带有声子晶体的横向激励体声波谐振器及制备方法
By introducing a phononic crystal substrate with a submicron lattice constant into the transverse exciter acoustic resonator, the problems of poor mechanical reliability and heat dissipation performance were solved, and the performance of the device was improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- WUHAN UNIV
- Filing Date
- 2022-09-20
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional transverse exciter acoustic resonators (XBARs) suffer from poor mechanical reliability and heat dissipation. Furthermore, the performance of the resonator, especially the quality factor Q, decreases significantly after the addition of a substrate.
Introducing a phononic crystal substrate with a submicron lattice constant into a transverse exciter acoustic resonator, by setting a phononic crystal substrate on a piezoelectric layer and opening grooves inside it, and depositing phononic crystal scatterers in the grooves, improves the thermal conductivity and mechanical reliability of the device.
While maintaining a quality factor and electromechanical coupling coefficient similar to traditional devices, the mechanical reliability and heat dissipation performance of the devices are significantly improved.
Smart Images
Figure CN115514340B_ABST