layer to generate ultradiscrete fine streams.

[0057] The electrodeposition solution can be a salt solution containing only one type of metal cation or a mixed salt solution containing multiple types of metal cations.

[0058] The working process of this invention is as follows:

[0059] The device first prepares the first outer contour mask of the required model by melt deposition on the substrate 2. Then, it deposits the first model solid according to the actual material requirements in the gaps inside the mask by electrochemical deposition. Then, it prepares the second mask by layering and slicing on the basis of the first layer, and then deposits the second model solid. This process is repeated until the entire component is deposited. Finally, it removes the solid part produced by melt deposition by heating and heat treatment to obtain the required component.

[0060] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0061] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. An integrated electrochemical deposition device for mask preparation based on fused deposition, characterized in that, It includes two parallel support frames, one of which has a first drive mechanism fixedly mounted on its top end and the other has a second drive mechanism fixedly mounted on its top end. The first drive mechanism and the second drive mechanism are connected by a cantilever system (5) through a common thread. A worktable (1) is provided below the cantilever system (5) and a base (2) is provided on the top end of the worktable (1). The cantilever system (5) includes a first cantilever (204) and a second cantilever (207) that are parallel to each other. The two ends of the first cantilever (204) and the second cantilever (207) are threadedly connected to the first drive mechanism and the second drive mechanism, respectively. The top end of the first cantilever (204) is movably connected to a fused deposition nozzle (4) through a first translation and lifting mechanism. The top end of the second cantilever (207) is movably connected to an electrochemical deposition nozzle (3) through a second translation and lifting mechanism. The first translation and lifting mechanism and the second translation and lifting mechanism have the same structure. The first drive mechanism, the second drive mechanism, the first translation and lifting mechanism, the second translation and lifting mechanism, the electrochemical deposition nozzle (3), and the molten deposition nozzle (4) are electrically connected to a controller (7); The first drive mechanism includes a first lead screw (201) and a second lead screw (202) that are parallel to each other. The first lead screw (201) and the second lead screw (202) are rotatably connected to a first fixed bracket at both ends. The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. The output shaft of the first motor (203) is fixedly connected to one end of the first lead screw (201). The output shaft of the second motor (210) is fixedly connected to the end of the second lead screw (202) away from the first motor (203). The first motor (203), the second motor (210) and the controller (7) are electrically connected. The second drive mechanism includes a third lead screw (206) and a fourth lead screw (208) that are parallel to each other. The first fixed bracket is rotatably connected to both ends of the third lead screw (206) and the fourth lead screw (208). The bottom end of the first fixed bracket is fixedly connected to the top end of the support frame. The output shaft of the third motor (205) is fixedly connected to one end of the third lead screw (206). The output shaft of the fourth motor (209) is fixedly connected to the end of the fourth lead screw (208) away from the third motor (205). The third motor (205) and the fourth motor (209) are electrically connected to the controller (7). The second lead screw (202) and the third lead screw (206) are arranged close to each other. The first lead screw (201) is located on the side of the second lead screw (202) away from the third lead screw (206). The fourth lead screw (208) is located on the side of the third lead screw (206) away from the second lead screw (202). The two ends of the first cantilever (204) are threaded to the second lead screw (202) and the third lead screw (206) respectively. The two ends of the second cantilever (207) are threaded to the first lead screw (201) and the fourth lead screw (208) respectively. The first translational lifting mechanism includes a horizontal moving part, which is fixedly installed at the top of the first cantilever (204). A vertical lifting part is fixedly connected to the horizontal moving part, and the molten deposition nozzle (4) is fixedly connected to the bottom end of the vertical lifting part. The horizontal moving part includes a fifth lead screw (302), with second fixed brackets rotatably connected to both ends of the fifth lead screw (302). The bottom end of the second fixed bracket is fixedly connected to the top end of the first cantilever (204). The output shaft of the fifth motor (301) is fixedly connected to one end of the fifth lead screw (302). A first slider (303) is threaded onto the fifth lead screw (302). The vertical lifting part is fixedly connected to the first slider (303). A first slide rail is fixedly connected to the top end of the first cantilever (204). The first slide rail is located between the two second fixed brackets. A first slide groove adapted to the first slide rail is opened at the bottom end of the first slider (303). The first slider (303) slides in contact with the first slide rail. The fifth motor (301) is electrically connected to the controller (7). The vertical lifting part includes a U-shaped connecting plate. The outer wall of the U-shaped connecting plate is fixedly connected to the first slider (303). The top and bottom walls of the U-shaped connecting plate are rotatably connected to a sixth lead screw (402). The top of the sixth lead screw (402) is fixedly connected to the output shaft of a sixth motor (403). A second slider (401) is threaded onto the sixth lead screw (402). The second slider (401) is fixedly connected to the molten deposition nozzle (4). A second slide rail is fixedly connected to the inner wall of the U-shaped connecting plate. A second slide groove adapted to the second slide rail is opened on the side wall of the second slider (401). The second slider (401) slides in contact with the second slide rail. The sixth motor (403) is electrically connected to the controller (7).

2. The integrated electrochemical deposition apparatus for mask preparation based on fused deposition according to claim 1, characterized in that, The molten deposition nozzle (4) is connected to a wire feeding mechanism (8), which is electrically connected to the controller (7).

3. The integrated electrochemical deposition apparatus for mask preparation based on fused deposition according to claim 1, characterized in that, The electrochemical deposition nozzle (3) is connected to the electrodeposition liquid supply system (10), and the electrochemical deposition nozzle (3) is electrically connected to the deposition power supply (9), which is electrically connected to the controller (7).

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